FEI Quanta FEG 250, Quanta FEG 450, Quanta FEG 650 User's Operation Manual

The Quanta FEG

250 / 450 / 650

User Operation Manu al

5th Edition

20 August, 2010

Copyright © 2010

FEI Company

All rights reserved

Trademark Acknowledgment s

FrameMaker™ is a trademark of Adobe Systems Incorporated.

Microsoft® is a registered trademark of Microsoft Corporation.

Windows XP™ is a trademark of Microsoft Corporation.

Production Acknowledg m ent s

This manual was produced using FrameMaker™ document publishing software

Technical Authors

Martin Dufek

TABLE OF CONTENTS

Chapter 1 Preface

User Manuals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

The User Safety Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

The User Operation Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

How to Use this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

Chapter 2 System Overview

How Quanta FEG SEM Works . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Image Viewing and Capture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Positioning of the stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

System Layout of Quanta FEG. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Software Interface Elements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Hardware Interface Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Quanta FEG Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

Chapter 3 System Operation

Quanta FEG Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Vacuum Statuses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Pump button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Vent button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Vacuum Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

High Vacuum (HiVac) Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Low Vacuum (LoVac) and ESEM Modes . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Quanta FEG System States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Power Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9

Chapter 4 Software Control

Other Software and Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Software Interface Elements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Icons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Tool-Tips. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Pull-down Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Command Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

List Boxes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Property Editors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Edit Boxes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Radio Buttons / Check Boxes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Adjusters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

2D Controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Dialogues . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Tabs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Progress bars . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

xT microscope Server Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

xT microscope Control Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

The Title Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

The Menu Bar. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

C-i

The Toolbar. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20

Image Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

Pages and Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-22

Preferences… Dialogue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29

FEI User Management Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38

Control possibilities. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38

FEI Account Administrators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38

Account Logging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-40

Entering Commands in Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-41

Using the Mouse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-41

Using the Keyboard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42

Chapter 5 Operating Procedures

Specimen Preparation and Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Needed items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Natural specimen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Coated Specimen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Mounting the Specimen to the Holder. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3

Inserting / Exchanging a Specimen and / or a Detector . . . . . . . . . . . . . 5-3

Obtaining an Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Operation Pre-Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

Selecting Vacuum Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

Spot Size. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

Obtaining an Image on Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

Optimising an Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

Principles of SEM imaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

Magnification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

Scan Speed and Filtering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

Contrast and Brightness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

Focusing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

Correcting Astigmatism. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

Pressure and Working Distance (WD) . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

Digital Imaging Enhancement / Imaging Mixing / Coloring . . . . . . . . . . 5-12

Detector Types and Usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

Detector Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

Everhart Thornley Detector (ETD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

Backscattered Electrons (BSED)

and Gaseous Analytical (GAD - optional) Detectors. . . . . . . . . . . . . . . 5-15

Large Field Detector (LFD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

The CCD camera . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

Gaseous Secondary Electron Detector (GSED). . . . . . . . . . . . . . . . . . 5-18

PLA Cones . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

Discharges between the Gaseous Detectors and the Sample . . . . . . . 5-20

Obtaining image Procedure for Gaseous Detectors . . . . . . . . . . . . . . . 5-20

Capturing and Handling Single Image. . . . . . . . . . . . . . . . . . . . . . . . . 5-21

Image types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

Saving / Opening / Printing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

Recording Movies (Saving Multip le Images). . . . . . . . . . . . . . . . . . . . 5-23

C-ii

Movie TAB Preferences Dialogue. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-23

Movie Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

FEI Movie Creator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26

Playing a Movie . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28

Measurement and Annotation Functions . . . . . . . . . . . . . . . . . . . . . . 5-29

Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

Chapter 6 Alignments

Quanta FEG System Alignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

Common Rules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

Buttons and Control Elements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Final Lens Aperture Strip Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

Aligning Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

1 - Gun Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

2 - Stigmator Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

3 - Stage Rotation Centre . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

5 - Emitter Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

94 - CCD Camera Alignment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

154 - Water Bottle Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Chapter 7 Stages

Stages Types and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2

Quanta FEG 250 – 50 mm Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2

Quanta FEG 450 / 650 – 100 / 150 mm Stage . . . . . . . . . . . . . . . . . . . . 7-3

Eucentric Position. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4

Stage movement limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6

Software Stage Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7

Map tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7

Coordinates tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9

Tilt tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

Navigation Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-10

Stage Related Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

Stage Movements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-11

Specimen Alignment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14

Scan Rotation (Shift + F12) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-18

Chapter 8 Maintenance and T r oubleshooting

Cleaning Procedures Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2

List of Applied Cleaners . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2

Cleaning Column Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2

Materials and Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

The Standard Insert. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4

Removing and Disassembling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4

Housing Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

Platinum Apertures Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5

Platinum Apertures Installing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6

Aperture Strip Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

Removing the Aperture rod. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

C-iii

Replacing the Aperture Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8

Replacing the Aperture rod. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8

Gaseous Detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

Cleaning the GSED / LFD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

Cleaning the GBSD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

Stage maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10

Stage mechanics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10

Specimen Holders. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10

Refilling the Water Bottle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-11

Pre-Vacuum Pump Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-12

Periodic check. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-12

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13

Diagnostics Auto Report. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15

Simple TAD. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

Chapter 9 System Options

Manual User Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2

Joystick . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2

Automatic Aperture System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

6 - Aperture Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Nav-Cam . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5

Capturing Navigation Image Procedure . . . . . . . . . . . . . . . . . . . . . . . . . 9-5

401 - Nav-Cam AutoBrightness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6

Optional Detectors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-7

Gaseous Back scattered Electron Detector (GBSD) . . . . . . . . . . . . . . . 9-7

In Column Detector (iCD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8

Retractable Detectors Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-8

Scanning Transmission Electrons Microscopy Detector (STEM I) . . . . . 9-9

Annular Scanning Transmission Electrons Microscopy

Detector (STEM II) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-11

Low-voltage High-contrast Detector Lens Mounted / Retractable (vCD) 9-14
Directional Backscattered Detector –

Concentric Backscattered Detector (CBS) . . . . . . . . . . . . . . . . . . . . . . 9-15

ESEM & Gaseous Analytical Detector . . . . . . . . . . . . . . . . . . . . . . . . . 9-16

Quad Backscattered Electrons Detector (Quad BSED) . . . . . . . . . . . . 9-16

Photo Multiplier Tube / Backscattered Electron Detector

Autrata, Centaurus (PMT-BSE). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-17

Energy Dispersive X-ray (EDX) Analysis. . . . . . . . . . . . . . . . . . . . . . . 9-18

The Support PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-18

High Vacuum EDX Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-18

LFD EDX Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

GSED EDX Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-19

GAD EDX Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-20

STEM EDX Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-20

Cooling Stage / Waterless Cooling Stage . . . . . . . . . . . . . . . . . . . . . . 9-21

Cooling Stage Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-21

Cooling Stage Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24

Software Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-27

C-iv

Cooling Stages Basic Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-30

Water Cooled Temperature Stage Operation Termination . . . . . . . . . . 9-32

Wet STEM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-33

Wet STEM Basic operations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-34

Heating Stage 1000 °C / Heating Stage 1500 °C . . . . . . . . . . . . . . . . . 9-35

Heating Stages Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-35

Heating Stage Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-40

Software Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-41

Heating Stages Basic Operations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-44

HS Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-48

CryoCleanerEC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-50

Parts and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-50

CryoCleaner Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-51

Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-53

Spare Vessel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-53

Plasma Cleaner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-54

Sample Cleaning Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-55

104 - Plasma Cleaning Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-56

Quanta Morphologi . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-57

Sample preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-57

Image acquisition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-58

Recommended settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-59

Symmetrical Low Vacuum Detector (SLVD) . . . . . . . . . . . . . . . . . . . . . 9-60

Mapping tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-61

Image Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-62

Measurement Accuracy Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-62

Remote Imaging. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-65

Connection to the Microscope PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-65

Microscope PC's desktop Sharing . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-66

Controlling the microscope remotely . . . . . . . . . . . . . . . . . . . . . . . . . . 9-66

Beam Deceleration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-67

Detection Principles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-67

Stage Modification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-68

Beam Deceleration Applications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-69

Beam Deceleration Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-69

Specimen Holder Kit Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-71

Location positions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-71

Older Interface Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-72

Interface pillar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-72

Multi-Holders. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-73

Polished Mount Holders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-74

Clamp Stubs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-74

Torx Drivers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-74

Quick Loader . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-75

General description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-75

Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-78

Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-79

C-v

C-vi

1

PREFACE

User Manuals

THE USER SAFETY MANUAL

provides important information required during an operation and a
maintenance for a product and personal safety. Be sure to read this
document (which is delivered as the PDF file and in the printed form
also) at least.

THE USER OPERATION MANUAL

for your Scanning Electron Microscope is divided into the following
chapters:

1. PREFACE
provides information about the manual structure.

2. SYSTEM OVERVIEW
gives the basics about your system capabilities.

3. SYSTEM OPERATION

gives the basics about the vacuum system and procedures for
several system on/off modes, including Log On/Off, Standby Mode,
Overnight Mode, Complete Shutdown, and Emergency Shutdown.

4. SOFTWARE CONTROL

describes the interface that controls system operation, giving the
function of each tool, menu item and control page.

5. OPERATING PROCEDURES

gives procedures for how to use the system.

6. ALIGNMENTS
explains how to align the column and stage to achieve optimal
performance.

7. STAGES
gives a full description of the stage functionality and its software
control.

8. MAINTENANCE
gives step by step cleaning and mainte nan ce pr ocedu re s.

9. SYSTEM OPTIONS

explains relevant options that are integrated into or accessory
to the system.

1-1

Preface: How to Use this Manual

How to Use this Manual

This manual is available in two forms, the electronic PDF file and the
printed form (option).

It is recommended to read this manual before operating any of the
microscope function. Most importantly, you should locate the topics
necessary to operate the microscope in the proper way to safely
achieve the best results.

In the electronic PDF file you can take advantage of the searching and
navigation possibilities offered by this file format. In the printout the
following conventions are observed to be of help:

• You can search for the information in the main table of contents at
the beginning of the User’s manual, where tables and figures
(excluding explanatory ones) are also listed.

• Major headings have been hung in the left column to help you scan
for the basics within a chapter. That column provides space for
some explanatory figures and for your own notes as well.

• Some software functions use short-cuts, which are given beside
the heading in the brackets (for instance: Save (Ctrl + S)) and in
the summary table available from the Help menu.

• Pages are numbered by this way:

[Chapter No.]-[Page No.] within the Chapter. Instead of
[Chapter No.] you can find an abbreviation C, which means

content pages.

• Tables and figures (excluding explanatory ones)
are numbered within each chapter in this way:

FIGURE [Chapter No.]-[Figure No. within the Chapter]
TABLE [Chapter No.]-[Table No. within the Chapter]

• A reference to the specific element is highlighted in bold and it
guides to its particular UI placement. For instance:
“Clear the Stage module / Coordinates tab / Z coordinate check
box.”

1-2

2

SYSTEM OVERVIEW

The Quanta FEG Scanning Elec tron Mic r os co pe (SEM) produces
enlarged images of a variety of specimens, achieving magnifications
of over 100 000× providing high resolution imaging in a digital format.
This important and widely used analytical tool provides exceptional
field of view, minimal specimen preparation, and the ability to combine
the technique with X-ray microanalysis.

How Quanta FEG SEM Works

There are four main components of the microscope:

• Electron source
The electron beam is emitted within a small spatial volume with a
small angular spread and selectable energy.

• Lens system
The beam enters the lens system consisting of several
electromagnetic lenses and exits to hit the specimen surface.

• Scan unit
The scan generator signal, fed to the deflection systems, moves
the beam in a raster pattern over the specimen area. The electrical
voltage changes as it scans, which provides serial information of
the specimen surface. This signal, modulated by the detection
system signal, produces the onscreen image.

• Detection unit
Electrons striking the specimen react with its surface producing
three basic types of signal: back scatter electrons, secondary
electrons and X-rays. The detection system picks up these signals,
converts them into an amplified electrical signal which is sent to
the control PC and displayed on the monitor.

2-1

System Overview: How Quanta FEG SEM Works

ELECTRON GUN

CONDENSER

LENS(ES)

SCAN GENERATOR M

FINAL LENS

DEFLECTION

SYSTEM

SCAN UNIT

SPECIMEN

DETECTION UNIT

D

E

T

E

C

T

O

R

FILAMENT PINS

EMITTER

SUPPRESSOR

LENS SYSTEM

FIGURE 2-1 SEM SCHEMATIC OVERVIEW

VACUUM SYSTEM

The entire electron path from gun to specimen must be under vacuum
so that the electrons do not collide with air molecules. The Quanta
FEG has 3 operating vacuum modes to deal with different sample
types:

• High Vacuum (HiVac)

• Low Vacuum (LoVac)

• ESEM
Various levels of vacuum are necessary, so a Turbo Molecular Pump

(TMP) backed by a rotary pre-vacuum pump (PVP), obtains the
necessary specimen chamber pressure.

In the gaseous modes (LoVac, ESEM) the column is under lower
pressure than the specimen chamber, where the pressure ranges
from 10 to 2600 Pa (0.1 to 20 Torr), with auxiliary gas up to 4000 Pa
(30 Torr). Either mode can use water vapours from a built-in water
reservoir, or an auxiliary gas which is supplied by the user and
connected to a gas inlet provided for this purpose. Observation of
outgassing or highly charging materials can be made using one of
these modes without the need to metal coat the sample, which would
be necessary for conventional HiVac mode.

Specimen exchanges take place through a chamber door which
exposes the specimen stage when opened. Exchange time takes a
few minutes. Software and interlocks protect the system against the
damage and users against the injury.

™

2-2

System Overview: How Quanta FEG SEM Works

IMAGE VIEWING AND CAPTURE

Because the amplified detector signal is displayed synchronously with
the beam scanning, there is a correspondence between the
brightness of an image point on the monitor screen and the signal
detected at corresponding point on the specimen.

Magnification is the ratio of the size of the viewing monitor screen to
the size of the area scanned on the specimen. Increased
magnification is achieved by reducing the size of the area scanned on
the specimen.

POSITIONING OF THE STAGE

A choice of computer-controlled high-accuracy multi-axis stages
offers precision specimen manipulation and automation for overall
spatial orientation on highly repetitive or extremely irregular samples.

FIGURE 2-2 QUANTA FEG 250

2-3

System Overview: System Layout of Quanta FEG

System Layout of Quanta FEG

The standard layout of the Quanta FEG 250 / 450 / 650 system is
based around a dedicated microscope controller.

The user interface devices are peripherals to the microscope
controller, either software or hardware.

FIGURE 2-3 QUANTA FEG STANDARD LAYOUT SCHEME

SOFTWARE INTERFACE ELEMENTS

The software control contains graphic applications within Windows
XP™ operating environment. xT microscope Server starts and stops
the basic microscope functions. It makes possible to open and close
the xT microscope Control software (UI – user interface or
sometimes xTUI in the dialogue boxes) which controls system
functions including detection and analysis, scanning, image gathering,
manipulation and output, magnification, pressure, etc.

All user account levels created via FEI User Management software
ensure for the particular users admission to both the operating system
Windows XP and the xT microscope Control software. The hierarchy
of user account levels consists of the following:

• FEI Account Administrator

• FEI Supervisor Users

• FEI Microscope Users

• FEI Non-active Users
See Chapters 3 and 4 for more information on Logging on and

Logging off, the start-up of the system and all the features of the user
interface elements.

HARDWARE INTERFACE ELEMENTS

2-4

The system is computer controlled and as such has a microscope
controller which must be turned on to operate the microscope by
means of the software. The control software facilities and data are
displayed graphically on the LCD monitor and are superimposed
around and on the image. To control software utilities one can use a
keyboard, mouse, joystick (option) or the Manual User Interface
(option).

System Overview: System Layout of Quanta FEG

System Control Panel

The console / system power is activated by pressing the front panel /
green power button located on the microscope console. This
switches the sub-systems on and allows the interface and
communication with the microscope controller. Most of the functions
are activated via the software control.

FIGURE 2-4 SYSTEM CONTROL PANEL POWER BUTTON

Stage Controls

The stage is software / manually controlled and can be oriented with
reference to five axes: X, Y, Z, Rotation and Tilt. Some stage types
have only manually controlled Tilt (see Chapter 7).

FIGURE 2-5 HARDWARE STAGE 250 / 450 / 650 CONTROLS

2-5

System Overview: System Layout of Quanta FEG

Final Lens Aperture Strip

The strip is made from a Mo coated Si. Either manual (numbered
click-stop mechanism positions) or Automatic Aperture System (AAS)
motorized software-control (option - see Chapter 9) enables to choose
the aperture most applicable to your imaging needs (see Chapter 5).

TABLE 2-1 APERTURE SIZES AND THEIR USE

Recommended use

No. Standard Option Option

1 1000 µm 1000 µm 1000 µm Service Alignment (hole in frame)
2 - - ­3 50 µm 100 µm 30 µm High current applications
4 40 µm 50 µm 30 µm X-ray mapping of low-Z elements at low voltages
5 30 µm 40 µm 20 µm General imaging or X-ray analysis
6 30 µm 30 µm 15 µm Dynamic experiments
7 20 µm 30 µm 10 µm High resolution imaging

The left hand turn of the large ring moves the aperture holder
outwards towards the larger aperture. After the aperture change, it is
necessary to tune its position by using the inner knob and the one on
the right side, controlling horizontal plane fine movements (see
Chapter 6).

(related to Standard sizes)

FIGURE 2-6 FINAL LENS APERTURE STRIP CONTROL KNOB

WARNIN G!

Aligning the final lens aperture is a mechanical process. It is
possible to misalign the aperture strip and obscure the beam
from reaching the sample. Adjustment should only be done by
those with the understanding of how to proceed. The aperture
holes edges cleanness is also very important (see Chapter 8).

2-6

System Overview: Quanta FEG Options

Quanta FEG Options

A range of hardware and software is available as options for the
system. Contact your FEI sales representative for more up-to-date
information on system options.

•The Support PC connects your work space to the network and
can hold some other software utilities.

•The Manual User Interface (MUI) provides direct manual control
of microscope parameters such as focus, magnification, contrast,
brightness, beam shift and Stigmator.

•The Joystick brings another possibility to control the basic stage
movements.

•The Cooling Stage enables to image and analyse specimens
(cooled between 0 and 10 °C) of very diverse nature at relative
humidity conditions up to 100% (typical chamber pressures
required are in the range 300 - 1000 Pa). Humidity experiments
could characterize the sample morphology and phase distribution.
The stage is cooled by water.

•The Waterless Cooling Stage uses copper belt to detract heat
excess.

•The 1000 °C He ati ng S tage is used to view heated samples (up to
1000 °C) and record in-situ morphological changes.

•The

•The Cooling / Heating Stage control kit

•The Feed-through Port Relocator

• 52-pin Electrical Feed-through

• 7-pin Electrical Feed-through

•The Compressor 115 V, 50/60 Hz with 4-liter Tank

•The Compressor 230 V, 50/60 Hz with 4-liter Tank

•The Thermo Neslab Water Cooler 50 Hz

•The Thermo Neslab Water Cooler 60 Hz

•The Acoustic Enclosure for Pre-vacuum Pump

•The Specimen Holder Kit

•The Electrostatic Beam Blanker

•The Keithley picoamper meter

•The Picoamper meter Switch Box

•The Mains Matching and Isolation Transformer provides a

•The CryoCleanerEC + spare vessel – anti-contamination device

•The Plasma Cleaner – the sample / chamber plasma cleaning

•The Video Hard Copy Unit

• 5 paper rolls for video hard copy unit

•The WetSTEM detector enables in connection with the Cooling

•The Gaseous Back-Scatter Electron Detector (GBSD) allows

1500 °C Heating Stage

This option includes two 1500 °C and one 1000 °C heating stages.

galvanic isolated AC-regulated power source with the 115 / 230 V,
50 / 60 Hz output.

device

Stage to observe wet samples in a STEM mode.

BSE imaging in ESEM™ mode, i.e. at a high chamber pressure (it
uses a gas amplification to compensate a signal loss). Other back­scattered electron detectors (solid-state or scintillate-type BSE
detectors) typically work with a pressure up to 100 Pa, but tend to
get very noisy at this condition.

enables to heat samples up to 1500 °C.

2-7

System Overview: Quanta FEG Options

• The small diameter, low voltage Back-Scatter Electron Detector
(BSED)

• The low-voltage, High-contrast Detector (vCD)

•The Gaseous Analytical Detector (GAD) is the low voltage
BSED with an additional X-ray cone with a 500 µm Pressure
Limiting Aperture which seals to the objective pole piece.

• The solid state STEM I detector allows detection of electrons
transmitted through the sample. Regular voltage range is from
30 kV down to around 5 kV, which is of course dependent on the
sample thickness.

•The Annular STEM II detector

• quad BSED

• InColumn detector (ICD)

•The Centaurus Detector with back-scatter tip is a retractable,
scintillate-type BSE detector. Atomic number discrimination allows
a resolution better than 0.1 Z (when Z = 30).

The Cathodoluminiscence Tip for the Centaurus Detector
enables to convert it to a cathodoluminiscence detector.

• Autrata BSED

• ESEM GAD needle detector

•The

Beam Deceleration

improves the microscope resolution at low
accelerating voltages and enables to detect electrons heading
nearly parallel to a surfa ce w hich ac cen tua tes a surfa ce roughness.

•The WDX Completion Kit relocates the GSED detector connector
(bracket) and GSED pre amplifier bias feed-through to another
position in the SEM specimen chamber, to avoid geometrical
conflicts with the wavelength spectrometer.

•The Quick Loader

•The UPS

•The Nav-Cam

•The Automatic Aperture System offers the comfort of a
motorized final lens strip aperture exchange. The alignment
procedure provides a high precision of the setting.

•The Strip Aperture: 30 / 30 / 40 / 50 / 100 / 1000 µm

•The Strip Aperture: 10 / 15 / 20 / 30 / 30 / 1000 µm

•The Strip Aperture: 20 / 30 / 30 / 40 / 50 / 1000 µm

• The set of three apertures 400 µm, 3 mm diameter

• The set of two apertures 1250 µm, 3 mm diameter

•The Remote Control / Imaging

•The SIS Scandium Image software

•The SIS Scandium desktop license

•The SIS Scandium webRacer allows regular users with ID /
passwords (provided by the supervisor) to view and retrieve
worldwide database data, using any internet browser and any
computer system (PC, Apple, Sun…).

•The Quanta Morphologi is a method for precise determination of
size and shape of submicron particles dispersed in a dilution.

•The Basic SEM Course

•The Advanced Course SEM

•The On-site Training / Support

2-8

3

SYSTEM OPERATION

This chapter describes:

• The Quanta FEG vacuum system
– Vacuum status and relevant actions (Pump, Vent)
– Vacuum modes and relevant actions (HiVac, LoVac, ESEM)

• Quanta FEG System States
– Start up procedure generally
– Shut down procedure generally
– Emergency off (EMO)
– Power off

3-1

System Operation: Quanta FEG Vacuum System

Legend:

ABV . . . .Auxiliary Bypass Valve

AGV . . . .Auxiliary Gas Valve

BPV . . . . .By Pass Valve

BTG . . . .BaraTron Gauge

CCG . . . . Cold Cathode Gauge

CIV . . . . .Column Isolation Valve

EBV . . . . .Environmental Backing Valve

ChEV . . .Chamber Evacuation Valve

ChIV . . . . Chamber Isolation Valve

IGP . . . . . Ion Getter Pump

NVC . . . .Needle Valve Control

PVP . . . . .Pre Vacuum Pump

SIV . . . . .Servo Isolation Valve

TMP . . . .Turbo Molecular Pump

TVV . . . . .Turbo Venting Valve

VV . . . . . .Venting Valve

WBV . . . .Water Bottle Valve

Quanta FEG Vacuum System

Within the system there are three main vacuum sections:

•Gun

• Column

• Specimen Chamber
Both Column and Specimen Chamber sections are vented for a

sample exchange. In operation the Gun and Column sections are
always under the high vacuum. The Specimen chamber is at the
pressure required for the given mode (HiVac / LoVac / ESEM).

All valve and pump operations are fully automatic.
FIGURE 3-1 THE QUANTA FEG VACUUM SYSTEM

3-2

System Operation: Vacuum Statuses

Vacuum Statuses

The vacuum status controls are in the Vacuum module. The Pump
button starts pumping for the operating pressure and the Vent button
starts venting for a sample or detector exchange.

In the Status module at the bottom of any page the actual vacuum
status is represented by the colored icon, which may have three
possible colors with the following meaning:

• Green: PUMPED to the desired vacuum mode

• Orange: TRANSITION between two vacuum modes
(pumping / venting / purging)

• Grey: VENTED for sample or detector exchange

PUMP BUTTON

When the Pump button is clicked and the status is Vented, or when
changing vacuum mode, the target pressure that the system pumps to
depends on the selected vacuum mode. The Pump button is
highlighted in and not accessible.

For the High Vacuum the system achieves the lowest pressure
possible. For the Low Vacuum or ESEM it achieves the pressure
specified in the Vacuum module Chamber Pressure adjuster. The
purge function can be defined in the Preferences… / ESEM dialogue.

When the Pump button is clicked and the status is Transition
(venting), the venting procedure stops and the system immediately
starts to pump to the actually selected vacuum mode.

VE NT BUTTON

When the Vent button is clicked and the status is Vacuum, the
confirmation dialogue appears. After confirmation, the system
switches off the detectors voltages, high voltage supplies, vacuum
pumps and uses the appropriate valves to vent the system, with the
use of an air or a gas (the dry Nitrogen typically) brought to the
Nitrogen Inlet. The Nitrogen is recommended to obtain lower
pressure for high resolution imaging in HiVac mode.

The Vent button is highlighted in and not accessible. After a specified
venting time the venting valve closes and the vacuum status should
indicate Vented. The button is enabled again.

When the Vent button is clicked and the status is Transition
(pumping), the dialogue appears. After confirmation, the pumping
procedure stops and the venting procedure starts.

When the Vent button is clicked and the status is Vented, the
dialogue appears. After confirmation, the venting valves re-open for
the specified venting time and then the valves close.

3-3

System Operation: Vacuum Modes

Vacuum Modes

The vacuum mode radio buttons in the Vacuum module / Mode area
are used to select the instrument target operating mode when a

Pump sequence is initiated. The vacuum system recognizes High
Vacuum, Low Vacuum and ESEM modes.

HIGH VACUUM (HiV ac) MODE

The high vacuum condition is common throughout the column and
specimen chamber. The typical pressure value is within the order from
10

-2

to 10

-4

Pa.

LOW VACUUM (LoVac) AND ESEM MODES

In these modes, the column section is under the lower pressure than
the specimen chamber where the pressure ranges from 10 to 130 Pa
(LoVac) or from 10 to 4000 Pa (ESEM). These modes uses water
vapour from a built-in water reservoir or a gas from an auxiliary gas
inlet.

The system automatically detects the gaseous detector installed and
offers a relevant vacuum mode in the Vacuum / Mode module.

When Low Vacuum / ESEM mode is entered from ESEM / Low
Vacuum mode by selecting an appropriate mode radio button,
nothing happens unless there is a different gas type being used for
the two modes. In this case, the appropriate gas type is selected.

When Low Vacuum / ESEM mode is entered from High Vacuum
mode / Vented status by selecting an appropriate mode radio button,
the system prompts the user with the PLA Configuration dialogue
(this happens only for the first time after a particular Vent procedure).
It is followed by a new mode initializing dialogue and then by the
manual EBV open dialogue.

Pressure

The Chambre Pressure adjuster is used to set and di spla y the t arg et
chamber pressure. Pascal, Torr or Millibar units are available and can
be selected in Preferences… / Units (see Chapter 4).

When the system is in Low V acuum or ESEM mode and the Chamber
Pressure value is changed, the pressure automatically changes to
the new value. When the system is in any other state and the
chamber pressure value is changed, the new value is used as the
target pressure when the system starts pumping to a Low Vacuum or
ESEM mode again.

The actual specimen chamber pressure is displayed in the Status
module / Chamber Pressure: field.

Pressure Limiting Aperture (PLA) and Cones

The maximum allowed specimen chamber pressure in LoVac or
ESEM mode is determined by the size of the PLA and a gas type.

The PLA Configuration dialogue prompts to inform the system about
the used PLA (in case it is not a part of a dedicated gaseous detector)
when pumping or switching to LoVac or ESEM mode. Along with a
gas type, this information sets pressure limits and rates for pressure
changes.

3-4

System Operation: Vacuum Modes

Clicking the OK button after selecting an appropriate pole piece radio
button (cone or a detector with an integrated PLA) informs the system
that it is mounted on the lens insert. The system starts pumping to the
LoVac mode. From that point on, this information is automatically
used until the system is vented again, when the PLA is set to
“unknown”. Clicking the Cancel button leaves the system in its actual
status mode (Pumped or Vented).

Using Gas

ESEM and Low Vacuum modes allow the user to image samples in a
gaseous environment, which can be selected in the drop down list
box:

• the Water vapour from a built-in water reservoir located in the back
part of the microscope console,

Note:
On occasion the water reservoir needs to be filled (see Chapter 8).

• the gaseous environment supplied by the user via the Auxiliary
inlet placed on the back of the console.

Caution!

Maximum overpressure for Auxiliary gas and Nitrogen inlets is
10 kPa (0.1 atm). The Nitrogen inlet is used only for venting the
chamber with air or the nitrogen preferably.

When using a particular pressure limiting aperture, there are pressure
limits for different gases.

TABLE 3-1 MAXIMAL CHAMBER PRESSURE [PA (TORR)]

UNDER DIFFERENT GASEOUS ENVIRONMENT

Working Gas

500 µm Aperture 1000 µm Aperture

Water - H2O 2 700 (20) 750 (5.5)
Nitrogen - N

2

4 000 (30) 750 (5.5)

Air
Carbon Dioxide - CO
Nitrogen Dioxide - NO

2

2

Helium - He 2 000 (15) 500 (4)
70 % He + 30 % H
Argon - Ar
CxHy

**)

*)

2

1 500 (12) 400 (3)

1 000 (7) 200 (1.5)

4 000 (30) 750 (5.5)

Note:
*) Combustible gases (acetylene for instance) must always be used
with respect to safety issues.
**) The argon use should be minimized to a short time, because the
IGP’s are not optimized for pumping of it at all.

3-5

System Operation: Vacuum Modes

Purging

During this procedure the specimen chamber is automatically pumped
down to a lower pressure to remove the old gas, then it is flooded with
the new one (selected in the Vacuum / Mode module) to a higher
pressure. This takes place several times, until the old gas is removed
and the chamber is mostly filled with the new gas.

This is applied when the system is:

• pumping to the LoVac / ESEM mode from the vented status.

• in the LoVac / ESEM mode and the gas type is changed.

• in the LoVac / ESEM mode and the Purge button is pressed.
There may be certain applications (e.g., working with a sensitive

sample) where the operator needs to change the purging parameters.
They can be set up, started and terminated in the Preferences…
dialogue / Low Vacuum tab (see Chapter 4).

Note:

This procedure can take several minutes, according to Preferences
setting. Wait until Vacuum status indicates Vacuum, because
detectors do not start operation till desired pressure is reached.

3-6

System Operation: Quanta FEG System States

Quanta FEG System States

There are several system states:

0. Complete Shutdown – service and emergency reasons

1. Shutdown – when not using the system for more than 10 days

2. Standby – when not using the system for more than 1 day

3. Overnight – when not using the system overnight

4. Full Operation – when working

TABLE 3-2 STARTUP PROCEDURE GENERALLY

System St ate Action

0. Complete
Shutdown

1) Connect the power cord to the microscope

console, a compressed air and a nitrogen inlet
(optional) for venting and cooling. Interlocks
prevent the vacuum system from operating if any
of these are not present (with the exception of
nitrogen inlet).

1. Shutdown 2) Push the power button on the microscope front
control panel.

2. Standby 3) Switch on the PC. The operating system

(

a)

Windows xP loads and displays the appropriate

icons on the monitor desktop.

4) Double-click the xT microscope Server icon to
start the software (all seeming LEDs should be
green).

5) Click the Start icon to start the server. W ait until
all dialogues are fully functional.

3. Overnight 6. Click the Start UI button to start the xT
microscope Control software. The main window
appears behind the XTUI Log On dialogue.

7. Enter your Username and Password

(a)

. When
the xT microscope Control software is available,
the Beam Control page displays on screen.

8. Switch on the Emitter (see Chapter 6).

9. Click the Vacuum module / Pump Button. Wait
for the Pumped status.

10. Click the Column module / Beam On button.

(must be yellow).

4. Full
Operation

11. Select a quad, a detector and beam

parameters and resume the quad.

Note:

a)

Once you have your FEI Microscope user (or Supervisor)

account set up via FEI User management software by FEI Account
Administrator (see Chapter 4), you can use your name and

password to access both Windows xP system and the
xT microscope Control software. (Take note of the case sensitive
passwords necessary at Windows xP and xT microscope Control
server Log On points. A password is advisable for logging on to
protect individual settings and results.)

3-7

System Operation: Quanta FEG System States

TABLE 3-3 SHUT DOWN PROCEDURE GENERALLY

System St ate Action

4. Full
Operation

1. Click the Column module / Beam On button

(must be grey).

2. Click the Vacuum module / Vent button. Wait for
the Vented status. Remove your sample if needed
and remove the Cooling stage if installed.

3. Click the Vacuum module / Pump
pump to the High Vacuum.

If you want to shutdown the microscope, bypass
steps 3 - 8.

3. Overnight 4. Select
present user and to provide the Log On dialogue
for entering another one.

5. Switch off the monitor.

2. Standby

(b)

6. Click the Stop button to stop the
xT microscope Server software.

7. Exit xT microscope Server (right-clicking) and
Windows xP.

8. Switch Off the PC and the monitor.

1. Shutdown

9. Switch off the Emitter (see Chapter 6).

10. Click the Shutdown button to shutdown the
console and to stop the xT microscope Server.

11. Exit xT microscope Server software (right-
clicking) and Windows xP.

12. Switch Off the PC and the monitor.

(c)

button to

(a)

the File menu / Log Off… to log off the

(e)

0. Complete

Shutdown

13. Disconnect the power cord and any other

(d)

optional input / output if used.

Note:

a)

Waiting for a new user leaves the status of the xT microscope

Control software non-operational and only the xT microscope
Server software is active. Therefore changing the user does not

require Logging off / Logging on at Windows xP level, but just
restarting the UI level.

b)

The power plug should not be disconnected. The system can be left
in this state if electrical power is supplied to the instrument because
the pumps are running and pumping the column.

c)

It is strongly suggested to always leave the chamber in HiVac mode
when not being used. When the sample chamber is left in the LoVac /
ESEM m ode, water vapour is likely to accumulate in it, PVP lifetime
decreases and the water reservoir or gas cylinder empties prematurely.

d)

The Complete shutdown procedure brings the system to the non­powered state, where the vacuum in the column area is no longer
supported by running pumps. All valves are closed, and the electron
column and specimen chamber areas are vented.
This should only be carried out by a FEI service engineer. Normally it
is used for a system transportation or for service actions, like repair to
essential systems (electrical and air supplies).

(e)

Switching off the console when Emitter is On is not optimal and
sparing way for the emitter. User should use the Shutdown System
button only in case of emergency need.

3-8

System Operation: Quanta FEG System States

POWER OFF

T ake sufficient measures to avoid power failures as much as possible.
If it occurs while the instrument is completely operational, the
microscope comes down to a safe state and the following happens:

• The accelerating voltage is switched off abruptly.

• The specimen chamber vents gently, automatically.

• The column isolating valves close to save the vacuum in the gun
areas.

• The momentary adjustments of all system parameters
(accelerating voltage, magnification, stage positions) are lost if
they were not saved.

The Emergency Off

is similar to that which would happen after a MAINS power off. Here
are several possibilities how to quickly switch off the electrical power
completely in case of emergency:

1. Push the red EMERGENCY (EMO) button (option - see the Safety
Manual).

If the button is not installed proceed as follows:

2. Switch off the breaker switch labeled MAINS S1 at the cabinet
back, which is placed at the very right side in the row.

FIGURE 3-2 MAINS SWITCH BOARD

If this is not easily accessible:

3. Turn off the mains wall switch (if present), and / or disconnect the
mains plug from the mains socket.

UPS (option)

If the power failures occur occasionally it is reccomended to use the
microscope Uniterruptible Power Supply (UPS - option ), which
maintains the FEG emmision for several hours.

In case of mains power off the microscope is powered by UPS
batteries and the system starts 10 minute countdown. If the mains
power is recovered within this time, the countdown is canceled and
nothing happens. After 10 minutes of continuous power off a
shutdown with following actions is activated:

• FEG emission is gently switched off

• chamber is vented

• UI is stopped

• server is stopped

• console is shut down

• microscope PC and Support PC (if present) are switched off

User is informed about the countdown in the application status
window (see below) together with the remaining time. When the xT
microscope Server is started the first time after this event, a dialog is
displayed to inform an user.

3-9

System Operation: Quanta FEG System States

3-10

4

SOFTWARE CONTROL

This chapter gives an overview of the xT microscope Control
(referred to as UI or sometimes xTUI in dialogue boxes),
xT microscope Server and FEI User Management software, and
describes the functionality of each part of the user interface. It takes
you from the first main window and menu bar through each item on
the pull-down menus. Graphics illustrating most of the choices help
you to locate the specific features.

The software interface controls most system functions, including
imaging, image and movie gathering / manipulation / output, detection
and analysis, stage and pressure.

OTHER SOFTWARE AND HARDWARE

Call Customer Service for advice before installing software or
hardware that is not required for system operation. Other software,
such as screen savers or hardware network cards, may corrupt the
xT microscope Server / Control software under some circumstances
and may invalidate warranty.

For more detailed information about Windows XP, refer to the
Microsoft® Windows™ User’s Guide shipped with your system.

4-1

Software Control: Software Interface Elements

Software Interface Elements

ICONS

Icons are small symbols indicating a specific software application.
Double-click the icon to activate the program.

There are also functional icons in the toolbar for selecting some
software functions quickly. Clicking causes it to press in and activate,
clicking it again or clicking another one (depending on a particular
case) causes it to spring out and deactivate.

Some functional icons have additional down-arrow next to the right
side. Clicking the arrow displays a pull-down menu with choices, while
clicking the icon performs a particular function (cyclic changeover of
choices, setting the default parameters etc.).

There are also some informational icons in the status field, for
instance, that indicate some particular system status.

TOOL-TIPS

This functionality activates when the cursor is left over an item on the
user interface for more than two seconds. A short explanation of the
item appears until the cursor is moved away from the item.

PULL-DOWN MENUS

The microscope uses menu-oriented software; you perform functions
by choosing items from the Menu bar. The Menu bar selections
contain pull-down menus that display grouped listings of available
commands or settings. Some menu items are shown in grey and
cannot be selected because of the system immediate condition.

Pull-down menu selections followed by the ellipsis (…) indicate, that a
dialogue box will display (the same behaviour occurs when the
selection is a command). Selections with a right arrow indicate that an
additional submenu of choices will display. If a selection is a
parameter value, the new value is updated immediately and a check
mark appears in the pull-down menu.

Using the Mouse

The click / right-click / wheel-click represents click with the left / right /
wheel mouse button on the item throughout this manual. The press /
right-press / wheel-press means clicking and holding the mouse
button during the action.

Press the menu bar item, drag the cursor down to a desired selection
and then release the mouse button.

4-2

Using the Keyboard

Press ALT plus the underlined letter (for example, ALT + F for the File
menu), and then select from the choices with the click or with the up /
down (left / right for submenus) arrow keys.

Some often-used commands can quickly be activated with the use of
shortcut keys (a combination of simultaneously pressed keys) at any
time. This possibility is given by a particular button combination on the
right side of the pull-down menu adjacent to th e appropriate comma nd.

Software Control: Software Interface Elements

COMMAND BUTTONS

carry out or cancel functions. They press in when clicked and some
change color to show the corresponding function activity.

Command buttons have labels that describe the actions performed by
clicking them. The most common ones, which are typically used in
dialogues are:

• The OK button applies all changes made in the dialogue and closes it.

•The Finish button saves new settings, ends the procedure
closes the dialogue

•The Save button saves new settings at that point without closing
the dialogue.

•The Apply button saves and applies new settings at that point
without closing the dialogue.

•The

•The Next button moves an user to the following dialogue after

•The Previous button moves an user to the previous page when

Cancel

closes the dialogue. It has
with the cross (Alt + F4).

necessary settings have been done.

settings need to be changed.

button discards all changes (made from the last save) and

.

the same effect as closing the dialogue

and

LIST BOXES

contain available choices, such as screen resolution, magnification
settings, etc. Click the List box to roll down a list of available values,
then click the desired one. The drop down list automatically closes
and displays the new value as the actual one. The change of the
setting is immediate.

PROPERTY EDITORS

group list of related parameters and their values. The editable
parameters have a white background, the fixed parameters are
shaded. An user should click in the Value side of the relevant property
Name and then select its value from the drop down list or enter it
using a keyboard.

EDIT BOXES

let you input text information (such as passwords, labels or precise
numbers) using the keyboard. Some edit boxes, which are not part of
a dialogue, require to confirm the input by pressing Enter. If you press
Esc before leaving the edit box, its previous value is restored.

RADIO BUTTONS / CHECK BOXES

Within a group of related round Radio buttons, only one selection
can be made active at any time by clicking in the individual box.

A single one or a group of square Check boxes can be ticked /
cleared by clicking inside the individual one.

4-3

Software Control: Software Interface Elements

ADJUSTERS

allow to change parameters, such as contrast, brightness, gamma
etc. in a continuous way by pressing and dragging the middle adjuster
or clicking in the grey bar. They always have a label in the upper left
and right corners for readout information. Double-click the value in the
upper right corner enables to enter a precise value (and the unit in
particular cases) using the keyboard.

Exponential Adjuster

This is an exponential response adjuster – the further from the center
is the large adjuster button pulled, the larger is the relative change.
The adjuster button always snaps back to the center of the slider.

The middle adjuster button is for coarse adjustments, while the end
arrows are for fine adjustments (single step increments).

Linear Adjuster

Some adjusters have linear response like the small adjuster placed
below the exponential one has. Its button position always corresponds
to the actual parameter value within an available range.

Preset Adjuster

This kind of adjuster is used for values that have both a continuous
range, a list of presets and direct value editing to achieve total control.
The button on the left side of the adjuster toggles between modes:

• Drop down list:
clicking the -/+ buttons on the right of the drop down menu steps
through the pre-set values Up / Down in the list, but only shows
one value in the text area. Clicking the down-arrow rolls down the
whole list of values. If the list extends further than is visible, a scroll
bar appears. Clicking a value in the list enters it as an actual value
in the text area displayed at the top.
Double-clicking a value in the text area enables to edit it.

• Adjuster mechanism:
The adjuster has a fine control (see above).

Spinner

allows to change a parameter in an incremental way from a list of pre­defined values by clicking on an arrow.

4-4

Software Control: Software Interface Elements

2D CONTROLS

are represented by an X-Y box. The position of the crosshair
corresponds to the actual parameter value with respect to its full range
being represented by the perimeter of the box.

Pressing anywhere inside the box changes the active quad cursor to
the four-ended arrow and positions it to the screen point corresponding
to the actual control value (minimum in the middle of the screen and
maximum at the edges). It can be moved in four directions. P ressing
directly on the X / Y axis changes the active quad cursor to the two­ended arrow, which can be moved in the corresponding direction only.
To fix the values, release the mouse button.

The right-clicking over the 2D box opens a dialogue with choices:

•The Coarse / Fine sets the mouse sensitivity – long / short mouse
path necessary for the full range.

•The Zero brings the control value to zero and the cursor to the
center of the box.

•The Back brings the control value one step back (only one step is
remembered).

•The Clear Memory clears condition values, which have been
remembered automatically during the considered 2D control use.
These remembered values are used to estimate new values, which
have not been remembered yet.

The menu may contain less or some other functions that are actually
available for the particular parameter. Selecting the corresponding
menu item activates the function.

MODULES

visually combine various software elements, which are related into a
labeled group. Complex software elements like UI pages or dialogues
are typically composed of modules.

DIALOGUES

appear when the system needs more information from you before it
can carry out a command, or want to give you some important actual
information. Some dialogues do not let you access other functions
until you close them, other ones let you perform other tasks while they
remain onscreen and active (for example, the Preferences dialogue
can remain opened while performing other tasks).

TABS

In modules or dialogues containing more interface elements than
would fit into the limited area the Tabs are used. These related
elements are split into the groups (sections) and each one is
supplemented with the labeled Tab. Clicking the Tab brings it to the
foreground displaying the corresponding group of interface elements.

PROGRESS BARS

indicate progress of a long ongoing procedure over time. It is often
displayed in a dedicated dialogue.

4-5

Software Control: xT microscope Server Software

xT microscope Server Software

The xT microscope Server application starts and stops the software
service controlling basic microscope functions and also the user
interface (UI) software xT microscope Control.

Run the xT microscope Server (from the Windows Start menu or
double-click the icon) – the application window appears. The title bar
right-clicking opens a dialog ue that offers the option to mini mize the
server to the UI top bar.

FIGURE 4-1 xT MICROSCOPE SERVER WINDOW

•The Server State / UI State modules display the RUNNING or
STOPPED state of the xT microscope Server / xT microscope
Control software services. During a transition between these states
STARTING or STOPPING is displayed.

•Some Microscope module buttons change its label and behaviour
depending on the actual state.

The Start / Stop button starts / stops xT microscope Server
services. If the xT microscope Control is running, Stop button
closes it first.

The Start UI / Stop UI button opens / closes xT microscope
Control software.

The Show UI / Hide UI button calls / hides the UI main window.
The Shutdown System button closes the xT microscope Control

software, stops the xT microscope Server services and shuts down
the console.

The Advanced button displays the Administration module
containing information helpful when calling the service.

- The Autorun UI checkbox: when ticked (default), the Start button
automatically starts xT microscope Control after starting the
Server.

4-6

xT microscope Control Software

1
2

3

5

6

4 - Quad 1

4 - Quad 3

4 - Quad 2

4 - Quad 4

xT microscope Control – also called User Interface (xTUI or UI) – is
made up of several elements which compose the main window,
displaying status and control features.

FIGURE 4-2 THE MAIN WINDOW

Software Control: xT microscope Control Software

1. The Title bar – labels the application

2. The Menu bar – contains all operation menus and submenus

3. The Toolbar – contains functional icons for the most frequently

used microscope controls and for the fast access to the Pages

4. Image windows – image windows with adjustable Databar

5. Pages and Modules

– microscope and image control elements

organized into modules making up the pages

6. The Preferences dialogue – presetting of operating conditions

4-7

Software Control: xT microscope Control Software

THE TITLE BAR

displays the application icon and name plus the standard Windows
buttons: Minimize and Close, which are enabled.

FIGURE 4-3 THE TITLE BAR

The Close button quits the xT microscope Control software
(accelerating and detectors voltages are switched off for the security
reasons).

THE MENU BAR

displays pull-down menus across the screen below the Title Bar.
FIGURE 4-4 THE MENU BAR

Select pull-down menus from the menu bar by pressing:

• clicking over the Menu title

• ALT + underscored keyboard letters

• ALT and then use keyboard arrows

Note:
Some menu functions have their equivalents in the toolbar. In such
cases, the corresponding toolbar icon is shown next to the function
title in the following text.

The File Menu (Alt + F)

opens File menu administrative functions:

Open…

displays a standard dialogue for opening images previously stored to
a media. Supported file formats are TIF8/16/24, JPG and BMP, but
only files saved from xTUI in TIF format contain the active processing
information, which could be utilized later for a databar setting (see the
Preferences… / Databar tab).

The dialogue displays, by default, the location (path) last used to open
or save files from the xTUI.

Save (Ctrl + S)

saves the image using the format, location and base of name set by
the last used Save As function in that quad. An incremental suffix with
a selectable number of digits ensures that every image is saved as a
new file, e.g. Name_001.tif, Name_002.tif, etc.

Save As…

opens a dialogue for saving images, which provides an opportunity to
change the file name and location. An image can be saved in TIF8 /
TIF16 / TIF 24 / JPG / BMP file format.

4-8

Software Control: xT microscope Control Software

FIGURE 4-5 SAVE AS… DIALOGUE

The dialogue displays, by default, the location and the name last used
to save / open a file in the actual quad. You can choose different
location, name base or suffix, select different image format (Save as

type), and also choose whether to Save the image with / without
Databar and with / without overlaid graphics by ticking / clearing an

appropriate check box. The settings is remembered per quad and
used for the subsequent Save actions.

Save All… (Ctrl + Shift + S)

opens common dialogue for saving images from each quad, providing
an opportunity to change the file names and locations.

FIGURE 4-6 SAVE AS… DIALOGUE

Image Properties (Shift + F1)

allows an user to view parameters at which an image was captured.

Record Movie (Ctrl + Shift + M)

allows the user to make digital video files (AVI) for dynamic experiments.
The tick next to this menu item and the change of the corresponding
toolbar icon indicates the movie recording (see Chapter 5).

4-9

Software Control: xT microscope Control Software

Import / Export

opens a sub-menu with selection of importable / exportable items.
Selecting an item opens standard Open / Save As dialogue for
choosing location and file name. Following items can be both
imported (i.e. loaded and used) / exported:

•

• Actual operation Parameters / microscope settings (.par files)

• Scanning Presets parameters (.scp files) (see Preferences)

FIGURE 4-7 FILE IMPORT / EXPORT MENU

Print… (Ctrl + P)

opens the print dialogue enabling a choice of printer and settings
suitable to print an image.

Log Off User…

logs off a present User and provides the Log On dialogue for the next
microscope user. When the User logs off the system goes to a safe
state: the accelerating and detector voltages are switched off
automatically.

Stage Positions

stored with the use of the Stage module (.

stg

files)

Exit

closes the xT microscope Control software (the actual user is
automatically logged off first) and leaves the user in the operating
system environment. xT microscope Server is still running and
controls the microscope in operation.

The Edit Menu (Alt + E)

opens some helpful functions:

Copy (Ctrl + Ins) / Cut (

These functions represent commonly used operating system
functionality.

Select All (Ctrl + A)

selects all items within the imaging window (measurements,
annotations).

Ctrl

+ x) / Paste (

Ctrl

+ v) / Delete (Del)

The Detectors Menu (Alt + D)

opens the selection and setting of all installed Detectors.

Detector list

contains various detectors for the High Vac, Low Vac and ESEM
operation. Detectors not mounted or not serviceable under the actual
microscope conditions are disabled (greyed out). The selected
detector for the active quad shows a tick next to its label.

• An 3rd party video signal can be selected, which is indicated as
“External” in the databar. Contact a FEI service person about a
connection details.

•The CCD camera reflects the inner space of the specimen
chamber.

•The Mix sets a possibility to interfuse signals from 2 or 3 detectors.

4-10

Software Control: xT microscope Control Software

The Scan Menu (Alt + C)

opens the scanning control functions:

Pause (F6)

pauses the image. This function is used automatically
with Snapshot and Photo functions.

Select Pause or press F6 or click the Pause icon once / twice to stop
scanning at the end of the actual frame / immediately.

When the quad is going to be paused at the end of
the frame the Pause icon is pressed-in and has an orange
background. When the quad is paused the icon remains
pressed-in but its background reverts to normal and
a green box surrounding two vertical green bars appears in the
corresponding quad.

Select Pause or press F6 or click the Pause icon to release the pause
function (the icon button pops out) and to return the scanning to the
previous state.

Clicking the Pause icon while holding the Shift key pauses / resumes
all quads with an electron image at once.

Snapshot (F4) / Photo (F2)

activates a preset scan (see the Preferences… / Scan nin g tab).
The toolbar icon corresponds to the Photo function.

Active Preset Snapshot (Ctrl + F2)

If any of six presets is activated by clicking the numbered button
(becomes yellow), image acquiring starts with corresponding
parameters. Use the toolbar expand / hide arrow to change preset
parameters. These presets could be Exported / Imported with the use
of appropriate buttons. The functionality is available only, if activated
in the Preferences… / General tab / ).

Note:
Holding the Shift key while clicking the Photo icon / Active Preset
button or when pressing Shift + F2 / Ctrl + Shift + F2 key takes
electron beam Snapshot / Active Preset from all quads at once.

Videoscope (F3)

This function shows the video signal intensity along the actually
scanned horizontal line for correcting the contrast and brightness.

Reduced area (F7)

This mode is useful when focusing and stigmating as the scan speed
is faster in the smaller area. When Reduced area is chosen, the small
green area frame appears at the last known place on the screen, its
area and position are adjustable by the mouse. It is also possible to
adjust scan parameters independently on the full-frame setting.

• Moving:
Place the mouse cursor over the selected area. The arrow changes
to a 4-ended arrow. Press and drag the selected area to a desired
position and release the mouse button.

• Changing the size:
Place the mouse cursor over the edge of the selected area. The
cursor changes to a 2-ended arrow, either horizontal or vertical. A
corner can also be used to move two sides. Now drag the side out or
in to obtain the desired size and release the mouse button.

When the Reduced area frame is being manipulated, it turns yellow
until released, then it reverts to green.

4-11

Software Control: xT microscope Control Software

Full Frame (Ctrl + M)

is the default scanning mode, typical for navigation and imaging.

Spot (Ctrl + K)

In this mode, the image pauses and the scanning is switched off. The
actual beam position is represented by a green cross in all paused
electron images. You can move the cross or click anywhere around
the screen to change its position.

Line

In this mode, the green horizontal line is displayed in all paused
electron images. The beam scans along this line. You can move it or
click anywhere around the screen to change its position.

External

switches to activate external control of the scanning system, such as
beam control from an EDX system. The external scanning mode is
indicated by the External label displayed in the upper right corner of all
imaging quads.

Beam Blank (Ctrl + B)

deflects the beam off axis high in the column and protects the
specimen from unnecessary exposure. When the beam is blanked the
toolbar icon is highlighted. Clicking it releases the blanker and returns
the beam to scan the specimen.

Slow / Fast Scan (Ctrl + Shift + , / .)

brings the scanning condition to the preset
Slow (left icon) / Fast (right icon) scan value (see the Preferences… /
Scanning tab). When either of the two presets are active or selected
the respective icon is highlighted.

Slower / Faster Scan (Ctrl + , / .)

sets the scanning condition to the next preset Slower (left arrow) /
Faster (right arrow) value (see the Preferences… / Scanning tab).
The spinner box shows the actual dwell time, but does not enable to
change or select directly its value - the values are changed one step
up or down (see Preferences).

Mains Lock

When ticked, the scanning (line or frame sawtooth signal) is
synchronized with the mains AC oscillation. This greatly diminishes
blurring and jittering of the electron image resulting in smooth image
edges at higher magnifications and slow scan conditions. It has no
influence on fast scan images.

Line Integration

With this function each line scan is repeated several times (from 2 to

100) before proceeding to the next line. Signal data collected from
these passes are integrated and displayed as an actual image line.

This imaging method reduces sample charging (in comparison with
single pass with longer dwell time) and improves overall image quality.

4-12

Scan Interlacing

This function splits an imaging area into blocks defined by the number
of lines (from 2 to 8). In the first instance the first line of each block is
scanned, then the second one etc. This imaging method significantly
reduces sample chargi ng .

Software Control: xT microscope Control Software

Note:
When two above mentioned functions are active, it is represented in
the toolbar scan speed spiner with the letters LI / SI.

Live

is the default imaging mode, leaving the image unfiltered for collecting
raw direct images - one frame follows another.

Average

continuously averages a specified number (2 or more)
of frames, res ulting in a be tter sign al-to-noise ratio. This p rocess c ontinue s
until stopped by changing the scanning condition or by pausing the quad.

This is used mostly for fast scanning to reduce image noise. During
averaging, the image is updated continuously and actions such as
focusing, moving the stage, etc. can still be performed.

Note:
The Average is set independently also for the optical window (option),
but using averaging with more than 4 frames is not recommended,
especially when moving the stage.

Integrate

allows accumulative noise reduction by true integration over a
specified number (1 or more) of frames. This process continues until
the selected number of frames is reached and then pauses the quad
automatically. During and after image accumulation, you cannot
change the focus or perform other image-influencing actions.

This can be used as an alternative to slow scanning to obtain high
quality images of slightly charging specimens.

Note:
Clicking the down-arrow next to the icon displays menu items Live /
Average / Integrate, Number of Frames enabling to select number

of averaged or integrated images (depending on the actually active
Filter Mode indicated by the icon image for the active quad). Clicking
the icon itself changes the Live / Average / Integrate mode in cycle.

The Number of Frames is set and remembered independently for the
Average and Integrate filters. Both the Filter mode and Number of
Frames is set and remembered per quad, so live and filtered images
can be observed at the same time . Settings are particular for the
Reduced Area and for the Full Frame also. The Photo function uses
the Filter Mode and Number of Frames pre-set (see the
Preferences… / Scanning tab).

As the scanning could take a significantly long time period, one can
restart it from the beginning with the use of Ctrl + R keys (Restart
Scan).

Scan Rotation (Shif t + F12)

activates the on-screen tool to rotate the scan field. It has no effect on
the stage movements and is solely a scan coil function used to orient
the image relative to a specimen feature and/or detector direction. A
non-zero scan rotation is indicated by an icon in the Status module,
and its value can be also displayed in optical quads (see Chapter 7).

The Beam Menu (Alt + B)

opens the Beam menu functions:

Electron Beam / CCD Camera
makes the quad or single screen active to the Electron Beam / CCD

Camera with respect to the source, column, scanning, and detector

4-13

Software Control: xT microscope Control Software

settings. Only one is active at any time, but can be operated
independently for each quad.

Degauss (F8)

triggers the procedure which puts all actually used electron lenses to
a normalized state by removing their hystere sis effects. For a few
seconds while the procedure is running all live images disappear or
turn fuzzy, and then return back.

Use this function with (almost) focused image to obtain the most
accurate Magnification, Horizontal Field Width (HFW) and Working
Distance (WD) readouts.

Lens Alignment (Shift + F4)

This feature activates / deactivates the final lens alignment mode for
the fine alignment. The scanning changes to the fastest scan value,
lens modulator turns on and the alignment cross appears in the center
of all imaging quads.

Pressing mouse button activates a 4-arrow ended
motion starts the final lens alignment (see Chapter 6).

The Stage Menu (Alt + S)

opens the stage and sample navigation functions (see Chapter 7):

cursor. The mouse

xT Align Feature

opens a procedure that helps to navigate along a feature that extends
off the screen at the desired magnification.

Compucentric Rotation (F12)

places a green circle in the active quad. By rotating the circle a
different viewing orientation of the sample area can be achieved by a
physical stage rotation and adjustment of X and Y axes. Stage rotation
keeps the observed feature in the center of the field of view. If this
does not occur, the alignment should be performed to locate the stage
center and calibrate the stage (see Chapter 6).

Define User Units…

activates a procedure guiding the user to determine User Units for X
and Y stage axes. These are used for relative stage movements
associated with the regular features mapping (in particular integrated
circuit applications).

User Units

organises the stage software to recognise the defined user units
rather than the default metric measurements. The X and Y
coordinates now operate in User Units which are indicated in the

Stage module / Coordinates tab by the UU symbol.
Clamp

toggles on / off a mechanical stage clamp in order to prevent stage
vibrations during high resolution imaging.This menu item is greyed out
on systems without a securing Clamp (50 mm stage).

4-14

Beam Shift Reset

zeroes the beam shift. A feature observed with a non-zero Beam Shift
is automatically moved back to the image center using the stage.

Zero Beam Shift

zeroes the beam shift without moving the stage. A feature observed
before selecting this function is moved from its position by the
measure of the applied beam shift.

Software Control: xT microscope Control Software

Auto Beam Shift Zero

automatically resets the beam shift each time it reaches the maximal
value during the Get function (the point-to-point stage movement) and
corrects the image position with a stage movement.

Home Stage (Shift + F3)

starts procedure which moves all motorized axes to their hardware
limits and ensures that the physical stage position agrees with the
coordinates readout. During the home stage procedure the xTm:
Stage Information dialogue displays its progress. The stage axes are
moved to their end-switches in the following order:

1. Z (to the lowest position), 2. T (tilt), 3. X, Y and R (rotation) at the

same time. When the stage is homed correctly it ends up in the
following position:

X / Y position is set to the factory pre-set stage rotation centre, R = 0°,
T = 0°, Z = preset long working distance (depends on the stage type).

Home Stage Without Rotation

executes Home Stage function (see above) without rotation. When the
stage is homed without rotation the stage Rotation reference is greyed
out. This is useful when a large specimen is inserted and stage
rotation could cause a collision with equipment inside the chamber.

Center Position (Ctrl + 0 - digit)

moves the stage to coordinates X = 0, Y = 0.

Touch Alarm Enabled

activates the Touch Alarm for the stage. This function automatically
stops the stage movement and displays Touch Alarm warning
dialogue whenever the stage or a conductive specimen touches the
objective lens or any other equipment conductively connected to the
chamber. This functionality is used also when the stage engines start
to rise the power over the determined level.

Unlink Z to FWD

This feature functions in an opposite way as the following one. The Z
coordinate value represents then the distance from the Z home
position (stage base). The dialogue warns you about the stage Z axis
positive move direction.

Link Z to FWD (Shift + F9)

sets the Z coordinate value to the actual
Free Working Distance (FWD) value. This allows accurate movement
between the sample top surface and the end of the objective lens.

The

related toolbar icon changes according to the Z-coordinate status:

Greyed icon

•

: the function is disabled – the high voltage is switched

off (so there could be no electron image) or all quads are paused.

• Red question mark: the function is enabled – Z is not linked to
FWD. Use the function as soon as possible, after properly focusing
the image.

• Red circle: the function is enabled – Z is roughly linked to FWD,
but it needs correction. It happens e.g. after: changing the
specimen, focusing and linking Z to FWD at a long WD and then
moving the stage to a short WD. Focus image carefully at a WD
around 10 mm and use this function again.

• Green double-ended arrow: the function is enabled – Z is
properly linked to FWD. Now it should be safe to change the
working distance by setting a Z coordinate in the Stage module.

4-15

Software Control: xT microscope Control Software

Sample Navigation

toggles on / off function that enables to navigate live electron images
(scan field) towards desired places on a specimen using either
paused or loaded image of that specimen (usually taken at much
lower magnification).

The Sample Navigation can be selected independently for any quad,
regardless of its actual content and status. A tick next to the menu
item indicates that the function is selected for the active quad. As
soon as this quad is paused, the Sample Navigation indicator appears
in the upper right corner of the quad. The indicator is green as long as
the paused image can be used to navigate the live images, otherwise
turns read (e.g. when the stage rotation or tilt changes).

Navigation Montage...

This procedure takes the image of the sample to be used in the
Sample Navigation (see Chapter 7).

The Tools Menu (Alt + T)

opens the Tools menu functions:

Auto Contrast Brightness (ACB) (F9)

activates the automatic contrast and brightness routine. The system
attempts to set the Contrast and Brightness of the selected detector in
the active quad to suit the actual sample and conditions so that the
majority of grey levels is displayed.

User Auto Contrast Brightness

examines gray levels of the active quad image and stores their
minimum and maximum. Next time the ACB function is used, it
attempts to set the Contrast and Brightness so that the resulting
image gray levels lies between this minimum and maximum instead of
full black and white.

A tick next to this menu item indicates the user gray level limits active.
Clearing the tick reverts the ACB to its default setting.

Auto Focus (F11)

The system attempts to automatically correct the WD
(independently of the WD or Z-coordinate) in 10 steps according to
the magnification value. If the procedure fails, lower the magnification
to max. 1000×. One can also start the Reduced Area feature (see
above) to select a point of the sample to be focused on prior to the
Auto Focus start.

Note:

When ACB / Auto Focus is activated the dialogue appears to show the
progress. The function can be interrupted by clicking the Stop Now
button, which leaves the setting at the actual stage of progress.
Clicking the Canc el button before the function ends returns
to its original

Auto Stigmator (Ctrl + F11)

activates the automatic procedure to correct the astigmatism
(see Chapter 5).

value.

the setting

4-16

Set Default Parameters (Ctrl + D)

loads default settings for the actual Vacuum Mode. The function
switches UI to quad Image mode and selects the default detector for
quad 1 and the CCD camera for quad 4. The microscope and image
parameters are selected so that there is a big chance to get an usable
image immediately.

Software Control: xT microscope Control Software

Set HFW… (Ctrl + H)

enables to set the desired Horizontal Field Width, i.e. the width of the
scanned area. This is an alternative to the setting of magnificitation.

Display Saturation (Shift + F11)

displays signal clipping in the active quad by means of replacing the
full black / white with dark blue / yellow color. The function can be
used both for live and paused electron images, but cannot be applied
to the optical quad image.

The saturation display is selected independently for each quad. A tick
next to the menu item indicates whether the function is active for the
active quad.

Image Post Processing (Ctrl + F7) / Undo … (Ctrl + Shift + F7)

Starting this function corrects image properties according to the

Image Enhancement module / Process tab setting (see below).
Lab Notes…

opens the Windows Notepad application over the quad 4 for the user
to make immediate notes and remarks.

The Lab Notes can be used to

open, edit and save any text file without the necessity to hide the xT UI.

FEI Movie Creator…

provides a dialogue over the quad 4 for setting up a collection of
sequenced TIF images, and lining them up into an AVI movie (see
Chapter 5).

Application status…

displays a dialogue over the quad 4 with continuously updated system
messages.

• Pop-up on Message Severity: None / Error / Warning / All
specifies which kin d of me ssages is going to b e shown automa tically
on screen. Three icons in the lower right corner enable to switch on /
off displaying of Error / Warning / Informatio n messages.

•The Clear button clears all actual messages from the window.

•The Hide button hides Application Status window, but leaves the
messages untouched.

FIGURE 4-8 APPLICATION STATUS

4-17

Software Control: xT microscope Control Software

The Window Menu (Alt + W)

opens the Window menu functions:

Center Cross (Shift + F5)

places a cross in the center of all electron image quads. This function
is automatically used in Alignment procedures to aid the centering of
features and can be used to align a sample against a stored image in
another quad.

Alignment Rectangle (Shift + F6)

places a dashed rectangle in the center of all electron image quads.
This function is used for some Alignment procedures automatically.

CCD 10 mm Marker

places a short horizontal line with 10 mm label in all optical quads to
help user with a sample positioning to a correct working distance and
with the first focusing. Only Supervisor is allowed to change the
marker position by double-clicking a new position and by confirming
this action in the popped up dialogue.

Crosshair Cursor

shows the cursor as a rectangular cross through the entire quad.

Undo / Redo digital zoom #x

When using the digital zoom (see below), it is possible to undo / redo
the last magnification / reduction step.

Large Image Window (Ctrl + F5)

This function activates / deactivates the full screen quad imaging on
the secondary monitor.

FIGURE 4-9 LARGE IMAGE WINDOW

4-18

Large Image Window Configuration

Here one can select, whether to show an
one. Activating the
window size corresponding to Single Image mode size. These options
are also available in the bottom right corner of the large image window.

Use Single Image Size

Active

quad, or any selected

option sets the im ag in g

Software Control: xT microscope Control Software

Remote Display Mode

When using the Remote Imaging (option) this feature enables correct
UI imaging at the remote site. It is also used for a remote service.

Use of this function decelerates slightly a UI performace and it is
displayed in the bottom left quad corner.

Single / Quad-Image Mode (F5)

toggles the image display area between two possibilities:

• Single Image Mode displays one quad over the whole image area
– useful for observing details.

• Quad Image Mode is useful for comparing images of the same
sample area taken with different detectors or scan properties.

The Help Menu (Alt + H)

opens the Help menu and system informations functions:

Documentation… (F1)

The Help window shows complete User Manual in PDF format using
an embedded Acrobat Reader with its useful navigation, search and
selection tools.

Clicking the Question mark at the right side of the module header
(see below) opens the respective part of the user manual.

FIGURE 4-10 DOCUMENTATION

Keyboard Shortcuts…

The shortcuts list in tables is displayed in the same way as the on-line
documentation (see above) and with the same beha vi ou r.

About xTUI…

displays a window with a microscope picture cont aining information
about the product version. The window automatically disappears after
any click.

4-19

Software Control: xT microscope Control Software

THE TOOLBAR

displayed below the Menu bar is made up of functional icons linked to
the most frequently used system controls. It also contains group of
icons for quick switching between UI Pages. The toolbar can be a bit
different in content or style (see the Preferences… / General tab).

FIGURE 4-11 THE TOOLBAR

Whenever you select a function the corresponding icon is highlighted
to indicate that the function is active (except of auto-functions, which
display a progress dialogue).

Note:

If any icon represents a menu function, refer to the corresponding
menu for its description.

Beam

Right-clicking the beam icon at the first toolbar position opens the
selection of all available beams. Double-clicking this icon toggles
between the actual and the last beam used for active quad (see
below). This functionality is also user dependent.

Magnification / High Voltage / Spot List Boxes

Click the list box to open a selection of the pre-set and actually
allowed values, choose one and it is applied immediately (see the
Preferences… / Presets tab).

•The Magnification is possible to display as the Horizontal Field
Width (HFW) alternatively (see the Preferences… / General tab).

•The Spot is defined as the actual electron beam diameter on the
specimen surface and it is expressed by a relative number (see
Chapter 5).

The optional way (represent able in the toolbar) to the Spot size
number is the electron Beam Current value. Both physical
quantities are related. Changing the HV changes the beam current
values also. The electron beam current displayed in the toolbar list
box (and optionally in the Databar) is approximate and valid only if
the microscope is well aligned.

Degauss (F8)

triggers the degauss procedure which puts all actually used electron
lenses in a normalized state by removing their hysteresis efects. For a
few seconds while the procedure is running all live images disappear
or turn fuzzy, and than returns back.

Use this function with (almost) focused image to obtain the most
accurate Magnification, Horizontal Field Width (HFW) and Working
Distance (WD) readouts.

4-20

Imaging Pixel Resolution List Box

This list contains available imaging pixel resolutions (also used for
captured electron images). Selecting a new resolution results in the
immediate change of the scanning raster and since the present dwell
time remains unchanged, the actual scanning frequency (both Line
and Frame time) changes.

Direct Measurement

This button enables to quickly access the measurement tool without
necessity to change a page. Clicking the icon deactivates (grey color)
/ activates (yellow color) the functionality (see below).

Software Control: xT microscope Control Software

Active electron quad

Inactive electron quad

Active optical quad

IMAGE WINDOWS

The xT microscope Control software images via 4 independent
windows called quads. All quads can contain live imaging from any
detector (including External and CCD), paused imaging or images
loaded from a file. Additionally, quad 3 can display a mix of images
from quads 1 and 2, and quad 4 can display a mix of images from
quad 1, 2 and 3.

The four quads can be displayed either all at the same time in Quad
Image Mode or one zoomed quad at a time in Single Image Mod e.

Each quad consists of its imaging area, selectable overlay (user­defined coloring, annotations , measur em ent) , som e status symbo ls
(Pause, Sample Navigation, etc.) and adjustable Databar (see below).

At any time, just one quad is active (has focus), and all functions
related to a single quad applies to its imaging only (Pause, Sample
Navigation, image processing). The Act ive qua d is marked by the
highlighted (blue) Databar and option all y als o by the blu e frame (s ee
Preferences… / General).

Depending on the quad status and quad beam some mouse functions
are available over its area (see below):

• Electron imaging (incl. External and Mix): focus, astigmatism
correction, Beam Shift, magnification change (coarse, fine),
active: zoom (in / out), Lens Alignment,
Rotation,

CCD imaging

•

active

Note:

Due to a hardware limitations, some detectors cannot be used
simultaneously. They can still be selected for different quads at the
same time, but if one of them is started, the other quads with
"incompatible" detectors are automatically paused.
The optical quad is automatically resumed (if it is paused), when the
venting procedure starts.

XY-move (get or tracking mode)

(option): place 5 mm Marker, Compucentric Rotation;

: Z-move (tracking), Tilt.

Scan / Compucentric

;

The Databar

displays optional instrument, imaging and labeling information. They
can be placed in any order and expand or contract to fit the quad
width as long as there is enough room (see the Preferences… /
Databar tab).

Clicking some of the image databar fields induces a menu related to it
with appropriate choices (see
clicking the label field induces the label editing menu and double-clicking
the micron bar induces the image properties window (see above).

FIGURE 4-12 DATA BAR EXAMPLES

Note:

The Databar information are always related to the actual imaging. If
the imaging is paused or an image is loaded from a file, they could
differ from the actual system conditions.

Preferences… / General

tab). Double-

4-21

Software Control: xT microscope Control Software

PAGES AND MODULES

The software controls on the right side of the screen are organized
into Pages, which are divided into Modules holding specific functions.
The required page can be selected by pressing the corresponding
icon button or with the use of short-cuts (see below).

TABLE 4-1 PAGES AND MODULES LIST

Pages Modules (Tabs)

Beam Control 1. Vacuum, 2. Column, 3. Magnification,

Navigation 8. Stage (Map / Coordinates / Tilt / Navigation),

Processing 11. Measurement / Annotation, 12. Digital Zoom,

Alignments 14. Alignments (Instructions / Individual steps),

4. Beam, 5. Tuning, 6. Detectors, 7. Status

9. Rotation, 10. Detector Settings, 6. Detectors,

7. Status

13. Enhanced Image (LUT / Mix 3 / Mix 4 / Color /
Process), 6. Detectors, 7. Status

7. Status

Note:
The number in front of the module name represents an order in which
the modules are introduced in the following text.
For Software Interface Elements control see above.

1. The Vacuum module

is used to control the pressure and the gas type in the specimen
chamber. The Pump button starts the pumpdown procedure for the
specimen chamber and the column. The system allows the
accelerating voltage to be switched on only when the column is
sufficiently evacuated. The Vent button starts venting for a sample or
detector exchange after the user confirmation (see Chapter 3 and 5).

The Mode radio buttons bring the system to:

•the High Vacuum mode, which is the conventional operating
mode (associated with all scanning electron microscopes), used
for observing conductive specimens that can withstand low
pressure conditions and do not outgas.

In this mode the system pumps continuously to achieve the lowest
possible pressure.

•the Low Vacuum for observing non-coated and non-conductive or
partially conductive specimens.

•the ESEM Mode for observing natural status of samples.
In these modes, the chamber pressure is controlled using the

Chamber Pressure preset / continuous adjuster, while the column
is at a much lower pressure.

Note:
The gas environment can be selected from the list box for the Low
Vacuum and ESEM modes.

The system automatically switches to one of the modes when the
chamber is Vented and a dedicated detector is installed. If no
dedicated detector is installed, user is asked to determine a detector
mounted.

4-22

Software Control: xT microscope Control Software

2. The Column Module

contains controls for setting the electron beam conditions:

The Beam On Button

switches the accelerating voltage on / off. When activated /
deactivated, the button changes from gray to yellow / yellow to grey.

The High Voltage Preset / Continuous Adjuster

enables to adjust the overall electron beam acceleration voltage (from
200 V to 30 kV in 100 V steps) either continuously or using the pre-set
values (see the Preferences… / Presets tab). The actual High
Voltage value is displayed in the text area of the adjuster, toolbar and
in the Databar (if selected).

The Spot Preset / Continuous Adjuster

enables to adjust the electron beam Spot size, numbered from 1 to 7
(values from 3.9 to 4.0 are disabled) in the selec table acc ur acy steps
(see the
from the factory preset list is displayed in the text area of the adjuster,
toolbar (default) and in the Databar (if selected).

The Spot number change influences both the focused electron beam
area and the Beam Current. The lower is the Spot number, the lower
is the Beam Current.

Preferences…

/

General

tab). The actual spot size number

3. Magnification / HFW Module

The continuous adjuster offers a variety of ways to control the actual
imaging magnification (see above). The magnification range changes
dynamically according to the working distance and can also be
controlled with the use of other tools (see Chapter 5).

Magnification Control

• Clicking the end arrow increases magnification by about 5%.

• Clicking between the end arrow and the button increases
magnification by about 20%.

The Magnification is possible to display as the Horizontal Field
Width (HFW) alternatively (see the Preferences… / General tab).

4. Beam Module

The Stigmator 2D Control

enables to correct an image astigmatism. The crosshair cursor
indicates the actual setting.

The Shift key + Pressing over an electron imaging quad triggers the
astigmatism correction. Unlike the 2D box control, this is magnification
sensitive and therefore it suits for fine corrections at high
magnifications.

The Beam Shift 2D Control

indicates and controls the beam shift with respect to the objective lens
axis. It is useful for fine image shifts without stage movement.

The Shift key + Pressing over an electron imaging quad triggers the
Beam Shift function. The mouse cursor changes to a hand one that
"holds" the image and drags it over the screen. Because of a limited
Beam Shift range, this works well only for high magnifications.

4-23

Software Control: xT microscope Control Software

Note:
Right-clicking over the 2D box opens the menu with following
particular choices :

•The Reset sets the Beam Shift value to zero and moves the stage

5. The Tuning Module

enables a fine electron source alignment, providing the aperture is
mechanically well aligned and a coarse pre-alignment via the Gun
alignment procedure is done.

Note:

The alignment stored by the Gun Alignment procedure (see
Chapter 6) is not overridden by this module control.

The Source Tilt 2D Control

corrects an image illumination drop by changing an efficient angle of
the beam coming from the gun area into the electron column. In the
Crossover mode activated with the button the onscreen image shows
the electron source tip instead of the sample surface.

The Lens Alignment 2D Control

minimizes the objective image shift during focusing. The 2D control
indicates an actual bea m po sitio n se tting rel ative to th e final len s apertu re.

to compensate the resulting image shift (same as the Stage menu
/ Beam Shift Reset function).

The Lens Align. button

starts automatic objective current oscillation (periodically under- and
over focuses the image in a narrow range) to facilitate the process.
Try to bring the rotation center to the screen center (if the
magnification is too high, the rotation could seem like a linear motion
instead of a rotation).

Note:
Right-clicking over the 2D box opens the menu with following
particular choices :

•The Auto Alignment finds optimal conditions automatically.
Note:

The Source Tilt / Auto Alignment is available only for spot sizes 5 or
higher.

6. The Detectors Module

contains continuous adjusters to control the active detector Contrast
(detector voltage) and Brightness (voltage offset). The values are
remembered for each detector and a quad. The adjusters are disabled
if the detector is not available or cannot be controlled (e.g. CCD
camera or an External detector).

The Contrast / Brightness / Enhance Continuous Adjusters

Regardless of the detector actual gain range, the Contrast and
Brightness range is always 0 - 100 (%) and the small / large step size
is 0.1 / 1 (the Brightness step size may differ for some detectors in
order to achieve a sufficient sensitivity). A direct value can be entered
by double-clicking the Contrast / Brightness value. The Enhance
adjuster (electronic gain) is displayed here or in the Detector Settings
(see the Preferences… / General tab).

Note:
The label Enhance is truncated because of a space. The full name
should be the Enhanced Contrast.

4-24

Software Control: xT microscope Control Software

7. The St atus Module

can be found at the base of all pages, displaying following information
(some of them as a tool tip):

•The Chamber Pressure: shows the specimen chamber pressure.

•

The

Gun Pressure:

•The IGP Upper / IGP Lower shows the electron source space
pressure in detail.

•The Column: shows the column pressure.

•The Emission Current: shows the electron current emitted from
the source.

•The Coulomb Tube Current shows the electron current flowing
above the final lens aperture.

The system conditions are displayed by means of the icons:
TABLE 4-2 STATUS ICON MEANING

Icon Status

shows the electron source space pressure.

Column and Chamber Vented
(Complete Shutdown - see Chapter 3)

Column and chamber Pumping or Venting

Column and Chamber Vacuum
(ready for the microscope operation)

Column Vacuum and Chamber Pumping or Venting

Column Vacuum and Chamber Vented
(ready for a sample and/or detector exchange)

Stage axes – Lock (any one) / Unlock (all)

Displays when Dynamic Focus is On

Displays when Scan Rotation is not zero

Displays when External scanning mode is On

4-25

Software Control: xT microscope Control Software

8. The Stage Module

consists of the tabbed sections (see Chapter 7).

•The Map tab displays the stage positions location in a visual map

•The Coordinates tab displays numerical values of a particular

•The Tilt tab contains correction features for the tilted imaging.

•The Navigation tab helps to navigate across the sample surface.
Note:

The stage movement can be aborted by hitting the keyboard Esc key.
Don't hesitate to do so if you are not sure that the initiated movement
is safe!

FIGURE 4-13 THE STAGE MODULE

form and as a list for selection.

position. Stage movements along selected axes could be locked.

The Navigation tab

Click the Get button to capture a live image into the Navigation tab.
Drawing a green bordered box inside it depicts an observed area from
that point on.

By dragging and moving the box inside the navigation image an
observed position could be changed (affecting the active quad). By
dragging its boundary a box size could be changed, or it is also
possible to draw a new one.

4-26

Software Control: xT microscope Control Software

9. Rotation Mod ule

controls and displays the Scan Rotation value (see Chapter 7).

10. Detector settings Module

enables to choose the selected quad detector and adjust its
parameters.

The Detector list box contains list of detectors actually available for
the selected quad (the same as enabled items in the Detectors
menu). The list box always displays the detector actually selected in
the active quad.

The rest of the module dynamically changes according to the selected
detector and its parameters, which may change from quad to quad.

11. The Measurement / Annotation Module

combines tools for measuring and making annotations in electron
images. A measurement tool, an annotation shape or a text label can
be selected from the first three icons on top of the module, and then
drawn in an electron image quad. All objects are sequentially indexed
and displayed in the list box below icons. The properties of the objects
is possible to change in the property editor (see Chapter 5).

12. The Digital Zoom Module

The procedure takes place in the computer memory only and
helps to navigate across the enlarged view. Click the + / - magnifying
glass icon to enlarge the view in the active quad. Press and move the
green bordered area inside the digital zoom image to change an
observed area in the active quad.

When the digital zoom ratio is applied, the icon appears in the
appropriate quad.

4-27

Software Control: xT microscope Control Software

13. The Enhanced Image Module

consists of four tabbed sections offering various digital image
enhancements. In contrary to Detector module / Contrast and
Brightness functions, these enhancements are applied only to the
active quad independently. In case the user changes the default
settings of LUT / Color / Process tab, its background color changes
to green. The digital processing can be applied to any live, paused or
loaded image, including an optical one (see Chapter 5).

FIGURE 4-14 THE ENHANCED IMAGE MODULE

4-28

14. The Alignments Module

contains alignments which enable to optimize the system
performance (see Chapter 6).

•The Alignments list box contains list of Alignment procedures
available for the actual user level (User, Supervisor or Service).

•The Instructions info box displays the selected alignment
procedure instructions.

•The Steps module shows an actual alignment page with all
necessary components.

Note:
The user must understand the procedures at the appropriate level
before proceeding with any adjustment. Improper alignments can
make the system difficult to use.

Software Control: xT microscope Control Software

PREFERENCES… DIALOGUE

This dialogue can be opened by selecting Preferences… (Ctrl + O)
from the pull-down menus: Scan and Tools. The opened menu from
which it is chosen dictates the tab opened on entry. Once the
Preferences dialogue is opened, any of the tabs can be chosen.

The Preferences dialogue consists of tabbed sections. Clicking the
required tab opens a section that allows changing and presetting
conditions for a group of the related functions. Only one tab can be
opened at any time.

The items chosen and changed from any of the preferences tab
dialogues remain valid (for a specific user) until changed next time.

The Units Tab

allows the user to change the Units of Measure, Pressure and
Temperature. The choices affect the Stage module input boxes, the
databar display, the status module and so on.

FIGURE 4-15 UNITS PREFERENCES

Selection possibilities are:

• Units of Measure: Millimeter [mm] / Micrometer [µm]

• Pressure: Pascal [Pa] / Torr [Torr] / millibar [mbar]

• Temperature: Kelvin [K] / Celsius [°C] / Fahrenheit [°F]

4-29

Software Control: xT microscope Control Software

The Databar Tab

specifies content of the databar displayed at the base of all quads.
The Databar configuration and available items differ according to the
beam. Actual content of the Databar Preferences dialogue
corresponds to the actually active quad. For all electron imaging
quads the Databar configuration is identical, except of the Label which
can be set independently for each quad.

FIGURE 4-16 DATABAR PREFERENCES

There are two lists in the dialogue, one labeled Available and the
other Selected. Items in the Available list can be added / removed
individually (> / <) or as a whole (>> / <<) to / from the Selected list.
The Selected list contains items that are displayed in the Databar. The
items in the Selected list can be Moved Up, Moved Down, Top or
Bottom according to priority or preference. This in turn changes the
order of the displayed items in the databar.

The Label and Micronbar can be chosen by ticking an appropriate
check box. Their area expands or contracts as other items are added
to or removed from the databar. The Micronbar scales to the
magnification.

Clicking the Label… button brings up a dialogue to edit the label of
any quad(s). The same dialogue can be opened by double-clicking
the actual label in any quad.

Clicking the Browse Bitmap… button opens a dialogue to load a
bitmap into the databar.

Note:

The limit for entries is displayed in the dialogue as it is updated. It is
possible to select more items than can be displayed. The databar
preview should be used to check available space.

4-30

Software Control: xT microscope Control Software

The Scanning Tab

allows the user to change the dwell-times (scanning speeds) table
and to set-up the Slow scan / Fast scan / Snapshot / Photo function.

FIGURE 4-17 SCANNING PREFERENCES

On the left side of the module there is a dwell-time preset list with the
fixed number of entries. Selected Preset values can be changed in
the Property Editor on the right side of the module. The following
properties are editable (depending on the kind of the preset):

• Dwell Time: one point beam duration time

• Line Integrate: no. of line scanning repetition

• Resolution: no. of points, Width × Height (imaging resolution)

• Integrate (1, 2, 4, 8, 16, 32, 64, 128, 256): no. of integrated frames

• Acquisition: (8 bits / 16 bits) sets the captured image bit depth

• Drift Correction (Yes / No): corrects imaging drifting when
averaging filter is active. When activated, the text below the
blinking quad pause icon notifies an user.

• Continuous Scan (Y es / No): when starting up a Snapshot / Photo
function, scan in progress is finished before image grabbing starts.

This functionality is convenient for charging samples but it requires
same scanning conditions for scan in progress and Snapshot /
Photo function preset.

• Action activated at the end of Photo / Snapshot function:

Save saves the image using an automatic file name and format,
Save As… opens the Save As dialogue to save the image,
None just pauses imaging.

• Post Processing (None / Image enhancement): enables to start
Image Post Processing after an image acquisition.

Following properties are informative and non-editable:

• Line Time: line scan duration time,

• Frame Time: quad scan duration time,

• Refresh Rate: imaging refresh frequency.

4-31

Software Control: xT microscope Control Software

Slow (tortoise / large green sector) / Fast (hare / small green sector)
preset icon indicates the matching dwell-time value. To change it
move an icon up or down just by pressing it.

Snapshot (F4) / Photo (F2) (different cameras) preset icon indicates
the matching dwell-time value. Set all possible properties in the
Property editor.

The Default button restores the default dwell-time list and preset
settings.

The Presets Tab

allows the user to change the pre-set values in the High Voltage,
Magnification and Pressure drop down lists. A value can be
changed by selecting it in the list and entering a new one in the edit
box just below the respective title. The new value replaces the
selected one and is immediately sorted into the list. The number of
entries in the list remains fixed.

FIGURE 4-18 PRESETS PREFERENCES

4-32

The High Voltage list can be changed to span any values from 200 V
to 30 kV. The values must be entered in kilovolts (0.2 means 200 V).

The Magnification list can be changed to hold frequently used
magnifications. V alues that are in the pre-set list but cannot be applied
to the actual SEM conditions are not shown in the toolbar /
Magnification list box. Magnification range is from 20× to 1 000 000×.

Note:
Alternatively the Magnification could be displayed as the Horizontal
Field Width (see the Preferences… / General tab).

The Pressure list can be changed to hold specific values frequently
used in the Low Vacuum and ESEM modes in the range from 10 to
200 Pa (from 0.075 to 1.5 Torr).

Software Control: xT microscope Control Software

The ESEM Tab

enables to customize the specimen chamber purging, which is
automatically initiated when the system pumps the vented chamber
directly to the ESEM / Low Vacuum mode.

FIGURE 4-19 ESEM PREFERENCES

Purge Mode module radio buttons:

• No Purge – The purging is switched off and the chamber pressure
goes directly to the set ESEM / Low Vacuum mode value. The gas
mixture in the chamber slowly changes to the new gas type.

• Automatic – All purging parameters are set automatically,
according to the mounted Low Vacuum detector (Cone).

• Custom – The Custom parameters (Minimum Pressure,

Maximum Pressure, Number of cycles) defined in the Purge
Settings module edit boxes are used. The default values are the

same as in Automatic mode.

The Purge button enables to start the purging (using the actual Purge
Mode and Settings) manually when the system is already pumped to
ESEM / Low Vacuum; otherwise, the button is disabled. When the
purging is running, the Purge button becomes highlighted. Clicking on
the highlighted button stops the actual purging procedure and returns
the system to operation in ESEM / Low Vacuum.

Notes:
– The new Purge Mode or Settings is applied im mediately after pressing
the

OK

or

Apply

button, even if the purging cycle is already running.
– During the purging procedure, the chamber pressure is not ready for
SEM operation (the vacuum status is Pumping). Therefore, pressing
the Purge button automatically switches off the accelerating voltage.
– The Purge Settings is not remembered separately for each user. If it
is of any importance, please check these Preferences before starting
the ESEM / Low Vacuum operation.

4-33

Software Control: xT microscope Control Software

The General Tab

contains variety of user settings of both UI behaviour and microscope
operation, which are of less importance and/or does not logically
belong to other Preferences section.

FIGURE 4-20 GENERAL PREFERENCES

Each item of the General Preferences is represented by single line
displayed in the property editor. Clicking on the corresponding Value
displays a drop down list with the settings available for that item.

Note:
Some changes become visible after the next UI start.

Categories

T o make navigation among the number of preferences easier, they are
divided into three groups. Selecting appropriate group from the
Category drop down list will display in the below property editor only
the items belonging to this group. Selecting Category All will display
all items at once.

UI appearance

• Icon style (Nova / Quanta)
Selects appearance of the toolbar icons.

• Spot Size / Beam Current Control (Spot / Current)
Selects a way of the toolbar display.

• Image dimensions control (Magnification / HFW)
Selects a way of the magnification representation and control.

• Frame active quad (Yes / No)
Switches on / off additional highlighting of the active quad.

• Enable zooming on mouse click-and-drag (Yes / No)
Enables / disables the function linked to the left mouse button.

• Switch sample tracking on mouse wheel click (Yes / No)
Switches the tracking movement control linked to the mouse wheel
between click-and-move and click-and-drag modes.

4-34

Software Control: xT microscope Control Software

• Spot Size Step (0.1 / 0.01 / 0.001)
This enables to set the accuracy of the spot size setting.

• Enhanced Contrast slider besides Contrast (Yes / No)
enables to show the Enhanced contrast control next to the
Contrast in the Detector module. In this case the corresponding
control in the Detector Settings module disappears.

• Display Scanning Preset toolbar (No / Yes)
Enables to show 6 preset scanning parameters at the toolbar.

Image and graphics

• Restart Average Filter when magnification changes (Yes / No)

• Restart Average Filter when scan rotation changes (Yes / No)

• Restart Average Filter when beam shift changes (Yes / No)

• Restart Average Filter when stage moves (Yes / No)
The above items enable to choose whether the image averaging

should be restarted when the indicated parameter changes.
Restarting the Average Filter causes the image to blink and get
noisier; on the other hand, the averaging slows down the image
response to the changed parameter.

• Display beam icon in databar (Yes / No)
Adds an active beam icon to the first data bar position.

• Blinking pause icon during image integration (Yes / No)
If Y es is selected, the blinking Pause symbol is displayed in quads
which are being stopped. Otherwise, the Pause symbol appears
only after the image acquisition has actually stopped.

• Display Recording Movie message
(No / 1 second / 2 seconds / 5 seconds / 30 seconds)
At the beginning of the movie recording, this message could be
displayed in the recorded quads for a selected time period.

• Hide Rotation controls when not used
(No / 10 seconds / 30 seconds / 60 seconds)
Specifies if and when the on-image Scan / Compucentric Rotation
control should be automatically switched off.

• Display Scan Rotation in CCD quads (Yes / No)

• Display Tilt Corrections in CCD quads (Yes / No)
The above two items specify if the Scan Rotation / Dynamic Focus
and Tilt Correction indicator and value should be permanently
displayed in the CCD image(s); only non-zero values are
displayed.

• Reset Enhanced Image parameters on file open (Yes / No)
When opening an image, applied enhancement corrections
(remembered for the quad) are reset irreversibly.

• Post Proccessing (Standard / None / Custom...)
Sets the default Post Processing setting.

Microscope operation

• Lower stage when venting the chamber (Yes / No)
Spe cifies if the st age shou ld autom atically go to a low Z values whe n
venting the chamber. This is a recommended (not default) setting,
because it gr eatly diminishes the chance of hitting the p ole piece
when closing the chamber doors after mounting a higher specimen.

• Change magnification when pumping
(No / Set to 25× / Set to 100× / Set to 200×)
Specifies if the magnification should be automatically set to a low
value when the chamber is being pumped (presumably after
replacing the specimen).

4-35

Software Control: xT microscope Control Software

• Switch off CCD automatically

• Pause beam quads when switching off HV (Yes / No)

• Allow Beam Shift in Get mode (Yes / No)

• Blank beam during long stage moves (Yes / No)

The Movie Tab

provides two groups of controls: Timer to set-up the movie frame-rate
and File to set-up the path name and format of the resulting movie
(see Chapter 5).

(No / 1 minute / 10 minutes / 30 minutes / 1 hour / 2 hours / 6 hours)
Specifies if and when the CCD camera and infrared LEDs should
be automatically switched off. The countdown starts when
resuming the optical quad and continues regardless of the
operator activity.

Specifies if the electron image quads should be automatically
paused when switching off the High Voltage.

Enables / disables automatic using of Beam Shift when the user
requires very small point-to-point movements (double-click in the
image at high magnifications).

If Yes is selected, the electron beam is automatically blanked
during long software controlled stage movements. This may
protect extremely sensitive samples from exposure to the beam in
undesired areas.

The Sensitivity Tab

The preset sliders control the sensitivity of the Manual User Interface
(MUI – option).

FIGURE 4-21 SENSITIVITY PREFERENCES

4-36

All MUI controls are represented except the Magnification. The
Default button sets the original settings.

Software Control: xT microscope Control Software

Magnification Tab

controls the imaging and stored / printed image databar magnification
display. The constant imaging pixel size is set at the toolbar. When
storing / printing an image (while in a Single or Quad imaging mode)
the databar magnification display may not be correct.

FIGURE 4-22 MAGNIFICATION PREFERENCE S

The Screen preferences area sets the imaging databar magnification
display behaviour whil e the File / Print preferences area sets the
storage / printing databar magnification display behaviour. Selecting
the radio button activates its functionality:

•The Real screen size: the imaging pixel width is handled.
– The Active view: the databar magnification value depends on

whether the Single or Quad UI imaging mode is selected. It is
displayed in the databar and stored / printed with an image with an
icon representing the Single / Quad UI imaging mode.

– The Single image: Single image mode magnification value is
displayed in the databar and stored / printed with an image.

– The 4-quad image: Quad image mode magnification value is
displayed in the databar and stored / printed with an image.

•The Polaroid 5” film width is handled. A recalculated
magnification value is displayed in the databar and stored / printed
with an image.

•The User device width (set by an user via the edit box) is
handled. A recalculated magnification value is displayed in the
databar and stored / printed with an image.

The Keep Screen and File / Print settings synchronized check box
keeps both settings identical.

4-37

Software Control: FEI User Management Software

FEI User Management Software

The FEI User management software allows to FEI Account
Admistrators, FEI Supervisors and FEI Microscope Users to organise
user accounts that can possibly be used to run the xT microscope
Control software. It allows the creation and removal of user accounts,
the setting of user passwords and group membership, as well as the
copying and removal of user data.

Y ou can start the software from the system Start menu. This brings up
the Log On dialogue box, containing Username and Password text
fields, for entering the User Management software.

CONTROL POSSIBILITIES

• Context menu – You can reach some context options by right­clicking (see below).

• Press and Drag actions – Instead of using menu options, you can
sometimes simply press and drag items from one icon to another
(set user group).

FEI ACCOUNT ADMINISTRATORS

As the highest account level, FEI Account Administrators have rights
that allow them to create and delete users and change their properties
over the following user groups (in order of significance):

• FEI Account Administrator

• FEI Supervisor Users

• FEI Microscope Users

• FEI Non-active Users

Each of these accounts has its own opportunity to operate the
xT microscope Server and Control software. The first FEI Account
Administrator is created during the system installation.

FIGURE 4-23

FEI ACCOUNT ADMINISTRATORS CONTROL OVERVIEW

4-38

Software Control: FEI User Management Software

The File Menu

contains the following items:

• Log On: click to log on (active when user is logged out).

• Log Out: click to log off (active when user is logged on).

• Refresh (F5): click to refresh the user tree.

• Exit: click to exit the FEI User management program.

The Account Menu

contains the following items, which are accessible only for FEI

Account Administrators

function).

• Create (Ins): click to add a new user or supervisor.

(with the exception of set password

• Remove (Del): click to remove an existing user. The user must be
highlighted first.

If an FEI Microscope User has user data, the account administrator is
warned that user data will be removed also. If any additional user is to
be removed, that additional user’s data is removed without warnings.

• Set password: click to make a password for the user. The user
must first be highlighted in the tree.
An FEI Account Administrator can change the password for any
user from a lower level account.

• Set user group: click to set the group for the user. The user must
first be highlighted in the tree. When confirmed, the user is moved
to selected group. When moving an user from the FEI Microscope
Users group to the FEI Non-active Users group, his user data will
be removed. A warning is displayed in this case.

4-39

Software Control: FEI User Management Software

• Properties (Alt + Enter): click to see and change the properties

The Userdata menu

contains the following items.

• Copy (Ctrl + C): click to copy user data from an user of the same

• Paste (Ctrl + V): click to paste user data into your own account or

• Remove: click to delete user data from a selected account of

for that user. The user must first be highlighted in the tree.

or a lower level group.

into the accounts of a lower group level. It is not possible to copy
user data inside the FEI Supervisors User group.

equal or lower group level.

The Help Menu

contains the following items:

• Legend: clicking provides an explanation of icons used in the tree.

• About: displays the FEI User Management software version and
copyright.

ACCOUNT LOGGING

This accounting utility monitors user, log on / off actions, session time,
filament lifetime and the UI status. It works with two log files located in
c:\Program Files\FEI\data\accounting\:

• accounting.tmp is a temporary running file during use of the
equipment at each user session, updated every 15 seconds so
that any power down or operating system crash situation can be
time logged.

• accounting.log is permanent file to which the previous data are
sent when a new session is started. This file is only readable by
the FEI Supervisor User or higher level.

These files can only be deleted at factory or service level, each one is
a text - CSV file so it can be loaded into Microsoft Excel for
processing.

4-40

Entering Commands in Summary

USING THE MOUSE

TABLE 4-3 MOUSE BUTTON FUNCTIONS

Key + Button Function

Click Control Areas: makes selection in control areas

(single arrow cursor).

On Screen: press and drag a selected area
zoom in

the selection (selectable in Preferences).

Doubleclick Electron imaging: moves the selected point to

the middle of the quad.

Optical imaging: 4 mm marker placement

Click + Shift On Screen: press and drag a selected area to

zoom out

Software Control: Entering Commands in Summary

to

magnification to fill the imaging area with

.

imaging to fit the selected area.

Shift + click 1. Activates Beam Shift (hand cursor).

2. Pauses / Activates all quads when clicking the
toolbar pause icon.

Right-click To focus press and move the mouse to the left or

right (double ended arrow cursor).

Shift + Right­click

Ctrl + Right­click

Shift + Wheel­roll Up / Down

Ctrl + Wheel­roll Up / Down

(Ctrl+) Wheel­press

To correct an imaging astigmatism, press and
move the mouse (four-arrow cursor) to the left /
right (X stigmator), or up / down (Y stigmator).

Activates Lens Alignment
(4-arrow cursor with circles ).

Fine Control: rolling the wheel

increases / decreases the magnification

Coarse Control: rolling the wheel

increases / decreases the magnification

Electron / Ion imaging: wheel-press to activate
the TRACK mode
the sample surface.

Optical imaging: wheel-press to activate the

stage Z - up / down movement (stage Tilt - left /
right movement), which can be seen live.

for joystick-like movement over

.

.

Note:

The given sequence of the key and mouse button press is important
for some functions.

4-41

Software Control: Entering Commands in Summary

USING THE KEYBOARD

TABLE 4-4 WINDOWS SYSTEM KEYS

Key (+ Key) Function

Enter Equivalent to OK in a dialogue box .
Esc 1. Equivalent to the Cancel button.

Tab Step key to highlight items in a dialogue box.

2. Cancels the click

3. Stops the stage motion at that point.
Note:
During some procedures (Home Stage for
instance) use the software Cancel or Stop button!

and drag function.

(Shift +)
Arrows

Alt (or F10) Activates menu of the active application. Pressing

Alt + Tab Use to switch between running applications. This

Alt + F4 Exits active application or Windows operating

Del(ete) Deletes selected text or items.
Ctrl + A Select all items
Ctrl + C

(Ctrl + Insert)

1. Use to select between items in a group when in
a list box.

2. When quad is active and selected, the stage
moves approximately (40%) 80% of the field of
view in any direction by clicking the appropriate
keyboard Arrow key.

the underlined character in the menu bar pulls­down the corresponding menu.

starts from the last used one, continue to press
the TAB key (while holding down the ALT key)
and applications are shown one by one.
Releasing the ALT key at any time makes
application just highlighted active.

system.

Copy to clipboard

4-42

Ctrl + V
(Shift + Insert)

Ctrl + X
(Ctrl + Delete)

Paste from clipboard

Cut to clipboard

Software Control: Entering Commands in Summary

TABLE 4-5 FUNCTION AND SPECIFIC KEY SHORT-CUTS

Key (+ Key) Function

F1 Displays On-Line Docum enta tio n
Shift + F1 Opens Image Properties dialogue
(Shift +) F2 Starts Photo (from all quads at once)
Ctrl + (Shif t +) F2 Starts / Stops Active Preset Snapshot (from all quads at once)
F3 Toggles Videoscope On / Off
Shift + F3 Starts Home Stage procedure
F4 Starts / Stops Snapshot
Shift + F4 Starts Lens Alignment procedure
F5 Toggles Single / Quad Image mode
Ctrl + F5 Toggles Large Image Window mode
Shift + F5 Toggles Center Cross display
F6 Pauses / Resumes scanning
Shift + F6 Toggles Alignment rectangle display
F7 Toggles Reduced Area / Full Frame Mode
Ctrl + (Shif t +) F7 Starts / Undo Image Post Processing
F8 Degauss
F9 Starts Auto Contrast and Brightness procedure
Shift + F9 Link Z to FWD
F11 Starts Auto Focus procedure
Ctrl + F11 Starts Auto Stigmator procedure
Shift + F11 Toggles Display Saturation function
(Shift +) F12 Toggles Compucentric (Scan) Rotation tool
Ctrl + 0 - number Moves stage to X=0, Y=0
Ctrl + B Toggles Beam Blank function
Ctrl + D Set Default Parameters
Ctrl + F Sets beam focus to WD = 10 mm
Ctrl + H Set Horizontal Field Width
Ctrl + K Sets Spot scanning conditions
Ctrl + M Sets Full Frame scanning conditions
Ctrl + Shift + M Starts movie recording dialogue
Ctrl + N Togles Sample Navigation
Ctrl + O - letter Opens Preferences dialogue
Ctrl + P Opens Print dialogue
Ctrl + R Restarts scan
Ctrl + (Shift +) S Save images (from all quads)
Ctrl + Z Moves stage to the last time position

4-43

Software Control: Entering Commands in Summary

TABLE 4-5 FUNCTION AND SPECIFIC KEY SHORT-CUTS

Key (+ Key) Function

Ctrl + (Shift +) , Set one step slower (slow) scanning
Ctrl + (Shift +) . Set one step faster (fast) scanning
Ctrl + (Shift+) Tab (Backward) steps between quads
Ctrl + Page Up / Down Left / Right steps between pages
Ctrl + 1 / 2 / 3 …

- keyboard

Selection of the particular page (the number corresponds to
the toolbar page icon sequence)

+ / - Increases / Decreases the magnification 2×
* Rounds off the magnification / HFW to the nearest round value
Ctrl + +/- Scales up / down the image 2× (Digital Zoom)
Ctrl + arrow Moves the digital zoom area

4-44

5

OPERATING PROCEDURES

This chapter describes how to use the Microscope system from an
application point of view. The following subjects are covered:

• Specimen Preparation and Handling

• Obtaining an Image

• Optimising an Image

• Detector types and usage

• Capturing and Handling a Sing le Imag e

• Recording Movies (Saving Multiple Images)

• Measurement and Annotation Functions

Caution!

These procedures assume you are familiar with the xT microscope
server and xT microscope Control software (see Chapter 4), which
are necessary to start and operate the microscope.

5-1

Operating Procedures: Specimen Preparation and Handling

Specimen Preparation and Handling

The specimen material for High Vacuum mode must be able to
withstand a low pressure environment (without outgassing) and the
bombardment by electrons. It must be clean and conductive. Oil and
dust may contaminate the chamber environment, which could hinder
or even prevent evacuation to the level needed for standard SEM
operation.

Note:

Always wear lint- / powder-free clean room gloves when reaching into
the specimen chamber to minimise oils, dust, or other contaminants
left inside the chamber.

NEEDED ITEMS

• Class 100 clean-room gloves

• Specimen stubs and conductive adhesive material

• Tools: tweezers, 1.5 mm hex wrench

• Prepared or natural specimen

NATURAL SPECIMEN

If no coating is desired the Low Vacuum mode can be used to
stabilise the specimen for observation. This mode is useful if there is a
suspicion that a coating might alter the specimen.

If the specimen contains any volatile components, such as water or
oil, and therefore will not withstand coating, then the ESEM mode can
be utilised with the correct environment gas and pressure to allow
observation of the specimen in its natural state.

COATED SP ECIMEN

If the specimen is nonconductive (plastic, fibre, polymer or other
substance with an electrical resistance greater than 10
specimen can be coated with a thin conductive layer. This conductive
layer reduces beam instability due to sample charging and improves
image quality.

For successful imaging, rough surfaced specimens must be evenly
coated from every direction. Biological, cloth and powder specimens
may require carbon or other conductive painting on portions of the
specimen that are hard to coat.

Coating reduces beam penetration and makes the image sharper. It
may mask elements of interest for X-ray analysis (thus the use of
carbon for geological and biological specimens).

For more information on specific preparation techniques, see
Scanning Electron Microscopy and X-Ray Microanalysis, 2nd ed. by
Joseph Goldstein et al., Plenum Press, New York, 1992.

10

ohms) the

5-2

Operating Procedures: Specimen Preparation and Handling

MOUNTING THE SPECIMEN TO THE HOLDER

Wafers and PGA devices have individual sample-mounting
procedures. If you are using a wafer piece or other sample, attach the
specimen to the specimen holder using any suitable SEM vacuum­quality adhesive, preferably carbon paint. The specimen must be
electrically grounded to the sample holder to minimize specimen
charging. If you are using a vice mechanism or double-sided tape,
make sure the specimen is conductively attached to the holder.

Note:

The sample holder is not directly grounded to the chamber ground
because it is connected to the BNC feed on the chamber door. This
allows to measure the sample current.

Caution!

Store samples and sample holders in a dry and dust free environment.
Dust on samples can get drawn into the electron column, degrading
imaging and requiring an FEI Customer Service.

INSERTING / EXCHANGING A SPECIMEN AND / OR A DETECTOR

It is assumed, that the microscope is in the Full operation state (see
Chapter 3). Follow the procedure:

1. Click th e Vacuum module / Vent button. The confirmation dialogue
appears.

After a High Voltage switch off, the vacuum system switches off the
pumps and opens the appropriate valves to vent the system. After
a specified venting time the venting valve will close.

Note:

If the venting valve closes before the chamber is at the
atmospheric pressure (the door is not possible to open), click the
Vent button once more to open it again.

If you vent the system in order to change a detector, wait
until the Status module vacuum icon is grey. Otherwise there is a
risk of a detector assessment malfunction, and as a result the PLA
(see below) is not recognized by the system.

2. When vented, open the specimen chamber and, using lint-free
gloves or tweezers, place a specimen into the specimen holder.
Secure the specimen stub with an appropriate hex-wrench unless
a spring-clip holder has been used.

3. Install any additional detector if it is not already done (see below).

4. Adjust the Eucentric Position (see Chapter 7).

5. Close the specimen chamber door.

5-3

Operating Procedures: Obtaining an Image

Obtaining an Image

OPERATION PRE-CHECK

To ensure correct operation in any Vacuum mode, check the following
list before continuing. After obtaining a preliminary image, you can
then experiment with your settings.

It is also possible to use Set Default Parameters (Ctrl + D) function
found at the Tools menu.

TABLE 5-1 QUANTA FEG SETUP CONDITIONS

Adjustment E-Beam Setting

Vacuum mode HiVac: conductive samples

LoVac: nonconductive, mixed or contaminating

samples

ESEM: wet samples (use H

High Voltage Select voltage relative to specimen type:

- low voltage for surface imaging, beam-sensitive
samples and slightly charging samples

- high voltage for conductors, high resolution,
compound info (BSE, X-ray)

For example:

- biological sample High Voltage = (1–10) kV

- metal sample High Voltage = (10–30) kV

O gas medium)

2

Spot size HiVac and LoVac: 3 or 4

ESEM: 4

Pressure HiVac: the lowest

LoVac: 60 Pa (0.5 Torr)
ESEM: 600 Pa (3.7 Torr)

Scan rate HiVac: fast (dwell time about 0.1 - 0.3 µs)

LoVac

Working
Distance

Magnification Set to lowest – from 50× to 200×
Standard

Detector

Filtering HiVac: Average (4 frames for fast scans)

Contrast
and Brightness

Set the highest specimen point to approximately
10 mm (yellow mark in an optical quad) and press
Ctrl + F to set WD to 10 mm.

HiVac: ETD (SE)
LoVac: LFD
ESEM: GSED

LoVac and ESEM: Live

With contrast at minimum value adjust brightness
to just show a change in intensity to the screen.
Increase the contrast to produ ce a reasonabl e
image on screen. Increases in brightness and
decreases in contrast produce softer images and
vice versa.

and

ESEM:

slow (dwell time about 1 - 3 µs)

5-4

Operating Procedures: Obtaining an Image

SELECTING VACUUM MODE

When a specimen and appropriate detector(s) are inserted correctly,
close the specimen chamber door and continue the procedure (see
above):

6. In Vacuum module, select the High Vacuum / Low Vacuum /
ESEM radio button.

7. For Low Vacuum / ESEM modes use water or select the desired

gas environment (option) from the drop down list box and the
target pressure that the system pumps to in the Chamber

Pressure adjuster.

8. In the Vacuum module click on the Pump button. While pumping,

choose the highest specimen point and bring it to the 10 mm WD
(yellow line in an optical quad).

Note:
Under normal operation, the system knows the PLA size for the
detector installed. This allows the system to set automatic
pressure range limits for the aperture installed, thus avoiding
vacuum errors w he n sett i ng ch am ber p re ssure . In so me ca ses t he
user is prompted for the PLA size by the PLA Configuration
dialogue.

WARNING!

The system can be dama ge d by usi ng th e Lo w Vacuum / ESEM
mode without an approp ri at e PLA. Do n ot sele ct a P LA Cone
which is not actually mounted onto the objective pole piece.

9. Wait for the vacuum status Pumped, represented in the Status
module at the base of the page by the green icon.

Low Vacuum and ESEM Modes

Which one of these modes is used depends on either the detector
installed or some special conditions (working with the cooling stage
implies ESEM mode for instance).

Purging

The microscope provides automatic sequencing for purging the
specimen chamber according to the settings of Purge Mode in the
Preferences… / ESEM tab. There may be certain applications (e.g.,
working with a sensitive sample) where the operator needs to change
the purging parameters:

• Select No Purge when purging the specimen chamber is not
desired. The chamber goes to th e set pres sure di rectly an d the gas
mixture in the chamber slowly changes to the selected gas type.

• Select Automatic to use pre-defined values for Minimum /
Maximum Pressure and Number of cycles. The Purge Settings
displays the actual default values.

• Select

Custom

the

Number of cycles

Caution:

The maximum allowed pressure is 200 Pa (1.5 T orr) for all actually
available PLA Cones.

to change the

manually using the

Minimum / Maximum Pressure

Custom

Edit boxes.

and

5-5

Operating Procedures: Obtaining an Image

SPOT SIZE

The electron beam diameter (usually represented as the Spot size) is
considered to be close to ideal when its edges just touch the
neighbouring spot. If it is too large, overlaps occur and the image
appears out of focus. If it is too small, electronic noise appears in the
image.

There are factory preset Spot numbers selectable from the Column
module / Spot number list box and from the toolbar list box. The last
user spot size value used is also kept in the Spot number list.

Deciding which spot size is suitable for a particular magnification can
be determined when you achieve good focus and astigmatism
correction.

TABLE 5-2

Spot size Best Use

1, 2 Very high resolution (mag >50 000×)
3, 4, 5 Standard imaging, SE, BSED, LFD, GSED
5, 6 BSED, CL, X-ray analysis, EBSP

SPOT SIZES AND RECOMMENDATION OF THEIR USE

Note:
When changing the spot size, adjustment of the Detector module /
Contrast and / or Brightness may be necessary to optimize the image.
An alternate approach is to use the Auto Contrast Brightness (F9)
function.

The Beam Current

could be controlled by changing the spot size and by selecting the
final lens aperture (see Chapter 2). A hint on a proper setting gives
the following table.

TABLE 5-3 OPTIMAL FINAL LENS APERTURE SIZES [µm]

(COLUMN A) AND APPROXIMATE SPOT SIZES
(COLUMN B) AS A FUNCTION OF HIGH VOLTAGE
AND BEAM CURRENT

HV [kV] Beam Current I [nA]

0.01 0.1 1.0 2.0 5.0 10

ABABABABABAB

0.5 15 3.0 20 4.5 20 6.0 30 6.0 30 6.5 40 7.0

1.0 20 2.0 20 4.0 30 5.0 30 5.5 40 5.5 50 6.0

2.0 20 2.0 20 3.5 30 4.5 40 4.5 50 5.0 50 5.5

5.0 30 1.0 30 2.0 40 3.5 50 4.0 50 4.5 50 5.0

10.0 30 30 2.0 40 3.0 50 3.5 50 4.0 50 4.5

20.0 30 40 1.5 40 3.0 50 3.0 50 4.0 50 4.0

30.0 30 40 1.0 40 3.0 50 3.0 50 4.0 50 4.0

5-6

OBTAINING AN IMAGE ON SCREEN

The following assumes that the electron emission is on. Continue the
procedure (see above):

10.Select an appropriate detector (see below) and release the active

11.Click the Column module / Beam On button to ramp up the

12.Focus the image and Link Z to FWD (see Chapter 4).

13.Adjust to a suitable magnification, optimize the image with

Optimising an Image

Operating Procedures: Optimising an Image

quad.

accelerating voltage. An image appears in the active quad.

Contrast and Brightness, focus, Stigmator (see below).

PRINCIPLES OF SEM IMAGING

All scanning b ea m microscopes produce images with the same
fundamental technique. The primary beam is scanned across the
specimen surface in a regular pattern called a raster. Normally, this raster
consists of a series of lines in the horizontal (X) axis, shifted slightly from
one another in the vertical (Y) axis. The lines are made up of many dwell
points and the time of each dwell point can be shortened or prolonged
(dwell time). The number of points per line can be increased or
decreased as well as the number of effective lines (resolution). The result
is a picture point (pixel) array. Low or high resolution images can be
obtained b y ch ang ing thes e factor s. Th e larg er th e pi xel arra y, the high er
the resolution of the image. The image is created pixel-by-pixel in the
computer mem ory and displayed on a monitor screen.

The signal emitted by the specimen surface as it is illuminated with
the primary beam is collected by the detector, amplified and used to
adjust the intensity of the corresponding image pixel. Because of this
direct correspondence, the image displayed on the monitor is directly
related to the specimen surface properties.

The raster consists of many (typically one million) individual locations
(pixels) that the beam visits. As the beam is scanned, the signal
emitted by the sample at each beam position is measured and stored
in the appropriate digital memory location. At any time after the beam
scan, the computer can access the data and process it to change its
properties, or use it to generate a display.

MAGNIFICATION

Magnification is calculated as the displayed image dimension (L)
divided by the sample scanned dimension (l).

If the observed sample point size is made smaller while the monitor
size remains constant, the magnification increases. At low
magnification, you get a large field of view. At high magnification, you
point only a tiny sample area.

5-7

Operating Procedures: Optimising an Image

Alternatively Magnification could be expressed as the Horizontal Field
Width (HFW), specifying dimension of the scanned area (see the
Preferences… / General tab).

The Quanta FEG supports two viewing sizes: Quad Image and
Single Imag e modes. Magnification is always adjusted in the databar
for the actual display, thus an image at 500× in Quad Image mode is
1000× in the Single Image mode as its size has doubled.

FIGURE 5-1 MONITOR IMAGE AND SCANNED SAMPLE

Changing Magnification

•The Toolbar list box is used to select from a predefined values.

•The Keyboard control (+ / - / *): the numeric pad plus key (+) / the
minus key (-) increases / decreases the magnification 2× and
rounds the value (when using the HFW, no rounding takes place).
The star (*) key rounds the magnification / HFW value
(e.g. 10 063× becomes 10 000×).

•The Mouse wheel control: Coarse / fine control can be operated
by holding the Ctrl / Shift keyboard key and moving the mouse
wheel up / down to increase / decrease the magnification.

•The

•The Magnification module (see Chapter 4)

•The Digital Zoom module (see Chapter 4)

Selected Area Zooming In / Out

/ out on an area of interest. Press in the imaging area and drag to
make a dotted box over the area of interest (the cursor changes to
a magnifying glass with a + sign). Release the button and the
selected area increases to fill the whole quad (window) with respect
to the sides ratio. Using the Shift key while pressing consecutively
reverses the technique – the cursor changes to a magnifying glass
with a - sign (see above). The escape button cancels the operation
at any time.

is a quick way of zooming in

SCAN SP EED AND FILTERING

5-8

To make a good image it is necessary to find a balance between scan
speed, charge, sample damage and signal to noise ratio.

A noisy image can be improved by decreasing the scan speed. If charge or
sample damage are the limiting factors it is better to use a faster scan
speed in combination with an

Average

or

Integrate

filter (see Chapter 4).

Operating Procedures: Optimising an Image

CONTRAST AND BRIGHTNESS

The contrast and brightness can be set manually either by adjusting
the Detectors module controls (see Chapter 4) or using the MUI
(option). Follow the procedure:

1. Select a medium speed scan in an active quad.

2. Reduce the contrast to zero and adjust the brightness to a level so

that the last gray level can be seen, by eye, before the screen goes
black.

3. Increase the contrast so that the signal level shows an image.

4. If necessary, adjust the brightness level to improve the image.

These adjusters always have a la bel / editable value (displaying the
actual Contrast or Brightness level in %) in the upper left / right corner.

Using Videoscope (F3)

This mode could facilitate contrast and brightness optimization to
obtain full greyscale level range of an image.

Three yellow horizontal lines (placed over the image window ) indicate
white (top line), grey (middle line) and black (bottom line) levels. The
oscillogram signal amplitude / central position reflects a contrast /
brightness of the just scanned line. If the oscillogram is cut by the
bottom / top line, the signal level is clipped in black / white. This should
be avoided because the image details are lost in the clipped areas.

Tuning the oscillogram exactly between the top and bottom lines for a
feature of interest (with the use of the reduced area) results in the full
detailed image. The signal clipping may be used to obtain harder
contrast conditions when more black and white is needed. The signal
amplitude lowering decreases the contrast, i.e. the image looks softer.
Follow the procedure:

1. Select a slow scan in an active quad.

2. Activate the Videoscope (F3 / toolbar icon / Scan menu).

3. Reduce the contrast to zero and adjust the brightness level to the

lower dashed line (black).

4. Increase the contrast so that the signal level just clips the upper
dashed line (white).

5. If necessary, adjust the brightness level once more so that the
average signal level is roughly in the middle.

6. The high and low peaks should just clip the dashed lines.

Enhanced Image module can be used to adjust the LUT, including

Gamma control. This can be useful for low signal conditions or odd
imaging requirements. Results affect the videoscope display.

Note:
Use also the following functions to optimize
the Contrast / Brightness (see Chapter 4): Auto Contrast Brightness
(F9), User Auto Contrast Brightness, Display Saturation (Shift +
F11).

5-9

Operating Procedures: Optimising an Image

FOCUSING

Find a feature of interest with distinct edges on a specimen. Use a
combination of contrast, brightness and magnification adjustments to
maximize the image quality.

To avoid scanning too long and contaminating or even damaging the
sample, move away from a feature of interest with the stage, and
focus until the image is sharp on an adjacent area.

Focusing at a high er magn ifica tion ma kes th e resu lt more prec ise. Fo r
example, for an output at the 2000× magnification focus at 4000× –
8000× magnification.

1. Right-press when the mouse cursor is over an imaging area (the
mouse cursor changes to a double-ended arrow) and drag the
mouse from side to side until the image (in an active quad) is
sharp, then release the mouse button.

2. The focus function (cursor) is active over the whole screen without
any interference with other controls. If the full mouse motion is not
sufficient to get the image in focus: release the mouse button at
one side of the screen, move the mouse cursor to the opposite one
and right-press again over an imaging area to continue focusing.

3. If this is the new specimen first time focusing,
run the Link Z to FWD function (see Chapter 4).

Focusing with the MUI (option)

Use coarse and fine focus knobs to focus the image. The image
immediately responds to the MUI.

Note:
Use also the following functions to focus the image
(see Chapter 4): Reduced area (F7), Auto Focus (F11).

CORRECTING ASTIGMATISM

This optical aberration is caused by different focal lengths for rays of
various orientation, resulting in a directional image blur (horizontal and
vertical rays are not focused to the same plane on the image edges).

Note:

For normal astigmatism correction use the automatic procedure
(Ctrl + F11) or follow the procedure below, if you want to reach the
best results.

There are special coils serving to correct this imperfection, which is
usually better visible at higher magnifications (3000× or more). You
need to correct astigmatism when you change the imaging conditions.
Follow the procedure:

1. Focus the image as well as possible.

2. Bring the image just slightly out of focus. The image appears to

become sharper in one direction whereas in perpendicular
direction image blur increases (blurring or stretching of the image).

3. Defocus in the other direction to observe the opposite directional
blur.

4. Focus to the midpoint between the two directions, where the blur is
visible.

5. 1. Use the Beam module Stigmator 2D control.

2. Shif t + Right-p re ss while over the imaging window (this results
in a 4 arrowed cross appearing in the center of the screen). Move

5-10

Operating Procedures: Optimising an Image

the cursor around the screen to achieve maximum sharpness.
When you are satisfied, release the mouse button.

3. The MUI (optional): adjust image sharpness with the stigmator X
and Y knobs until the best image is achieved. The computer beeps
when the stigmator limits are reached.

6. Repeat steps 1–5 as necessary.
If astigmatism is severe and the cross is close to the edge of the

screen when nearing correction, release the mouse button and
reposition the cross in the centre of the screen. Then repeat the
procedure above to perform further astigmatism correction. You can
use reduced area advantageously (see Chapter 4).

If an astigmatism cannot be corrected, there may be some other reason,
usually the final lens aperture is dirty (see Chapter 8), the magnification
may be too high for the beam spot size (see below) or the sample is
charging (apply conductive layer or use the LoVac / ESEM mode).

PRESSURE AND WORKING DISTANCE (WD)

It is assumed the LoVac / ESEM mode is set, the GSED or GBSD is
installed and the sample is visible in the image display area.

For st andard imaging choose the highest specimen point and bring it
to the 10 mm WD (the yellow line in an optical quad). Focus the image
and then link Z to FWD. Adjust the chamber pressure to achieve the
brightest possible image. Lower the pressure about 67 Pa (0.5 Torr)
from this point.

FIGURE 5-2 BRIGHTNESS VS PRESSURE

Adjust contrast and brightness to personal taste to obtain a clear,
optimized image, which should allow small changes (about 0.5 mm) in
WD without the need to alter the chamber pressure.

High resolution imagi ng is achieved by moving the sample closer to
the pole piece; the objective lens performs the better the smaller is the
WD. Adjust the chamber pressure (see above, the pressure should be
a little higher).

Note:

Some experimentation may be necessary, as the relationship between
WD and chamber pressure is largely sample-dependent.

Caution:
Always take care when moving the stage up because of possible lens
pole contact.

5-11

Operating Procedures: Optimising an Image

DIGITAL IMAGING ENHANCEMENT / IMAGING MIXING / COLORING

The Enhanced Image module offers various digital image
enhancements.

Note:
When saving the image with the digital enhancements applied, be
sure to choose the correct file format (see below).

The LUT (Look-Up-Table) Tab

enables to monitor and modify a grey level distribution (histogram).

•The Presets list box enables to select the Digital Contrast, Digital
Brightness and Gamma values using pre-defined or custom
presets.

•The D. Contrast continuous adjuster sets a contrast in the range
from -10 to +10 (negative values lead to an inverse imaging).

•The D. Bright. continuous adjuster sets a brightness in the range
from -2.0 to 2.0.

•The Gamma continuous adjuster corrects image brightness non-
linearly in the range from -10 to +10.

•The Graph window graphically displays (blue line) an applied
modification. Original / modified values are on the horizontal /
vertical axis.

•The Histogram button switches on / off the grey level distribution
(corresponding to the active quad image) display. The left / right
side corresponds to black / white original image pixels. The height
of the red line is proportional to the number of pixels with the
corresponding gray value.

•The Save button saves the actual setting as the custom preset.

•The Default button restores the default values.

The Mix 3 / Mix 4 Tab

The Mix feature operates in quad 3 / quad 4 and are enabled only if the

Detector

images (Average / Integrate, Digit al Contrast, Digital Brightness, Digit al
Zoom), not the raw detector signals. Any combination of live and
paused images can be mixed together, providing all mixed images
have the same pixel resolution. However, there are some logical
limitations and behaviours:

• The Average and Integrate filters are disabled.

• Pause / Resume influences the mixed image only, not its sources.

• The CCD image is not mixed.

Note:
In the Mix 3 tab the Source 3 controls and the Select 1+2+3 button are
disabled.

•The Presets list box enables to select the mixing ratios and colors

•The Source 1 / 2 / 3 linear continuous adjuster tunes the mixing

• Clicking the Color control areas (below each Source adjuster)

menu /

The Mix quad is always paused immediately regardless of the
actual scanning status.

using pre-defined or custom presets.

ratio of quad 1 / 2 / 3 images. The adjuster % values shape
correspondingly the resulting image. Changing any Source value
influences the other ones automatically to reach the 100% sum.

enables to select a color, replacing the source image black (left) /
white (right) one. The image gray scale is linearly transformed to a

Mix

is selected for a quad 3 / 4. It uses the processed

5-12

Operating Procedures: Optimising an Image

new color spectrum before it is mixed with other image(s).
Note:

Color images (see below – the Color tab) are converted to
greyscale ones before mixing.

•The Invert check boxes inverts the corresponding source image

spectrum. It has the same effect as exchanging the left and right
colors selection.

•The Select 1+2 / 1+2+3 button selects between quads 1+2 or

quads 1+2+ 3 mixing modes.

•The Save button saves the actual setting as the custom preset.

The Color Tab

enables to colorize a gray scale image. An image already colored with
the use of the Mix 3 / Mix 4 tab cannot be colored again, the Color tab
is disabled.

•The Presets list box enables to select the color profile using pre-

defined or custom presets.

•The Coloring Control area displays the active quad image

histogram and enables to create a color profile.
Right-licking into the histogram area adds the vertical borderline

with a divided triangle on top (right-clicking onto an existing one
removes it). Pressing and dragging a borderline changes its
position along the histogram. Clicking onto the left / right part of the
triangle selects the left / right border color. The image gray scale
between two borderlines is linearly transformed to a new color
spectrum.

•The Hand button enables to select and color a particular image

gray level. Clicking it opens the color selection dialogue: select a
color and press the OK button. The mouse cursor changes to the
hand image. Click the feature image you want to highlight. New
borderline is added into the histogram with a rectangle on top. The
selected grey level is marked with the chosen color. You can move
this borderline and change its color the same way as a borderline
with a triangle on top. By dragging the rectangle left / right side the
highlighted grey level range could be changed.

•The Enable check box switches on / off actual color settings for

the active quad image.

•The Save button saves the actual setting as the custom preset.

The Process Tab

Here the user can set parameters, which adapt image when clicking
the Apply button, or when selecting the Tools menu / Image Post

Processing (Ctrl + F7). The Undo button, or the Tools menu /Undo
Image Post Processing (Ctrl + Shift + F7) reverts the corrections

back.

•The Denoising strenght (0 / 1 / 2 / 3 / 4) removes dust and

scratches from the image.

•The Sharpening strenght (0 / 1 / 2 / 3 / 4) corrects the image

sharpness.
The Custom settings could be saved.
Note:

This functionality works only with greyscale images (not colored via
Color tab), images which are paused or with loaded saved ones.

5-13

Operating Procedures: Detector Types and Usage

Detector Types and Usage

The Detectors menu shows all detectors, a selected one has a tick
mark next to its label. Availability of detectors (full color label) depends
on the actual vacuum mode. The system remembers the last detector
used for a particular vacuum mode and its Contrast & Brightness
settings.

Note:

If any detector which is not compatible with the actual mode is
selected, the imaging quad cannot be resumed.

TABLE 5-4 ALL DETECTORS TYPES

Detector Name UI Tag Vacuum Mode Detected Signal Max. Pressure [Pa]

Everhart-Thornley ETD HiVac SE (tunable energy)

BSE
Backscattered Electron BSED HiVac, LoVac BSE 200 S
Large Field LFD LoVac, ESEM SE + BSE 200 S
Gaseous Secondary

Electron
CCD camera CCD any light, infra-red light any S
External EXT detector-

Gaseous Backscattered
Electron

Gaseous Analytical GAD HiVac, LoVac,

Concentric Backscattered CBS HiVac, LoVac BSE 200 O
Scanning Transmitted

Electron Microscopy
Wet STEM STEM I HiVac, LoVac,

Annular STEM STEM II HiVac, LoVac,

GSED LoVac, ESEM SE 1000 µm aperture: 750

detector-dependent detector-dependent

dependent

GBSD LoVac, ESEM SE, BSE 10 (500 optimal) - 2600 O

BSE 2600 O

ESEM

STEM I HiVac, LoVac,

ESEM

ESEM

ESEM

TE any O

TE any O

TE any O / R

3 × 10-2 S

500 µm aperture: 2600

Note

S

Photo Multiplier Tube /
Centaurus

Photo Multiplier Tube /
Autrata

low voltage, high contras t vCD HiVac, LoVac BSE 200 - retractable

Quad Back Scattered
Electron

InColumn ICD HiVac, LoVac SE (in BD mode

ESEM & Gaseous
Analytical

PMT ­BSE

PMT ­BSE

Quad
BSED

GSED
/
GAD

HiV a c, LoVac photons, BSE 200 O

HiVac, LoVac BSE 200 O

2600 - lens mounted

HiVac, LoVac BSE 200 O / R

200 O

only)

see GSED
and
GAD

SE, BSE

(simultaneously in

individual quads)

2600 O

boldface text – preferable vacuum mode, SE = secondary electrons,
BSE = back scattered electrons, TE = transmitted electron,
S = standard, O = optional , R = possibly retractable

5-14

O / R

Operating Procedures: Detector Types and Usage

DETECTOR CONNECTION

Detectors are connected to the feed-through connector panel.
Connectors have engraved names and they are used to connect
following detectors:

•The STEM connector:
STEM I (Scanning Transmitted Electron Microscopy, Wet STEM),
STEM II (Annular STEM)

•The GAD connector: GAD, GSED / GAD, ICD

•The BSD connector: BSED, Quad BSED, vCD, CBS

EVERHART THORNLEY DETECTOR (ETD)

It is a scintillator photo-multiplier type detector monitoring electrons
generated by the primary beam interaction with the specimen surface.
It is permanently mounted in the chamber above and to one side of
the sample. It works in two Modes:

• Secondary Electrons (SE)

• Backscattered Electrons (BSE).

The ETD Settings

The Detector Settings / Mode list box enables to choose a

Secondary Electrons / Back Scatter Electrons mode (the Grid
Voltage is set to +250 V / -150 V) / Custom mode (the Grid Voltage

could be set by the adjuster in a range from -240 to + 260 V). When
the voltage is negative (use a range of -50 to - 240 V), SE are repelled
from the ETD detector and only BSE are detected.

BACKSCATTERED ELECTRONS (BSED) AND GASEOUS ANALYTICAL (GAD - optional) DETECTORS

These are two-segment low-voltage diodes. The BSED is designated
for a HiVac large field of view. The GAD (optional) has a 500 µm PLA
cone for the Low Vacuum and ESEM modes, especially for the X-ray
analysis. The cone extends down from the unit to 8.5 mm, which
reduces the gas path length for electrons to an efficient 1.5 mm at the
standard 10 mm analytical WD.

FIGURE 5-3 BSED / GAD DIODE UNITS

5-15

Operating Procedures: Detector Types and Usage

Either diode has an active area of approximately 125 mm2 per segment
and is positioned directly above the sample to obtain maximum detector
efficiency. Therefore it causes some limitation in the tilt range.

Both detectors are connected to an SSD pre-amplifier input board.
They can be used down to a high voltage about 1 kV and works best
at a slow scan conditions.

The BSED can be used for HiVac mode and for low magnification
imaging in LoVac mode. The GAD can be used for all vacuum modes,
but because it limits the minimum achievable WD, it is
disadvantageous for high resolution imaging in HiVac mode.

Both can be used in parallel with the LFD, which allows simultaneous
use of SE, BSE and X-ray detectors in a gaseous environment. They
should be used at the lower part of a pressure range, obtainable for a
particular detector.

Installing the Diode

Hold the detector by its sides and push up the back of the diode onto
the Standard Insert until it stops. The diode should by oriented so that
its out coming cables side should be faced (and parallel) to the
chamber door.

Detector home position

While the BSED / GAD detector is not used, it could be placed into a
holder which is mounted on the upper edge of the pole piece, saving it
from a mechanical damage and pollutions.

Caution!

The diode is sensitive to a mechanical damage so the active area
(shiny diode) should never be touched.
The BSED / GAD is mounted close to the (optional) X-ray detector
collimator, which must not be touched when changing detectors. It is
advisable to retract the EDX collimator when mounting / removing the
detector on / from the objective pole piece.

FIGURE 5-4 GAD INSTALLATION AND HOLDER POSITION

5-16

Detector Settings

Select the BSED / GAD from the Detector Settings module Detector
list box. Choose the required Mode by ticking the radio button:

•The Z Contrast (A+B) is the normal BSE image with suppressed
topographical contrast and maximum atomic number contrast.

•The Topography (A-B) is the pseudo-topographical image with
suppressed atomic number contrast and maximum topographical
contrast.

•The Segment A / B (Left / Right) uses shadows to create strong
topographical and atomic number contrast.

Operating Procedures: Detector Types and Usage

Obtaining Image in BSE Mode

1. Install one of the diodes and select the corresponding Detector.

2. Close the chamber door and pump down the chamber.
When the BSED / GAD diode is installed, N o Accesso r y / GAD
cone must be selected in the PLA Configuration dialogue when

this appears.

3. When the Vacuum is ready, switch on the accelerating voltage and
slowly increase the contrast and brightness to obtain an image.

Note:
Whenever the BSED or GAD is selected, the optical quad is paused
(because the CCD camera infra-red LEDs are switched off not to emit
the photons supersaturating the detector diode).

LARGE FIELD DETECTOR (LFD)

This detector is used with the standard insert. The field of view is
unrestricted and the magnification range is identical to that of HiVac
mode (assuming no other pole-piece accessory is mounted).

The signal from the LFD contains more BSE information than the
GSED signal. The detector is ideal for general imaging; it is also the
only gaseous SE detector that can be used simultaneously with a
BSED Detector.

FIGURE 5-5 LFD AND ITS CONFIGURATION

Installing and S etting the LFD

The

LFD

plugs into the signal connector behind the conical lens. In some

cases the user is prompted for the PLA size. Select

PLA Configuration
Note:

After inserting the LFD, Preferences… / ESEM tab / Purge mode
changes to Automatic despite any previous selection. This ensures
that the proper chamber environment is achieved (see Chapter 4).

dialogue or appropriate

Cone

if installe d.

No Accessory

in the

THE CCD CAMERA

enables to view the inner space of the specimen chamber (an optical
quad). It assists with an overall sample orientation and during a stage
movement to prevent its collision with the lens pole. IR LEDs are used
to light the specimen chamber interior.

5-17

Operating Procedures: Detector Types and Usage

Signal
Connector

Flexible
printed
circuit
board

Mounting
collar

GASEOUS SECONDARY ELECTRON DETECTOR (GSED)

The GSED is integrated into a flexible printed circuit board and plugs
into the signal connector behind the conical lens. It is used for general
wet imaging and for high pressure imaging with auxiliary gases.

FIGURE 5-6 GSED AND ITS CONFIGURATION

The overall image consists of a very pure SE signal with very little
BSE signal component, due to the detector design and chamber
geometry. This pure SE signal makes this detector best suited for
resolution imaging. The field of view is less than the LFD at the lowest
magnification. The lower magnification range is about 240× at 7 mm WD.

Installing and setting the GSED

1. With your gloved hand, grasp the detector by the rigid connector
end. Hold it with the detector head facing towards you, and the
yellow Torlon ring facing up.

2. Insert the detector (gold fingers facing forward) into the connector
located at t he ba ck of the cham ber, behind t he co nica l le ns. This i s
made easier by inserting the right side of the detector in to the
visible portion of the connector, then rotating the detector into
position. A keyed connector position prevents the user from
inserting the detector upside-down.

3. Place the yellow Torlon ring of the detector head under the lens
insert and press the detector head up onto the insert. This requires
little force and can be done with one finger. The yellow Torlon seal
should be fully in contact with the lens.

FIGURE 5-7 THE GSED INSTALLED

5-18

Operating Procedures: Detector Types and Usage

Removing the GSED
CAUTION!

DO NOT change the order of the following procedure! Otherwise you
can damage the detector.

1. Remove the detector head from the lens insert first. Do this by
catching a fingernail or thumbnail (of the gloved hand) on the
FRONT of the yellow T orlon ring and pull down (there is a shoulder
machined into the Torlon ring which is specifically designed for this
purpose).

2. Pull the other end of the detector out from the connector.

PLA CONES

In some cases it is possible to install a cone on the actual gaseous
detector to achieve some special characteristic. Here are the
possibilities available for the user:

•The Standard Insert is installed at all times. Gaseous detector
and / or the PLA cone are pressed onto the insert to form a gas
seal. Chamber gas (flowing through the detector / PLA aperture) is
pumped out through the holes in the sides of the insert. A gas­restricting aperture is found at the top of the insert.

Note:
This aperture also acts as a final or objective aperture. The
pressure above this aperture is considered to be very low. Any
pollution that accumulates on this aperture greatly affects the
image. If astigmatism is not possible to correct, it is usually a sign
that this aperture needs to be cleaned or replaced.

•The X-ray PLA cone (option - 500 µm aperture) is used for EDX
analysis (see Chapter 9) at a longer working distance (profile
extends down to 8.5 mm). Samples are imaged at 10 mm working
distance, which is the stage eucentric position and the collection
point of the EDX detector. It is used in conjunction with the LFD.

The longer p r ofile of this cone minim izes the low voltage beam
dispersion and skirting of the primary beam in the gaseous
environment o f the cham ber , allowin g more ele ctrons to int eract with
the specimen when focused and increasing the signal to noise ratio.

T o fit the X-ray PLA cone, remove any existing detector or PLA cone
from the standard insert, then press the X-ray PLA cone into place.

•The Low kV PLA cone (500 µm aperture) is installed onto the
standard insert in case the LFD is used for low vacuum and low
voltage imaging (i.e. below 5 kV) to reduce beam loss in the gas. It
is used when imaging at shorter working distances (< 9 mm) and
restricts the lower magnification limit.

•The Hot Stage cone (option - 1000 µm aperture) is used with the
heating stage in combination with the hook wire or LFD. It can be
used without the hot stage when beam protection is desired with a
larger field of view.

Note:
When the Pole-Piece Configuration dialogue appears, select the
appropriate cone according to the figure and the name.

5-19

Operating Procedures: Detector Types and Usage

DISCHARGES BETWEEN THE GASE O U S DETECTORS AND THE SAMPLE

Excessive voltage may cause a “breakdown” between the detector
and the sample, chamber, pole-piece etc. This could damage the
sample (at ground) but does not damage the detector. This condition
is indicated by white flashes or streaks across the image, and on
some systems a large discharge could make the system unsta ble or
cause the chamber to vent and switch off the HV. There are several
factors that could cause detector voltage breakdown:

• Contrast is set too high.

• Sample is too close to the detector.

• Gas pressure is low (depending on the detector and the

• Air in the chamber (water vapour purge cycle not complete).

• Sample is not grounded to the stage, or the stage is not fully

OBTAINING IMAGE PROCEDURE FOR GASEOUS DETECTORS

environment).

grounded (BNC plug not connected).

1. After the pumping and purge process click the Beam On button.

2.

The

Contrast

automatically adjusted to 70% of maximum value. Adjust it if
necessary to increase a signal or to stop possible discharges. The

Enhanced Contrast

used.

3. At the lowest possible magnification, adjust the Enhanced Contrast
and Brightness if necessary, until the bright circle of the used cone
can be seen in the centre of the image.

4. Increase magnification and adjust Contrast / Enhanced Contrast
and Brightness more precisely.

(detector voltage) adjuster in the Detector module is

adjuster (electronic gain) is set to the value last

5-20

Operating Procedures: Capturing and Handling Single Image

Capturing and Handling Single Image

After obtaining a good image quality, the image could be paused and
saved. It is possible to save an image using the File menu or using the
Scandium database software (option) image saving function.

Setup the file name label and harddrive destination for the image to be
saved using the next available label / number prior to the capture
session. Set the databar information important for the archiving (see
the Preferences… / Databar tab).

The conditions for a good image quality are:

• Slow scan speed (longer dwell time) of the beam.

• Select a pixel resolution from the drop down list box to suit the
detail in the image, i.e. no tearing pixelated edges.

• Increase the magnification at least 2× above the desired value,
focus and correct the astigmatism (using the reduced area), then
return the magnification back.

• Use the Videoscope to set the Contrast and Brightness accurately,
otherwise use the Auto Contrast Brightness procedure.

• Use Pause / Snapshot / Photo / Active Preset Snapshot / filtering
functions (see Chapter 4).

IMAGE TYPES

A computer perceives an image as a two-dimensional array of
numbers – bitmap. Each array element is called a pixel and is
represented as an integer value. Frequently, the pixel is represented
as an unsigned 8-bit integer in the range [0, 255], with 0 / 255
corresponding to black / white and shades of gray distributed over the
middle values. A 16-bit representation produces up to 65 536 different
shades of gray (it is not possible to distinguish onscreen), which may
be crucial for obtaining accurate data in analysis.

The raw scanned image is always a greyscale bitmap. The colors are
possible to add digitally as a result of particular features. The UI is
able to display and save images with a various bit depth:

•The Greyscale 8 / 16 bit image offers 256 / 65 536 levels of grey.
Live / Averaged and Integrated images are scanned as 8 / 16 bit

ones. For the Mix quad images a selection between the 8 or 16 bit
mode is possible.

•The Color 24 bit image offers 256 levels of each primary color (red
/ green / blue).

Digital colors coming from the Display Saturation feature, from the
Image Enhancement module / Color tab, from the Mix quad with
color mode set changes an image bit depth so there is no way to
save it without them. When user wants to obtain the image without
these color enhancements, it is necessary to turn off the respective
UI functions.

Colored digital overlaid graphics (Measurement and Annotation)
are possible to save with / without an image (see the respective
checkbox in the Save As dialog). Other types of overlaid graphics
over an image are never saved (icons, controls, videoscope etc.).

Digital File Formats

The image captured can be saved in various digital formats,
depending on the resulting color and bit depth needed. Generally

5-21

Operating Procedures: Capturing and Handling Single Image

there is no reason to save an image with a higher bit and color depth
than available in an original one. Over against saving an image with a
lower bit and color depth than available leads to the loss of
information. The message is displayed in this case onscreen.

•The TIF 8 / 16 – greyscale image type

•The TIF 24 file – color image type
TIF file contains active processing information, which could be

utilized for a databar setting (see the

•The JPG file is a compressed file format employing a lossy
compression algorithm resulting in the small file size with a little
loss of information, depending on the particular image appearance
and the compression level (factory preset to 80%). The 8 / 24 bit
depth is automatically selected when saving the greyscale / color
image file.

•The

BMP

automatically selected when saving the greyscale / color image file.

SAVING / OPENING / PRINTING

The following universal file handling functions could be used:

• Save (Ctrl + S) stores the image to the predetermined location
with the last used filename including an incremental number.

• Save As… opens a dialogue for saving images (this provides an
opportunity to change the file name, its location, and the possibility
to save also Databar and overlaid graphics). Both functions can be
linked to the Snapshot / Photo function (see the Preferences… /
Scanning tab).

• Save All... behaves the same way as Save As functionality, but
enables to save images from all four quads at once.

• Open… opens a single image file into the selected quad. The
dialogue displays, by default, the location used in the last Save
As… utilization.

• Print… (Ctrl + P) opens the printer setup dialogue so that the
choice of printer and settings can be established to print the
selected quad. Clicking the OK button in the printer setup dialogue
activates the printer to print the job.

Preferences…

file is an uncompressed file format. The 8 / 24 bit depth is

/

Databar

tab).

5-22

Image Capturing Procedure

1. Select the area of interest and set the Magnification, the Scan
condition, the image pixel Resolution and the Databar

informations that are required in the saved image.

2. Make the best image using any suitable method you are familiar
with.

3. Use the Pause (F6) / Snapsh ot (F4) / Photo (F2) / Active Pr es e t
Snapshot (Ctrl + F2) function. The scan makes one screen / quad

pass (or several passes when the number of integrated frames is
larger) and pauses.

4. The image can now be saved by
File menu / Save (Ctrl + S) / Save As… / Save All… functions.

Image Printing Procedure

1. Select the area of interest. Set the Magnification, the Scan
condition, the image pixel Resolution and the required databar

informations.

2. Capture the image or open a saved one.

3. Click the File menu / Print… (Ctrl + P), a print dialog appears.

4. Complete the print setup and click the OK button.

Operating Procedures: Recording Movies (Saving Multiple Images)

Recording Movies (Saving Multiple Images)

This function captures dynamic experiments performed with the
microscope and creates the digital video files (AVI). Up to 4 imaging
quads (not the optical one) can be recorded simultaneously with a
synchronized start. It is possible to switch between single and quad
image window while the video is recording. The movie has the
following embedded features:

• Resolution 512 × 442 or 1024 × 884

• Databar image optionall y inc l uded in the vide o

• Average or Integration changeable during recording

• Scan speed changeable during recording

• Reduced area pauses recording of all quads

• Remaining time indica tor

• Single frame TIF images recordable during video sequence

• Compressed AVI (*.avi) formats

• Start, Stop and Pause onscreen indicators

• Preferences se t-up dial ogu e
Note:

For the quad(s) with the Enhanced Image module / Color tab /
Enable check box ticked, the Movie recording is paused, the colored
TIF files are stored anyway if selected (see below).

MOVIE TAB PREFERENCES DIALOGUE

The Preferences… (Ctrl + O) / Movie tab provides two modules, one
to set-up conditions for timing (labeled Timer), the other to set-up
save conditions for the resultant movie (labeled File).

FIGURE 5-8 MOVIE PREFERENCES

5-23

Operating Procedures: Recording Movies (Saving Multiple Images)

Timer module

The parameters in this section can be changed when the digital video
is inactive, but are disabled during recording. The digital video is
recorded asynchronously with the scanning.

•The Movie check box – AVI (Digital Video) timer:
After the Delay time, the image of each resumed quad is stored
immediately (even in the middle of the frame) as a new frame in
the video stream.

•The TIF check box:
After the
at the end of the running scan (the system waits) in TIF format.

• In the read only area additional information are given about the
number of stills (frames) per time unit (seconds, minutes).

If both TIF and Movie check boxes are selected, AVI and also TIF files
are stored. In this case the AVI file is not reconstructed from TIF files,
which means the directly recorded movie can be different from the
movie reconstructed from TIF files.

Note:
TIF files are better to save in many cases as they can be built into a
faster AVI and the databar display can be customized when building
an AVI file (see below).
If both AVI and TIF are recorded, the AVI may be jerky due to delays
when writing TIF files to a disk. TIF delay must always be longer than
or equal to the Movie delay.

Delay

time, images series of each resumed quad are stored

File module

Names of Movie [TIF] files are composed as follows:
File name, (quad name), Numeric seed, [- series number].avi [tif]

For example: MovieName (Quad1) 015 [- 00023]. avi [tif]
[The series number always has five digits form with leading zeros.]

•The File Name – a generic file name must be entered here,
otherwise the Movie tab cannot be closed. Do not use punctuation,
dashes or other non alpha-numeric characters, otherwise the
movie maker is not able to build an AVI.

•The Save in – a path to an existing di rector y must be ent ered her e,
otherwise the Movie tab cannot be closed. Use the Browse button
to find the location.

•The Numeric Seed – enter any number from 1 to 999 which is
converted to the three digit form with leading zeros. The numeric
seed is automatically incremented, after the recording has
stopped, or the video file size limit has been reached.

•The Video File Size – the maximum AVI video file size (lower than

2000) in MB must be entered here, otherwise the Movie tab cannot
be closed. After reaching this size, the video file is closed and a
new one is automatically created, without interruption of the
recording process. A dialogue warning appears if the hard drive
lacks sufficient free space.

•The

•The Record Databar check box allows the databar to be included

File Type

format types. T ry to chang e the fo rmat if the re sulting m ovie files are
too big or if the system is ov erload e d du ring th e m ov ie reco rd ing .

in the video (tif files).

– the list box with suppo rte d vid eo com p res sio n

5-24

Operating Procedures: Recording Movies (Saving Multiple Images)

MOVIE PROCEDURE

The red dot button starts the recording of all live electron image
quads at the same moment – no video / images are stored for paused
quads. When a quad is paused during the video recording, the storing
of the video frames is interrupted but the video streams keep
synchronization for the next resuming.

When the red dot representing ‘Start’ is pressed, it turns to a red
square, representing ‘Stop’. Pressing the red square then stops the
recording of the video in all quads and closes all video files.

The red dot with the timer (displayed in the top right-hand corner)
indicates that recording is active in this quad. The Pause symbol
indicates that the record is running but the data from this quad are not
stored (the quad is paused).

The timer indicates the time estimation (in the hh:mm:ss format)
remaining to the end of the video. This is calculated from the average
disk space consumption and the disk free space.

Record Movie Procedure

1. Open the Preferences… / Movie tab. In the Timer module tick the
Movie or TIF check box and select the desired Delay time (the

period between stored frames).

2. In the File module fill in the File Name and give the Save in
directory path. Fill in the Numeric Seed value and the Video File
Size. Select the File Type and choose whether to record the
databar with the Record Databar check box.

3. Pause those quads which you don’t want to record.
imaging par am et ers in the live qua d(s ).

4.

Select the
toolbar / red dot
1024 × 884 the dialogue appears.

File

menu /

Record Movie

button. When the scan resolution is higher than

(a tick mark) or click the

Set up the

5. Choose either of the offered Resolution values at which the movie
starts to record.

6.

Select the
square

File

menu /

button to stop the movie recording.

Record Mo vie

again or click the t oolbar / re d

5-25

Operating Procedures: Recording Movies (Saving Multiple Images)

FEI MOVIE CREATOR

This is a separate program that creates a movie from a sequence of
TIF images. Click the Tools menu / FEI Movie Creator… to activate
the tabbed dialogues.

The following items are common for all tabs:

•The Databar P re v i e w displays the databar created in the Databar
tab.

•The Status displays the progress of movie creation process.

•The Create Movie button opens the File tab and starts the movie
creation process from the TIF files to a single AVI file.

•The Stop button stops the creation process.

•The Close button closes the FEI Movie Creator program.

File Tab

FIGURE 5-9 FEI MOVIE CREATOR TAB: FILE

5-26

•The Name Prefix – cl ic k t he … button to browse the TIF files (with
the desired sequence prefix) directory. It is not necessary to
choose the first file in a row.

FIGURE 5-10 BROWSE DIALOGUE

Operating Procedures: Recording Movies (Saving Multiple Images)

•The Time Period – tick the ms radio button to select a custom
timing for the movie playback. One may experiment (200 ms is
good for most movies to speed it up). Tick the TIF Time radio
button to select a real timing for the movie playback.

•The Gray Movie button suppresses the colors in the resulting
movie.

• From / To – enter the number of the starting / ending frame. This
field is filled automatically with the first / last frame available.

• Save in – enter the path where the AVI file should be saved. Click
the … button to browse it.

• File Name – enter the resulting AVI file name. This field is filled
automatically with the first image file name.

Databar Tab

Settings made in this dialogue does not affect the databar or units
settings used in the xTUI.

Note:
The Databar Preview does not show any item until you enter the File
tab / Name Prefix field.

FIGURE 5-11 FEI MOVIE CREATOR TAB: DATABAR

•The Available / Displayed items: lists – all items that can be
entered in the databar / are already present in the databar.

• > / >> (< / <<) buttons adds one / all item(s) from the Available list
to the Displayed list (removes one / all item(s) from the Displayed
list back to the Available list).

Since there is a finite amount of the databar space, the area
expands or contracts as other items are added to or removed from
the Databar. The item exceeding the allowable space is ignored.

• Move Up / Move Down / T op / Bottom buttons move a position up
/ a position down / to the top / to the bottom in the Displayed list (a
position to the left / a position to the right / to the left / to the right in
the Databar Preview).

5-27

Operating Procedures: Recording Movies (Saving Multiple Images)

•The Label / Show Beam Icon / Micronbar check boxes set the
display of the appropriate items in the Databar. The Micronbar
scales to the magnification.

•The Units… button sets the Units of Measure / Pressure /
Temperature used in the movie Databar display.

Preview (tab )

Once the movie is set-up, opening the Preview tab automatically
displays the first image of the movie sequence.

FIGURE 5-12 FEI MOVIE CREATOR TAB: PREVIEW

•The Start / Pause / Stop button starts / pauses / stops the movie
play back. By dragging the adjuster one can run forward or
backward through the movie.

PLAYING A MOVIE

The AVI file movie can be played in the Windows Media Player or any
another more advanced movie editing program recognising the *.avi
file type.

5-28