P/N 2608 | REV. B 05/19
™
NT
Integrated Flow
Controller with DeviceNet
Communication
User Guide
™
Table of Contents
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Introduction .................................. 2
Identifying Nonstandard
Product Configurations ............ 2
Principle of Operation .............. 2
Factory Configured ................... 3
Control Mode Functions .......... 3
Autozero Function .................... 3
Calibration Reference
Conditions ................................... 3
General Considerations .............. 4
Line Pressure .............................. 4
Pressure Drop ............................. 4
Ambient Temperature
Range ........................................... 4
Process Temperature
Range ........................................... 4
Storage Temperature
Range ........................................... 5
Power Supply
Requirements ............................. 5
DeviceNet Cable ........................ 5
DeviceNet Communication .... 5
Dimensions ................................. 8
Installation ..................................... 9
Mounting Requirements ........ 10
Mechanical Installation .......... 11
Electrical Connections ........... 12
Unit Operation ............................ 14
Operating Environment ......... 14
Performance ............................. 14
Reliability Information ............ 16
Diagnostic Guide ........................ 17
Maintenance ................................ 19
Normal Operation ................... 19
Re-zero Function .................... 19
Reference ..................................... 20
Ordering Information ................ 21
Certifications ............................... 22
DeviceNet Communication
Integrated Flow Controller
Device ........................................... 23
Device Type: 00
Identity Object (01
................... 23
hex
) ............. 27
hex
Message Router
Object (02
DeviceNet Object (03
Assembly Object (04
Connection Object (05
) ........................... 29
hex
) ...... 30
hex
) ......... 33
hex
) .... 36
hex
S-Device Supervisor
Object (30
) ........................... 40
hex
S-Analog Sensor
Object (31
) ............................ 46
hex
S-Analog Actuator
Object (32
) ........................... 54
hex
S-Single Stage Controller
Object (33
) ............................ 57
hex
S-Sensor Calibration
Object (64
) ........................... 59
hex
For More Information ................ 62
Terms and Conditions
of Sale ........................................... 62
Limited Warranty ........................ 62
1Entegris, Inc. | Us er Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Introduction
This manual is for use with standard
NTTM Integrated Flow Controllers with
DeviceNetTM communication, Model
6500. These instruments have been
designed for use in high-purity applications in the semiconductor industry.
The wetted parts are constructed
with PTFE, PFA or other similar
high-purity inert materials.
WARNING! Attempting to install
or operate standard NT Integrated
Flow Controllers without reviewing the instructions contained
in this manual could result in
personal injury or equipment
damage.
IDENTIFYING NONSTANDARD
PRODUCT CONFIGURATIONS
—
This User Guide applies to product
manufactured as the standard NT
Integrated Flow Controller. Entegris
also manufactures nonstandard product to meet the needs of specific
applications. Nonstandard product
may have dierent materials of construction, accuracy specifications,
performance and other specifications
that dierentiate the nonstandard
product from the standard oering.
NOTE: Nonstandard NT Integrated Flow
Controllers may be identified by the
model number found on the product
label. Specifications for nonstandard
NT Integrated Flow Controllers are
available by contacting Entegris.
Nonstandard NT Integrated Flow
Controllers, Model 6500 product line,
are identified with an “M" followed by
a number code.
Example part number:
6500-T2-F02-AM12-D-P7-U3-M02
The “M02" designates the product
as a nonstandard product manu-
factured to certain specifications
designated under the “M02" code.
PRINCIPLE OF OPERATION
—
The user provides a setpoint signal
that corresponds to the desired
amount of flow. The standard NT
Integrated Flow Controller compares
the setpoint to the actual flow signal
from the flow module. If the actual
flow is greater than the setpoint, the
unit closes the valve. If the actual
flow is less than the setpoint, the unit
opens the valve. The flow controller
does this in a precise manner until
the actual flow signal is equal to the
setpoint.
DeviceNet I/O
Power
Flow and pressure
measurement
IFC control interface
MAC ID, baud rate, status LEDs
Valve
control
Flow module Valve module
Fluid flowFluid flowFluid flow
Figure 1. System block diagram.
2 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
FACTORY CONFIGURED
—
The standard NT Integrated Flow
Controller is pre-configured from the
factory for the flow range specified
by the user. The specified flow range
is found on the label of the unit. The
unit control algorithm uses pressure
and flow measurements to ensure
proper operation within specification.
CONTROL MODE FUNCTIONS
—
There are two types of control mode
functions defined for this product:
Normal Operation: A setpoint input
of <5% of full scale will cause the
valve to close to a leak tight seal.
This is for batch applications where
the user is dispensing a given flow
rate for a given period of time.
Actuator Override: An actuator
override DeviceNet communication
message is sent to suspend control
and leave the valve in its present
position, regardless of setpoint
input value.
immediately resume operation.
Autozero is a selectable option
through DeviceNet communication
messaging with a default setting of
‘enabled’. It will not increase system
response time. The autozero routine
will determine DP zero values based
on a weighted average routine.
CALIBRATION REFERENCE
CONDITIONS
—
Unless otherwise noted, the specifications listed for the NT Integrated
Flow Controller with DeviceNet
communication are referenced under
the following operating conditions:
PARAMETER REFERENCE CONDITION
Process fluid
Process
temperature
Ambient
temperature
Relative humidity
Process pressure
Deionized water
23°C ±3°C
(73°F ±5°F)
23°C ±3°C
(73°F ±5°F)
50% RH, ±10% RH
138 – 207 kPa
(20 – 30 psig)
AUTOZERO FUNCTION
—
If autozero is enabled and the setpoint is set to <5%, the valve closes
and the flowmeter will enter into the
re-zero routine. Upon application
of a setpoint greater than or equal to
5%, a new dierential pressure (DP)
zero value will be stored in nonvolatile memory and the unit will
Supply voltage
Warm-up time
Orientation
Operation
24 VDC, ±10%
5 minutes
Horizontal
Flowmeter zeroed
3Entegris, Inc. | Us er Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
General Considerations
NOTE: The flow controller has been
factory sealed. Do not attempt to
remove the cover of the unit. Any
attempt at removal of the unit cover
will void the warranty.
LINE PRESSURE
—
The system line pressure (measured
at the inlet of the unit) must be
between 69 to 414 kPa (10 and
60 psig). The minimum operating
pressure is 69 kPa (10 psig).
PRESSURE DROP
—
The minimum pressure drop (dierential pressure) required for the unit
is 69 kPa (10 psid).
For example, if the flow controller
is operating at an inlet pressure of
103 kPa (15 psig) and outputs the
flow to a pressurized canister, which
is pressurized to 69 kPa (10 psig), the
pressure available to the unit will be
34 kPa (5 psid) (i.e., 103 kPa [15 psig]
inlet pressure minus 69 kPa [10 psig]
back pressure is 34 kPa [5 psid] available pressure drop). This scenario
does not meet the pressure drop
requirement of 69 kPa (10 psid) and
the unit may not perform within
specification. For this example,
either increase the inlet pressure or
decrease the back pressure to obtain
a 69 kPa (10 psid) pressure drop.
AMBIENT TEMPERATURE RANGE
—
The flow controller is designed to
operate in room temperature cleanroom environments: 10° to 30°C
(50° to 86°F). The unit must be
re-zeroed at operating temperature
conditions for the accuracy specifications to apply.
PROCESS TEMPERATURE RANGE
—
The range of acceptable process
temperatures is 10° to 65°C (50° to
149°F). The flow controller must be
re-zeroed at operating temperature
conditions for the accuracy specification to apply. PFA isolators are recommended for process temperatures
higher than 50°C (122°F). Applications
involving hydrofluoric acid (HF) with
temperatures above 30°C (86°F) must
contact the factory for recommended materials of construction. Positive
pressure must be maintained at
all times.
4 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
STORAGE TEMPERATURE RANGE
—
The flow controller will withstand
storage temperatures between
-40° and 50°C (-40° and +122°F)
for at least a 24-hour period with
no permanent eect on device
performance.
POWER SUPPLY REQUIREMENTS
—
The power supply range for the
standard NT Integrated Flow Controller is 24 VDC ±10%.
The power supply must provide
continuous 1.0 A (nominal) current
for each flow controller installed.
Peak power consumption is 1.2 A,
maximum.
The power supply to the flow controller must provide clean power to
the unit and must be used only to
power similar measurement-type
devices. The power supply must
not be used to power other inductive
loads, such as motors, relays or solenoids. These devices may produce
electrical transients that may aect
unit measurements. An induced
power spike, creating an interruption
in power greater than 10 msec in
duration, may cause the unit to reset.
DEVICENET CABLE
—
The power supply range of the
DeviceNet cable is 24 VDC ±10%,
150 mA nominal current.
In addition to providing clean power,
all power communication cables
must not be run within the same
conduit or cable along with heavy
current demands from motors,
charging capacitors or other inductive loads. This may cause a voltage
change within the instrumentation
signal line, causing erroneous output
readings from the flow controller.
Loss of power will not cause the loss
of any system parameters or calibration values.
DEVICENET COMMUNICATION
—
The DeviceNet communication shall
meet the physical layer communications requirements in the referenced
ODVA DeviceNet standard. Briefly,
this is a 5 wire (V+, V-, CAN_H,
CAN_L, Drain) physical layer based
on the CAN protocol.
5Entegris, Inc. | Us er Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
DeviceNet Module Status LED
This LED is labeled ‘Mod’.
INTEGRATED FLOW
CONTROLLER STATE LED STATE DESCRIPTION
Power off
IFC self-test
O No power is applied through DeviceNet.
Flashing red
IFC is in self-test.
and green
IFC operational
Minor fault
Unrecoverable
Green IFC is operating normally.
Flashing red IFC has detected a recoverable fault.
Red IFC has detected an unrecoverable fault.
fault
IFC in standby
Flashing green IFC needs commissioning due to configura-
tion missing, incomplete or incorrect.
DeviceNet Network Status LED
This LED is labeled ‘Net’.
INTEGRATED FLOW
CONTROLLER STATE LED STATE DESCRIPTION
Not powered or
not on-line
On-line, not connected
Link OK, on-line,
connected
Connection time-out
Critical link failure
O IFC is not on-line. IFC may not be powered;
look at Module Status LED.
Flashing green IFC is on-line, but has no connection.
Green IFC is on-line and has connection.
Flashing red Network connection is in the timed-out state.
Red IFC has detected an error and cannot
communicate on the network.
Data Rate
PGM
500 Kb,2
Net Mod
250 Kb,1
125 Kb,0
4
6
(00-63)
2
4
0
6
8
LSDMSD
2
0
PGM
Node Address
Figure 2. DeviceNet switches and status LEDs
located on the top side of the flow controller.
6 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
DeviceNet Node Address
Switches
Two, ten-position, rotary switches
used for configuring the Media
Access Control Identifier (MACID)
of the flow controller. These switches
specify the MACID using decimal
representation. One switch specifies
the most significant digit (MSD), or
tens position of the MACID. The
second switch specifies the least
significant digit (LSD) or the ones
position of the MACID. DeviceNet
allows MACIDs with values 0 – 63.
The “PGM" label indicates the software programmable switch positions.
DeviceNet Data Rate Switch
A single, ten-position rotary switch
used for configuring the baud rate
of the flow controller. The switch
has positions for the three valid,
DeviceNet data rates, 125, 250 and
500 Kbaud. Switch position 0 selects
125 Kb, position 1 selects 250 Kb, and
position 2 selects 500 Kb. The “PGM"
label indicates the software programmable switch positions.
Reverse Polarity Protection
The flow controller is reverse polarity
protected; connecting the 24 VDC
power to the incorrect positive and
ground wires will not harm the unit.
To operate properly, the polarity must
be correct.
Over-Voltage on any Wire (DC)
The flow controller will withstand
the continuous application of 30 VDC
on any wire without compromising
the unit.
Over-Voltage on any Wire (AC)
The flow controller is not designed to
withstand the accidental application
110 /220 VAC to any wire. Application
of AC voltage will damage the unit.
Short Protection
The flow controller will not be
damaged or compromised in any
way if any combination of wires
are shorted together.
Electrical Isolation
The degree of electrical isolation
between power and DeviceNet
communication is as listed below:
From
To
Isolation degree
Power, 24 VDC
DeviceNet Comm
>500 VAC/VDC
7Entegris, Inc. | Us er Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
NT Integrated Flow Controller with DeviceNet Communication
Top View
Side View
Front View
DIMENSIONS
—
217.2 mm (8.55")
230.4 mm (9.07")
D
65.5 mm
(2.58")
7.1 mm
(0.28")
C
47 mm
(1.85")
A B
72.9 mm
(2.87")
DIMENSION
FLARETEK
FITTING A B C D
¹/4"
³/8"
¹/2"
³/4"
8 User Guide | Entegris, Inc.
123.4 mm (4.86") 130 mm (5.12") 19.6 mm (0.77") 244.1 mm (9.61")
123.4 mm (4.86") 130 mm (5.12") 19.6 mm (0.77") 247.7 mm (9.75")
127 mm (5.00") 133.6 mm (5.26") 21.6 mm (0.85") 251.7 mm (9.91")
134.9 mm (5.31") 141.5 mm (5.57") 25.7 mm (1.01") 257.8 mm (10.15")
Installation
Provided Equipment
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
CAUTION! Do not tighten the
nuts that protect the flared tube
con nections during shipment.
(See Prepare Fluid Lines on page
11). Tightening these nuts without
the proper tubing installed may
damage the unit’s flared tube
connections.
Remove Unit from the Bag
NOTE: This unit has been assembled
and double-bagged under cleanroom
conditions. To maintain purity, only
open under cleanroom conditions.
9Entegris, Inc. | Us er Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
MOUNTING REQUIREMENTS
—
The flow controller may be mounted
in any orientation. The unit does not
require straight lengths of tubing at
the inlet or the outlet connection.
Mount the Unit
The flow controller and base bracket
assembly must be mounted to a solid
surface to ensure stability. Verify the
valve and the electrical cable are free
from mechanical stress from the
surrounding equipment.
NOTE: The flow controller requires
mounting in the direction of the
fluid flow.
Recommended
Hardware
#10 (M4)
Pan head
#10 (M4)
Flat washer
217. 2 mm
(8.55")
47.0 mm
(1.85")
10 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Slide the nut onto the tub
MECHANICAL INSTALLATION
—
The standard NT Integrated Flow
Controller must be used with the
proper tubing size and fittings.
To prepare the fluid lines, begin by
sliding the supplied nuts onto the
fluid tube.
Prepare Fluid Lines
Process
fluid tube
e
NOTE: Flare each tube end prior to
installation onto the valve fitting.
CAUTION! Overtightening of
the nuts will result in damage
to the fittings.
Process
fluid tube
Connect Fluid Lines
Flare each tube end
prior to installation
11Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
When installing flared tubing to the
flow controller, the flared tube is
pushed over the valve’s fitting until
the fitting reaches the smaller tube
diameter. The amount of torque
required to tighten the nut is dependent upon the size of the fitting.
FITTING
SIZE
Torque
N•m
(in•lbs)
1
⁄4"
0.56
(5)
3
⁄8"
0.90
(8)
1
⁄2"
1.24
(11)
3
⁄4"
1.58
(14)
Care should be taken when installing
the flow controller to avoid fluid leaks.
Do not use excessive torque or subject the unit to high heat during installation. The unit and base bracket assembly must be mounted to a solid
surface to ensure stability. Verify the
body and the electrical cable are free
from mechanical stress from the
surrounding equipment.
ELECTRICAL CONNECTIONS
—
Connect cable to flow controller
The cable mounting receptacles
are physically “keyed”, making it
impossible to insert the connector
improperly. Press it into the mounting receptacle and rotate the outer
coupling ring to lock the connector
in place. To remove the connector,
rotate the coupling ring in the
opposite direction.
Power Cable
Cable materials are constructed
with 22 AWG wire and a PVC jacket.
The connector is a 4-pin, 12 mm,
male type.
FUNCTION
No connection
+24V
PIN
ASSIGNMENT COLOR
1 Brown
2 White
24V common
No connection
1 N/C
2 +24V
3 24V COM
4 N/C
12 User Guide | Entegris, Inc.
3 Blue
4 Black
1 Drain
2 V+ Red
3 V– Black
4 CAN_H White
5 CAN_L Blue
DeviceNet
communication
cable
Power
cable
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
DeviceNet Cable
Cable materials are constructed with
22 AWG wire and a PVC jacket. The
connector is a 5-pin, micro-style,
12 mm, male type.
FUNCTION
Drain
V+
V-
CAN_H
CAN_L
Net Mod
0
PIN
ASSIGNMENT COLOR
1 Bare wire
2 Red
3 Black
4 White
5 Blue
Data Rate
PGM
500 Kb,2
250 Kb,1
125 Kb,0
2
2
4
0
6
Node Address
(00-63)
8
LSDMSD
PGM
4
6
NOTE: The allowable torque on
the 8-32 × ⁄" PVDF screws used to
secure the clear switch access cover
is 7 Newton-centimeters.
LSD
MSD
Data rate
13Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Unit Operation
OPERATING ENVIRONMENT
—
Operating Temperature
The flow controller is designed to
operate in ambient temperature,
cleanroom environments. The unit
is specified to operate at tempertures
between 10° and 65°C (50° and
149°F). PFA sensor isolators are recommended for process temperatures above 40°C (104°F). Contact the
factory for recommended materials
of construction for applications
involving hydrofluoric acid (HF) with
temperatures above 30°C (86°F).
When the process fluid is above
ambient temperatures 23°C (73°F),
the system will experience slight
accuracy errors due to instrument
warm-up and changes in viscosity
and specific gravity of the liquid.
The unit must be re-zeroed after
any temperature change. Please
see the Maintenance Section on
page 19 to perform the re-zero.
Eects of Fluid Viscosity and
Specific Gravity
The flow controller has been factory
calibrated using deionized water.
Fluids with viscosities and/or specific
gravity dierent from the calibration
fluid (water) will cause slight accuracy
errors. Correction factors for viscosity
and specific gravity changes may be
obtained from Entegris by calling or
following the sensing and control
product links at www.entegris.com.
Power-up Characteristics
When power is first applied to the
flow controller, the flow will be within
2% of the setpoint value in less than
10 seconds and within specification
after 5 minutes. As part of the powerup routine, the unit will perform a
homing routine that re-establishes
the unit’s fully closed position. This
routine requires the valve to shut
completely for no more than
8 seconds, then to the position
dictated by the setpoint input.
Unit Enclosure
The standard NT Integrated Flow
Controller cover is factory sealed
and should not be tampered with
or opened. Spray-down will not
compromise the performance of
the unit.
NOTE: Any attempt to remove, tamper
or open the flow controller cover will
void the warranty.
PERFORMANCE
—
Operating Pressure Requirements
The flow rate is calculated using
Entegris’ dierential pressure flow
technology. The minimum operating
pressure is 69 kPa (10 psig). The minimum pressure drop (dierential
pressure) required for the flow
controller is 69 kPa (10 psid).
CAUTION! The flow controller may
be damaged if it is subjected to any
level of vacuum pressure (less than
atmospheric pressure).
14 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
NOTE: To perform within specification,
the available inlet pressure must be
69 kPa (10 psid) greater than the outlet
pressure (69 kPa [10 psid] dierential
pressure).
Flow Accuracy
The accuracy of the flow measurement is ±1% of full scale from
20–100% of the flow range. The
accuracy of the flow measurement
is ±2.5% of full scale from 10–20%
of the flow range. The accuracy
spec ification includes the eects of
linearity, hysteresis and repeatability,
using deionized water at 23°C (73°F).
The accuracy between 0–10% of full
scale flow range is not specified.
Flow accuracy is verified by testing
the unit at stable conditions for a
period of 20 seconds or longer using
deionized water at 23°C (73°F).
To meet the accuracy specification,
a re-zero is required for every 69 kPa
(10 psig) change in line pressure.
Response Time
Response time is defined as the
length of time required for the measured flow rate to be within the full
scale (FS) accuracy specification.
The typical response time is within
3 seconds from 10% to 95%SP.
The flow controller will respond to
setpoint changes within 50 msec of
receiving the new setpoint value.
Minimum Operating Pressure
The unit will operate within specification at any inlet pressure within
the range of 69 to 414 kPa (10-60
psig) and a minimum pressure drop
of 69 kPa (10 psid).
Temperature Increase of Flow
Controller Enclosure
The temperature increase within the
unit enclosure will be less than 30°C
(86°F). The temperature increase at
the exterior of the unit cover will be
less than 25°C (77°F).
The temperature increase of the
process fluid will be less than 3°C
(5°F) at 10% of flow and less than
0.5°C (0.9°F) at 100% of flow range
for the following product flow ranges:
0 – 50mL, 0 – 125 mL, 0 – 250 mL,
0 – 500 mL, 0 – 1250 mL. For all other
flow ranges, the temperature rise of
the process fluid is negligible, less
than 0.5°C (0.9°F), at all flows. Under
extended static flow conditions (i.e.,
no flow for >24 hours) the temperature increase of the process fluid will
be less than 15°C (27°F).
Warm-up Time
The flow controller requires a
warm-up time of 10 minutes after
power is applied. Warm-up time is
typically not required if the unit was
operated within 3 hours.
Pressure Measurement Accuracy
The accuracy of the pressure
output is ±1% of full scale. These
calcula- tions include the eects
of linearity, hysteresis and repeatability, measured at 23°C (73°F).
15Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
RELIABILITY INFORMATION
—
Redundant Process Seals
All internal process wetted seals are
redundant (i.e., there is a secondary
seal that prevents process fluid from
reaching the interior of the device
in the case of a primary seal failure).
Weep holes are provided from the
secondary containment regions.
Long-term Reliability
The valve system can withstand
3.5 million open/close cycles
before the control performance
is compromised.
Enclosure Integrity
Spray down of the flow controller will
not aect the performance per IP54.
Drop and Topple
If the unit topples over from a
45-degree angle onto a bench top,
the performance will not be compromised and the unit will not be
externally damaged.
Cable Pull
The cable will withstand a static
pull test of 9.1 kg (20 lbs) straight
and 4.5 kg (10 lbs) at 90 degrees
without being damaged.
16 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Diagnostic Guide
SYMPTOM POSSIBLE CAUSES SUGGESTIONS
1. Flow reading is very low.
2. Flow reading above zero
when set point is zero
and no flow is present.
3. Flow output is extremely
noisy.
4. Unit resets.
The unit is installed
backwards.
Insucient line pressure. The inlet pressure must
The unit needs to be
re-zeroed.
The actual fluid flow
conditions are noisy.
The supply power (+24V)
is noisy.
Install the unit so the inlet
flow is plumbed on the
same side as the electrical
connection.
be at least 69 kPa (10 psig)
greater than the outlet
pressure. Verify the inlet
pressure using the pressure signal from the flow
controller.
Perform a zero adjust
service or enable the
autozero function.
Flow turbulence may be
caused by “noisy” pumps
used in a system. Examples
of noisy pumps are diaphragm pumps without
pulsation dampeners and
peristaltic pumps operating
at low flow rates. Please
contact Entegris for
additional information.
If the power supply is
shared with other systems,
components (such as
solenoids, DC motors,
valves, etc.) the unit may
be receiving “dirty” power.
Extreme noise spikes will
cause the unit to reset.
Connect the unit to a
separate power source.
5. Flow output does not
correspond to set point
for high flow rates.
Inlet pressure is not 69 kPa
(10 psig) greater than the
outlet pressure at the high
flow conditions.
Measure the inlet pressure.
Also measure the fluid pressure at the outlet of the unit
using a pressure gauge or
pressure transducer. Verify
the inlet pressure is at least
69 kPa (10 psig) greater than
the outlet pressure.
17Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Diagnostic Guide (continued)
SYMPTOM POSSIBLE CAUSES SUGGESTIONS
6. Flow rate is not meeting
desired set point within
10 seconds or longer.
7. Flow output is not
responsive to changes
in setpoint signal.
8. Net LED flashes green.
Valve goes to safe position,
default position is closed.
The unit is receiving a setpoint signal with no fluid
flow present. The flow
controller valve is moved
to the full-open position.
Depending upon flow range,
the unit may require 10–15
seconds or more to move
from the full-open position
to the correct setpoint
position.
Inlet pressure is not 69 kPa
(10 psig) greater than outlet
pressure.
Valve in full-open position.
If the unit is plumbed between two closed valves,
the unit may stall in the
full-open position when the
unit is commanded to close.
Since a fixed volume of fluid
is incompressible, the unit
may stall when attempting
to close if upstream and
downstream valves are
closed.
Network down. Reconnect to network.
Do not send a setpoint
signal to the unit when no
fluid flow is available.
See above, Symptom 5.
Avoid conditions of simultaneously closed valves
upstream and downstream
of the unit. The unit can
be returned to normal
operation by performing
a re-zero, or by cycling
power.
18 User Guide | Entegris, Inc.
Maintenance
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
NORMAL OPERATION
—
During normal operation, the standard NT Integrated Flow Controller
with DeviceNet communication
requires no maintenance, other than
a periodic re-zero of the unit.
RE-ZERO FUNCTION
—
The no flow calibration of the flow
controller can be re-zeroed, meaning
that the flow output that corresponds
to zero flow may be reset.
NOTE: When executing the re-zero
function, there must be at least 7 kPa
(1 psig) of static pressure. Optimum
pressure for re-zero is the operation
pressure, typically greater than 69 kPa
(10 psig).
NOTE: The following procedure must
be followed precisely to ensure proper
flow controller re-zero.
The no flow calibration of the flow
controller can be re-zeroed, meaning
that the flow output that corresponds
to zero flow may be internally reset.
This is done with DeviceNet service
requests. The ‘Zero_Adjust’ service
command in the Analog Sensor
Object is sent to begin a re-zero
process. The ‘Stop_Zero_Adjust’
service command in the Analog
Sensor Object is sent to stop the
re-zero process.
When the re-zero function is
activated, the flow controller valve
module will close fully to ensure that
fluid is not flowing. The unit will verify
the no-flow condition, and then rezero the flow module. The entire
re-zero function is completed in
10 seconds.
In order to obtain best performance,
the re-zero function should be
performed, at minimum if possible,
every day of service when operating
at ambient temperature conditions.
The re-zero function should be performed more often if operating at
higher temperature. It is also recommended to perform a re-zero after
start-up and after fluid temperature
changes of greater than 5°C (41°F).
Best performance will be achieved
by re-zeroing between each dispense cycle.
Autozero Function
The no flow calibration of the flow
controller can be autozeroed,
meaning that the flow output that
corresponds to zero flow may be
automatically, internally reset whenever the setpoint is zero. Selecting
the ‘enabled’ setting of the ‘Autozero
Enable’ attribute in the Analog Sensor
Object does this. This is the default
setting.
19Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Reference
Physical specifications
PART CONSTRUCTION MATERIALS
Wetted parts
Nonwetted parts
Connection type
Enclosure
Power cable specifications
Input voltage
Input current
Electrical connection
DeviceNet cable specifications
Input voltage
Input current
Electrical connection
Body PTFE
Diaphragms PTFE
Sensor interface CTFE or PFA
O-rings Kalrez® 6375 UP
Polypropylene, FEP, PVDF, Viton® (in addition to the
materials listed above)
Flaretek tube fitting
IP54
24 VDC ±10%
1.0 A nominal, 1.2 A peak
12' length with 22 ga wire PVC-jacketed wire
24 VDC ±10%
150 mA nominal
12' length with 22 ga wire PVC-jacketed wire
Performance specifications
Flow accuracy
Pressure accuracy
Repeatability
Response time
Process temperature
Storage temperature
Operating pressure
Over-pressure limit
NOTE: Specifications are subject to change without notice.
Please consult Entegris for the most current information.
20 User Guide | Entegris, Inc.
±
1.0% FS at 20% to 100% of flow range, ±2.5% FS at
10% to 20% of flow range.
Accuracy defined for 20 seconds average, using DI water
at 23°C (73°F).
Accuracy not specified 0% to 10% of flow range.
±
1.0% FS (full scale is 414 kPa [60 psig]) (includes the combined
eects of linearity, hysteresis, and repeatability)
±
0.5% FS at 20% to 100% of flow range
±1.0% FS at 10% to 20% of flow range
< 3 seconds from 10-95% of full scale flow range
10° – 65°C (50° – 149°F)
-40° – 50°C (-40° – 122°F)
69 – 414 kPa (10 – 60 psig)
690 kPa (100 psig)
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Ordering Information
NT Integrated Flow Controller, NT6500: part number
6500– – – – – –
Sensor interface
P7 = CTFE
P8 = PFA
Setpoint input signal, controller type
D = DeviceNet communication
Electrical connector type
AM12 = PVC-jacketed 12' cable set
Inlet/outlet port connection
F02 = ⁄" Flaretek tube fitting
F03 = ⁄" Flaretek tube fitting
F04 = ⁄" Flaretek tube fitting
F06 = ⁄" Flaretek tube fitting
Flow range
T0 = 0 –15 mL/min
T1 = 0 –125 mL/min
T2 = 0 –250 mL/min
T3 = 0 –500 mL/min
T4 = 0 –1250 mL/min
T5 = 0 –2.5 L/min
T6 = 0 –5 L/min
T7 = 0 –10 L/min
T8 = 0 –20 L/min
T9 = 0 –40 L/min*
Primary/secondary seal
U3 = Kalrez 6375 UP/Viton
*Please consult factory for operating pressure requirement.
Allowed process connection and flow range combinations
FLARETEK FITTING SIZE FLOW RANGE
T0 T1 T2 T3 T4 T5 T6 T7 T8 T9
1
⁄4"
Yes Yes Yes Yes Yes — — — — —
3
⁄8"
Yes Yes Yes Yes Yes Yes Yes — — —
1
⁄2"
— — — Yes Yes Yes Yes Yes Yes —
3
⁄4"
— — — — — — — Yes Yes Yes
21Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Certifications
CE COMPLIANCE
—
Entegris products are designed and
tested to meet the most current
CE requirements. Please visit
www.entegris.com for the most
current information.
ODVA CONFORMANCE
—
The NT Integrated Flow Controller
with DeviceNet communication has
successfully completed and passed
Open DeviceNet Vendor Association
(ODVA) approved conformance tests
at the independent, authorized ODVA
Training and Technology Center in
Ann Arbor, MI. Entegris has been
issued an ocial Declaration of
Conformity from ODVA for this
product.
22 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
DeviceNet Communication Integrated
Flow Controller Device
DEVICE TYPE: 00
HEX
—
This vendor specific device profile
is based on the DeviceNet Fluid Flow
Controller (FFC) device profile. The
device type is 00 due to the prerelease status of the FFC profile.
Type 00 is a Generic Device type.
actuator such that the fluid flow
rate is controlled to the setpoint.
This chapter contains two primary
sections. First, the device profile is
specified as it appears in general
DeviceNet specification. Second,
the vendor specific attributes,
services, behaviors, ranges and
capabilities are specified.
A Fluid Flow Controller (FFC) is a
device that measures and controls
the flow rate of a fluid (liquid or gas).
It contains three principle components: a flow rate sensor that can
be a virtual sensor based on other
sensors, for example pressure; a
fluid flow metering valve that can
be actuated by one of a variety of
actuator types, including, for example,
Object Model
The Object Model in Table 1
represents an FFC Device.
The table below indicates:
• The object classes present in
this device
• Whether or not the class is required
solenoid or a stepper motor; and,
a controller that closes the loop by
receiving a set point and driving the
• The number of instances present
in each class
Table 1. Object model
OBJECT CLASS OPTIONAL/REQUIRED # OF INSTANCES
Identity
Message router
DeviceNet
Connection
Assembly
S-Device supervisor
S-Sensor calibration
S-Analog sensor
S-Analog actuator
S-Single stage controller
Required 1
Required 1
Required 1
Required at least 1 I/O and 1 explicit
Required at least 1 input and 1 output
Required 1
Optional 0 or more
Required 2
Required 1
Required 1
23Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
DeviceNet Communications
Hierarchy of Semiconductor
Equipment Device Objects
S-Analog Sensor Class
Pressure
Flow
Assembly
Connection Class
I/O
Figure 3. Object model for the FFC device.
S-Senor
calibration
S-Device
supervisor
DeviceNet
S-Single stage
controller
Explicit
message
Message
router
S-Analog
actuator
DeviceNet
Identity
S-ANALOG SENSOR NAME DESCRIPTION
Instance 1
Flow Virtual sensor that calculates the fluid flow
rate based on various sensed para meters,
for example, dierential pressure.
Instance 2
P/N 01-2608 | Rev. B 03/19
24 User Guide | Entegris, Inc.
Pressure The measured fluid pressure.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
How objects aect behavior
OBJECT AFFECT ON BEHAVIOR
Identity
Message router
DeviceNet
Connection class
Assembly
S-Device supervisor
S-Sensor calibration
S-Analog sensor
Supports the Reset service. Upon receipt of a Reset service
request of any type, the Identity object sends a Reset service
request to the S-Device supervisor.
No eect.
Configures port attributes (node address, data rate and
Bus-O Interrupt [BOI]).
Contains the number of logical ports into or out of the device.
Defines input/output and configuration data format.
Supports the Stop, Start, Reset, Abort, Recover, and
Perform_Diagnostic services for all application objects
in the device and consolidates the Exception Conditions
and Application Objects’ Status.
This object behaves dierently from the Identity object in
that the S-Device supervisor object provides a single point
of access to the Application Objects only; it does not aect
the DeviceNet specific objects (i.e., Identity, DeviceNet,
Connection, etc.).
Modifies the correction algorithm of the Flow S-Analog
sensor object, which includes the selection mechanism to
enable an S-Sensor calibration object instance.
A virtual sensor determines the measured fluid flow rate.
The flow sensor feeds the process variable to the S-Single
stage controller object.
S-Single stage controller
S-Analog actuator
Feeds the control variable to the S-Analog actuator object.
Operates the Flow Control Valve of the device.
25Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Defining object interfaces
OBJECT INTERFACE
Identity
Message router
DeviceNet
Connection class
Assembly
S-Device supervisor
S-Sensor calibration
S-Analog sensor
S-Single stage controller
S-Analog actuator
Message router
Explicit messaging connection instance
Message router
Message router
I/O connection or message router
Assembly or message router
Message router
Assembly or message router
Assembly or message router
Assembly or message router
Vendor Specific Section
This section specifies the vendor
specific attributes, service and
behaviors supported by this device.
It is provided primarily to specify
which attributes and services are
supported and with what ranges.
NOTE: Specific definitions of attributes
and services are included here for
reference only. For specification details
and latest revisions, see the DeviceNet
Specifications.
NV = Nonvolatile: value is retained
through power cycle. A “Reset
Type 1” reinitializes these
values to their defaults (i.e.,
Out-of-Box configuration).
NVF = Nonvolatile Factory Set: value
is retained through power
cycle. Only the factory can
change these values with
special software access. A
“Reset Type 1” has no aect
on these values.
NOTE: Attribute Tables that include an
"NV" column use the following
nomenclature:
V = Volatile: value is lost upon
NVC = Nonvolatile Constant: value is
fixed, determined by software.
These values are “hardcoded”
and not settable.
power cycle.
26 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
IDENTITY OBJECT (01
HEX
)
—
Class
Attributes 1.0 – Class Attributes – Identity Object
ATT. ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
ACCESS
RULE NAME
Services 1.0 – Class Services – Identity Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Single
Instance 1
Attributes 1.1 – Instance Attributes – Identity Object 1
ATT.
ID REQUIRED SUPPORTED
1
Required Ye s Get NVC Vendor IDUINT ODVA
ACCESS
RULE NV NAME
DATA
TYPE
Attribute ID
(USINT)
DATA
TYPE
ATTRIBUTE
DESCRIPTION VALUES
Retrieves an
attribute value
ATTRIBUTE
DESCRIPTION VALUES
assigned
identification
of vendor
PARAMETER
VALUES
1–255
864 = NT
International
2
Required Ye s Get NVC Device
3
Required Ye s Get NVF Product
4
Required Ye s Get NVC Revision STRUCT
type
code
Major
revision
Minor
revision
UINT Indication of
general type
of product
UINT Indication of
a particular
product of
an individual
vendor
of:
USINT 01
USINT 01
0000
0001
27Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 1.1 – Instance Attributes – Identity Object 1 (continued)
ATT.
ID REQUIRED SUPPORTED
5
Required Ye s Get V Status WORD Summary
6
Required Ye s Get NVF Serial
7
Required Ye s Get NVF Product
ACCESS
RULE NV NAME
number
name
DATA
TYPE
UDINT Serial number
SHORT_
STRING
ATTRIBUTE
DESCRIPTION VALUES
status of
device
of device
Human
readable
identification
b0 = Owned
b1 = 0
b2 = Con
figured
b3 = 0
b4 : b7 = 0
b8 = Minor
recoverable
fault
b9 = Minor
unrecoverable
fault
b10 = Major
recoverable
fault
b11 = Major
unrecoverable
fault
b12 : b15 = 0
Must be guaranteed unique for a
given Vendor ID
“FFC”
Services 1.1 – Instances Services – Identity Object 1
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
05
Required Yes Reset Type (USINT) Emulates power
hex
28 User Guide | Entegris, Inc.
Single
Attribute ID
(USINT)
Retrieves an
attribute value
cycling the
device.
PARAMETER
VALUES
1–255
Type 0 =
Reset.
[default if
parameter is
omitted]
Type 1=
Return to the
out–of–box
configuration, then
Reset.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
MESSAGE ROUTER OBJECT (02
HEX
)
—
Class
Attributes 2.0 – Class Attributes – Message Router Object
ATT. ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
ACCESS
RULE NAME
Services 2.0 – Class Services – Message Router Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Single
Instance 1
No instance attributes
No instance services
DATA
TYPE
Attribute ID
(USINT)
ATTRIBUTE
DESCRIPTION VALUES
Retrieves an
attribute value
PARAMETER
VALUES
1–255
29Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
DEVICENET OBJECT (03
HEX
)
—
Class
Attributes 3.0 – Class Attributes – DeviceNet Object
ATT. ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 02
ACCESS
RULE NAME
Services 3.0 – Class Services – DeviceNet Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Single
Instance 1
Attributes 3.1 – Instance Attributes – DeviceNet Object 1
ATT.
ID REQUIRED SUPPORTED
1
Optional Ye s Get* NV* MACID USINT Node address = 0-63
ACCESS
RULE NV NAME
DATA
TYPE
Attribute ID
(USINT)
DATA
TYPE
ATTRIBUTE
DESCRIPTION VALUES
Retrieves an
attribute value
ATTRIBUTE
DESCRIPTION VALUES
PARAMETER
VALUES
1–255
2
Optional Ye s Get* NV* Baud rate USINT Baud rate 0 = 125K
1 = 250K
2 = 500K
3 = undefined
3
Optional Ye s Get NV BOI BOOL Bus-o
5
Required Ye s Get V Alloca-
6
Required Ye s Get V MACID
30 User Guide | Entegris, Inc.
tion Info
Swt Chg
interrupt
Struct
of:
BYTE Allocation
Choice
USINT Masters
MACID
BOOL Changed
since last
reset (media
access)
0 = Hold bus-o
(default)
1 = Auto reset (not
supported)
See service
parameter
0 = No change
1 = Changed
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 3.1 – Instance Attributes – DeviceNet Object 1 (continued)
ATT.
ID REQUIRED SUPPORTED
7
Required Ye s Get V BAUD
8
Required Ye s Get V MACID
9
Required Ye s Get V BAUD
* If the corresponding configuration switch is higher than the attribute’s limit,
the attribute has SET access.
ACCESS
RULE NV NAME
Swt Chg
Swt Chg
Swt Chg
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
BOOL Changed
since last
reset (media
access)
USINT Actual switch
value
USINT Actual switch
value
Services 3.1 – Instances Services – DeviceNet Object 1
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
4B
Required Yes Allocate_
hex
Single
Single
Master/Slave_
Connection_Set
Attribute ID
(USINT)
Attribute
ID (USINT);
Value
Allocation
choice;
Master
Retrieves an
attribute value
Sets an attribute
value
Initializes
predefined
master/slave
connection set
0 = No change
1 = Changed
0–99
0–9
PARAMETER
VALUES
1–255
Attribute
ID = 1–255
Value =
attribute
specific
0 × 01 =
Explicit
0 × 02 = Poll
0 × 03 = Both
4C
Required Yes Release_
hex
Group_2_
Identifier_Set
Allocation
choice
Releases
predefined
master/slave
connection set
0 × 01=
Explicit
0 × 02 = Poll
0 × 03 = Both
31Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Services Data Field Parameters
PARAMETERS REQUIRED DATA TYPE DESCRIPTION VALUES
Allocation choice
Master
Allocate success
Yes BYTE Specifies the
Yes USINT Master’s MACID = 0-63
Yes BYTE Message body format
connection types
(number of bits
for Class/Instance
identifiers)
b0 = Explicit
b1 = Polled
b2 = Bit strobe
b3 = Multicast poll
b4 = COS
b5 = Cyclic
b6 = Ack suppress
b7 = Reserved
0 = 8/ 8 [default]
1 = 8 /16
2 = 16 /16
3 = 16 /8
32 User Guide | Ente gris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
ASSEMBLY OBJECT (04
HEX
)
—
Class
Attributes 4.0 – Class Attributes – Assembly Object
ATT.
ID REQUIRED SUPPORTED
1
Optional Ye s Get NVC Revision UINT Object
100
101
Vendor
specific
Vendor
specific
Yes Set NV Default
Yes Set NV Default
Services 4.0 – Class Services – Assembly Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
ACCESS
RULE NV NAME
I/O
consume
I/O
produce
Single
Single
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
revision
USINT Default output
assembly
inst ID
USINT Default input
assembly
inst ID
Attribute ID
(USINT)
Attribute
ID (USINT);
Value
Retrieves an
attribute value
Sets an attribute
value
= 02
= 10, 11
(default) = 10
= 1, 2, 3, 6
(default) = 2
PARAMETER
VALUES
1–255
Attribute
ID = 1–255
Value =
attribute
specific
33Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Instances – Identifiers
4.N Assembly Object Instances
NUMBER REQUIRED TYPE ELEMENTS
1
2
3
6
10
11
Y Input Flow
Y (default) Input Status and flow
N Input Status, flow, and pressure
N Input Status, flow, pressure, and valve
Y (default) Output Setpoint
Y Output Override and setpoint
Element Mapping
Assembly Object Element Mapping
DATA
COMPONENT
NAME
Flow
Pressure
Valve
Override
Setpoint
Status
NAME NUMBER NAME NUMBER TYPE
S-Analog sensor 31
S-Analog sensor 31
S-Analog actuator 32
S-Analog actuator 32
S-Single stage
controller
S-Device supervisor 30
CLASS
hex
hex
hex
hex
33
hex
hex
INSTANCE
ATTRIBUTE
NUMBER
1 Value 6 INT
2 Value 6 INT
1 Value 6 INT
1 Override 5 USINT
1 Setpoint 6 INT
1 Exception
status
12 BYTE
34 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Instances 1-n
Attributes 4.N – Instance Attributes – Assembly Object
ATT.
ID REQUIRED SUPPORTED
Required Yes Get Data The I/O Assembly DATA attribute is format-
3
ACCESS
RULE NAME ATTRIBUTE DESCRIPTION
ted as a structure of data elements with
the First element (elements are listed in the
“Instance Identifiers” table) ordered first.
All data components are encoded with
the low-ordered byte first; (i.e., the least
significant byte, LSB, is in the Low-ordered
index, Address) also known as Little endian.
Services 4.N – Instanc Services – Assembly Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Single
Attribute ID
(USINT)
Retrieves an
attribute value
PARAMETER
VALUES
1–255
35Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
CONNECTION OBJECT (05
HEX
)
—
Class
Attributes 5.0 – Class Attributes – Connection Object
ATT.
ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
Services 5.0 – Class Services – Connection Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Instance 1 – Explicit
Attributes 5.1 – Instance Attributes – Connection Object 1
ATT.
ID REQUIRED SUPPORTED
1
Optional Yes Get Revision USINT Object state 00 = Non-existent
ACCESS
RULE NAME
Single
ACCESS
RULE NAME
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
Attribute ID
(USINT)
DATA
TYPE
ATTRIBUTE
DESCRIPTION VALUES
Retrieves an
attribute value
01 = Configuring
02 = Waiting for
03 = Established
04 = Timed out
05 = Deferred
PARAMETER
VALUES
1–255
conn ID
delete
2
Required Yes Get Instance
3
Required Yes Get Trans
4
Required Yes Get P Conn ID UINT Exp Resp. CAN ID = 10xxxxxx011; x
5
Required Yes Get C Conn ID UINT Exp Req. CAN ID = 10xxxxxx100; x
6
Required Yes Get Initial
36 User Guide | Entegris, Inc.
type
Class/Trig
Comm
characteristics
USINT = Explicit = 00
USINT = Server Class 3 = 0×83
= MACID
= MACID
BYTE Group IDs = 0×21
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 5.1 – Instance Attributes – Connection Object 1 (continued)
ATT.
ID REQUIRED SUPPORTED
7
Required Yes Get P Conn
8
Required Yes Get C Conn
9
Required Yes Set EPR UINT Expected
12
Required Yes Set WTO
13
Required Yes Get P Conn
14
Required Yes Get P Conn
15
Required Yes Get C Conn
16
Required Yes Get C Conn
ACCESS
RULE NAME
size
size
action
Path
Length
Path
Path length
Path
DATA
TYPE
UINT Maximum data
UINT Maximum data
USINT Watch dog
UINT Path length = 00
EPATH Path from which
UINT Path length = 00
EPATH Path to which
ATTRIBUTE
DESCRIPTION VALUES
production size
consumption size
packet rate in
milliseconds
timeout Action
connection
produces
connection
consumes
= 40
= 40
2500 = Default
00 = Time out
(not supported)
01 = Auto delete
(default)
02 = AutoReset
(not supported)
03 = Deferred
delete
= Empty
= Empty
Services 5.1 – Instance Services – Connection Object 1
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
Single
Single
Attribute ID
(USINT)
Attribute
ID (USINT);
Value
Retrieves an
attribute value
Sets an attribute
value
PARAMETER
VALUES
1–255
Attribute
ID = 1–255
Value =
attribute
specific
37Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Instance 2 – Polled
Attributes 5.2 – Instance Attributes – Connection Object 2
ATT.
ID REQUIRED SUPPORTED
1
Required Yes Get State USINT Object state See Instance 1
2
Required Yes Get Instance
3
Required Yes Get Trans Class/
4
Required Yes Get P Conn ID UINT Poll Resp. CAN ID = 01111xxxxxx;
5
Required Yes Get C Conn ID UINT Poll Req. CAN ID = 10xxxxxx101;
6
Required Yes Get Initial
7
Required Yes Get P Conn
8
Required Yes Get C Conn
9
Required Yes Set EPR UINT Expected
12
Required Yes Set WTO action USINT Watch dog
ACCESS
RULE NAME
type
Trig
Comm
characteristics
size
size
DATA
TYPE
USINT = Poll = 01
USINT = Server Class 2 = 0×82
BYTE Group IDs = 0×01
UINT Produced data
UINT Consumed data
ATTRIBUTE
DESCRIPTION VALUES
x = MACID
x = MACID
size
size
packet rate in
milliseconds
timeout action
= Size of selected
input assembly
data
= Size of selected
output assembly
data
0 = Default
00 = Time out
(default)
01 = Auto delete
13
Required Yes Get P Conn
14
Required Yes Set P Conn
15
Required Yes Get C Conn
16
Required Yes Set C Conn
38 User Guide | Entegris, Inc.
Path length
Path
Path length
Path
UINT Path length = 06
EPATH Path from which
UINT Path length = 06
EPATH Path to which
connection
produces
connection
consumes
= 20 04 24 NN 30
03 (hex) where
NN = assembly
inst id
= 20 04 24 NN 30
03 (hex) where
NN = assembly
inst id
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Services 5.2 – Instance Services – Connection Object 2
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
Single
Single
Attribute ID
(USINT)
Attribute
ID (USINT);
Value
Retrieves an
attribute value
Sets an attribute
value
PARAMETER
VALUES
1–255
Attribute
ID = 1–255
Value =
attribute
specific
39Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
S-DEVICE SUPERVISOR OBJECT (30
HEX
)
—
Class
Attributes 30.0 – Class Attributes – S-Device Supervisor Object
ATT.
ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
Services 30.0 – Class Services – S-Device Supervisor Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Instance 1
Attributes 30.1 – Instance Attributes – S-Device Supervisor Object 1
ATT.
ID REQUIRED SUPPORTED
3
Required Ye s Get NVC Device
ACCESS
RULE NAME
Single
ACCESS
RULE NV NAME
type
DATA
TYPE
Attribute ID
(USINT)
DATA
TYPE
SHORT
STRING
ATTRIBUTE
DESCRIPTION VALUES
Retrieves an
attribute value
ATTRIBUTE
DESCRIPTION VALUES
ASCII text,
Max. 8
characters, see
“Semantics”
section
“FFC”
PARAMETER
VALUES
1–255
4
Required Ye s Get NVC SEMI
5
Required Ye s Get NVC Manu-
6
Required Ye s Get NVF Manu-
7
Required Ye s Get NVC Software
40 User Guide | Entegris, Inc.
standard
revision
level
facturer’s
name
facturer’s
model
number
revision
level
SHORT
STRING
SHORT
STRING
SHORT
STRING
SHORT
STRING
Specifies the
revision level
of the SEMI
S/A Network
Standard
to which
the device
complies
ASCII text,
max. 20
characters
ASCII text,
max. 20
characters
ASCII text,
max. 6
characters
“E54-0997”
“NT International”
“6500”
“x.xx” current
Application Code
SW revision
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 30.1 – Instance Attributes – S-Device Supervisor Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
8
Required Ye s Get NVF Hardware
9
Optional Ye s Get NVF Manu-
10
Optional Ye s Get NVF Device
11
Required Ye s Get V Device
12
Required Ye s Get V Excep-
ACCESS
RULE NV NAME
revision
level
facturer’s
serial
number
Configuration
status
tion status
DATA
TYPE
SHORT
STRING
SHORT
STRING
SHORT
STRING
USINT State of the
BYTE Bitmapped
ATTRIBUTE
DESCRIPTION VALUES
ASCII text,
max. 6
characters
ASCII text,
max. 30
characters
ASCII text,
max. 50
characters
device’s
application
objects
summary of
the exception
detail bits
“x.xx” current
Controller
Circuit Board HW
revision
Device specific
Device specific
0 = Undefined
1 = Self-testing
2 = Idle
3 = Self-test
exception
4 = Executing
5 = Abort
6 = Critical fault
7-50 = Reserved
by DeviceNet
51-99 = Device
specific
100-255 =
Vendor specific
b0 = Common
alarm
b1 = Device
specific alarm
b2 = Vendor
specific alarm
b3 = Reserved
b4 = Common
warning
b5 = Device
specific warning
b6 = Vendor
specific warning
b7 = 1
41Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 30.1 – Instance Attributes – S-Device Supervisor Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
13
Based on
exception
status b7
Yes Get V Excep-
ACCESS
RULE NV NAME
tion
detail
alarm
Common
exception
detail
Size USINT Number of
Detail [0] BYTE b0 = Internal
Detail [1] BYTE b0 : b7 = Not
DATA
TYPE
STRUCT
of:
STRUCT
of:
ATTRIBUTE
DESCRIPTION VALUES
A structure
of three
structures
containing
bitmapped
representations of the
alarm detail
common
detail bytes
= 02
diagnostics
b1 = 0
b2 = EPROM
b3 = EEPROM
b4 = RAM
b5 = 0
b6 = Internal
real-time
b7 = 0
supported
Device
exception
detail
Size USINT Number of
Detail [0] BYTE b0 = 0
Detail [1] BYTE b0 : b7 = 0
Detail [2] BYTE b0 : b7 = 0
42 User Guide | Entegris, Inc.
STRUCT
of:
common
detail bytes
= 03
b1 = Flow low
b2 = Flow high
b3 = 0
b4 = 0
b5 = 0
b6 = Pressure low
b7 = Pressure
high
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 30.1 – Instance Attributes – S-Device Supervisor Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
14
Based on
exception
status b7
Yes Get V Exception
ACCESS
RULE NV NAME
Manufacturer
exception
detail
Size USINT Number of
Detail [0] BYTE Manufacturer
detail
warning
Common
exception
detail
Size USINT Number of
Detail [0] BYTE b0 = Internal
DATA
TYPE
STRUCT
of:
STRUCT
of:
STRUCT
of:
ATTRIBUTE
DESCRIPTION VALUES
manufacturer
detail bytes
specified
A structure
of three
structures
containing
bitmapped
representations of the
warning detail
common
detail bytes
= 01
b0 : b7 = 0
= 02
diagnostics
b1 = 0
b2 = EPROM
b3 = EEPROM
b4 = RAM
b5 = 0
b6 = Internal
real-time
b7 = 0
Detail [1] BYTE b0 : b7 = Not
supported
43Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 30.1 – Instance Attributes – S-Device Supervisor Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
ACCESS
RULE NV NAME
Device
exception
detail
Size USINT Number of
Detail [0] BYTE b0 = Reading
Detail [1] BYTE b0 : b7 = 0
Detail [2] BYTE b0 : b7 = 0
Manufacturer
exception
detail
Size USINT Number of
DATA
TYPE
STRUCT
of:
STRUCT
of:
ATTRIBUTE
DESCRIPTION VALUES
device detail
bytes
manufacturer
detail bytes
= 03
valid
b1 = Flow low
b2 = Flow high
b4 = 0
b5 = 0
b6 = Pressure low
b7 = Pressure
high
= 01
Detail [0] BYTE Manufacturer
15
Required Ye s Set NV Alarm
16
Required Ye s Set NV Warning
44 User Guide | Entegris, Inc.
enable
enable
BOOL Enables the
BOOL Enables the
specified
setting of
alarm bits
setting of
warning bits
b0 : b7 = 0
00 = Disabled
01 = Enabled
(default)
00 = Disabled
01 = Enabled
(default)
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Services 30.1 – Instance Services – S-Device Supervisor Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
05
Required Yes Reset None Resets the device
hex
06
Required Yes Start None Moves the device
hex
07
Optional Yes Stop None Moves the device
hex
4B
Required Yes Abort None Moves the device
hex
4C
Required Yes Recover None Moves the device
hex
4E
Required Yes Perform_Diags Test ID
hex
Single
Single
Attribute ID
(USINT)
Attribute
ID (USINT);
Value
(USINT)
Retrieves an
attribute value
Sets an attribute
value
to the self-testing
state
to the executing
state
to the idle state
to the abort state
out of the abort
state
Causes the
device to
perform a set
of diagnostic
routines
PARAMETER
VALUES
1–255
Attribute
ID = 1–255
Value =
attribute
specific
0 = Standard
1-63 =
Reserved
64-127 =
Device
profile
128-255 =
Vendor
specific
45Entegris, Inc. | Us er Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
S-ANALOG SENSOR OBJECT (31
HEX
)
—
Class
Attributes 31.0 – Class Attributes – S-Analog Sensor Object
ATT.
ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
Services 31.0 – Class Services – S-Analog Sensor Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Instance 1 – Flow
Attributes 31.1 – Instance Attributes – S-Analog Sensor Object 1
ATT.
ID REQUIRED SUPPORTED
3
Optional Ye s Get NVC Data type USINT Determines
ACCESS
RULE NAME
Single
ACCESS
RULE NV NAME
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
Attribute ID
(USINT)
DATA
TYPE
Retrieves an
attribute value
ATTRIBUTE
DESCRIPTION VALUES
the data type
of value and
all related
attributes as
specified in
this table
PARAMETER
VALUES
1–255
(default) = INT
4
Optional Ye s Get NVC Data
5
Required Ye s Get V Reading
6
Required Ye s Get V Value INT or
46 User Guide | Entegris, Inc.
units
valid
ENGUNITS Determines
BOOL Indicates that
specified by
data type if
supported
the units
context of
value and
all related
attributes
the value
attribute
contains a
valid value
Analog input
value
(default) =
Counts*
0 = Invalid
1 = Valid
(Invalid: e.g.,
not warmed
up yet)
The corrected,
converted,
calibrated final
value of the
sensor
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 31.1 – Instance Attributes – S-Analog Sensor Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
7
Required Ye s Get V Status BY TE Alarm and
8
Optional Ye s Set NV Alarm
9
Optional Ye s Set NV Warning
10
Optional Ye s Get NVC Full scale Same as
17
Optional Ye s Set NV Alarm
18
Optional Ye s Set NV Alarm
ACCESS
RULE NV NAME
enable
enable
trip
point
high
trip
point
low
DATA
TYPE
BOOL Enables the
BOOL Enables the
value
Same as
value
Same as
value
ATTRIBUTE
DESCRIPTION VALUES
warning
state of this
instance
setting of the
alarm status
bits
setting of the
warning status
The value of
full scale for
the sensor
Determines
the value
above which
an alarm
condition
will occur
Determines
the value
below which
an alarm
condition
will occur
b0 = High
alarm
b1 = Low
alarm
b2 = High
warning
b3 = Low
warning
b4-b7 =
Reserved
0 = Disable
(default)
1 = Enable
0 = Disable
(default)
1 = Enable
= 6000
[default] =
Maximum
value for its
data type
[default] =
Minimum
value for its
data type
hex
21
Optional Ye s Set NV Warning
22
Optional Ye s Set NV Warning
trip
point
high
trip
point
low
Same as
value
Same as
value
Determines
the value
above which
a warning
condition
will occur
Determines
the value
below which
a warning
condition
will occur
[default] =
Maximum
value for its
data type
[default] =
Minimum
value for its
data type
47Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 31.1 – Instance Attributes – S-Analog Sensor Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
25
Optional Ye s Set NV Safe
26
Optional Ye s Set NV Safe
27
Optional Ye s Set NV Autozero
ACCESS
RULE NV NAME
state
value
enable
DATA
TYPE
USINT Specifies the
Same as
Value
BOOL Enables the
ATTRIBUTE
DESCRIPTION VALUES
behavior for
the value for
states other
than execute
The value to
be used for
Safe state =
Safe value
Autozero**
0 = Zero
[default]
1 = Full scale
2 = Hold last
value
3 = Use safe
value
4 = Continue
sensing
5 – 50 =
Reserved
51 – 99 =
Device specific
100 – 255 =
Vendor
specific
[default] = 0
0 = Disable
1 = Enable
[default]
NOTE: This
default is a
DeviceNet
compliance
variance
28
Optional Ye s Get V Autozero
* Counts are interpreted as a “Percent of full scale” where a Count value of 24576 (6000 hexadecimal)
corresponds to 100%. This allows a maximum reading of 133.33%.
** With Autozero enabled, upon setpoint = 0, the device will close the valve then wait a delay period
before beginning the sensor nulling process. The Autozero status can be monitored to detect when
the nulling process actually begins.
48 User Guide | Entegris, Inc.
status
BOOL Indicates the
status of the
automatic
nulling**
0 = Inactive
1 = Active
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 31.1 – Instance Attributes – S-Analog Sensor Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
35
Optional Ye s Set NV Gas cali-
99
Cond. Yes Get NVC Subclass UINT Identifies
100
Vendor
specific
Yes Set NV Damping
ACCESS
RULE NV NAME
bration
object
instance
coecient
DATA
TYPE
UINT Indicates
USINT Low-pass
ATTRIBUTE
DESCRIPTION VALUES
which Gas
calibration
object
instance is
active for
this object.
instance
subclass
filter coefficient
τ =
62.5ms* 2
00 = Disabled
01 = Enable
[default]
NOTE: This
default is a
DeviceNet
compliance
variance
01 = Flow
diagnostics
0 = disabled
1 – 6 = n
[default] =
2 (τ ≈ 0.25 sec)
n
7 – 255 =
reserved
49Entegris, Inc. | Us er Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 31.1 – Instance Services – S-Analog Sensor Object 1
(continued)
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
48
Optional Yes Zero_Adjust None Causes the
hex
32
Vendor
hex
specific
* NOTE: Upon termination of Zero adjust, if the Actuator override is set to Hold, the Actuator will
resume to hold at the value just prior to the initiation of the Zero adjust.
Yes Stop_Zero
Single
Single
_Adjust
Attribute
ID (USINT)
Attribute
ID (USINT):
Value
None Terminates the
Retrieves an
attribute value
Sets an
attribute value
device to begin a
re-zero process
re-zero process*
PARAMETER
VALUES
1 – 255
Attribute
ID = 1 – 255
Value =
attribute
specific
Hence, the FFC device can be made to jump-start the position of the valve at
the outset of the control algorithm by the following sequence:
1. Leave set point at a desired value
2. Actuator Override = Hold (the valve freezes in its current position)
3. Sensor Zero_Adjust (closes the valve and, after a settling period,
begins the zeroing)
4. Sensor Stop_Zero_Adjust (valve returns to previously held position)
5. Actuator Override = Normal (the device begins normal control)
50 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Instance 2 – Inlet Pressure
Attributes 31.2 – Instance Attributes – S-Analog Sensor Object 2
ATT.
ID REQUIRED SUPPORTED
3
Optional Yes Get NVC Data
4
Optional Yes Get NVC Data
5
Required Yes Get V Reading
6
Required Yes Get V Value INT or
7
Required Yes Get V Status BYTE Alarm and
8
Optional Yes Set
9
Optional Yes Set
10
Optional Yes Get NVC Full scale Same as
17
Optional Yes Set
ACCESS
RULE NV NAME
type
units
valid
Alarm
NV
enable
Warning
NV
enable
Alarm trip
NV
point high
DATA
TYPE
USINT Determines
ENGUNITS Determines the
BOOL Indicates that
specified by
data type if
supported
BOOL Enables the
BOOL Enables the
value
Same as
value
ATTRIBUTE
DESCRIPTION VALUES
the data type
of value and
all related
attributes as
specified in this
table
units context
of value and
all related
attributes
the value
attribute
contains a valid
value
Analog input
value
warning state
of this object
instance
setting of the
alarm status bits
setting of the
warning status
bits
The value of
Full scale for
the sensor
Determines the
value above
which an alarm
condition will
occur
[default] =
INT
[default] =
Counts*
0 = Invalid
1 = Valid
(invalid: e.g.,
not warmed
up yet)
The corrected, converted, calibrated final
value of the
sensor
b0 = High
alarm
b1 = Low
alarm
b2 = High
warning
b3 = Low
warning
b4 – b7 =
Reserved
0 = Disable
[default]
1 = Enable
0 = Disable
[default]
1 = Enable
= 6000
[default] =
Maximum
value for its
data type
hex
51Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 31.2 – Instance Attributes – S-Analog Sensor Object 2
(continued)
ATT.
ID REQUIRED SUPPORTED
18
Optional Yes Set NV Alarm trip
21
Optional Yes Set NV Warning
22
Optional Yes Set NV Warning
25
Optional Yes Set NV Safe state USINT Specifies the
ACCESS
RULE NV NAME
point low
trip point
high
trip point
low
DATA
TYPE
Same as
value
Same as
value
Same as
value
ATTRIBUTE
DESCRIPTION VALUES
Determines
the value below
which an alarm
condition will
occur
Determines
the value above
which a warning
condition will
occur
Determines
the value below
which a warning
condition will
occur
behavior for
the value for
states other
than Execute
[default] =
Minimum
value for its
data type
[default] =
Maximum
value for its
data type
[default] =
Maximum
value for its
data type
0 = Zero
[default]
1 = Full scale
2 = Hold last
value
3 = Use safe
value
4 = Continue
sensing
5 – 50 =
Reserved
51 – 99 =
Device
specific
100–255
= Vendor
specific
26
Optional Yes Set NV Safe value Same as
100
Vendor
Specific
* Counts are interpreted as a “Percent of full scale” where a Count value of 24576 (6000 hexadecimal)
corresponds to 100%. This allows a maximum reading of 133.33%.
52 User Guide | Ente gris, Inc.
Yes Set NV Damping
coecient
value
USINT Low-pass filter
The value to
be used for
Safe state =
Safe value
coecient
τ =
n
62.5ms* 2
[[default] = 0
0 = Disabled
1 – 6 = n
[default] =
2 (τ ≈ 0.25
sec)
7 – 255 =
Reserved
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Services 31.2 – Instance Services – S-Analog Sensor Object 2
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Get_Attribute_
hex
Single
Single
Attribute ID
(USINT)
Attribute
ID (USINT);
Value
Retrieves an
attribute value
Sets an attribute
value
PARAMETER
VALUES
1 – 255
Attribute ID =
1 – 255
Value =
attribute
specific
53Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
S-ANALOG ACTUATOR OBJECT (32
HEX
)
—
Class
Attributes 32.0 – Class Attributes – S-Analog Actuator Object
ATT.
ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
Services 32.0 – Class Services – S-Analog Actuator Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Instance 1
Attributes 32.1 – Instance Attributes – S-Analog Actuator Object 1
ATT.
ID REQUIRED SUPPORTED
3
Optional Yes Get NVC Data
ACCESS
RULE NAME
Single
ACCESS
RULE NV NAME
type
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
Attribute ID
(USINT)
DATA
TYPE
USINT Determines the
Retrieves an
attribute value
ATTRIBUTE
DESCRIPTION VALUES
data type of Value
[default] = INT
PARAMETER
VALUES
1 – 255
4
Optional Yes Get NVC Data
5
Required Yes Get NV Override USINT Specifies an
6
Required Yes Get V Value UINT Analog output
54 User Guide | Entegris, Inc.
units
UINT Determines the
context of Value
override for the
physical actuator.
For values other
than zero (normal
control), the
Value attribute
is ignored
value
[default] =
Counts*
0 = Normal
1 = O
2 = On
3 = Hold
4 – 127 =
Reserved
128-255 =
Vendor specific
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 32.1 – Instance Attributes – S-Analog Actuator Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
7
Required Yes Get V Status BYTE Alarm and Warn-
21
Optional Yes Set NV Safe
100
101
102
Vendor
specific
Vendor
specific
Vendor
specific
Yes Get NVF Actuator
Yes Get NVF Stepper
Yes Get NVF Home
ACCESS
RULE NV NAME
state
serial
number
FW Rev
oset
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
ing state of this
object instance
USINT Specifies the
behavior of the
physical actuator
for states other
than Execute
UINT Configuration** Values are
SHORT
Configuration** Values are
STRING
USINT Configuration** Values are
b0 : b3 = 0
b4 = Low
warning
exception
b5 = High
warning
exception
b6 = Low alarm
exception
b7 = High alarm
exception
0 = Close
1 = Open
2 = Hold
3 – 255 =
Invalid
stored in the
Stepper motor
controller
stored in the
Stepper motor
controller
stored in the
Stepper motor
controller
Vendor
103
specific
* Counts are interpreted as a “Percent of Full Scale” where a Count value of 24576 (6000 hexadecimal)
corresponds to 100%. This allows a maximum reading of 133.
Yes Get NVF Upper
limit
USINT Configuration** Values are
stored in the
Stepper motor
controller
55Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Services 32.1 – Instance Services – S-Analog Actuator Object 1
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
32
Vendor
hex
specific
33
Vendor
hex
specific
Yes Load_Stepper
Yes
Single
Single
_Defaults
Update_
Stepper
Parameter_
Attributes
Attribute ID
(USINT)
Attribute
ID (USINT):
Value
None Causes the
None Updates the
Retrieves an
attribute value
Sets an attribute
value
Stepper driver to
revert to default
parameters
DeviceNet
visible Stepper
attributes from
the Stepper
driver
PARAMETER
VALUES
1 – 255
Attribute ID =
1 – 255
Value =
attribute
specific
56 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
S-SINGLE STAGE CONTROLLER OBJECT (33
HEX
)
—
Class
Attributes 33.0 – Class Attributes – S-Single Stage Controller Object
ATT.
ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
Services 33.0 – Class Services – S-Single Stage Controller Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Instance 1
Attributes 33.1 – Instance Attributes – S-Single Stage Controller Object 1
ATT.
ID REQUIRED SUPPORTED
5
Optional Yes Set NV Control
ACCESS
RULE NAME
Single
ACCESS
RULE NV NAME
Mode
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
Attribute ID
(USINT)
DATA
TYPE
USINT Specifies the
Retrieves an
attribute value
ATTRIBUTE
DESCRIPTION VALUES
operational mode
of the controller
PARAMETER
VALUES
1 – 255
0 = Normal
1 = O
2 = On
3 = Hold
4 – 127 =
Reserved
128 – 255 =
Vendor specific
6
Required Yes Set V Set point * The setpoint to
10
Required Yes Get V Status BYTE Alarm and warn-
100
Vendor
specific
Yes Get NVF Track
band limit
which the process
variable will be
controlled
ing state of this
object instance
INT Tuning
parameter**
[default] = 0
b0 : b5 = 0
b6 = Warning
exception
b7 = Alarm
exception
57Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 33.1 – Instance Attributes – S-Single Stage Controller Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
101
Vendor
specific
102
Vendor
Specific
* Specified by the value of S-Analog sensor object Instance 1, Attribute 3.
** A description of these vendor-specific tuning parameters is beyond the scope of this document.
Yes Get NVF Acquire
Yes Get NVF Damping
ACCESS
RULE NV NAME
band
gain
factor
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
INT Tuning
parameter**
INT Tuning
parameter**
Services 33.1 – Instance Services – S-Single Stage Controller Object 1
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
10
Required Yes Set_Attribute_
hex
Single
Single
Attribute ID
(USINT)
Attribute
ID (USINT);
Value
Retrieves an
attribute value
Sets an attribute
value
PARAMETER
VALUES
1 – 255
Attribute ID =
1 – 255
Value =
attribute
specific
58 User Guide | Entegris, Inc.
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
S-SENSOR CALIBRATION OBJECT (64
HEX
)
—
Class
Attributes 64.0 – Class Attributes – S-Sensor Calibration Object
ATT.
ID REQUIRED SUPPORTED
1
Optional Yes Get Revision UINT Object revision = 01
Services 64.0 – Class Services – S-Sensor Calibration Object
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
4B
Required Yes Get_All_
hex
Service Date Field Parameters – Get_All_Instances – Success Response
PARAMETER REQUIRED DATA TYPE DESCRIPTION VALUES
Size of list Required UINT Specifies the number of
List of
calibrations
Required if
size >0
ACCESS
RULE NAME
Single
Instances
ARRAY of: Supported list
STRUCT of: Supported calibration
UINT S-Sensor calibration
UINT Calibration ID number = 0-65535
UINT Valid sensor instance = 01
DATA
ATTRIBUTE
TYPE
DESCRIPTION VALUES
Attribute ID
(USINT)
None Retrieves a list
elements in the array
object instance ID
Retrieves an
attribute value
of all supported
instances
Number of calibrations in the list
= 01
PARAMETER
VALUES
1 – 255
See response
below
Instance 1
Attributes 64.1 – Instance Attributes – S-Sensor Calibration Object 1
ATT.
ID REQUIRED SUPPORTED
Required Ye s Get NVF Calibration
3
ACCESS
RULE NV NAME
ID number
DATA
TYPE
UINT Identifies the
ATTRIBUTE
DESCRIPTION VALUES
calibration
(e.g., fluid type)
[default] =
0
59Entegris, Inc. | User Guide
NT INTEGRATED FLOW CONTROLLER WITH DEVICENET COMMUNICATION
Attributes 64.1 – Instance Attributes – S-Sensor Calibration Object 1
(continued)
ATT.
ID REQUIRED SUPPORTED
Required Ye s Get NVC Valid
4
5
Optional Ye s Set NV Calibra-
6
Optional Ye s Get NVF Full
ACCESS
RULE NV NAME
sensor
instance
tion
name
scale
DATA
TYPE
UINT S-Analog sensor
SHORT
STRING
STRUCT of: Full scale of the
REAL Amount
ENGUNITS Units
ATTRIBUTE
DESCRIPTION VALUES
object instance
ID for which this
object instance
is valid
ASCII text, max
50 characters,
User accessible
string representation used to
identify the
calibration or
application
device using this
object instance
Services 64.1 – Instance Services – S-Sensor Calibration Object 1
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION
0E
Required Yes Get_Attribute_
hex
Single
Attribute ID
(USINT)
Retrieves an
attribute value
= 01
[default] =
Null
[default] =
0, 0
PARAMETER
VALUES
1 – 255
10
Required Yes Set_Attribute_
hex
60 User Guide | Entegris, Inc.
Single
Attribute
ID (USINT);
Value
Sets an attribute
value
Attribute ID =
1 – 255
Value =
attribute
specific
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