Indicates a hazardous situation which, if not avoided,
could result in serious injury or death.
Introduction
This manual is for use with the
following standard NT Pressure
Transducer 4000 Series Models
4100 and 4210. These instruments
have been designed for use in high
purity applications in the semiconductor industry.
These products feature no moving
parts and no filled cavities, which
reduces the possibility of a contaminated process. The wetted parts of
these nonmetallic transducers are
constructed with PTFE, PFA or other
similar high purity inert materials.
Cut-away Example:
NT Single-port
Pressure Transducer
connector option
Signal conditioning circuit
Electronic pressure senso
PTFE body
Process connection
WARNING! Attempting to install
or operate standard NT 4000
Series Pressure Transducers
without reviewing the instructions contained in this manual
could result in personal injury or
equipment damage.
Cut-away Example:
NT Flow-through
Pressure Transducer
electrical
connector option
Signal conditioning circuit
Electronic
pressure sensor
PTFE body
Process
connection
2User Guide | Entegris, Inc.
NT PRESSURE TRANSDUCER MODELS 4100, 4210
Installation
WARNING! The pressure transducer has been factory sealed.
Do not attempt to remove the
cover of the pressure transducer.
Any attempt at removal of the
pressure transducer cover
will void the warranty and
damage the unit.
WARNING! Do not tighten the
nuts that protect the process
connections during shipment.
Do not tighten the nuts unless the
proper tubing has been installed.
Tightening these nuts may result in
damage to the pressure transducer
process connections.
MECHANICAL INSTALLATION
—
NOTE: For detailed tube flaring
instructions, see “Flaretek tube
fitting flare and assembly procedure”
at www.entegrisfluidhandling.com
(follow the Fittings>Tube Fittings>
Flaretek Tube Fittings links).
When installing flared tubing to
the pressure transducer, the flared
tube is pushed over the transducer’s
fitting until the fitting reaches the
smaller tube diameter. The amount
of torque required to tighten the
coupling nut is dependent upon
the size of the fitting.
Fitting size
Torque (in•lbs)
1
⁄4"3⁄8"1⁄2"3⁄4"1"
58111430
Care should be taken when installing flared tubing onto the pressure
transducer. Do not use excessive
torque or subject the transducer
to high heat during installation.
The transducer should be firmly
mounted to a solid surface to
ensure stability. Verify that the
pressure transducer and the sig nal
cable are free from mechanical
stress or excessive bending from
the surrounding equipment.
3Entegris, Inc. | Us er Guide
NT PRESSURE TRANSDUCER MODELS 4100, 4210
+24 VDC
GND
ELECTRICAL INSTALLATION
—
The pressure transducer provides
an analog (0–5 VDC, 0–10 VDC or
4–20 mA) electrical output propor-
NOTE: The white wire is not required
for the 4–20 mA output configuration,
please refer to the wiring diagrams below.
tional to the pressure measured.
Pressure transducer
4–20 mA output version
WHITE
RED
BLACK
Pressure transducer
0–5 VDC, 0–10 VDC output version
WHITE
RED
BLACK
No connection
4–20 mA pressure signal
Voltage pressure signal
Display
or PLC
Display
or PLC
Electrical connector information
WIRE4–20 MA OUTPUT VERSIONVOLTAGE OUTPUT VERSION
Red VDC+24 VDC (12–30 VDC)24 VDC (12–30 VDC)
Black VDC–GroundGround
WhiteNot used0–5 VDC signal or 0–10 VDC signal
POWER SUPPLY REQUIREMENTS
—
The pressure transducer requires
a 12–30 volt DC power supply with
less than 2% ripple at 100 or 120 Hz.
The required power supply voltage
varies with the load resistance (R
please refer to the formulas on page
Load
5. The power supply must provide
clean power and must be used only
to power similar measurement-type
devices. The power supply must not
be used to power inductive loads,
such as motors, relays or solenoids.
These devices may produce
4User Guide | Entegris, Inc.
transients that may aect the
pressure transducer measurements
when the inductive device is powered
up or powered down.
),
NOTE: Be sure to ground the shield of
the cable to local ground.
850
R
where:
V
– 12 V
WARNINGS
—
NT PRESSURE TRANSDUCER MODELS 4100, 4210
WARNING! For use in Class I
Division 2 Hazardous Environments, models with disconnecting
cable options must be wired in
accordance with the control
drawing 01-1033562 on page 17.
WARNING! Do not remove or
replace while circuit is live unless
the area is known to be free
of ignitible concentrations of
flammable substances.
WARNING! Do not replace components unless power has been disconnected or the area is known to
be free of ignitible concentrations.
(Ohms)
Load
R
0
122429
Power supply
voltage
(VPS)
Operating
region
Figure 1. Power required for a 4–20 mA loop.
WARNING! Explosion hazard.
Do not connect while the circuit is
live or unless the area is known to
be free of ignitible concentrations.
WARNING! Substitution of components may impair suitability for
Division 2.
Load Resistance: Current Output
(4–20 mA Configuration)
If a load resistor, R
Load
, is used
in series with the current output,
the value of R
is dependent on
Load
the supply voltage and the meter
resistance and is calculated from
the following formula:
Load Resistance: Voltage Output
(0–5, 0–10 VDC)
The output impedance is 1 kOhm.
The input impedance should
be ≥1 megohm for ±0.1% load
impedance error.
PS
=– R
Load
20 mA
R
= maximum load
Load
resistance (ohms)
V
= power supply
PS
voltage (volts)
R
meter
= meter resistance (ohms)
(theoretically = 0)
meter
5Entegris, Inc. | Us er Guide
NT PRESSURE TRANSDUCER MODELS 4100, 4210
Unit Operation
OPERATING ENVIRONMENT
—
The pressure transducer is to
be mounted in a well vented and
controlled environment. Refer to
the Reference section on page 10
for additional specifications.
PROCESS CONNECTION
—
To avoid possible pressure leaks,
make sure all process connections
have been performed in accordance
with the Mechanical Installation
guidelines on page 3.
PRESSURE TRANSDUCER COVER
ASSEMBLY
—
NT Pressure Transducer covers are
factory sealed and should not be
tampered with or opened. Opening
the cover shall void the product
warranty.
PRESSURE AND TEMPERATURE
REQUIREMENTS
—
The minimum pressure required
is atmospheric pressure. The pressure transducer may be damaged
if subjected to vacuum pressure
(pressure that is less than atmospheric pressure).
The pressure transducer is rated for
use with fluids at process temperatures between 10–65°C (50–149°F)
under normal operating conditions.
WARNING! NT Pressure Transducers, Models 4100 and 4210 may be
damaged if the sensor is subjected
to any level of vacuum pressure
(pressure less than atmospheric
pressure).
WARNING! Any attempt to remove
or tamper with the transducer
cover will void the warranty
and damage the unit.
6User Guide | Entegris, Inc.
PRESSURE LIMITS
—
NT PRESSURE TRANSDUCER MODELS 4100, 4210
TRANSDUCER
RANGE
0 – 30 psig
0 – 60 psig
0 –100 psig
0 –150 psig
Maximum over pressure can be limited by the fitting. Consult the fitting specification for
maximum over pressure limits.
WARNING! The pressure limits
for standard NT Pressure Transducers (4000 Series) decrease
significantly for temperatures
above 65°C (149°F). Exceeding
these limits may result in personal
injury or equipment damage.
MAXIMUM OVER PRESSURE
LIMIT @ 23°C (73°F)
690 kPa (100 psig)690 kPa (100 psig)
1034 kPa (150 psig)690 kPa 100 psig
1034 kPa (150 psig)690 kPa 100 psig
1310 kPa (190 psig)N/A
MAXIMUM OVER PRESSURE
LIMIT @ 65°C (149°F)
PRESSURE REFERENCE ACCURACY
—
The accuracy of the pressure
transducer output is ±1% of full
scale. This accuracy includes the
eects of linearity, hysteresis and
repeatability, measured at room
temperature. Accuracy specifications for non-standard product
configurations might vary.
7Entegris, Inc. | Us er Guide
NT PRESSURE TRANSDUCER MODELS 4100, 4210
LINEAR OUTPUT SIGNAL
—
The output signal of the pressure
transducer is a linear function
proportional to the applied pressure.
20 mA
Current Output (mA)Voltage Output (V)
4 mA
10 V
or 5 V
0V
0 psig
Pressure
Measurement
Pressure
Measurement
Full scale
Full scale0 psig
8User Guide | Entegris, Inc.
Troubleshooting
Troubleshooting the NT Pressure
Transducers (4000 Series) may
be accomplished by measuring
the out put signal of the pressure
transducer with a battery powered
current/voltage meter. The meter
may be placed in series with the
pressure transducer to measure the
current output or it may be used to
directly measure the voltage output.
Using the battery powered current/
volt meter is an eective method to
determine whether the device or the
on-site data acquisition system is not
functioning properly.
NT PRESSURE TRANSDUCER MODELS 4100, 4210
9Entegris, Inc. | Us er Guide
NT PRESSURE TRANSDUCER MODELS 4100, 4210
Reference
The following lists the specifications
for the NT Pressure Transducer
product line. Please consult the
factory for product specifications
manufactured for nonstandard
applications.
Physical Specifications:
Materials
Connection type
Wetted partsBodyPTFE
Nonwetted
parts
Flaretek tube fitting, Super 300 Type Pillar® tube fitting, NPT
(PrimeLock® available upon request.)
Electrical Specifications:
Input voltage
Input current
Pressure signal output ranges
24 VDC (12–30 VDC)
20 mA maximum
4–20 mA, 0–5 VDC, 0–10 VDC
NOTE: Specifications are subject to
change without notice.
Sensor interface CTFE or PFA
O-ringKalrez
Polypropylene, polyethylene, Viton®, PVDF
(in addition to materials listed above)
®
Electrical connection
Electrical enclosure
6', 12', 30' FEP-jacketed pigtail or polypropylene
3-pin connector
IP54
Performance Specifications
Reference accuracy
Process temperature
10User Guide | Entegris, Inc.
±
1% of full scale (includes linearity, hysteresis and
repeatability) at 23°C (73°F)
10–65°C (50–149°F)
Certifications
CE COMPLIANCE
Entegris products have been tested
to various test standards required
by the EMC 2104 /30 /EU directive.
The results of this testing are on
file at Entegris and are available
upon request.
Please contact the factory for
the latest information. The most
current specifications may be
found on Entegris’ Web site at:
Entegris has tested our standard
products to the UL 61010-1,
ANSI/ISA 12.12.01 standards for
use in Class I, Division 2 Group A–D,
T6 10°C ≤Ta ≤65°C hazardous
environments. The results of this
testing are on file at Entegris and
are available upon request.
NT PRESSURE TRANSDUCER MODELS 4100, 4210
All spec i fications are subject to
change. Please contact the factory
for the latest information.
11Entegris, Inc. | User Guide
NT PRESSURE TRANSDUCER MODELS 4100, 4210
Ordering Information
Refer to the following for the desired configuration.
Model 4100 Single-port Pressure Transducer: part number
4100 - - - - - -
Electrical outputs
A = 4–20 mA (12–30 VDC input)
B = 0–10 VDC (12–30 VDC input)
C = 0–5 VDC (12–30 VDC input)
NONINCENDIVE FIELD WIRING
APPAR ATUS (MODEL NT4100 /4200 RELATIONSHIP
V
max
I
max
Pi
Ci + C cable (60 pf/ft)
Li + L cable (0.2 uH/ft)
18User Guide | Entegris, Inc.
≥
≥
≥
≤
≤
ASSOCIATED NONINCENDIVE
FIELD WIRING APPARATUS
Voc
Isc
Po
Ca
La
NT PRESSURE TRANSDUCER MODELS 4100, 4210
NOTES:
1. For use in Class I Division 2 Groups A, B, C, D, the following pressure transducer models must be used with an approved associated nonincendive field
wiring apparatus that meets the requirements in Table 3 with the entity
parameters in Table 1.
2. For use in Class I Division 2 Groups A, B, C, D, the following pressure
transducer models must be used with an approved associated nonincendive
field wiring apparatus that meets the requirements in Table 3 with the entity
parameters in Table 2.
Please call your Regional Customer Service Center today to learn what Entegris can do
for you. Visit entegris.com and select the Contact Us link to find the customer service
center nearest you.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print
this information, visit entegris.com and select the Terms & Conditions link in the footer.
LIMITED WARRANTY
Entegris’ products are subject to the Entegris, Inc. General Limited Warranty. To view
and print this information, visit entegris.com and select the Legal & Trademark Notices
link in the footer. Entegris does not warranty any failure in the case of customers using
unapproved foreign components.
Corporate Headquarters
129 Concord Road
Billerica, MA 01821
USA
Entegris®, the Entegris Rings Design™, Pure Advantage, Flaretek,® F
are trademarks of Entegris, Inc.
Kalrez® and Viton® are trademarks of E. I. du Pont de Nemours and Company.
Pillar® is a trademark of Nippon Pillar Packing Company, Ltd.