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InVue NT6520
User Manual
36 pgs1.32 Mb0

entegris InVue NT6520, InVue NT6510 User Manual

P/N 01-1032525 (Rev. A 09/15) CRITICAL MATERIALS HANDLING
INVUE™ INTEGRATED
FLOW CONTROLLERS,
MODELS NT6510, NT6520
User guide
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
Table of Contents
Identifying Nonstandard
Product Configurations ...... 2
Principle of Operation ......... 2
Factory Configured ............. 3
Continuous versus
Batch Control ................. 3
Calibration Reference
Conditions ..................... 3
Power Supply Requirements ... 4
Storage Temperature Range ... 4
Operating Ambient
Temperature Range .......... 4
Operating Process
Temperature Range .......... 4
Line Pressure .................... 4
Pressure Drop .................... 4
Dimensions ...................... 5
Provided Equipment ........... 9
Mounting Requirements ...... 10
Mechanical Installation ...... 11
Power Supply Requirements .. 12
Electrical Connections ....... 14
Wiring Diagram ................ 16
Optional Connections ......... 17
Setpoint Signal Setup ......... 18
Calibration Graphs ............ 19
Operating Environment ...... 20
Performance ................... 21
Operational Reliability ........ 22
Status and Alarming .......... 22
LED Status Codes ............. 23
Normal Operation ............. 27
Re-zero Function .............. 27
Physical Specifications ....... 28
Electrical Specifications ..... 28
Performance Specifications ... 28
CE Compliance ................ 32
Repair and Warranty Service ... 32
Technical Support .............. 32
For More Information ......... 32
Terms and Conditions ......... 32
Product Warranties ............ 32
ENTEGRIS, INC. USER GUIDE 1
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
Introduction
This manual is for use with a standard InVue™ Integrated Flow Controller, Models NT6510 and NT6520. These instruments have been designed for use in high-purity fluid applications within industries that need tightly controlled chemical processes such as the semiconductor, biomedical and solar cell industries. The wetted parts are constructed with Modified PTFE, PTFE, PFA or other similar high-purity inert materials.
WARNING! Attempting to install or
!
operate standard InVue Integrated Flow Controllers without reviewing the instructions contained in this manual could result in personal injury or equipment damage.
Identifying Nonstandard Product Configurations
This User Guide applies to product manufactured as the standard InVue Integrated Flow Controller. Entegris also manufactures non­standard product to meet the needs of spe cific applications. Nonstandard product may have different materials of construction, accuracy specifi­cations, performance and other specifications that differentiate the nonstandard product from the stan­dard offering.
NOTE: Nonstandard InVue Inte­grated Flow Controllers may be iden tified by the model number found on the product label. Specifications for nonstandard InVue Integrated Flow Controllers are available by contacting Entegris.
Nonstandard InVue Integrated Flow Controllers, Model NT6510, are identified with an “N” followed by a number code.
For example, in part number 6510-T2-F03-B06-A-P7-U3-N02, the “N02” designates the product as a nonstandard product manu factured to certain specifications designated under the “N02” code.
Nonstandard InVue Integrated Flow Controllers, Model NT6520, are identified with an “R” followed by a number code.
For example, in part number 6520-T6-F03-B06-A-P7-U3-R02, the “R02” designates the product as a nonstandard product manufactured to certain specifications designated under the “R02” code.
Contact Entegris for assistance with nonstandard product applications.
Principle of Operation
The user provides a setpoint signal that corresponds to the desired amount of flow. The standard InVue Integrated Flow Controller compares the setpoint to the actual flow signal from the flow module. If the actual flow is greater than the setpoint, the unit closes the valve. If the actual flow is less than the setpoint, the unit opens the valve. The flow con­troller does this in a precise manner until the actual flow signal is equal to the setpoint.
2 USER GUIDE ENTEGRIS, INC.
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
NT Integrated Flow Controller System Diagram
Powe
S
Re
r
etpoint
-zero
NT Integrated Flow Controller
control interface
Sensor
measurement
Fluid flow
Flow/valve module
Factory Configured
The standard InVue Integrated Flow Controller is pre-configured from the factory for the flow range specified by the user. The specified flow range is found on the label of the unit. The unit control algorithm uses pressure and flow measurements to ensure proper operation within specification.
Continuous Versus Batch Control
The standard InVue Integrated Flow Controller may be ordered as a continuous type controller or a batch type controller.
The continuous controller type is for applications requiring continuous flow rate control, where the integral valve module is never required to fully close. Typically, another valve is used in conjunction with the flow controller to stop the liquid flow.
The batch controller type is for appli­cations requiring flow rate control where the integral valve module will fully close between batch dispense cycles. If total volume needs to be controlled, an additional separate totalizer device must be employed.
Pressure signal
Flow signal
Alarm
Valve control
Fluid flow
Calibration Reference Conditions
Unless otherwise noted, the speci­fications listed for the InVue Inte­grated Flow Controller are referenced under the following operating conditions:
Parameter Reference Condition
Process fluid Deionized water
Process temperature
Ambient temperature
Process pressure 207 kPa (30 psig)
Supply voltage 24 VDC ±10%
Operation Re-zeroed
23°C ±3°C (73°F ±5°F)
23°C ±3°C (73°F ±5°F)
for operating range option 10 –100 % of full scale flow ("T" code flow range)
276 kPa (40 psig) for operating range option 5–100% of full scale flow ("Y" code flow range)
ENTEGRIS, INC. USER GUIDE 3
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
General Considerations
The following requirements and specifications are briefly provided here. Before installing and operating the InVue Integrated Flow Controller, see the Installation and Unit Opera- tion sections of this user guide for more detailed information.
NOTE: The flow controller has been factory sealed. Do not attempt to remove the cover of the unit. Any attempt at removal of the unit cover will void the warranty.
Power Supply Requirements
The power supply range for the flow controller is 24 VDC ±10%. The power supply to the unit must provide clean power and must be used only to power similar measurement-type devices.
Storage Temperature Range
The flow controller can withstand storage temperatures between
-15°C – 40°C (5°F –104°F) with no permanent effect on the performance of the device.
Operating Ambient Temperature Range
The flow controller is designed to operate in ambient temperature, cleanroom environments. It is speci­fied to operate at temperatures of 10°C –65°C (50 °F –149°F).
Operating Process Temperature Range
The flow controller is designed to operate in process temperatures of 10°C –65°C (50 °F –149°F).
Line Pressure
Depending on the operating range of the flow controller being used, the system line pressure (measured at the inlet of the unit) must be 69 kPa – 414 kPa (10 psig – 60 psig) for operati ng range option 10 – 100 % of full scale flow (“T” code flow range) or 172 kPa – 414 kPa (25 psi g – 60 psig) for operating range option 5 – 100% of fu ll scale flow (“Y” code flow range).
Pressure Drop
The flow rate is calculated using Entegris’ differential pressure flow technology. Depending on the flow range of the flow controller being used, the minimum pressure drop (inlet to outlet port differential pressure) required for the unit is 69 kPa (10 psig) for operating range option 10 – 100% of fu ll scale flow (“T” code flow range) or 172 kPa (25 psig) for operating range option 5 – 100% of fu ll scale flow (“Y” code flow range).
4 USER GUIDE ENTEGRIS, INC.
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
Dimensions
NT6510
The following fitting size and flow range combinations are available (Flaretek® and Pillar® unless otherwise noted):
Flow Range (mL/min)
TL
Fitting Size
1
⁄4” Yes Yes Yes Yes Yes Yes Yes
3
⁄8” Yes Yes Yes Yes Yes Yes Yes
1
⁄2” — — — — — Yes* Yes*
0–15
* Flaretek® only. Note: The operating range for "T" code flow ranges (default) is 10 –100% of full scale flow.
The operating range for "Y" code flow ranges is 5 –100% of full scale flow.
Please consult Entegris for PrimeLock® tube fitting options and custom flow range.
Flaretek Tube Fittings
Inlet/Outlet Port Connection
1
⁄4” 117.9 mm (4.64") 17.0 mm (0.67") 187.5 mm (7.38”)
3
⁄8” 117.9 mm (4.64") 17.0 mm (0.67") 191.0 mm (7.52”)
1
⁄2” 120.8 mm (4.76”) 17.0 mm (0.67") 195.1 mm (7.68”)
TT
0–25
T0/Y0
0–50
T1/Y1
0–125
T2/Y2
0–250
Dimensions
A B C
T3/Y3
0–500
T4/Y4
0–125 0
End View Top View
134.9 mm (5.31”)
137.2 mm (5.40”)
154.9 mm (6.10” )
167.6 mm (6.60”)
C
5.1 mm (0.20”)
39.4 mm (1.55”)
53.2 mm (2.10”)
Side View
A
B
ENTEGRIS, INC. USER GUIDE 5
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
End View Top View
Super 300 Type Pillar Tube Fittings
Inlet/Outlet Port Connection
1
⁄4” 117.9 mm (4.64”) 17.0 mm (0.67”) 159.3 mm (6.27")
3
⁄8” 117.9 mm (4.64”) 17.0 mm (0.67”) 167.1 mm (6.58")
A B C
C
Dimensions
Side View
A
B
6 USER GUIDE ENTEGRIS, INC.
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
NT6520
The following fitting size and flow range combinations are available (Flaretek and Pillar unless otherwise noted):
Flow Range (mL/min)
T5/Y5
Fitting Size
3
⁄8”
1
⁄2”
3
⁄4”
0–2.5
Yes Yes — — —
Yes Yes Yes — —
— — — Yes Yes
Note: The operating range for "T" code flow ranges (default) is 10 –100% of full scale flow. The operating range for "Y" code flow ranges is 5 –100% of full scale flow.
Please consult Entegris for PrimeLock tube fitting options and custom flow range.
T6/Y6
0–5
T7/Y7
0–10
T8/Y8
0–20
Flaretek Tube Fittings
T9/Y9
0–40
Inlet/Outlet Port Connection
3
⁄8” 117.3 mm (4.62”) 15.7 mm (0.62” ) 224.0 mm (8.82”)
1
⁄2” 120.9 mm (4.76”) 18.3 mm (0.72”) 228.0 mm (8.98”)
3
⁄4” 129.0 mm (5.08”) 23.6 mm (0.93”) 234.2 mm (9.22”)
A B C
End View
7.1 mm (0.28”)
7.1 mm (0.28”)
Dimensions
Top View
170.2 mm (6.70”)
187.5 mm (7.38”)
200.2 mm (7.88”)
Side View
A
B
C
47 mm
(1.85”)
71.1 mm (2.80”)
ENTEGRIS, INC. USER GUIDE 7
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
NT6520
Super 300 Type Pillar Tube Fittings
Inlet/Outlet Port Connection
3
⁄8” 117.3 mm (4.62”) 15.7 mm (0.62” ) 200.2 mm (7.88”)
1
⁄2” 120.9 mm (4.76”) 18.3 mm (0.72”) 205.2 mm (8.08”)
3
⁄4” 129.0 mm (5.08”) 23.6 mm (0.93”) 214.1 mm (8.43”)
A B C
End View
Dimensions
Top View
C
Side View
A
B
8 USER GUIDE ENTEGRIS, INC.
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
Installation
Provided Equipment
Verify:
CAUTION: Do not tighten the
!
nuts that protect the tube connections during shipment. (See the Prepare Fluid Lines Section on page 9). Tightening these nuts without the proper tubing installed may damage the unit’s tube connections.
NOTE: This unit has been assembled
and double-bagged under cleanroom conditions. To maintain purity, only open under cleanroom conditions.
Remove Unit from the Bag
ENTEGRIS, INC. USER GUIDE 9
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