Edwards STP-iX455, STP-iX455C, STP-iXL455, STP-iXL455C Instruction Manual

MT-64E-002-J

Instruction Manual

STP Series Turbomolecular Pumps

STP-iX455/iXL455 Series

Read through the Safety Precautions and each section of this Manual carefully before using the STP pump.

Keep this Manual in a place where you can quickly access it at any time.

Manufacture:

Yuji Kato, TMP Technical Senior Manager

Edwards Japan

Limited

5th

June

. 2016,

Yachiyo

Date and Place

EU representative:

Ian Stones

Vice President, Technology

, Edwards

6th

June

. 2016, Burgess Hill

Date and Place

Declaration of Conformity

We, Manufacture: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan EU Representative: Edwards Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Product Name: Turbomolecular pump Model Number: STP-iX455/iXL455 series Accessories Covered: Power Unit: iPS-240, Display Unit: iDT-001 Communication Interface (EtherCAT)

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use. General Requirements EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use. EMC requirements. General requirements (Immunity: Industrial locations, Emission: Class A) EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards. Immunity for industrial environments EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency disturbance characteristics (Group1, Class A) EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substances

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive 2014/35/EU Low Voltage Directive 2014/30/EU Electromagnetic Compatibility (EMC) Directive 2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

This product has been manufactured under a quality management system certified to ISO 9001:2008

VI-DOC-64-006

STP-iX455/iXL455 Series Instruction Manual

SAFETY PRECAUTIONS

The Safety Precautions in this Manual constitute guidelines to protect operators, the STP pump and its peripheral equipment. To avoid personal injury and prevent product and/or peripheral equipment damage, observe the Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety standards and so on). If the equipment is used in a manner not specified by Edwards, the protection provided by the equipment may be impaired.

SYMBOLS

The following symbols are used in this manual:

Death or Serious Personal Injury

Failure to follow the guidelines marked with this symbol may result in death or serious personal injury.

Minor Personal Injury, Product and/or Peripheral equipment Damage

Failure to follow the guidelines marked with this symbol may result in minor personal injury, product and/or peripheral equipment damage.

NOTICE

Items you must follow during operation and maintenance.

◇ Symbols as Marked on the Equipment

ATTENTION : refer to this manual.

Edwards Japan Limited (abbreviated to Edwards throughout this manual) cannot perfectly anticipate circumstances of all of hazards or problems. The scope of anticipation is limited to the precautions included in the

and specified in this manual.

STP-iX455/iXL455 Series Instruction Manual

◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to the

specified method. Failure to do so may lead to serious personal injury, product and/or peripheral equipment damage if any abnormality/error occurs in the rotor.

◇ The STP pump operates at high temperatures while the baking heater is in operation.

NEVER touch the STP pump and its peripheral equipment while the baking heater is in operation. Operators can burn hands.

◇ Execute the following to prevent an accident caused by the gas.

Check the properties of the gas to be used, referring to the Material Safety Data Sheet

(MSDS) you obtain from the gas supplier. (explosive・combustible・toxic・corrosive, etc) And, keep MSDS and a safety advice of gas supplier.

Warn of the danger of the gas with the warning label when the use gas is hazardous

chemical material.

Always execute gas purge in the pump with the inert gas, and then exhaust residual

gases thoroughly from the STP pump when removing the STP pump from the vacuum equipment.

Secure safety by wearing personal protective equipment when using the gas which

might influence damage health. In addition, take appropriate measure for depending upon the properties of the gas to be used

◇ Exhaust residual gas thoroughly when disposing of the STP pump. If the STP pump is used

for any toxic or reactive gas, always clean the STP pump and dispose of it as industrial waste in accordance with guidelines given by the national and/or local government. Residual gas in the STP pump may cause an accident, for certain gases, which may involve serious injury or death.

STP-iX455/iXL455 Series Instruction Manual

◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may

corrode the STP pump and damage it.

◇ Always check the STP pump has stopped, then turn OFF the primary power supply and

isolate the electrical energy source (Lockout/Tagout) on the vacuum equipment before proceeding to any of the following operations. Failure to do so may cause the STP pump to rotate accidentally, which may injure operators seriously or result in electric shock.

Connect or disconnect cables; Perform inspections such as deposit and/or the air cooling fan; or Perform investigations into probable causes and action/measures taken in the event of

occurrence of a problem.

◇ When removing or installing the pump or at maintenance and inspection, follow the

precautions below. Failure to do so might hurt your back or cause injuries due to occurrence of an accident such as fall.

Use a crane or the like when lifting the heavy product of 18 kg or more. When lifting by hands for unavoidable reason, two or more people must always conduct

it.

◇ When "emergency off" (EMO) circuit is installed in the vacuum equipment, consider the

following to stop the STP pump safely when the EMO circuit operates.

When the EMO circuit operates, atmosphere might be introduced in the STP pump

depending upon the backing-pump. Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump when the EMO circuit operates. (example: shut the valve) When atmosphere is introduced into the STP pump, the touch down bearing may not operate normally.

◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so

may result in electric shock or product damage.

◇ NEVER remove the splinter shield from the STP pump. Doing so may result in product

damage.

◇ DO NOT put foreign objects into the STP pump. Doing so may result in product damage. ◇ Always use the power voltage specified on the nameplates of the STP pump and the

external power supply unit. Wire the power cable securely. Incorrect wiring may result in electric shock or product damage.

◇ The wipes used for clean the flange of the pump might become hazardous waste depending

upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the regulations of each national and/or local government.

◇ NEVER turn OFF the external power supply while the STP pump is rotating. Doing so may

result in product damage.

◇ Perform investigations into probable causes and remove them before restarting the STP

pump in the event of the occurrence of a problem. The use of the abnormal STP pump may result in product damage.

◇ DO NOT move the STP pump while the STP pump is in operation. Doing so may result in

product damage.

STP-iX455/iXL455 Series Instruction Manual

INTRODUCTION

Thank you very much for purchasing Edwards’ turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and maintenance of the following series of the STP-iX455/iXL455 turbomolecular pump:

Model Name Specification

STP- iX455

STP- iX455C

STP- iXL455

STP- iXL455C

In this manual, the above STP-iX455/iXL455 pump series is collectively referred to as the "STP pump".

Compact type, Integrated control unit, High-vacuum type Compact type, Integrated control unit, Corrosion resistant type*1 Compact type, Integrated control unit, Low-vibration type, High-vacuum type Compact type, Integrated control unit, Low-vibration type, High-vacuum type, Corrosion resistant type*1

: Corrosion resistant type: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)

STP-iX455/iXL455 Series Instruction Manual

APPLIED STANDARDS

The STP pump conforms to the following directives and standards:

◇ Applied Directives

EC Machinery directive EC Low voltage directive EC Electromagnetic compatibility directive

◇ Applied Standards

EN1012-2 EN61010-1 EN61326 (class A) EN55011 (class A) UL61010-1 (Electrical Equipment for Measurement, Control, and Laboratory Use)

◇ Electromagnetic compatibility

This product is a class A product according to EN61326, and a group 1, class A

product according to EN 55011. This means that this product does not generate and/or use intentionally radio-frequency energy, in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment of material or inspection / analysis purpose and that it is suitable for use in all establishments other than domestic and those directly connected to a low voltage power supply network which supplies buildings used for domestic purposes.

This product may have potential difficulties in ensuring electromagnetic compatibility in

other than industrial environments, due to conducted as well as radiated disturbances.

This product must not be used in residential areas because it may cause interference if

used in residential areas.

PRECAUTIONS

1) No part of this manual may be reproduced in any form by any means without prior written permission from Edwards.

2) Edwards pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice. Understand that the product you purchased and its contents including specifications described in this manual may differ.

REQUEST

If you find inaccuracies or errors in this manual, advise distributor or the nearest Service office.

STP-iX455/iXL455 Series Instruction Manual

LIMITED WARRANTY

This WARRANTY applies to the customer to whom Edwards has delivered this product.

1. WARRANTY PERIOD:

Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards.

2. ITEM WARRANTED:

1) This warranty applies only to the product delivered from Edwards to the customer.

2) If any defect is found during this period, Edwards will, at its option, repair or

recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at your own charge.

3. DISCLAIMER:

Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period:

1) Handling, operation or maintenance other than that specified herein;

2) Failure to follow any of the warnings or cautions enumerated under

or ;

3) Installation, operation or maintenance using parts which are not specified by Edwards;

4) Maintenance personnel other than those authorized by Edwards or Service office have disassembled, reconditioned, or tampered the product;

5) Defect resulting from the not-specified use of the product.

6) When the product is used under special conditions without obtaining the written consent of Edwards (Particular gases, strong magnetic field and the radiation are added to the product.);

7) Defect resulting from deposit;

8) Water cooling system defect resulting from water quality used;

9) Defect resulting from the installation of the product (Exclude the installation by authorized personnel.)

10) Deterioration in the external because of use (Discoloration, scratches and so forth)

11) Product damage occurred during transport or other factors not attributable to Edwards;

12) Product breakage or damage due to natural disasters, fire or other external factors;

13) Deterioration in the basic performance due to the use of the product beyond limits of the use;

14) Any direct, incidental or consequential damage resulting from the use of the product;

15) When continuously operated without overhaul after the WARNING indication from the STP pump;

16) Overhaul and replacement of maintenance parts;

STP-iX455/iXL455 Series Instruction Manual

4. SPARE PARTS: ● Touch down bearing (When exchanging the touch down bearing, contact Service office)

● Air-cooling unit (optional accessory)

STP-iX455/iXL455 Series Instruction Manual

SAFETY PRECAUTION

INTRODUCTION

PRECAUTIONS

REQUEST

LIMITED WARRANTY

1 Precautions for Safe Operation of the STP Pump ............................................. 1-1

1.1 Usable Gases ...................................................................................................................... 1-1

1.2 Maintenance and Inspection Precautions ........................................................................... 1-1

1.3 Labels .................................................................................................................................. 1-2

2 Operation Principle of the STP Pump ................................................................ 2-1

3 Unpacking ......................................................................................................... 3-1

3.1 Unpacking the STP Pump ................................................................................................... 3-1

3.2 Accessories ......................................................................................................................... 3-1

4 Installation of the STP Pump ............................................................................. 4-1

4.1 Name and Function of Each Part ........................................................................................ 4-1

4.1.1 Name and Function of the Pump ........................................................................... 4-1

4.1.2 Name and Function of the Control Unit .................................................................. 4-3

4.2 Precautions Before Installation ........................................................................................... 4-6

4.2.1 Operating Environment .......................................................................................... 4-6

4.2.2 Installation Area ..................................................................................................... 4-8

4.2.3 Bench ..................................................................................................................... 4-8

4.3 How to Install the STP Pump .............................................................................................. 4-9

4.3.1 Cleaning the Seal ................................................................................................. 4-10

4.3.2 STP Pump Installation Positions .......................................................................... 4-11

4.3.3 How to Secure the STP Pump ............................................................................. 4-12

4.3.4 Legs for Securing the Base .................................................................................. 4-16

4.3.5 Vacuum Piping ..................................................................................................... 4-17

4.3.6 Connecting the Purge Port (For the corrosion resistant pump) ........................... 4-19

4.3.7 Connecting the Vent Valve .................................................................................. 4-20

4.4 External Power Supply Unit .............................................................................................. 4-22

4.5 Connecting the DC Power Cable ...................................................................................... 4-22

4.6 Connecting to Vacuum Equipment ................................................................................... 4-24

4.6.1 Connecting to Power ............................................................................................ 4-24

4.6.2 Emergency Off Circuit (EMO Circuit) ................................................................... 4-24

5 Baking, Cooling the STP Pump and Gas Pumping ........................................... 5-1

5.1 Baking the STP Pump ......................................................................................................... 5-1

5.1.1 Attaching a Baking Heater ..................................................................................... 5-1

5.2 Cooling the STP Pump ........................................................................................................ 5-2

5.3 Air-cooling Unit U0-64 ......................................................................................................... 5-4

5.3.1 Parts List ................................................................................................................ 5-4

5.3.2 Installation Procedure ............................................................................................ 5-4

5.3.3 Maintenance ........................................................................................................... 5-4

5.4 Air-cooling Unit U1-64 ......................................................................................................... 5-5

5.4.1 Parts List ................................................................................................................ 5-5

5.4.2 Installation Procedure ............................................................................................ 5-5

5.4.3 Maintenance ........................................................................................................... 5-5

5.5 Gas Pumping ...................................................................................................................... 5-6

STP-iX455/iXL455 Series Instruction Manual

5.5.1 How to Introduce a Purge Gas (For corrosion resistant pump) ............................. 5-6

6 How to Start/Stop the STP Pump ...................................................................... 6-1

6.1 Before Starting .................................................................................................................... 6-1

6.2 Start Procedures ................................................................................................................. 6-1

6.3 Stop Procedures ................................................................................................................. 6-2

6.4 Powering ON ....................................................................................................................... 6-2

6.5 Pump Operation .................................................................................................................. 6-2

6.5.1 Input Operation Port Setting .................................................................................. 6-2

6.5.2 Starting/Stopping the STP Pump ........................................................................... 6-3

6.5.3 Starting the STP Pump after Stopping ................................................................... 6-4

6.5.4 Starting the STP Pump after a Safety Function Operates ..................................... 6-4

6.6 Powering OFF ..................................................................................................................... 6-4

6.7 LED ..................................................................................................................................... 6-5

7 Remote Input/Output Signal Connector............................................................. 7-1

7.1 Input Signal Pins ................................................................................................................. 7-2

7.1.1 Input Operation Port Setting .................................................................................. 7-5

7.1.2 Rotation INHIBIT Signal ......................................................................................... 7-5

7.2 Output Signal Pins .............................................................................................................. 7-6

8 Vent Valve Output, Air-cooling Unit Output, and General-purpose Output ........ 8-1

8.1 Vent Valve Output ............................................................................................................... 8-1

8.2 Air-cooling Unit Output, and General-purpose Output ........................................................ 8-2

8.2.1 Connector X7 ......................................................................................................... 8-2

8.2.2 Using as a General-purpose Power Supply ........................................................... 8-2

9 Serial Communication Protocol ......................................................................... 9-1

9.1 Serial Communication ......................................................................................................... 9-1

9.2 Connection and Setting Up ................................................................................................. 9-2

9.2.1 Serial Port .............................................................................................................. 9-2

9.2.2 Connecting the RS485 ........................................................................................... 9-3

9.2.3 Communication Parameter Setting ........................................................................ 9-4

9.2.4 Input Operation Port Setting .................................................................................. 9-4

9.2.5 Serial Communication Timeout Setting .................................................................. 9-5

9.2.6 Recommended items about communication cable installation .............................. 9-6

9.3 Protocol Specifications ........................................................................................................ 9-9

9.3.1 General Description ............................................................................................... 9-9

9.3.2 Standard Transmission Frame (in the RS232/RS485 Single Point Connection)... 9-9

9.3.3 Control Command (in the RS232/RS485 Single Point Connection) .................... 9-10

9.3.4 Query Command (in the RS232/RS485 Single Point Connection) ...................... 9-11

9.3.5 Transmission Data Format ................................................................................... 9-12

9.3.6 Frame Control (Checksum) .................................................................................. 9-12

9.3.7 Error Control ......................................................................................................... 9-13

9.3.8 Transmission Frame in the RS485 Multi-point Connection ................................. 9-13

9.3.9 Control Command in the RS485 Multi-point Connection ..................................... 9-14

9.3.10 Query Command in the RS485 Multi-point Connection ....................................... 9-15

9.3.11 Broadcasting Command in the RS485 Multi-point Connection............................ 9-16

9.3.12 Application note .................................................................................................... 9-17

9.4 Command Specifications .................................................................................................. 9-21

9.4.1 Command List ...................................................................................................... 9-21

9.4.2 ReadMeas ............................................................................................................ 9-22

9.4.3 Command ............................................................................................................. 9-23

9.4.4 ReadFailMess ...................................................................................................... 9-24

9.4.5 ReadModFonct ..................................................................................................... 9-26

9.4.6 ReadVersion ........................................................................................................ 9-28

9.4.7 ReadCounters ...................................................................................................... 9-29

9.4.8 ReadMotorTemp .................................................................................................. 9-30

9.4.9 ReadEvents .......................................................................................................... 9-31

9.4.10 SetSpeedSetPoint ................................................................................................ 9-32

STP-iX455/iXL455 Series Instruction Manual

9.4.11 ReadSpeedSetPoint ............................................................................................. 9-33

9.4.12 ReadModFonctWithWarning ................................................................................ 9-34

9.4.13 ReadMeasValue ................................................................................................... 9-36

9.4.14 ReadOptionFunc .................................................................................................. 9-38

9.4.15 SetOptionFunc ..................................................................................................... 9-41

9.4.16 ReadCondition ..................................................................................................... 9-43

9.4.17 ReadEventsWithTime .......................................................................................... 9-45

10 STP-Link and Display Unit .............................................................................. 10-1

10.1 STP-Link............................................................................................................................ 10-1

10.2 Display Unit ....................................................................................................................... 10-2

11 Safety Functions .............................................................................................. 11-1

11.1 Power Failure .................................................................................................................... 11-1

11.1.1 Operation at a Power Failure ............................................................................... 11-1

11.1.2 Operation after a Power Recovery ....................................................................... 11-2

11.2 Abnormal State of Magnetic Bearing (Disturbance) ......................................................... 11-2

11.3 Excessive Vibration (Disturbance) .................................................................................... 11-2

11.4 Motor Driver Overload (DRV Overload) ............................................................................ 11-2

11.5 Overheating inside the STP Pump (MOTOR Overheat) ................................................... 11-3

11.6 Overheating inside the Control Unit (CNT Overheat) ....................................................... 11-3

11.7 Overspeed ......................................................................................................................... 11-3

12 WARNING Function ........................................................................................ 12-1

12.1 WARNING Function .......................................................................................................... 12-1

12.2 Contents of WARNING Function ...................................................................................... 12-2

12.2.1 Damage Limit ....................................................................................................... 12-2

12.2.2 Pump Run Time Over .......................................................................................... 12-2

12.2.3 Imbalance ............................................................................................................. 12-2

12.3 WARNING Function Setting .............................................................................................. 12-3

13 Troubleshooting, Maintenance, and Inspection ............................................... 13-1

13.1 Troubleshooting Immediately after Failure Occurs ........................................................... 13-1

13.1.1 After Power Failure .............................................................................................. 13-1

13.1.2 After Other Abnormality/Error .............................................................................. 13-1

13.2 Troubleshooting ................................................................................................................ 13-2

13.2.1 Indication of "FAILURE" LED ............................................................................... 13-2

13.2.2 No Indication of the "FAILURE" LED ................................................................... 13-6

13.3 Maintenance and Inspection ............................................................................................. 13-7

13.3.1 Cleaning and Decontamination ............................................................................ 13-8

13.3.2 Inspecting the Deposit.......................................................................................... 13-8

13.4 Maintenance ...................................................................................................................... 13-9

13.4.1 Recommended overhaul intervals ....................................................................... 13-9

13.4.2 Standard replacement parts ................................................................................. 13-9

13.4.3 Recommended maintenance intervals for main parts ....................................... 13-10

13.4.4 Transport for Repair or Overhaul ....................................................................... 13-11

14 Storage and Disposal ...................................................................................... 14-1

14.1 Storage of the STP Pump ................................................................................................. 14-1

14.2 Disposal............................................................................................................................. 14-1

15 Specifications and Accessories ....................................................................... 15-1

15.1 Specifications for the STP Pump ...................................................................................... 15-1

15.2 Accessories ....................................................................................................................... 15-3

15.3 Maintenance Parts ............................................................................................................ 15-3

STP-iX455/iXL455 Series Instruction Manual

TABLES

Table 3.1 Accessories ..................................................................................................................... 3-1

Table 3.2 Accessories for Corrosion Resistant Pump .................................................................... 3-1

Table 4.1 Operating Environment ................................................................................................... 4-7

Table 4.2 Tightening Torque of Bolt ............................................................................................. 4-12

Table 4.3 Destructive Torque and Recommended Securing Bolt for Inlet Port Flange ............... 4-13

Table 4.4 Number of Claw Clamps by Size of Flange .................................................................. 4-14

Table 4.5 Suitable Parts for DC Power Cable .............................................................................. 4-22

Table 4.6 Pin Assignment for Connector X1................................................................................. 4-23

Table 6.1 Starting/Stopping the STP Pump (X2 REMOTE) ........................................................... 6-3

Table 6.2 Reset Operation (X2 REMOTE) ..................................................................................... 6-4

Table 6.3 LED Lamp Indications for Each State ............................................................................. 6-5

Table 7.1 X2 REMOTE Input Signal Pins (1/2) .............................................................................. 7-2

Table 7.2 Input Operation Port Setting ........................................................................................... 7-5

Table 7.3 Rotation INHIBIT Signal Input ......................................................................................... 7-5

Table 7.4 X2 REMOTE Output Signal Pins .................................................................................... 7-6

Table 7.5 Rated Contacts for Relays CR1 to CR7 ......................................................................... 7-7

Table 8.1 Vent Valve Operation Setting ......................................................................................... 8-1

Table 8.2 Pin Assignment for Connector X7................................................................................... 8-2

Table 8.3 Suitable Parts for Connector X7 ..................................................................................... 8-2

Table 9.1 Pin Assignment for Connector X3................................................................................... 9-2

Table 9.2 Communication Parameters ........................................................................................... 9-4

Table 9.3 Remote Operation Mode ................................................................................................ 9-4

Table 9.4 Serial Communication Time Out Setting ........................................................................ 9-5

Table 9.5 Transmission Control Characters ................................................................................... 9-9

Table 9.6 Pump Operation Commands ........................................................................................ 9-16

Table 9.7 Command List ............................................................................................................... 9-21

Table 9.8 Pump Operation Commands ........................................................................................ 9-23

Table 9.9 Error Values .................................................................................................................. 9-25

Table 9.10 Pump Operation Mode .................................................................................................. 9-27

Table 9.11 Warning Value Bit Assign ............................................................................................. 9-35

Table 9.12 Parameter Setting Value ............................................................................................... 9-39

Table 10.1 Functions of STP-Link .................................................................................................. 10-1

Table 11.1 States of Lamps and X2 REMOTE Output Signals at Power Failure ........................... 11-1

Table 12.1 WARNING Function ...................................................................................................... 12-1

Table 12.2 Default Setting of WARNING Function ......................................................................... 12-3

Table 13.1 Priority of Failure Signal ................................................................................................. 13-2

Table 13.2 Error List ........................................................................................................................ 13-3

Table 13.3 Troubleshooting with No Indication of the "FAILURE" LED .......................................... 13-6

Table 13.4 Cleaning and Decontamination ...................................................................................... 13-8

Table 13.5 Recommended Overhaul Period .................................................................................. 13-9

Table 15.1 Specifications for the STP Pump (1/2) ......................................................................... 15-1

Table 15.2 Accessories ................................................................................................................... 15-3

Table 15.3 Optional Accessories .................................................................................................... 15-3

Table 15.4 Maintenance Parts ........................................................................................................ 15-3

STP-iX455/iXL455 Series Instruction Manual

FIGURES

Figure 2.1 Cross Sectional View of the STP Pump ......................................................................... 2-2

Figure 4.1 Configuration of the STP Pump ...................................................................................... 4-2

Figure 4.2 Control Unit (Front panel) ............................................................................................... 4-3

Figure 4.3 Control Unit (Rear panel) ................................................................................................ 4-5

Figure 4.4 Installation of the STP Pump to the Vacuum Equipment ............................................... 4-9

Figure 4.5 STP Pump Installation Positions................................................................................... 4-11

Figure 4.6 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump ....... 4-11

Figure 4.7 Example of Securing the STP Pump (When securing the inlet port with bolts) ........... 4-13

Figure 4.8 Example of Securing the STP Pump

(When securing the inlet port flange with claw clamps)................................................ 4-14

Figure 4.9 Example of Securing the STP Pump

(When installing the damper in the inlet port flange) .................................................... 4-15

Figure 4.10 Recommended Leg for Securing Base ......................................................................... 4-16

Figure 4.11 Position of the Screw Holes for Legs ............................................................................ 4-16

Figure 4.12 Connecting the Purge Port ........................................................................................... 4-19

Figure 4.13 Vent valve connection ................................................................................................... 4-20

Figure 4.14 Example of a control method when introducing the atmosphere (in dashed line) ........ 4-20

Figure 4.15 DC Power Cable ........................................................................................................... 4-22

Figure 5.1 Attaching Positions of the Baking Heater and Air-cooling Unit ....................................... 5-2

Figure 5.2 Air-cooling Unit U0-64 ..................................................................................................... 5-3

Figure 5.3 Air-cooling Unit U1-64 ..................................................................................................... 5-3

Figure 5.4 Installation Procedure for Air-cooling Unit U0-64 ........................................................... 5-4

Figure 5.5 Installation Procedure for Air-cooling Unit U1-64 ........................................................... 5-5

Figure 6.1 Pump Operation (Method 1) ........................................................................................... 6-3

Figure 6.2 Pump Operation (Method 2) ........................................................................................... 6-3

Figure 6.3 "ROTATION" LED Indication .......................................................................................... 6-5

Figure 7.1 X2 REMOTE Pin Arrangement ....................................................................................... 7-1

Figure 7.2 X2 REMOTE Input Signal Pins ....................................................................................... 7-4

Figure 7.3 X2 REMOTE Output Signal Pins .................................................................................... 7-7

Figure 9.1 Serial Port ....................................................................................................................... 9-1

Figure 9.2 RS485 Connections ........................................................................................................ 9-3

Figure 9.3 Grounding example (Both ends grounding) .................................................................... 9-6

Figure 9.4 Grounding example (single point grounding) .................................................................. 9-6

Figure 9.5 Example of ring ferrite core installation .......................................................................... 9-7

Figure 9.6 Example of cable installation in metallic duct ................................................................. 9-7

Figure 9.7 Example of differential signal waveform ......................................................................... 9-8

Figure 9.8 Block diagram of communication process example ..................................................... 9-17

Figure 9.9 Example of answer resending process ......................................................................... 9-18

Figure 9.10 Example of response when the command is sent continuously ................................... 9-18

Figure 9.11 Example of command sending during answer data reply ............................................ 9-18

Figure 9.12 Example of communication cycle process ................................................................... 9-19

Figure 9.13 Example of command sending process ....................................................................... 9-20

Figure 9.14 Example of answer receiving process .......................................................................... 9-20

Figure 10.1 Display Unit iDT-001 ..................................................................................................... 10-2

Figure 12.1 WARNING Output ......................................................................................................... 12-1

Figure 13.1 Failure Output ............................................................................................................... 13-2

Figure 15.1 External Appearance of the STP Pump (STP-iX455 series) ........................................ 15-4

Figure 15.2 External Appearance of the STP Pump (STP-iXL455 series) ...................................... 15-5

Figure 15.3 Label Affixing Positions for the STP Pump ................................................................... 15-6

STP-iX455/iXL455 Series Instruction Manual

CAUTION

1 Precautions for Safe Operation of the STP Pump

1.1 Usable Gases

Chlorine or fluorine system gases can be used in the only corrosion resistant pumps (type C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Edwards.

◇ To prevent an accident, confirm the characteristics of gases to be used, referring

to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. And, keep MSDS and a safety advice of gas supplier.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the STP

pump without anti-corrosion treatment.

◇ Introduce a dry N2 gas (purge gas) to protect the inside of the STP pump when

using reactive or corrosive gas. The use of reactive or corrosive gas may result in product damage.

◇ DO NOT use any pyrophoric gas. ◇ Cool the STP pump to prevent the STP pump from overheating when pumping

gases.

1.2 Maintenance and Inspection Precautions

Installation

Perform any maintenance or inspection of the STP pump, following Section 13, "Troubleshooting, Maintenance, and Inspection".

◇ Always turn OFF the primary power, then turn OFF the primary power supply and

isolate the electrical energy source (Lockout/Tagout) on the vacuum equipment before performing any maintenance or inspection.

◇ NEVER touch any portions other than those designated when performing

maintenance. Careless touch may cause electric shock and/or a short-circuiting of the internal circuit, resulting in product damage or a problem.

1-1

STP-iX455/iXL455 Series Instruction Manual

1.3 Labels

Installation

The following labels are affixed to the STP pump. Read the contents of the labels before operation. For the positions of the labels, see Figure 15.3, "Label Affixing Position for the STP Pump".

1) STP Pump Installation Warning Label

This label describes installation of the STP pump. Install the STP pump according to the precautions of Section 4, "Installation of the STP Pump".

2) Rotational Direction Instruction Label

This label describes the rotational direction of the STP pump. The STP pump rotates in this direction.

3) Hot Surface Warning Label

This label instructs operators so as not to touch the hot surface of the STP pump. The control unit will become high temperature while the STP pump is in operation. The use of the baking heater (optional accessory) may lead to a considerable rise in temperatures outside the STP pump. This label warns operators so as not to burn hands.

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STP-iX455/iXL455 Series Instruction Manual

2 Operation Principle of the STP Pump

The STP-iX455/iXL455 series pump is a series of a magnetically-levitated turbomolecular pumps, featuring the following:

Oil free Compact size (Integrated control unit) Low vibration High reliability

Figure 2.1 shows the cross sectional view of the STP pump. The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction. The rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP pump requires no lubrication oil, unlike conventional turbomolecular pumps using ball bearings.

The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the radial direction by 4 pairs of active magnetic bearings that consist of radial electromagnet (3). A pair of axial electromagnets (4) supports the rotor in the axial direction.

Because the rotor is entirely magnetically supported, it rotates with low vibration. Moreover, STP-iXL455 series, with which the structure of low vibration and low noise (6) and (7) are equipped, suppresses vibration and noise more than STP-iX455 series. There is less heat generated from magnetic bearings because there is no friction. Therefore the STP pump requires no cooling. However, the STP pump does require water-cooling or air-cooling during baking and gas pumping.

Taking into consideration an unexpected failure of the magnetic bearings, touch-down bearings (5) coated with solid lubrication have been installed. They do not contact the rotor during normal operation. The status of the rotor and magnetic bearing is continuously monitored via circuits detecting rotor displacement, rotational speed and pump temperature. If an abnormality/error occurs, the rotor will stop.

Installation

2-1

STP-iX455/iXL455 Series Instruction Manual

Touch down

bearing

Installation

(5)

a) STP-iX455 Series

(1) Rotor blade (2) Stator blade

(3) Radial electromagnet

(4) Axial electromagnet

b) STP-iXL455 Series

(6) Structure for reduce vibration level

(7) Structure for electrical isolation

Figure 2.1 Cross Sectional View of the STP Pump

2-2

3 Unpacking

Item

Q’ty

Remarks

Instruction Manual

This manual

Inlet port cover

1 Outlet port cover

Connector for "X2 REMOTE"

1 D-

sub25 pin

Item

Q’ty

Remarks

Blank flange for purge port

KF*110 Clamping ring for purge port

KF*110 O-ring washer for purge port

KF*110

3.1 Unpacking the STP Pump

Check the following before unpacking the STP pump.

Check the package for bruises, breakage, wetness, and other.

If there is any abnormality/error or it is judged necessary to return the product, contact Edwards or the distributor.

Check the contents of the package.

See Section 3.2, "Accessories".

◇ Be careful not to scratch the flange of the STP pump.

Before installing the STP pump, check whether or not there are scratches on the surface.

◇ It is recommended to keep the packaging materials, such as the corrugated

fiberboard container and cushioning material for possible reuse.

3.2 Accessories

STP-iX455/iXL455 Series Instruction Manual

Installation

Table 3.1 Accessories

Model: NJC–207–PF

Connector for "X1 DC POWER" 1

Table 3.2 Accessories for Corrosion Resistant Pump

The accessories listed below are supplied to the corrosion resistant pump (type C or other models) in addition to the accessories in Table 3.1.

(Nanaboshi Electric Mfg.Co,Ltd.)

Cable bushing Model: NJC–20–CB

(Nanaboshi Electric Mfg.Co,Ltd.)

: ISO2861–1 (JIS–B–8365）

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STP-iX455/iXL455 Series Instruction Manual

Installation

This page intentionally blank.

STP-iX455/iXL455 Series Instruction Manual

4 Installation of the STP Pump

4.1 Name and Function of Each Part

4.1.1 Name and Function of the Pump

(1) Inlet Port Flange (ICF1, VG*2, ISO*3)

● Connected to the vacuum equipment (at the high vacuum side).

(2) Outlet Port Flange (KF*425)

● Connected to the inlet port side of the backing-pump.

(3) Purge Port (KF*410)

● Port for purge gas introduction, and for vent valve attachment. This port is only attached on the corrosion resistant pump (type C or other models) or on pumps designed for use with a vent valve.

● Introduces a purge gas in order to protect the inside of the STP pump when pumping reactive or corrosive gases.

● The vent valve when installed reduces the stopping time of the STP pump.

● The STP pump is delivered with a blank flange attached to this port.

(4) Control Unit

Installation

● Contains the electronics that control the pump. Refer to Section 4.1.2, "Name and Function of the Control Unit" for details.

: ISO3669 or JVIS–003

: JIS–B–2290

: ISO1609

: ISO2861–1 (JIS–B–8365)

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STP-iX455/iXL455 Series Instruction Manual

(1) Inlet Port Flange

Installation

POWER

X6 VENT VALVE

X1 DC POWER

1 2

6 7

ROTATION

FAILURE

X5 ST P-Link

X3 COM1

X2 RE MOTE

(2) Outlet Port Flange

(4) Control Unit

(3) Purge Port

Figure 4.1 Configuration of the STP Pump

4-2

STP-iX455/iXL455 Series Instruction Manual

1 2 3 5 6 7

P O W E R

X 1 D C P O W E R

4.1.2 Name and Function of the Control Unit

Figure 4.2 shows the front panel and Figure 4.3 shows the rear panel of the control unit.

(1)

R O T A T I O N

F A I L U R E

(2)

X 6 V E N T V A L V E

X 5 S T P - L i n k

X 4

X 3 C O M 1

(3)

X 2 R E M O T E

(10)

(4)

(5)

(6)

(7)

(8)

(9)

Installation

Figure 4.2 Control Unit (Front panel)

(1) "VENT VALVE" connector (X6)

● For the vent valve (optional accessory) attached in the purge port.

● Refer to Section 4.3.7, "Connecting the Vent Valve" or Section 8.1, "Vent Valve

Output" for details of the connector X6.

(2) "OPTION PORT" connector (X4: COM4) with cover

● For the network unit (optional accessory).

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STP-iX455/iXL455 Series Instruction Manual

(3) "DC POWER" connector (X1)

Installation

● For power input: 48V DC.

● Includes power supply unit iPS-240 (optional accessory) communication signal.

● Refer to Section 4.5, "Connecting the DC Power Cable".

(4) "POWER" LED (green LED)

● Illuminates when 48V DC is input to the connector X1 (Power ON state). Refer to Section 6.7, "LED".

(5) "ROTATION" LED (green/orange LED)

● The rotational speed is indicated by the flashing pattern of the LED (acceleration state: green, deceleration state: orange). Refer to Section 6.7, "LED".

(6) "FAILURE" LED (red/orange LED)

● A failure of the STP pump is indicated by the flashing pattern of the red LED. The flashing pattern indicates the failure type. Refer to Section 11, "Safety Functions" and Section 13, "Troubleshooting, Maintenance, and Inspection".

● A warning of the STP pump is indicated by flashing of the orange LED. The flashing pattern indicates the warning type. Refer to Section 12, "WARNING Function".

(7) "STP-Link" connector (X5: COM2)

● For the communication cable of the STP-Link (optional accessory) or the display unit iDT-001 (optional accessory). These optional accessories can operate the STP pump, confirm the operation state, or change various settings.

(8) "COM1" connector (X3: Dsub9 pin)

● For RS232 and RS485 (common use) serial communication.

● For the user application.

See Section 9, "Serial Communication Protocol".

(9) "REMOTE" connector (X2: Dsub25 pin)

● For remote input/output signal in the parallel mode setting. See Section 6.5, "Pump Operation", Section 7, "Remote Input/Output Signal Connector".

(10) "Radiating fin"

● For dissipating heat caused by the control unit.

◇ The operation of the STP pump may lead to a considerable rise in temperatures

outside of the control unit. NEVER touch the radiating fin while the STP pump is in operation. Operators can burn hands.

4-4

STP-iX455/iXL455 Series Instruction Manual

(11)

Installation

(11) "FAN" connecter (X7)

● Power supply for the air-cooling unit (optional accessory). See Section 8.2, "Air-cooling Unit Output, and General-purpose Output" for details of the connector X7.

Figure 4.3 Control Unit (Rear panel)

4-5

STP-iX455/iXL455 Series Instruction Manual

4.2 Precautions Before Installation

Installation

4.2.1 Operating Environment

◇ Check the properties of the gas to be used, referring to the Material Safety Data

Sheet (MSDS) you obtain from the gas supplier. And, keep MSDS and a safety advice of gas supplier. Take measures according to MSDS to prevent an accident when using toxic, reactive or combustible gas. Dilute the gas to be used with the inert gas controlled if necessary. And, take measures according to MSDS to prevent an accident caused by exhaust gas.

◇ Chlorine or fluorine system gases can be used only in corrosion resistant pumps

(type C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, contact Edwards.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

models without anti-corrosion treatment.

◇ If the STP pump is used in an area with radiation, contact Edwards.

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STP-iX455/iXL455 Series Instruction Manual

Ambient Temperature

0 to 40 °C

Ambient Relative Humidity

30 to 95 % (no dew condensing)

Environment

Install the STP pump securely so that foreign materials will not

easily fall into the STP pump (Ex.: Si wafers or samples are

positioned above the STP pump) (To prevent foreign materials

ng into the STP pump, design a shield plate with large

Install the STP pump in a place meeting the following requirements:

Table 4.1 Operating Environment

STP Pump Installation Equipment Conditions

● A place free of externally-applied mechanical shock

● A place free of a heat source (Keep clear of the heat source or

attach a thermal shield plate)

● A place free of a strong magnetic field (Range: up to 15 mT (150 G) in the axial direction, and up to 3 mT (30 G) in the radial direction with respect to the rotational axis of the STP pump)

● A place free of a strong electric field

● A place free of a source of electric noise

● A place free of radiation

● No discharge of high voltage (more than 500 V) (If more

than 500 V is discharged, contact Edwards)

● A place free of exposure to direct sunlight

● A place free of high humidity

● A place free of dust

● A place free of salty air

● A place free of dripping water

● A place free of explosive or flammable gas

● A place free of corrosive gas

● A place free of excessive vibration

Installation

from falli conductance)

4-7

STP-iX455/iXL455 Series Instruction Manual

4.2.2 Installation Area

Installation

Leave enough space for the following in addition to that for the STP pump:

● Space for maintenance and inspection

● Space for connecting cables

● Space for the radiating fin of the control unit

◇ The minimum bending radius of the iPS-240 connection cable (optional

accessory) is 50 mm.*1 DO NOT excessively bend the cables and beware of any obstacles when installing the STP pump. In addition, leave enough space to install other cables without bending them excessively.

4.2.3 Bench

A bench must be prepared by the customer to secure the STP pump. The shape and size of the bench differ depending upon the vacuum equipment. Follow the precautions of the WARNING or NOTICE.

◇ The STP pump is provided with a high-speed rotor. Any internal abnormality/error

may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. Design and secure the bench for the STP pump so that it can withstand the maximum torque generated due to the occurrence of an abnormality/error. Refer to Section 4.3.3, "How to Secure the STP Pump" for abnormal torque.

◇ Secure the customer-prepared bench and the vacuum equipment on the floor or

peripheral equipment and other equipment in accordance with the customer application. NEVER move them while the STP pump is in operation.

◇ Confirm the dimensions by the external appearance of the STP pump when

designing the bench. The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. When the external appearance of the STP pump is not in the manual, contact Edwards.

: Confirm the minimum bending radius of a cable when preparing it by the customer.

4-8

STP-iX455/iXL455 Series Instruction Manual

4.3 How to Install the STP Pump

◇ An appropriate enclosure or a barrier which cannot be removed without using a

tool should be provided to prevent an operator from accessing the connection cables between the STP pump and its connectors provided.

◇ Use a lifter or the like when installing the STP pump to the vacuum equipment.

Failure to do so might hurt your back or cause injuries due to occurrence of an accident such as fall. When lifting by hands for unavoidable reason, two or more people must always conduct it.

Install the STP pump to the vacuum equipment as shown in Figure 4.4.

This STP pump can be installed through the damper (optional accessory)

Power supply unit

(optional accessory)

power supply unit

To power supply

AC power cable

To vacuum equipment

control circuit

External

48V DC

DC power cable

Remote operation cable

X6V ENTV ALVE

X4 X3 COM1

X1D C POWER

POWER

ROTATION

FAILURE

X5ST P-Link

X2 REMOTE

X2R EMOTE

1 2

6 7

Vacuum

equipment

Inlet port

Installation

Inlet port flange

Outlet port flange

Vacuum

valve

Backing

-pump

Dry pump, and other

Figure 4.4 Installation of the STP Pump to the Vacuum Equipment

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STP-iX455/iXL455 Series Instruction Manual

4.3.1 Cleaning the Seal

Installation

Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing the STP pump to the vacuum equipment. Take the following measures for cleaning the seals:

● Clean off with a pure gas.

● Wipe with proper solvent (such as alcohol).

◇ A splinter shield is attached to the inlet port flange to prevent foreign materials

from falling into the STP pump. Always leave the splinter shield attached during operation.

◇ The wipes used for clean the flange of the pump might become hazardous waste

depending upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the regulations of each national and/or local government.

◇ The splinter shield cannot perfectly prevent foreign materials from falling into the

STP pump. DO NOT install the STP pump in such a manner that foreign materials can easily fall into it (for example, Si wafers or samples are positioned above the STP pump). If installing the STP pump in such a manner, always attach a shield plate with sufficient conductance above the STP pump to prevent foreign materials from falling into it. Foreign materials falling into the STP pump through the splinter shield may result in product damage.

◇ Be careful not to scratch the flange of the STP pump.

Check whether or not there are scratches on the surface, before installing the STP pump.

4-10

+ 117 hidden pages

Edwards STP-iX455, STP-iX455C, STP-iXL455, STP-iXL455C Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

TABLE OF CONTENTS

1 Precautions for Safe Operation of the STP Pump

1.1 Usable Gases

1.2 Maintenance and Inspection Precautions

1.3 Labels

2 Operation Principle of the STP Pump

3 Unpacking

3.1 Unpacking the STP Pump

3.2 Accessories

4 Installation of the STP Pump

4.1 Name and Function of Each Part

4.1.1 Name and Function of the Pump

4.1.2 Name and Function of the Control Unit

4.2 Precautions Before Installation

4.2.1 Operating Environment

4.2.2 Installation Area

4.2.3 Bench

4.3 How to Install the STP Pump

4.3.1 Cleaning the Seal