Edwards STP-iXA3306C, STP-iXA3306B, STP-iXA3306CV, STP-iXA3306BV User Manual

MT-82E-001-H

STP Series Turbomolecular Pumps

STP-iXA3306 Series

Instruction Manual

Read through the Safety Precautions and each section of this Manual carefully before using the STP pump.

Keep this Manual in a place where you can quickly access it at any time.

Manufacture:

Yuji Kato, TMP Technical Senior Manager

Edwards Japan

Limited

5th

June

. 2016,

Yachiyo

Date and Place

EU representative:

Ian Stones

Vice President, Technology

, Edwards

6th

June

. 2016, Burgess Hill

Date and Place

Declaration of Conformity

We, Manufacture: Edwards Japan Limited 1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan EU Representative: Edwards Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Product Name: Turbomolecular pump Model Number: STP-iXA3306 series Accessories Covered: Display Unit: iDT-001, TMS Unit, Communication Interface (LonWorks, Profibus, Device Net, EtherCAT)

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use. General Requirements EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use. EMC requirements. General requirements (Immunity: Industrial locations, Emission: Class A) EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards. Immunity for industrial environments EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency disturbance characteristics (Group1, Class A) EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substances

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive 2014/35/EU Low Voltage Directive 2014/30/EU Electromagnetic Compatibility (EMC) Directive 2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

This product has been manufactured under a quality management system certified to ISO 9001:2008

VI-DOC-82-004

MT-82E-001-H

Page i

PAGE

STP-iXA3306 Series Turbomolecular Pump

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 2

1.3.1 Warranty period 2

1.3.2 Item warranted 3

1.3.3 Disclaimer 3

1.3.4 Spare parts 4

1.4 Precautions for safe operation of the STP pump 5

1.4.1 Usable gases 5

1.5 Maintenance and inspection precautions 6

1.6 Labels 6

1.7 Operation principle of the STP pump 8

1.8 STP pump specification 10 2 TECHNICAL DATA 13

2.1 STP pump specifications 13

2.2 Maximum gas flow-rate 14

2.2.1 STP-iXA3306C/CV 14

2.2.2 STP-iXA3306B/BV 15

2.3 Water cooling use condition 16

2.4 Control unit 17

2.5 External appearance of the STP pump 19

2.6 Label affixing positions 20 3 INSTALLATION OF THE STP PUMP 21

3.1 Precautions before installation 21

3.1.1 Operating environment 21

3.1.2 Installation area 23

3.1.3 Bench 24

3.1.4 Insulation test 24

3.2 Unpacking 25

3.2.1 Unpacking the STP pump 25

3.3 Name and function of each part 29

3.3.1 Name and function of the pump 29

3.3.2 Name and function of the control unit 30

3.4 How to install the STP pump 33

3.4.1 Cleaning the seal 34

3.4.2 STP pump installation positions 35

3.4.3 Secure the STP pump 36

3.4.4 Legs for securing the base 40

3.4.5 Power cable 41

3.4.6 How to connect the power cable 43

3.5 Precautions of vacuum piping 45

3.5.1 Vacuum piping method 45

3.6 Connecting the purge port 46

MT-82E-001-H Page ii

PAGE

STP-iXA3306 Series Turbomolecular Pump

CONTENTS (CONTINUED)

Section Title Page

3.7 Connecting the water cooling pipe 47

3.8 Attaching a baking heater 48

3.9 Installation of the TMS unit 49

3.9.1 TMS unit specification 49

3.9.2 Configuration of the STP pump with the TMS 50

3.9.3 TMS heater 51

3.9.4 Connecting the TMS heater cable 51

3.9.5 TMS valve 51

3.9.6 Connecting the pump and TMS valve 52

3.10 Connecting to semiconductor equipment 53

3.10.1 Connecting to power 53

3.10.2 Emergency off circuit (EMO circuit) 53 4 OPERATION 55

4.1 Gas pumping, cooling and baking the STP pump 55

4.1.1 Gas pumping 55

4.1.2 How to introduce a purge gas 56

4.2 Cooling the STP pump 56

4.2.1 Water-cooling method 56

4.3 Baking the STP pump 57

4.4 Before starting the STP pump 58

4.4.1 Confirmation before starting 58

4.4.2 Confirmation of vacuum system 58

4.5 Powering ON 59

4.6 Pump operation 59

4.6.1 Input operation port setting 59

4.6.2 Starting/stopping the STP pump 60

4.7 How to start/stop the STP pump 62

4.7.1 Starting the STP pump after stopping 62

4.7.2 Starting the STP pump after a safety function operates 62

4.7.3 Powering OFF 62

4.8 LED 63

4.9 Parallel port input/output signal 64

4.9.1 Input signal pins 64

4.9.2 Input operation port setting 71

4.9.3 Rotation INHIBIT signal 72

4.9.4 Second speed option 73

4.9.5 Output signal pins 74

4.10 Operating the TMS unit (for use with the TMS unit) 78

4.10.1 Before starting 78

4.10.2 Starting/Stopping 78

4.10.3 Setting the TMS unit function 78

MT-82E-001-H

Page iii

PAGE

iii

STP-iXA3306 Series Turbomolecular Pump

CONTENTS (CONTINUED)

Section Title Page

5 SERIAL COMMUNICATION PROTOCOL 79

5.1 Introduction 79

5.2 Connection and setting up 80

5.2.1 Signal connection 80

5.2.2 Connecting the RS485 82

5.2.3 Communication parameter setting 83

5.2.4 Input operation port setting 84

5.2.5 Serial communication timeout setting 85

5.2.6 Recommended items about communication cable installation 86

5.3 Protocol specifications 89

5.3.1 General description 89

5.3.2 Standard transmission frame 90

5.3.3 Control command (in the RS232/RS485 single point connection) 91

5.3.4 Query command (in the RS232/RS485 single point connection) 92

5.3.5 Transmission data format 93

5.3.6 Frame control (checksum) 94

5.3.7 Error control 94

5.3.8 Transmission frame in the RS485 multi-point connection 94

5.3.9 Control command in the RS485 multi-point connection 96

5.3.10 Query command in the RS485 multi-point connection 97

5.3.11 Broadcasting command in the RS485 multi-point connection 98

5.3.12 Application note 99

5.4 Command specifications 103

5.4.1 Command list 103

5.4.2 ReadMeas 104

5.4.3 Command 104

5.4.4 ReadFailMess 105

5.4.5 ReadModFonct 109

5.4.6 ReadVersion 111

5.4.7 ReadCounters 112

5.4.8 ReadSetPoint 113

5.4.9 ReadMotorTemp 113

5.4.10 ReadStatus 114

5.4.11 ReadEvents 115

5.4.12 SetSpeedSetPoint 116

5.4.13 ReadSpeedSetPoint 117

5.4.14 ReadModFonctWithWarning 118

5.4.15 ReadMeasValue 121

5.4.16 ReadOptionFunc 123

5.4.17 SetOptionFunc 126

5.4.18 ReadCondition 128

5.4.19 ReadEventsWithTime 130

5.4.20 SetOptions 134

5.4.20.1 Second speed option setting 134

5.4.20.2 Second speed selection 135

MT-82E-001-H Page iv

PAGE

STP-iXA3306 Series Turbomolecular Pump

CONTENTS (CONTINUED)

Section Title Page

5.4.21 ReadOptions 136

5.4.21.1 Second speed function setting 136

5.4.21.2 Second speed select 137

6 STP-LINK AND DISPLAY UNIT 139

6.1 STP-Link 139

6.2 Display unit 140

7 SAFETY FUNCTIONS 141

7.1 Safety functions 141

7.1.1 Power Failure 141

7.1.2 Operation after a power recovery 142

7.1.3 Abnormal state of magnetic bearing (Disturbance) 143

7.1.4 Excessive vibration (Disturbance) 143

7.1.5 Motor driver overload (DRV Overload) 143

7.1.6 Overheating inside the STP pump (MOTOR Overheat) 143

7.1.7 Overheating inside the control unit (CNT Overheat) 143

7.1.8 Overspeed 144

7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 144

7.2 "WARNING" function 145

7.2.1 "WARNING" function 145

7.3 Contents of WARNING function 147

7.3.1 First Damage limit 147

7.3.2 Second Damage Limit 147

7.3.3 Pump run time over 147

7.3.4 Pump Overload 148

7.3.5 Imbalance 148

7.4 WARNING function setting 149

7.5 Troubleshooting immediately after failure occurs 150

7.5.1 After power failure 150

7.5.2 After other abnormality/error 150

7.6 Troubleshooting 151

7.6.1 Indication of "FAILURE" LED (red) 151

7.6.2 Indication of "FAILURE" LED (green) 158

7.6.3 No Indication of the "FAILURE" LED 158

8 MAINTENANCE AND INSPECTION 159

8.1 Maintenance and inspection 159

8.2 Cleaning 160

8.3 Inspecting the deposit 160

8.4 Maintenance 161

8.4.1 Recommended overhaul intervals 161

8.4.2 Standard replacement parts 161

8.4.3 Recommended maintenance intervals for main parts 162

8.5 Transporting for repair or overhaul 163

MT-82E-001-H

Page v

PAGE

STP-iXA3306 Series Turbomolecular Pump

CONTENTS (CONTINUED)

Section Title Page

9 STORAGE AND DISPOSAL 165

9.1 Storage of the STP pump 165

9.2 Disposal 166

10 SERVICE, SPARES AND ACCESSORIES 167

10.1 Introduction 167

10.2 Service 167

10.3 Spares 167

10.4 Accessories 168

MT-82E-001-H Page vi

PAGE

STP-iXA3306 Series Turbomolecular Pump

ILLUSTRATIONS

Figure Title Page

1 STP pump installation warning label 6 2 Hot surface warning label 6 3 Heavy product caution label 7 4 High voltage device caution label 7 5 Rotation instruction label 7 6 Cross sectional view of the STP pump 8 7 External appearance of STP-iXA3306C(V)/iXA3306B(V) 19 8 Label affixing positions 20 9 Space around the STP pump 23 10 Example of lifting the STP pump 25 11 Example of lifting the STP pump (horizontal positioning) 26 12 Jack-up the STP pump 27 13 Control unit bottom face 27 14 Prohibited matter 28 15 STP pump with eyebolts 28 16 Configuration of the STP pump 29 17 Control unit (Front panel) 30 18 Installation of the STP pump to the vacuum equipment 33 19 STP pump installation positions 35 20 Positions of the outlet port on the horizontally

or slanted installed STP pump 35

21 Shape of reduced diameter shank bolts 39 22 Methods of securing the STP pump 39 23 Screw holes for securing the base 40 24 Power cable 41 25 Connecting method of the power cable 42 26 Connecting the purge port 46 27 Positions of the cooling water port 47 28 Baking heater installation position 48 29 Configuration of the TMS 50 30 TMS valve connection 52 31 Pump operation method 1 (contact input) 60 32 Pump operation method 2 (contact input) 60 33 Pump operation method 1 (voltage input) 61 34 Pump operation method 2 (voltage input) 61 35 "ROTATION" LED Indication 63 36 X2 REMOTE connector 64 37 X2 REMOTE input signal pins (contact input) 67 38 X2 REMOTE input signal pins (voltage input) 70 39 X2 REMOTE output signal pins 76 40 Serial port 79 41 X3/X4 connector (D-Sub9) 81 42 RS485 connections 82 43 Grounding example (Both ends grounding) 86 44 Grounding example (single point grounding) 86 45 Example of ring ferrite core installation 87 46 Example of cable installation in metallic duct 87 47 Example of differential signal waveform 88 48 PC to SIM communication 89 49 Block diagram of communication process example 99

MT-82E-001-H

Page vii

PAGE

vii

STP-iXA3306 Series Turbomolecular Pump

ILLUSTRATIONS (CONTINUED)

Figure Title Page

50 Example of answer resending process 100 51 Example of response when the command is sent continuously 100 52 Example of command sending during answer data reply 100 53 Example of communication cycle process 101 54 Example of command sending process 102 55 Example of answer receiving process 102 56 Display unit iDT-001 140 57 WARNING output 146 58 Failure output 151

MT-82E-001-H Page viii

PAGE

viii

STP-iXA3306 Series Turbomolecular Pump

TABLES

Table Title Page

1 Maximum gas flow-rate (STP-iXA3306C) 14 2 Maximum gas flow-rate (STP-iXA3306CV) 14 3 Maximum gas flow-rate (STP-iXA3306B) 15 4 Maximum gas flow-rate (STP-iXA3306BV) 15 5 Environmental requirements for installation 22 6 Eyebolt size 25 7 Pump functions 29 8 Control unit front panel functions 31 9 Control unit front panel functions (continued) 32 10 Tightening torque of bolt 36 11 Maximum torque predicted and recommended securing bolt

for inlet port flange 37

12 Power cable 41 13 TMS unit specification 49 14 Starting/stopping the STP pump

using contact input (X2 REMOTE) 60

15 Starting/stopping the STP pump

using voltage input (X2 REMOTE) (voltage input) 61

16 Reset Operation (X2 REMOTE) 62 17 LED Indications for each state 63 18 X2 REMOTE input signal pins 65 19 X2 REMOTE input signal pins (continued) 66 20 X2 REMOTE input signal pins (voltage input) 68 21 X2 REMOTE input signal pins (voltage input) (continued) 69 22 Input operation port setting 71 23 Rotation INHIBIT signal input 72 24 Second speed function 73 25 X2 REMOTE output signal pins 75 26 X2 REMOTE output signal pins (continued) 76 27 Rated contacts for relays CR1 to CR8 77 28 X3/X4 pin position 80 29 Communication parameters 83 30 Input operation port 84 31 Serial communication time out setting 85 32 Transmission control characters 90 33 Pump operation commands 98 34 Command list 103 35 Pump operation commands 105 36 Error message values 107 37 Error message values (continued) 108 38 Pump operation mode 110 39 Remote mode 115 40 Warning value bit assign 119 41 Parameter setting value 124 42 Option function number and parameter list 134 43 Option function number and parameter list 136 44 Functions of STP-Link 139 45 States of LEDs and X2 REMOTE output signals

at power failure 142

46 WARNING function 145

MT-82E-001-H

Page ix

PAGE

STP-iXA3306 Series Turbomolecular Pump

TABLES (CONTINUED)

Table Title Page

47 Default setting of WARNING function 149 48 Factory Setting and Variable Range 149 49 Priority of failure signal 151 50 Error List 152 51 Error List (continued) 153 52 Error List (continued) 154 53 Error List (continued) 155 54 Error List (continued) 156 55 Error List (continued) 157 56 Troubleshooting with no indication of the "FAILURE" LED 158

MT-82E-001-H Page x

PAGE

STP-iXA3306 Series Turbomolecular Pump

This page intentionally blank

MT-82E-001-H

Page 1

INTRODUCTION

WARNING

Warnings are given where failure to observe the instruction could result in serious injury

or death to people.

CAUTION

Cautions are given where failure to observe the instruction could result minor personal injury in

damage to the equipment, associated equipment and/or process.

Warning - This symbol denotes general warning

Refer to accompanying documentation and instruction manual.

Warning - Hazardous Voltage

This symbol denotes the risk of electrical shock.

Warning - Heavy object

This symbol denotes the risk of low back pain and fall.

Warning - Hot surface

This symbol denotes the risk of burns.

STP-iXA3306 Series Turbomolecular Pump

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP pump as specified in this manual otherwise the protection provided by the equipment may be impaired.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:

Note: Items you must follow during operation and maintenance.

Throughout this manual, page, figure and table numbers are sequential.

The units used throughout this manual conform to the SI international system of units of measurement; US equivalent units of measurement are also given.

The following IEC warning labels/symbols appear on the STP-iXA3306 Series Turbomolecular Pump and the STP Pump Instruction Manual:

MT-82E-001-H Page 2

INTRODUCTION

STP-iXA3306 Series Turbomolecular Pump

Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are

displayed on the LCD of the display unit iDT-001 (optional accessory). Note that the words "WARNING" and "CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions during the operation. They do not have the same meaning as the much more serious symbols for "WARNING" and "CAUTION" used in the instruction manual.

1.2 Applied standards

The STP pump conforms to the following directives and standards:

1. Applied Directives

 EC Machinery Directive  EC Electromagnetic Compatibility Directive  EC Low Voltage Directive

2. Applied Standards

 EN1012-2  EN61010-1  EN61326-1 (class A)  EN61000-6-2  EN55011  UL61010-1, 2nd Edition (Electrical Equipment for Measurement, Control, Laboratory Use)  SEMI S2-0310

3. Electromagnetic compatibility  This product is a class A product according to EN61326, and a group 1, class A product

according to EN 55011. This means that this product does not generate and/or use intentionally radio-frequency energy, in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment of material or inspection / analysis purpose and that it is suitable for use in all establishments other than domestic and those directly connected to a low voltage power supply network which supplies buildings used for domestic purposes.

 This product may have potential difficulties in ensuring electromagnetic compatibility in other

than industrial environments, due to conducted as well as radiated disturbances.

 This product must not be used in residential areas because it may cause interference if used in

residential areas.

MT-82E-001-H

Page 3

INTRODUCTION

STP-iXA3306 Series Turbomolecular Pump

1.3 Limited warranty

This WARRANTY applies to the customer to whom Edwards has delivered this product.

1.3.1 Warranty period

Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards.

1.3.2 Item warranted

1. This warranty applies only to the product delivered from Edwards to the customer.

2. If any defect is found during this period, Edwards will, at its option, repair or recondition the

product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at your own charge.

1.3.3 Disclaimer

Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period:

1. Handling, operation or maintenance other than that specified herein.

2. Failure to follow any of the warnings or cautions enumerated in this manual.

3. Installation, operation or maintenance using parts which are not specified by Edwards.

4. Maintenance personnel other than those authorized by Edwards or Service office have

disassembled, reconditioned, or tampered the product.

5. Defect resulting from the not-specified use of the product.

6. When the product is used under special conditions without obtaining the written consent of

Edwards (particular gases, strong magnetic field and the radiation are added to the product).

7. Defect resulting from deposit.

8. Water cooling system defect resulting from water quality used.

9. Defect resulting from the installation of the product (exclude the installation by authorized

personnel).

10. Deterioration in the external because of use (discoloration, scratches and so forth).

11. Product damage occurred during transport or other factors not attributable to Edwards.

12. Product breakage or damage due to natural disasters, fire or other external factors.

13. Deterioration in the basic performance due to the use of the product beyond limits of the use.

MT-82E-001-H Page 4

INTRODUCTION

STP-iXA3306 Series Turbomolecular Pump

14. Any direct, incidental or consequential damage resulting from the use of the product.

15. When continuously operated without overhaul after the WARNING indication on the “Failure”

LED of the control unit or the LCD ("WARNING" message) of the display unit iDT-001.

16. Overhaul and replacement of maintenance parts.

1.3.4 Spare parts

 Touch down bearing.  Air-cooling fan

Touch down bearing and air-cooling fan should be replaced at Edwards, contact Edwards.

MT-82E-001-H

Page 5

INTRODUCTION

WARNING

To prevent an accident, confirm the characteristics of gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS

and a safety advice of gas supplier.

WARNING

Warn of the danger of the gas with the warning label when the use gas is hazardous

chemical material.

WARNING

Secure safety by wearing personal protective equipment when using the gas which

might influence damage health. In addition, take appropriate measure for depending

upon the properties of the gas to be used.

CAUTION

NEVER use any gas that is not specified as usable in this Manual. The use of such gas may

corrode the STP pump and damage it.

CAUTION

Introduce a dry N2 gas (purge gas) to protect the inside of the STP pump when using reactive or

corrosive gas, gas including hydrogen. The use of these gases may result in product damage.

CAUTION

Cool the STP pump to prevent the STP pump from overheating when pumping gases.

STP-iXA3306 Series Turbomolecular Pump

1.4 Precautions for safe operation of the STP pump

1.4.1 Usable gases

1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the

following gases, contact Edwards.

 Gases including alkaline metals except Li gas.  Gases including Ga, Hg, In, or Sn.  HBr gas.

2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine

system gases.

MT-82E-001-H Page 6

INTRODUCTION

STP-iXA3306 Series Turbomolecular Pump

1.5 Maintenance and inspection precautions

Perform any maintenance or inspection of the STP pump under the condition that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8, "MAINTENANCE AND INSPECTION".

1.6 Labels

The following labels are affixed to the STP pump. Read the contents of the labels before operation.

1. STP pump installation warning label

This label describes installation of the STP pump. Install the STP pump according to the precautions. Install the STP pump according to the precautions of Section 3, "INSTALLATION OF THE STP PUMP".

Figure 1 - STP pump installation warning label

2. Hot surface warning label

This label instructs operators so as not to touch the hot surface of the STP pump. The pump and control unit will become high temperature while the STP pump is in operation. This label warns operators so as not to burn hands.

Figure 2 - Hot surface warning label

MT-82E-001-H

Page 7

INTRODUCTION

STP-iXA3306 Series Turbomolecular Pump

3. Heavy product caution label

This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 3.2, "Unpacking" so as not to cause any accident during handling.

Figure 3 - Heavy product caution label

4. High voltage device caution label

The pump and control unit are equipped with a high voltage device. This label warns operators to pay attention to the high voltage device at the maintenance and inspection.

Figure 4 - High voltage device caution label

5. Rotational direction instruction label

This label describes the rotational direction of the STP pump. The STP pump rotates in this direction.

Figure 5 - Rotation instruction label

MT-82E-001-H Page 8

INTRODUCTION

Rotor blade

Radial electromagnet

Touch down bearing

Stator blade

Axial sensor

Control unit

Radial sensor

Axial electromagnet

STP-iXA3306 Series Turbomolecular Pump

1.7 Operation principle of the STP pump

Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel, solar battery. The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. The STP-iXA3306 series pump is a series of a magnetically-levitated turbomolecular pumps, each with the following features:

1. Oil free

2. Low vibration

3. High reliability

4. Compact size (Integrated control unit)

5. Temperature management system

6. Dust and water protection (STP-iXA3306C/B)

Figure 6 - Cross sectional view of the STP pump

MT-82E-001-H

Page 9

INTRODUCTION

STP-iXA3306 Series Turbomolecular Pump

1. Oil free

Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.

2. Low vibration

The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3) and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is supported without mechanical contact, it can rotate at low vibration.

3. High reliability

There is no periodic replacement of magnetic bearings unlike conventional turbomolecular pumps using ball bearings because there is no friction. Taking into consideration a breakage of magnetic bearings, touch down bearings (7) have been installed. They do not contact with the rotor during the rated operation. The status of the rotor and magnetic bearing is continuously monitored via circuits detecting rotor displacement, rotational speed and pump temperature. If an abnormality/error occurs, the rotor will stop.

4. Compact size (Integrated control unit)

To save space for installation, the STP pump mounts the control unit (8) that includes the power supply which converts the alternating input to direct current output. In addition, the following circuits are integrated; the magnetic bearing control circuit, the motor drive circuit which drives rotor blade, the supervisor circuit which monitors pump operation status and operates the pump in remote operation mode.

5. Temperature management system

The Temperature Management System (TMS) maintains the temperature of the turbomolecular pump by monitoring the temperature using a thermistor in the base of the turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control in order to maintain a constant temperature of the STP pump. Model name: STP-iXA3306CV, STP-iXA3306BV

6. Dust and water protection

The STP pump sealed with the equivalent specification of IP54 standard is protected against dust and water to ensure reliable performance in rough conditions.

IP54 IP: International Protection Code (refer to IEC60529-2001)

Protection against dust:

5: Dust penetration is not prevented altogether, but dust must not enter in sufficient quantities to prevent the equipment from operating satisfactorily, or to impair safety.

Protection against water:

4: Water splashes on to the enclosure from any direction must not have any harmful effects.

MT-82E-001-H Page 10

INTRODUCTION

Standard

(corrosion resistant type)

TMS specification

(corrosion resistant type with TMS)

STP-iXA3306C STP-iXA3306B

STP-iXA3306CV STP-iXA3306BV

TMS valve

STP-iXA3306 Series Turbomolecular Pump

1.8 STP pump specification

External appearance, installation and unpacking method differ depending to the STP pump model. Refer to the followings:

Naming convention:

 "C" following a pump model name indicates a corrosion resistant*1 type.

(e.g. STP-iXA3306C)

 "B" following a pump model name indicates corrosion resistant*1 and high-emissivity*2 coating

type. (e.g. STP-iXA3306B)

 "V" indicates a TMS

unit.

(e.g. STP-iXA3306CV)

Corrosion resistant: STP pump with anti-corrosive treatment.

High-emissivity coating: STP pump with rotor covered with high-emissivity coating.

Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the temperature with the thermistor in the base of the turbomolecular pump, and performing the TMS heater ON/OFF control in order to maintain a constant temperature of the STP pump.

MT-82E-001-H

Page 11

INTRODUCTION

Display unit iDT-001

STP-iXA3306 Series Turbomolecular Pump

The display unit iDT-001 is available as an optional accessory with the STP-iXA3306 series. The display unit operates the STP pump, confirms the pump status or sets various settings. (refer to Section 6.2 and the Instruction Manual of the "Display Unit iDT-001".)

MT-82E-001-H Page 12

INTRODUCTION

STP-iXA3306 Series Turbomolecular Pump

This page intentionally blank

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page 13

TECHNICAL DATA

Item

STP-iXA3306C(V) / STP-iXA3306B(V)

Flange size Inlet port flange

VG250 / ISO250F

ICF305 (DN250CF)

VG300 / VG350

ISO320F

ICF356 (DN320CF)

Outlet port flange

KF40

Pumping speed

L/s

2650

3200

L/s

2300

2800

L/s

2050

2300

Compression ratio

>108

>2.0×103

Ultimate pressure

Pa (Torr)

10-7 (10-9) [after baking]

Allowable backing pressure

Pa (Torr)

266 (2): Water cooling/TMS unit used

Flow rate of purge gas <N2>

Pa·m3/s(SCCM)

8.4×10-2±1.7×10

-2

(50±10)

Rated speed

rpm

27,700

Backup rotational speed

rpm

Approximately 5,000

Starting time

min

≦10

Stopping time

min

≦16

Noise

< 55 (at 27,700 rpm)

Temperature Management System (TMS)

Available

Baking temperature

°C

<120

Lubricating oil Not necessary

Installation position Free

Cooling method Water cooling

Recommended backing-pump

L/min

>1,300

Mass

Ambient temperature range

°C

0 to 40

Storage temperature range

°C

-25 to 55

2 TECHNICAL DATA

2.1 STP pump specifications

The values shown below are typical. They are not guaranteed.

A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

Mass is a value of state that the only standard accessory was installed (except the optional accessory).

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H Page 14

TECHNICAL DATA

PAG

Cooling water

backing-pump

Gas

Maximum gas flow-rate

[Pa･m3/s]

[SCCM]

15 to 25 ºC

> 1,300 L/min

2.87

1700

4.05

2400

> 10,000 L/min

3.55

2100

6.76

4000

26 to 35 ºC

> 1,300 L/min

2.53

1500

3.72

2200

> 10,000 L/min

2.87

1700

6.59

3900

Cooling water

backing-pump

Gas

Maximum gas flow-rate

TMS

(setting value)

[Pa･m3/s]

[SCCM]

15 to 25ºC

> 1,300 L/min

2.03

1200

70 ºC

3.55

2100

> 10,000 L/min

2.03

1200 N2

5.07

3000

2.2 Maximum gas flow-rate

2.2.1 STP-iXA3306C/CV

Table 1 - Maximum gas flow-rate (STP-iXA3306C)

Table 2 - Maximum gas flow-rate (STP-iXA3306CV)

*1 The maximum gas flow-rate is applicable under conditions that N2 or Ar gas is vacuumed continuously and the purge gas

flow rate <N2> 8.4×10-2±1.7×10-2 Pa•m3/s (50±10 SCCM) is used. It is changed depending on condition. For example, when the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.

MT-82E-001-H

Page 15

TECHNICAL DATA

2.2.2 STP-iXA3306B/BV

Cooling water

backing-pump

Gas

Maximum gas flow-rate

[Pa･m3/s]

[SCCM]

15 to 25 ºC

> 1,300 L/min

3.72

2200

4.05

2400

> 10,000 L/min

5.24

3100

6.76

4000

26 to 35 ºC

> 1,300 L/min

3.72

2200

4.05

2400

> 10,000 L/min

4.90

2900

6.59

3900

Cooling water

backing-pump

Gas

Maximum gas flow-rate

TMS

(setting value)

[Pa･m3/s]

[SCCM]

15 to 25ºC

> 1,300 L/min

3.55

2100

70 ºC

3.89

2300

> 10,000 L/min

4.23

2500 N2

6.42

3800

STP-iXA3306 Series Turbomolecular Pump

Table 3 - Maximum gas flow-rate (STP-iXA3306B)

Table 4 - Maximum gas flow-rate (STP-iXA3306BV)

*1 The maximum gas flow-rate is applicable under conditions that N2 or Ar gas is vacuumed continuously and the purge gas

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H Page 16

TECHNICAL DATA

PAG

Item

Specification

Port type

Rc 1/4 (Female)

Flow rate

L/min

Water temperature

°C

15 to 35 *1

Water pressure

MPa (kgf/cm2)

0.3 (3)

Maximum grain size

mm2

0.03

pH 6.5 to 8.0

Water hardness

mg/L

100

Resistivity

kΩ･cm

4 to 1000

Turbidity

FNU

< 30

Maximum gas flow-rate differs according to the cooling water

temperature.

2.3 Water cooling use condition

Use cooling water which fulfills the following conditions.

STP-iXA3306 Series Turbomolecular Pump

MT-82E-001-H

Page 17

TECHNICAL DATA

Item

STP-iXA3306C/B

STP-iXA3306CV/BV

Input voltage

ACV

200 to 240

Input power

1500 maximum

(without TMS unit)

1800 maximum (with TMS unit)

Input frequency

50/60 ± 2

Leakage current

2.0 maximum

Input phase

Single phase

Main fuse specification A 10

Current Ampere Interrupting Capacity (AIC)

100

(240V AC 50/60 Hz)

Pollution degree

Installation category

Ⅱ

Motor driving system

3-phase d.c. brushless motor driver

Output frequency under normal operation

462 maximum

Battery for clock function

Specification

Lithium battery (3 V, 130 mAhr)

Model

DS9034PCX

Maker

MAXIM

Panel indication LED

POWER

(Green LED)

FAILURE

(Red/Orange LED)

ROTATION

(Green/Orange LED)

Data

(Green LED)

Off-Line

(Orange LED)

Error

(Red LED)

Input/Output connector

AC POWER X11

(3 pins)

HEATER X12

(2 pins)

REMOTE X2

(37 pins)

COM1 X3

(9 pins)

COM2 X4

(9 pins)

STP-LINK X5

(8 pins)

OPTION X6

(12 pins)

2.4 Control unit

The values shown below are typical. They are not guaranteed.

MT-82E-001-H Page 18

TECHNICAL DATA

PAG

Item

STP-iXA3306 series

Safety function

Electromagnetic bearing failure detection

STP pump overheat detection

Motor driver overload detection

Power failure detection

STP pump overspeed detection

Control unit overheat detection

Other failure detection

STP-iXA3306 Series Turbomolecular Pump

+ 151 hidden pages

Edwards STP-iXA3306C, STP-iXA3306B, STP-iXA3306CV, STP-iXA3306BV User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

CONTENTS

1 INTRODUCTION

1.1 Scope and definitions

1.2 Applied standards

1.3 Limited warranty

1.3.1 Warranty period

1.3.2 Item warranted

1.3.3 Disclaimer

1.3.4 Spare parts

1.4 Precautions for safe operation of the STP pump

1.4.1 Usable gases

1.5 Maintenance and inspection precautions

1.6 Labels

1.7 Operation principle of the STP pump

1.8 STP pump specification

2 TECHNICAL DATA

2.1 STP pump specifications

2.2 Maximum gas flow-rate

2.2.1 STP-iXA3306C/CV

2.2.2 STP-iXA3306B/BV

2.3 Water cooling use condition

2.4 Control unit