MT-00E-001-B
Instruction Manual (A)
STP Series Turbomolecular Pumps
Generic Instruction Manual
D
Applicable Models:
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
STP-A1603 series
STP-A2203 series
STP-A2503/A3003 series
STP-A2803/A3503 series
STP-F2203 series
STP-XH2603P/XH3203P series
STP-XA2703/XA3203 series
STP-XA4503 series
STP-XW3503 series
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
Instruction Manual (B): STP pump specific information
Instruction Manual (C): STP control unit Instruction Manual
STP pump generic Instruction Manual
Copyright 2010 Edwards Japan Limited. All rights reserved. Printed in Japan.
The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
• Introduction
• Installation of the STP pump
• Installation of the STP control unit
• Operation
• Safety functions
• Maintenance and inspection
• Storage and disposal
• Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
• Technical data
• How to Secure the STP pump
• Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
• Introduction
• Technical data
• Installation
• Operation
• Serial communication protocol
• STP-Link (except for SCU-750)
• Maintenance
• Storage, transportation and disposal
• Service, spares, and accessories
Keep the manuals in an easily accessible location.
STP Series Turbomolecular Pump
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 2
1.3.3 Disclaimer 3
1.3.4 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 8
1.8 Temperature management system 9
1.9 Name of the STP pump 10
2 INSTALLATION OF THE STP PUMP 13
PAGE
i
2.1 Precautions before installation 13
2.1.1 Operating environment 13
2.1.2 Installation area 14
2.1.3 Bench 15
2.2 Unpacking 16
2.2.1 Unpacking the STP pump 16
2.3 How to install the STP pump 18
2.3.1 Cleaning the seal 20
2.3.2 STP pump installation positions 21
2.3.3 Secure the STP pump 22
2.3.4 Precautions of vacuum piping 22
2.3.5 Vacuum piping method 23
2.3.6 Connecting the purge port 24
2.3.7 Connecting the water cooling pipe 24
2.3.8 Attaching a baking heater 25
2.3.9 Installation of the air cooling unit 25
2.3.10 Installation of the TMS unit 26
3 INSTALLATION OF THE STP CONTROL UNIT 27
3.1 STP control unit 27
3.1.1 SCU-800 27
3.1.2 SCU-750 28
3.1.3 SCU-1400 28
3.1.4 SCU-1500 29
3.1.5 SCU-1600 29
3.2 Cable connection 30
3.2.1 STP connection cable 30
3.2.2 Power cable 31
3.3 How to connect the cables 32
March 10 i Issue 1-b
PAGE
ii
STP Series Turbomolecular Pump
CONTENTS
Section Title Page
4 OPERATION 35
4.1 Before starting the STP pump 35
4.1.1 Tuning 35
4.1.2 Operation of vacuum system 36
4.2 Pump operation 36
4.2.1 LED indication during operation 36
4.2.2 Starting the STP pump after a safety function operates 37
4.3 Gas pumping, cooling and baking the STP pump 37
4.3.1 Gas pumping 37
4.3.2 How to introduce a purge gas 38
4.4 Cooling the STP pump 38
4.4.1 Water-cooling method 38
4.4.2 Air-cooling method 39
4.5 Baking the STP pump 39
4.6 How to use the TMS unit 40
4.6.1 Parameter set mode 40
4.6.2 Starting/stopping the TMS unit 40
4.6.3 Temperature control 40
5 SAFETY FUNCTIONS 41
5.1 Safety functions 41
5.1.1 Power failure 41
5.1.2 Operation after a power recovery 41
5.1.3 Abnormal state of magnetic bearing 42
5.1.4 Excessive vibration 42
5.1.5 Motor driver overload 42
5.1.6 Overheating inside the STP pump 42
5.1.7 Overheating inside the STP control unit 43
5.1.8 Overspeed 43
5.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 43
5.1.10 Failure of the air-cooling fan (for SCU-800 only) 43
6 MAINTENANCE AND INSPECTION 45
6.1 Maintenance and inspection 45
6.2 Cleaning 46
6.3 Inspecting the deposit 46
6.4 Overhaul 47
6.5 Transporting for repair or overhaul 48
7 STORAGE AND DISPOSAL 49
7.1 Storage of the STP pump 49
7.2 Disposal 50
March 10 ii Issue 1-b
STP Series Turbomolecular Pump
CONTENTS
Section Title Page
8 SERVICE, SPARES AND ACCESSORIES 51
8.1 Introduction 51
8.2 Service 51
8.3 Spares 51
8.4 Accessories 52
PAGE
iii
March 10 iii Issue 1-b
STP Series Turbomolecular Pump
PAGE
iv
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 5
2 Hot surface warning label 5
3 Heavy product caution label 6
4 Connector caution label 6
5 Caution label 6
6 TMS heater surface caution label 7
7 Rotation instruction label 7
8 Cross sectional view of the STP pump 8
9 Configuration of the STP pump (Typical pump model) 10
10 Example of lifting the STP pump 16
11 Example of lifting the STP pump (horizontal positioning) 17
12 Installation of the STP pump to the vacuum equipment 19
13 STP pump installation positions 21
14 Positions of the outlet port on the horizontally
or slanted installed STP pump 21
15 Positions of the cooling water port and baking heater 24
16 SCU-800 27
17 SCU-750 28
18 SCU-1400 28
19 SCU-1500 29
20 SCU-1600 29
21 SCU-750/SCU-800 STP connection cable 30
22 SCU-1400/SCU-1500/SCU-1600 STP connection cable 30
23 SCU-750 power cable 31
24 SCU-800 power cable 31
25 SCU-1400/SCU-1500/SCU-1600 power cable 31
March 10 iv Issue 1-b
STP Series Turbomolecular Pump
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). In this manual, the
control unit for the turbomolecular pump is referred to as the "STP control unit". You must use the
STP pump as specified in this manual.
The procedures in this manual must be followed before you install, operate and maintain the STP
pump. Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
or death to people.
CAUTION
1
INTRODUCTION
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STP Pump Instruction Manual:
Warning - refer to
accompanying documentation.
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
Warning - risk of electric shock.
Warning - heavy object.
displayed on the LCD of the STP control unit. Note that the words "WARNING" and
"CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions
during the operation. They do not have the same meaning as the much more serious
symbols for "WARNING" and "CAUTION" used in the instruction manual.
March 10 1 Issue 1-b
1.2 Applied standards
STP Series Turbomolecular Pump
1
INTRODUCTION
The STP pump conforms to the following directives and standards:
1. Applied Directives
• EC Machinery Directive
• EC Electromagnetic Compatibility Directive
• EC Low Voltage Directive
2. Applied Standards
• EN1012-2
• EN61010-1
• EN61326 (class A)
• EN61000-6-2
3. Applied Standards (Only some model. Contact Edwards about recognized model.)
nd
• UL61010-1, 2
Requirements)
1.3 Limited warranty
Edition (Electrical Equipment for Laboratory Use; Part 1: General
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.
March 10 2 Issue 1-b
1.3.3 Disclaimer
STP Series Turbomolecular Pump
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (particular gases, strong magnetic field and the radiation are added to the product).
7. Defect resulting from deposit.
8. Water cooling system defect resulting from water quality used.
9. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
10. Deterioration in the external because of use (discoloration, scratches and so forth).
11. Product damage occurred during transport or other factors not attributable to Edwards.
1
INTRODUCTION
12. Product breakage or damage due to natural disasters, fire or other external factors.
13. Deterioration in the basic performance due to the use of the product beyond limits of the use.
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
16. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
• Touch down bearing.
(Touch down bearing should be replaced at Edwards, contact Edwards).
• Heater
March 10 3 Issue 1-b
STP Series Turbomolecular Pump
1.4 Precautions for safe operation of the STP pump
1
INTRODUCTION
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
Warn of the danger of the gas with the warning label when the use gas is hazardous
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
CAUTION corrode the STP pump and damage it.
Introduce a dry N2 gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas. The use of reactive or corrosive gas may result in product damage.
Cool the STP pump to prevent the STP pump from overheating when pumping gases.
and a safety advice of gas supplier.
WARNING
WARNINGchemical material.
WARNING
upon the properties of the gas to be used.
CAUTION
CAUTION
CAUTION
March 10 4 Issue 1-b
STP Series Turbomolecular Pump
1.5 Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump, following Section 6, "MAINTENANCE AND
INSPECTION".
1.6 Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1. STP pump installation warning label
This label describes installation of the STP pump. Install the STP pump according to the
precautions. Install the STP pump according to the precautions of Section 2, "INSTALLATION
OF THE STP PUMP".
1
INTRODUCTION
Figure 1 - STP pump installation warning label
2. Hot surface warning label
This label instructs operators so as not to touch the hot surface of the STP pump and the TMS
unit.
The TMS unit specification may lead to a considerable rise in temperatures outside the STP
pump. (only with TMS unit)
Figure 2 - Hot surface warning label
March 10 5 Issue 1-b
3. Heavy product caution label
STP Series Turbomolecular Pump
1
INTRODUCTION
This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of
Section 2.2, "Unpacking" so as not to cause any accident during handling.
Figure 3 - Heavy product caution label
4. Connector caution label
This label describes lock of the connector. This label instructs operators to prevent the
connectors from being disconnected while the STP pump is in operation.
Figure 4 - Connector caution label
5. STP pump/control unit caution label
This label describes precautions for operating the STP pump. Follow these precautions.
Figure 5 - Caution label
March 10 6 Issue 1-b
STP Series Turbomolecular Pump
6. TMS heater caution label
This label instructs operators so as not to remove the TMS heater from the STP pump. (only
with TMS unit)
Figure 6 - TMS heater caution label
7. Rotational direction instruction label
This label describes the rotational direction of the STP pump. The STP pump rotates in this
direction.
1
INTRODUCTION
Figure 7 - Rotation instruction label
March 10 7 Issue 1-b
STP Series Turbomolecular Pump
1.7 Operation principle of the STP pump
1
INTRODUCTION
The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the
following features:
• Oil free
• Low vibration
• High reliability
1. Rotor blade 5. Axial sensor
2. Stator blade 6. Axial electromagnet
3. Radial sensor 7. Touch down bearing
4. Radial electromagnet
Figure 8 - Cross sectional view of the STP pump
March 10 8 Issue 1-b
STP Series Turbomolecular Pump
The STP pump (Figure 8) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
1
The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the
axial direction
The rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the
STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the
radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3)
and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial
sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is
supported without mechanical contact, it can rotate at low vibration.
There is less heat generated from magnetic bearings because there is no friction. Therefore, the STP
pump requires no cooling. However, the STP pump does require water-cooling or air-cooling during
baking and gas pumping. Taking into consideration an unexpected failure of magnetic bearings,
touch down bearings (7) coated with solid lubrication have been installed. They do not contact with
the rotor during the rated operation.
A radial sensor, an axial sensor, a rotation sensor and a temperature sensor always monitor the
magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop.
INTRODUCTION
1.8 Temperature management system
The Temperature Management System (TMS) maintains the temperature of the turbomolecular
pump by monitoring the temperature using a thermistor in the base of the turbomolecular pump, and
performing the TMS valve and base heater ON/OFF control.
March 10 9 Issue 1-b
1
INTRODUCTION
STP Series Turbomolecular Pump
1.9 Name of the STP pump
1. Inlet port flange 4. Outlet port flange
2. TMS sensor connector 5. STP connector
3. Cooling water port 6. Purge port
Figure 9 - Configuration of the STP pump (Typical pump model)
March 10 10 Issue 1-b
STP Series Turbomolecular Pump
Item Description Function
1 Inlet port flange Connected to the vacuum equipment (at the high vacuum
side).
2 TMS sensor connector
*1*2
A temperature sensor is attached for use with the TMS unit
only.
3 Cooling water port
(water cooling unit)
*3
Connected to the STP pump cooling water pipe. This port is
used when water cooling the STP pump or using the TMS
unit.
4 Outlet port flange Connected to the inlet port side of the backing-pump.
5 STP connector Connected to the STP connection cable.
6 Purge port*4 Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gases.
The STP pump is delivered with a blank flange attached to this
port.
1
INTRODUCTION
The STP pump in Figure 9 is a typical pump model. Refer to the STP Pump Instruction Manual (B).
*1
Depending upon the pump model, the TMS unit (optional accessory) is not available. Refer to the STP Pump Instruction
Manual (B) for more detailed information.
*2
Depending upon the pump model, the TMS sensor is built in the STP pump. Refer to the STP Pump Instruction Manual (B)
for more detailed information.
*3
Depending upon the pump model, the STP pump is not equipped with water cooling unit. Refer to the STP Pump
Instruction Manual (B) for more detailed information.
*4
Depending upon the pump model, the STP pump is not equipped with a purge port. Refer to the STP Pump Instruction
Manual (B) for more detailed information.
March 10 11 Issue 1-b
1
INTRODUCTION
STP Series Turbomolecular Pump
This page intentionally blank
March 10 12 Issue 1-b
STP Series Turbomolecular Pump
2 INSTALLATION OF THE STP PUMP
2.1 Precautions before installation
2.1.1 Operating environment
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
MSDS and a safety advice of gas supplier.
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
If the STP pump is to be used in an area with radiation, contact Edwards.
2
INSTALLATION
WARNING
WARNING
by exhaust gas.
CAUTION
CAUTION
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards:
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
March 10 13 Issue 1-b
STP Series Turbomolecular Pump
The STP pump should be installed in an area which meets the following requirements:
2
INSTALLATION
Ambient temperature 0 to 40 °C (32 to 104 °F)
Ambient relative humidity 30 to 95% (no dew condensing)
Environment
STP pump installation
equipment conditions
• An area free of externally applied mechanical shock.
• A place free of a heat source (Keep clear of the heat
source or attach a thermal shield plate).
• A place free of a strong magnetic field (Range: up to 15
mT (150 G) in the axial direction, and up to 3 mT (30 G)
in the radial direction with respect to the rotational axis
of the STP pump).
• A place free of a strong electric field.
• A place free of exposure to radiation.
• No discharge of high voltage (more than 500 V) (If more
than 500V is discharged, contact Edwards).
Install the STP pump securely so that foreign materials
cannot fall into the STP pump (Ex.: Si wafers or samples
are positioned above the STP pump) (To prevent foreign
materials from falling into the STP pump, design a shield
plate with large conductance).
2.1.2 Installation area
Leave enough space for the following in addition to that for the STP pump:
• Space for maintenance and inspection.
• Space for connecting cables.
The minimum bending radius of the STP connection cable is 100 mm (see the STP Pump
Instruction Manual (B), "External Appearance of the STP pump" [bending dimensions of the
DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump.
In addition, leave enough space to install other cables without bending them excessively.
Note: The L-type STP connection cable is also offered. Contact Edwards if necessary.
CAUTION
connection cable]).
March 10 14 Issue 1-b
2.1.3 Bench
STP Series Turbomolecular Pump
A bench must be prepared by the customer to secure the STP pump. The shape and size of the
bench differ depending upon the type of STP pump. (see "HOW TO SECURE THE STP PUMP" in
the STP Pump Instruction Manual (B))
Obey the safety instructions given below and take note of appropriate precautions.
If you do not, you can cause injury to people and damage to equipment.
WARNING
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
WARNING
Design and secure the bench for the STP pump so that it can withstand the
maximum torque generated due to the occurrence of an abnormality/error. Refer to
"HOW TO SECURE THE STP PUMP" in the STP Pump Instruction Manual (B) for
abnormal torque.
2
INSTALLATION
CAUTION
Secure the customer-prepared bench and the vacuum equipment on the floor or peripheral
equipment and other equipment in accordance with the customer application. NEVER move them
while the STP pump is in operation.
Confirm the dimensions by the external appearance of the STP pump when designing the bench.
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of
the inlet port flange.
Note: When the external appearance of the STP pump is not in the manual, contact Edwards.
March 10 15 Issue 1-b
2.2 Unpacking
STP Series Turbomolecular Pump
2
2.2.1 Unpacking the STP pump
Check outer package for damage and that the delivery note corresponds to the purchase order.
INSTALLATION
Note: It is recommended to keep the packaging materials, such as the corrugated fiberboard
container and cushioning material for possible reuse. If the STP pump is damaged, return it
in its original package and contact Edwards or their distributor.
The STP pumps are heavy products. (Refer to "TECHNICAL DATA" in the STP Pump Instruction
Manual (B) for the mass of the STP pump) Use a crane or other appropriate means sufficient enough
to withstand the load when lifting the STP pump of 18kg or more.
Lift the STP pump with an eyebolt or a similar tool that uses the fitting hole attached to the inlet port
flange. When lifting the pump, use 2 or more ropes. (see Figure 10)
A crane, eyebolts, and rope due to lifting operations should withstand the load of three times or more
the weight of the STP pump. Use an eyebolt which confirms to ISO03266.
WARNING
The STP pumps are heavy products. Observe national laws/regulations, safety
standards and manufacturers instructions when lifting the STP pump.
Lifting devices must be used when lifting or moving the STP pump.
Lift the STP pump with the aid of a suspension tool under the base when installing the pump without
fitting hole.
Always lift the STP pump in stable places free of excessive shock or vibration to prevent it from
shaking or dropping.
Care should be taken not to scratch the flange of the STP pump. Before installing the STP pump,
check that there are no scratches on the surface.
Figure 10 - Example of lifting the STP pump
March 10 16 Issue 1-b
STP Series Turbomolecular Pump
When installing the STP pump horizontally using a crane or other appropriate, support pump casing,
or pump base (see Figure 11). DO NOT apply face on convex parts, such as the outlet port or
connectors by ropes. Doing so may the pump to fall, or deform and damage the parts.
2
A crane and rope due to lifting operations should withstand the load of three times or more the weight
of the STP pump. When lifting the pump, use 2 or more ropes.
Figure 11 - Example of lifting the STP pump (horizontal positioning)
INSTALLATION
When jacking up the bottom of the STP pump, a device due to jacking up the STP pump should
withstand the load of three times or more the weight of the STP pump.
March 10 17 Issue 1-b
STP Series Turbomolecular Pump
2.3 How to install the STP pump
2
Install the STP pump to the vacuum equipment as shown in Figure 12.
INSTALLATION
Use a lifter or the like when installing the STP pump to the vacuum equipment. Failure to do so
might hurt your back or cause injuries due to occurrence of an accident such as fall.
WARNING
An appropriate enclosure or a barrier which cannot be removed without using a tool
should be provided to prevent an operator from accessing the connection cables
When installing the STP pump and connecting/disconnecting cables, always power
off the primary power (switch the MAIN POWER to "OFF") and isolate
(Lockout/Tagout) the electrical energy source, water and gas, and other energy
sources on the vacuum equipment. Failure to do so may result in the inadvertent
rotation of the STP pump which may result in an accident, an electric shock or
Moreover, an accident caused by water leaks or gas leak may occur.
between the STP pump and its connectors provided.
WARNING
damage to equipment.
CAUTION
A supportive device such as lifter to installing the STP pump should withstand the load of three times
or more the weight of the STP pump.
March 10 18 Issue 1-b
*1
STP Series Turbomolecular Pump
2
1
4
2
*2
3
1. STP control unit 4. STP connection cable 7. Outlet port
*3
2. Power cable 5. (Vacuum equipment)
8. (Vacuum valve)
7
5
6
INSTALLATION
8
9
*3
3. TMS connection cable 6. Inlet port flange
9. (Backing-pump
[dry pump, and other])
*1
The STP pump can be installed through the damper (optional accessory).
*2
The TMS unit is an optional accessory. Refer to the STP Pump Instruction Manual (B) for more detailed information.
*3
The equipment and part within the parentheses must be prepared by the customer.
Figure 12 - Installation of the STP pump to the vacuum equipment
*3
March 10 19 Issue 1-b
2.3.1 Cleaning the seal
STP Series Turbomolecular Pump
2
INSTALLATION
A splinter shield is attached to the inlet port flange to prevent foreign materials from falling into the
ALWAYS install the STP pump in such a manner that foreign materials cannot easily fall into it.
Foreign materials falling into the STP pump through the splinter shield may result in product
WARNING
The wipes used to clean the flange of the pump might become hazardous waste
depending upon the solvent (alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
WARNING
Obey the safety instructions given below and take note of appropriate precautions
when disposing of hazardous waste. If you do not, you can cause injury to people
and damage to equipment.
CAUTION
STP pump. Always leave the splinter shield attached during operation.
CAUTION
damage.
Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing the STP pump to
the vacuum equipment.
Take the following measures for cleaning the seals:
• Clean off with a pure gas.
• Wipe with proper solvent (such as alcohol).
The splinter shield cannot perfectly prevent foreign materials from falling into the STP pump.
ALWAYS install the STP pump in such a manner that foreign materials cannot easily fall into it (for
example, Si wafers or samples are positioned above the STP pump). If this is not possible, always
attach a shield plate with sufficient conductance above the STP pump to prevent foreign materials
from falling into it. Foreign materials falling into the STP pump through the splinter shield may result
in product damage.
Take care not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before installing the STP pump. If
unsatisfactory, contact Edwards.
March 10 20 Issue 1-b
STP Series Turbomolecular Pump
2.3.2 STP pump installation positions
The STP pump can be installed vertically, horizontally, upside-down and/or slanted. (Depending
upon the pump model, the STP pump cannot be installed in some positions. Refer to "TECHNICAL
DATA" in the STP Pump Instruction Manual (B).)
2
INSTALLATION
1. Vacuum equipment 4. Slanted
2. Upside-down 5. Vertical
3. Horizontal
Figure 13 - STP pump installation positions
When installing the STP pump in a horizontal or slanted position, it is recommended to install it so
that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.
This makes it possible to reduce the load on the magnetic bearing and the heat generated by the
STP pump.
*
* Direction of gravity
Figure 14 - Positions of the outlet port on the horizontally or slanted installed STP pump
March 10 21 Issue 1-b
2.3.3 Secure the STP pump
STP Series Turbomolecular Pump
2
INSTALLATION
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the STP pump model and its installation
requirements. Secure the STP pump to the vacuum equipment as "HOW TO SECURE THE STP
PUMP" in the STP Pump Instruction Manual (B).
The STP pump is a component system when installing to the semiconductor equipment. Consider
the following when installing to the semiconductor equipment.
• Confirm that electric resistance value between the STP pump and vacuum equipment is set to
0.1 Ω or less after securing the STP pump to the vacuum equipment.
2.3.4 Precautions of vacuum piping
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
CAUTION
DO NOT open the STP pump through the flange to atmospheric air while the STP pump is
running. If atmospheric air flows into the STP pump, it may not function normally.
Depending upon the type of the backing-pump used, atmospheric air may reverse flow into the STP
pump when the backing-pump stops.
Attach a vacuum valve to the middle of the piping between the STP pump outlet port flange and the
backing-pump, and close the vacuum valve when the backing-pump stops.
In order to let the STP pump bring its performance into full play, follow the precautions below:
1. Be careful not to scratch the flange of the STP pump and vacuum equipments. Before installing
the STP pump, check whether or not there are scratches on the surface.
2. Use steel or aluminum tubes with a low gas loss to connect the vacuum equipment to the STP
pump.
3. Take measures for minimizing leakage. It is also necessary to degrease the tubes as regularly as
possible to keep the gas loss as low as possible.
4. There is a recommended backing-pump of pumping speed. (Refer to "TECHNICAL DATA" in the
STP Pump Instruction Manual (B). However, the pressure at the inlet and outlet ports varies with
the flow rate of gas, capacity of the vacuum equipment, length and material of the piping.
Select a backing-pump in accordance with the capacity and starting method (simultaneous
starting, starting after generating roughing vacuum) suitable for the vacuum equipment you use.
March 10 22 Issue 1-b
STP Series Turbomolecular Pump
5. Connect the STP pump and the backing-pump using stainless steel or aluminum alloy tubing,
flexible tubing, vacuum rubber or Teflon tubing, and other. The following measures can be used
to avoid the transmission of the vibration of the backing-pump to the STP pump and the vacuum
equipment:
• DO NOT place the backing-pump on the same floor as the vacuum equipment.
• Locate the backing-pump on a vibration-proof table. Attain 1/3 or less of the rotational speed of
the backing-pump, when adjusting the inherent frequency of the backing-pump installed on a
vibration-proof table.
• Attach a weight to the piping from the backing-pump, or secure the piping to a rigid, heavy
object free of vibration.
• Use a tube of high flexibility.
6. Depending upon the type of the backing-pump used, oil vapour may contaminate the inside of
the STP pump. Some oil viscosity could cause a malfunction when there is a strong reverse flow
of oil. Take the following measures to ensure the correct flow of oil:
• Attach a vacuum valve to the middle of the piping between the STP pump outlet port flange and
the backing-pump.
2
INSTALLATION
• Attach an absorption trap adjacent to the vacuum valve.
2.3.5 Vacuum piping method
1. Attach the inlet port to the high vacuum side.
(Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B) for maximum working
pressure).
2. Attach the outlet port to the inlet port flange of the backing-pump (primary side pump).
(Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B) for allowable backing
pressure).
Note: Maximum flow for water cooled and TMS unit are applicable under the condition listed in
"TECHNICAL DATA" and “TMS unit” in the STP Pump Instruction Manual (B).
Note: To attain the ultimate pressure, set the pressure at the outlet port flange to 1.3 Pa (10
or less. Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B) for the
ultimate pressure.
-2
Torr)
March 10 23 Issue 1-b
STP Series Turbomolecular Pump
2.3.6 Connecting the purge port
2
INSTALLATION
When pumping reactive or corrosive gases, introduce a dry N
order to protect the inside of the STP pump. Introduce a dry N
valve, needle valve or similar valve (must be prepared by the customer) from the purge port.
For instructions on how to introduce the purge gas, see Section 4.3.2.
Note: When not introducing the purge gas, close the purge port with the blank flange. Refer to
"TECHNICAL DATA" in the STP Pump Instruction Manual (B) for the position of a purge port.
2.3.7 Connecting the water cooling pipe
Secure the connection pipe to prevent water leakage and use cooling water under the conditions
provided in the STP Pump Instruction Manual (B). Install a secondly containment for liquids or a
water leak detector in the place (ex. cooling water ports) where cooling water may leak. Figure 15
shows the position of the cooling water ports. The STP pump in Figure 15 is a typical pump model.
Refer to the STP Pump Instruction Manual (B) for the configuration of each STP pump.
gas or other gas into the STP pump in
2
gas through the electromagnetic vent.
2
1
2
1. Baking heater 2. Cooling water port
Figure 15 - Positions of the cooling water port and baking heater
March 10 24 Issue 1-b
STP Series Turbomolecular Pump
2.3.8 Attaching a baking heater
WARNING
The surfaces of the STP pump and its peripheral equipment will become extremely
Check the rated voltage of the baking heater before use. The range of the available voltage of the
Wind the baking heater around the surface of the STP pump tightly. If the baking heater is not
1. Install the baking heater (optional accessory) near the inlet port flange in the perimeter of the
envelope.
hot when performing baking. NEVER touch them with bare hands.
CAUTION
backing heater (optional accessory) is display voltage ±10 %.
CAUTION
DO NOT apply excessive force to the cable for the baking heater.
CAUTION
wound tightly, the loose parts will overheat.
2
INSTALLATION
2. Affix the hot surface warning label attached on the surface of the pump seen well. (see Figure
15)
Procure protective parts for the baking heater, such as an earth leakage breaker or fuses when using
the baking heater.
2.3.9 Installation of the air cooling unit
Refer to "Air Cooling Method" in the STP Pump Instruction Manual (B) for the installation methods
and other details.
Note: The air cooling unit is not available depending on the STP pump model. Refer to the STP
Pump Instruction Manual (B) and confirm whether the air cooling unit can be used for the
STP pump.
2.3.10 Installation of the TMS unit
The TMS unit is an optional accessory. Refer to the STP Pump Instruction Manual (B) for installation
of the TMS unit.
Note: The TMS unit is not available depending on the STP pump model. Refer to the STP Pump
Instruction Manual (B) and confirm whether the TMS unit can be used for the STP pump.
March 10 25 Issue 1-b
2
INSTALLATION
STP Series Turbomolecular Pump
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March 10 26 Issue 1-b
STP Series Turbomolecular Pump
3 INSTALLATION OF THE STP CONTROL UNIT
This section is extracted from the STP Control Unit Instruction Manual (C). The Applicable control unit
differs depending upon the STP pump model. Refer to “TECHNICAL DATA” in the STP Pump
Instruction Manual (B). For full details, read each of the STP Control Unit Instruction Manual (C).
3.1 STP control unit
WARNING
A hazardous live voltage may exist at the connectors that are marked .
DO NOT touch the terminal. Doing so may result in electric shock. When
connecting/disconnecting the terminal connections, always power OFF (turn the
MAIN POWER "OFF") and isolate (Lockout/Tagout) the electrical energy source,
water and gas, and other energy sources on the vacuum equipment. Failure to do so
may cause the STP pump to rotate accidentally, which may injure operators seriously
or result in electric shock.
WARNING
DO NOT remove the connecter while the pump is rotating. The voltage might be
output to connector according to the rotational speed, and it causes the electric shock
or the failure.
3
INSTALLATION
The Applicable STP control unit differs depending upon the STP pump model. Refer to "TECHNICAL
DATA" in the STP Pump Instruction Manual (B).
3.1.1 SCU-800
X7 REMOTE
X6
X5 TMS
!
X3A
X1P CONNECTOR
!
!
X3B
X3B
AC POWER
ON
OFF
MAIN POWER
L
PE
(L1)
N
(L2)
F2 4A(F)
X2
!
F1 4A(F)
a) Front panel b) Rear panel
Figure 16 - SCU-800
March 10 27 Issue 1-b
3.1.2 SCU-750
3
INSTALLATION
STP Series Turbomolecular Pump
X5 TMS
X3AX3A
X3BX3B
X7 REMOTE
X1 P.CONNECTOR
!
!
!
<-A
STP CO NTROL UNIT
3.1.3 SCU-1400
STP CONTROL UNIT
X8 STP-LINK
DOWN
REMOTE
SELECT
ON
ENTER
ON.I
OFF.O
MAIN POWER
X2 AC POWER
N(L2) PE L(L1)
!!
AC100-120V 8A～*/200-240V 6A～
!
*Applicable only for specific model
POWER
TEMP CTRL
NORMAL
ACCEL BRAKE
START
FAILURE
RESET UP
STOP
View from A
a) Front panel b) Rear panel
Figure 17 - SCU-750
ON.I
OFF
OFF.0
POWER
TEMP CTRL
NORMAL
ACCEL
START
FAILURE
RESET UP
BRAKE
STOP
DOWN
REMOTE
ON
SELECT
ENTER
X2 AC POWER
MAIN POWER
!
X4 MOTOR
X5 TMS
!
!
X3AX3B
X1P CONNECTOR
X7 REMOTE
!
!
a) Front panel b) Rear panel
Figure 18 - SCU-1400
March 10 28 Issue 1-b
3.1.4 SCU-1500
STP CONTROL UNIT
X8 STP-LINK
STP Series Turbomolecular Pump
ON.I
OFF
OFF.0
POWER
TEMP CTRL
NORMAL
ACCEL
START
FAILURE
RESET UP
BRAKE
STOP
DOWN
REMOTE
ON
SELECT
ENTER
X2 AC POWER
MAIN POWER
!
X4 MOTOR
X5 TMS
!
!
a) Front panel b) Rear panel
Figure 19 - SCU-1500
3
X3AX3B
X1P CONNECTOR
X7 REMOTE
!
!
INSTALLATION
3.1.5 SCU-1600
STP CONTROL UNIT
X8 STP-LINK
POWER
TEMP CTRL
NORMAL
ACCEL
START
FAILURE
RESET UP
BRAKE
STOP
DOWN
REMOTE
ON
SELECT
ENTER
a) Front panel b) Rear panel
Figure 20 - SCU-1600
Note: Refer to the STP Control Unit Instruction Manual (C) for the functions of each switch and
connector.
March 10 29 Issue 1-b
3.2 Cable connection
STP Series Turbomolecular Pump
3
INSTALLATION
Refer to the STP Control Unit Instruction Manual (C) for detailed information of the cables.
3.2.1 STP connection cable
Figure 21 - SCU-750/SCU-800 STP connection cable
Figure 22 - SCU-1400/SCU-1500/SCU-1600 STP connection cable
March 10 30 Issue 1-b
3.2.2 Power cable
STP Series Turbomolecular Pump
3
INSTALLATION
Figure 23 - SCU-750 power cable
Figure 24 - SCU-800 power cable
Figure 25 - SCU-1400/SCU-1500/SCU-1600 power cable
March 10 31 Issue 1-b
STP Series Turbomolecular Pump
3.3 How to connect the cables
3
INSTALLATION
Use the STP connection cable and the power cable that Edwards has specified. The use of other
The STP connection cables and power cables differ depending upon the pump model. Refer to
Section 3.2, "Cable connection" or the STP Control Unit Instruction Manual (C) for details.
WARNING
When connecting/disconnecting cables, always power off the STP pump (switch the
MAIN POWER to "OFF") and isolate (Lockout/Tagout) the electrical energy source,
water and gas, and other energy sources on the vacuum equipment. Failure to do so
may result in the inadvertent rotation of the STP pump which may result in an
accident, an electric shock or damage to equipment. Moreover, an accident caused
by water leaks or gas leak may occur.
WARNING
DO NOT remove the connecter while the pump is rotating. The voltage might be
output to connector according to the rotational speed, and it causes the electric shock
cables may result in product damage.
or the failure.
CAUTION
CAUTION
Confirm the power voltage on the label. Connect the power cable securely to prevent incorrect
wiring.
CAUTION
DO NOT place heavy objects on the cables or bend them excessively. If any problem occurs in
cables, connectors or terminals, the STP pump may not function normally.
DO NOT apply voltage to each connector pin and DO NOT cause any short-circuiting between pins.
Install cables so that personnel are not exposed to risk of tripping or falling.
CAUTION
With each connector align the position of the guide key of the connectors and insert vertically so as
not to bend the pins. If a pin is bent, not only may the connector not function normally, but it may
make the pins contact, resulting in a malfunction. Lock and securely tighten each connector and
screw.
March 10 32 Issue 1-b
STP Series Turbomolecular Pump
CAUTION
DO NOT apply surge voltage exceeding 1 kV to the input power line. Always ground the power
cable to prevent electric shock.
Support each cable so as not to apply direct force to the connectors or terminals. Connect each cable
securely with caution, avoiding any obstacles as follows:
1. Connecting the STP connection cable
Connect the socket side of the STP connection cable to the STP connector of the STP pump and
connect the pin side to "P.CONNECTOR X1" of the STP control unit, and connect the plug (pin) side
"MOTOR X4" (equipped SCU-1400, SCU-1500 and SCU-1600) on the STP control unit.
2. Connecting the TMS connection cable (See STP Pump Instruction Manual (B) for use with the
TMS unit only)
Connect the pin side of the TMS connection cable to the "TMS X5" of the STP control unit.
3. Connecting the power (primary side) cable
Connect the power cable to the "AC POWER X2" on the STP control unit rear panel.
3
INSTALLATION
March 10 33 Issue 1-b
3
INSTALLATION
STP Series Turbomolecular Pump
This page intentionally blank
March 10 34 Issue 1-b
STP Series Turbomolecular Pump
4 OPERATION
This section is an extract from the STP Control Unit Instruction Manual (C). Read the STP Control
Unit Instruction Manual (C) of carefully before operating the STP pump.
4.1 Before starting the STP pump
CAUTION
NEVER connect or disconnect any cables while the power is ON.
NEVER turn the primary power OFF (turn the MAIN POWER "OFF") while the STP pump is in
rotation. DO NOT release the inlet port flange or outlet port flange into the atmosphere while the
STP pump is rotating.
After completing the installation of the STP pump carry out the following checks before starting:
1. Ensure the STP pump is installed correctly (refer to Section 2, “INSTALLATION OF THE STP
PUMP”).
2. Ensure all cables are securely connected and locked.
3. Ensure the correct supply voltage is applied.
4
OPERATION
4.1.1 Tuning
CAUTION
DO NOT turn off the primary power (DO NOT switch the breaker "OFF") during tuning. When doing
so, perform tuning again.
Tuning is required in the following cases in which the position of levitation may deviate from the
centre of the rotor's movable range:
• When purchasing only the STP pump or STP control unit and connect for the first time (The
error message is displayed upon performing the self test).
• When changing the length of the STP connection cable (not when changing the length of the
power cable).
• Connecting the different STP pump (model, serial No.) to the STP control unit after the tuning is
performed (The error message is displayed upon performing the self test).
Refer to the STP Control Unit Instruction Manual (C) for the method of the tuning.
March 10 35 Issue 1-b
STP Series Turbomolecular Pump
4.1.2 Operation of vacuum system
4
1. Starting backing-pump
OPERATION
DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type of the
backing-pump, doing so may cause a reverse flow of oil, which could contaminate the inside of the
Start the backing-pump before or simultaneously with the start of the STP pump. Open the vacuum
valve located at the outlet port flange side after starting the backing-pump.
2. Stopping backing-pump
DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type of the
backing-pump, doing so could cause a reverse flow of atmospheric air into the STP pump, which
Close the vacuum valve located at the outlet port flange side just before or after stopping the STP
pump. After closing the valve, stop the backing-pump.
Note: DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type
CAUTION
STP pump.
CAUTION
may result in a malfunction.
of the backing-pump, doing so could cause a reverse flow of oil, which could contaminate the
inside of the pump.
4.2 Pump operation
CAUTION
Avoid frequent start/stop operations as this may cause the STP pump to overheat.
There are two methods of operating the STP pump; MANUAL and REMOTE. Select one which suits
your vacuum equipment. Refer to the STP Control Unit Instruction Manual (C) for the MANUAL and
REMOTE operation setting method of the STP pump.
4.2.1 LED indication during operation
1. When performing the start operation, the STP pump accelerates and the "ACCEL." LED
illuminates. The LCD displays the current rotational speed in "ACCEL: ***00rpm" in 500 rpm
intervals (ACCELERATION state).
2. When the STP pump attains the rated speed of rotation, the "ACCEL." LED extinguishes, and
the "NORMAL" LED illuminates. The LCD displays "NORMAL: ***00rpm" (NORMAL state).
3. When stopping the STP pump, the "NORMAL" LED or "ACCEL." LED extinguishes, and the
"BRAKE" LED illuminates. The LCD displays "BRAKE: ***00rpm" (BRAKE state).
March 10 36 Issue 1-b
STP Series Turbomolecular Pump
4. When the rotational speed decreases to 500 rpm or less, the "BRAKE" LED extinguishes. The
LCD displays "Levitation" (LEVITATION state).
5. When performing the start operation, the STP pump can be accelerated even while it is stopping.
4
4.2.2 Starting the STP pump after a safety function operates
A safety function operates when an abnormality/error occurs in the STP pump or peripheral
equipment. To restart the STP pump, remove the cause of the abnormality/error after the "BRAKE"
LED extinguishes, and perform the RRESET operation. The "FAILURE" LED extinguishes and the
safety function is released (RESET operation). Then, performs the start operation.
For the safety functions and troubleshooting, refer to "Maintenance" in the STP Control Unit
Instruction Manual (C).
4.3 Gas pumping, cooling and baking the STP pump
4.3.1 Gas pumping
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
MSDS and a safety advice of gas supplier.
OPERATION
WARNING
When using pyrophoric gas, keep MSDS and a safety advice of gas supplier.
WARNING
When pumping gases, they may remain in the STP pump. Introduce a purge gas
and then exhaust all gases. Residual gases can cause an accident if/when the
pump is removed. Take measures according to MSDS to prevent an accident when
using toxic, reactive or combustible gases.
CAUTION
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards:
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
March 10 37 Issue 1-b
STP Series Turbomolecular Pump
4.3.2 How to introduce a purge gas
4
OPERATION
When pumping reactive or corrosive gases, introduce a purge gas to protect the inside of the STP
Connect a needle valve or a similar part to the purge port and introduce a dry N2 gas or other gas to
perform a gas purge (see Section 2.3.6, "Connecting the purge port").
Refer to “TECHNICAL DATA” in the STP Pump Instruction Manual (B) for the specification of each
The allowable purge gas pressure is from 0.1×105 Pa (atmospheric pressure) to 4.9×104 Pa (0.5
High-pressure at the inlet port may result in a noise. This is no abnormality/error.
4.4 Cooling the STP pump
When pumping gases or performing baking, always cool the STP pump.
Also, when performing baking, always cool the STP pump.
If the TMS unit is used, cool the STP pump with the method specified for the TMS unit.
CAUTION
pump. Not to do so may result in product damage.
CAUTION
pump for the proper amount of the gas purge to introduce.
kgf/cm2) on the introduction side.
4.4.1 Water-cooling method
The following precautionary procedures will need to be addressed:
• Use clean water as much as possible.
• Cooling water containing foreign materials may corrode or clog the cooling water pipe. Should
this occur, remove obstructions by feeding cooling water in the reverse direction.
• To prevent corrosion, connect a joint which is made of the same metallic materials as the joint
for water-cooling unit.
• When the STP pump is not to be used for a long period of time or it is to be moved after use,
introduce compressed air from one side of the cooling water port so that no water will remain
inside.
• When the STP pump is overheated due to shortage or suspension of water, the protective
function detects the overheated condition in the STP pump and stops the STP pump. As a
further safety procedure, attach a flow switch (not supplied) to the cooling water exit so that the
STP pump stops if abnormal cooling water flow occurs.
Note: The water-cooling unit is not available depending on the STP pump model. Refer to the STP
Pump Instruction Manual (B) and confirm whether the water-cooling unit can be used for the
STP pump.
Note: Refer to the STP Pump Instruction Manual (B) for the condition for the water-cooling unit.
March 10 38 Issue 1-b
4.4.2 Air-cooling method
STP Series Turbomolecular Pump
When water-cooling is not available, use an air-cooling unit (optional accessory). Refer to the STP
Pump Instruction Manual (B) for installation and other details.
Note: The air-cooling unit is not available depending on the STP pump model. Refer to the STP
Pump Instruction Manual (B) and confirm whether the air-cooling unit can be used for the
STP pump.
4.5 Baking the STP pump
WARNING
The surfaces of the STP pump and its peripheral equipment will become extremely
The TMS unit and the baking heater cannot be used together at the same time.
To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment
and STP pump.
hot. Never touch them with bare hands.
CAUTION
4
OPERATION
When baking the STP pump, always cool it to prevent overheating.
Start baking after cooling is started.
Set the temperature of the baking heater to 120 °C or less (an optional baking heater is set to 110 °C
or less).
DO NOT introduce gases during baking, or this will prevent overheating.
To exhaust the gas discharged from the vacuum equipment and the inner wall of the STP pump, run
the STP pump during baking.
March 10 39 Issue 1-b
STP Series Turbomolecular Pump
4.6 How to use the TMS unit
4
OPERATION
See the STP Pump Instruction Manual (B) for the installation method of the TMS unit.
4.6.1 Parameter set mode
Before operating the TMS unit, set the "TMS Function" to "ENABLE". Setting can be performed in
Parameter Set Mode. Parameter set mode is used to set the different parameters of the STP pump
and the STP control unit.
Refer to "Parameter Set Mode" in the STP Control Unit Instruction Manual (C) for details on how to
switch the function setting. Switch the "TMS Function" setting of the STP control unit to "DISABLE" to
stop TMS function.
4.6.2 Starting/stopping the TMS unit
When the STP pump is in the power ON state, the TMS unit operates regardless of the status of the
STP control unit. When the STP pump malfunctions, the TMS unit stops.
While the TMS unit is in operation, the "TEMP CTRL" LED of the STP Control Unit illuminates.
4.6.3 Temperature control
When the temperature of the STP pump base is lower than the setting value, the TMS heater is
turned "ON", and the TMS valve is turned "OFF" to heat the STP pump. When the temperature of the
STP pump base is higher than the setting value, the TMS heater is turned "OFF", and the TMS valve
is turned "ON" to cool the STP pump. The LCD displays the actual temperature of the STP pump
base as "TMS TEMP: ** ºC".
March 10 40 Issue 1-b
STP Series Turbomolecular Pump
5 SAFETY FUNCTIONS
The STP pump is provided with safety functions for various abnormalities/errors. If an
abnormality/error is found when using the STP pump, check it and take measures in accordance with
the following procedures. If you cannot trace it or if the STP pump does not function normally after
the troubleshooting in the STP Control Unit Instruction Manual (C), contact Service office.
5.1 Safety functions
5.1.1 Power failure
When the power voltage drops due to a power failure or another fault, the normal operation of the
magnetic bearing is maintained at the high rotational speed using the regenerative energy of the
rotating rotor (backup operation during a power failure).
The lowest rotational speed to which the magnetic bearing can operate at a power failure is called a
backup rotational speed. The lowest backup rotational speeds vary according to the model of STP
pump used, refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B).
1. When the rotational speed is at backup rotational speed or more at a power failure:
• The STP control unit detects any power failure of 2 seconds or more and the STP pump
decelerates. At this time, the "POWER" LED extinguishes and the "FAILURE" LED illuminates.
5
SAFETY FUNCTIONS
• The LCD displays "Mains Failure". An alarm signal is output from REMOTE X7 pins (14)-(33)
and (15)-(33). When the rotational speed reaches the backup rotational speed, the rotor lands
on the touch down bearing and stops.
• The "FAILURE" LED extinguishes and the LCD is turned off. The alarm signal output is reset.
• The STP control unit does not detect a power failure of less than 2 seconds and the STP pump
will continue to rotate.
2. When the rotational speed is less than backup rotational speed at a power failure:
• The STP control unit does not detect the power failure. The rotor lands on the touch down
bearing and stops. Refer to "TECHNICAL DATA" in the STP Pump Instruction Manual (B).
5.1.2 Operation after a power recovery
The magnetic bearing operation, LED and LCD messages are recovered after a power recovery.
The "FAILURE" LED extinguishes.
Press the "START" switch to reaccelerate the STP pump.
Note: Establish a procedure so that the power can be supplied to the STP control unit immediately
after a power recovery.
March 10 41 Issue 1-b
STP Series Turbomolecular Pump
5.1.3 Abnormal state of magnetic bearing
5
SAFETY FUNCTIONS
CAUTION
When an abnormality/error occurs in the magnetic bearing, check the STP pump as well as the
STP control unit. If "FAILURE" cannot be released after reset operation, contact Service office.
When the magnetic bearing does not function normally due to a breakage of the STP connection
cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor lands
on the touch down bearing and stops. The "FAILURE" LED illuminates and the LCD displays error
message "Disturbance *".
5.1.4 Excessive vibration
When serious vibration or mechanical shock causes the rotor to come in contact with the touch down
bearing (due to external vibration/impact, intrusion of atmosphere or foreign matter into the STP
pump or rotor imbalance), the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Disturbance *".
5.1.5 Motor driver overload
If the STP pump does not attain the rated speed within approximately 30 minutes after starting or
when the ACCELERATION state remains unchanged during operation for approximately 30 minutes,
the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Driver Overload".
5.1.6 Overheating inside the STP pump
If the motor inside the STP pump overheats due to an abnormal high temperature or overload
operation, the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Motor Overheat".
March 10 42 Issue 1-b
STP Series Turbomolecular Pump
5.1.7 Overheating inside the STP control unit
The temperature in the STP control unit increases when the ventilating duct is blocked or the ambient
temperature is high. The LCD displays error message "CAUTION: CNT heat*" when the inside of the
STP control unit overheats. In this case, the pump does not stop.
When the STP control unit overheats continuously, the STP pump decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "CNT Overheat *".
5.1.8 Overspeed
When the rotational speed of the STP pump exceeds the specified rotational value due to a failure in
the motor driver, the MAIN POWER on the STP control unit switches "OFF". The STP pump has no
power supplied, decelerates and stops.
The "FAILURE" LED illuminates and the LCD displays error message "Overspeed *".
5.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit)
If the temperature of the STP pump base unit is higher than the setting value by 10 °C (18 °F) or
more due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE"
LED illuminates and the LCD displays error message "TMS Higher Temp". The heater is switched
OFF and the TMS valve is operated. Continue to operate the TMS valve while "TMS Higher Temp" is
displayed after the pump stops.
5
SAFETY FUNCTIONS
If the temperature of the STP pump base unit is lower than the setting value by 10 °C (18 °F) or more
due to the occurrence of an abnormality/error in the TMS heater or other fault, the "FAILURE" LED
illuminates and the LCD displays the error message "TMS Lower Temp". The heater and the TMS
valve are switched OFF and the STP pump decelerates and stops.
Note: "TMS Lower Temp" is not detected for a certain time when the STP pump starts.
When an abnormality/error occurs in the TMS connection cable, the STP pump decelerates and
stops. The heater and the TMS valve are switched OFF. The "FAILURE" LED illuminates and the
LCD displays the error message "T.Cable Disconnect".
5.1.10 Failure of the air-cooling fan (for SCU-800 only)
When the air-cooling fan in the STP control unit locks and stops, the "FAILURE" LED illuminates and
the LCD displays error message "Driver Failure" and "Driver Fan Failure". The STP pump
decelerates and stops.
Note: Refer to the STP Control Unit Instruction Manual (C) for other error messages.
March 10 43 Issue 1-b
5
SAFETY FUNCTIONS
STP Series Turbomolecular Pump
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March 10 44 Issue 1-b
STP Series Turbomolecular Pump
6 MAINTENANCE AND INSPECTION
6.1 Maintenance and inspection
When performing maintenance and inspections of the STP pump, exhaust gases
inside the STP pump thoroughly. Residual gases may cause an accident when
removing the STP pump. To prevent an accident, confirm the characteristics of
gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain
from the gas supplier. Wear personal protective clothing if necessary.
Before carrying out any maintenance or inspections on the STP pump and/or the
control unit, power off the primary power (turn the MAIN POWER "OFF"), confirm
that the LED and LCD are extinguished, and then isolate (Lockout/Tagout) the
electrical energy source, water and gas, and other energy sources on the vacuum
equipment. Failure to do so may result in the inadvertent rotation of the STP pump
which may result in an accident, an electric shock or damage to equipment.
Moreover, an accident caused by water leaks or gas leak may occur.
DO NOT remove the connecter while the pump is rotating. The voltage might be
output to connector according to the rotational speed, and it causes the electric
WARNING
WARNING
WARNING
shock or the failure.
6
MAINTENANCE AND INSPECTION
WARNING
The wipes used for clean and decontamination might become hazardous waste
DO NOT touch any place other those specified when performing maintenance or inspecting the
pump and NEVER open any panel because it could cause shock, malfunction, or short circuit.
Power OFF the peripheral equipments before performing maintenance and inspections.
Only Edwards will replace the maintenance parts, and will execute repair and overhaul. Contact
Service office.
depending upon the solvent (alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
CAUTION
March 10 45 Issue 1-b
6.2 Cleaning
STP Series Turbomolecular Pump
6
MAINTENANCE AND INSPECTION
The method for cleaning the STP pump is as follows:
• Clean the outside of the STP pump with proper solvent as required. An alcohol solvent can be
used.
• Clean off with a pure gas when dust has accumulated in the connector.
• If the label of the STP pump has been damaged, contact Edwards.
The decontamination (overhaul) in the STP pump is executed in Service office. When an overhaul is
needed, contact Service office.
6.3 Inspecting the deposit
CAUTION
Leaving the STP pump without removing the deposit may cause the STP pump to be corroded
beyond repair.
Deposit may have accumulated inside the STP pump depending upon the type of the vacuum
equipment installed in the STP pump. An increase in the amount of deposit may lead to a
malfunction of the STP pump.
Therefore, perform regular maintenance (once every three to six months as a target).
Inspect the inside of the outlet port for adhesion of deposit while watching the outlet port. If deposit
has accumulated to some extent, an overhaul (cleaning) is required. Contact Service office.
Note: The costs of troubleshooting problems resulting from deposit will be at your own charge even
during the warranty period.
If a problem resulting from deposit occurs inside the STP pump, hermetically seal the inlet port, outlet
port, purge port, and leak port flanges, and immediately return them to Service office.
For the transport method, see Section 6.5, "Transporting for repair or overhaul".
Contact with the atmosphere may cause a reaction of the deposit. DO NOT open the STP pump to
the atmosphere.
Edwards can supply a Temperature Management System (TMS) unit which will keep the temperature
high inside the STP pump and prevent the accumulation of deposit. For details, contact Edwards.
March 10 46 Issue 1-b
6.4 Overhaul
STP Series Turbomolecular Pump
Deterioration or abrasion of the internal parts of the STP pump will cause a failure.
The recommended maintenance intervals for different process applications are tabulated below:
Process Period Remarks
Metal Etch Process
(deposition)
*1
1 year Processes resulting in large amount of deposits in
the pump will require more frequent service.
Other Etch Processes 2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Etching
It is recommended to change the pump rotor after 5 years due to accumulated wear of the
protective plating material
Other semiconductor process 2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Clean applications
5 years No gases used. (Only vacuum pumping)
(Only vacuum pumping)
Other use 2 years Dependent on application, contact Edwards.
*1
"Etching" includes semiconductor etching and LCD etching.
6
MAINTENANCE AND INSPECTION
Note: The rotor blade and the touch down bearing inside the STP pump will be worn out and lose
their function by continual operation. When the STP control unit displays "w" or "Warning", it
is essential to have the touch down bearings replaced.
The costs of replacing parts that need to be replaced because of deterioration or abrasion will be at
the customers charge.
When overhaul of the STP pump is needed, contact Service office.
March 10 47 Issue 1-b
STP Series Turbomolecular Pump
6.5 Transporting for repair or overhaul
6
MAINTENANCE AND INSPECTION
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Wear
When returning the STP pump which has used any kind of gases to Service office,
When returning the STP pump to Edwards, be sure to pack it well to prevent external damage. If
the "Return Procedure" has not been satisfied, Edwards will not be responsible for any troubles.
ensure the "Return Declaration" form has been completed by filling, in the
appropriate space, the type of gas(s) used and the precautions taken.
To prevent an accident during transportation follow the instructions of the "Return
personal protective clothing if necessary.
WARNING
WARNING
Procedure".
CAUTION
Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.
To avoid any accident by gases or corrosion inside the STP pump, particularly when corrosive,
reactive or flammable gases have been used:
• Vacuum and hermetically seal the STP pump before transport.
• Specify the type of gases used and handling precautions in the "Return Declaration".
• When returning the STP pump to Edwards, be sure to pack it well to prevent external damage.
Use similar or superior packaging material as originally supplied.
"Return Procedure" and the "Return Declaration" are included at the end of the Instruction Manual.
When additional sheets are needed, contact the Service office.
Note: The costs of cleaning and overhaul of the STP pump will be at the customers charge.
Note: When returning the STP pump to Edwards, fill in the necessary items in the "Return
Declaration" and fax it to Service office.
March 10 48 Issue 1-b
STP Series Turbomolecular Pump
7 Storage and disposal
7.1 Storage of the STP pump
When planning not to use the STP pump over a long period (more than a few months), follow the
precautions below:
1. Store the STP pump in a vertical position.
2. Close the inlet port of the STP pump and vacuum it using a backing pump.
3. Introduce dry N
4. Close the outlet port and purge port.
5. If the STP pump is water cooled, introduce compressed air from one side of the cooling water
port so that no water remains in the STP pump.
6. DO NOT store the STP pump in the following areas:
• Areas of high humidity, (if it must be stored in a place of high humidity, insulate it from the
outside and use a dehumidifying agent.)
• Areas prone to temperature extremes. High temperatures of no more than +55 °C (131 °F), and
low temperatures of less than –25 °C (13 °F).
• Areas where corrosive gases may exist.
• Areas subjected to water/dampness.
gas or dry air from the outlet port or the purge port.
2
7
STORAGE AND DISPOSAL
• Areas subjected to excessive dust.
• Areas with insufficient ventilation.
• Areas subjected to strong magnetic and electric fields or radiation.
March 10 49 Issue 1-b
7.2 Disposal
STP Series Turbomolecular Pump
7
STORAGE AND DISPOSAL
Dispose of the STP pump as industrial waste in accordance with all local and national safety and
environmental standards.
Note: Edwards will not be responsible for problems during or after disposal.
When disposing of the STP pump, exhaust gases inside the STP pump thoroughly.
Residual gases may result in an accident when disposing of the STP pump. If the
STP pump has been used with reactive or corrosive gasses, always clean
thoroughly before disposing of it to avoid any injury. Confirm the characteristics of
gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from
WARNING
the gas supplier.
March 10 50 Issue 1-b
STP Series Turbomolecular Pump
8 SERVICE, SPARES AND ACCESSORIES
8.1 Introduction
Edwards products, spares and accessories are available from Edwards companies and from a
network of distributors, which are listed on the last page of this document. A majority of these centres
employ Service Engineers who have undergone comprehensive Edwards training courses. Order
spare parts and accessories from your nearest Edwards company or distributor. When you order,
state for each part required:
• Model and parts number of your STP pump
• Serial number (if any)
• Item number and description of part
8.2 Service
Edwards products are supported by a world-wide network of Edwards Service office. Each Service
office offers a wide range of options including: equipment decontamination; service exchange; repair;
rebuild and testing to factory specifications. Equipment, which has been serviced, repaired or rebuilt,
is returned with a full warranty.
Your local Service office can also provide Edwards engineers to support on-site maintenance,
service or repair of your equipment.
8
SERVICE, SPARES AND ACCESSORIES
For more information about service options, contact your nearest Service office or Edwards.
8.3 Spares
Touch down bearing: When exchanging, contact the Service office. Touch down bearing should be
replaced in Service office.
The possession periods of maintenance parts is for at least 7 years after the products is discontinued.
Contact Service office, when replacement is required.
March 10 51 Issue 1-b
8.4 Accessories
STP Series Turbomolecular Pump
8
SERVICE, SPARES AND ACCESSORIES
The following is a list of accessories that can be purchased by contacting Edwards.
Items Application purpose Remarks
Instruction Manual (A)
Instruction Manual (B)
Instruction Manual (C)
*1
Generic Instruction Manual This manual
*1
Pump Specific Information
*1
Control unit Instruction Manual
applicable to your STP pump
STP control unit For control the STP pump Refer to the STP Pump
Power cable Primary input power Standard cable length is 5 m. 10
STP connection cable Connection cable between the STP
pump and the STP control unit
Instruction Manual (B) for the
applicable STP control unit.
m and 20 m versions are
available. Contact Edwards for
further information.
Standard cable length is 5m. 10
m and 20 m versions are
available. Contact Edwards for
further information.
TMS unit *2 Control the STP pump temperature Except STP-603/1003 series
Air-cooling unit *2 For cooling the STP pump
Baking heater *2 For baking the STP pump
Vibration damper *2 For vibration removal of the STP pump
*1
STP pump consists of the three-volumed Instruction Manuals.
*2
Optional accessory
March 10 52 Issue 1-b
For more information, contact the nearest Service Office.
Manufacturer:
Edwards Japan Limited
1078-1, Yoshihashi, Yachiyo-shi, Chiba 276-8523 JAPAN
Telephone: Domestic 047-458-8822
International +81-47-458-8822
Facsimile: Domestic 047-458-8833
International +81-47-458-8833
Copyright 2010 Edwards Japan Limited. All rights reserved.
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