Edwards STP-451 Series Instruction Manual

MT-21E-003-F

STP Series Turbomolecular Pumps

STP-301/451 Series

(Third Edition - f)

Instruction Manual

Read through the Safety Precautions and each section of this Manual carefully before using the STP pump.

Keep this Manual in a place where you can quickly access it at any time.

Jan. 2008

STP-301/451 Series Instruction Manual

SAFETY PRECAUTIONS

The Safety Precautions in this Manual constitute guidelines to protect operators, the STP pump and its peripheral equipment. To avoid personal injury and prevent product and/or peripheral equipment damage, observe the Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety standards and so on). If the equipment is used in a manner not specified by Edwards, the protection provided by the equipment may be impaired.

SYMBOLS

The following symbols are used in this manual:

Death or Serious Personal Injury

Failure to follow the guidelines marked with this symbol may result in death or serious personal injury.

Minor Personal Injury, Product and/or Peripheral Equipment Damage

Failure to follow the guidelines marked with this symbol may result in minor personal injury, product and/or peripheral equipment damage.

NOTICE

Items you must follow during operation and maintenance.

ATTENTION : refer to this manual.

Edwards Japan Limited (hereafter called Edwards) cannot perfectly anticipate circumstances of all of hazards or problems. The scope of anticipation is limited to the precautions included in the

and specified in this manual.

STP-301/451 Series Instruction Manual

◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to the

specified method. Failure to do so may lead to serious personal injury, product and/or peripheral equipment damage if any abnormality/error occurs in the rotor.

◇ The STP pump operates at high temperatures while the baking heater is in operation.

NEVER touch the STP pump and its peripheral equipment while the baking heater is in operation. Operators can burn hands.

◇ Execute the following to prevent an accident caused by the gas.

• Check the properties of the gas to be used, referring to the Material Safety Data Sheet

(MSDS) you obtain from the gas supplier. (explosive・combustible・toxic・corrosive, etc) And, keep MSDS and a safety advice of gas supplier.

• Warn of the danger of the gas with the warning label when the use gas is hazardous chemicals materials.

• Always execute gas purge in the pump with the inert gas, and then exhaust residual gases thoroughly from the STP pump when removing the STP pump from the vacuum equipment.

• Secure safety by wearing personal protective equipment when using the gas which might influence damage health. In addition, take appropriate measure for depending upon the properties of the gas to be used.

◇ Exhaust residual gas thoroughly when disposing of the STP pump. If the STP pump is used

for any toxic or reactive gas, always clean the STP pump and dispose of it as industrial waste in accordance with guidelines given by the national and/or local government. Residual gas in the STP pump may cause an accident which, for certain gases, may involve serious injury or death.

STP-301/451 Series Instruction Manual

◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may

corrode the STP pump and damage it.

◇ A hazardous live voltage may exist at connector/terminal that marked .

DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to terminal, always power OFF the STP pump (Switch the breaker "OFF").

◇ Always check the STP pump has stopped, then turn OFF the primary power (switch the

breaker "OFF") and isolate the electrical energy source (Lockout/Tagout) on the vacuum equipment before proceeding to any of the following operations. Failure to do so may cause the STP pump to rotate accidentally, which may injure operators seriously or result in electric shock. Moreover, do not remove the connecter while the pump is rotating. The voltage might be output to connector according to the rotational speed, and it causes the electric shock or the failure.

• Connect or disconnect cables;

• Perform maintenance and inspections such as replacement of fuses as well as

inspections of deposit and/or the air cooling fan; or

• Perform investigations into probable causes and action/measures taken in the event of occurrence of a problem.

◇ DO NOT perform the insulation test (insulation resistance test and withstand voltage test) to

the STP control unit and STP pump. When performing the insulation test to your equipment, turn "OFF" the STP control unit. The varistor for the power supply line protection is installed to the STP control unit. DO NOT perform the insulation test with the varistor installed. Doing so may result in product damage.

◇ When removing or installing the pump or at maintenance and inspection, follow the

precautions below. Failure to do so might hurt your back or cause injuries due to occurrence of an accident such as fall.

• Use a crane or the like when lifting the heavy product of 18kg or more.

• When lifting by hands for unavoidable reason, two or more people must always conduct

it.

• When lifting STP control unit with handles, support bottom of STP control unit, do not have only handle.

◇ When "emergency off" (EMO) circuit is installed in the vacuum equipment, consider the

following to stop the STP pump safely when the EMO circuit operates.

• When the EMO circuit operates, atmosphere might be introduced in the STP pump depending upon the backing pump. Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump when the EMO circuit operates. (example: shut the valve) When atmosphere is introduced into the STP pump, the touch down bearing may not operate normally.

◇ Install the STP control unit not only by fitting it with the front panel fitting screws but also by

supporting it from the bottom side. Fitting the STP control unit with the screws only cannot sustain its weight, and therefore resulting in product damage.

◇ Always use the STP pump and STP control unit with same model name, which are specified

on their own nameplate. If use the units having different model names, they may not be used. In the latter case, contact service office. If you use the units having the same model name but different serial numbers or change the length of the STP connection cable, the tuning is required. They may not function normally when they are used without tuning. Once tuning is completed, re-tuning is not required unless the configuration (the STP pump serial number, the STP control unit serial number, and the STP connection cable length) is changed.

STP-301/451 Series Instruction Manual

STP-301/451

Series

◇ Use the STP connection cable that has a label affixed

The use of different cables may result in product damage.

◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so

may result in electric shock or product damage.

◇ NEVER remove the splinter shield from the STP pump. Doing so may result in product

damage.

◇ DO NOT put foreign objects into the STP pump. Doing so may result in product damage. ◇ Always use the power voltage specified on the nameplate for the primary power voltage of

the STP control unit. Wire the power cable securely. Incorrect wiring may result in electric shock or product damage.

◇ The wipes used for clean the flange of the pump might become hazardous waste depending

upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the regulations of each national and/or local government.

◇ NEVER turn OFF the primary power (DO NOT switch the breaker "OFF") while the STP

pump is rotating. Doing so may result in product damage.

◇ Perform investigations into probable causes and remove them before restarting the STP

pump in the event of the occurrence of a problem. The use of the abnormal STP pump may result in product damage.

◇ DO NOT move the STP pump and the STP control unit while the STP pump is in operation.

Doing so may result in product damage.

STP-301/451 Series Instruction Manual

INTRODUCTION

Thank you very much for purchasing Edwards’ turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and maintenance of the following series of the STP-301/STP-451 turbomolecular pump:

Model Name Specification

• STP-301 High-vacuum type

• STP-451 High-vacuum type

• STP-301C High-vacuum type, chemical specific

• STP-451C High-vacuum type, chemical specific

For the specifications of other models, contact Edwards. In this manual, the above STP pump series is collectively called the "STP pump".

APPLIED STANDARDS

The STP pump conforms to the following directives and standards:

◇ Applied Directives

• EC Machinery Directive

• EC Electromagnetic Compatibility Directive

• EC Low Voltage Directive

◇ Applied Standards

• EN292-1

• EN292-2

• EN60204-1

• EN61326 (class A)

• EN61000-6-2

◇ Applied Standards (Only a some model)

• UL61010A-1, 2002 (Standard for Electrical Equipment for Laboratory Use; Part 1 : General Requirements)

: Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)

: Contact Edwards about recognized model

STP-301/451 Series Instruction Manual

PRECAUTIONS

1) No part of this manual may be reproduced in any form by any means without prior

written permission from Edwards.

2) Edwards pursues a policy of continuing improvement in design and performance of this

product. The right is, therefore, reserved to vary specifications and design without notice. Understand that the product you purchased and its contents including specifications described in this manual may differ.

REQUEST

If you find inaccuracies or errors in this manual, advise distributor or the nearest Service office.

STP-301/451 Series Instruction Manual

LIMITED WARRANTY

This WARRANTY applies to the customer to whom Edwards has delivered this product.

1. WARRANTY PERIOD:

Edwards warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards.

2. ITEM WARRANTED:

1) This warranty applies only to the product delivered from Edwards to the customer.

2) If any defect is found during this period, Edwards will, at its option, repair or recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at the customer's own charge.

3. DISCLAIMER:

Edwards makes no warranty with respect to any damage occurred due to any of the following during the warranty period:

1) Handling, operation or maintenance other than that specified herein;

2) Failure to follow any of the warnings or cautions enumerated under

or ;

3) Installation, operation or maintenance using parts which are not specified by Edwards;

4) Maintenance personnel other than those authorized by Edwards or service office have disassembled, reconditioned, or tampered the product;

5) Defect resulting from the not-specified use of the product.

6) When the product is used under special conditions without obtaining the written consent of Edwards (Particular gases, strong magnetic field and the radiation are added to the product.);

7) Defect resulting from deposit;

8) Water cooling system defect resulting from water quality used;

9) Defect resulting from the installation of the product (Exclude the installation by authorized personnel.)

10) Deterioration in the external because of use (Discoloration, scratches and so forth)

11) Product damage occurred during transport or other factors not attributable to Edwards;

12) Product breakage or damage due to natural disasters, fire or other external factors;

13) Deterioration in the basic performance due to the use of the product beyond limits of the use;

14) Any direct, incidental or consequential damage resulting from the use of the product;

15) When continuously operated without overhaul after the WARNING indication ("WARNING" message) on the LCD display;

16) Overhaul and replacement of maintenance parts;

4. SPARE PARTS:

z Fuse and air cooling fan for control unit z Touch down bearing z Heater

STP-301/451 Series Instruction Manual

TABLE of CONTENTS

SAFETY PRECAUTION

INTRODUCTION

LIMITED WARRANTY

1 Precautions for Safe Operation of the STP Pump.........................1-1

1.1 Usable Gases..................................................................................................................1-1

1.2 Precautions on Maintenance and Inspection...................................................................1-1

1.3 Labels..............................................................................................................................1-2

2 Operation Principle of the STP Pump ...........................................2-1

3 Unpacking .....................................................................................3-1

3.1 Unpacking the STP Pump and the STP Control Unit ......................................................3-1

3.2 Accessories.....................................................................................................................3-1

4 Installation of the STP Pump.........................................................4-1

4.1 Name and Function of Each Part ....................................................................................4-1

4.2 Precautions Before Installation........................................................................................4-3

4.2.1 Operating Environment ..........................................................................................4-3

4.2.2 Installation Area .....................................................................................................4-4

4.2.3 Bench.....................................................................................................................4-4

4.3 How To Install the STP Pump .........................................................................................4-5

4.3.1 Cleaning the Seal...................................................................................................4-6

4.3.2 STP Pump Installation Positions ............................................................................4-7

4.3.3 How to Secure the STP Pump ...............................................................................4-8

4.3.4 Vacuum Piping .....................................................................................................4-12

4.3.5 Connecting the Ground Cable..............................................................................4-13

4.3.6 Connecting the Purge Port (For the Chemical Specific Pump, Type C)...............4-14

5 Baking, Cooling the STP Pump and Gas Pumping .......................5-1

5.1 Baking the STP Pump .....................................................................................................5-1

5.1.1 Attaching a Baking Heater .....................................................................................5-1

5.2 Cooling the STP Pump....................................................................................................5-2

5.2.1 Water Cooling Method ...........................................................................................5-2

5.2.2 Air Cooling Method.................................................................................................5-3

5.3 Gas Pumping...................................................................................................................5-4

5.3.1 How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]................5-4

6 Installation of the STP Control Unit ...............................................6-1

6.1 Name and Function of Each Part ....................................................................................6-1

6.1.1 Front Panel.............................................................................................................6-1

6.1.2 Rear Panel .............................................................................................................6-3

6.1.3 Top Panel...............................................................................................................6-5

6.1.4 Side Panel (Left) ....................................................................................................6-6

6.2 Precautions before Installation ........................................................................................6-7

STP-301/451 Series Instruction Manual

6.2.1 Operating Environment ..........................................................................................6-7

6.2.2 Insulation Test........................................................................................................6-7

6.2.3 Installation Area .....................................................................................................6-8

6.3 Attaching the STP Control Unit Front Panel to a Rack ....................................................6-9

6.4 Cable Connection..........................................................................................................6-10

6.4.1 Name and Dimensions of Each Cable .................................................................6-10

6.4.2 How to Connect the Cables..................................................................................6-12

6.5 Connecting to Semiconductor Equipment .....................................................................6-15

6.5.1 Connecting to Power............................................................................................6-15

6.5.2 Emergency Off Circuit (EMO Circuit) ...................................................................6-15

7 How to Start/Stop the STP Pump ..................................................7-1

7.1 Before Starting ................................................................................................................7-1

7.2 Start Procedures .............................................................................................................7-2

7.3 Stop Procedures..............................................................................................................7-2

7.4 Manual Operation............................................................................................................7-3

7.4.1 Powering ON..........................................................................................................7-3

7.4.2 Starting the STP Pump ..........................................................................................7-3

7.4.3 Stopping the STP Pump.........................................................................................7-3

7.4.4 Starting the STP Pump after Stopping ...................................................................7-4

7.4.5 Powering OFF ........................................................................................................7-4

7.4.6 Starting the STP Pump after a Safety Function Operates......................................7-4

7.5 Remote Operation (I/O TB2) ...........................................................................................7-5

7.5.1 Powering ON..........................................................................................................7-5

7.5.2 Starting/Stopping the STP Pump ...........................................................................7-5

7.5.3 Starting the STP Pump After Stopping...................................................................7-6

7.5.4 Powering OFF ........................................................................................................7-6

7.5.5 Starting the STP Pump after a Safety Function Operates......................................7-6

7.6 Remote Operation (CON4: Optional Accessory) .............................................................7-7

7.6.1 Powering ON..........................................................................................................7-7

7.6.2 Starting/Stopping the STP Pump ...........................................................................7-7

7.6.3 Starting the STP Pump after Stopping ...................................................................7-8

7.6.4 Powering OFF ........................................................................................................7-8

7.6.5 Starting the STP Pump after a Safety Function Operates......................................7-8

8 Remote Input/Output Signal Terminal Blocks................................8-1

8.1 I/O TB1 Terminal Block ...................................................................................................8-1

8.2 I/O TB2 Terminal Block ...................................................................................................8-5

8.3 CON4 Connector (Optional accessory) ...........................................................................8-7

8.3.1 Remote Input Signals.............................................................................................8-7

8.3.2 Remote Output Signals ..........................................................................................8-9

8.3.3 Remote Cables (Optional Accessories) ...............................................................8-11

9 Adjustment Method .......................................................................9-1

9.1 Tuning .............................................................................................................................9-1

9.1.1 Tuning Method .......................................................................................................9-1

9.2 Setting the Rated Speed .................................................................................................9-3

9.2.1 When Setting DSW-B No. 1 to ON under Power-ON State....................................9-3

9.2.2 When Setting DSW-B No. 1 to ON before Powering On ........................................9-4

STP-301/451 Series Instruction Manual

10 Safety Functions .........................................................................10-1

10.1 Power Failure................................................................................................................10-1

10.2 Abnormal State of Magnetic Bearing.............................................................................10-3

10.3 Excessive Vibration .......................................................................................................10-3

10.4 Motor Driver Overload ...................................................................................................10-3

10.5 Overheating Inside the STP Pump ................................................................................10-3

10.6 Overheating Inside the STP Control Unit ......................................................................10-3

10.7 Overspeed.....................................................................................................................10-3

11 Troubleshooting, Maintenance and Inspection............................11-1

11.1 Troubleshooting Immediately After An Abnormality/Error Occurs .................................11-1

11.1.1 In Case of a Power Failure:.............................................................................11-1

11.1.2 In Other Cases................................................................................................11-1

11.2 When Error Message is Displayed ................................................................................11-2

11.2.1 Error Messages...............................................................................................11-2

11.2.2 Displaying Past Abnormalities/Errors and Accumulated Running-Time..........11-5

11.2.3 Abnormalities When Powering ON..................................................................11-7

11.2.4 Abnormalities When Performing the STP Pump Start Operation....................11-7

11.2.5 Other Abnormalities ........................................................................................11-8

11.3 Maintenance and Inspection .........................................................................................11-9

11.3.1 Inspecting the Air Cooling Fan........................................................................11-9

11.3.2 Replacing the Fuses .....................................................................................11-10

11.3.3 Cleaning and Decontamination .....................................................................11-11

11.3.4 Inspecting for Deposit ...................................................................................11-11

11.3.5 Overhaul .......................................................................................................11-12

11.3.6 Transporting for Repair or Overhaul..............................................................11-13

12 Storage and Disposal ..................................................................12-1

12.1 Storage of the STP Pump .............................................................................................12-1

12.2 Storage of the STP Control Unit....................................................................................12-1

12.3 Disposal ........................................................................................................................12-2

13 Specifications and Accessories ...................................................13-1

13.1 Specifications of the STP Pump....................................................................................13-1

13.2 Specifications of the STP Control Unit ..........................................................................13-5

UNIT CONVERSION TABLE

ANNEX

MALFUNCTION INFORMATION

STP Series / Global Service Network

STP-301/451 Series Instruction Manual

TABLES

Table 3.1 Accessories............................................................................................................3-1

Table 3.2 Accessories for Chemical Specific Pump (Type C)................................................3-1

Table 4.1 Tightening torque of bolt ........................................................................................4-8

Table 4.2 Maximum Torque predicted and Recommended securing bolt

for inlet port flange .................................................................................................4-9

Table 4.3 Number of Claw Clamps by Size of Flange..........................................................4-10

Table 6.1 Connecting the Power Cable................................................................................6-13

Table 7.1 Starting/Stopping the STP Pump during Remote Operation (I/O TB2)...................7-5

Table 7.2 Reset Operation during Remote Operation (I/O TB2) ............................................7-6

Table 7.3 Starting/Stopping the STP Pump during Remote Operation (CON4) .....................7-7

Table 7.4 Reset Operation during Remote Operation (CON4)...............................................7-8

Table 8.1 I/O TB1 Terminal Block ..........................................................................................8-1

Table 8.2 Rated Contacts for Relays CR1, 3, 5, 7, and 8 ......................................................8-4

Table 8.3 Rated Contacts for Relays CR4 and 6 ...................................................................8-4

Table 8.4 I/O TB2 Terminal Block ..........................................................................................8-5

Table 8.5 CON4 Connector (Remote Input Signal)................................................................8-7

Table 8.6 Rated Coils for Relays CR1, 2 and 3 .....................................................................8-8

Table 8.7 CON 4 Connector (Remote output signal)..............................................................8-9

Table 8.8 Rated Contacts for Relays CR4, 5, 6, 7, 8, 9 and 10 ...........................................8-11

Table 8.9 Remote Cable Connections (Single-Side Connector Type) .................................8-11

Table 10.1 States of Lamps and REMOTE Output Signals at Power Failure ........................10-2

Table 10.2 Operations of the STP Pump after Power Recovery ............................................10-2

Table 10.3 Safety Functions ..................................................................................................10-4

Table 11.1 Error Messages....................................................................................................11-3

Table 11.2 Troubleshooting after Powering ON .....................................................................11-7

Table 11.3 Troubleshooting When Performing the STP Pump Start Operation .....................11-7

Table 11.4 Troubleshooting While the STP Pump is Rotating ...............................................11-8

Table 11.5 Recommended Spare Parts ...............................................................................11-10

Table 11.6 Cleaning and Decontamination ..........................................................................11-11

Table 13.1 Specifications of the STP Pump...........................................................................13-1

Table 13.2 Specifications of the STP Control Unit .................................................................13-5

STP-301/451 Series Instruction Manual

FIGURES

Figure 2.1 Cross Sectional View of the STP Pump .................................................................2-2

Figure 4.1 Configuration of the STP Pump..............................................................................4-2

Figure 4.2 Installation of the STP Pump to the Vacuum Equipment........................................4-5

Figure 4.3 STP Pump Installation Positions ............................................................................4-7

Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump ....4-7

Figure 4.5 Example of securing the STP Pump

(When securing the inlet port with bolts) ................................................................4-9

Figure 4.6 Example of securing the STP Pump

(When securing the inlet port flange with claw clamps)........................................4-10

Figure 4.7 Example of securing the STP Pump

(When installing the damper in the inlet port flange) ............................................4-11

Figure 4.8 Connecting the Purge Port ...................................................................................4-14

Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater....................................5-5

Figure 6.1 STP Control Unit Front Panel.................................................................................6-2

Figure 6.2 STP Control Unit Rear Panel .................................................................................6-4

Figure 6.3 STP Control Unit Top Panel ...................................................................................6-5

Figure 6.4 STP Control Unit Side Panel (Left).........................................................................6-6

Figure 6.5 Peripheral Spaces of the STP Control Unit ............................................................6-8

Figure 6.6 Example of Securing the STP Control Unit ............................................................6-9

Figure 6.7 External Dimensions of Ground Cable .................................................................6-10

Figure 6.8 External Dimensions of STP Connection Cable ...................................................6-10

Figure 6.9 External Dimensions of STP Connection Cable ...................................................6-11

Figure 6.10 Connecting Method of the AC Power Cable.........................................................6-13

Figure 6.11 How to Secure the Power Cable ..........................................................................6-14

Figure 7.1 STP Pump Operation Procedures..........................................................................7-9

Figure 8.1 I/O TB1 Remote Output Signal Terminal Block ......................................................8-3

Figure 8.2 I/O TB2 Remote Input Signal Terminal Block.........................................................8-6

Figure 8.3 CON4 Remote Input Signal Connector ..................................................................8-8

Figure 8.4 CON4 Remote Output Signal Connector .............................................................8-10

Figure 9.1 Tuning Procedures.................................................................................................9-2

Figure 9.2 LCD Message in Rated Speed Setting Mode.........................................................9-5

Figure 13.1 External Appearance of the STP Pump [without Anti-Corrosion Treatment]

(Example: STP-301).............................................................................................13-2

Figure 13.2 External Appearance of the STP Pump [Chemical Specific Type C]

(Example: STP-301C) ..........................................................................................13-3

Figure 13.3 Label Affixing Position for the STP Pump ............................................................13-4

Figure 13.4 External Appearance of the the STP Control Unit ................................................13-7

Figure 13.5 Label Affixing Positions for the STP Control Unit .................................................13-8

STP-301/451 Series Instruction Manual

1-1

Installation

1 Precautions for Safe Operation of the STP Pump

1.1 Usable Gases

Chlorine or fluorine system gases can be used in chemical specific pumps (STP-301C/STP-451C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Edwards.

◇ To prevent an accident, confirm the characteristics of gases to be used, referring to

the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.

And, keep MSDS and a safety advice of gas supplier.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

STP-301/STP-451 pump or other models without anti-corrosion treatment.

◇ Introduce a dry N

gas (purge gas) to protect the inside of the STP pump when

using reactive or corrosive gases.

◇ Cool the STP pump to prevent the STP pump from overheating when pumping

gases.

1.2 Precautions on Maintenance and Inspection

Read through Section 11, "Troubleshooting, Maintenance and Inspection" before performing any maintenance or inspection of the STP pump or the STP control unit (such as fuse replacement).

◇ Always turn OFF the primary power (switch the breaker "OFF") and isolate the

electrical energy source (Lockout/Tagout) on the vacuum equipment before

performing any maintenance.

◇ NEVER touch any portions other than those designated when performing

maintenance.

Careless touch may cause electric shock and/or a short-circuiting of the internal

circuit, resulting in product damage or a problem.

STP-301/451 Series Instruction Manual

1-2

Installation

1.3 Labels

The following labels are affixed to the STP pump and STP control unit. Read the contents of the labels before operation.

1) STP Pump Caution Label

This label indicates precautions for operating the STP pump. Follow these precautions.

2) STP Control Unit Caution Label

This label indicates precautions for operating the STP control unit. Follow these precautions.

3) STP Pump Installation Warning Label

This label indicates the installation of the STP pump. Install the STP pump according to the precautions in Section 4, "Installing the STP Pump".

STP-301/451 Series Instruction Manual

1-3

Installation

4) Connector Caution Label

i. This label indicates the lock of the connector

ii. This label instructs operators to prevent the connectors from being

disconnected while the STP pump is in operation.

5) STP Control Unit Safety Instruction Label

This label indicates instructions before operating the STP control unit.

6) High Voltage Device Caution Label

The STP control unit is equipped with a high voltage device. This label warns operators to pay attention to the high voltage device.

STP-301/451 Series Instruction Manual

1-4

Installation

7) Rotational Direction Instruction Label

This label indicates the rotational direction of the STP pump. The STP pump rotates in this direction.

8) Voltage Rating Label

This label indicates the rated voltage of the STP control unit. Use voltage specified in this label.

200

V specification

100 V specification

9) Hot Surface Warning Label

This label instructs operators so as not to touch the hot surface of the STP pump. The use of the baking heater (optional accessory) may lead to a considerable rise in temperatures outside the STP pump. This label warns operators so as not to burn hands. (only when using the baking heater.)

STP-301/451 Series Instruction Manual

2-1

Installation

2 Operation Principle of the STP Pump

The STP-301/451 is a series of magnetically-levitated turbomolecular pumps, featuring the following:

• Oil free

• Low vibration

• High reliability

The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor.

Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.

The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is supported in the radial direction by 2 pairs of radial direction active magnetic bearings that consist of radial sensor (3) and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is thus supported without mechanical contact, it can rotate with low vibration.

There is less heat generated from magnetic bearings because there is no friction. Therefore the STP pump requires no cooling. However, the STP pump requires water cooling or air cooling during baking and gas pumping.

Taking into consideration a breakage of magnetic bearings, touch down bearings (7) and (8) coated with solid lubrication have been installed. They do not contact the rotor during the rated operation.

A radial sensor, an axial sensor, a rotational speed sensor and a temperature sensor always monitor the magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop.

STP-301/451 Series Instruction Manual

2-2

Installation

(1) Rotor Blade

(2) Stator Blade

(3) Radial Sensor

(4) Radial Electromagnet

(6) Axial Electromagnet

(5) Axial Sensor

(8) Touch Down Bearing

(7) Touch Down Bearing

Figure 2.1 Cross Sectional View of the STP Pump

STP-301/451 Series Instruction Manual

3-1

Installation

3 Unpacking

3.1 Unpacking the STP Pump and the STP Control Unit

Check the following before unpacking the STP pump and STP control unit.

1) Check the package for bruises, breakage, wetness, and other.

If there is any abnormality/error or it is judged necessary to return the product, contact Edwards or the selling agency.

2) Check the contents of the package.

See Section 3.2, "Accessories."

◇ Be careful not to scratch the flange of the STP pump.

Before installing the STP pump, check whether or not there are scratches on the

surface.

◇ It is recommended to keep the packaging materials, such as the corrugated

fiberboard container and cushioning material for possible reuse.

3.2 Accessories

Table 3.1 Accessories

Item Q'ty Remarks STP control unit 1 Primary power cable *1 1 With a single-side connector STP connection cable *1 1 With both-side connectors Ground cable *1 1 With both-side crimp-type terminal lugs Inlet port cover 1 Outlet port cover 1 STP connector cover 1 Spare fuses 250V, 10A 2 F1, F2 (rear panel) Instruction Manual 1

The accessories listed below are supplied to the chemical specific pump (type C) in addition to the accessories in Table 3.1.

Table 3.2 Accessories for Chemical Specific Pump (Type C)

Item Q'ty Remarks Blank flange for purge port 1 KF *210 Clamping ring for purge port 1 KF

O-ring washer for purge port 1 KF

: The standard cable length is 3 m.

: JIS

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Installation

4 Installation of the STP Pump

4.1 Name and Function of Each Part

(1) Inlet Port Flange (ICF

, VG*1, ISO, and other)

z Connected to the vacuum equipment (at the high vacuum side).

(2) Outlet Port Flange (KF

25)

z Connected to the inlet port side of the backing pump.

(3) STP Connector (41 pins)

z Connected to the STP connection cable.

(4) Ground Terminal

z Used for grounding.

Connect the ground cable between this terminal and the ground terminal of the STP control unit.

The ground terminal is marked with

label.

(5) Purge Port (KF

10)[Chemical Specific Pump (Type C)]

z Introduces a purge gas.

This port is attached only to the chemical specific pump (type C). In order to protect the inside of the STP pump when pumping reactive or corrosive gases. The STP pump is delivered with a blank flange attached to this port.

: JVIA Standard

: JIS

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Figure 4.1 Configuration of the STP Pump

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4.2 Precautions Before Installation

4.2.1 Operating Environment

◇ Check the properties of the gas to be used, referring to the Material Safety Data

Sheet (MSDS) you obtain from the gas supplier. And, keep MSDS and a safety advice of gas supplier. Take measures according to MSDS to prevent an accident when using toxic, reactive or combustible gases. Dilute the gas to be used with the inert gas controlled if necessary. And, take measures according to MSDS to prevent an accident caused by exhaust gas.

◇ Chlorine or fluorine system gases can be used only in chemical specific pumps

(type C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, contact Edwards.

◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the

STP-301/STP-451 pump or other models without anti-corrosion treatment.

◇ If the STP pump is used in an area with radiation, contact Edwards.

Install the STP pump in a place meeting the following requirements:

Ambient Temperature 0 to 40 °C Ambient Relative Humidity 30 to 95 % (no dew condensing) Environment z A place free of externally-applied mechanical shock.

z A place free of a heat source

(Keep clear of the heat source or attach a thermal shield plate).

z A place free of a strong magnetic field

(Range: up to 15 mT (150 G) in the axial direction, and up to 3 mT (30 G) in the radial direction with respect to the rotational axis of the STP pump).

z A place free of a strong electric field. z A place free of exposure to radiation. z No discharge of high voltage (more than 500V)

(If more than 500 V is discharged, contact Edwards.) STP Pump Installation Equipment Conditions

z Install the STP pump securely so that foreign particles will

not easily fall into the STP pump (Ex.: Si wafers or samples

are positioned above the STP pump). (To prevent foreign

particles from falling into the STP pump, design a shield

plate with large conductance.)

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4.2.2 Installation Area

Leave enough spaces for the following in addition to the space for the STP pump:

z Space for maintenance and inspection z Space for connecting cables

◇ The minimum bending radius of the STP connection cable is

150 mm (see Section 13, "External Appearance of the STP Pump" [bending dimensions of the STP connection cable]). DO NOT excessively bend the cables and beware of any obstacles when installing the STP pump. Also, leave enough space to install other cables without bending them excessively.

◇ The L-type STP connection cable is also offered. Contact Edwards if necessary.

4.2.3 Bench

A bench must be prepared by the customer to secure the STP pump. The shape and size of the bench differ depending upon the type of STP pump. Follow the precautions of the WARNING, CAUTION, or NOTICE (see Section 4.3.3, "How to Secure the STP Pump").

◇ The STP pump is provided with a high-speed rotor. Any internal abnormality/error

may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. Design and secure the bench for the STP pump so that it can withstand the maximum torque generated due to the occurrence of an abnormality/error. Refer to Section 4.3.3 "How to Secure the STP Pump" for abnormal torque.

◇ Secure the customer-prepared bench and the vacuum equipment on the floor or

peripheral equipment and other equipment in accordance with the customer application. NEVER move them while the STP pump is in operation.

◇ Confirm the dimensions by the external appearance of the STP pump when

designing the bench. The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange. When the external appearance of the STP pump is not in the manual, contact Edwards.

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4.3 How To Install the STP Pump

Install the STP pump to the vacuum equipment as shown in Figure 4.2.

Figure 4.2 Installation of the STP Pump to the Vacuum Equipment

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4.3.1 Cleaning the Seal

Inspect the seals of the inlet and outlet port flanges for dirt or oil spots before installing the STP pump to the vacuum equipment. Take the following measures for cleaning the seals:

z Clean off with a pure gas. z Wipe with proper solvent (such as alcohol).

◇ A splinter shield is attached to the inlet port flange to prevent foreign particles from

falling into the STP pump. Always leave the splinter shield attached during operation.

◇ The wipes used for clean the flange of the pump might become hazardous waste

depending upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the regulations of each national and/or local government.

◇ The splinter shield cannot perfectly prevent foreign particles from falling into the

STP pump. DO NOT install the STP pump in such a manner that foreign particles can easily fall into it (for example, Si wafers or samples are positioned above the STP pump). If installing the STP pump in such a manner, always attach a shield plate with sufficient conductance above the STP pump to prevent foreign particles from falling into it. Foreign particles falling into the STP pump through the splinter shield may result in product damage.

◇ Be careful not to scratch the flange of the STP pump.

Check whether or not there are scratches on the surface, before installing the STP pump.

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4.3.2 STP Pump Installation Positions

The STP pump can be installed vertically, horizontally, and upside-down and slanted.

Vacuum Equipment

Upside-down

Horizontal

Slanted

Vertical

Figure 4.3 STP Pump Installation Positions

When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity. This makes it possible to reduce the load on the magnetic bearing and the heat generated by the STP pump.

Outlet Port

Direction of Gravity

Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump

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4.3.3 How to Secure the STP Pump

◇ The STP pump is provided with a high-speed rotor. The worst-case failure may

result in a jump in rotational torque leading to personal injury or peripheral equipment damage. The method of securing the STP pump will depend on the installation requirements. Secure the STP pump to the vacuum equipment as follows:

◇ Design and secure the mounting for the STP pump so that it can withstand the

maximum rotational torque. Refer to Table 4.2 for torque in pump abnormality.

◇ In some cases, the damper and the claw clamper securing cannot be used depend

on the type of the STP pump.

◇ Refer to Table 4.1 for tightening torque of the bolt.

Table 4.1 Tightening torque of bolt

Size of bolt Tightening torque of bolt (Nm)

M8 12.0 M10 24.1 M12 42.1

◇ When making the leg to secure the base, make them shortened more than ones

attached to the STP pump. Use a material that has a tensile strength of 600N/mm

or more.

◇ When securing the base, use stainless steel securing bolts with a tensile strength

class is 70 or more.

◇ When using any securing method other than that specified in this manual, contact

Edwards.

Damper

Yes

with bolts

with Claw Clamps

Secure the inlet port

Refer to "1) When securing the inlet port with bolts"

Refer to "2) When securing

the inlet port flange with claw clamps"

Refer to "3) When installing the damper in the inlet port flange"

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1) When securing the inlet port with bolts

Refer to Table 4.2 for torque in pump abnormality and recommended securing bolts. Secure the inlet port flange with all of the boltholes of the size specified in the Inlet Port Flange Standard. Secure the base with all 8 screw-holes for legs or all 8 attached legs. Follow "CAUTION" on page 4-8 about legs and bolts for securing the base. Make sure that the recommended securing bolt may be different depending on the method of securing the base.

Table 4.2 Maximum Torque predicted and Recommended securing bolt

for inlet port flange

Model of TMP STP-301 Type of flange VG100 ISO100F

ICF152

Torque in pump abnormality [Nm] 3.8×103 3.8×103 3.8×103

Base(8 positions)securing No Yes No Yes No Yes

Type of bolt Standard

Type of steel

Stainless steel

Recommended

securing bolt for TMP

Flange

Strength *2 70 or more

Model of TMP STP-451 Type of flange VG150 ISO160F

ICF203

Torque in pump abnormality [Nm] 3.8×103 3.8×103 3.8×103

Base(8 positions)securing No Yes No Yes No Yes

Type of bolt Standard

Type of steel

Stainless steel

Recommended

securing bolt for TMP

Flange

Strength *2 70 or more

(a) When the base is not secured (b) When the base is secured

Figure 4.5 Example of securing the STP Pump (When securing the inlet port with bolts)

Maximum predicted torque of ISO flange type pump is the same as that of ISO_F flange type pump.

Refer to ISO898-1 (JISB1051), ISO3506 (JISB1054) and AMS6419 (Aerospace Material Specification)

Recommended

fitting bolt for flange

Secure the base

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Edwards STP-451 Series Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual