Edwards STP-301 series, STP-301, STP-451 series, STP-451C, STP-451 Instruction Manual
...
MT-21E-003-D
BOC Edw ards Japan Li mited
Dec. 2003
Copyright 2003 BOC Edw ards Japan Limited. All rights reserved. Printed in Japan.
STP-301/451 Ser ies
Turbomolecular Pump
INSTRUCTION MANUAL
(Th ird Edition- d)
Read through the Safety Precautions and each section
of this Manual carefully before using the STP pump.
Keep this Manual in a place where you can quickly
access it at any time.
ST P - 301/451 Series Instruct ion Manual
1
SAFETY PRECAUTIO NS
The Safety Precautions in this Manual constitute guidelines to protect operators, the STP pump
and its peripheral equipment.
To avoid personal injury and prevent product and/or peripheral equipment damage, observe
the Safety Precautions as w ell as the general safety rules (your country’s laws, regulati ons,
safety standards and so on).
If the equipment is used in a manner not specified by BOC Edwards, the protection provided
by the equipment may be impaired.
SYMBOLS
The following symbols are used in this manual:
Death or Serious Personal Injury
Failure to follow the guidelines marked with this symbol may result in death or serious
personal injury.
Minor Personal Injury, Product and/or Peripheral Equipment Damage
Failure to follow the guidelines marked with this symbol may result in minor personal
injury, product and/or peripheral equipment damage.
NOTICE
I tems you must follow during operation and maintenance.
ATTENTION : refer to this manual.
BOC Edw ards Japan Limited (hereafter called BOC Edwards) cannot perfectly anticipate
circum stances of all of hazards or problems. The scope of anticipation is limited to the
precautions included in the
and specified in this
manual.
ST P - 301/451 Series Instruct ion Manual
2
◇ The STP pump is provided with a high-speed rotor. Secure the STP pump according to
the specified method. Failure to do so may lead to serious personal injury, product
and/or peripheral equipment damage if any abnormality/error occurs in the rotor.
◇ The STP pump operates at high temperatures w hile the baking heater is in operation.
NEVER touch the STP pump and its peripheral equipment while the baking heater is in
operation.
Operators can burn hands.
◇ Execute the following to prevent an accident caused by the gas.
• Check the properties of the gas to be used, referring to the Material Safety Data
Sheet (M SDS) you obtain from the gas supplier. (explosive・combustibl e・toxic・
corrosive, etc) And, keep MSDS and a safety advice of gas supplier.
• Warn of the danger of the gas w ith the warning label w hen the use gas is
hazardous chemicals materials.
• Always execute gas purge in the pump with the inert gas, and then exhaust residual
gases thoroughly from the STP pum p when removing the S TP pump from the vacuum
equipment.
• Secure safety by w earing personal protective equipment when using the gas w hich
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
◇ Exhaust residual gas thoroughly w hen disposing of the STP pump. If the STP pump is
used for any toxic or reactive gas, always clean the ST P pump and dispose of it as
industrial w aste in accordance with guidelines given by the national and/or local
government. Residual gas in the STP pump may cause an accident which, for certain
gases, may involve serious injury or death.
ST P - 301/451 Series Instruct ion Manual
3
◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas
may corrode the STP pump and damage it.
◇ A hazardous live voltage may exist at connector/terminal that marked .
DO NOT touch the terminal. Doing so may result in electric shock.
When operating connection/disconnection to termi nal, alw ays power OF F the STP pump
(Sw itch the breaker "OFF").
◇ Always check the STP pump has stopped, then turn OFF the primary power (switch the
breaker “OFF”) before proceeding to any of the following operations. Failure to do so
may cause the STP pump to rotate accidentally, w hich may injure operators seriously or
result in electric shock. Moreover, do not remove the connecter while the pum p is
rotating. The voltage might be output to connector according to the rotational speed, and
it causes the electric shock or the failure.
• Connect or disconnect cables;
• Perform maintenance and inspections such as replacement of fuses as well as
inspections of deposit and/or the air cooling fan; or
• Perform investigations into probable causes and action/measures taken in the event
of occurrence of a problem.
◇ DO NOT perform the insulation test (insulation resistance test and w ithstand voltage test)
to the STP control unit and STP pump. When performing the insulation test to your
equipment, turn "OFF" the STP control unit. The varistor for the power supply line
protection is installed to the STP control unit. DO NO T perform the insulation test w ith the
varistor installed. Doing so may result in product damage.
◇ When removing or installing the pump or at mai ntenance and inspection, follow the
precautions below. Fai lure to do so might hurt your back or cause inj uries due to
occurrence of an accident such as fall.
• Use a crane or the like when lifting the heavy product of 18kg or more.
• When lifting by hands for unavoidable reason, two or more people must always
conduct it.
• When lifting STP control unit w ith handles, support bottom of STP control unit, do not
have only handle.
◇ When "emergency off" (EMO) circuit is installed in the vacuum equipment, consider the
following to stop the STP pump safely w hen the E MO circuit operates.
• When the EMO circuit operates, atmosphere might be introduced in the STP pump
depending upon the backing pump. Unite the exhaust gas system to prevent
atmosphere from being introduced into the STP pump when the EMO circuit operates.
(example: shut the valve) When atm osphere is introduced into the STP pump, the
touch dow n bearing may not operate normally.
◇ Install the STP control unit not only by fitting it w ith the front panel fitting screw s but also
by supporting it from the bottom side.
Fitting the STP control uni t with the screws only cannot sustain its w eight, and therefore
resulting in product damage.
◇ Always use the STP pump and STP control uni t with same model nam e, which are
specified on thei r own nameplate. If use the units having different model names, they may
not be used. In the latter case, contact service office. If you use the units having the
same model name but different serial numbers or change the length of the STP connection
cable, the tuning is required. They may not function normally w hen they are used w ithout
ST P - 301/451 Series Instruct ion Manual
4
tuning. Once tuning is compl eted, re-tuning is not required unless the configuration (the
STP pump serial number, the STP control unit serial number, and the STP connection cable
length) is changed.
ST P - 301/451 Series Instruct ion Manual
5
ST P-301/451
Series
◇ Use the STP connection cable that has a label affixed
The use of different cables may result in product damage.
◇ Connect the cables securely. NEVER bend nor place heavy objects on the cable.
Doing so may result i n electric shock or product damage.
◇ NEVER remove the splinter shield from the STP pump. Doing so may result in product
damage.
◇ DO NOT put foreign objects into the STP pump. Doing so may result in product damage.
◇ Always use the pow er voltage specified on the nameplate for the primary pow er voltage
of the STP control unit. Wire the power cable securely. Incorrect w iring may result in
electric shock or product dam age.
◇ The wipes used for clean the flange of the pump might become hazardous w aste
depending upon the solvent (alcohol). Dispose of the contam inated w ipes appropriately
according to the regulations of each national and/or local government.
◇ NEVER turn OFF the primary pow er (D O NOT sw itch the breaker “OFF”) w hile the S TP
pump is rotating. Doing so may result in product damage.
◇ Perform investigations into probable causes and remove them before restarting the STP
pump in the event of the occurrence of a problem. The use of the abnormal STP pump
may result in product damage.
◇ DO NOT move the STP pump and the STP control unit while the STP pump is in operation.
Doing so may result i n product damage.
ST P - 301/451 Series Instruct ion Manual
6
INTRODUCTION
Thank you very much for purchasing BOC Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to
exhaus t gas es from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP -301/STP-451 turbomolecular pump:
Model Name Specification
• STP-301 High-vacuum type
• STP-451 High-vacuum type
• STP-301C High-vacuum type, chemical specific
*1
• STP-451C High-vacuum type, chemical specific
*1
For th e specifications of other models, contact BOC Edwar ds.
In this manual, the above STP pump series is collectively called the "STP pump."
APPLI ED STANDARDS
The STP pump conforms to the following directives and standards:
◇ Applied Directives
• EC Machinery Directive
• EC Electromagnetic Compati bility Directive
• EC Low Voltage Directive
◇ Applied Standards
• EN292-1
• EN292-2
• EN60204-1
• EN61326 (class A)
• EN61000-6-2
◇ Applied Standards (Only a some model)
*2
• UL3101-1, 1993 (Electrical Equipment for Laboratory Use; Part 1 : General
R equirements)
*1
: Chemical specific: STP pump with anti-corrosiv e treatment (responding to chlorine, fluorine or other system gases)
*2
: Contact BOC Edwards about recognized model
ST P - 301/451 Series Instruct ion Manual
7
PRECAUTIONS
1) No part of this manual may be reproduced in any form by any means without prior
writt en permission from BOC Edwards.
2) BOC Edwards pursues a policy of continuing improvement in design and
performance of this product. The right is, t herefore, reserved to vary specifications
and design without notice. Understand that the product you purchased and its
contents including specifications described in this manual may differ.
REQUEST
If you find inaccuracies or errors i n this manual, advise distributor or the nearest
Service office.
ST P - 301/451 Series Instruct ion Manual
8
LIM ITED WARRANTY
This WARRANTY applies to the customer to whom BOC Edwards has delivered this
product.
1. WARRANTY PERIOD:
BOC Edwards warrant s this product against defects for a period of two (2) years
from the date of delivery or during the p eriod specified in the agreement made by
and between the customer and BOC Edwards.
2. ITEM WARRANTED :
1) This warranty applies only to the product deliv ered from BOC Edwards t o the
customer.
2) If any defect is found during this period, BOC Edwards will, at its option, repair
or recondition the product free of charge. The costs for repair or replacement
of the product after the warranty period has passed will be at the customer's
own charge.
3. DISCLAIMER:
BOC Edw ards makes no w arranty wi th respect to any damage occurred due to any of
the following during the w arranty period:
1) Handling, operation or maintenance other than that specified herein;
2) Failure to follow any of the w arnings or cautions enumerated under
or ;
3) Install ation, operation or maintenance using parts w hich are not specified by BOC
Edw ards;
4) Maintenance personnel other than those authorized by BOC Edw ards or service
office have disassembled, reconditioned, or tampered the product;
5) Defect resulting from the not-specified use of the product.
6) When the product is used under special conditions without obtaining the w ritten
consent of BOC Edw ards (Particular gases, strong magnetic field and the radiati on
are added to the product.);
7) Defect resulting from deposit;
8) Water cooling system defect resulting from water quali ty used;
9) Defect resulting from the installation of the product (Exclude the installation by
authorized personnel.)
10) Deterioration in the external because of use (Discoloration, scratches and so forth)
11) Product damage occurred during transport or other factors not attributable to BOC
Edw ards;
12) Product breakage or damage due to natural disasters, fire or other external factors;
13) Deterioration in the basic performance due to the use of the product beyond li mits of
the use;
14) Any direct, incidental or consequential damage resulting from the use of the product;
15) When continuously operated w ithout overhaul after the WARNING indication
(“WARNI NG” message) on the LCD display;
16) Overhaul and replacement of maintenance parts;
ST P - 301/451 Series Instruct ion Manual
9
4.
SPARE PARTS:
Fuse and air cooling fan for control unit
Touch down bea ring
Heater
ST P - 301/451 Series Instruct ion Manual
8
TABLE of CO NTENT S
SAF ETY PRECAUTION
INTRODUCTION
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump...................... 1 -1
1.1 Usable Gases ..............................................................................................................1-1
1.2 Precautions on Maintenance and Inspection...............................................................1-1
1.3 Labels..........................................................................................................................1-2
2 Operation Principle of the STP Pu mp.........................................2- 1
3 Unpacking .................................................................................. 3-1
3.1 Unpacking the STP Pump and the STP Control Unit......................................................3-1
3.2 Accessories................................................................................................................3-1
4 Installation of the STP Pump ...................................................... 4-1
4.1 Name and Function of Each Part..................................................................................4-1
4.2 Precaution s Before Installation....................................................................................4-3
4.2.1 Op e rati n g Envi ronment........................................................................................4-3
4.2.2 Instal lation Area..................................................................................................4-4
4.2.3 Bench..................................................................................................................4-4
4.3 How To Install the STP P u mp .......................................................................................4-5
4.3.1 Cleaning the Seal................................................................................................4-6
4.3.2 STP P u mp Installation Positions...........................................................................4-7
4.3.3 How to Secure the STP Pump.............................................................................4-8
4.3.4 Vacuum Piping..................................................................................................4-12
4.3.5 Connecting the Ground Cable...........................................................................4-13
4.3.6 Connecting the Purge P ort (For the Chemical Specific Pump, Type C).............4-14
5 Baking, Cooling the STP Pump and Gas Pumping.....................5-1
5.1 Baking the STP Pump ...................................................................................................5-1
5.1.1 Attaching a Baking Heater..................................................................................5-1
5.2 Cooling the STP Pump ..................................................................................................5-2
5.2.1 Water Cooling Method.........................................................................................5-2
5.2.2 Air Cooling Method..............................................................................................5-3
5.3 Gas Suction.................................................................................................................5-4
5.3.1 How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)].............5-4
6 Installation of the STP Control Unit............................................. 6-1
6.1 Name and Function of Each Part..................................................................................6-1
6.1.1 Front Panel..........................................................................................................6-1
6.1.2 Rear Panel...........................................................................................................6-3
6.1.3 Top Panel............................................................................................................6-5
6.1.4 Side Panel (Left) .................................................................................................6-6
6.2 Precaution s Before Installation....................................................................................6-7
ST P - 301/451 Series Instruct ion Manual
9
6.2.1 Op e rati n g Envi ronment........................................................................................6-7
6.2.2 Insul a tion Test.....................................................................................................6-7
6.2.3 Instal lation Area..................................................................................................6-8
6.3 Attaching the STP Control Unit Front Panel to a Rack..................................................6-9
6.4 Cable Connection.......................................................................................................6-10
6.4.1 Name and Dimensions of Each Cable...............................................................6-10
6.4.2 How to Connect the C ables..............................................................................6-12
6.5 Connecting to Semiconductor Equipment...................................................................6-14
6.5.1 Connecting to Power........................................................................................6-14
6.5.2 Emergency Off Circuit (EMO Circuit).................................................................6-14
7 How to Sta rt/Stop th e STP Pump ................................................ 7-1
7.1 Before Starting.............................................................................................................7-1
7.2 Start Procedures..........................................................................................................7-2
7.3 Stop Procedures..........................................................................................................7-2
7.4 Manual Operation.........................................................................................................7-3
7.4.1 Powering ON.......................................................................................................7-3
7.4.2 Starting the STP Pump.........................................................................................7-3
7.4.3 Stopping the S TP Pump.......................................................................................7-3
7.4.4 Starting the STP Pump after Stopping.................................................................7-4
7.4.5 Powering OFF.....................................................................................................7-4
7.4.6 Starting the STP Pump after a Sa fety Function Operates...................................7-4
7.5 Remo te Operation (I/O TB2).........................................................................................7-5
7.5.1 Powering ON.......................................................................................................7-5
7.5.2 Starting/Stopping the STP Pump..........................................................................7-5
7.5.3 Starting the STP Pump After Stopping................................................................7-6
7.5.4 Powering OFF.....................................................................................................7-6
7.5.5 Starting the STP Pump after a Sa fety Function Operates...................................7-6
7.6 Remote Operation (CON4: Optional Accessory) .........................................................7-7
7.6.1 Powering ON.......................................................................................................7-7
7.6.2 Starting/Stopping the STP Pump..........................................................................7-7
7.6.3 Starting the STP Pump After Stopping................................................................7-8
7.6.4 Powering OFF.....................................................................................................7-8
7.6.5 Starting the STP Pump after a Sa fety Function Operates...................................7-8
8 Remote Input/Output Signal Terminal Blocks.............................. 8- 1
8.1 I/O TB1 Terminal Block.................................................................................................8-1
8.2 I/O TB2 Terminal Block.................................................................................................8-5
8.3 CON4 Connector (Optional accessory).......................................................................8-7
8.3.1 Remote Input Signals...........................................................................................8-7
8.3.2 Remote Output Signals........................................................................................8-9
8.3.3 Remote Cables (Optional Accessories)............................................................8-11
9 Adjustment Method..................................................................... 9-1
9.1 Tuning..........................................................................................................................9-1
9.1.1 Tuning Method.....................................................................................................9-1
9.2 Setting the Rated Speed..............................................................................................9-3
9.2.1 When Setting DSW-B No. 1 to ON under Power-ON State.................................9-3
9.2.2 When Setting DSW-B No. 1 to ON before Powering On.....................................9-4
ST P - 301/451 Series Instruct ion Manual
10
10 Safety Functions ...................................................................... 10-1
10.1 Power Failure.............................................................................................................10-1
10.2 Abnormal State of Magnetic Bearing.........................................................................10-3
10.3 Excessive Vibration...................................................................................................10-3
10.4 Motor Driver Overloa d ................................................................................................10-3
10.5 Overheating Inside the STP Pump..............................................................................10-3
10.6 Overheating Inside the STP Control Unit....................................................................10-3
10.7 Overspeed.................................................................................................................10-3
11 Troubleshooting, Maintenance and Inspection..........................11- 1
11.1 Troubleshooting Im mediately After An Abnormality/Error Occurs.............................11-1
11.1.1 In Case of a Power F a ilure:.........................................................................11-1
11.1.2 In Other Ca ses.............................................................................................11-1
11.2 When Error Message is Displayed.............................................................................11-2
11.2.1 Error Messages ...........................................................................................11-2
11.2.2 Displaying Past Abnormalities/Errors and Accumulated Running-Time.......11-5
11.2.3 Abnormalities When Pow ering ON...............................................................11-7
11.2.4 Abnormalities When Performing the STP P ump Start Operation..................11-7
11.2.5 Other Abnormalities .....................................................................................11-8
11.3 Maintenance and I n spection......................................................................................11-9
11.3.1 Inspecting the Air Cooling Fa n.....................................................................11-9
11.3.2 Replacing the F u ses ..................................................................................11-10
11.3.3 Cleaning and Decontamination...................................................................11-11
11.3.4 Inspecting for Deposit................................................................................11-11
11.3.5 Overhaul....................................................................................................11-12
11.3.6 Transporting for Repair or Overhaul..........................................................11-13
12 Storage and Disposal............................................................... 12- 1
12.1 Storage of the STP Pump...........................................................................................12-1
12.2 Storage of the STP Control Unit.................................................................................12-1
12.3 Disposal.....................................................................................................................12-2
13 Specifications and Ac cessories................................................. 13-1
13.1 Specifications of the STP Pum p.................................................................................13-1
13.2 Specifications of the STP Co n trol Unit.......................................................................13-6
UNIT CONVERSION TABLE
ANNEX
MALFUNCTION INFORMATION
STP Series / Global Service Network
ST P - 301/451 Series Instruct ion Manual
11
TABLES
Table 3.1 Accessories ..........................................................................................................3-1
Ta b le 3.2 Accessories for Chemical Specific P u mp (Type C)...............................................3-1
Table 4.1 Tightening torque of bolt........................................................................................4-8
Table 4.2 Maximum Torque predicted and Recommended securing bolt for inl et port flange4-9
Table 4.3 Number of Claw Clamps by Size of Flange.........................................................4-10
Table 6.1 Connec ting the Pow er Cable...............................................................................6-13
Table 7.1 Starting/Stopping the STP Pump during Remote Operation (I/O TB2).....................7-5
Ta b le 7.2 Reset Operation d u rin g Remote Operation (I/O TB2).............................................7-6
Table 7.3 Starting/Stopping the STP Pump during Rem ote Operation (CON4).......................7-7
Ta b le 7.4 Reset Operation d u rin g Remote Operation (CON4)...............................................7-8
Ta b le 8.1 I/O TB1 Terminal Block...........................................................................................8-1
Table 8.2 Rated Contacts for Relays CR1, 3, 5, 7, and 8......................................................8-4
Table 8.3 Rated Contacts for Rela ys CR4 and 6...................................................................8-4
Ta b le 8.4 I/O TB2 Terminal Block...........................................................................................8-5
Table 8.5 CON4 Connector (Remote Input Signal).................................................................8-7
Table 8.6 Rated Coils for R e lays CR1, 2 and 3......................................................................8-8
Table 8.7 CON 4 Connector (Remote output signal)..............................................................8-9
Table 8.8 Rated Contacts for Relays CR4, 5, 6, 7, 8, 9 and 10...........................................8-11
Table 8.9 Rem o te Cable Connections (Single-Side Connector Type)..................................8-11
Table 10.1 States of Lamps and REMOTE Output Signals at Pow er Failure.......................10-2
Ta b le 10.2 Operations of the STP Pump after Pow er Recovery.........................................10-2
Table 10.3 Safety Functions................................................................................................ 10-4
Table 11.1 Error Messages.................................................................................................11-3
Table 11.2 Troubleshooting after P owering ON..................................................................11-7
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation....................11-7
Table 11.4 Troubleshooting While the STP P u mp is Rotating...............................................11-8
Table 11.5 Rec ommended Spare Parts.............................................................................11-10
Table 11.6 Cleaning and Decontamination.........................................................................11-11
Ta b le 13.1 Specifications of the STP Pump.........................................................................13-1
Ta b le 13.2 Specifications of the STP Con trol Unit...............................................................13-6
ST P - 301/451 Series Instruct ion Manual
12
FIGURES
Figure 2.1 Cross Sectional View of the STP Pump...............................................................2-2
Figure 4.1 Configuration o f the ST P Pump.............................................................................4-2
Figure 4.2 Installatio n o f the ST P Pum p to th e Vacuum Equipment........................................4-5
Figure 4.3 STP Pump Installation Positions.............................................................................4-7
Figure 4.4 Positi ons of the Outl e t Port on the Horizontally or Slanted Installed STP Pu mp ....4-7
Figure 4.5 E xample of securing the STP pump
(When securing the inlet port with bolts) ....................................................4-9
Figure 4.6 E xample of securing the STP pump
(When securing the inlet port flange with claw clamps)...........................4-10
Figure 4.7 E xample of securing the STP pump
(When installing the damper in the inlet port flange)..................................4-11
Figure 4.8 Connecting the Purge Port..................................................................................4-14
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater...................................5-5
Figure 6.1 STP Control Unit Front Panel.................................................................................6-2
Figure 6.2 STP Control Unit Rear Panel..................................................................................6-4
Figure 6.3 STP Control Unit Top Panel...................................................................................6-5
Figure 6.4 STP Control Unit Side Panel (Left) ........................................................................6-6
Figure 6.5 Peripheral Spaces of the STP Control Unit...........................................................6-8
Figure 6.6 Example of Securing the STP Control Unit............................................................6-9
Figure 6.7 External Dimensions of Ground Cabl e................................................................6-10
Figure 6.8 External Dimensions of STP Connection Cable...................................................6-10
Figure 6.9 External Dimensions of STP Connection Cable...................................................6-11
Figure 6.10 How to Secure the Pow er Ca b le......................................................................6-13
Figure 7.1 STP Pump Operation Procedures .........................................................................7-9
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block.......................................................8-3
Figure 8.2 I/O TB2 Rem ote Input Signal Terminal Block..........................................................8-6
Figure 8.3 CON4 Remote Input Signal Connector ..................................................................8-8
Figure 8.4 CON4 Rem o te Output Signal Connector .............................................................8-10
Figure 9.1 Tuning Procedures...............................................................................................9-2
Figure 9.2 LCD Message in Rated Speed Setting Mode........................................................9-5
Figure 13.1 E xternal Appearance of the STP Pump [without Anti-Corrosion Treatment]
(Example: STP -301)...................................................................................13-2
Figure 13.2 E xternal Appearance of the STP Pump [Chemical Specific Type C]
(Example: STP -301C).................................................................................13-3
Figure 13.3 Label Affixing Position for the STP Pump.........................................................13-4
Figure 13.4 Label Affixing Positions for the Optional Accessories.....................................13-5
Figure 13.5 External Appearance of the the STP Control Unit.............................................13-8
Figure 13.6 Label Affixing Positions for the STP Control Unit..............................................13-9
ST P - 301/451 Series Instruct ion Manual
1-1
Installation
1 Precautions for Safe Operation of the STP Pump
1.1 Usable Gases
Chlorine or fluorine system gases can be used in chemical specific pumps
(STP-301C/STP-451C or other models). When you use gases including alkaline metals,
but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.
◇ To prevent an accident, confirm the characteristics of gases to be used,
referring to the Material Safety Data Sheet (MSDS ) you obtain from the gas
supplier.
And, keep MSDS and a safety advice of gas supplier.
◇ NEVER use corrosive gases (ch lorine, fluorine, o r other system gases) in t he
STP-301/STP-451 pump or other models wi thout anti-corrosion treatm ent.
◇ Introduce a dry N
2
gas (purge gas) to protect the inside of the STP pump when
using reactive or corrosive gases.
◇ C ool the STP pump to prevent the STP pump from overheating when pumping
gases.
1.2 Precautions on Maintenance and Inspection
Read through Section 11 , "T roubleshooting, Maintenanc e and I nspection" before
performing any maintenance or inspection of the STP pump or the STP c ontrol uni t
(such as fuse replacement).
◇ Always turn OFF the primary pow er (switch the breaker "OFF") before
performing any maintenance.
◇ N EVER touch any portions other than those designated when performing
maintenance.
Careless touch may cause electric shock and/or a short-circuiting of the internal
circuit, resulting in product damage or a problem.
ST P - 301/451 Series Instruct ion Manual
1-2
Installation
1.3 Labels
The following labels are affixed to the STP pump and STP control unit.
Read the contents of the labels before operation.
1) STP Pump Caution Label
This label indicates precautions for operating the STP pump.
Follow these precautions.
2) STP Control Unit Caution Label
This label indicates precautions for operating the STP control unit.
Follow these precautions.
3) STP Pump Installation Warning Label
This label indicates the installation of the STP pump.
Install the STP pump according to the precautions in Section 4, "Installing the STP Pump.
"
ST P - 301/451 Series Instruct ion Manual
1-3
Installation
4) Connect or Caution Label
i. This label indicates the lock of the connector
ii. This label instruct s operators to prevent the connectors from being
disconnected w hile the STP pump is in operation.
5) STP Control Unit Safety Instruction Label
This label indicates instructions before operating the STP control unit.
6) High Voltage Device Caution Label
The STP control unit is equipped with a high voltage device. This label warns
operators to p ay attention to the high voltage device.
7) Rotational Direction I ns truction Label
This label indicates the rotational direction of the STP pump.
The STP pump rotates in this direction.
ST P - 301/451 Series Instruct ion Manual
1-4
Installation
8) Voltage Rating Label
This label indicates the rated voltage of the STP control unit.
Use voltage specified in this label.
200
V specification
100 V specification
9) Hot Surface Warning Label
This label instructs operators so as not to touch the hot surfac e of the STP
pump.
The use of the baking heater (opt ional ac cessory) may lead to a con si derable
rise in temperatures outside the STP pump.
This label warns operators so as not to burn hands.(only when using the baking
heater.)
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Installation
2 Operation Principle of the STP Pump
The STP-301/451 is a series of magnetically-levitated turbomolecular pumps, featuring
the following:
• Oil free
• Low vibration
• High reliability
The STP p ump is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the
outlet port by the high speed rotation of the rotor.
Rotor blade (1) is supported by the magnetic bearing without mechanical contact.
Therefore the STP pump requires no lubrication oil unl ike conventional turbomolecular
pumps using ball bearings.
The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is
supported in the radial direction by 2 pairs of radial direction active magnetic bearings
that consist of radial sensor (3) and radial electromagnet (4). A pair of axial directi on
active magnetic bearings consists of axial sensor (5) and axial electromagnet (6) to
support the rotor in the axial direction. Because the rotor is thus s upported without
mechanical contact, it can rotate with low vibration.
There is less heat generated from m agnetic bearings because there i s no friction.
Therefore the STP pump requires no cooling. However, the STP pump requires water
cooling or air cooling during baking and gas pumping.
Taking into consideration a breakage of magnetic bearings, touch down bearings (7) and
(8) coated with solid lubrication have been installed. They do not contact the rotor
during the rated operation.
A radial sensor, an axial sensor, a rotational speed sensor and a temperature sensor
always monitor the magnetic bearing as well as the rotor. If an abnormality/error
occurs, the rotor will stop.
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Installation
(1)RotorBlade
(2)StatorBlade
(3)RadialSensor
(4)RadialElectromagnet
(6)AxialElectromagnet
(5)AxialSensor
(8)TouchDownBearing
(7)TouchDownBearing
Figure 2.1 Cross Sectional View of the STP Pump
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Installation
3 Unpacking
3.1 Unpacking the STP P ump and the STP Control Unit
Check the following before unpacking the STP pump and STP control unit.
1) Check the package for bruises , br eakage, wet ness, and other.
If there is any abnormality/error or it is judged necessary to return the product,
contact BOC Edwards or the selling agency.
2) Check the contents of the package.
See Section 3.2, "Accessories."
◇ Be careful not to scratch the flange of the STP pump.
Before installing the STP pump, check whether or not there are scratches on the
surface.
◇ It is recomm ended to keep the packaging materials, such as the corrugated
fiberboard container and cushioning material for possible reuse.
3.2 Accessories
Table 3.1 Accessories
Item Q'ty Remarks
STP control unit 1
Primary power cable *1 1 With a single-side connector
STP connection cable *1 1 With both-side connectors
Ground cable *1 1 With both-side crimp-type terminal lugs
Inlet port cover 1
Outlet port cover 1
STP connector cover 1
Spare fuses 250V, 10A 2 F1, F 2 (rear panel)
I nstruction M anual 1
The accessories listed below are supplied to the chemical specific pump (type C) in
addi tion to the accessories in Table 3.1.
Table 3.2 Accessories for Chemical Specific Pump (Type C)
Item Q'ty Remarks
Blank flange for purge port 1 KF *210
Clamping ring for purge port 1 KF
*2
10
O-ring washer for purge port 1 KF
*2
10
*1
: The standard cable length is 3 m.
*2
: JIS
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Installation
4 Installation of the STP Pump
4.1 Name and Function of Each Part
(1) Inlet Port Flange (ICF
*1
, VG*1, ISO, and other)
Connect ed to the vacuum equipment (at the high vacuum side).
(2) Outlet Por t Flange (KF
*2
25)
Connected to the inlet port side of the backing pump.
(3) STP Connector (41 pins)
Connect ed to the STP connection cable.
(4) Ground Terminal
Used for grounding.
Connect the ground cable between this terminal and t he ground terminal of
the STP control unit.
The ground terminal is marked with
label.
(5) Purge Port (KF
*2
10)[Chemic al S pecific Pump (Type C)]
Int roduces a purge g as.
This port is attached only to the chemical specific pump (type C) . In order
to protect the inside of the STP pump when pumping reactive or corros ive
gases. The STP pump is d elivered with a blank flange attached to this port.
*1
: JVIA Standard
*2
: JIS
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Installation
Figure 4.1 Configuration of the STP Pump
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Installation
4.2 Precautions Before Install ation
4.2.1 Operating Environment
◇ C heck the properties of the gas to be used, referring to the Material Safety Data
Sheet (M SDS) you obtain from the gas supplier. And, keep MSDS and a safety
advice of gas supplier.
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used w ith the inert gas
controlled if necessary. And, take measures according to MSDS to prevent an
accident caused by exhaust gas.
◇ Chlor ine or fluorine syste m g ases can be used only in chemical specific pumps
(type C ). When you use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, Sn, or HBr, contact BOC Edwards.
◇ NEVER use corrosive gases (ch lorine, fluorine, o r other system gases) in t he
STP-301/STP-451 pump or other models wi thout anti-corrosion treatm ent.
◇ If the STP pump is used in an area w ith radiation, contact BOC Edw ards.
Install the STP pump in a place meeting the following requirements:
Ambient Temperature 0 to 40 °C
Ambient Relative Humidity 30 to 95 % (no dew condensing)
Environment A place free of externally-appli ed mechanical shock.
A place free of a heat source
(Keep clear of the heat source or attach a thermal shield
plate).
A place free of a strong magnetic field
(Range: up to 15 mT (150 G) in the axial direction, and up
to 3 mT (30 G) in the radial direction with respect to the
rotational axis of the STP pump).
A place free of a strong electric field.
A place free of exposure to radiation.
No discharge of high voltage (more than 500V)
(If more than 500 V is discharged, contact BOC Edwards.)
STP Pump Installation
Equipment Condi tions
Install the STP pump securely so that foreign particles
will easily fall into the STP pump (Ex.: Si wafers or
samples are positioned above the STP pump). ( To prevent
foreign particles from falling into the STP pump, design a
shield plate with large conductance.)
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Installation
4.2.2 Installation Area
Leave enough spaces for the follow ing in addition to the space for the STP pump:
Space for maintenance an d inspection
Space for connecting cables
◇ The minimum bending radius of the STP connection cable i s
150 mm (see Section 13, "External Appearance of the STP Pump" [bendi ng
dimensions of the STP connection cable]).
DO NOT excessively bend the cables and bew are of any obstacles when
installing the STP pump.
Also, leave enough space to install other cables without bending them
excessively.
◇ The L-type STP connection cable is also offered. Contact BOC E dwards if
necessary.
4.2.3 Bench
A bench must be p repared by the customer to secure the STP pump. The shape a nd
size of the bench differ depending upon the type of STP pump. Follow the p recautions
of the WARNING, CAUTION, or NOTICE (see Section 4.3.3, "How to Secure th e STP
Pump").
◇ The S TP pump is provided with a high-speed rotor. Any internal
abnormality/error may result in a j ump in rotational torque leading to personal
injury or peripheral equipment damage.
Design and secure the bench for the STP pump so that it can w ithstand the
maximum torque generated due to the occurrence of an abnormal ity/error.
Refer to Section 4.3.3 "How to Secure the STP Pump" for abnormal torque.
◇ Secure the customer-prepared bench and the vacuum equipment on the floor or
peripheral equipment and other equipment in accordance with the customer
application. N EVER move them while the STP pump is in operation.
◇ C onfirm the dimensions by the external appearance of the STP pump w hen
designing the bench.
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Installation
The bolt may not be able to be inserted from the low er side of the inlet port
according to the shape of the inlet port flange.
When the external appearance of the STP pump is not in the manual, contact
BOC Edwards.
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Installation
4.3 How To Install the STP Pump
Install the STP pump t o the vacuum equipment as shown in Figure 4.2.
Figure 4.2 Installation of the STP Pump to the Vacuum Equipm ent
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Installation
4.3.1 Cleaning the Seal
Inspect the seals of the inlet and outlet port flanges for dirt or oil spots before installing
the STP pump to the vacuum equipment.
Take t he following m easures for cleaning the seals:
Clean off with a pure gas.
Wipe with proper solvent (such as alcohol).
◇ A splinter shield is attached to the inlet port flange to prevent foreign particles
from falling into the STP pump.
Always leave the splinter shield attached during operation.
◇ The wipes used for clean the flange of the pump might become hazardous
waste depending upon the solvent (alcohol). Dispose of the contaminated
wipes appropriatel y according to the regulations of each national and/or local
government.
◇ The splinter shield cannot perfectly prevent foreign particles from falling into the
STP pump.
DO NOT install the STP pump in such a manner that foreign particles can easily
fall into it (for example, Si wafers or samples are positioned above the STP
pump). If installing the STP pump in such a manner, always attach a shield plate
with sufficient conductance above the STP pump to prevent foreign particles
from falling into it. Foreign particles falling into the STP pump through the
splinter shield may result in product damage.
◇ Be careful not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before installing the
STP pump.
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Installation
4.3.2 STP Pump Installation Positions
The STP pump can be installed vertically, horizontally, and upside-down and slanted.
Vacuum
Equipm ent
Upside-down
H orizontal
Slanted
Vertical
Figure 4.3 STP Pump Installation Positions
When installing the STP pump in a horizontal or slanted position, it is recommended to
install it s o that the direc tion of the outlet port is on a vertical or horizontal plane in the
direction of the gravity.
This makes it p ossible t o reduce the load on the magnetic bearing and the heat
generated by the STP pump.
Outlet Port
Outlet Port
Outlet Port
Outlet Port
Direction of Gravity
Figure 4.4 Positions of the Outlet Port on the H orizontally or Slanted Installed STP Pump
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