Edwards 900-615-MH15, 900-615-MH10, 900-607-MV05, 900-615-MV10, 900-607-MH20 Instruction Manual

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Page 1

S900-01-880

Issue C Original

Instruction Manual

6 Inch MSeal Booster Pumps and Process Isolation Booster Pumps

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This page has been intentionally left blank.

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This product has been manufactured under a quality system registered to ISO9001

Declaration of Conformity

We, Edwards, Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility that the product(s)

900607MHR101 607 MHR Booster, PFPE Prep 900607MVR101 607 MVR Booster, PFPE Prep 900615MHR101 615 MHR Booster, PFPE Prep 900615MVR101 615 MVR Booster, PFPE Prep 90061BMHR101 61B MHR Booster, PFPE Prep 90061BMVR101 61B MVR Booster, PFPE Prep 900622MHR101 622 MHR Booster, PFPE Prep 900622MVR101 622 MVR Booster, PFPE Prep

9006075HR101 607 5HR Booster, PFPE Prep 9006075VR101 607 5VR Booster, PFPE Prep 9006155HR101 615 5HR Booster, PFPE Prep 9006155VR101 615 5VR Booster, PFPE Prep 90061B5HR101 615 5HR Bypass Booster, PFPE Prep 90061B5VR101 615 5VR Bypass Booster, PFPE Prep 9006225HR101 622 5HR Booster, PFPE Prep 9006225VR101 622 5VR Booster, PFPE Prep

900607MHR 607 MHR Booster 900607MVR 607 MVR Booster 900615MHR 615 MHR Booster 900615MVR 615 MVR Booster 90061BMHR 61B MHR Booster 90061BMVR 61B MVR Booster 900622MHR 622 MHR Booster 900622MVR 622 MVR Booster

9006075HR 607 5HR Booster 9006075VR 607 5VR Booster 9006155HR 615 5HR Booster 9006155VR 615 5VR Booster 90061B5HR 615 5HR Bypass Booster 90061B5VR 615 5VR Bypass Booster 9006225HR 622 5HR Booster 9006225VR 622 5VR Booster

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2: 1997 Safety Requirements, Vacuum Pumps EN60034-1: 1999 Rotating Electrical Machines – Rating & Performance

following the provisions of

73/023/EEC Low Voltage Directive. 89/336/EEC Electromagnetic Compatibility Directive. 98/37/EC Machinery Safety Directive.

P200-01-760C

P. Meares – Technical Manager Date and Place

July 2009, Shoreham

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Page 5

Contents

S900-01-880 Issue C

Contents

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

1.2 ATEX directive implications ............................................................................................ 2

1.3 Description ................................................................................................................ 2

1.4 General information ..................................................................................................... 3

1.5 Booster pump models ................................................................................................... 3

1.6 Principle of operation ................................................................................................... 6

1.7 Bareshaft (belt drive) booster pumps ................................................................................ 7

1.8 Direct drive booster pumps (with shaft-mounted motors) ........................................................ 7

1.9 Integral bypass valve (model 615 pumps only) ...................................................................... 7

1.10 Oxygen and reactive gas service ...................................................................................... 7

2 Technical Data ....................................................................................9

2.1 Operating and storage conditions ..................................................................................... 9

2.2 Pump technical data .................................................................................................... 9

2.3 Item numbers ............................................................................................................21

3 Installation .................................................... ................................... 23

3.1 Safety ..................................................................................................................... 23

3.2 System design considerations .........................................................................................23

3.3 Unpack and inspect .....................................................................................................24

3.4 Move the booster pump to its operating location .................................................................24

3.5 Locate the booster pump ..............................................................................................27

3.6 Connect the vacuum and exhaust pipelines ........................................................................27

3.6.1 Vacuum inlet pipeline ..................................................................................................28

3.6.2 Accessory port pipelines ...............................................................................................28

3.6.3 Exhaust pipeline ........................................................................................................28

3.7 Belt drive booster pump installation ................................................................................29

3.8 Direct drive booster pump installation ..............................................................................30

3.9 Fill the booster pump with oil ........................................................................................33

3.9.1 Hydrocarbon oil .........................................................................................................33

3.9.2 Perfluoropolyether (PFPE) oil .........................................................................................34

3.10 Electrical connections ..................................................................................................35

3.10.1 Electrical supply configuration .......................................................................................35

3.10.2 Check the direction of rotation ......................................................................................36

4 Operation ........................................................................................ 37

4.1 Operational safety ......................................................................................................37

4.2 Pre-start checks .........................................................................................................37

4.3 Start-up ..................................................................................................................37

4.4 Shutdown ................................................................................................................. 38

5 Maintenance ..................................................................................... 39

5.1 Safety information ......................................................................................................39

5.2 Leak detection ..........................................................................................................39

5.3 Maintenance plan .......................................................................................................40

5.4 General maintenance ..................................................................................................40

5.5 Oil-level checks .........................................................................................................40

5.6 Changing the oil .........................................................................................................41

5.7 Coupling maintenance .................................................................................................41

dcs/7590/09/07

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

5.8 Belt drive maintenance ................................................................................................41

5.9 Check the bearing condition ..........................................................................................42

5.10 Clean the motor and drive ............................................................................................42

5.11 Check the timing ........................................................................................................42

5.12 Troubleshooting ......................................................................................................... 42

6 Storage and Disposal ....................................................... ..... ..... ..... ..... 45

6.1 Storage ...................................................................................................................45

6.2 Disposal ...................................................................................................................45

7 Services and Spares ............................................................................ 47

7.1 Introduction .............................................................................................................47

7.2 Service ....................................................................................................................47

7.3 Spares .....................................................................................................................47

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 General arrangement of the H (horizontal) booster ............................................................... 4

2 General arrangement of the V (vertical) booster ................................................................... 5

3 Principle of operation ................................................................................................... 6

4 Direct drive H (horizontal) booster pump dimensions ............................................................14

5 Direct drive V (vertical) booster pump dimensions ................................................................15

6 Direct drive H (horizontal) booster pump with bypass valve dimensions ......................................16

7 Direct drive V (vertical) booster pump with bypass valve dimensions .........................................16

8 Bareshaft H (horizontal) booster pump dimensions ...............................................................17

9 Bareshaft V (vertical) booster pump dimensions ..................................................................18

10 Bareshaft H (horizontal) booster pump with bypass valve dimensions .........................................19

11 Bareshaft V (vertical) booster pump with bypass valve dimensions ............................................20

12 Lifting the booster pump ..............................................................................................25

13 Coupling .................................................................................................................. 32

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Contents

S900-01-880 Issue C

Tables

Table Page

1 Application data ......................................................................................................... 3

2 Operating and storage conditions ..................................................................................... 9

3 Technical data: 607-MH/MV05, 607-MH/MV20, 615-MH/MV10 and 615-MH/MV15 direct drive MSeal booster

pumps (with NEMA motors) 9

4 Technical data: 61B-5V10 and 622-5 H/5V25 direct drive process isolati on booster pump, and 61B-MH/MV1 0

61B-MH/MV25 and 622-MH/MV25 direct drive MSeal booster pumps (with NEMA motors) 10

5 Technical data: 607MHR/MVR601 and 615MHR/MVR601 direct drive M Seal booster pumps (with IEC motors)

6 Technical data: 61BMHR/MVR601 and 622MHR/MVR601 direct drive MSeal booster pumps (with IEC motors)

7 Technical data: bareshaft MSeal booster pumps ...................................................................13

8 Technical data: bareshaft process isolation booster pumps .....................................................13

9 Item numbers: direct drive MSeal booster pumps and process isolation booster pumps ....................21

10 Item numbers: bareshaft MSeal booster pumps and process isolation booster pumps .......................22

11 Centre of mass dimensions ............................................................................................26

12 Minimum pulley diameters ............................................................................................29

13 Torque ratings ...........................................................................................................30

14 Belt tensions .............................................................................................................30

15 Oil quantities ............................................................................................................33

16 Maintenance plan .......................................................................................................40

17 Troubleshooting ......................................................................................................... 43

18 Spares ..................................................................................................................... 47

Associated publications

Publication title Publication number

Vacuum pump and vacuum system safety P400-40-100

Trademark credits

Fomblin® is a registered trademark of Ausimont SpA.

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

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Introduction

S900-01-880 Issue C

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions fo r the Edwards MSeal Bo oster Pumps and Process Isolation Booster Pumps (referred to as "booster pump" or "pump" throughout the remainder of the manual). You must use the booster pump as specified in this manual. Read this manual b efore you install or use the booster pump. The booster pumps covered by this manual are listed in Section 2.3. You must only use PFPE-prepared bareshaft booster pumps on oxygen or reactive gas service: see Section 1.3.

Read this manual before you install and use the booster pump. Important safety information is highligh ted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process

The following IEC warning labels appear on the pump:

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to people.

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - trip hazard.

Warning - use protective equipment.

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

The units used throughout this manual conform to the SI international system of units of measurement.

1.2 ATEX directive implications

The booster pump is not designed to meet European ATEX requirements.

1.3 Description

The booster pumps are single stage, positive displacement precision engineered machines. You must use the booster pump with a suitable backing or roughing pump. The booster pump is not intended for stand-alone operation. The pump gears provide for quiet operation while maintaining proper impeller timing.

The booster pumps are supplied as standard with keyless timing, drive side roller bearings, mechanical vacuum seal, and large oil-level sight-glasses. These features provide for ease of maintenance and improve reliability.

The pump identification plate provides specific details ab out the pump, including: pump type; part number and serial number; and so on. We recommend that you have this information available when you contact Edwards for advice, parts or service.

Direct drive booster pumps are supplied with hydrocarbon lubricating oil in the oil reservoirs. Standard bareshaft booster pumps are also supplied with hydrocarbon lubricating oil in the oil reservoirs. Special service (oxyg en service) bareshaft booster pumps are specially prepared free of hydrocarbons in the factory and are supplied without oil in the reservoirs. You must use PFPE lubricating oil in special service (oxygen service) pumps.

Warning - moving parts present.

Warning - hot surfaces.

Warning - heavy object.

Warning - entanglement.

Warning - possible explosion.

WARNING

Standard booster pumps are not intended for use with hazardous, reactive, flammable and explosive gases. Consult Edwards for advice before you use a booster pump on one of these applications.

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Introduction

S900-01-880 Issue C

MSeal booster pumps have a mechanical shaft seal on the drive shaft, and labyrinth shaft-seals between the gearbox and the swept volume. Process isolation booster pumps have a mechanical shaft seal on the drive shaft, and mechanical seals between the gearbox and the swept volume.

The booster pump general arrangements are shown in Figures 1 and 2.

1.4 General information

The booster pumps are available in horizontal (H) and vertical (V) configurations. The models of booster pumps are the 607, 615 and 622 and these model numbers denote the pump body lengths: 7.0, 15.0 and 2 2.0 inches. The booster pumps are available as bareshaft (belt driven) pumps, and as direct drive pumps (with shaft-mounted motors).

The booster pump gear centre distance is 6 inches. The bo oster pump have normal operation limits from 800 to 3600 r min-1 (r.p.m.). The volumetric pumping rates increase with body length and rotational speed. Pump components in contact with the pumped gases are cast iron and carbon steel.

Refer to Table 1 to determine the operational limits for the booster pumps. The limits are based on compression and pumping speeds for the specific application. Table 1 provides the maximum performance limits of the pumps. The limits, backing pump speed and gas loads determine the cut-in pressure and continuous operation pressure limits.

Edwards can recommend cut-in and operation limits when supplied with chamber size, backing pump and gas load information. The first limit reached during operation is the limiting factor. Control devices such as timers and pressure and temperature switches may be required to properly control the operation of the booster pumps.

1.5 Booster pump models

The booster pumps are available in two versions:

 H model booster pumps have vertical connections and are configured for horizontal gas flow through the

pump. (“H” appears in the Item Number of these pumps.)

 V model booster pumps have horizontal connections and are configured for vertical gas flow through the

pump. (“V” appears in the Item Number of these pumps.)

The 615 booster pump is available with an optional bypass valve (see Section 1.9) which allow s pump operation from atmospheric pressure and reduces pump-down time. The booster pumps can be prepared hydrocarbon free for oxygen service. Variable frequency (speed) drives are available for the pumps.

Table 1 - Application data

Pump model

607 615 615B* 622

Maximum pressure differential 5.06 x 10

506 mbar

380 Torr

5.06 x 104 Pa 506 mbar

380 Torr

Not applicable 3.33 x 104 Pa

333 mbar

250 Torr

Maximum temperature rise 135 ºC

275 ºF

135 ºC 275 ºF

121 ºC 250 ºF

Maximum discharge temperature 191 ºC

375 ºF

191 ºC 375 ºF

177 ºC 350 ºF

Maximum displacement † 2056 m

3h-1

1212 cfm

4412 m3h

-1

2600 cfm

4412 m3h

-1

2600 cfm

6528 m3h

-1

3840 cfm Inlet and exhaust connection: ASA 6 inches 8 inches 8 inches 8 inches Noise level average at ultimate vacuum * < 85 dB(A) < 85 dB(A) < 85 dB(A) < 85 dB(A)

* With bypass valve † At 3600 r min-1 (3600 rpm)

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

You must never operate the booster pump unless it is installed in a proper vacuum system with adequate guarding to protect people from injury. You must fit safety guards to bareshaft booster pumps before operation.

Note that:

 “B” in the pump Item Number specifies that the pump has a bypass valve.  “5H” or “5V” in the pump Item Number specifies that the pump is a process isolation booster pump,

otherwise the pump is an MSeal booster pump.

 “HR” or “VR” at the end of the Item Number specifies that the pump is a standard service bareshaft pump

(with hydrocarbon oil), “HR101” or “VR101” at the end of the Item Number specifies that the pump is an oxygen service (hydrocarbon free) bareshaft pump, otherwise the pump is a standard service pump (with hydrocarbon oil).

Figure 1 - General arrangement of the H (horizontal) booster

A. Standard direct drive pump B. Direct drive pump with bypass valve

1. Direction of rotation arrow

2. Motor (IEC frame shown)

3. Oil filler plug (drive end)

4. Inlet

5. Oil filler plug (gear end)

6. Oil-level sight-glass (gear end)

7. Oil drain plug (gear end)

8. Oil drain plug (drive end)

9. Oil-level sight-glass (drive end)

10.Outlet

11.Bypass valve

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Introduction

S900-01-880 Issue C

Figure 2 - General arrangement of the V (vertical) booster

A. Standard direct drive pump B. Direct drive pump with bypass valve

1. Oil filler plug (gear end)

2. Inlet

3. Oil filler plug (drive end)

4. Motor (IEC frame shown)

5. Direction of rotation arrow

6. Oil-level sight-glass (drive end)

7. Outlet

8. Oil drain plug (drive end)

9. Oil drain plug (gear end)

10.Oil-level sight-glass (gear end)

11.Bypass valve

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

1.6 Principle of operation

The basic operation of an H (horizontal) booster is shown in Figure 3.

Figure 3 - Principle of operation

Detail A - Gas (3) enters the pump body through the inlet (1).

In the pump body, the upper impeller rotor rotates clo ckwise, and the lower impeller rotor rotates anticlockwise (counterclockwise).

Detail B - As the impeller rotors rotate, gas (3) is drawn into the volume between the pump body wall and the rotors.

Detail C - As the rotors rotate further, gas (3) is trapped between the pump body wall and the rotors, and is transferred towards the outlet (2). The rotors rotate with precise timing to maintain the proper clearances, limiting gas back flow.

Detail D - As the rotors rotate further, the gas (3) is discharged through the pump outlet (2). The pump discharges four volumes for every full rotation of the drive shaft.

Detail E: bypass valve operation (only applicable to pumps with a bypass valve) - The optional integral bypass valve limits the pressure differential across the pump. During pump operation, if the compression creates an excessive pressure differential across the pump, the bypass valve (4) opens, to allow a portion of the compressed gases (5) to flow back towards the inlet side of the pump.

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Introduction

S900-01-880 Issue C

1.7 Bareshaft (belt drive) booster pumps

The booster pumps have been designed to withstand loading from standard V-belts, for standard operation from 800 to 3600 r min-1 (r.p.m.). The loads induced into the drive shaft depend on the power applied to the shaft. Edwards specifies a minimum pulley diameter for the drive shaft based on motor power. You must never use a pulley with a smaller diameter than those specified in this manual. Refer to Table 12 for specific details on pulley diame ters. Edwards can provide booster pumps and motors sized for most applications.

1.8 Direct drive booster pumps (with shaft-mounted motors)

Direct drive eliminates the tension loads associated with belt drives. The direct drive booster pump consists of a standard booster pump, coupling, motor support, and C-face (NEMA) or D-flange (IEC) motor. Optional variable frequency drives are available from Edwards to improve performance on booster pumps without bypass valves. Consult Edwards for application information. Various voltage, frequency, speed and power motors are available. Large power motors (> 22.37 kW, 30 h.p.) cannot be supported by a motor support alone.

1.9 Integral bypass valve (model 615 pumps only)

Model 615 booster pumps can be supplied with an integral bypass valve for operation from a tmospheric pressure. The bypass regulates the amount of compression across the booster pump body. The limiting speed for the bypass booster pump is 3600 r min-1 (r.p.m.). The bypass valve regulates the pressure differential across the booster pump to 7.9 x 103 Pa (79 mbar, 60 Torr). Maximum discharge temperature and maximum temperature rise are the same as for the standard 615 booster pumps. Under so me operating conditions, it is not possible to o perate the bypass booster pumps continuously because of the heat generated from gas compression. These conditions depend on chamber size and backing pump speeds. Consult Edwards if pump-down exceeds 45 minutes. Refer to Figure 3 detail E for a crosssection view of a bypass booster pump.

1.10 Oxygen and reactive gas service

Edwards can prepare bareshaft booster pumps for hazardous gas duties (where pumped gases could react with the hydrocarbon lubricants in standard pumps). When prepared for hazardous gas du ties, the booster pumps will be free of hydrocarbons and must be used with inert lubricating oil which will not react with the hazardous gases pumped.

You must take special care when operating booster pumps on oxygen pumping duties: refer to the “Vacuum pump and vacuum system safety - chemical & industrial systems“ publication (Edwards Publication Number P400-40-100).

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

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Technical Data

S900-01-880 Issue C

2Technical Data

2.1 Operating and storage conditions

2.2 Pump technical data

Performance data, electrical data and mechanical data for the booster pumps are provided in Tables 3 to 8.

Table 2 - Operating and storage conditions

Ambient operating temperature range 12 to 40 ºC (54 to104 ºF) Ambient storage temperature range -30 to 70 ºC (-22 to 158 ºF) Normal surface temperature of the pump body at ultimate

vacuum (operation), ambient temperature of 20 ºC (68 ºF)

50 to 70 ºC (122 to 158 ºF)

Maximum ambient operating humidity 90% RH

Table 3 - Technical data: 607-MH/MV05, 607-MH/MV20, 615-MH/MV10 and 615-MH/MV15 direct drive MSeal

booster pumps (with NEMA motors)

900-607-MH05 900-607-MV05

900-607-MH20 900-607-MV20

900-615-MH10 900-615-MV10

900-615-MH15 900-615-MV15

Pumping speed 1040 m

3h-1

612 cfm

1040 m3h

-1

612 cfm

2210 m3h

-1

1300 cfm

4420 m3h

-1

2600 cfm

Nominal power 3.75 kW

5 hp

15 kW

20 hp

7.5 kW 10 hp

11 kW

15 hp Voltage 230/460 V ac 208-230/460 V ac 208-230/460 V ac 208-230/460 V ac Frequency 60 Hz 60 Hz 60 Hz 60 Hz Phases 3333 Enclosure TEFC IP55 TEFC IP55 TEFC IP55 TEFC IP55 Full load current 13 A/6.6 A 53 A/48 A/24 A 27.2 A/24.6 A/

12.3 A

39.8 A/36 A/18 A

Motor speed 1725 r min

-1

1725 rpm

1760 r min

-1

1760 rpm

1750 r min

-1

1750 rpm

3500 r min

-1

3500 rpm

Recommended fuse/circuit breaker

20 A/10 A 70 A/35 A 35 A/17.5 A 50 A/25 A

Dimensions Figures 4 and 5 Figures 4 and 5 Figures 4 and 5 Figures 4 and 5 Total mass (pump and

motor)

274 kg

603 lb

406 kg 897 lb

385 kg 847 lb

392 kg 865 lb

Motor mass 34 kg

75 lb

167 kg 367 lb

84 kg

185 lb

91 kg

200 lb

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

Table 4 - Technical data: 61B-5V10 and 622-5H/5V25 direct drive process isolation booster pump, and 61B-MH/

MV10 61B-MH/MV25 and 622-MH/MV25 direct drive MSeal booster pumps (with NEMA motors)

900-61B-5V10

900-61B-MH10 900-61B-MV10

900-61B-MH25 900-61B-MV25

900-622-MH25 900-622-MV25

900-622-5H25 900-622-5V25

Pumping speed 2210 m

3h-1

1300 cfm

2210 m3h

-1

1300 cfm

4420 m3h

-1

2600 cfm

6528 m3h

-1

3840 cfm

Nominal power 7.5 kW

10 hp

7.5 kW 10 hp

18.6 kW 25 hp

Voltage 208-230/460 V ac 208-230/460 V ac 208-230/460 V ac 208-230/460 V ac Frequency 60 Hz 60 Hz 60 Hz 60 Hz Phases 3 3 3 3 Enclosure TEFC IP55 TEFC IP55 TEFC IP55 TEFC IP55 Full load current 27.2 A/24.6 A/

12.3 A

27.2 A/24.6 A/

12.3 A

66.3 A/60 A/30 A 66.3 A/60 A/30 A

Motor speed 1750 r min

-1

1750 rpm

1750 r min

-1

1750 rpm

3500 r min

-1

3500 rpm

3500 r min

-1

3500 rpm

Recommended fuse/circuit breaker

35 A/17.5 A 35 A/17.5 A 80 A/40 A 80 A/40 A

Dimensions Figure 7 Figures 6 and 7 Figures 6 and 7 Figures 4 and 5 Total mass (pump and motor) 392 kg

865 lb

392 kg 865 lb

533 kg

1175 lb

619 kg

1365 lb

Motor mass 84 kg

185 lb

84 kg

185 lb

167 kg

367 lb

167 kg 367 lb

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Technical Data

S900-01-880 Issue C

Table 5 - Technical data: 607MHR/M VR601 and 615MHR/MVR601 direct drive MSeal booster pumps (with IEC

motors)

900607MHR601* 900607MVR601*

900615MHR601* 900615MVR601*

50 Hz operation 60 Hz operation 50 Hz operation 60 Hz operation

Pumping speed 1734 m3h

-1

1020 cfm

2080 m3h

-1

1224 cfm

3684 m3h

-1

2167 cfm

4420 m3h

-1

2600 cfm

Nominal power 7.5 kW

10 hp

7.5 kW 10 hp

11 kW

15 hp

11 kW

15 hp Voltage 200/400 V ac 230/460 V ac 200/400 V ac 230/460 V ac Frequency 50 Hz 60 Hz 50 Hz 60 Hz Phases 3 3 3 3 Enclosure IP55 IP55 IP55 IP55 Full load current 27.8 A/13.9 A 24 A/12 A 40 A/20 A 34.4 A/17.2 A Motor speed 2905 r min

-1

2905 rpm

3510 r min

-1

3510 rpm

2940 r min

-1

2940 rpm

3555 r min

-1

3555 rpm Recommended fuse/circuit breaker 40 A/20 A 35 A/17.5 A 60 A/30 A 50 A/25 A Dimensions Figures 4 and 5 Figures 4 and 5 Figures 4 and 5 Figures 4 and 5 Total mass (pump and motor) 330 kg

726 lb

330 kg

726 lb

446 kg 981 lb

Motor mass 74 kg

163 lb

74 kg

163 lb

118 kg 260 lb

* These are CE-compliant dual-frequency booster pumps

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

Table 6 - Technical data: 61BMHR/MVR6 01 and 622MHR/MVR601 direct drive MSeal booster pumps (with IEC

motors)

90061BMHR601 * 90061BMVR601 *

900622MHR601 * 900622MVR601 *

50 Hz operation 60 Hz operation 50 Hz operation 60 Hz operation

Pumping speed 3684 m3h

-1

2167 cfm

4420 m3h

-1

2600 cfm

5440 m3h

-1

3200 cfm

6258 m3h

-1

3840 cfm

Nominal power 18.5 kW

25 hp

18.5 kW 25 hp

Voltage 200/400 V ac 230/460 V ac 200/400 V ac 230/460 V ac Frequency 50 Hz 60 Hz 50 Hz 60 Hz Phases 3333 Enclosure IP55 IP55 IP55 IP55 Full load current 57.2 A/28.6 A 67 A/33.5 A 57.2 A/28.6 A 67 A/33.5 A Motor speed 2950 r min

-1

2950 rpm

3550 r min

-1

3550 rpm

2950 r min

-1

2950 rpm

3555 r min

-1

3555 rpm Recommended fuse/circuit breaker 70 A/35 A 90 A/50 A 70 A/35 A 90 A/50 A Dimensions Figures 6 and 7 Figures 6 and 7 Figures 6 and 7 Figures 6 and 7 Total mass (pump and motor) 538 kg

1185 lb

538 kg

1185 lb

624 kg

1375 lb

624 kg

1375 lb

Motor mass 116 kg

260 lb

74 kg

163 lb

145 kg 319 lb

* These are CE-compliant dual-frequency booster pumps

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Technical Data

S900-01-880 Issue C

Table 7 - Technical data: bareshaft MSeal booster pumps

900-607-MHR

900607MHR101

900-615-MHR

900615MHR101

900-61B-MHR

90061BMHR101

900-622-MHR

900622MHR101

Dimensions Figure 8 Figure 8 Figure 10 Figure 8 Pump mass 220 kg

483 lb

279 kg 614 lb

342 kg 753 lb

429 kg 945 lb

900-607-MVR

900607MVR101

900-615-MVR

900615MVR101

900-61B-MVR

90061BMVR101

900-622-MVR

900622MVR101

Dimensions Figure 9 Figure 9 Figure 11 Figure 9 Pump mass 218 kg

480 lb

277 kg 610 lb

341 kg 749 lb

428 kg 941 lb

Table 8 - Technical data: bareshaft process isolation booster pumps

900-607-5HR

9006075HR101

900-615-5HR

9006155HR101

900-61B-5HR

90061B5HR101

900-622-5HR

9006225HR101

Dimensions Figure 8 Figure 8 Figure 10 Figure 8 Pump mass 235 kg

516 lb

294 kg 647 lb

357 kg 786 lb

445 kg 978 lb

900-607-5VR

9006075VR101

900-615-5VR

9006155VR101

900-61B-5VR

90061B5VR101

900-622-5VR

9006225VR101

Dimensions Figure 9 Figure 9 Figure 11 Figure 9 Pump mass 224 kg

492 lb

283 kg 623 lb

346 kg 762 lb

433 kg 954 lb

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S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

Figure 4 - Direct drive H (horizontal) booster pump dimensions

Pump

Dimensions: mm (inch)

ABCDEFG

900-607-MH05 228 (8.5) 543 (21.4) 406 (16.0) 1087 (42.8) 309 (12.1) 292 (11.5) 270 (10.7) 900-607-MH20 228 (8.5) 543 (21.4) 406 (16.0) 1225 (48.2) 309 (12.1) 292 (11.5) 270 (10.7) 900-615-MH10 228 (8.5) 543 (21.4) 406 (16.0) 1367 (53.8) 409 (16.1) 292 (11.5) 470 (18.5) 900-615-MH15 228 (8.5) 543 (21.4) 406 (16.0) 1367 (53.8) 409 (16.1) 292 (11.5) 470 (18.5) 900-622-MH25 228 (8.5) 543 (21.4) 438 (17.3) 1657 (65.2) 498 (19.6) 292 (11.5) 648 (25.5) 900-622-5H25 228 (8.5) 543 (21.4) 438 (17.3) 1657 (65.2) 498 (19.6) 292 (11.5) 648 (25.5) 900607MHR601 228 (8.5) 543 (21.4) 406 (16.0) 1164 (46.6) 309 (12.1) 292 (11.5) 270 (10.7) 900615MHR601 228 (8.5) 543 (21.4) 406 (16.0) 1515 (59.6) 409 (16.1) 292 (11.5) 470 (18.5) 900622MHR601 228 (8.5) 543 (21.4) 438 (17.3) 1694 (66.9) 490 (19.3) 292 (11.5) 648 (25.5)

Page 23

Technical Data

S900-01-880 Issue C

Figure 5 - Direct drive V (vertical) booster pump dimensions

Pump

Dimensions: mm (inch)

ABCDEF

900-607-MV05 254 (10.0) 308 (12.1) 1087 (42.8) 502 (19.6) 406 (16.0) 350 (13.8) 900-607-MV20 254 (10.0) 308 (12.1) 1224 (48.2) 502 (19.6) 406 (16.0) 350 (13.8) 900-615-MV10 454 (17.9) 409 (16.1) 1367 (53.8) 502 (19.6) 406 (16.0) 350 (13.8) 900-615-MV15 454 (17.9) 409 (16.1) 1367 (53.8) 502 (19.6) 406 (16.0) 350 (13.8) 900-622-MV25 648 (25.5) 496 (19.6) 1657 (55.2) 502 (19.6) 473 (18.6) 350 (13.8) 900-622-5V25 648 (25.5) 496 (19.6) 1657 (55.2) 502 (19.6) 473 (18.6) 350 (13.8) 900607MVR601 254 (10.0) 308 (12.1) 1184 (46.6) 537 (21.1) 406 (16.0) 350 (13.8) 900615MVR601 454 (17.9) 409 (16.1) 1526 (60.2) 581 (22.9) 432 (17.0) 350 (13.8) 900622MVR601 648 (25.5) 409 (16.1) 1696 (66.8) 579 (22.8) 473 (18.6) 350 (13.8)

Page 24

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

Figure 6 - Direct drive H (horizontal) booster pump with bypass valve dimensions

Figure 7 - Direct drive V (vertical) booster pump with bypass valve dimensions

Pump

Dimensions: mm (inch)

ABCDEFG

900-61B-MH10 229 (9.0) 763 (30.0) 406 (16.0) 1367 (53.8) 409 (16.1) 292 (11.5) 471 (18.5) 900-61B-MH25 229 (9.0) 763 (30.0) 406 (16.0) 1479 (58.2) 409 (16.1) 292 (11.5) 471 (18.5) 90061BMHR601 229 (9.0) 763 (30.0) 406 (16.0) 1515 (59.6) 409 (16.1) 292 (11.5) 471 (18.5)

Pump

Dimensions: mm (inch)

ABCDEF

900-61B-5V10 349 (13.8) 406 (16.0) 722 (28.4) 1367 (53.8) 409 (16.1) 454 (17.9) 900-61B-MV10 349 (13.8) 406 (16.0) 722 (28.4) 1367 (53.8) 409 (16.1) 454 (17.9) 900-61B-MV25 349 (13.8) 406 (16.0) 722 (28.4) 1479 (58.2) 409 (16.1) 454 (17.9) 90061BMVR601 349 (13.8) 406 (16.0) 791 (31.1) 1520 (59.9) 413 (16.3) 454 (17.9)

Page 25

Technical Data

S900-01-880 Issue C

Figure 8 - Bareshaft H (horizontal) booster pump dimensions

* 9 mm (3/8 inch) square key

Pump

Dimensions: mm (inch)

ABCDEFGHJK

900-607-MHR 228

(8.5)

543

(21.4)

406

(16.0)

641

(25.2)

309

(12.1)

292

(11.5)

270

(10.7)76(3.0)43(1.7)

900-615-MHR 228

(8.5)

543

(21.4)

406

(16.0)

843

(33.2)

409

(16.1)

292

(11.5)

470

(18.5)76(3.0)43(1.7)

900-622-MHR 228

(8.5)

543

(21.4)

438

(17.3)

1018

(40.1)

498

(19.6)

292

(11.5)

648

(25.5)76(3.0)43(1.7)

Page 26

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

Figure 9 - Bareshaft V (vertical) booster pump dimensions

* 9 mm(3/8 inch) square key

Pump

Dimensions: mm (inch)

ABCDEFGHJ

900-607-MVR 254

(10.0)

308

(12.1)

641

(25.2)

502

(19.8)

406

(16.0)

350

(13.8)76(3.0)

(1.7)

900-615-MVR 454

(17.9)

409

(16.1)

843

(33.2)

502

(19.8)

406

(16.0)

350

(13.8)76(3.0)

(1.7)

900-622-MVR 636

(25.0)

497

(19.6)

1018

(40.1)

502

(19.8)

438

(17.2)

350

(13.8)76(3.0)

(1.7)

Page 27

Technical Data

S900-01-880 Issue C

Figure 10 - Bareshaft H (horizontal) booster pump with bypass valve dimensions

* 9 mm (3/8 inch) square key

Pump

Dimensions: mm (inch)

ABCDEFGHJ

900-61B-MVR 350

(13.8)

431

(17.0)

718

(28.3)

843

(33.2)

411

(16.2)

454

(17.9)76(3.0)

(1.7)

Page 28

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

Figure 11 - Bareshaft V (vertical) booster pump with bypass valve dimensions

Pump

Dimensions: mm (inch)

ABCDEFGHJ

900-61B-MVR 350

(13.8)

431

(17.0)

718

(28.3)

843

(33.2)

411

(16.2)

454

(17.9)76(3.0)

(1.7)

Page 29

Technical Data

S900-01-880 Issue C

2.3 Item numbers

Table 9 - Item numbers: direct drive MSeal booster pumps and process isolation booster pumps

Nominal supply voltage and

frequency

Nominal

power

Item Number

MSeal booster

pumps

Process isolation

booster pumps

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

3.75 kW, 5 h.p.

900-607-MH05 900-607-MV05

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

15 kW, 20 h.p. 15 kW, 20 h.p.

900-607-MH20 900-607-MV20

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

7.5 kW, 10 h.p.

900-615-MH10 900-615-MV10

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

11 kW, 15 h.p. 11 kW, 15 h.p.

900-615-MH15 900-615-MV15

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

7.5 kW, 10 h.p.

900-61B-MH10 900-61B-MV10

900-61B-5V10

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

18.5 kW, 25 h.p.

900-61B-MH25 900-61B-MV25

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

18.5 kW, 25 h.p.

900-622-MH25 900-622-MV25

200 V, 50 Hz, 3-phase 400 V, 50 Hz, 3-phase

7.5 kW, 10 h.p.

900607MHR601 900607MVR601

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

7.5 kW, 10 h.p.

900607MHR601 900607MVR601

200 V, 50 Hz, 3-phase 400 V, 50 Hz, 3-phase

11 kW, 15 h.p. 11 kW, 15 h.p.

900615MHR601 900615MVR601

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

11 kW, 15 h.p. 11 kW, 15 h.p.

900615MHR601 900615MVR601

200 V, 50 Hz, 3-phase 400 V, 50 Hz, 3-phase

18.5 kW, 25 h.p.

90061BMHR601 90061BMVR601

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

18.5 kW, 25 h.p.

90061BMHR601 90061BMVR601

200 V, 50 Hz, 3-phase 400 V, 50 Hz, 3-phase

18.5 kW, 25 h.p.

900622MHR601 900622MVR601

900-622-5H25 900-622-5V25

230 V, 60 Hz, 3-phase 460 V, 60 Hz, 3-phase

18.5 kW, 25 h.p.

900622MHR601 900622MVR601

Page 30

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

Table 10 - Item numbers: bareshaft MSeal booster pumps and process isolation booster pumps

Pump type

Item Number

Standard (hydrocarbon) pumps

Oxygen service

(hydrocarbon free) pumps

Bareshaft Mseal

booster pumps

900-607-MHR 900607MHR101

900-607-MVR 900607MVR101

900-615-MHR 900615MHR101

900-615-MVR 900615MVR101 900-61B-MHR 90061BMHR101 900-61B-MVR 90061BMVR101 900-622-MHR 900622MHR101

900-622-MVR 900622MVR101

Bareshaft process isolation

booster pumps

900-607-5HR 9006075HR101

900-607-5VR 9006075VR101

900-615-5HR 9006155HR101

900-615-5VR 9006155VR101

900-61B-5HR 90061B5HR101

900-61B-5VR 90061B5VR101

900-622-5HR 9006225HR101

900-622-5VR 9006225VR101

Page 31

Installation

S900-01-880 Issue C

3 Installation

3.1 Safety

 A suitably trained and supervised technician must install the booster pump. The installation technician must

obey all local and national safety requirements.

 Ensure that the installation technician is familiar with the safety procedures which relate to the pump oil

and the products processed by the pumping system.

 Consult Edwards publication P400-40-100 (Vacuum pump and va cuum system safety - chemical and industrial

systems) before you install and use the booster pump to process hazardous or flammable materials.

 Vent and purge the pumping system b efore you start inst allation work.  Check that all the required components are available and of the correct type before you start work.  Ensure that debris does not get into the booster pump when you install it.  Disconnect the other components in the pumping system from the electrical supply so that they cannot be

operated accidentally.

 Do not reuse 'O' rings and co-seals.  Ensure that all electrical cables and purge gas pipelines are safely positioned, secured and routed, so that

they do not present a trip hazard.

 Provide adequate access to all pump servicing points and oil-level sight-glasses.  Leak test the system after installation work is complete and seal any leaks found, to prevent leakage of

hazardous substances out of the system and leakage of air into the system.

3.2 System design considerations

Consider the following points when you design the pumping system:

 You must mount the booster pump on a firm, level surface.  Adequately support vacuum pipelines to prevent the transmission of stress to pipeline joints.  If necessary, incorporate flexible pipelines in your system pipelines to reduce the transmission of vibration

and to prevent loading of the coupling joints. If you use flexible pipelines, you must ensure that you use flexible pipelines which have a maximum pressure rating which is greater than the highest pressure that can be generated in the system.

 Ensure that the design incorporates all appropriate safety precautions if toxic, inflammable or explosive

gases or particulates will be pumped. Your design must ensure that:

 Where a flammable gas is pumped, the concentrations of the gas in air must be less than 25% of its LEL

(Lower Explosive Limit) concentrations.

 Where a toxic gas is pumped, the concentration of the gas must be less than 25% of the occupational

exposure limit for the gas.

 Where a toxic or asphyxiant gas is pumped, the booster pump must be located in a well-ventilated area.

WARNING

Obey the safety instructions listed below and take note of appropriate precautions. If you do not, you can cause injury to people and damage to equipment.

Page 32

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

 You must be able to purge the pu mping sy stem with an inert ga s when you shut down the p umping system, to

dilute dangerous gases to safe concentrations. Contact Edwards or your supplier if you are in doubt.

If the booster pump is to be fitted in a new system, ensure that all preliminary pipelines have been installed and that a suitable base for the booster pump has been prepared before you sta rt installation.

Ensure that the following services and facilities are available for connection to the booster pump:

 Electrical Supply.  Backing pump.  Inlet screen (if required, to prevent debris from entering the pump during commissioning).

3.3 Unpack and inspect

Remove all packing materials, remove the booster pump from its packing box, remove the protective covers from the inlet and exhaust ports, and inspect the pump.

If the booster pump is damaged, notify the supplier and your carrier in writing within three days; state the Item Number of the pump together with the order number and supplier's invoice n umber. Retain all packing materia ls for inspection. Do not use the pump if it is damaged.

If the booster pump is not to be used immediately, refit the protective covers. Store the pump in suitable conditions as described in Section 6 of this manual.

3.4 Move the booster pump to its operating location

Use a fork-lift truck to move the booster pump (attached to the shipping crate) to the installation location. Lift the booster pump with the forks well outward of the centre of mass, to prevent the booster pump tipping over when you move it.

When the booster pump has been unpacked and disconnected from its shipping crate, lift the pump; refer to Figure 12 and use one of the following two methods:

1. To use lifting-bolts and chains (see details A and B):

 Fit two 3/4-10 lifting bolts (1, not supplied) to the pump.  On a booster pump with a motor: fit a suitable size lifting bolt to the motor (if necessary).  Attach lifting chains to the lifting bolts (1, 2) and connect the chains to your lifting equipment.

2. To use slings (see detail C):

 Attach slings (4) around the pump body.  Connect the slings to your lifting equipment.

You must use lifting equipment and chains/slings which are suitably rated for the mass of the pump. Use caution when you move a booster pump with a direct drive motor attached; fix the pump in position immediately

after it has been located. Refer to Tables 4 to 8 for the mass of the pump, and to Table 11 and Figure 12 for the centre of mass location.

WARNING

Use suitable lifting equipment to remove the booster pump from its packaging. If you do not, you can cause injury to people, or you can damage equipment. Refer to Section 2.2 for pump mass.

Page 33

Installation

S900-01-880 Issue C

Figure 12 - Lifting the booster pump

A. Lifitng H (horizontal) pumps with

chains and lifting bolts

B. Lifting V (vertical) pumps with

chains and lifting bolts C. Lifting pumps with slings D. Centre of mass distance: see

Table 11

1. Lifting bolt (on booster pump)

2. Lifting-bolt (on motor)

3. Centre of mass

4. Slings

Page 34

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

Table 11 - Centre of mass dimensions

North American direct drive

booster pumps

UK/Europe/Rest of the world direct drive

booster pumps

Item Number

Centre of mass (Figure 12

dimension 'D'):

mm (inches)

Item Number

Centre of mass

(Figure 12

dimension 'D'):

mm (inches)

900-607-MH05 68 (2.75) 900607MHR601 193 (7.6) 900-607-MH20 380 (15) 900607MVR601 193 (7.6) 900-607-MV05 68 (2.75) 900615MHR601 172 (6.8) 900-607-MV20 380 (15) 900615MVR601 172 (6.8) 900-615-MH10 156 (6.1) 90061BMHR601 275 (10.8) 900-615-MV10 156 (6.1) 90061BMVR601 275 (10.8) 900-615-MH15 172 (6.8) 900622MHR601 265 (10.4) 900-615-MV15 172 (6.8) 900622MVR601 265 (10.4) 900-61B-MH10 115 (4.5) 900-61B-MV10

900-61B-5V10

115 (4.5)

900-61B-MH25 275 (10.8) 900-61B-MV25 275 (10.8) 900-622-MH25

900-622-5H25

265 (10.4)

900-622-MV25

900-622-5V25

265 (10.4)

Bareshaft MSeal booster pumps Bareshaft process isolation booster pumps

Item Number Centre of mass (Figure 12

dimension 'D'):

mm (inches)

Item Number Centre of mass (Figure 12

dimension 'D'):

mm (inches)

900-607-MHR

900607MHR101

16 (0.6) 900-607-5HR

9006075HR101

16 (0.6)

900-607-MVR

900607MVR101

16 (0.6) 900-607-5VR

9006075VR101

16 (0.6)

900-615-MHR

900615MHR101

16 (0.6) 900-615-5HR

9006155HR101

16 (0.6)

900-615-MVR

900615MVR101

16 (0.6) 900-615-5VR

9006155VR101

16 (0.6)

900-61B-MHR

90061BMHR101

16 (0.6) 900-61B-5HR

90061B5HR101

16 (0.6)

900-61B-MVR

90061BMVR101

16 (0.6) 900-61B-5VR

90061B5VR101

16 (0.6)

900-622-MHR

900622MHR101

16 (0.6) 900-622-5HR

9006225HR101

16 (0.6)

900-622-MVR

900622MVR101

16 (0.6) 900-622-5VR

9006225VR101

16 (0.6)

Page 35

Installation

S900-01-880 Issue C

3.5 Locate the booster pump

You must mount the booster pump on a smooth, flat, level surface. The degree of variation in level should not exceed

5.2 mm m-1 (0.063 inch ft-1) in any direction. Check that all four pump feet contact the mounting base. Do not distor t the booster pump body. You must securely fix the booster pump in position before you operate it.

Before you install the pump, check that there are no foreign materials or debris in the vacuum pipelines or in the impeller cavities in the body of the pump. Check that the impellers rotate freely.

The booster pumps are designed for optimal performance in clean environments with ambient temperatures as specified in Section 2.1. If you use the booster pumps in areas of higher temperatures, this will result in higher discharge temperatures, and possible over-temperature cut-outs. If you use the booster pumps in dirty locations or where oil vapour is present, this can result in overheating of the motor, belt slippage, or premature wear. When the pump is used in a dirty environment, ensure that you inspect and clean the equipment as necessary.

Locate the pump as close as possible to the equipment/chamber which will be evacuated. Position the pump so that electrical and vacuum pipeline connections can be easily made. Provide adequate access space around and above the pump, so that the pump can be easily serviced. Avoid long lengths of vacuum pipeline from the equipment/ chamber being evacuated to the booster pu mp.

The booster pumps are precision balanced devices. You must mount the booster pump on a sufficiently rigid base, and secure it to the floor to reduce potential system vibration. Vacuum pipelines attached to the booster pump can vibrate excessively if they are not properly supported or secured. Booster pump vibration is usually the results of insufficient support.

3.6 Connect the vacuum and exhaust pipelines

CAUTION

Install a removable inlet filter so that particles, debris or loose components cannot enter the pump during commissioning.

All vacuum pipelines should be as short as possible and should be no smaller than the diameter of the booster pump inlet. When you need to install a long length of pipeline, use pipe which has a diameter larger than the diameter of the pump inlet. Conductance-check the pipelines to ensure that the pumping speed of the system will not be decreased. Do not install restrictive pipelines or valves in the exhaust pipeline; these may cause the exhaust pressure to exceed atmospheric pressure. If necessary, consult Edwards for advice and assistance when you need to size long lengths of pipelines.

Use a clean rag dampened with Loctite Safety Solvent (or another cleaning solution compatible with the gases to be pumped) to clean the booster pump impellers and flanges if they have accumulated dirt during installation or storage. It is important that the flanges are clean; if they are not, you will not be able to obtain a good vacuum seal.

Install an isolation valve in the foreline to the booster pump, so that the pump can be isolated from the chamber/ vacuum system.

WARNING

Use suitable lifting equipment to move the booster pump. If you do not, you can injure yourself or damage the pump. Refer to Section 2 and Table 11 for pump mass information.

WARNING

Install all pipelines so that they do not present a trip hazard. If you do not, you can cause injury to people.

Page 36

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

3.6.1 Vacuum inlet pipeline

CAUTION

Ensure that foreign matter (particulate) cannot get into the pump. If it does, it can cause serious damage and premature failure of internal pump part.

Ensure that the vacuum pipeline is leak-tight. Install a flexible connection betw een the b ooster pump i nlet and the vacuum pipeline, to reduce vibration and prevent booster pump body distortions. Properly support the pipeli nes, to minimise vibration. You must not use the body of the booster pump to suppo rt long lengths of pipelines.

We recommend that you install a high-vacuum, fully-opening valve, for ease of start-up and so that you can check the pump ultimate pressure with no gas throughput. This valve will allow you to isolate the vacuum pumps from the vacuum system. We recommend that you install a vacuum pressure gauge, so that you can monitor pump performance. Install a vent valve in the booster pump inlet or foreline. Install a filte r-silencer, to prevent the entry of foreign materials into the system.

Ensure that the vacuum system and connecting pipelines are clean and free of weld splatter, dirt or grit. Edwards recommends that you install inlet filters and traps, to prevent entry of foreign matter. If you use inlet filters

and traps, we recommend that you change the pump oil more frequently. You may need to install other devices such as interstage temperature switch es, timers, vacuum pressure switches

and so on, to protect the booster pump from thermal and mechanical overload. This will depend on the size of the booster pump, the backing pump capacity and vacuum chamber size.

3.6.2 Accessory port pipelines

Accessory connection ports are provided in the body of the booster pump. You may use these ports to connect vent valves and vacuum pressure gauges. Vacuum pressure gauges should be connected as follows: remove the 0.5 inch 'O' ring plug (0.75-16 straight thread) and fit a vacuum ball valve, connected to an elevated vacuum pressure gauge. Use a short run of vacuum pipe so that the valve is not too close to the hot body of the booster pump.

Coat all threaded vacuum joints with a liquid thread sealant (such as Loctite 714 or equivalent). Do not use tape thread sealant, which will create small vacuum leaks.

3.6.3 Exhaust pipeline

The diameter of the exhaust pipeline must be no smaller th an the diameter of the booster pump outlet. Ensure that the exhaust gases (which may include pump oil and process gases) are safely handled and trea ted, in accordance with local, State and National regulations.

When you install a horizontal booster pump on an oil-sealed backing pump, mount the booster pump above the backing pump inlet, so that oil does not collect in the booster pump. Install sample ports in the exhaust pipeline, so that you can check system temperatures and pressures. Do not install restrictive piping or valves in the exhaust pipeline, as these may cause the exhaust pressure to exceed atmospheric pressure.

WARNING

The temperature of parts of the exhaust pipeline may exceed 70 °C (160 °F). Under extreme conditions, surfaces of the booster pump may reach 190 °C (375 °F). Provide adequate guarding and warnings, to protect people from the hot surfaces.

Page 37

Installation

S900-01-880 Issue C

3.7 Belt drive booster pump installation

Ensure that the alignment of the pulleys and the tension of the booster pump drive belt are correct. Comply with the installation requirements specified in this manual and inspect the drive system regularly, to avoid mechanical problems and unnecessary repairs. Belt axial load should be less than 890 N (200 lb). Table 12 shows the minimum permissible pulley diameters. Contact Edwards for advice if you want to use a motor with a power rating which exceeds 30 kW (40 h.p.). Obey all of the safety precautions outlined in Section 3.1

Pulley misalignment can damage the bearing, belts and seal(s). Pulley alignment does n ot change d uring operation. The motor and booster pump drive shafts must be parallel to avoid uneven loading of belts. Your motor and drive components must comply with local and national safety regulations. Check for free rotation of the booster pump before you start the booster pump.

New belts usually lose some tension during initial operation, and you should re-check the belts during the first few days of operation. Tension all belts in accordance with the belt manufacturer's instructions. Excessive tension can induce unnecessary loading on the booster pump bearings and bending moments on the booster pump drive shaft. Extreme over-tensioning may cause the pump drive shaft to fail, due to fatigue damage.

Booster pumps with belt drive systems supplied by Edwards have the pulley and belt tension already preset. Recheck the alignment and tension (See Tables 13 and 14) before initial operation; use the following procedure:

1. Ensure that the shaft, hub and pulley components are free of lubricants, corrosion and protective coatings.

2. Check the pulley alignment with a straight edge or tight cord. The pulley faces must contact the straight edge a t all four points. Misalignment will significantly increase belt wear.

3. If pulley alignment or removal is required: loosen the motor hub set screws several turns; remove one set screw completely; install the set screw in the centre position and then tighten the screw to free the locking bush. Reposition the pulley and then reinstall the set screws in the original position in the locking bush. Tighten the set screws evenly to the specified torque. Note that the locking bush number is stamped on the inner hub face.

4. Belt span distance, belt deflection and deflection force determine the correct belt tension. Determine the span distance between contact points on the pulleys. The deflection must be 0.397 mm per 25.4 mm of span (1/64 inch per 1 inch of span).

5. Determine the correct belt force, based on the smallest pulley diameter and belt type. Edwards supplied belt systems are usually a 3 groove "B" design. Check each belt for even loading. Uneven loading indicates pulley misalignment or non-parallel shafts.

6. Ideal tension is the minimum tension to overcome peak loading. Never exceed 1.25 times the force specified in Table 14. Lock down the tension adjustment mechanism.

7. Turn the pulleys over thre e times by hand. Check for free and easy rotation.

8. Recheck the tension before you refit the safety guards and operate the booster pump.

When any one belt needs to be replaced, replace all of the other belts at the same time. Check the te nsion frequently during the first few days of operation. Never apply belt dressing. If you are installing your own belt or pulley drive

WARNING

Never operate the booster pump without proper safety guarding installed.

Table 12 - Minimum pulley diameters

Minimum pulley

diameter

£ 11 kW

£ 15 h.p.

15 to 18.75 kW

20 to 25 h.p

22 to 30 kW

30 to 40 h.p.

mm 132 160 178

inches 5.2 6.3 7.0

Page 38

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

system, install all components in accordance with the manufacturer's instructions. Check belts and pulleys every 2000 hours.

3.8 Direct drive booster pump installation

Drive coupling alignment must be correct. Misalignment or a worn out coupling spacer (spider) will damage the booster pump bearing and seal(s). Comply with the installation requirements specified in this manual and in spect the drive system regularly, to avoid mechanical problems and unnecessary repairs.

If you install your own motor and drive components, they must comply with all local and national safety re gulati ons. Follow all of the safety precautions outlined in Section 3.1.

Direct drive booster pumps are supplied with the motor coupling already set. Recheck the alignment before initial operation. Values listed below are for L190 couplings. Contact Edwards for advice on other coupling sizes. Check the condition of the coupling spider every 2000 hours.

1. Ensure that the shaft, coupling and other components are free of lubricants, protective coatings and burrs.

2. Slide one half-coupling onto each shaft. Check that the keys fit tightly.

Table 13 - Torque ratings

Locking

bush

number

Torque Locking

bush

number

Torque

N mlbf ft N mlbf ft

1310 19.6 14.5 3020 90.8 67 1610 19.6 14.5 3030 90.8 67 1615 19.6 14.5 3535 112.5 83 2012 31.1 23 4040 191.1 141 2517 48.8 36 4545 276.5 204 2525 48.8 36 5050 352.5 260

Table 14 - Belt tensions

Belt

type

Smallest pulley

diameter: mm (inch)

Speed range:

r min

-1

/r.p.m.

Belt force, per belt: N (lbf)

Normal New belts

B, BX 111.8 to 142.2

(4.4 to 5.6)

860 to 2500

2501 to 4000

23.5 (5.3)

20.0 (4.5)

35.1 (7.9)

29.8 (6.7)

147.3 to 218.4 (5.8 to 8.6)

860 to 2500

2501 to 4000

28.0 (6.3)

26.6 (6.0)

41.8 (9.4)

39.5 (8.9)

3VX 104.6 to 175.2

(4.12 to 6.90)

1000 to 2500 2501 to 4000

21.7 (4.9)

19.5 (4.4)

32.4 (7.3)

29.3 (6.6)

5V, 5VX 180.3 to 276.8

(7.1 to 10.9)

500 to 1740

1741 to 3000

56.4 (12.7)

49.8 (11.2)

84.0 (18.9)

74.2 (16.7)

299.7 to 406.4

(11.8 to 16.0)

500 to 1740

1741 to 3000

68.9 (15.5)

64.9 (14.6)

104.0 (23.4)

96.9 (21.8)

WARNING

Never operate the booster pump without proper safety guarding installed.

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Installation

S900-01-880 Issue C

3. Position the hubs on the shafts so that there is a gap of approximately 25.4 mm (1.0 inch) between the hub recesses for the polymer spider, and so that there is an equal amount of support for both coupling halves. When one of the half-couplings is in its final position, tighten the set screw (½-13) on the half-coupling to a torque of 61 to 68 N m (45 to 50 lbf ft).

4. Slide back the free half-coupling and install the polymer spider. Repositi on the fre e half-coupling to the correct spacing, and tighten the set screw as described above.

5. If you cannot slide back the hub: torque the second half-coupling at the correct spacing; separate the components and install the polymer spider; reassemble the coupling hubs together with the correct spacing.

6. Check for parallel alignment with a straight edge across the two coupling halves at several places around the coupling. Do not rotate the coupling. Measure the space under the stra ight edge. The misalignment measurement must be less than 0.013 mm (0.005 inch). Correct alignment will ensure the best performance and longest coupling life. Reposition the shafts if the maximum misalignment is exceeded.

7. Determine the angular alignment across the coupling. Take the measurements fromthe surface where the couplings neck down from the spider diameter to the diameter with the set screw(s). Determine the maximum and minimum values. The difference between these two measu rements must be less than 0.38 mm (0 .015 inch). Reposition the shafts if the maximum tolerance i s exceeded. R echeck for parallel alignmen t if you reposition the coupling.

8. Rotate the coupling after you have set the proper alignment. The shaft should rotate freely and easily. Never operate a coupling above the maximum permissible power of the r min-1 (r.p.m.) rotation speed indicated (stamped) on the coupling. Never operate the booster pump at speeds above 3600 r min-1 (r.p.m.).

9. Install proper safety guards before you operate the booster pump.

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Installation

Figure 13 - Coupling

1. Pump drive coupling half (correctly aligned)

2. Motor drive coupling half (correctly aligned)

3. Straight edge

4. Coupling clearance: 2.54 mm (1 inch)

5. Spider

6. Clearance: 0.5 mm (0.02 inch)

7. Motor drive coupling half (incorrectly aligned)

8. Pump drive coupling half (incorrectly aligned)

A. Correct alignment B. Correct coupling settings C. Incorrect alignment D. Incorrect alignment

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Installation

S900-01-880 Issue C

3.9 Fill the booster pump with oil

CAUTION

Ensure that you use the proper grade of oil and that the oil levels in the pump are correct. If you do not, pump performance will be affected and the pump may be damaged.

Ensure that the oil-levels in the booster pump are correct before you operate the pump. Check the oil levels daily. Always use the correct oil. Do not use oils other than those specified in this manual; if you do, you will invalidate the warranty of the pump. Refer to Section 5.3 for maintenance frequencies. The use of substitute oils may make the booster pump unsafe. If you use the booster pump on harsh and dirty applications, you will need to change the oil more frequently.

3.9.1 Hydrocarbon oil

Before you operate the booster pump, ensure that the oil levels are correct (See Table 15). The oil levels should be at the centre position of each sight-glass. Do not add oil while the booster pump is operating. Shut down the booster pump and vent the pump to atmospheric pressure before you fill the pump with oil, or drain oil from the pump.

The booster pump has two oil reservoirs:

 Bearing housing, drive end.  Bearing housing, gear end.

Refer to Figures 1 and 2 for the locations of the oil filler and drain ports. With the booster pump shut down and at atmospheric pressure, add V-Lube H oil through both filler ports until each

oil-level sight-glass is half full. Do not overfill with oil, or allow the oil level to fall below the bottom of the sightglass. If you have overfilled a reservoir, oil may spill over into the body of the pump and contaminate the vacuum system.

If you overfill the drive end reservoir, the booster pump may make a squealing noise (from the seal) during operation. Lower the oil level slightly to eliminate the noise.

The bearings in the drive end reservoir are splash lubricated from an oil slinge r that dips into the oil sump. Th e gears are lubricated by partial immersion in the oil sump. Splashing from the gears lubricates the bearings.

WARNING

Changing the oil in a booster pump from hydrocarbon to PFPE (Fomblin) could potentially cause a safety hazard. Fomblin pumps are generally used in hazardous applications which may involve the pumping of gases with high concentrations of oxygen. If hydrocarbon oil comes into contact with gases with an oxygen concentration greater than 25%, an explosion can occur. Therefore, if you want to convert a booster pump that has been used with hydrocarbon oil to use PFPE (Fomblin) oil, you cannot simply flush the pump with new PFPE oil. You must return the pump to a Edwards Service Centre for overhaul and cleaning by qualified Edwards service engineers. The change in oil type requires a complete strip-down of the pump, and thorough cleaning of all parts, so that all traces of hydrocarbon oil are removed.

Table 15 - Oil quantities

Bearing housing

Oil capacity: ml (oz)

H (horizontal) pumps

V (vertical)

pumps

Drive end 750 (26) 1350 (46)

Gear end 1200 (41) 2800 (95)

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Installation

When the booster pump is in operation, the oil level will fluctuate due to the pumping action of the ge ars and slinger. If you cannot see an oil level because the sight-glass is dirty, remove the sight-glass (when you change the oil) and clean the viewing surface.

Each time you remove a filler plug or drain plug, inspect the plug 'O' ring for cuts or damage, and replace it as necessary. The plug 'O' rings need to provide a vacuum seal for correct pump operation.

3.9.2 P erfluoropolyether (PFPE) oil

Before you operate the booster pump, ensure that the oil levels are correct (See Table 15). Add oxygen service (PFPE) oil into the reservoirs as necessary, as described in Section 3.9.1. Each oil-level should be at the centre position of the oil-level sight-glass.

Oxygen service equipment requires the use of PFPE oil. You must only use Fomblin® Y-25/6 oil. Do not use another type of oil, or mix oil types when you add oil.

We recommend that you return oxygen service booster pumps to a Edwards Service Centre if major repairs are needed. Minor repairs can be made in the field. Because of the possibility of a dangerous reaction to dirt and chemical compositions in an oxygen rich environment, absolute cleanliness of parts, tools, wi pers and technician hands and clothes is required.

WARNING

Only use the type of PFPE oil specified below. If you use another type of oil, this can result in an explosion.

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Installation

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3.10 Electrical connections

3.10.1 Electrical supply configuration

CAUTION

Configure the electrical supply to the booster pump so that the pump is automatically switched off if the backing pump stops. If you do not, the booster pump may overheat and be damaged.

Note: Connect the electrical supply to the motor through a contactor which has a manual reset control.

A suitably trained technician must correctly install the necessary overloads, motor starter, and control and safety devices, and connect the electrical supply to the booster pump. Control devices may include temperature switches and pressure switches. If the necessary control and safety devices are not in stalled, this may invalidate any Edwards warranty, and can result in serious injury or death, and damage to the equipment.

Incorporate a manual restart, to prevent automatic cycling in the event of an overload. The booster pump control system must be configured so that a hazardous condition does not arise after electrical supply failure, or when the electrical supply is restored after a failure. Controls should be clearly visible and easily accessible, and be organised to help the operator to understand their functions and their effect on the booster pump and vacuum system.

All electrical connections and controls must meet local and national regulations and standard s. You must incorporate over-current protection and a mains electrical disconnect. Ensure that all electrical wiring is protected from dripping water and has appropriate strain relief. Where necessary, incorporate a dditional controls to protect the equipme nt and people if the performance limits of the booster pump may be exceeded.

Where necessary, depending on booster pump size, backing pump capacity and chamber size, incorporate other devices such as interstage temperature switches, timers or vacuum pressure switches, to protect the booster pump from thermal and mechanical overload.

Because of the wide range of applications for the booster pumps and the various vacuum systems and configurations, specific sizes or models of the protective equipment, safety devi c es and cont r ol de vice s ca nno t b e spe cif ied in thi s manual. Information used in the selection of these devices can be found in Section 2. Contact Edwards for recommendations on the protection and safety devices necessary for your specific application.

WARNING

The electrical installation must conform to all local and national safety regulations. Use a suitably rated fused and protected electrical supply and an earth (ground) point.

WARNING

Install electrical cables so that they do not present a trip hazard that could result in injury to people.

WARNING

Provide suitable strain relief on the electrical supply cable. If you do not, the cable (or wires in the cable) may become disconnected from the pump, and there may be a risk of injury or death by electrical shock.

WARNING

You must be able to isolate and lock-out the electrical supply from the booster pump. If you do not, there will be a risk of injury or death by electrical shock during maintenance or servicing.

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Installation

3.10.2 Check the direction of rotation

It is possible for the three phase electrical supply to the motor to be phased incorrectly. If the supply is phased incorrectly, the rotors will rotate in the reverse direction or remain stationary.

Watch the motor fan and switch on the electrical supply to the booster pump for two or three seconds, then switch the pump off. The correct direction of rotation is shown by an arrow on the motor: see Figures 1 and 2.

If the direction of rotation is incorrect, isolate the external electrical supply, correct the electrical connections to the booster pump, then perform the direction check again.

WARNING

Blank off the inlet or connect the booster pump to the vacuum system before you check the direction of rotation. If you do not, there is a danger of entanglement or of objects being trapped in the rotating rotors.

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Operation

S900-01-880 Issue C

4 Operation

4.1 Operational safety

Ensure that the cooling air flow around the booster pump motor is not restricted.

4.2 Pre-start checks

Refer to the appropriate sections of this manual relevant to your booster pump, before you start the pump:

1. Ensure that all safety precautions in Section 3.1 have been complied with.

2. Ensure that the booster pump and vacuum and exhaust pipelines are correctly located and secured in place.

3. Check that the oil-levels in the oil reservoirs are correct.

4. Ensure that the vacuum system foreline, the booster pump inlet pipeline and the exhaust pipeline have been checked for debris.

5. Check the booster pump for free rotation.

6. Check that the booster pump operates with the correct direction of rotation.

7. Check that the motor-to-booster pump alignment is correct (direct drive booster pumps only).

8. Check that the alignment of pulleys and belt tensions are correct (pulley driven booster pumps only).

9. Check that the motor has been correctly connected and that the necessary overloads and safety protective devices have been used.

10.Ensure that all precautions have been taken to avoid possible injury or hazardous situations.

11.Ensure that inert or other safe gases are available, to purge process gases and to vent the pump to atmospheric pressure.

4.3 Start-up

Use the following procedure to start the pumping system. If any problems are found, stop the booster pump and other equipment and vent the vacuum system to atmospheric pressure. Do not continue to operate the system unless all problems have been corrected.

WARNING

Do not expose any part of your body to vacuum. If you do, you may be injured.

WARNING

During operation, parts of the booster pump can become very hot. Ensure that you do not touch the booster pump.

WARNING

Do not operate the booster pump with the inlet or outlet open to atmosphere. If you do, your fingers or other parts of your body may get trapped and you may be injured by the rotating pump mechanism.

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Operation

1. Refer to the Pre-start checks (Section 4.2) and ensure that all necessary installation requirements have been met.

2. Close the isolation valve to isolate the vacuum pumps from the vacuum system or chamber.

3. Start the backing pump.

4. When the appropriate cut-in pressure is reached, start the booster pump.

5. Operate the booster pump with the inlet blanked-off for five minutes, then check for unusual noises and excessive vibration.

6. Continue to operate the booster pump (with the inlet blanked-off) for one hour, then check for unusual noises and excessive vibration.

7. Open the vacuum system isolation valve, and continue to operate the booster pump at normal operating conditions for approximately 15 minutes. After this time, check for unusual noises and excessive vibration.

8. During the first week of operation of the booster pump, check the following daily:

 With the booster pump stopped, check that the oil levels are correct (in the mi ddle of the sight-glasses).  Check that the drive system operates correctly and is undamaged.

4.4 Shutdown

Ensure that you take necessary precautions to prevent a hazardous, toxic, flammable or explosive situation in the vacuum system, chamber, vacuum pumps, and exhaust system. Always use inert or othe r safe gases to purge process gases and to vent the vacuum system. Note that by-products of the vacuum process could collect in the pump oils and create potential hazards.

1. Close the vacuum system isolation valve to isolate the pumps from the vacuum system or chamber.

2. Shut down the booster pump.

3. Shut down the backing pump and vent the vacuum system, to avoid reverse operation. Vent the vacuum system with a gas that will not create a hazardous, toxic, flammable or explosive situation.

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Maintenance

S900-01-880 Issue C

5Maintenance

5.1 Safety information

 A suitably trained and supervised technician must maintain the booster pump.  Dismantle the booster pump in a clean workshop environment, with the correct tools and safety facilities

available.

 Ensure that the maintenance technician is familiar with the safety procedures which relate to the pump oil

and the products pumped. Wear appropriate safety-clothing w hen you come in contact with contaminated components. Dismantle and clean contaminated components inside a fume- cupboard.

 Check that all the required parts are available and of the correct type before starting work.  Isolate the pump and other components from the electrical supply so that they cannot be operated

accidentally.

 Allow the pump to cool (so that it is at a safe temperature for skin contact) before you start maintenance

work.

 Vent and purge the pumping system with nitrogen before you start maintenance work.  Do not reuse 'O' rings and Co-Seals.  Dispose of components and waste oil safely (See Section 6.2).  Take care to protect sealing faces from damage.  After maintenance is complete, recheck the direction of pump rotation if the electrical supply has been

disconnected.

 The booster pump and pump oil will be contaminated with the process chemicals that have been pumped

during operation. Ensure that the pump is decontaminated before maintenance and that adequate precautions have been taken to protect people from the effects of dangerous substances if contamination has occurred.

 Do not touch or inhale the thermal breakdown products of fluorinated materials which may be present if the

pump has been heated to 260 oC (500 oF) and above. These breakdown products are very dangerous. Fluorinated materials in the booster pump include oils, greases and seals. The booster pump may have overheated if it was misused, if it malfunctioned, or if it was in a fire. Edwards Material Safety Data Sheets for fluorinated materials used in the booster pump are available on request: contact your supplier or Edwards.

 If necessary, maintain the motor as specified in the manufacturers information supplied with the motor.  Leak test the system after maintenance and seal any leaks found, to prevent leakage of dangerous

substances out of the system and leakage of air into the system.

5.2 Leak detection

Carry out a leak test if the specified booster pump ultimate vacu um cannot be achieved. A properly ca rried out leak test will isolate sections of the pipelines until the leak-source is found. The use of a leak detector will speed the process. If required, contact Edwards for more information.

WARNING

Obey the safety instructions given below and take note of appropriate precautions. If you do not, you can cause injury to people and damage to equipment.

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Maintenance

5.3 Maintenance plan

Table 16 details the maintenance operations necessary to maintain the booster pumps in normal use. We recommend that you change the oil more frequently if the booster pump is used under severe operating conditions, such as contamination within the vacuum system or excessively high operating temp eratures with in the booster pump . (The operating conditions will determine the frequency of oil chan ges.) Worn pulleys and over tensioning shortens belt life by as much as 50%. If wear allows the belts to contact the bottom of the pulley, slippage and belt burn may result. Convex wear on the side of the belts indicates pulley groove wear. Alignment problems are identified by significant wear on one side of a belt only.

5.4 General maintenance

Refer to Sections 3.1 and 4 before you shut down the booster pump for maintenance, and restart the booster pump after maintenance. Only allow suitably trained and supervised technicians to maintain the booster pump.

5.5 Oil-level checks

CAUTION

Ensure that you use the proper grade of oil and that the oil levels in the pump are correct. If you do not, pump performance will be affected and the pump may be damaged.

Look at the sight-glasses (see Figures 1 and 2). The oil level in each reservoir should be in the centre position on the sight-glass. If you need to add oil:

1. Shut down the vacuum system and vent it to atmospheric pressure.

2. Remove the oil filler plug (see Figures 1 and 2).

Table 16 - Maintenance plan

Operation Frequency Procedure

Check the oil levels Daily Check the levels and add oil as required. Change the oil 2000 hourly Drain the oil from the pump, and clean any

filings from the magnetic drain plug. Refill the

pump with new oil. Check the coupling condition 2000 hourly Replace the spider if worn. Check the belts and pulleys 6 monthly Replace the belts or pulleys if worn. Check the bearing condition 6 monthly Check the endplay. Service if required. Clean the motor and drive Yearly Remove any dirt to reduce wear and to

promote heat transfer. Check the timing 2 yearly Retime the booster pump if required. Contact

Edwards for service. Overhaul the pump 6 yearly * Contact your supplier or Edwards to arrange

for an overhaul of the pump.

* Or as advised by your supplier or Edwards.

WARNING

Never attempt to add or drain oil while the booster pump is operating. Shut down and lock-out the booster pump and vent it to atmospheric pressure before you fill the pump with oil, or drain oil from the pump.

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Maintenance

S900-01-880 Issue C

3. Add oil as necessary until the oil level is half-way up the sight-glass. Only use oil specified in this manual.

4. Inspect the plug 'O' ring for cuts or damage, and replace it as necessary. Refit the oil filler plug.

5.6 Changing the oil

Use the following procedure to drain and refill each reservoir with oil:

1. Shut down the vacuum system and vent it to atmospheric pressure.

2. Place a suitable container under the drain plug (see Figures 1 and 2), then remove the drain plug and allow the oil to drain out of the pump.

3. Inspect the plug 'O' ring for cuts or damage, and replace it as necessary. R efit the drain plug, th en dispose of the oil: refer to Section 6.

4. Fill the oil reservoir with oil: refer to Section 5.5.

5.7 Coupling maintenance

1. Shut down the vacuum system and vent it to atmospheric pressure. Allow the booster pump to cool to a safe temperature.

2. Remove the safety guards when the pump is in a safe state.

3. Inspect the coupling as described in 3.8. Replace any worn or damaged parts.

4. Refit the safety guards.

5.8 Belt drive maintenance

1. Shut down the vacuum system and vent it to atmospheric pressure. Allow the booster pump to cool to a safe temperature.

WARNING

Therefore, if you want to convert a booster pump that has been used with hydrocarbon oil to use PFPE (Fomblin) oil, you cannot simply flush the pump with new PFPE oil. You must return the pump to a Edwards Service Centre for overhaul and cleaning by qualified Edwards service engineers. The change in oil type requires a complete strip-down of the pump, and thorough cleaning of all parts, so that all traces of hydrocarbon oil are removed.

WARNING

Allow sufficient time for the booster pump to cool before you change the oil. If you do not, you can be injured by the hot oil.

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Maintenance

2. Remove the safety guards when the pump is in a safe state.

3. Inspect the belts as described in Section 3.7. Replace any worn or damaged belts.

4. Refit the safety guards.

5.9 Check the bearing condition

1. Shut down the vacuum system and vent it to atmospheric pressure. Allow the booster pump to cool to a safe temperature.

2. Remove the safety guards when the pump is in a safe state.

3. Loosen the coupling and or belts to remove tension from the drive shaft.

4. Use a dial indicator on the shaft to determine the end play. Total end play must be less than 0.12 mm (0 .005 inch):

 If the end play is not excessive, continue at Step 5.  If the end play is excessive, contact your supplier or Edwards to arrange for a rebuild of the pump.

5. Refit the safety guards.

5.10 Clean the motor and drive

1. Shut down the vacuum system and vent it to atmospheric pressure. Allow the booster pump to cool to a safe temperature.

2. Remove the safety guards when the pump is in a safe state.

3. Use a compressed air line or a soft brush to remove any dirt and dust from the motor and drive components.

4. Refit the safety guards.

5.11 Check the timing

Only suitably trained personnel should inspect the impeller timing. Edwards service engineers are available to carry out such inspections on site or at a Edwards Service Centre.

Failure to properly time the booster pump can cause catastrophic damage to the pump.

5.12 Troubleshooting

Troubleshooting and recommended solutions are provided in Table 17.

WARNING

Use the appropriate personal protective equipment when you adjust the impeller timing.

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Maintenance

S900-01-880 Issue C

No pump will give good results on a poor vacuum system. If the vacuum performance in the system is unsatisfactory, the usual cause is leakage into the system. If your system has poor vacuum performance, you shou ld fir st ti ghte n all connections and fittings, and check that all valves are closed. Use liquid sealant to make the pipeline connections; do not use Teflon tape.

A pressure rise test will help to localise a vacuum leak. To carry out such a test, successively isolate and evacuate each section of the vacuum system, then measure the in-leakage rate (the pressure rise) of each isolated section, to isolate the leak. Use a vacuum leak detector to speed up this process.

If required, Edwards offers vacuum leak detection services.

Table 17 - Troubleshooting

Symptom Probable cause Recommended solution

The booster pump does not start

Electrical Check the electrical supply and control

wiring. Rotor rub or damage Restore the clearances. Casing distortion Relieve any pipe strain or body distortion. Foreign material Check the system for foreign material, and

clean as necessary.

No gas flow Speed too low Check for belt slip and adjust as necessary.

Wrong rotation Check for correct direction of rotation,

switch any two phase connections if

necessary. Obstruction in piping Check pipelines, valves for open flow path. Bypass open Use a momentary gas rush to free the valve.

Low capacity Speed too low Check the backing pump.

Excessive pressure rise Check the inlet/outlet (discharge) pressure

against predicted values. Obstruction in piping Remove the obstruction. Excessive belt slip Adjust as necessary. System leak Check the vacuum system, valves, fittings,

and plugs for leaks, and seal as necessary.

Excessive power Speed too high Check pump speed. Compare with the rated

speed. Pressure too high Check the inlet/outlet (discharge) pressure

against predicted values. Wrong rotation Check for correct direction of rotation,

switch any two phase connections if

necessary. Impeller rub Check the outside of the pump cylinder,

endplates, high temperature areas and

impellers for contact.

Impeller tip drags on impeller or booster pump body

Insufficient clearances Correct the clearances. Booster pump body distortion Relieve any pipe strain or body distortion. Excessive operating pressure Remove the cause. Excessive temperature Remove the cause.

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Maintenance

Excessive booster pump temperature

Filter clogged Clean or replace the filter. Oil Overfilled Correct the oil level. Excessive pressure differential Check the cut-in pressure setting and the

backing pump. Poor vacuum Check the system for leaks and purge rates,

seal any leaks found.

Overheating bearings or gears

Oil level incorrect Correct the oil level. Contaminated oil Change the oil. Coupling misalignment Realign the coupling. Excessive belt tension Readjust the alignment and tension.

Knocking Impeller timing Check the timing and readjust as required.

Booster pump body distortion Relieve any pipe strain or body distortion. Excessive operating pressure Remove the cause. Excessive temperature Remove the cause. Worn bearings Replace the bearings. Worn gears Replace the gears.

Vibration Drive misalignment Readjust the alignment and tension.

Insufficient anchoring support Add support to eliminate vibration. Impeller drag Adjust the timing and clearance. Worn bearings Replace the bearings. Worn gears Replace the gears.

Loss of oil Oil filler or drain plug leak Replace the plug 'O' rings.

Vacuum leak Check seal 'O' rings and vacuum joints. Worn seal Replace the seal, static ring and 'O' rings.

Abnormal noise Impeller tip drag Check the timing and readjust as required.

Worn bearings Replace the bearings. Gear backlash Replace the gears. Improper belt tension Re-tension the belts. Hubs rubbing Check that the hubs are not touching. Motor misalignment Correct the motor alignment.

Seal squeal Improper oil level Lower the oil level.

Table 17 - Troubleshooting

Symptom Probable cause Recommended solution

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Storage and Disposal

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6 Storage and Disposal

6.1 Storage

CAUTION

Observe the storage temperature limits stated in Section 2.1. Storage below -30 oC (-22 oF) will permanently damage the booster pump seals and oils.

Use the following procedure to store the booster pump:

1. Purge the vacuum system and the booster pump with dry nitrogen and disconnect the pump from the vacuum system.

2. Shut down the pump as described in Section 4.4.

3. Disconnect the pump from the electrical supply and vacuum system.

4. Disassemble, clean and reassemble the pump. (Where necessary, contact your supplier or Edwards for advice.)

5. Place and secure protective covers on the inlet and outlet (exhaust) ports.

6. Store the pump in cool, dry conditions until it is required for use. When required, prepare and install the pump as described in Section 3.

6.2 Disposal

Dispose of the booster pump and any components removed from it safely in accordance with all local and national safety and environmental requirements.

Take particular care with components and waste oil which have been contaminated with dangerous process substances.

Do not incinerate fluoroelastomer seals and 'O' rings.

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Storage and Disposal

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Services and Spares

S900-01-880 Issue C

7 Services and Spares

7.1 Introduction

Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses.

Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each part required:

 Model and Item Number of your equipment  Serial number  Item Number and description of part.

7.2 Service

Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory specifications. Equipment which has been serviced, repaired or rebuilt is returned with a full warranty.

Your local Service Centre can also provide Edwards engineers to support on-site maintenance, service or repair of your equipment.

For more information about service options, contact your nearest Service Centre or other Edwards company.

7.3 Spares

The spares available for the booster pumps are listed in Table 18.

Table 18 - Spares

Spares Kit Item Number

6 Inch MSeal Seal Kit 607-552-001 6 Inch MSeal Maintenance Kit * 607-552-002 Process Isolation 6XX-5HR Kit

†

607-552-004

* This Kit is the same as Kit 607-552-001, but with bearings. † This Kit is for process isolation booster pumps, and must be used in

conjunction with Kit 607-552-001 or 607-552-002.

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Services and Spares