Edwards 900-615-MH15, 900-615-MH10, 900-607-MV05, 900-615-MV10, 900-607-MH20 Instruction Manual

...

S900-01-880

Issue C Original

Instruction Manual

6 Inch MSeal Booster Pumps and Process Isolation Booster Pumps

This page has been intentionally left blank.

This product has been manufactured under a quality system registered to ISO9001

Declaration of Conformity

We, Edwards, Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility that the product(s)

900607MHR101 607 MHR Booster, PFPE Prep 900607MVR101 607 MVR Booster, PFPE Prep 900615MHR101 615 MHR Booster, PFPE Prep 900615MVR101 615 MVR Booster, PFPE Prep 90061BMHR101 61B MHR Booster, PFPE Prep 90061BMVR101 61B MVR Booster, PFPE Prep 900622MHR101 622 MHR Booster, PFPE Prep 900622MVR101 622 MVR Booster, PFPE Prep

9006075HR101 607 5HR Booster, PFPE Prep 9006075VR101 607 5VR Booster, PFPE Prep 9006155HR101 615 5HR Booster, PFPE Prep 9006155VR101 615 5VR Booster, PFPE Prep 90061B5HR101 615 5HR Bypass Booster, PFPE Prep 90061B5VR101 615 5VR Bypass Booster, PFPE Prep 9006225HR101 622 5HR Booster, PFPE Prep 9006225VR101 622 5VR Booster, PFPE Prep

900607MHR 607 MHR Booster 900607MVR 607 MVR Booster 900615MHR 615 MHR Booster 900615MVR 615 MVR Booster 90061BMHR 61B MHR Booster 90061BMVR 61B MVR Booster 900622MHR 622 MHR Booster 900622MVR 622 MVR Booster

9006075HR 607 5HR Booster 9006075VR 607 5VR Booster 9006155HR 615 5HR Booster 9006155VR 615 5VR Booster 90061B5HR 615 5HR Bypass Booster 90061B5VR 615 5VR Bypass Booster 9006225HR 622 5HR Booster 9006225VR 622 5VR Booster

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2: 1997 Safety Requirements, Vacuum Pumps EN60034-1: 1999 Rotating Electrical Machines – Rating & Performance

following the provisions of

73/023/EEC Low Voltage Directive. 89/336/EEC Electromagnetic Compatibility Directive. 98/37/EC Machinery Safety Directive.

P200-01-760C

P. Meares – Technical Manager Date and Place

July 2009, Shoreham

Contents

S900-01-880 Issue C

Contents

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

1.2 ATEX directive implications ............................................................................................ 2

1.3 Description ................................................................................................................ 2

1.4 General information ..................................................................................................... 3

1.5 Booster pump models ................................................................................................... 3

1.6 Principle of operation ................................................................................................... 6

1.7 Bareshaft (belt drive) booster pumps ................................................................................ 7

1.8 Direct drive booster pumps (with shaft-mounted motors) ........................................................ 7

1.9 Integral bypass valve (model 615 pumps only) ...................................................................... 7

1.10 Oxygen and reactive gas service ...................................................................................... 7

2 Technical Data ....................................................................................9

2.1 Operating and storage conditions ..................................................................................... 9

2.2 Pump technical data .................................................................................................... 9

2.3 Item numbers ............................................................................................................21

3 Installation .................................................... ................................... 23

3.1 Safety ..................................................................................................................... 23

3.2 System design considerations .........................................................................................23

3.3 Unpack and inspect .....................................................................................................24

3.4 Move the booster pump to its operating location .................................................................24

3.5 Locate the booster pump ..............................................................................................27

3.6 Connect the vacuum and exhaust pipelines ........................................................................27

3.6.1 Vacuum inlet pipeline ..................................................................................................28

3.6.2 Accessory port pipelines ...............................................................................................28

3.6.3 Exhaust pipeline ........................................................................................................28

3.7 Belt drive booster pump installation ................................................................................29

3.8 Direct drive booster pump installation ..............................................................................30

3.9 Fill the booster pump with oil ........................................................................................33

3.9.1 Hydrocarbon oil .........................................................................................................33

3.9.2 Perfluoropolyether (PFPE) oil .........................................................................................34

3.10 Electrical connections ..................................................................................................35

3.10.1 Electrical supply configuration .......................................................................................35

3.10.2 Check the direction of rotation ......................................................................................36

4 Operation ........................................................................................ 37

4.1 Operational safety ......................................................................................................37

4.2 Pre-start checks .........................................................................................................37

4.3 Start-up ..................................................................................................................37

4.4 Shutdown ................................................................................................................. 38

5 Maintenance ..................................................................................... 39

5.1 Safety information ......................................................................................................39

5.2 Leak detection ..........................................................................................................39

5.3 Maintenance plan .......................................................................................................40

5.4 General maintenance ..................................................................................................40

5.5 Oil-level checks .........................................................................................................40

5.6 Changing the oil .........................................................................................................41

5.7 Coupling maintenance .................................................................................................41

dcs/7590/09/07

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

5.8 Belt drive maintenance ................................................................................................41

5.9 Check the bearing condition ..........................................................................................42

5.10 Clean the motor and drive ............................................................................................42

5.11 Check the timing ........................................................................................................42

5.12 Troubleshooting ......................................................................................................... 42

6 Storage and Disposal ....................................................... ..... ..... ..... ..... 45

6.1 Storage ...................................................................................................................45

6.2 Disposal ...................................................................................................................45

7 Services and Spares ............................................................................ 47

7.1 Introduction .............................................................................................................47

7.2 Service ....................................................................................................................47

7.3 Spares .....................................................................................................................47

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 General arrangement of the H (horizontal) booster ............................................................... 4

2 General arrangement of the V (vertical) booster ................................................................... 5

3 Principle of operation ................................................................................................... 6

4 Direct drive H (horizontal) booster pump dimensions ............................................................14

5 Direct drive V (vertical) booster pump dimensions ................................................................15

6 Direct drive H (horizontal) booster pump with bypass valve dimensions ......................................16

7 Direct drive V (vertical) booster pump with bypass valve dimensions .........................................16

8 Bareshaft H (horizontal) booster pump dimensions ...............................................................17

9 Bareshaft V (vertical) booster pump dimensions ..................................................................18

10 Bareshaft H (horizontal) booster pump with bypass valve dimensions .........................................19

11 Bareshaft V (vertical) booster pump with bypass valve dimensions ............................................20

12 Lifting the booster pump ..............................................................................................25

13 Coupling .................................................................................................................. 32

Contents

S900-01-880 Issue C

Tables

Table Page

1 Application data ......................................................................................................... 3

2 Operating and storage conditions ..................................................................................... 9

3 Technical data: 607-MH/MV05, 607-MH/MV20, 615-MH/MV10 and 615-MH/MV15 direct drive MSeal booster

pumps (with NEMA motors) 9

4 Technical data: 61B-5V10 and 622-5 H/5V25 direct drive process isolati on booster pump, and 61B-MH/MV1 0

61B-MH/MV25 and 622-MH/MV25 direct drive MSeal booster pumps (with NEMA motors) 10

5 Technical data: 607MHR/MVR601 and 615MHR/MVR601 direct drive M Seal booster pumps (with IEC motors)

6 Technical data: 61BMHR/MVR601 and 622MHR/MVR601 direct drive MSeal booster pumps (with IEC motors)

7 Technical data: bareshaft MSeal booster pumps ...................................................................13

8 Technical data: bareshaft process isolation booster pumps .....................................................13

9 Item numbers: direct drive MSeal booster pumps and process isolation booster pumps ....................21

10 Item numbers: bareshaft MSeal booster pumps and process isolation booster pumps .......................22

11 Centre of mass dimensions ............................................................................................26

12 Minimum pulley diameters ............................................................................................29

13 Torque ratings ...........................................................................................................30

14 Belt tensions .............................................................................................................30

15 Oil quantities ............................................................................................................33

16 Maintenance plan .......................................................................................................40

17 Troubleshooting ......................................................................................................... 43

18 Spares ..................................................................................................................... 47

Associated publications

Publication title Publication number

Vacuum pump and vacuum system safety P400-40-100

Trademark credits

Fomblin® is a registered trademark of Ausimont SpA.

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

Introduction

S900-01-880 Issue C

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions fo r the Edwards MSeal Bo oster Pumps and Process Isolation Booster Pumps (referred to as "booster pump" or "pump" throughout the remainder of the manual). You must use the booster pump as specified in this manual. Read this manual b efore you install or use the booster pump. The booster pumps covered by this manual are listed in Section 2.3. You must only use PFPE-prepared bareshaft booster pumps on oxygen or reactive gas service: see Section 1.3.

Read this manual before you install and use the booster pump. Important safety information is highligh ted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process

The following IEC warning labels appear on the pump:

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to people.

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - trip hazard.

Warning - use protective equipment.

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

The units used throughout this manual conform to the SI international system of units of measurement.

1.2 ATEX directive implications

The booster pump is not designed to meet European ATEX requirements.

1.3 Description

The booster pumps are single stage, positive displacement precision engineered machines. You must use the booster pump with a suitable backing or roughing pump. The booster pump is not intended for stand-alone operation. The pump gears provide for quiet operation while maintaining proper impeller timing.

The booster pumps are supplied as standard with keyless timing, drive side roller bearings, mechanical vacuum seal, and large oil-level sight-glasses. These features provide for ease of maintenance and improve reliability.

The pump identification plate provides specific details ab out the pump, including: pump type; part number and serial number; and so on. We recommend that you have this information available when you contact Edwards for advice, parts or service.

Direct drive booster pumps are supplied with hydrocarbon lubricating oil in the oil reservoirs. Standard bareshaft booster pumps are also supplied with hydrocarbon lubricating oil in the oil reservoirs. Special service (oxyg en service) bareshaft booster pumps are specially prepared free of hydrocarbons in the factory and are supplied without oil in the reservoirs. You must use PFPE lubricating oil in special service (oxygen service) pumps.

Warning - moving parts present.

Warning - hot surfaces.

Warning - heavy object.

Warning - entanglement.

Warning - possible explosion.

WARNING

Standard booster pumps are not intended for use with hazardous, reactive, flammable and explosive gases. Consult Edwards for advice before you use a booster pump on one of these applications.

Introduction

S900-01-880 Issue C

MSeal booster pumps have a mechanical shaft seal on the drive shaft, and labyrinth shaft-seals between the gearbox and the swept volume. Process isolation booster pumps have a mechanical shaft seal on the drive shaft, and mechanical seals between the gearbox and the swept volume.

The booster pump general arrangements are shown in Figures 1 and 2.

1.4 General information

The booster pumps are available in horizontal (H) and vertical (V) configurations. The models of booster pumps are the 607, 615 and 622 and these model numbers denote the pump body lengths: 7.0, 15.0 and 2 2.0 inches. The booster pumps are available as bareshaft (belt driven) pumps, and as direct drive pumps (with shaft-mounted motors).

The booster pump gear centre distance is 6 inches. The bo oster pump have normal operation limits from 800 to 3600 r min-1 (r.p.m.). The volumetric pumping rates increase with body length and rotational speed. Pump components in contact with the pumped gases are cast iron and carbon steel.

Refer to Table 1 to determine the operational limits for the booster pumps. The limits are based on compression and pumping speeds for the specific application. Table 1 provides the maximum performance limits of the pumps. The limits, backing pump speed and gas loads determine the cut-in pressure and continuous operation pressure limits.

Edwards can recommend cut-in and operation limits when supplied with chamber size, backing pump and gas load information. The first limit reached during operation is the limiting factor. Control devices such as timers and pressure and temperature switches may be required to properly control the operation of the booster pumps.

1.5 Booster pump models

The booster pumps are available in two versions:

 H model booster pumps have vertical connections and are configured for horizontal gas flow through the

pump. (“H” appears in the Item Number of these pumps.)

 V model booster pumps have horizontal connections and are configured for vertical gas flow through the

pump. (“V” appears in the Item Number of these pumps.)

The 615 booster pump is available with an optional bypass valve (see Section 1.9) which allow s pump operation from atmospheric pressure and reduces pump-down time. The booster pumps can be prepared hydrocarbon free for oxygen service. Variable frequency (speed) drives are available for the pumps.

Table 1 - Application data

Pump model

607 615 615B* 622

Maximum pressure differential 5.06 x 10

506 mbar

380 Torr

5.06 x 104 Pa 506 mbar

380 Torr

Not applicable 3.33 x 104 Pa

333 mbar

250 Torr

Maximum temperature rise 135 ºC

275 ºF

135 ºC 275 ºF

121 ºC 250 ºF

Maximum discharge temperature 191 ºC

375 ºF

191 ºC 375 ºF

177 ºC 350 ºF

Maximum displacement † 2056 m

3h-1

1212 cfm

4412 m3h

-1

2600 cfm

4412 m3h

-1

2600 cfm

6528 m3h

-1

3840 cfm Inlet and exhaust connection: ASA 6 inches 8 inches 8 inches 8 inches Noise level average at ultimate vacuum * < 85 dB(A) < 85 dB(A) < 85 dB(A) < 85 dB(A)

* With bypass valve † At 3600 r min-1 (3600 rpm)

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

You must never operate the booster pump unless it is installed in a proper vacuum system with adequate guarding to protect people from injury. You must fit safety guards to bareshaft booster pumps before operation.

Note that:

 “B” in the pump Item Number specifies that the pump has a bypass valve.  “5H” or “5V” in the pump Item Number specifies that the pump is a process isolation booster pump,

otherwise the pump is an MSeal booster pump.

 “HR” or “VR” at the end of the Item Number specifies that the pump is a standard service bareshaft pump

(with hydrocarbon oil), “HR101” or “VR101” at the end of the Item Number specifies that the pump is an oxygen service (hydrocarbon free) bareshaft pump, otherwise the pump is a standard service pump (with hydrocarbon oil).

Figure 1 - General arrangement of the H (horizontal) booster

A. Standard direct drive pump B. Direct drive pump with bypass valve

1. Direction of rotation arrow

2. Motor (IEC frame shown)

3. Oil filler plug (drive end)

4. Inlet

5. Oil filler plug (gear end)

6. Oil-level sight-glass (gear end)

7. Oil drain plug (gear end)

8. Oil drain plug (drive end)

9. Oil-level sight-glass (drive end)

10.Outlet

11.Bypass valve

Introduction

S900-01-880 Issue C

Figure 2 - General arrangement of the V (vertical) booster

A. Standard direct drive pump B. Direct drive pump with bypass valve

1. Oil filler plug (gear end)

2. Inlet

3. Oil filler plug (drive end)

4. Motor (IEC frame shown)

5. Direction of rotation arrow

6. Oil-level sight-glass (drive end)

7. Outlet

8. Oil drain plug (drive end)

9. Oil drain plug (gear end)

10.Oil-level sight-glass (gear end)

11.Bypass valve

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

1.6 Principle of operation

The basic operation of an H (horizontal) booster is shown in Figure 3.

Figure 3 - Principle of operation

Detail A - Gas (3) enters the pump body through the inlet (1).

In the pump body, the upper impeller rotor rotates clo ckwise, and the lower impeller rotor rotates anticlockwise (counterclockwise).

Detail B - As the impeller rotors rotate, gas (3) is drawn into the volume between the pump body wall and the rotors.

Detail C - As the rotors rotate further, gas (3) is trapped between the pump body wall and the rotors, and is transferred towards the outlet (2). The rotors rotate with precise timing to maintain the proper clearances, limiting gas back flow.

Detail D - As the rotors rotate further, the gas (3) is discharged through the pump outlet (2). The pump discharges four volumes for every full rotation of the drive shaft.

Detail E: bypass valve operation (only applicable to pumps with a bypass valve) - The optional integral bypass valve limits the pressure differential across the pump. During pump operation, if the compression creates an excessive pressure differential across the pump, the bypass valve (4) opens, to allow a portion of the compressed gases (5) to flow back towards the inlet side of the pump.

Introduction

S900-01-880 Issue C

1.7 Bareshaft (belt drive) booster pumps

The booster pumps have been designed to withstand loading from standard V-belts, for standard operation from 800 to 3600 r min-1 (r.p.m.). The loads induced into the drive shaft depend on the power applied to the shaft. Edwards specifies a minimum pulley diameter for the drive shaft based on motor power. You must never use a pulley with a smaller diameter than those specified in this manual. Refer to Table 12 for specific details on pulley diame ters. Edwards can provide booster pumps and motors sized for most applications.

1.8 Direct drive booster pumps (with shaft-mounted motors)

Direct drive eliminates the tension loads associated with belt drives. The direct drive booster pump consists of a standard booster pump, coupling, motor support, and C-face (NEMA) or D-flange (IEC) motor. Optional variable frequency drives are available from Edwards to improve performance on booster pumps without bypass valves. Consult Edwards for application information. Various voltage, frequency, speed and power motors are available. Large power motors (> 22.37 kW, 30 h.p.) cannot be supported by a motor support alone.

1.9 Integral bypass valve (model 615 pumps only)

Model 615 booster pumps can be supplied with an integral bypass valve for operation from a tmospheric pressure. The bypass regulates the amount of compression across the booster pump body. The limiting speed for the bypass booster pump is 3600 r min-1 (r.p.m.). The bypass valve regulates the pressure differential across the booster pump to 7.9 x 103 Pa (79 mbar, 60 Torr). Maximum discharge temperature and maximum temperature rise are the same as for the standard 615 booster pumps. Under so me operating conditions, it is not possible to o perate the bypass booster pumps continuously because of the heat generated from gas compression. These conditions depend on chamber size and backing pump speeds. Consult Edwards if pump-down exceeds 45 minutes. Refer to Figure 3 detail E for a crosssection view of a bypass booster pump.

1.10 Oxygen and reactive gas service

Edwards can prepare bareshaft booster pumps for hazardous gas duties (where pumped gases could react with the hydrocarbon lubricants in standard pumps). When prepared for hazardous gas du ties, the booster pumps will be free of hydrocarbons and must be used with inert lubricating oil which will not react with the hazardous gases pumped.

You must take special care when operating booster pumps on oxygen pumping duties: refer to the “Vacuum pump and vacuum system safety - chemical & industrial systems“ publication (Edwards Publication Number P400-40-100).

S900-01-880 Issue C

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

Technical Data

S900-01-880 Issue C

2Technical Data

2.1 Operating and storage conditions

2.2 Pump technical data

Performance data, electrical data and mechanical data for the booster pumps are provided in Tables 3 to 8.

Table 2 - Operating and storage conditions

Ambient operating temperature range 12 to 40 ºC (54 to104 ºF) Ambient storage temperature range -30 to 70 ºC (-22 to 158 ºF) Normal surface temperature of the pump body at ultimate

vacuum (operation), ambient temperature of 20 ºC (68 ºF)

50 to 70 ºC (122 to 158 ºF)

Maximum ambient operating humidity 90% RH

Table 3 - Technical data: 607-MH/MV05, 607-MH/MV20, 615-MH/MV10 and 615-MH/MV15 direct drive MSeal

booster pumps (with NEMA motors)

900-607-MH05 900-607-MV05

900-607-MH20 900-607-MV20

900-615-MH10 900-615-MV10

900-615-MH15 900-615-MV15

Pumping speed 1040 m

3h-1

612 cfm

1040 m3h

-1

612 cfm

2210 m3h

-1

1300 cfm

4420 m3h

-1

2600 cfm

Nominal power 3.75 kW

5 hp

15 kW

20 hp

7.5 kW 10 hp

11 kW

15 hp Voltage 230/460 V ac 208-230/460 V ac 208-230/460 V ac 208-230/460 V ac Frequency 60 Hz 60 Hz 60 Hz 60 Hz Phases 3333 Enclosure TEFC IP55 TEFC IP55 TEFC IP55 TEFC IP55 Full load current 13 A/6.6 A 53 A/48 A/24 A 27.2 A/24.6 A/

12.3 A

39.8 A/36 A/18 A

Motor speed 1725 r min

-1

1725 rpm

1760 r min

-1

1760 rpm

1750 r min

-1

1750 rpm

3500 r min

-1

3500 rpm

Recommended fuse/circuit breaker

20 A/10 A 70 A/35 A 35 A/17.5 A 50 A/25 A

Dimensions Figures 4 and 5 Figures 4 and 5 Figures 4 and 5 Figures 4 and 5 Total mass (pump and

motor)

274 kg

603 lb

406 kg 897 lb

385 kg 847 lb

392 kg 865 lb

Motor mass 34 kg

75 lb

167 kg 367 lb

84 kg

185 lb

91 kg

200 lb

+ 39 hidden pages

Edwards 900-615-MH15, 900-615-MH10, 900-607-MV05, 900-615-MV10, 900-607-MH20 Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual