®
SERIES GFC
GAS MASS FLOW CONTROLLERS
FLOW
Flow Range Up to 1000 L/min, Pressures Up to 500 psi, NIST Traceable
5-37/64
Model GFC-1101 thru GFC-1111
The Series GFC Gas Mass Flow Controllers combine a straight tube sensor with a
restrictor ow element. It is available for ow ranges up to 1000 L/min and offered in
aluminum or 316 SS in 1/4˝, 3/8˝, 1/2˝ and 3/4˝ sizes.
FEATURES/BENEFITS
• Provides high accuracy and repeatability
• Flow rates are virtually unaffected by temperature and pressure variations
• Utilizes an electromagnetic valve and PID electronics to maintain continuous control
by comparing measured sensor signal set to ow rates
• Set points can be adjusted with local potentiometers or remotely via 0-5 VDC or 4-20
mA analog signal
Controllers
• Actual gas ow is displayed in engineering units on a 3-1/2 digit, 90° tiltable LCD
Mass Flowmeters/
readout
• Can be used with Series GFT2 Flow Totalizer for applications requiring totalization
• NIST traceable certicate included
APPLICATIONS
• Gas ow measurement
• Gas ow control
• Operating pumps and valves
• Process equipment
• Vacuum processes
• Glass and metal coating
• Film deposition
1-3/4
3
[76.20]
& GFC-2101 thru GFC-2111
[44.55]
3-9/16
[90.42]
6-19/64
[159.77]
11/16
[17.53]
[101.60]
1-3/4
[44.55]
4-35/64
[115.57]
4
1
[25.40]
6-32
2 11/16
[68.33]
1-1/8
[28.58]
4
[101.60]
SPECIFICATIONS
Service: Clean gases compatible with wetted parts.
Wetted Materials: GFC-1XXX: Anodized aluminum, brass, 316 SS and
uoroelastomer O-rings; GFC-2XXX: 316 SS and uoroelastomer O-rings.
Accuracy: ±1% FS including linearity over 59 to 77°F (5 to 25°C) and 5 to 60 psia
(0.34 to 4 bar); Series GFC X143, X144, X145, ±1.5% FS.
Repeatability: ±0.25% FS.
Response Time: 2 s to within ±2% of actual ow.
Output: Linear 0-5 VDC and 4-20 mA.
Max. Particulate Size: 5 microns.
Temperature Limits: 32 to 122°F (0 to 50°C).
Power Supply: ±12 VDC.
Process Connections: 1/4˝ compression tting for ow rates ≤50 L/m; 3/8˝ for 100
and 200 L/m; 1/2˝ for 500 L/min; 3/4˝ for 1000 L/min.
Pressure Limits: 1000 psig (68.9 bar); Series GFC-X143, X144, X145, 500 psig
(34.5 bar).
Leak Integrity: 1 x 10
Display: 90° tiltable, 3-1/2 digit.
Agency Approvals: CE.
[28.58]
1-1/2
[38.10]
3
[76.20]
5-31/32
[151.77]
7 21/64 [186.18]
7 21/64 [186.18]
Model GFC-1130 thru GFC-1133
& GFC-2130 thru GFC-2133
1-17/64
[32.00]
Model GFC-1143 thru GFC-1145
& GFC-2143 thru GFC-2145
-9
sccs of He.
11/16
[17.53]
7-19/64
[185.42]
thru
3
[76.20]
6-32
3-15/16
[99.95]
1.437
2-11/16
[68.33]
3-1/8
[79.38]
1-3/4
[44.55]
Model GFC-1140 thru
GFC-1142 & GFC-2140
thru GFC-2142
3-11/64
[80.65]
1-17/64
[32.00]
[28.58]
1-1/4
[31.75]
1-1/8
MODEL CHART
Aluminum
ModelSSModel Flow Range
GFC-1101*
GFC-1102*
GFC-1103*
GFC-1104*
GFC-1105*
GFC-1106*
GFC-1107*
GFC-1108*
GFC-1109*
GFC-1111*
GFC-1131*
GFC-1133*
GFC-1142*
GFC-1143*
GFC-1144*
GFC-1145*
*Specied ow ranges are for an equivalent ow of nitrogen at
70°F (21°C) @ 760 mm Hg
GFC-2101*
GFC-2102*
GFC-2103*
GFC-2104*
GFC-2105*
GFC-2106*
GFC-2107*
GFC-2108*
GFC-2109*
GFC-2111*
GFC-2131*
GFC-2133*
GFC-2142*
GFC-2143*
GFC-2144*
GFC-2145*
0 to 10 mL/m
0 to 20 mL/m
0 to 50 mL/m
0 to 100 mL/m
0 to 200 mL/m
0 to 500 mL/m
0 to 1000 mL/m
0 to 2 L/min
0 to 5 L/min
0 to 15 L/min
0 to 30 L/min
0 to 50 L/min
0 to 100 L/min
0 to 200 L/min
0 to 500 L/min
0 to 1000 L/min
Process
Connector
Compression
Fitting
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
1/4˝
3/8˝
3/8˝
1/2˝
3/4˝
DWYER INSTRUMENTS, INC. 298
ACCESSORIES
Model Description
GFC-110P
GFC-220PE
GFC-CBL1
GFC-CBL3
USA: California Proposition 65
WARNING: Cancer and Reproductive Harm - www.P65Warnings.ca.gov
110 V power supply
220 V power supply
8´ cable with 15-pin connector
3´ extension cable for LCD readout