Series
6-5/8
[167.13]
1 7/8
[47.75]
3/4
[17.53]
6-32
2 3/4
[68.33]
*FOR FLOW ≥ 50 L/M
5 5/8 or 5 7/8*
[143.51]
6 1/4
[157.23]
5 1/4
[133.86]
3/4
[17.53]
6-32
FOR FLOW ≥ 15 L/M
2 7/8
[74.42]
1 1/2
[38.10]
DMF
Digital Mass Flow Controllers
Programmable, RS485 Interface, Up To 500 psig, ±1% Accuracy
Program, record, analyze, and control flow rates of various gases with Series DMF
Digital Mass Flow Controller. Controllers are designed with straight tube sensors with
restrictor f low elements to ensure laminar gas flow for accurate and repeatable results.
Series DMF are unaffected by temperature and pressure variations.
Controllers can be programmed for various control functions including flow set point,
totalizer, stop totalizer, totalize from preset flow, stop and preset total, auto zero, and more.
Auto zero feature utilizes an automatic balancing circuit that virtually eliminates drift of
zero and span. In addition, Series DMF controllers have two dry contact closures to operate
pumps, valves, or other process equipment.
The Series DMF features an auto tune function to optimize control response for a specific
gas under actual process conditions. Self diagnostic tests are run at power up to ensure
the controller is in optimum working condition. Calibration information for up to 10 gases
and conversion factors for up to 256 different gases are stored in memory. High and low
gas flow alarm limits are programmed via RS-485 interface. Software supports
programmable flow modes, allowing execution of custom programming of up to ten steps.
Model*
DMF-41401
DMF-41402
DMF-41403
DMF-41404
DMF-41405
DMF-41406
DMF-41407
*Specified flow ranges are for an equivalent flow of
nitrogen at 70°F (21°C) @ 760 mm Hg.
ACCESSORIES
Model DMF-1
Model DMF-220PE, 220V power supply with 25-pin connector
Model DMF-CBL1, 6´ cable with branch to separate power supply
Model DMF-CBL2, 6´ cable with branch to computer port
Range
0 to 10 sccm
0 to 20 sccm
0 to 50 sccm
0 to 100 sccm
0 to 200 sccm
0 to 500 sccm
0 to 1 L/min
10P, 110V power supply with 25-pin connector
Model*
DMF-41408
DMF-41409
DMF-41411
DMF-41431
DMF-41433
DMF-41842
Range
0 to 2 L/min
0 to 5 L/min
0 to 15 L/min
0 to 30 L/min
0 to 50 L/min
0 to 100 L/min
SPECIFICATIONS
Service: Clean gases compatible with wetted parts.
Wetted Materials: 316 SS, 416 SS, fluoroelastomer O-rings.
Accuracy: ±1% FS including linearity between 59 to 77°F (15 to 25°C) and 10 to
60 psia (0.7 to 4 bar); ±2% FS from 32 to 122°F (0 to 50°C) and 5 to 150 psia
(0.3 to 10 bar).
Repeatability: ±0.15% of full-scale.
Response Time: 0.6 to 1.0 second to within ±2% of setpoint over 20% to 100%
FS.
Output: Linear 0-5 VDC (2000 Ω min. load impedance); 0-10 VDC (4000 Ω min.
load impedance).
Maximum Particulate Size: 100 microns.
Temperature Limits: 41 to 122°F (5 to 50°C).
Power Supply: ±15 VDC; 13.5 watts maximum.
Process Connections: 1/4˝ compression fitting for flow rates ≤50 L/m; 3/8˝ for
flows ≥60 L/m.
Pressure Limits: 500 psig (34.5 bar).
Leak Integrity: 1 x 10
Computer Interface: RS-485.
Agency Approvals: CE.
-9
sccs of helium.
FLOW
Mass Flowmeters/
Controllers
223