Dwyer GFM2 User Manual

Series GFM2 Digital Mass Flow Meter
Installation and Operating Instructions
Bulletin F-GFM2
DWYER INSTRUMENTS, INC.
P.O. BOX 373 • MICHIGAN CITY, INDIANA 46360, U.S.A. Fax: 219/872-9057 e-mail: info@dwyer-inst.com
Phone: 219/879-8000 www.dwyer-inst.com
ABLE OF CONTENTS
T
. Unpacking the GFM2 Flow Meter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
.1 Inspect Package for External Damage . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
1.2 Unpack the Mass Flow Meter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
1.3 Returning Merchandise for Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
. Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
.1 Primary Gas Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
.2 Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
.2.1 Power Supply Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
2.2.2 Output Signal Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
2.2.3 Output Communication Parameters and Connections . . . . . . . . . . .3
. Principle of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
. Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
5. Operating Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
5.1 Preparation and Warm Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
5.2 Swamping Condition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
.3 GFM2 Parameters Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
.3.1 Engineering Units Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
.3.2 Gas Table Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
5.3.3 Totalizer Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
5.3.4 Flow Alarm Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
5.3.5 Relay Assignment Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
5.3.6 K-Factors Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
.3.7 Zero Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
.3.8 Self Diagnostic Alarm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
.4 Analog Output Signals Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
. Calibration Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8
.1 Flow Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8
.2 Gas Flow Calibration of GFM2 Mass Flow Meters . . . . . . . . . . . . . . . . . .8
.2.1 Connections and Initial Warm Up . . . . . . . . . . . . . . . . . . . . . . . . . . .8
7.2.2 ZERO Check/Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8
7.2.3 Gas Linearization Table Adjustment . . . . . . . . . . . . . . . . . . . . . . . . .8
7.3 Analog Output Calibration of GFM2 Mass Flow Meters . . . . . . . . . . . . . . .9
.3.1 Initial Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
.3.2 Gas Flow 0 to 5 VDC Analog Output Calibration . . . . . . . . . . . . . . . .9
.3.3 Gas Flow 4 to 20 mA Analog Output Calibration . . . . . . . . . . . . . . . .9
8. RS-485/RS-232 Software Interface Commands . . . . . . . . . . . . . . . . . . . . . . .9
8.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
8.2 Commands Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
.3 ASCII Commands Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10
. Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10
9.1 Common Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10
9.2 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12
9.3 Technical Assistance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13
0. Calibration Conversions from Reference Gases . . . . . . . . . . . . . . . . . . .13
ppendix I GFM2 EEPROM Variables . . . . . . . . . . . . . . . . . . . . . . . . . . . .14
A
Appendix II Internal User Selectable Gas Factor Table
ppendix III Gas Factor Table (“K” Factors) . . . . . . . . . . . . . . . . . . . . . .16
A
ppendix IV Component Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18
A
(Internal “K” Factors) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
6. Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
6.2 Flow Path Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
6.2.1 Restrictor Flow Element (RFE) . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
6.2.2 GFM2 Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
Appendix V Dimensional Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19
Appendix VI Maintenance/Repair, Warranty/Return . . . . . . . . . . . . . . . . .19
Page 2
. UNPACKING THE GFM2 MASS FLOW METER
1.1 - Inspect Package for External Damage
Your GFM2 Mass Flow Meter was carefully packed in a sturdy cardboard carton,
ith anti-static cushioning materials to withstand shipping shock. Upon receipt,
w
nspect the package for possible external damage. In case of external damage to
i
he package contact the shipping company immediately.
t
1.2 - Unpack the Mass Flow Meter
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a
opy of any damage report to your distributor or Dwyer Instruments, Inc directly.
c
hen unpacking the instrument please make sure that you have all the items
W
ndicated on the Packing List. Please report any shortages promptly.
i
1.3 - Maintenance/Repair
Upon final installation of the Series GFM2, no routine maintenance is required. The Series GFM2 is not field serviceable and should be returned if repair is needed.
ield repair should not be attempted and may void warranty.
F
arranty/Return
W
Refer to “Terms and Conditions of Sales” in our catalog and on our website. Contact customer service to receive a Return Goods Authorization number before shipping the product back for repair. Be sure to include a brief description of the problem plus any additional application notes.
. INSTALLATION
.1 - Primary Gas Connections
Please note that the GFM2 Mass Flow Meter will not operate with liquids. Only clean gases are allowed to be introduced into the instrument. If gases are contaminated they must be filtered to prevent the introduction of impediments into the sensor.
CAUTION
application. For more information, contact your distributor or Dwyer.
Attitude limit of Mass Flow Meter is ±15° from calibration position (standard calibration is in horizontal position). This means that the gas flow path of the Flow Meter must be within this limit in order to maintain the original calibration accuracy. Should there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the GFM2 transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminants. Be sure to observe the direction of gas flow as indicated by the arrow on the front of the meter when connecting the gas system to be monitored. Insert tubing into the compression fittings until the ends of the properly sized tubing home flush against the shoulders of the fittings. Compression fittings are to be tightened according to the manufacturer's instructions to one and one quarter turns. Avoid over tightening which will seriously damage the Restrictor Flow Elements (RFE's)!
WARNING
pressure above 500 PSIA (34.47 bars) will seriously damage the flow sensor and may cause serious injury or death.
GFM2 transducers are supplied with standard 1/4˝ or 3/8˝ inlet and outlet compression fittings which should not be removed unless the meter is being cleaned or calibrated for a new flow range.
FM2 transducers should not be used for monitoring OXYGEN
G
as unless specifically cleaned and prepared for such
For models GFM2 models the maximum pressure in the gas line should not exceed 500 PSIA (34.47 bars). Applying
CAUTION
2.2.2 - Output Signals Connections
AUTION
C
do so might cause damage to this device. Be sure to check that the wiring and
he polarity of the power supply is correct before turning the power ON. Wiring
t
rror may cause damage or faulty operation.
GFM2 Mass Flow Meters are equipped with either calibrated 0 to 5 VDC (0 to 10
DC optional) or calibrated 4 to 20 mA output signals (jumper selectable). This
V
inear output signal represents 0 to 100% of the flow meter's full scale range.
l
AUTION
C
output signals!
Flow 0 to 5 VDC or 4 to 20 mA output signal connection:
P M
To eliminate the possibility of noise interference, use a separate cable entry for the DC power and signal lines.
2.2.3 - Communication Parameters and Connections
he digital interface operates via RS-485 (optional RS-232 or Profibus DP is
T
vailable) and provides access to applicable internal data including: flow, CPU
emperature, pressure reading, auto zero, totalizer and alarm settings, gas table,
t conversion factors and engineering units sel ection, dynamic response compensation and linearization table adjustment.
Communication Settings:
RS-485 Communication Interface Connection:
The RS-485 converter/adapter has to be configured for: multidrop, 2 wire, half duplex mode. Settings for the receiver circuit usually should follow the selection made for the transmitter circuit in order to eliminate echo.
RS-485 T(-) or R(-) -------- pin 8 of the 15 pin "D" connector (TX-) RS-485 T(+) or R(+) -------- pin 15 of the 15 pin "D" connector (RX+) RS-485 GND (if available) -------- pin 9 of the 15 pin "D" connector (GND)
RS-232 Communication Interface Connection:
Crossover connection has to be established:
RS-232 RX (pin 2 on the DB9 connector) -------- pin 8 of the 15 pin "D" connector (TX) RS-232 TX (pin 3 on the DB9 connector) -------- pin 15 of the 15 pin "D" connector (RX) RS-232 GND (pin 5 on the DB9 connector) -------- pin 9 of the 15 pin "D" connector (GND)
Do not apply power voltage above 26 VDC. Doing so will cause
FM2 damage or faulty operation.
G
When connecting the load to the output terminals, do not exceed the rated values shown in the specifications. Failure to
All 4 to 20 mA current loop outputs are self-powered (non­isolated). Do not connect an external voltage source to the
lus (+) ------------------- pin 2 of the 15 pin "D" connector
inus (-) ------------------- pin 1 of the 15 pin "D" connector
aud rate: -------- 9600 baud
B
top bit: -------- 1
S Data bits: -------- 8 Parity: -------- None Flow Control: -------- None
Using a Helium Leak Detector or other equivalent method perform a thorough leak test of the entire system. (All GFM2’s are checked prior to shipment for leakage within stated limits. See specifications in this manual.)
2.2 - Electrical Connections
GFM2 is supplied with a 25 pin "D" connector. Pin diagram is presented in figure b-1.
2.2.1 - Power Supply Connections
The power supply requirements for GFM2 transduers are: 11 to 26 VDC, (unipolar power supply)
DC Power (+) --------------- pin 7 of the 15 pin "D" connector DC Power (-) --------------- pin 5 of the 15 pin "D" connector
Page 3
IN GFM2 FUNCTION
P
1 Common, Signal Ground
For Pin 2 (4 to 20 mA return)
2 0 to 5 VDC or 4 to 20 mA
low Signal Output
F
Relay No. 2 - Normally Open
ontact
C
4 Relay No. 2 - Common
Contact
5 Common, Power Supply
- DC power for 11 to 26 VDC)
(
Relay No. 1 - Common
ontact
C
Plus Power Supply
(+ DC power for 11 to 26 Vdc) 8 RS485 (-) (Optional RS232 TX) 9 RS232 Signal GND (RS-485
ND Optional)
G
0 Do not connect
Test/Maintenance terminal)
(
11 Relay No. 2 - Normally Closed
Contact 12 Relay No. 1 - Normally Open
Contact
3 Relay No. 1 - Normally Closed
ontact
C
4 Do not connect
(Test/Maintenance terminal)
5 RS485 (+) (Optional RS232
X) Shield Chassis Ground
R
OTICE
N
onconforming patterns and the numbering sequence on your mating
NOTICE
In general, "D" Connector numbering patterns are
tandardized. There are, however, some connectors with
s
Make sure power is OFF when connecting or disconnecting any cables in the system.
dditionally, the GFM2 Mass Flow Meter incorporates a precision analog
A
icrocontroller and non-volatile memory that stores all hardware specific variables
m
nd up to 10 different calibration tables. The flow rate can be displayed in 23
ifferent volumetric or mass flow engineering units. Flow meter parameters and
ero adjustment (activated via local button or communication interface), 2
z
rogrammable SPDT relays output, 0 to 5 VDC / 4 to 20 mA analog outputs (jumper
electable), self diagnostic alarm, 36 internal and user defined K-factor. Optional
s
ocal 2x16 LCD readout with adjustable back light provides flow rate and total
l volume reading in currently selected engineering units and diagnostic events indication.
PECIFICATIONS
S
ervice: Clean gases compatible with wetted parts.
S
etted Materials:
W
GFM2-X-X-A: Anodized aluminum, brass, 316 SS fluoroelastomer O-rings; GFM2-X-X-S: 316 SS, and fluoroelastomer O-rings; Buna-N, EPR and PTFE
Accuracy: ±1% FS.
epeatability: ±0.25% FS.
R
esponse Time: 2 seconds to within ±2% of actual flow.
R
utput Signal: Linear 0 to 5 VDC (3000 Ω min. load impedance) and 4 to 20 mA
O
(500 Ω max. loop resistance).
Max. Particulate Size: 5 microns. Temperature Limits: 32 to 122°F (0 to 50°C). Power Supply: 11 to 26 VDC.
rocess Connections: 1/8˝ compression fitting for flow rates ≤ 10 L/min; 1/4˝ for ≤
P
0 L/min; 3/8˝ for ≤ 100 L/min.
isplay: 2 x 16 character LCD.
D Pressure Limits: 500 psig (34.5 bar). Leak Integrity: 1 x 10-9 smL/sec of helium. Weight: 1.05 lb (0.48 kg).
O-rings optional.
The (+) and (-) power inputs are each protected by a 300 mA M (medium time-lag) resettable fuse. If a shorting condition or polarity reversal occurs, the fuse will cut power to the flow transducer circuit. Disconnect the power to the unit, remove the faulty condition, and reconnect the power. The fuse will reset once the faulty condition has been removed. DC Power cable length may not exceed 9.5 feet (3 meters).
Use of the GFM2 flow transducer in a manner other than that specified in this manual or in writing from Dwyer, may impair the protection provided by the equipment.
3. Principle of Operation
The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube. The remainder of the gas flows through the primary flow conduit. The geometry of the primary conduit and the sensor tube are designed to ensure laminar flow in each branch. According to principles of fluid dynamics the flow rates of a gas in the two laminar flow conduits are proportional to one another. Therefore, the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater-sensor coils. Heat is transferred through the thin wall of the sensor tube to the gas flowing inside. As gas flow takes place heat is carried by the gas stream from the upstream coil to the downstream coil windings. The resultant temperature dependent resistance differential is detected by the electronic control circuit. The measured temperature gradient at the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass-molecular based flow rates.
Page 4
low Rates
F
low rates are stated for Nitrogen at STP conditions [i.e. 70°F (21.1°C) at 1 atm].
F
or other gases use the K factor as a multiplier from APPENDIX III.
F
low Rate
odel
M
FM2-X-101
G
odel
M
std liters/min)
(
up to 10
GFM2-X-101 Transmitter
F
Maximum Pressure Drop
)
mm H
(
2
130
eight
W
2.20 lb (1.00 kg)
psid)
(
hipping Weight
S
kPa)
(
.18
.275
3.70 lb (1.68 kg)
Table IV - Pressure Drops
5. OPERATING INSTRUCTIONS
NOTICE
uring the first 6 minutes of the initial powering of the GFM2
D transducer, the status LED will emit a constant amber light.
or the GFM2 transducer with LCD option: If the LCD diagnostic is activated, the
F second line of the LCD will display the time remaining until the end of the warm up period (Minutes:Seconds format) and will alternatively switch to Totalizer reading indication every 2 seconds.
F: 50.0 L/min
** WarmUp 2:39 **
5.1 - Preparation and Warm Up
t is assumed that the Digital Mass Flow Meter has been correctly installed and
I
horoughly leak tested as described in section 2. Make sure the flow source is OFF.
t
hen applying power to a flow meter within the first 2 seconds you will see on the
W LCD display: the product name, the software version, and revision of the EEPROM table (applicable for LCD option only).
S: Ver1.4 Rev.A0
igure b-2: GFM2 First Banner Screen
F
ithin the next 2 seconds, the RS-485 network address, the analog output settings,
W and currently selected gas calibration table will be displayed (applicable for LCD option only).
Ad: 11 Out: 0 to 5 VDC
Gas# 1 AIR
Figure b-3: GFM2 Second Banner Screen
NOTICE
Actual content of the LCD screen may vary depending on the model and device configuration.
After 2 seconds, the LSD display switches to the main screen with the following information:
- Mass Flow reading in current engineering units (upper line).
- Totalizer Volume reading in current volume or mass based engineering units (lower line).
F: 50.0 L/min
T: 75660.5 Ltr
Figure b-4: GFM2 Main Screen
NOTICE
During initial powering of the GFM2 transducer, the flow output signal will be indicating a higher than usual output. This is an indication that the GFM2 transducer has not yet attained its minimum operating temperature. This condition will automatically cancel within a few minutes and the transducer should eventually indicate 0.
Allow the Digital Mass Flow Meter to warm-up for a MINIMUM of 6 minutes.
igure b-5: GFM2 Main Screen During Sensor Warm Up Period.
F
OTICE
N
After 6 minutes of the initial powering of the GFM2 transducer, the status LED will emit a constant GREEN light (normal
operation, ready to measure). For GFM2 with LCD option, the screen will reflect
low and totalizer reading. (see Figure b-4).
f
.2 Swamping Condition
f a flow of more than 10% above the maximum flow rate of the Mass Flow Meter
I is taking place, a condition known as "swamping" may occur. Readings of a "swamped" meter cannot be assumed to be either accurate or linear. Flow must be restored to below 110% of maximum meter range. Once flow rates are lowered to within calibrated range, the swamping condition will end. Operation of the meter
bove 110% of maximum calibrated flow may increase recovery time.
.3 GFM2 Parameters Settings
5.3.1 Engineering Units Settings
The GFM2 Mass Flow Meter is capable of displaying flow rate with 23 different Engineering Units. Digital interface commands (8.3 ASCII Command Set “GFM2 SOFTWARE INTERFACE COMMANDS”) are provided to:
- get currently active Engineering Units
- set desired Engineering Units.
The following Engineering Units are available:
Units of Measure
Number
Index
Flow Rate
Engineering
Units
% mL/sec mL/min mL/hr L/sec L/min L/hr
3
m
/sec
3
m
/min
3
m
/hr
3
ft
/sec
3
ft
/min
3
ft
/hr g/sec g/min g/hr kg/sec kg/min kg/hr Lb/sec Lb/min Lb/hr User
Totalizer
Engineering
Units
%s mL mL mL Ltr Ltr Ltr
3
m
3
m
3
m
3
ft
3
ft
3
ft g g g kg kg kg Lb Lb Lb UD
Description
Percent of full scale Mililiter per second Mililiter per minute Mililiter per hour Liter per second Liter per minute Liter per hour Cubic meter per second Cubic meter per minute Cubic meter per hour Cubic feet per second Cubic feet per minute Cubic feet per hour Grams per second Grams per minute Grams per hour Kilograms per second Kilograms per minute Kilograms per hour Pounds per second Pounds per minute Pounds per hour User Defined
Page 5
NOTICE
automatically.
Once Flow Unit of Measure is changed, the Totalizer’s Volume/Mass based Unit of Measure will be changed
5.3.2 Gas Table Settings
The GFM2 Mass Flow Meter is capable of storing calibration data for up to 10
ifferent gases. Digital interface commands are provided to:
get currently active Gas Table number and Gas name
­ set desired Gas Table.
-
OTICE
N
rdered). If instead of the valid Gas name (for example NITROGEN), the LCD
creen or digital interface displays Gas designator as “Uncalibrated”, then the
s user has chosen the Gas Table which was not calibrated. Using an “Uncalibrated” Gas Table will result in erroneous reading.
5.3.3 Totalizer Settings
The total volume of the gas is calculated by integrating the actual gas flow rate with respect to the time. Digital interface commands are provided to:
reset the totalizer to ZERO
­ start the totalizer at a preset flow
­ assign action at a preset total volume
-
- start/stop (enable/disable) totalizing the flow
- read totalizer via digital interface
The Totalizer has several attributes which may be configured by the user. These
ttributes control the conditions which cause the Totalizer to start integrating the gas
low and also to specify actions to be taken when the Total Volume is outside the
f
pecified limit.
s
OTICE
N
ntered in % FS engineering unit. The Totalizer will not totalize until the flow rate
ecomes equal to or more than the Totalizer Start value. Totalizer Stop values
ust be entered in currently active volume / mass based engineering units. If the
m Totalizer Stop at preset total volume feature is not required, then set Totalizer Stop value to 0.
Totalizer action conditions become true when the totalizer reading and preset "Stop at Total" volumes are equal.
y default the GFM2 is shipped with at least one valid
B
alibration table (unless optional additional calibrations were
c
Before enabling the Totalizer, ensure that all totalizer settings are configured properly. Totalizer Start values have to be
Latch Mode - Controls Latch feature when Relays are assigned to Alarm event. Following settings are available:
- Latch feature is disabled for both relays
- Latch feature is enabled for Relay#1 and disabled for Relay#2
- Latch feature is enabled for Relay#2 and disabled for Relay#1
- Latch feature is enabled for both relays.
NOTICE
NOTICE
onditions. If Relay is assigned to the Alarm event, in some cases, the Alarm
c
atch feature may be desirable.
The current Flow Alarm settings and status are available via digital interface (8.3 ASCII Command Set “GFM2 SOFTWARE INTERFACE COMMANDS”).
.3.5 Relay Assignment Settings
wo sets of dry contact relay outputs are provided to actuate user supplied
T equipment. These are programmable via digital interface such that the relays can be made to switch when a specified event occurs (e.g. when a low or high flow alarm limit is exceeded or when the totalizer reaches a specified value).
he user can configure each Relay action from 6 different options:
T
o Action : (N) No assignment (relay is not assigned to any events and not
N
nergized).
igh Flow Alarm : (H) High Flow Alarm condition.
H
ow Flow Alarm : (L) Low Flow Alarm condition.
5.3.6 K-Factors Settings
onversion factors relative to nitrogen for up to 36 gases are stored in the GFM2
C (see APPENDIX II). In addition, provision is made for a user-defined conversion factor. Conversion factors may be applied to any of the ten gas calibrations via digital interface commands.
f the alarm condition is detected, and the Relay is assigned to
I
larm event, the corresponding Relay will be energized.
A
y default, flow alarm is non-latching. That means the alarm is
B
ndicated only while the monitored value exceeds the specified
i
Local maintenance push button is available for manual Totalizer reset on the field. The maintenance push button is located on the right side of the flow meter inside the maintenance window above the 15 pin D-connector (see Figure C-1 “GFM2 configuration jumpers”).
NOTICE
sequence is recommended:
1. Disconnect GFM2 from the power.
2. Press maintenance push button (do not release).
3. Apply power to the GFM2 while holding down the maintenance push button.
4. Release maintenance push button after 6 seconds. For GFM2 with optional
LCD, when GFM2 Main Screen appears (see Figure b-4).
5.3.4 Flow Alarm Settings
GFM2 provides the user with a flexible alarm/warning system that monitors the Gas Flow for conditions that fall outside configurable limits as well as visual feedback for the user via the status LED and LCD (only for devices with LCD option) or via a Relay contact closure.
The flow alarm has several attributes which may be configured by the user via a digital interface. These attributes control the conditions which cause the alarm to occur and to specify actions to be taken when the flow rate is outside the specified conditions.
Mode Enable /Disable - Allows the user to Enable/Disable Flow Alarm. Low Alarm - The value of the monitored Flow in % FS below which is considered an alarm condition.
NOTICE
High Alarm - The value of the monitored Flow in % FS above which is considered an alarm condition.
NOTICE
Action Delay - The time in seconds that the Flow rate value must remain above the high limit or below the low limit before an alarm condition is indicated. Valid settings are in the range of 0 to 3600 seconds.
In order to locally Reset Totalizer, the reset push button must be pressed during power up sequence. The following
The value of the Low alarm must be less than the value of the High Alarm.
The value of the High alarm must be more than the value of the Low Alarm.
The available K Factor settings are:
• Disabled (K = 1).
• Internal Index The index [0-35] from internal K factor table (see APPENDIX II).
• User Defined User defined conversion factor.
NOTICE
5.3.7 Zero Calibration
The GFM2 includes an auto zero function that, when activated, automatically adjusts the mass flow sensor to read zero. The initial zero adjustment for your GFM2 was performed at the factory. It is not required to perform zero calibration unless the device has zero reading offset with no flow conditions.
NOTICE
condition is established.
Shut off the flow of gas into the Digital Mass Flow Meter. To ensure that no seepage or leak occurs into the meter, it is good practice to temporarily disconnect the gas source. The Auto Zero may be initiated via digital communication interface or locally by pressing the maintenance push button, which is located on the right side of the flow meter inside the maintenance window above the 15 pin D-connector (see Figure C-1 “GFM2 configuration jumpers”).
NOTICE
will prevent initiating Auto Zero function via the maintenance push button before the 6 minutes sensor warm up period has elapsed.
To start Auto Zero locally, press the maintenance push button. The status LED will flash not periodically with the RED light. On the GFM2 with optional LCD, the following screen will appear:
The conversion factors will not be applied for % FS engineering unit.
Before performing Zero Calibration, make sure the device is powered up for at least 15 minutes and absolutely no flow
The same maintenance push button is used for Auto Zero initiation and Totalizer reset. The internal diagnostic algorithm
AUTOZERO IS ON!
Figure b-6: GFM2 Screen in the Beginning of Auto Zero Procedure
Page 6
he Auto Zero procedure normally takes 1 to 2 minutes during which time the DP
T
ero counts and the Sensor reading changes approximately every 3 to 6 seconds.
Z
AUTOZERO IS ON!
S: 405 DP: 512
Figure b-7: GFM2 During the Auto Zero Procedure
The nominal value for a fully balanced sensor is 120 counts. If the GFM2’s digital
ignal processor was able to adjust the Sensor reading within 120 ± 10 counts,
s
hen Auto Zero is considered successful. The status LED will return to a constant
t
REEN light.
G
NOTICE
f the device was unable to adjust the Sensor reading to within 120 ± 10 counts,
I
hen Auto Zero is considered as unsuccessful. The constant RED light will appear
t
n the status LED. The user will be prompted with the “AutoZero ERROR!” screen.
OTICE
N
5.3.8 Self Diagnostic Alarm
FM2 series Mass Flow Meters are equipped with a self-diagnostic alarm which is
G
vailable via multicolor LED, digital interface and on screen indication (for devices
ith optional LCD). The following diagnostic events are supported:
w
Number
NOTICE
event with the highest priority level will be indicated on the status LED and displayed on the LCD (if equipped). All diagnostic events may be accessed simultaneously via digital communication interface.
5.4 Analog Output Signals Configuration
GFM2 series Mass Flow Meters are equipped with calibrated 0 to 5 VDC and 4 to 20 mA output signals. The set of the jumpers (J7A, J7B, J7C) located on the right side of the flow meter, inside of the maintenance window above the 15 pin D­connector (see Figure C-1 “GFM2 configuration jumpers”) are used to switch between 0 to 5 VDC or 4 to 20 mA output signals (see Table VI). Analog output signals of 0 to 5 VDC and 4 to 20 mA are attained at the appropriate pins of the 15­pin "D" connector (see Figure b-1) on the side of the GFM2 transducer.
The actual value of the Sensor and DP counts will vary for each GFM2.
For GFM2 with RS-232 option all Auto Zero status info available via digital communication interface.
LED Color
Diagnostic Alarm Description
uto Zero procedure is running
A
FATAL ERROR (reset or maintenance service is required for return in to the normal operation) CPU Temperature too high (Electronics Overheating) Sensor in the warm up stage (first 6 minutes after power up sequence, normal operation, no critical diagnostic events present) Flow Sensor Temperature too low Flow Sensor Temperature too high Totalizer Reading hit preset limit
Low Flow Alarm conditions High Flow Alarm conditions Normal operation, no diagnostic events
[0] - Priority Level is highest (most important). When two or more diagnostic events are present at the same time, the
and Pattern
ot periodically
N flashing RED Constant RED
Flashing RED/UMBER
Constant UMBER
Flashing UMBER/OFF Flashing RED/OFF Flashing GREEN/UMBER Flashing GREEN/OFF Flashing GREEN/RED Constant GREEN
Priority Level
-10
-11
-9
4 to 20 mA
7.A
J
7.B
J
7.C
J
-5
-6
-7
Analog Signal Output
low Rate Output
F
Jumper Header J7
Table VI - Analog Output Jumper Configuration
ee APPENDIX IV for actual jumpers layout on the PCB.
S
NOTICE
6. MAINTENANCE
6.1 Introduction
t is important that the Mass Flow Meter is only used with clean, filtered gases.
I
iquids may not be metered. Since the RTD sensor consists, in part, of a small
apillary stainless steel tube, it is prone to occlusion due to impediments or gas
c crystallization. Other flow passages are also easily obstructed.
Therefore, great care must be exercised to avoid the introduction of any potential flow impediment. To protect the instrument, a 50 micron (GFM2-X-010) filter is built
nto the inlet of the flow transducer. The filter screen and the flow paths may require
i
ccasional cleaning as described below. There is no other recommended
aintenance required. It is good practice, however, to keep the meter away from
m vibration, hot or corrosive environments and excessive RF or magnetic interference.
If periodic calibrations are required, they should be performed by qualified personnel and calibrating instruments, as described in section 7. It is recommended
hat units are returned to Dwyer for repair service and calibration.
t
WARNING
COMPLETELY PURGED AND NEUTRALIZED OF TOXIC, BACTERIOLOGICALLY INFECTED, CORROSIVE OR RADIOACTIVE CONTENTS..
6.2 Flow Path Cleaning
Before attempting any disassembly of the unit for cleaning, try inspecting the flow paths by looking into the inlet and outlet ends of the meter for any debris that may be clogging the flow through the meter. Remove debris as necessary. If the flow path is clogged, proceed with steps below.
Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids, please return meter for servicing.
CAUTION
6.2.1 Restrictor Flow Element (RFE)
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer which splits the inlet gas flow by a preset amount to the sensor and main flow paths. The particular RFE used in a given Mass Flow Meter depends on the gas and flow range of the instrument.
6.2.2 GFM2-X-010 Models
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow Element (RFE) is connected to the inlet fitting. Carefully disassemble the RFE from the inlet connection. The 50 micron filter screen will now become visible. Push the screen out through the inlet fitting. Clean or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying.
Inspect the flow path inside the transducer for any visible signs of contaminant. If necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths by flowing clean dry gas through.
Carefully re-install the RFE and inlet fitting avoiding any twisting and deforming to the RFE. Be sure that no dust has collected on the O-ring seal.
NOTICE
CALIBRATION POINT BE CHECKED AFTER RE-INSTALLING THE INLET FITTING.
igital output (communication) is simultaneously available with
D
nalog output.
O PROTECT SERVICING PERSONNEL IT IS MANDATORY
T
HAT ANY INSTRUMENT BEING SERVICED IS
T
DISASSEMBLY MAY COMPROMISE CURRENT CALIBRATION.
OVER TIGHTENING WILL DEFORM AND RENDER THE RFE DEFECTIVE. IT IS ADVISABLE THAT AT LEAST ONE
0 to 5 VDC
7.A
J
7.B
J
7.C
J
Page 7
. CALIBRATION PROCEDURES
OTICE
N
ETER, AS DESCRIBED IN THIS SECTION, WILL VOID ANY CALIBRATION
M
ARRANTY APPLICABLE.
W
7.1 Flow Calibration
wyer Instruments' Flow Calibration Laboratory offers professional calibration
D
upport for Mass Flow Meters using precision calibrators under strictly controlled
s
onditions. Calibrations can also be performed at customers' site using available
c
tandards.
s
Factory calibrations are performed using NIST traceable precision volumetric calibrators incorporating liquid sealed frictionless actuators.
enerally, calibrations are performed using dry nitrogen gas. The calibration can
G
hen be corrected to the appropriate gas desired based on relative correction [K]
t factors shown in the gas factor table (see APPENDIX III). A reference gas, other than nitrogen, may be used to better approximate the flow characteristics of certain gases. This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration. The
ppropriate relative correction factor should be recalculated (see section 9).
t is standard practice to calibrate Mass Flow Meters with dry nitrogen gas at
I
70.0°F (21.1°C), 20 psia (137.9 kPa absolute) inlet pressure and 0 psig outlet
pressure. It is best to calibrate GFM2 transducers to actual operating conditions. Specific gas calibrations of non-toxic and non-corrosive gases are available for specific conditions. Please contact your distributor or Dwyer for a price quotation.
t is recommended that a flow calibrator be used which has at least four times better
I
ollective accuracy than that of the Mass Flow Meter to be calibrated.
c Equipment required for calibration includes: a flow calibration standard, PC with available RS-485/RS-232 communication interface, a certified high sensitivity multi meter (for analog output calibration only), an insulated (plastic) screwdriver, a flow regulator (for example - metering needle valve) installed upstream from the Mass Flow Meter, and a pressure regulated source of dry filtered nitrogen gas (or other suitable reference gas). Using Dwyer supplied calibration and maintenance software to simplify the calibration process is recommended.
Gas and ambient temperature, as well as inlet and outlet pressure conditions, should be set up in accordance with actual operating conditions.
7.2 Gas Flow Calibration of GFM2 Mass Flow Meters
All adjustments in this section are made from the outside of the meter via digital communication interface between a PC (terminal) and GFM2. There is no need to disassemble any part of the instrument or perform internal PCB component (potentiometers) adjustment.
GFM2 Mass Flow Meters may be field recalibrated/checked for the same range they were originally factory calibrated for. When linearity adjustment is needed or flow range changes are being made, proceed to step 7.2.3. Flow range changes may require a different Restrictor Flow Element (RFE). Consult your distributor or Dwyer for more information.
7.2.1 Connections and Initial Warm Up
Power up the Mass Flow Meter for at least 15 minutes prior to commencing the calibration procedure. Establish digital RS-485/RS-232 communication between PC (communication terminal) and the GFM2. Start Dwyer supplied calibration and maintenance software on the PC.
7.2.2 ZERO Check/Adjustment
Using Dwyer supplied calibration and maintenance software open Back Door access:
REMOVAL OF THE FACTORY INSTALLED CALIBRATION
EALS AND/OR ANY ADJUSTMENTS MADE TO THE
S
.2.3 Gas Linearization Table Adjustment
OTICE
N
evice’s front label). There is no need to adjust the gas linearization table unless
inearity adjustment is needed, flow range has to be changed, or new additional
l
alibration is required. Any alteration of the gas linearization table will
c VOID calibration warranty supplied with instrument.
as flow calibration parameters are separately stored in the Gas Dependent
G
ortion of the EEPROM memory for each of 10 calibration tables. See APPENDIX
for complete list of gas dependent variables.
I
OTICE
N
e applied to the currently selected gas. Use Gas Select command via digital
ommunication interface or Dwyer supplied calibration and maintenance software
c
o verify current gas table or select a new gas table.
t
Actual flow values are entered in normalized fraction format: 100.000 % FS corresponds to 1.000000 flow value and 0.000 % FS corresponds to 0.000000 flow value. The valid range for flow values is from 0.000000 to 1.000000 (note: GFM2
ill accept up to 6 digits after decimal point).
w
ensor readings are entered in counts of 12 bits ADC output and should always
S be in the range of 0 to 4095. There are 11 elements in the table so the data should be obtained at an increment of 10.0 % of full scale (0.0, 10.0, 20.0, 30.0, 40.0, 50.0,
60.0, 70.0, 80.0, 90.0 and 100.0 % FS).
f a new gas table is going to be created, it is recommended to start calibration
I
rom 100% FS. If only linearity adjustment is required, calibration can be
f
tarted in any intermediate portion of the gas table.
s
Using the flow regulator, adjust the flow rate to 100% of FS flow. Check the flow rate indicated against the flow calibrator. Observe the flow reading on the GFM2. If the difference between calibrator and GFM2 flow reading is more than
0.5% FS, consult factory.
If the GFM2 flow reading is more than the calibrator reading, the number of counts in the Index 133 must be decreased. If the GFM2 flow reading is less than the calibrator reading, the number of counts in the Index 133 must be increased. Once Index 133 is adjusted with a new value, check the GFM2 flow rate against the calibrator and, if required, perform additional adjustments for Index 133.
If a simple communication terminal is used for communication with the GFM2, then “MW” (Memory Write) command from the software interface commands set may be used to adjust sensor value in the linearization table (see section 8.3 for complete software interface commands list).
Memory Read “MR” command can be used to read the current value of the index. Assuming the GFM2 is configured with RS-485 interface and has address “11”, the following example will first read the existing value of Index 133 and then write a new adjusted value:
!11,MR,133[CR] - reads EEPROM address 133 !11,MW,133,3450[CR] - writes new sensor value (3450 counts) in to the index 133
NOTICE
includes an automated calibration procedure which may radically simplify reading and writing for the EEPROM linearization table.
Once 100% FS calibration is completed, the user can proceed with calibration for another 9 points of the linearization table by using the same approach.
Your GFM2 Digital Mass Flow Meter was calibrated at the
actory for the specified gas and full scale flow range (see
f
Make sure the correct gas number and name selected are current. All adjustments made to the gas linearization table will
It is recommended to use Dwyer supplied calibration and maintenance software for gas table calibration. This software
Query/BackDoor/Open When software prompts with Warning, click the [YES] button. This will open the access to the rest of the Query menu.
Start Sensor Compensated Average reading: Query/Read/ SensorCompAverage This will display Device Sensor Average ADC counts. With no flow conditions, the sensor Average reading must be in the range 120± 10 counts. If it is not, perform Auto Zero procedure (see section 5.3.10 “Zero Calibration”).
Page 8
.3 Analog output Calibration of GFM2 Mass Flow Meters
FM2 series Mass Flow Meters are equipped with
G
alibrated 0 to 5 Vdc and 4 to 20 mA output signals. The set
c
f the jumpers (J7A, J7B, J7C) on the printed circuit board
CD
7C
-11
3-7
8-12
4-8
7B
7A
ON
-10
-9
2-6
unction
F
nalog
A Output RS485 Terminal Resistor
Figure C-1 GFM2 Analog Output Configuration
he GFM2 analog output calibration involves calculation
T
nd storing of the offset and span variables in the
to 5 VDC
OFF
Jumpers
.3.3 Gas Flow 4 to 20 mA Analog Output Calibration
. Install jumpers J7A, J7B and J7C on the PC board for 4 to 20 mA output (see
able VI).
T
. Connect a certified high sensitivity multimeter set for the current measurement
3. Write 4000 counts to the DAC channel 1: !11,WRITE,1,4000[CR]
4. Read current with the meter and calculate:
AoutScale_mA =
. Write zero counts to the DAC channel 1: !11,WRITE,1,0CR]
. Read offset current with the meter and calculate:
4000
Reading[mA]
AoutOffset_mA = -FlowOutScale_mA*Offset_Reading[mA]
. Save AoutScale_mA in to the EEPROM: !11,MW,27,Y[CR]
ave AoutOffset_mA in to the EEPROM: !11,MW,28,Z[CR]
S
OTICE
N
ull scale flow range (see the device’s front label). There is no need to perform
f analog output calibration unless the EEPROM IC was replaced or offset/span
djustment is needed. Any alteration of the analog output scaling variables in the
as independent table will VOID calibration warranty supplied with instrument.
G
OTICE
N
software includes an automated calibration procedure which may radically simplify calculation of the offsets and spans variables and, the reading and writing for the EEPROM table.It is recommended to use the Dwyer supplied calibration and maintenance software for analog output calibration. This software includes an automated calibration procedure which may radically simplify calculation of the offsets and spans variables and, the reading and writing for the EEPROM table.
Index Name Description
25 AoutScaleV - DAC 0 to 5 VDC Analog Output Scale 27 AoutScale_mA - DAC 4 to 20 mA Analog Output Scale 28 AoutOffset_mA - DAC 4 to 20 mA Analog Output Offset
7.3.1 Initial Setup
Power up the Mass Flow Meter for at least 15 minutes prior to commencing the calibration procedure. Make sure absolutely no flow takes place through the meter. Establish digital RS-485/RS-232 communication between PC (communication terminal) and GFM2. The commands provided below assume that calibration will be performed manually (w/o Dwyer supplied calibration and maintenance software) and the device has RS-485 address 11. If Dwyer supplied calibration and maintenance software is used, skip the next section and follow the software prompts.
Enter Backdoor mode by typing: !11,MW,1000,1[CR] Unit will respond with: !11,BackDoorEnabled: Y Disable DAC update by typing: !11,WRITE,4,D[CR] Unit will respond with: !11,DisableUpdate: D
The analog output available on the GFM2 Digital Mass Flow
eter was calibrated at the factory for the specified gas and
M
It is recommended to use the Dwyer supplied calibration and maintenance software for analog output calibration. This
Where: Y – the calculated AoutScale_mA value
Z – the calculated AoutOffset_mA value
NOTICE
command below).
Enable DAC update by typing: !11,WRITE,4,N[CR] Unit will respond with: !11,DisableUpdate: N Close BackDoor access by typing: !11,MW,1000,0[CR] Unit will respond with: !11,BackDoorEnabled: N
8. RS-485/RS-232 SOFTWARE INTERFACE COMMANDS
8.1 General
The standard GFM2 comes with an RS-485 interface. For the optional RS-232 interface, the start character (!) and two hexadecimal characters for the address must be omitted. The protocol described below allows for communications with the unit using either a custom software program or a “dumb terminal.” All values are sent as printable ASCII characters. For RS-485 interface, the start character is always (!). The command string is terminated with a carriage return (line feeds are automatically stripped out by the GFM2). See section 2.2.3 for information regarding communication parameters and cable connections.
8.2 Commands Structure
The structure of the command string: !<Addr>,<Cmd>,Arg1,Arg2,Arg3,Arg4<CR> Where: ! Start character. Addr RS485 device address in the ASCII representation of
Cmd The one or two character command from the table below. Arg1 to Arg4 The command arguments from the table below.
CR Carriage Return character.
hen done with the analog output calibration make sure the
W
AC update is enabled and the BackDoor is closed (see
D
hexadecimal (00 through FF are valid).
Multiple arguments are comma delimited.
7.3.2 Gas Flow 0 to 5 VDC Analog Output Calibration
1. Install jumpers J7A, J7B and J7C on the PC board for 0-5 Vdc output (see
Table VI).
2. Connect a certified high sensitivity multi meter set for the voltage measurement
to the pins 2 (+) and 1 (-) of the 15 pins D connector.
3. Write 4000 counts to the DAC channel 1: !11,WRITE,1,4000[CR]
4. Read voltage with the meter and calculate:
AoutScaleV =
5. Save FlowOutScaleV in to the EEPROM: !11,MW,25,X[CR]
Where: X – the calculated AoutScaleV value.
20000
Reading[V]
NOTICE
RS-232 option.
Several examples of commands follow. All assume that the GFM2 has been configured for address 18 (12 hex) on the RS485 bus:
1. To get current calibration tables: !12,G<CR>
2. To get current Alarm status: !12,A,R<CR>
3. To get a flow reading: !12,F<CR>
4. Set the high alarm limit to 85% of FS flow rate:
Page 9
Default address for all units is 11. Do not submit start character and two character hexadecimal device address for
The GFM2 will reply: !12,G 0 AIR<CR> (Assuming Current Gas table is #0, calibrated for AIR )
The GFM2 will reply: !12,N<CR> (Assuming no alarm conditions)
The GFM2 will reply: !12,50.0<CR> (Assuming the flow is at 50% FS)
The GFM2 will reply: !12,AH85.0<CR>
!12,A,H,85.0<CR>
OTICE
N
ddress is sent, all devices on the RS-485 bus execute the command but do not
eply with an acknowledge message.
r
The global address can be used to change RS-485 address for a particular
evice with unknown address:
. Make sure only one device (which address must be changed) is connected to
he RS-485 network.
t
. Type the memory write command with global address: !00,MW,7,XX[CR] where
8.3 ASCII Commands Set
ommand
C
ame
N
low
F
Diagnostic
oll Back
R N2Feature
Gas Select
Auto Zero
Flow Alarms
Address 00 is reserved for global addressing. Do not assign,
he global address for any device. When command with global
t
o.
N
ommand
escription
D
equests the current flow sensor
R reading in current EU.
Enable / Disable LCD
iagnostic messages (only
D
or LCD option).
f
equest current status of the
R Diagnostic events, LED status and LCD diagnostic mode (enabled/disabled).
nable / Disable Roll back
E to N2feature.
Selects one of the ten primary gas calibration tables to use. Tables are entered via the MEM commands at time of calibration.
Starts /reads the status of the auto zero feature (Note: The Z,N command can be used only when absolutely no flow thru the meter and no earlier then 6 minutes after power up. It can take several minutes to complete. Unit will not respond to other commands when this is in progress). Sets / reads the status of the gas flow alarms. Note: High and Low limits have to be entered in the % FS. High alarm value has to be more than Low alarm value. Alarm conditions: Flow > High Limit = H Flow < Low Limit = L Low < Flow < High = N
C
F
D
N
G
Z
A
rgument 1
A
E (enable LCD Diagnostic
essages)
M
(disable LCD
D
iagnostic
D Messages) NO ARGUMENT (read current status of the diagnostic
ord)
w E
enable Roll back to
( N2) D (enable Roll back to N2) NO ARGUMENT (read current mode of the N2Roll back ) 0 (gas 0) to 9 (gas 9) NO ARGUMENT (read status) N (do it now) W (Write Zero to EEPROM) S (Status while auto zero in progress) V (Display zero value)
H (high flow limit)
L (low flow limit)
A (action delay in seconds) E (enable alarm) D (disable alarm) R (read current status)
S (read current status)
B Block (Latch) mode
fter assigning the new address, a device will accept commands with the new
A
ddress.
OTICE
N
he same address are connected to the one RS-485 network, a communication
t
ollision will take place on the bus and communication errors will occur.
c
rgument 2
A
<Value> (0 to 100%FS) <Value> (0 to 100%FS) <Value> (0 to 3600 sec)
<Value> (0-disabled) (1-enabl’d L) (2-enabl’d H) (3-both L,H)
Do not assign the same RS-485 address for two or more devices on the same RS-485 bus. If two or more devices with
rgument 3 Argument 4 Response
A
Value> (Actual flow in
< current engineering units) D:E
:D
D
D:0x0,L:9,E 0x0 – diagnostic word 9 - current LED status
- LCD mode (enabled)
E
:E
N
N:D
N:D or N:E
G0 through G9, <Gas Name> G0 through G9, <Gas Name> ZN ZW (when done)
ZNI,<value> while Z, N is in progress ZV, <zero value>
AH <Value>
AL <Value>
AA: <Value>
AE AD N - (no alarm) H - (high alarm) L - (low alarm) AS:M,L,H,D,B where: M – mode (E/D) L – Low settings (%FS) H – High settings (%FS) D – Action Delay (sec) B – Latch mode (0-3) AB:<Value> where: Value = 0 - 3
Page 10
ommand
C
ame
N
elay Action
R
otalizer
T
-Factors
K
Units
escription
D
ssigns action of the two SPDT
A
elays. The coil is energized
r when the condition specified by an Argument 2 becomes true. Argument 2:
- no action, relay disabled
N
- totalizer reading > limit
T
- high flow alarm
H
- low flow alarm
- Read current status
S
ets and controls action of the
S
low totalizer.
f NOTE: If Warm Up Delay option is set to E (enabled) the Totalizer will not totalize the flow during first 6 minutes after power up.
pplies a gas correction factor to
A
he currently selected primary gas
t
alibration table.
c (NOTE: does not work with %FS engineering unit.) See list of the internal K-factors in the operating manual.
Set the units of measure for gas flow and totalizer reading. Note: The units of the totalizer output are not per unit time.
rgument 4
rgument 3
rgument 2
o.
N
ommand
C
R
rgument 1
A
(relay 1)
A
N T
A
A
H L R M S
T
(reset to zero)
Z
(start totalizer at
F flow FS) L (limit gas volume in current EU)
value> (flow
< %FS) <value> (gas volume)
D (disable totalizer)
(enable totalizer)
E
(read current
R
otalizer volume)
t W (warm up delay)
E - enable
esponse
R
1N or R2N
R R1T or R2T R1H or R2H R1L or R2L
1R or R2R
R
1M or R2M
R
xN, RxT, RxH, RxL,
R
xR, RxM
R
Z
T
F<value>
T
TL<value>
TD
E
T
value>(in current EU)
<
TW:E or TW:D
D - disable
S: Mode, Start, Limit,
(setting status)
S
T Warm Up
K
D (disable, sets
KD K=1) I (internal K-factor)
U (user specified factor)
No argument
enable
(
reviously set
nternal K-factor)
i Gas Index (0-35) No argument (enable
KI,<value>,<Gas>
KI,<Index>,<Gas>
KU,<value>
previously set user K-factor) <value> (decimal
KU,<value>
correction factor) (0-1000)
S (status)
SK, <Mode>, <Index>,
<Value> where:
Mode: D, I, U
Index: 0-35
Value: K-Factor value
10
U
% (%FS) mL/sec mL/min mL/hr L/sec L/min L/hr
3
m
/sec
3
m
/min
3
m
/hr
3
f
/sec
3
f
/min
3
f
/hr g/sec g/min g/hr kg/sec kg/min kg/hr Lb/sec Lb/min Lb/hr USER (user defined)
<value> (conversion factor from L/min)
S - seconds M – minutes H – hours (Time
Y - use density N – do not use density
U:% U:mL/sec U:mL/min U:mL/hr U:L/sec U:L/min U:L/hr
3
U:m
/sec
3
U:m
/min
3
U:m
/hr
3
U:f
/sec
3
U:f
/min
3
U:f
/hr U:g/sec U:g/min U:g/hr U:kg/sec U:kg/min U:kg/hr U:Lb/sec U:Lb/min U:Lb/hr U:USER,<Factor>, <Time base>, <Density mode>
base)
No Argument
U,<EU name>
<status> Returns current EU
Page 11
Command Name
Maintenance
imer
T
ull Scale
F
LCD Back Light
ead
R EEPROM Memory Write
EPROM
E
emory
M
ART Error Codes:
U
- Not Supported Command or Back Door is not enabled.
- Wrong # of the characters in the Argument.
- Manufacture specific info EE KEY (wrong key or key is disabled).
Description
Hours since last time unit was
alibrated.
c
eturns the full scale rated flow in
R
/min. (Note: This term is not
LCD Back Light control
0-100.0%)
(
- off
00 - Maximum Intensity
Reads the value in the specified memory location.
rites the specified value to the
W
pecified memory location. Use
s
arefully, can cause unit to
C malfunction. (Note: Some addresses are write protected!)
No.
11
15
Command
C
E
B
R
M
MW
Argument 1
R (read timer) C (set timer to zero)
to 100%
No Argument
current settings>
<
000 to 999
Table Index)
(
0000 to 999 (Table Index)
Argument 2
Value
. TROUBLESHOOTING
.1 Common Conditions
Your GFM2 Digital Mass Flow Meter was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations. It was
alibrated according to your desired flow and pressure conditions for a given gas
c or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that the instrument is not functioning properly, please check for the following common
onditions first:
c
re all cables connected correctly? Are there any leaks in the installation? Is the
A power supply correctly selected according to requirements? When several meters are used a power supply with appropriate current rating should be selected.
Argument 3 Argument 4 Response
<Value> (in Hours) CC
Value> (in L/min)
<
:<Counts>
B where: Counts (0 – 4095) B:<Value>
here:
w
alue (0 – 100.0)
V
value>
<
MW,XXX,<Value> where:
XX=Table Index
X
9.2 Troubleshooting Guide
No.
Indication
No zero reading after 15 min. warm up time and no flow condition.
Status LED indicator and LCD display remains blank when unit is powered up. No response when flow is introduced from analog outputs 0 to 5 VDC or 4 to 20 mA.
LCD display reading and/or analog output 0 to 5 VDC signal fluctuate in wide range during flow measurement.
LCD display reading does correspond to the correct flow range, but 0-5 Vdc output signal does not change (always the same reading or around zero).
LCD display reading and 0 to 5 Vdc output voltage do correspond to the correct flow range, but 4 to 20 mA output signal does not change (always the same or reading around 4.0 mA).
Calibration is off (more than ±1.0% FS).
LCD display reading is above maximum flow range and output volt age 0 to 5 VDC signal is more than 5.0 VDC when gas flows through the GFM2.
Gas flows through the GFM2, but LCD display reading and the output voltage 0 to 5 Vdc signal do not respond to flow.
Were the connector pinouts matched properly? When interchanging with other manufacturers' equipment, cables and connectors must be carefully wired for correct pin configurations. Is the pressure differential across the instrument sufficient?
Likely Reason
Embedded temperature has been changed. Power supply is bad or polarity is reversed.
PC board is defective. Output 0-5 Vdc signal (pins 2–1 of the D­connector) is shorted on the GND or overloaded. Output 0 to 5 VDC schematic is burned out or damaged. Analog flow output scale and offset variable are corrupted. External loop is open or load resistance more than 500 Ω. Output 4 to 20 mA schematic is burned out or damaged. GFM2 has initial zero shift.
Sensor under swamping conditions (flow is more than 10% above maximum flow rate for particular GFM2). PC board is defective. The gas flow is too low for particular model of GFM2. GFM2 models: RFE is not connected properly to the inlet fitting. Sensor or PC board is defective.
Solution
Perform Auto Zero Procedure (see section 5.3.6 “Zero Calibration”). Measure voltage on pins 7 and 5 of the 15 pin D-connector. If voltage is out of specified range, then replace power supply with a new one. If polarity is reversed (reading is negative) make correct connection. Return GFM2 to factory for repair. Check external connections to pin 2 – 1, of the D-connector. Make sure the load resistance is more than 1000 Ω.
Return GFM2 to factory for repair.
Restore original EEPROM scale and offset variable or perform analog output recalibration (see section 7.3). Check external connections to pins 2 and 15 of the D-connector. Make sure the loop resistance is less than 500 Ω. Return GFM2 to factory for repair.
Shut off the flow of gas into the GFM2 (ensure gas source is disconnected and no seepage or leak occurs into the meter). Wait for 15 min. with no flow condition and perform Auto Zero calibration Procedure (see section 5.3.7 “Zero Calibration”). Lower the flow through GFM2 within calibrated range or shut down the flow completely. The swamping condition will end automatically.
Return GFM2 to factory for repair. Check maximum flow range on transducer’s front panel and make required flow adjustment. Unscrew the inlet compression fitting of the meter and reinstall RFE (see section 6.2.2). NOTE: Calibration accuracy can be Return GFM2 to factory for repair.
Page 12
o.
N
ndication
I
as does not flow through the GFM2 with inlet
G
ressure applied to the inlet fitting. LCD display
10
Gas flows through the GFM2, output voltage 0 to
VDC signal does not respond to flow (reading
ear 1mV).
11
The Status LED indicator is rapidly flashing with UMBER color on /off.
12
The Status LED indicator is rapidly flashing with
ED color on /off.
R
he Status LED indicator is rapidly flashing with
T
ED and UMBER colors.
R
14
The Status LED indicator is constantly on with the RED light.
9.3 Technical Assistance
Dwyer Instruments will provide technical assistance over the phone to qualified repair personnel. Please have your Serial Number and Model Number ready when you call.
10. CALIBRATION CONVERSIONS FROM REFERENCE GASES
he calibration conversion incorporates the K factor. The K factor is derived from
T
as density and coefficient of specific heat. For diatomic gases:
K
gas
where d = gas density (gram/liter)
Cp= coefficient of specific heat (cal/gram)
Note in the above relationship that d and Cp are usually chosen at the same conditions (standard, normal or other).
=
d X C
p
Likely Reason
ilter screen obstructed at inlet.
F
Direction of the gas flow is reversed.
GFM2 is connected in the installation
ith back pressure conditions and gas
w
eak exist in the system.
l
ensor temperature is too low.
S
Sensor temperature is too high.
MCU temperature is too high (overload).
Fatal Error (EEPROM or Auto Zero error).
Solution
lush clean or disassemble to remove impediments or replace the
F
ilter screen (see section 6.2). NOTE: Calibration accuracy can be
f
ffected.
Check the direction of gas flow as indicated by the arrow on the front of the meter and make required reconnection in the installation. Locate and correct gas leak in the system. If GFM2 has internal leak
eturn it to factory for repair.
r
ake sure the ambient and gas temperatures are within specified
M
ange (above 5°C).
r Make sure the ambient and gas temperatures are within specified range (below 50°C). Disconnect power from the GFM2. Make sure the ambient
emperature is within specified range (below 50°C). Let the device
t
ool down for at least 15 min. Apply power to the GFM2 and check
c
tatus LED indication. If overload condition will be indicated again the
S unit has to be returned to the factory for repair. Cycle the power on the GFM2. If Status LED still constantly on with RED light, wait 6 min. and start Auto Zero function (see 5.3.7 Zero Calibration). If after Zero Calibration the Fatal Error condition will be
ndicated again the unit has to be returned to the factory for repair.
i
If the flow range of a Mass Flow Meter remains unchanged, a relative K factor is used to relate the calibration of the actual gas to the reference gas.
Q
K
a
=
K
where Qa= mass flow rate of an actual gas
Qr=
Ka= K factor of an actual gas Kr = K factor of a reference gas
For example, if we want to know the flow rate of oxygen and wish to calibrate with nitrogen at 1000 SCCM, the flow rate of the oxygen is:
Q
= Q
O
where K = relative K factor to reference gas (oxygen to nitrogen)
NOTICE
computations will be performed internally by MCU.
= Q
a
If particular K factor is activated via digital interface, the user does not need to perform any conversion. All conversion
Q
sccm)
(
mass flow rate of a reference gas
sccm)
(
x K = 1000 X 0.9926 = 992.6 sccm
r
=
K
r
r
Page 13
No.
Indication
BlankEEPROM
erialNumber
S
odelNumber
M
oftwareVer
S
imeSinceCalHr
T
Options1
BackLight
AddressRS485
asNumber
G
lowUnits
F
larmMode
A
11
owAlarmPFS
12
HiAlarmPFS
13
AlmDelay
RelaySetting
otalMode
T
otal
T
17
otalFlowStart
T
18
TotalVolStop
19
KfactorMode
20
KfactorIndex
UserDefKfactor
DUnitKfactor
U
DUnitTimeBase
U
24
DUnitDensity
U
25
AoutScaleV
26
DRC_DP
27
AoutScale_mA
AoutOffset_mA
29
SensorZero
30
Klag [0]
31
Klag [1]
32
Klag [2]
33
Klag [3]
34
Klag [4]
35
Klag [5]
36
Kgain [0]
37
Kgain [1]
38
Kgain [2]
39
Kgain [3]
40
Kgain [4]
41
Kgain [5]
42
Zero_T
43
Tcor_K
44
AlarmLatch
45
TotalWarmDisable
46
Reserved1
47
LCD_Diagnostic
48
Reserved2
49
N2_RollBack
50
Reserved3
PPENDIX I
A
®
wyer
D
FM2 EEPROM Variables Rev. A0
G
Gas Independent Variables
Data Type
char[10]
har[20]
c
har[20]
c
har[10]
c
loat
f uint int char [4]
nt
i
nt
i
har
c
loat
f float uint char [4]
har
c
loat
f
loat
f float char int float
loat
f
nt
i
har
c float float float float uint float float float float float float float float float float float float float float uint char uint char uint char uint
Notes
Do not modify. Table Revision. [PROTECTED]
erial Number [PROTECTED]
S
odel Number [PROTECTED]
M
irmware Version [PROTECTED]
F
ime since last calibration in hours
T Misc. Options Back Light Level [0-4095] Two character adress for RS485 only
urrent Gas Table Number [0 - 9]
C
urrent Units of Measure [0 - 22]
C
larm Mode [‘E’ - Enabled, ‘D’ - Disabled]
A
ow Flow Alarm Setting [%FS] 0 - Disabled
otalizer Mode [‘E’ - Enabled, ‘D’ - Disabled]
T
otalizer Volume in %*s (updated every 6 min)
T
tart Totalizer at Flow [%FS] 0 - Disabled
S Totalizer Action Limit Volume [%*s] 0 - Disabled D-Disabled, I-Internal, U-User Defined Internal K-Factor Index [0 - 35] User Defined K-Factor
-Factor for User Defined Units of Measure
K
ser Defined Unit Time Base [1, 60, 3600 sec]
U
ser Defined Unit Density Flag [Y, N]
U DAC 0 to 5 VDC Analog Output Scale H/W DRC DP settings [0-255] DAC 4 to 20 mA Analog Output Scale DAC 4-20mA Analog Output Offset DPW value for Sensor Zero [0-1023] DRC Lag Constant [Do Not Alter] DRC Lag Constant [Do Not Alter] DRC Lag Constant [Do Not Alter] DRC Lag Constant [Do Not Alter] DRC Lag Constant [Do Not Alter] DRC Lag Constant [Do Not Alter] Gain for DRC Lag Constant [Do Not Alter] Gain for DRC Lag Constant [Do Not Alter] Gain for DRC Lag Constant [Do Not Alter] Gain for DRC Lag Constant [Do Not Alter] Gain for DRC Lag Constant [Do Not Alter] Gain for DRC Lag Constant [Do Not Alter] Resistance when last AutoZero was done [0-4095 count] Resistance correction coefficient [PFS/count] Alarm Latch [0-3] Sensor Warm Up period Totalizer [D/E] Reserved LCD Diagnostic Mode: [E/D] Flow Reading Averaging: [0,1,2] (100, 250, 1000 ms), Default -1 Back to N2 conversion mode: [E, D] Reserved for Troubleshooting (do not change)
Page 14
ndex
I
Name
00
asIndentifier
G
01
ullScaleFlow
F
02
tdTemp
S
103
tdPressure
S
104
StdDensity
105
CalibrationGas
06
alibratedBy
C
07
alibratedAt
C
08
ateCalibrated
D
109
ateCalibrationDue
D
110
K_N
111
K_F1
12
K_F1
13
ensorTbl[0][Sensor Value]
S
14
ensorTbl[0][Flow]
S
115
ensorTbl[1][Sensor Value]
S
116
SensorTbl[1][Flow]
117
SensorTbl[2][Sensor Value]
118
SensorTbl[2][Flow]
19
SensorTbl[3][Sensor Value]
20
ensorTbl[3][Flow]
S
21
ensorTbl[4][Sensor Value]
S
122
ensorTbl[4][Flow]
S
123
SensorTbl[5][Sensor Value]
124
SensorTbl[5][Flow]
125
SensorTbl[6][Sensor Value]
26
SensorTbl[6][Flow]
27
ensorTbl[7][Sensor Value]
S
28
ensorTbl[7][Flow]
S
129
ensorTbl[8][Sensor Value]
S
130
SensorTbl[8][Flow]
131
SensorTbl[9][Sensor Value]
132
SensorTbl[9][Flow]
133
SensorTbl[10][Sensor Value]
134
SensorTbl[10][Flow]
Note: Values will be available for selected gas only.
NOTICE
K-factors at best are only an approximation. K factors should not be used in applications that require accuracy better than ±5 to 10%.
Index
Calibration Table
Gas Dependent Variables
Data Type
har[20]
c
loat
f
loat
f
loat
f float char[20]
Notes
N F S S Gas Standard Density Name of Gas used for Calibration [If not calibrated = ‘Uncalibrated’]
har[20]
c
har[20]
c
har[12]
c
har[12]
c
float float float
int
loat
f
int
loat
f
int
loat
f uint float uint float
int
loat
f
int
N N C D Gas Parameters: K-factor relative to N Reserved Reserved
ndex 0: Must be 120 (zero value) Do not Alter!
I
ndex 0: Must be 0.0 (zero PFS) Do not Alter!
I 1 Actual Flow in PFS [0.1]
20.0% FS A/D Value from Sensor [counts] Actual Flow in PFS [0.2]
30.0% FS A/D Value from Sensor [counts] A 4 A
50.0% FS A/D Value from Sensor [counts] Actual Flow in PFS [0.5]
60.0% FS A/D Value from Sensor [counts] Actual Flow in PFS [0.6] 7 A 8 Actual Flow in PFS [0.8]
90.0% FS A/D Value from Sensor [counts] Actual Flow in PFS [0.9]
100.0% FS A/D Value from Sensor [counts] Flow in PFS. Should be 1.0. Do not Alter!
APPENDIX II - Internal “K” Factors
Actual Gas
Acetylene C Air Allene (Propadiene) C Ammonia NH Argon Ar Arsine AsH Boron Trichloride BCl Boron Trifluoride BF Bromine Br Boron Trobromide Br Bromine PentaTrifluoride BrF Bromine Trifluoride BrF Bromotrifluoromethane CBrF 1,3 - Butadiene C4H Butane C4H 1 - Butene C4H 2 - Butene C4H8 CIS 2 - Butene C Carbon Dioxide CO Carbon Disulfide CS Carbon Monoxide C Carbon Tetrachloride CCl Carbon Tetrafluoride (Freon-14) CF Carbonyl Fluoride COF Carbonyl Sulfide COS Chlorine Cl Chlorine Trifluoride CIF Chlorodifluoromethane (Freon-22) CHCIF Chloroform CHCl Chloropentafluoroethane (Freon-115) C2CIF Chlorotrifluromethane (Freon-13) CCIF Cyanogen C2N Helium He Hydrogen H Hydrogen H2(> 100 L/min) Oxygen O
2H2
3H4
3
3
2
2
2
10
2
4H8
3
3
3
5
3
3
6
8
TRANS
2
2
0
4
4
2
3
2
3
2
Page 15
ame of Gas [If not calibrated = ‘Uncalibrated’] ull Scale Range in l/min tandard Temperature tandard Pressure
ame of person who performed actual calibration
ame of Calibration Facility
alibration Date
ate Calibration Due
0.0% FS A/D Value from Sensor [counts]
ctual Flow in PFS [0.3]
0.0% FS A/D Value from Sensor [counts] ctual Flow in PFS [0.4]
0.0% FS A/D Value from Sensor [counts] ctual Flow in PFS [0.7]
0.0% FS A/D Value from Sensor [counts]
Density
2
Cp (Cal/g)
.4036 .240 .352 .492 .1244 .1167 .1279 .1778 .0539 .0674 .1369 .1161 .1113 .3514 .4007 .3648 .336 .374 .2016 .1428 .2488 .1655 .1654 .1710 .1651 .114 .1650 .1544 .1309 .164 .153 .2613
1.241
3.419
3.419 .2193
(g/l)
1.162
1.293
1.787 .760
1.782
3.478
5.227
3.025
7.130
11.18
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
1.964
3.397
1.250
6.860
3.926
2.945
2.680
3.163
4.125
5.326
5.326
6.892
4.660
3.322 .1786 .0899 .0899
1.427
K-Factor Relative to N
.5829
1.0000 .4346 .7310
1.4573 .6735 .4089 .5082 .8083 .38 .26 .3855 .3697 .3224 .2631 .2994 .324 .291 .7382 .6026
1.00 .31 .42 .5428 .6606 .86 .4016 .4589
2
.3912 .2418
2
.3834 .61
1.454
1.0106
1.92 .9926
NOTICE
APPENDIX III - Gas Factor Table (“K Factors”)
-factors at best are only an approximation. K factors should not be used in applications that require accuracy better than ±5 to 10%.
K
ensity
D
ndex
I
Actual Gas
cetylene C
A
ir
A
llene (Propadiene) C
A
mmonia NH
A
Argon Ar (<= 10 L/min)
2H2
3H4
3
Argon AR-1 (>= 10 L/min)
Arsine AsH
oron Trichloride BCl
B
oron Trifluoride BF
B
romine Br
B
oron Trobromide Br
B
10
Bromine PentaTrifluoride BrF
11
Bromine Trifluoride BrF
Bromotrifluoromethane (Freon-13 B1) CBrF
,3 - Butadiene C
14
utane C
B
15
1 - Butene C4H
16
2 - Butene C4H8 CIS
17
2 - Butene C
Carbon Dioxide CO C
C
20
Carbon Monoxide C0
Carbon Tetrachloride CCl
C
C
24
C
25
Chlorine Cl
26
Chlorine Trifluoride CIF
27
Chlorodifluoromethane (Freon-22) CHCIF
28
Chloroform CHCl
29
Chloropentafluoroethane (Freon-115) C2CIF
30
Chlorotrifluromethane (Freon-13) CCIF
31
Cyanogen C2N
32
Cyanogen Cloride CICN
33
Cyclopropane C
34
Deuterium D
35
Diborane B2H
36
Dibromodifluoromethane CBr2F
37
Dichlorodifluoromethane (Freon-12) CCl2F
38
Dichlofluoromethane (Freon-21) CHCl2F
39
Dichloromethylsilane (CH
40
Dichlorosilane SiH2Cl
41
Dichlorotetrafluoroethane (Freon-114) C2Cl2F
42
1,1-Difluoroethylene (Freon-1132A) C2H2F
43
Dimethylamine (CH3)2NH
44
Dimethyl Ether (CH
45
2,2-Dimethylpropane C
46
Ethane C2H
47
Ethanol C2H6O
48
Ethyl Acetylene C
49
Ethyl Chloride C2H5Cl
50
Ethylene C
51
Ethylene Oxide C2H4O
52
Fluorine F
53
Fluoroform (Freon-23) CHF
54
Freon-11 CCl3F
55
Freon-12 CCl
56
Freon-13 CClF
57
Freon-13B1 CBrF
58
Freon-14 CF
59
Freon-21 CHCl2F
60
Freon-22 CHClF
61
Freon-113 CCl2FCClF
62
Freon-114 C2Cl2F
63
Freon-115 C2ClF
64
Freon-C318 C4F
65
Germane GeH
66
Germanium Tetrachloride GeCl
67
Helium He (<50 L/min)
3
2
4H10
arbon Dioxide CO arbon Disulfide CS
arbon Tetrafluoride (Freon-14) CF arbonyl Fluoride COF arbonyl Sulfide COS
2
2H4
2
4H8
2
6
2F2
4
8
TRANS
3
2
3H5
6
3
2
5
8
4
3
3
3
3
4H6
(<10 L/min)
2
1 (<10 L/min)
-
2
2
2
3
2
O
3)2
3H12
4H6
3
2
4
4
3)2
Helium He-1 (>50 L/min) Helium He-2 (>10-50 L/min)
SiCl
3
K-Factor Relative to N
5829
.
.0000
4346
.
7310
.
1.4573
1.205 .6735
4089
.
5082
.
8083
.
38
.
5
.26 .3855 .3697
3
3224
.
2631
. .2994 .324 .291 .7382
658
.
6026
.
1.00 .31
42
4
.
5428
.
6606
. .86 .4016 .4589
2
.3912 .2418
5
.3834
3
.61 .6130 .4584
1.00 .4357
6
2
.1947 .3538
2
.4252 .2522 .4044 .2235
4
.4271
2
.3714 .3896 .2170 .50 .3918 .3225 .3891 .60 .5191 .9784 .4967 .3287 .3538 .3834 .3697 .4210 .4252 .4589 .2031 .2240 .2418 .1760 .5696
4
.2668
1.454
2.43
2.05
2
Cp (Cal/g)
4036
.
240
.
352
.
492
. .1244 .1244 .1167
1279
.
1778
.
0539
.
0647
. .1369 .1161 .1113
3514
.
4007
. .3648 .336 .374 .2016
2016
.
1428
. .2488 .1655
1654
.
1710
.
1651
. .114 .1650 .1544 .1309 .164 .153 .2613 .1739 .3177
1.722 .508 .15 .1432 .140 .1882 .150 .1604 .224 .366 .3414 .3914 .420 .3395 .3513 .244 .365 .268 .1873 .176 .1357 .1432 .153 .1113 .1654 .140 .1544 .161 .160 .164 .185 .1404 .1071
1.241
1.241
1.241
g/l)
(
1.162
1.293
1.787 760
.
.782
.782
.478
5.227
3.025
7.130
1.18
.803
.108
6.644
2.413
2.593
2.503
.503
.503
.964
1.964
3.397
1.250
6.860
.926
.945
.680
3.163
4.125
3.858
5.326
6.892
4.660
2.322
2.742
1.877
1.799
1.235
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.418
9.565
.1786 .1786 .1786
Page 16
ndex
I
ctual Gas
A
exafluoroethane C
H
exane C
H
70
H Hydrogen H Hydrogen H
Hydrogen Bromide HBr
H
H
H
75
H
76
Hydrogen Selenide H
77
Hydrogen Sulfide H
Iodine Pentafluoride IF
I
I
K
82
Methane CH Methane CH
Methanol CH
M
M
86
M
87
Methyl Fluoride CH
88
Methyl Mercaptan CH
89
Methyl Trichlorosilane (CH
90
M
91
Monoethylamine C2H5NH
92
Monomethylamine CH3NH
93
Neon NE
Nitric Oxide NO
N
N
97
Nitrogen Trifluoride NF
98
Nitrosyl Chloride NOCl
99
Nitrous Oxide N
100
Octafluorocyclobutane (Freon-C318) C
101
Oxygen O
102
Oxygen Difluoride OF
103
Ozone
104
Pentaborane B
105
Pentane C5H
106
Perchloryl Fluoride ClO3F
107
Perfluoropropane C
108
Phosgene COCl
109
Phosphine PH
110
Phosphorous Oxychloride POCl
111
Phosphorous Pentafluoride PH
112
Phosphorous Trichloride PCl
113
Propane C3H
114
Propylene C3H
115
Silane SiH
116
Silicon Tetrachloride SiCl
117
Silicon Tetrafluoride SiF
118
Sulfur Dioxide SO
119
Sulfur Hexafluoride SF
120
Sulfuryl Fluoride SO2F
121
Tetrafluoroethane (Forane 134A) CF3CH2F
122
Tetrafluorohydrazine N2F
123
Trichlorofluoromethane (Freon-11) CCl3F
124
Trichlorosilane SiHCl
125
1,1,2-Trichloro-1,2,2 Trifluoroethane
6H14
ydrogen H
1 (<10-100 L)
-
2
-2 (>10-100 L)
2
-3 (>100 L)
2
ydrogen Chloride HCl ydrogen Cyanide HCN ydrogen Fluoride HF ydrogen Iodide HI
sobutane CH(CH sobutylene C
rypton Kr
ethyl Acetylene C
4H6
(<=10 L/min)
4
-1 (>=10 L/min)
4
3
ethyl Bromide CH ethyl Chloride CH
olybdenum Hexafluoride MoF
itrogen N
2
itrogen Dioxide NO
2
12
(Freon-113) CCl2FCClF
126
Triisobutyl Aluminum (C4H9)AL
127
Titanium Tetrachloride TiCl
128
Trichloro Ethylene C2HCl
129
Trimethylamine (CH3)3N
130
Tungsten Hexafluoride WF
131
Uranium Hexafluoride UF
132
Vinyl Bromide CH2CHBr
133
Vinyl Chloride CH2CHCl
134
Xenon Xe
5H9
(
2F6
Se
2
S
2
5
3)3
3H4
r
B
2
l
C
3
F
3
SH
3
2
3
O
2
2
3F8
Freon-116)
)SiCl
3
3
6
2
2
4F8
K-Factor
elative to N
R
2421
.
1792
.
.0106
1.35
1.9
1.000 .000
764
.
9998
.
9987
. .7893 .80 .2492
27
.
2951
.
.453
4313
.
5835
.
6299
. .68 .5180 .2499
2126
. .3512 .51
1.46
.990
.000
737
. .4802 .6134 .7128 .176 .9926 .6337 .446 .2554 .2134 .3950 .174 .4438 .759 .36 .3021 .30 .35 .40 .5982 .284 .3482 .69 .2635 .3883 .5096 .3237 .3287 .3278 .2031
.0608 .2691 .32 .2792 .2541 .1961 .4616 .48
1.44
2
Cp
Cal/g)
(
1834
.
3968
.
.419
3.419
3.419 .0861
1912
.
3171
.
3479
.
0545
. .1025 .2397 .1108
3872
.
3701
.
0593
. .5328 .5328 .3274
3547
.
1106
.
1926
. .3221 .2459 .164
1373
. .387 .4343 .246 .2328
2485
.
1933
. .1797 .1632 .2088 .185 .2193 .1917 .195 .38 .398 .1514 .197 .1394 .2374 .1324 .1610 .1250 .399 .366 .3189 .1270 .1691 .1488 .1592 .1543 .127 .182 .1357 .1380 .161
.508 .120 .163 .3710 .0810 .0888 .1241 .12054 .0378
ensity
D
g/l)
(
.157
.845
.610
.627
.206
893
.
5.707
3.613
1.520 .90
.593
.503
.739
1.429 .787
.236
.253
1.518
2.146
6.669
9.366 .011
.386
900
.
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
2.144
2.816
3.219
4.571
8.388
4.418
1.517
6.843
5.620
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
8.36
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858
Page 17
APPENDIX IV - Component Diagram
Top Component Side
Bottom Component Side
Page 18
PPENDIX V
PROCESS CONNECTION (COMPRESSION FITTINGS ATTACHED)
4
-29/64
[
112.97]
3
-5/32
[
80.16]
1-1/8
[28.70]
5
-5/16
[
134.88]
MASS FLOW METER
SERIES GFM2A
FLOW
A
imensional Drawings
D
APPENDIX VI MAINTENANCE/REPAIR
Upon final installation of the Series GFM3, no routine maintenance is required. The Series GFM3 is not field serviceable and should be returned if repair is needed. Field repair should not be attempted and may void warranty (See 1.3).
WARRANTY/RETURN
Refer to “Terms and Conditions of Sales” in our catalog and on our website. Contact customer service to receive a Return Goods Authorization number before shipping the product back for repair. Be sure to include a brief description of the problem plus any additional application notes.
Page 19
Page 20
©Copyright 2013 Dwyer Instruments, Inc. Printed in U.S.A. 5/13 FR# RA-444052-00
DWYER INSTRUMENTS, INC.
Phone: 219/879-8000 www.dwyer-inst.com
P.O. BOX 373 • MICHIGAN CITY, INDIANA 46360, U.S.A. Fax: 219/872-9057 e-mail: info@dwyer-inst.com
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