Dwyer GFC User Manual

Technical Data Sheet No. TD9709M Rev. F Date of issue: May 2006
OPERATING MANUAL
FOR GFC MASS FLOW CONTROLLERS
P.O. Box 373 Michigan City, IN 46361 USA Phone: (219) 879 8000 FAX: (219) 879 9057
Internet: http://www.dwyer-inst.com
Dwyer reserves the right to make changes to information and specifications in this manual without notice.
TABLE OF CONTENTS
1. UNPACKING THE GFC MASS FLOW CONTROLLER........................
1.1 Inspect Package for External Damage..............................................
1.2 Unpack the Mass Flow Controller.......................................................
1.3 Returning Merchandise for Repair.....................................................
2. INSTALLATION....................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.2.1 Valve Control Configuration.......................................................
2.2.2 Remote LCD Readouts.................................................................
2.2.3 Panel Mounting Readouts............................................................
3. PRINCIPLE OF OPERATION....................................................
4. SPECIFICATIONS..................................................................
4.1 CE Compliance................................................................................
5. OPERATING INSTRUCTIONS.....................................................
5.1 Preparation and Warm Up................................................................
5.2 Flow Signal Output Readings..............................................................
5.3 Swamping Condition...........................................................................
5.4 Setpoint Reference Signal..................................................................
5.5 Valve OFF Control (Open Collector NPN Compatible)..........................
5.6 Valve Test/Purge.................................................................................
10 10 11 12 13
1 1 1 1
2 2 2 4 4 5
5
6 7
9 9
6. MAINTENANCE....................................................................
6.1 Introduction........................................................................................
6.2 Flow Path Cleaning..............................................................................
6.2.1 Cleaning the Inlet Filter Screen in GFC-110/111 Models...............
6.2.2 Cleaning the Inlet Filter Screen in GFC-113/114 Models..........
6.2.3 Valve Maintenance for GFC-110/111/113/114 Models.................
7. CALIBRATION PROCEDURES....................................................
7.1 Flow Calibration...................................................................................
7.2 Calibration of GFC Mass Flow Controllers.......................................
7.2.1 Connections and Initial Warm Up...............................................
7.2.2 Zero Adjustment............................................................................
7.2.3 SPAN Adjustment.........................................................................
7.3 Linearity Adjustment..........................................................................
7.3.1.1 Disable Solenoid Valve in GFC-110/111/113/114 Models.........
7.3.1.2 Open Motorized Valve in GFC-1143/1144/1145 Models............
13 13 13 14 14 15
16 16 17 17 18 18 18 18 18
7.3.2 Connections and Initial Warm Up............................................
7.3.3 ZERO Adjustment...................................................................
7.3.4 25% Flow Adjustment...............................................................
7.3.5 50% Flow Adjustment..............................................................
7.3.6 75% Flow Adjustment..............................................................
7.3.7 100% Flow Adjustment............................................................
7.3.8.1 Valve Adjustment for GFC-110/111/113/114.............................
7.3.8.2 Valve Adjustment for GFC-1143/1144/1145..............................
7.3.9 Full Scale Flow Adjustment...................................................
7.3.10 25% Flow Adjustment...........................................................
7.3.11 50% Flow Adjustment...........................................................
7.3.12 75% Flow Adjustment..........................................................
7.3.13 100% Flow Adjustment.........................................................
7.4 LCD Display Scaling..................................................................
7.4.1 Access LCD Display Circuit......................................................
7.4.2 Adjust Scaling.......................................................................
7.4.3 Change Decimal Point...........................................................
19 19 19 19 20 20 20 20 20 20 20 21 21 21 21 21 22
8. TROUBLESHOOTING.............................................................
8.1 Common Conditions...........................................................................
8.2 Troubleshooting Guide.......................................................................
8.3 Technical Assistance............................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................
APPENDIX 1 COMPONENT DIAGRAM....................................................
APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)..................................
APPENDIX 3 DIMENSIONAL DRAWINGS.................................................
APPENDIX 4 WARRANTY..........................................................................
22 22 23 25
25
26
28
32
36
1. UNPACKING THE GFC MASS FLOW CONTROLLER
1.1 Inspect Package for External Damage
Your GFC Mass Flow Controller was carefully packed in a sturdy cardboard car­ton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately.
1.2 Unpack the Mass Flow Controller
Open the carton carefully from the top and inspect for any sign of concealed ship­ping damage. In addition to contacting the shipping carrier please forward a copy of any damage report to your distributor or Dwyer directly.
When unpacking the instrument please make sure that you have all the items indi­cated on the Packing List. Please report any shortages promptly.
1.3 Returning Merchandise for Repair
Please contact the customer service representative of your distributor or Dwyer if you purchased your Mass Flow Controller directly, and request a Return
Authorization Number (RAN). Equipment returned without an RAN will not be accepted. Dwyer reserves the right to charge a fee to the customer for equip-
ment returned under warranty claims if the instruments are tested to be free from warrantied defects.
Shipping charges are borne by the customer. Items returned "collect" will not be accepted!
It is mandatory that any equipment returned for servicing be purged and neutral­ized of any dangerous contents including but not limited to toxic, bacterially infec­tious, corrosive or radioactive substances. No work shall be performed on a returned product unless the customer submits a fully executed, signed SAFETY CERTIFICATE. Please request form from the Service Manager.
1
2. INSTALLATION
2.1 Primary Gas Connections
Please note that the GFC Mass Flow Controller will not operate with liquids. Only clean gases are allowed to be introduced into the instrument. If gases are con­taminated they must be filtered to prevent the introduction of impediments into the sensor.
Caution: GFC transducers should not be used for monitoring OXYGEN gas unless specifically cleaned and prepared for such application.
For more information, contact your distributor or Dwyer.
0
Attitude sensitivity of the Mass Flow Controller is ±15 flow path of the flow meter must be horizontal within those stated limits. Should there be need for a different orientation of the meter, re-calibration may be nec­essary. It is also preferable to install the GFC transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including fer­rules and fittings for dust or other contaminants. Be sure to observe the direction of gas flow as indicated by the arrow on the front of the meter when connecting the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tub­ings home flush against the shoulders of the fittings. Compression fittings are to be tightened according to the manufacturer's instructions to one and one quarter turns. Avoid over tightening which will seriously damage the Restrictor Flow Elements (RFE's)!
. This means that the gas
Compression fittings should not be removed unless the meter is being cleaned or calibrated for a new flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough leak test of the entire system. (All GFC's are checked prior to shipment for leak­age within stated limits. See specifications in this manual.)
2.2 Electrical Connection
GFC transducers require a +12VDC (+24VDC optional) power supply with a min­imum current rating of 1100 mA to operate. The operating power input is supplied via the 15-pin "D" connector located at the side of the flow transducer enclosure. On GFC's purchased without an LCD readout, a readout panel meter, digital mul­timeter, or other equivalent device is required to observe the flow signal.
A built in SETPOINT potentiometer is supplied with all GFC transducers for local control of the flow. A variable analog 0 to 5 VDC (or 4 to 20 mA) reference input is required for remote control.
2
PIN FUNCTION
1 Flow Signal Common 2 0 to 5 VDC Flow Signal Output 3 Common 4 Open Purge 5 Common, Power Supply 6 (unassigned) 7 +12 VDC (+24 VDC*) Power Supply 8 Remote Setpoint 9 4 to 20 mA Return (Common) 10 Common, Setpoint Signal 11 +5VDC Reference for Remote Setpoint 12 Valve Off Control
(Open Collector Compatible) 13 +12 VDC (+24 VDC *) Power Supply 14 4 to 20 mA Flow Signal Output 15 Chassis Ground
FIGURE 2-a GFC 15-PIN "D" CONNECTOR CONFIGURATION
*+24 VDC power supply configuration is optional for only GFC-110/111/113/114 models.
WARNING: DO NOT CONNECT 24Vdc POWER SUPPLY UNLESS YOUR GFC CONTROLLER WAS ORDERED AND CONFIGURED
FOR 24Vdc
Important notes:
In general, "D" Connector numbering patterns are standardized. There are, how­ever, some connectors with nonconforming patterns and the numbering sequence on your mating connector may or may not coincide with the numbering sequence shown in our pin configuration table above. It is imperative that you match the appropriate wires in accordance with the correct sequence regardless of the par­ticular numbers displayed on your mating connector.
Make sure power is OFF when connecting or disconnecting any cables in the sys­tem.
The power input is protected by a 1600mA M (medium time-lag) resettable fuse. If a shorting condition or polarity reversal occurs, the fuse will cut power to the flow transducer circuit. Disconnect the power to the unit, remove the faulty condition, and reconnect the power. The fuse will reset once the faculty condition has been removed.
Use of the GFC flow transducer in a manner other than that specified in this manu­al or in writing from Dwyer, may impair the protection provided by the equipment.
3
FIGURE 2-b, POTENTIOMETER AND JUMPER LOCATIONS
2.2.1 Valve Control Configuration
There are three basic valve control options. (a) LOCAL or REMOTE control; (b) 0 to 5 VDC or 4 to 20 mA setpoint signal - *note: this only applies for the REMOTE control configuration; (c) 2% cutoff active or not active. NOTE: 2% cutoff not avail­able for GFC 57 /67 /77. When active, the 2% cutoff will shut off the power to the valve when a setpoint of less than 2% of the full scale flow range is set. Figure 2­2 shows the jumper configurations for the three basic valve control options.
The factory default jumper settings are: LOCAL control, 2% cutoff, and 0 to 5 VDC.
Function
0 to 5 VDC
4 to 20 mA
local
remote 2% cutoff on 2% cutoff off
2.2.2 Remote LCD Readouts
GFC Mass Flow Controllers are available with optional remote reading LCD dis­plays supplied with a three foot long wire to accommodate most applications. This configuration includes the upper block element which serves as the LCD readout mounting. Special lengths of remote extension wiring (up to 9.5 feet [3 meters]) are available on request.
NJ1A
2 - 3 1 - 2
FIGURE 2-c, VALVE CONTROL CONFIGURATION JUMPERS
NJ1B
5 - 6 4 - 5
NJ1C
8 - 9 7 - 8
NJ1D
11 - 12 10 - 11
NJ1E
13 - 14 14 - 15
4
2.2.3 Panel Mounting Readouts
Another option for the GFC Mass Flow Controller is the Panel Mounting Remote Readout.
In this configuration the LCD readout is supplied with a three foot long extension wire, and no aluminum housing around the LCD. The LCD readout for panel mounting includes a bezel with two plastic screws which conveniently fit into a rec­tangular cut-out for panel mounting (see Figure 2d).
FIGURE 2-d CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING.
3. PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube. The remainder of the gas flows through the primary flow conduit. The geometry of the primary conduit and the sensor tube are designed to ensure laminar flow in each branch. According to principles of fluid dynamics the flow rates of a gas in the two lami­nar flow conduits are proportional to one another. Therefore, the flow rates meas­ured in the sensor tube are directly proportional to the total flow through the trans­ducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sec­tions of the sensor tube by means of precision wound heater-sensor coils. Heat is transferred through the thin wall of the sensor tube to the gas flowing inside. As gas flow takes place heat is carried by the gas stream from the upstream coil to the downstream coil windings. The resultant temperature dependent resistance differential is detected by the electronic control circuit. The measured gradient at the sensor windings is linearly proportional to the instantaneous rate of flow tak­ing place.
An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass-molecular based flow rates.
GFC Mass Flow Controller models GFC-110/111/113/114 also incorporate a pro­portionating solenoid valve and models GFC-1143/1144/1145 a motorized valve. The closed loop control circuit of the GFC continuously compares the mass flow output with the selected flow rate. Deviations from the setpoint are corrected by compensating valve adjustments, thus maintaining the desired flow parameters.
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4. SPECIFICATIONS
FLOW MEDIUM: Please note that GFC Mass Flow Controllers are designed to work with clean gases only. Never try to meter or control flow rates of liquids with any GFC's.
CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70
0
(21.1
C)] unless otherwise requested or stated.
0
F
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II.
ACCURACY: ±1.5% of full scale, including linearity for gas temperatures ranging from
0
59
F to 770F (150C to 250C) and pressures of 5 to 60 psia (0.35 to 4.1 bars).
REPEATABILITY: ±0.5% of full scale.
TEMPERATURE COEFFICIENT: 0.15% of full scale/
0
C.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: GFC-110/111: 300ms time constant; approximately 1 second to
within ±2% of set flow rate for 25% to 100% of full scale flow.
GFC-113/114: 600ms time constant; approximately 2 seconds to within ±2% of set flow rate for 25% to 100% of full scale flow.
GFC-1143/1144/1145:1800ms time constant; approximately 5 seconds to within ± 2% of set flow rate for 25% to 100% of full scale flow.
GAS PRESSURE: 500 psig (34.5 bars) max; optimum pressure is 20 psig (1.4 bars).
MAX DIFFERENTIAL PRESSURE: 50 psid for GFC17/37/57/67/77, 40psid for GFC47.
GAS AND AMBIENT TEMPERATURE: 32
0
F to 1220F (00C to 500C).
RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10
-7
sccs He max to the outside environment.
ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal to vertical; standard calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0 to 5 VDC (1000 Ω minimum load impedance) and 4 to 20 mA (50 to 500 Ω loop resistance); 20 mV peak to peak max noise for GFC-110/111/113/114 and 100 mV peak to peak max noise for GFC-1143/1144/1145.
COMMAND SIGNAL: Analog 0 to 5 VDC (100 Ω input impedance) or 4 to 20 mA (0 to 250 Ω loop resistance).
Contact your distributor or Dwyer for optional RS232 or IEEE488 interfaces.
TRANSDUCER INPUT POWER: +12 VDC, 1100 mA maximum; GFC-110/111/113/114 have an OPTION of +24 VDC, 650 mA maximum -
IF SPECIFIED AT TIME OF ORDERING AND CONFIGURED ACCORDINGLY.
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WETTED MATERIALS:
GFC-110/111/113/114/ GFC-1143/1144/1145: 416 Stainless steel and 316 stainless steel
with VITON®O-rings seals; BUNA-N®, NEOPRENE®or KALREZ®O-rings are optional.
GFC-217/237/247/257/267/277: 416 Stainless steel and 316 stainless steel with VITON
®
O-rings seals; BUNA-N®, NEOPRENE®or KALREZ®O-rings are optional.
Dwyer makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models.
INLET AND OUTLET CONNECTIONS: GFC-110/111/GFC-113 -¹/" compression fittings.
GFC-114/GFC-1143 - ³/₈" compression fittings. GFC-1144 - ½ " compression fittings. GFC-45 - ³/₄" FNPT ports.
Optional fittings are: 1/8" or 3/8" compression fittings and 1/4" VCR
®.
LCD DISPLAY: 3½ digit LCD (maximum viewable digits "1999"), 0.5 inch high characters. On aluminum or stainless steel models the LCD display is built into the upper block element and may be tilted over 90 degrees for optimal viewing comfort. Remote or panel mounting remote reading is optional.
Standard readings are in direct engineering units for the given gas and flow rate (i.e. stan­dard liters/minute [slpm], standard cubic centimeters/minute [sccm], standard cubic feet/hour [scfh], etc.). 0 to 100% LCD calibration scaling is available upon request at time of order. Contact your distributor or Dwyer when non-standard display settings are desired.
TRANSDUCER INTERFACE CABLE: Optional shielded cable is available mating to the GFC transducer 15-pin "D" connector.
4.1 CE Compliance
Any model GFC bearing a CE marking on it, is in compliance with the below stated test standards currently accepted.
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991, Group 1, Class B Immunity Standard: EN 55082-1:1992
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FLOW RANGES
Table I GFC-110/111 Low Flow Mass Flow Controllers*
code scc/min [N2] code std liters/min [N2]
GFC-1101/2101 GFC-1102/2102
GFC-1103/2103 GFC-1104/2104
GFC-1105/2105 0 to 200 GFC-1106/2106 0 to 500
Table II GFC-113 Medium Flow Mass Flow Controllers*
0 to 10 GFC-1107/2107 0 to 20 GFC-1108/2108 0 to 2
0 to 50
GFC-1109/2109 0 to 5
0 to 100 GFC-1110/2110 0 to 10
0 to 1
code
GFC-1111/2111 GFC-1130/2130
std liters/min [N2]
0 to 15
20 GFC-1131/2131 30 GFC-1132/2132 40 GFC-1133/2133 50
Table III GFC-1142 High Flow Mass Flow Controllers*
code
std liters/min [N2]
GFC-1140/2140 60 GFC-1141/2141 80 GFC-1142/2142 100
*Flow rates are stated for Nitrogen at STP conditions [i.e. 700F (21.10C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
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