Dressler 13150 400 V, HPG 13150 400 V User Manual
User Manua
l
P
HPG™ Generator
Model 13150 400 V
July 2004
service@dressler.com
rerelease version
User Manual
HPG™ Generator
Model 13150 400 V
HPG 13150 400 V (A)
Prerelease version
Dressler®HF-Technik GmbH
COPYRIGHT
This manual and the information contained herein is the proprietary property
of Dressler
No part of this manual may be reproduced or copied without the express
written permission of Dressler
this manual or its contents is strictly prohibited. Copyright
Dressler
DISCLAIMER AND LIMITATION OF LIABILITY
The information contained in this manual is subject to change by
Prerelease version
Dressler
Technik GmbH makes no warranty of any kind whatsoever, either expressed
or implied, with respect to the information contained herein. Dressler
Technik GmbH shall not be liable in damages, of whatever kind, as a result of
the reliance on or use of the information contained herein.
PRODUCT USAGE STATEMENT
®
HF-Technik GmbH.
®
HF-Technik GmbH. Any unauthorized use of
®
HF-Technik GmbH. All Rights Reserved.
®
HF-Technik GmbH without prior notice. Dressler®HF-
©
2003
®
HF-
Read this entire manual and all other publications pertaining to the work to be
performed before you install, operate, or maintain this equipment. Practice all plant
and product safety instructions and precautions. Failure to follow instructions can
cause personal injury and/or property damage. If the equipment is used in a manner
not specified by the manufacturer, the prot ec tion provid ed by t he equipment may be
impaired. All personnel who work with or who are exposed to this equipment must
take precautions to pr otect themselves a gainst serious or possibly f at al bodily inju ry.
Dressler
hazards, but it assumes no responsibility for the after-sale operation of the
equipment or the safety practices of the owner or user. This equipment produces or
uses potentially lethal high-voltage, high-current, radio frequency (RF) energy.
NEVER DEFEAT INTERLOCKS OR GROUNDS.
®
HF-Technik GmbH provides information on its products and associated
ii HPG 13150 400 V (A)
TRADEMARKS
CESAR™ is a trademark of Dressler
Internet Explorer
Corporation.
Microsoft
Modbus
Smith
license from Analog Instruments Company, New Providence, New
Jersey 07974.
Windows NT
Windows
HPG™ 13150 400 V RF Power Generator
®
is a registered trademark of Dressler®HF-
Technik G mbH.
®
HF-Technik GmbH.
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is a registered trademark of the Microsoft
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is a registered trademark of the Microsoft Corporation.
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The Smith® chart shown is produced under a copyright
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Dressler®HF-Technik GmbH’s technical writing staff has carefully developed
this manual using research-based document design principles. However,
improvement is ongoing, and the writing staff welcomes and appreciates
customer feedback. Please send any comments on the content, organization,
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Prerelease version
HPG 13150 400 V (A) iii
Dressler®HF-Technik GmbH
Prerelease version
iv HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
Table of Contents
Chapter 1. Safety and Product Compliance Guidelines
Important Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
Interpreting the Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
This Revision of the Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
Understanding Model 13150 400 V Options . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Type Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Danger, Warning, and Caution Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Safety Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Rules for Safe Installation and Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Interpreting Product Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Product Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Product Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Safety and Compliance Directives and Standards . . . . . . . . . . . . . . . . . . . . .1-5
Electromagnetic Compatibility (EMC) Directives and Standards . . . . . . .1-5
Safety Directives and Standards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Conditions of Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Interlocks and Limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
Chapter 2. Product Overview and Theory
Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Chapter 3. Specifications
Physical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-1
Unit Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Physical Specifications Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7
Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9
Cooling Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10
Environmental Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12
Chapter 4. Communication Interfaces
Diagnostic Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1
Matching Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
HPG Generator User Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
User Port—25-Pin User Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
User Port Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
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Satisfying Minimal 25-Pin User Port Requirements . . . . . . . . . . . . . . . . . 4-4
25-Pin User Port Cabling Requirements . . . . . . . . . . . . . . . . . . . . . . . . .4-5
Activating the 25-pin User Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
25-Pin User Port Pin Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
25-Pin User Port Electrical Characteristics . . . . . . . . . . . . . . . . . . . . . . 4-13
25-Pin User Port Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-15
HPG Generator Host Port Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
Host Port—RS-232 With AE Bus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-21
RS-232 Connector and Pin Descriptions . . . . . . . . . . . . . . . . . . . . . . . . 4-22
RS-232 Transmission Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-22
AE Bus Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-23
Creating an Ideal Communications Transaction . . . . . . . . . . . . . . . . . . 4-26
Host Port—PROFIBUS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-28
Prerelease version
PROFIBUS Connector and Pin Descriptions . . . . . . . . . . . . . . . . . . . . . 4-29
PROFIBUS Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29
Host Port—Ethernet (Modbus/TCP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34
Understanding Modbus/TCP Commands and Register Types . . . . . . . 4-35
Host Port Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39
Activating Host Port Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-40
Host Port Command Status Response (CSR) Codes . . . . . . . . . . . . . .4-40
Host Port Command Set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-40
Chapter 5. Installation, Setup, and Operation
Preparing to Install the HPG Generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
Spacing Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
Installing the HPG Generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Connecting Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3
Connecting RF Output Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Connecting Communication Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
Connecting the HPG Generator to a System Interlock Loop . . . . . . . . . . . . . 5-5
Connecting AC Input (Mains) Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
Connecting and Setting Ethernet (Modbus/TCP) Communication . . . . . . . . . 5-6
Connecting for Ethernet Communication . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Setting the IP Configuration for Ethernet Communication . . . . . . . . . . . . 5-6
First-Time Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
Operating the HPG Generator for the First Time With the User Port . . . . . . . 5-8
Operating the HPG Generator for the First Time With Host Port . . . . . . . . . . 5-9
Operating the HPG Generator for the First Time Using the Front Panel . . . 5-10
Normal Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Setting Regulation Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Determining the Regulation Mode Setting . . . . . . . . . . . . . . . . . . . . . . . 5-12
Setting Forward Power Regulation Mode (P
Setting Load Power Regulation Mode (P
real
Forward
) . . . . . . . . . . . . . . . . . . . . . 5-13
) . . . . . . . . . . . . . . . 5-13
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HPG™ 13150 400 V RF Power Generator
Setting External Power Regulation Mode (DC Bias) . . . . . . . . . . . . . . .5-14
Operating the HPG Generator Using the Front Panel . . . . . . . . . . . . . . . . . . . . .5-16
Understanding Basic Front Panel Control Elements . . . . . . . . . . . . . . . . . . .5-17
Using the Front Panel Program Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-18
Accessing the Program Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-19
Entering Values in the Program Menu . . . . . . . . . . . . . . . . . . . . . . . . . .5-20
Front Panel Program Menu Tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-21
Regulation Mode Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-22
Match Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-24
Setting the Pulse Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-25
Recipe Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-26
Setting Remote Control Override . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-29
Setting Target Lifetime PARAMETERS . . . . . . . . . . . . . . . . . . . . . . . . .5-30
Reflected Power Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-31
Reading and Setting Tube Lifetime Parameters . . . . . . . . . . . . . . . . . .5-31
Changing the Pulse Input Configuration Settings . . . . . . . . . . . . . . . . .5-32
Changing the Device Configuration Settings . . . . . . . . . . . . . . . . . . . . .5-33
Setting and Using Preset Generator Settings for Different Applications . . . .5-35
Controlling a Variomatch Unit Attached to the Generator . . . . . . . . . . . . . . .5-35
Understanding Additional Operating Functions . . . . . . . . . . . . . . . . . . . . . . . . . .5-37
Using the Pulsing Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-37
Creating Recipes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-38
Using the Remote Control Override . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-40
Setting a Target Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-40
Changing Reflected Power Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-41
Connecting to an Ethernet-Enabled Unit With a Web Browser . . . . . . . . . . . . . .5-41
Chapter 6. Troubleshooting and Customer Support
Before Contacting Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
Checks With the Power Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
Checks With the Power On . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
General Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Matching Network Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Interlock Not Satisfied . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Front Panel Display (LCD) Not Lit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Fuse Is Blown . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4
Communication Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4
Improper Impedance Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-4
Improper RF Connection or Cabling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
Improper Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
Checking for and Resolving Errors and Warnings . . . . . . . . . . . . . . . . . . . . .6-6
World Wide Web Site . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-20
Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-21
Returning Units for Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-23
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-23
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Authorized Returns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
Warranty Statement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
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viii Table of Contents HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
List of Figures
Fig 2-1 HPG generator block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Fig 3-1 Front view of the HPG Generator with door . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Fig 3-2 Front view of the HPG Generator without door . . . . . . . . . . . . . . . . . . . . . . . . .3-3
Fig 3-3 Rear view of the HPG Generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Fig 3-4 Left side of the HPG Generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-5
Fig 3-5 Top view of the HPG Generator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-6
Fig 4-1 Matching Interface connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Fig 4-2 25-pin User Port connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-4
Fig 4-3 REFLECTED POWER MONITOR signal wiring (pins 2 and 15) . . . . . . . . . .4-15
Fig 4-4 RF FORWARD/LOAD POWER MONITOR signal wiring (pins 3 and 16) . . .4-15
Fig 4-5 RF POWER ON signal wiring (pins 4 and 17) . . . . . . . . . . . . . . . . . . . . . . . .4-16
Fig 4-6 SET POINT signal wiring (pins 5 and 18) . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-16
Fig 4-7 RF FORWARD POWER/DC BIAS REGULATION wiring (pins 6 and 19) . . . 4-17
Fig 4-8 DC BIAS MONITOR signal wiring (pins 7 and 20) . . . . . . . . . . . . . . . . . . . . .4-17
Fig 4-9 RF FORWARD/LOAD REGULATION signal wiring (pins 8 and 21) . . . . . . . .4-18
Fig 4-10 INTERLOCK LOOP signal wiring (pins 10 and 23) . . . . . . . . . . . . . . . . . . . .4-18
Fig 4-11 +15 VOLT DC signal wiring (pins 13 and 21) . . . . . . . . . . . . . . . . . . . . . . . .4-19
Fig 4-12 SET POINT STATUS signal wiring (pins 14 and 1) . . . . . . . . . . . . . . . . . . .4-19
Fig 4-13 OVERTEMPERATURE signal wiring (pins 22 and 9) . . . . . . . . . . . . . . . . . .4-20
Fig 4-14 INTERLOCK SATISFIED signal wiring (pins 24 and 11) . . . . . . . . . . . . . . .4-20
Fig 4-15 BLANKING/PULSING signal wiring (pins 25 and 19) . . . . . . . . . . . . . . . . . .4-21
Fig 4-16 RS-232 host connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-22
Fig 4-17 Graphic representation of a message packet . . . . . . . . . . . . . . . . . . . . . . . .4-24
Fig 4-18 AE Bus communications transaction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-26
Fig 4-19 Communications transaction example . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-28
Fig 4-20 PROFIBUS port connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-28
Fig 4-21 Ethernet connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-35
Fig 5-1 Output (RF Out) connector—1 5/8" EIA flange . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Fig 5-2 Front panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-16
Fig 5-3 Front panel program menu tree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-21
Fig 5-4 Front panel program menu tree (continued) . . . . . . . . . . . . . . . . . . . . . . . . . .5-22
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Prerelease version
x List of Figures HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
List of Tables
Table 1-1 HPG 13150 400 V (A) options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Table 1-2 Electromagnetic compatibility (EMC) directives and standards . . . . . . . . . .1-5
Table 1-3 Safety directives and standards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Table 1-4 HPG generator limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Table 2-1 HPG generator theory of operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Table 3-1 Physical specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-7
Table 3-2 Electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-9
Table 3-3 Cooling specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10
Table 3-4 Climatic specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12
Table 3-5 Environmental specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12
Table 4-1 Matching Interface pin descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Table 4-2 25-pin User Port pin descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
Table 4-3 RS-232 host pin descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-22
Table 4-4 PROFIBUS Host port pins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-29
Table 4-5 PROFIBUS status LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-30
Table 4-6 Configuration of download bytes (outbytes) . . . . . . . . . . . . . . . . . . . . . . . .4-32
Table 4-7 Configuration of upload packet (inbytes) . . . . . . . . . . . . . . . . . . . . . . . . . .4-33
Table 4-8 Upload status bytes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-34
Table 4-9 Packet format for FC23 send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-36
Table 4-10 Packet format for FC23 response . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-38
Table 4-11 Packet format for FC23 exception error . . . . . . . . . . . . . . . . . . . . . . . . . .4-39
Table 4-12 Host port CSR codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-40
Table 4-13 Host port commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-41
Table 5-1 Output connector pin descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Table 5-2 Overview of CESAR front panel control elements . . . . . . . . . . . . . . . . . . .5 -17
Table 5-3 Adjusting Variomatch capacitors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-37
Table 6-1 Error description and resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-7
Table 6-2 Warning description and resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-16
Table 6-3 Customer Service contact information . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-21
Prerelease version
HPG 13150 400 V (A) List of Tables xi
Dressler®HF-Technik GmbH
Prerelease version
xii List of Tables HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
Chapter
Chapter
1
Safety and Product Compliance Guidelines
IMPORTANT SAFETY INFORMATION
To ensure safe installation and operation of the Dressler®HF-Technik GmbH
HPG generator, read and understand this manual before attempting to install
and operate this unit. At a minimum, read and follow the safety instructions
and practices documented under “Safety Guidelines” on page 1-3.
INTERPRETING THE MANUAL
The following sections provide information to help you interpret this user
manual.
This Revision of the Manual
This revision of the manual provides information associated with software
release 1.16. This version of the software included changes to the error and
warning messages. Please use an appropriate revision of this manual for
earlier versions of the software. If you do not have the appropriate manual,
contact Customer Support (see “Customer Support” on page 6-21).
Note: The unit reports the software revision level with host port command 198
(see Table 4-13 on page 4-41).
Prerelease version
HPG 13150 400 V (A) Safety and Product Compliance Guidelines 1-1
Dressler®HF-Technik GmbH
Understanding Model 13150 400 V Options
The Model 13150 400 V has several different unit options, each with a unique
part number and unique combination of communication interfaces. The
following table lists the option part numbers and corresponding interfaces. For
specific interface information, see “Communication Interfaces” on page 4-1.
Note: To determine which option you have, find the serial tag affixed to the
unit; the part number is on the serial tag.
Table 1-1. HPG 13150 400 V (A) options
Model Part
Prerelease version
X
X
65800012 X
Type Conventions
Please note the following type conventions:
• Pin and signal names appear in capitalized italics (RF POWER ON).
• New terms appear in italicized text.
• Unit labels (switches, indicators, and so on) appear in boldface text
• Commands (1) and command names (regulation select) appear in
Danger, Warning, and Caution Boxes
Host Port Options
Number
RS-232 Ethernet PROFIBUS
(Mains).
boldface, lowercase text.
This symbol represents important notes concerning potential harm to people,
this unit, or associated equipment. Dressler
symbol in Danger, Warning, and Caution boxes to identify specific levels of
hazard seriousness.
DANGER indicates an imminently hazardous situation that, if not
avoided, will result in death or serious injury. DANGER is limited to the
most extreme situations.
1-2 Safety and Product Compliance Guidelines HPG 13150 400 V (A)
®
HF-Technik GmbH includes this
WARNING indicates a potentially hazardous situation that, if not avoided,
could result in death or serious injury, and/or property damage.
CAUTION indicates a potentially hazardous situation that, if not avoided,
could result in minor or moderate injury, and/or damage to property.
CAUTION is also used for property-damage-only accidents.
SAFETY GUIDELINES
Review the following information before attempting to install and operate this
unit.
HPG™ 13150 400 V RF Power Generator
Rules for Safe Installation and Operation
Please note the following:
• Do not attempt to install or operate this equipment without proper training.
• There are no user-serviceable parts inside the HPG generator. Refer
servicing to trained service personnel (see “Customer Support” on
page 6-21).
• Ensure that this unit is properly grounded (see also “Grounding” on
page 5-3).
• Ensure that all cables are properly connected (see also “HPG Generator
User Port” on page 4-4 and “HPG Generator Host Port Options” on
page 4-21).
• Verify that input line voltage and current capacity are within specifications
before turning on the power supplies (see “Electrical Specifications” on
page 3-9).
• Use proper electrostatic discharge (ESD) precautions.
• Always be careful around this equipment.
Prerelease version
HPG 13150 400 V (A) Safety and Product Compliance Guidelines 1-3
Dressler®HF-Technik GmbH
Interpreting Product Labels
The following labels may appear on the unit:
Capacitor discharge
warning
Prerelease version
PRODUCT COMPLIANCE
The following sections include information about unit compliance and
certification, including the conditions of use required to be in compliance with
the standards and directives.
CE label
Hazardous voltage
No user-serviceable parts
inside unit
Product Certification
Certain options of this product are certified by:
• CE marking, self addressed by Dressler Compliance Engineering
• EMC measurements, verified by Competent Body Product Services
1-4 Safety and Product Compliance Guidelines HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
For more information, refer to the letter of conformance (US) or declaration of
conformity (EU) accompanying the product.
Safety and Compliance Directives and Standards
Certain options of this unit have been tested for and comply with the following
electromagnetic compatibility (EMC) and safety directives and standards.
Note: This device must be installed and used only in compliance with the
directives and standards listed in addition to VDE 0113, EN 60204 (IEC
60204), and applicable requirements.
ELECTROMAGNETIC COMPATIBILITY (EMC) DIRECTIVES AND STANDARDS
Table 1-2. Electromagnetic compatibility (EMC) directives and standards
Directive Description
89/336/EEC EC Council directive on the approximation of the laws of
the Member States relating to electromagnetic
compatibility (EMC Directive)
47 CFR
Part 18
EN 55011 Limits and methods of measurement of radio disturbance
EN 61000-6-2 Electromagnetic Compatibility (generic immunity
Code of Federal Regulations—Limits and methods of
measurement of radio interference characteristics of
industrial, scientific, and medical equipment
characteristics of industrial, scientific, medical (ISM) radio
frequency equipment (Class A, Group 2) (CISPR 11)
standard— industrial)
SAFETY DIRECTIVES AND STANDARDS
Table 1-3. Safety directives and standards
Directive Description
73/23/EEC EC Council directive on the harmonization of the laws of
the Member States relating to electrical equipment
designed for use within certain voltage limits (LVD - Low
Voltage Directive)
Prerelease version
EN 61010-1 Safety requirements for electrical equipment for
measurement, control, and laboratory use
HPG 13150 400 V (A) Safety and Product Compliance Guidelines 1-5
Dressler®HF-Technik GmbH
Conditions of Use
To comply with the stated directives and standards, you must meet the
following conditions of use:
• Before making any other connection to this device, connect the auxiliary
Prerelease version
• Install and operate this device in an overvoltage category II installation
RISK OF DEATH OR BODILY INJURY. Disconnect and lockout/tagout all
sources of input power before working on this unit or anything
connected to it.
Protective Earth ground terminal to a local earth ground with a copper wire
that is sized according to the applicable requirements (see “Specifications”
on page 3-1).
only.
• Install and operate this device only in a pollution degree 2 or better
environment, which means an indoor location such as a computer room,
office, or factory floor where only nonconductive pollution occurs during
operation. Occasionally, condensation causes temporary conductivity
when the device is not operating.
• Install this device so that it is fully enclosed by a rack or other enclosure.
The rack or enclosure must be metal and either reinforced or of sufficient
thickness to resist the following tests:
A steady force of 445 N, applied through a steel hemisphere 12.7 mm
4
in diameter
An impact of 7 J applied by dropping or swinging a 0.53 kg, 50 mm
4
diameter steel sphere
• Following the tests, there must still be a minimum clearance of 12.7 mm
between the rack or enclosure and the power supply. There shall be no
deformation of the power supply.
• You must install and operate this device with a disconnect switch that
conforms to the applicable requirements. The switch must be easily
accessible and near the device.
• The ON/OFF power switch does not completely disconnect the Mains.
You must install an external switch to completely disconnect Mains.
• Use only shielded cables on the Host (RS-232, PROFIBUS, or Ethernet)
and User Port connectors.
• Install this device so that the input power (Mains) connection is
inaccessible to the user.
1-6 Safety and Product Compliance Guidelines HPG 13150 400 V (A)
• Install this device so that the output power (RF Out) connection is
inaccessible to the user.
• The AC cord must be terminated according to the applicable requirements
(see “Specifications” on page 3-1).
INTERLOCKS AND LIMITS
HPG™ 13150 400 V RF Power Generator
Dressler
limits when required by product specification. Interlocks and limits in
Dressler
safety requirements. Where interlocks or limits e xist , you mu st still mee t
and satisfy safety requirements. The presence of interlocks or limits
does not imply operator protection.
All HPG generators have an Interlock interface. This interface allows you to
integrate any HPG generator into a system interlock loop that can interrupt the
delivered RF power. The interlock is connected on the 25-pin User port by
providing external contact closure between pins 10 and 23 (see Table 4-2 on
page 4-6).
Even if you do not connect this HPG generator into a larger system interlock
loop, you must make the proper interlock loop connections for the unit to
enable RF power.
The HPG Generator may be shipped with an interlock jumper plug that
provides a connection between the interlock pins. You can use this jumper
plug to satisfy the interlock and enable operation in situations where you do
not intend to connect the remaining pins on this port.
®
HF-Technik GmbH’s products only include interlocks and
®
HF-Technik GmbH products are not meant to meet or satisfy
Prerelease version
Using the interlock jumper plug disables the interlock function.
For more information on satisfying the interlock signal, see “User Port—25-Pin
User Port” on page 4-4.
HPG 13150 400 V (A) Safety and Product Compliance Guidelines 1-7
Dressler®HF-Technik GmbH
In addition, the HPG generator includes specific limits that are described in
Table 1-4. To recover from a limiting condition, see “Troubleshooting Guide”
on page 6-2 or the specific cross-references listed in the table.
Table 1-4. HPG generator limits
RF power limit When the unit reaches the forward or reflected
Prerelease version
Overtemperature When the unit exceeds the specified maximum
Limit Unit Response and User Resolution
power limit, the unit reduces forward power to
remain within the limits. Output is not at set point.
For more information see W11, W12, and W13 in
Table 6-2 on page 6-16.
See also pin 14 in Table 4-2 on page 4-6.
temperature, RF power shuts off, and the unit
displays an error code. For information on
resolving an overtemperature condition, see E10,
E11, and E12 in Table 6-1 on page 6-7.
See also pin 22 in Table 4-2 on page 4-6.
Current limit When the driver power exceeds the limit, the unit
reduces output to remain within the limits. Output
is not at set point.
For more information, see W10 in Table 6-2 on
page 6-16.
External pulse
frequency limit
Target lifetime limit The target lifetime warning occurs when the
Tube lifetime limit The tube lifetime warning occurs when the total
When the external pulse frequency exceeds the
limit, the unit turns RF power off. For more
information, see W40 in Table 6-2 on page 6-16.
target lifetime reaches the user-set limit. This
warning does not affect the operation of the unit.
For more information, see W50 in Table 6-2 on
page 6-16.
operation time of the generator (since installation
or since the last tube exchange) reaches the tube
life span. For life span settings contact Customer
Service. For more information see W51 and W52
in Table 6-2 on page 6-16.
1-8 Safety and Product Compliance Guidelines HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
Table 1-4. HPG generator limits
Limit Unit Response and User Resolution
Excessive humidity When the humidity exceeds the specified
maximum limit, RF power shuts off (see “Cooling
Specifications” on page 3-10). For information,
see E20 and E21 in Table 6-1 on page 6-7.
The unit resets when the humidity returns to an
acceptable level.
Minimum cooling flow When the flow of water drops below the specified
minimum limit, the RF power shuts off (see
“Cooling Specifications” on page 3-10). For
information, see E02 in Table 6-1 on page 6-7.
The unit resets when the water flow returns to
acceptable conditions.
Prerelease version
HPG 13150 400 V (A) Safety and Product Compliance Guidelines 1-9
Dressler®HF-Technik GmbH
Prerelease version
1-10 Safety and Product Compliance Guidelines HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
Product Overview and Theory
DESCRIPTION
HPG™ 13150 400 V RF Power Generators are a new generation of compact,
high power generators for semiconductor production, the flat panel industry,
and various industrial plasma applications. Typical applications include
sputtering, reactive ion etching, PECVD, surface treatment, and CO
systems.
This 13.56 MHz power generator incorporates a unique combination of solidstate MOSFET driver technology and a modern tube amplifier that employes
reliable ceramic grid power tubes. The advantages of this efficient Class B
amplifier concept include:
laser
2
Chapter
Chapter
2
• Reduced cost-of-ownership as compared to purely solid-state systems
• Reduced downtime due to modern tube technology that provides
extended lifetime and easy-access cavity design for quick tube exchange.
• Robust ability to handle excessive mismatch on the load du e to the highly
resilient tube characteristics.
Designed to regulate power into a broad range of output impedances, the
HPG generator can operate in forward, load, or external power regulation
mode (see “Setting Regulation Mode” on page 5-11).
You can control the HPG generator remotely through an analog User Port
(see “HPG Generator User Port” on page 4-4) or a serial Host port (see “HPG
Generator Host Port Options” on page 4-21). The front panel features a liquid
crystal display (LCD) with an easy-to-use menu that includes widely
programmable pulse functions, a target lifetime counter, and submenus to
customize your own recipes, reflected power settings, and Variomatch
settings (when the generator is connected to a Variomatch unit). In addition,
you may control RF power using the front panel controls. For operation
instructions, see “First-Time Operation” on page 5-8 and “Normal Operation”
on page 5-11.
Prerelease version
The HPG generator operates from a 400 VAC (factory setting), 440 VAC, or
480 VAC, 50/60 Hz power source.
HPG 13150 400 V (A) Product Overview and Theory 2-1
Dressler®HF-Technik GmbH
THEORY OF OPERATION
Figure 2-1 represents high-level modules of HPG generator operation; Table
2-1 explains each module.
User Port
Prerelease version
Host Port
Figure 2-1. HPG generator block diagram
Table 2-1. HPG generator theory of operation
Module Description
(1) Analog I/O This module provides the User interface.
(2) Driver/Exciter This module generates power at the designated output
(3) RF Amplifiers This module generates RF power.
(4) RF Measure This module samples the output signal and sends it to the
(5) Digital Controller This module is the main processor and data acquisition
(6) Sensor
Electronics
(1)
Analog I/O
(2)
Driver/Exciter
(5)
Digital
Controller
(3)
RF Amplifiers
(6)
Sensor
Electronics
(4)
RF Measure
RF Output
frequency to drive the main RF sections and contains the CEX
functions.
sensor electronics.
section. It also provides Host communications through a Host
port.
This module detects RF samples and sends them to the
microprocessor.
2-2 Product Overview and Theory HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
Specifications
PHYSICAL SPECIFICATIONS
The following sections describe the dimensions and physical specifications of
the HPG generator.
• “Unit Dimensions” on page 3-2
• “Physical Specifications Table” on page 3-7
Chapter
Chapter
3
Prerelease version
HPG 13150 400 V (A) Specifications 3-1
Dressler®HF-Technik GmbH
Unit Dimensions
The following illustrations show the dimensions of the HPG generator.
Prerelease version
Figure 3-1. Front view of the HPG Generator with door
3-2 Specifications HPG 13150 400 V (A)
HPG™ 13150 400 V RF Power Generator
Figure 3-2. Front view of the HPG Generator without door
Prerelease version
HPG 13150 400 V (A) Specifications 3-3
Dressler®HF-Technik GmbH
Di
Matchi
Host Port U
t
Prerelease version
1406.4mm
55.37"
agnostic
ng
Water Out
Water In
Air Outlet
ser Por
Air Outlet
Air Outlet
RF Out
Main Circuit Breaker
AC Input Power
602mm
"
Figure 3-3. Rear view of the HPG Generator
3-4 Specifications HPG 13150 400 V (A)
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