Datasheet SM5812, SM5852 Datasheet (SILICON MICROSTRUCTURES)

查询SM5812-005-A-3-L供应商

SILICON
MICROSTRUCTURES

INCORPORATED

• N

OW WITH ACCESS TO DIGITAL TEMPERATURE AND CORRECTED DIGITAL PRESSURE

OW-COST, FULLY AMPLIFIED, CALIBRATED, AND COMPENSATED IN A SINGLE PACKAGE

• L

VAILABLE FOR DIFFERENTIAL, SINGLE-ENDED DIFFERENTIAL, GAGE & ABSOLUTE APPLICATIONS

• A

• M

ULTIPLE PRESSURE RANGES AVAILABLE TO MEASURE PRESSURE DOWN TO 0.15 PSI FULL-SCALE

AND UP TO

100 PSI FULL-SCALE

Amplified Pressure Sensor

SM5812/SM5852

DESCRIPTION

The Silicon Microstructures SM5812 and
SM5852 series of OEM pressure sensors

combines state-of-the-art pressure sensor
technology with CMOS digital signal
processing technology to produce an
amplified, fully conditioned, multi-order
pressure and temperature compensated
sensor in a dual in-line package (DIP)
configuration.

Combining the pressure sensor with a
custom signal conditioning ASIC in a single
package simplifies the use of advanced
silicon micromachined pressure sensors.
Now, the pressure sensor can be mounted
directly to a standard printed circuit board
and an amplified, high level, calibrated
pressure signal can be acquired from the
digital interface or analog output. This
eliminates the need of additional circuitry,
such as a compensation network or micro­controller containing a custom correction
algorithm.

The SM5812/SM5852 Series pressure
sensors are based on SMI's highly stable,
piezoresistive pressure sensor chips
mounted on a ceramic substrate. An
electronically programmable ASIC is
contained in the same package to provide
calibration and temperature compensation.

The model SM5812 is designed for
operating pressure ranges from 0-5 PSI up
to 0-100 PSI. The model SM5852 is
designed for operating pressure ranges from
0-0.15 PSI up to 0-3 PSI. For both models,
the sensor output is ratiometric with the
supply voltage.

FEATURES

• Amplified, calibrated, fully signal
conditioned output span of 4.0 VDC FS
(0.5 to 4.5 V signal)

• Digital temperature and calibrated
pressure available through I

• Output ratiometric with supply voltage

• Multi-order correction for pressure non-

linearity (factory programmed)

• Multi-order correction for temperature
coefficient of span and offset (factory
programmed)

• Gage, differential, and absolute versions

• SMI’s unique low-pressure die allows for

a full-scale pressure range of 0-0.15 PSI

TYPICAL APPLICATIONS

• Barometric measurement

• Medical instrumentation

• Pneumatic control

• Gas flow

• Respirators and ventilators

• Heating, Ventilation and Air Conditioning

(HVAC)

2

C interface

Rev 1.4 6_05

 2005 SMI

Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA

Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ www.si-micro.com

SM5812/SM5852

THEORY OF OPERATION

The operation of the signal processor is
depicted in the block diagram below. The
external pressure sensor is a piezoresistive
bridge. This transduces the applied pressure
into an electronic signal, which is then inputted
into the integrating amplifier of the ASIC.

During the amplification step an offset
correction factor is added in order to allow
maximum gain for a given pressure while
minimizing the offset error.

The signal is then passed to an 11-bit analog
to digital converter (ADC). The ADC samples
the signal multiple times and uses the sum of
those samples as a 13-bit word.

A digital signal processor (DSP) is then used
to correct and calibrate the pressure signal.
The DSP provides multi-order correction of
both pressure and temperature non-linearity
through the use of factory-programmed
coefficients. A combined total of twenty

coefficients are available for correcting
pressure and temperature non-linearity. The
unique coefficients are determined during a
calibration process performed at the factory.
Factory calibration is the last step performed
which means the effect of the package on
the pressure signal will also be taken into
account. This provides a great advantage
over conventional laser-trimming
approaches.

The DSP outputs a corrected digital word,
which travels to a 12-bit digital to analog
converter (DAC) to provide a calibrated
analog output. In addition to the analog
output, the corrected pressure signal is
accessible through an I

2

C digital interface.

See SMI application note AN05-001 for a
detailed description of how to read out the
digital corrected pressure signal using the
I2C bus interface.

+ 5 VDC

Extern al

Piezoresist ive

Bridge

Ground

SMI Multi-Order Pressure and
Temperature Correction ASIC

Band-gap

V

Temp

Switched
Capacitor

Integrateing

Amplifier

Power-On

Reset

Analog
Timing
Control

2 MHz

Oscillator

+ 5 VDC

Ground

11-bit ADCMUX

EEPROM

Array

Digital Timi ng

and Control

Management

DSP

(multi-order
correction of
pressure and

temperature

non-

linearities)

12-bit

Sigma-

Delta DAC

Output

Buffer

I2C Digital

Interface

Analog Component

Digital Component

Analog
Output

SDA

SCL

Rev 1.4 6_05

 2005 SMI

Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA

Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ www.si-micro.com

SILICON
MICROSTRUCTURES

INCORPORATED

SM5812/SM5852

CHARACTERISTICS FOR SM5812/SM5852 – SPECIFICATIONS

All parameters are measured at room temperature while applying 5.000V supply, unless otherwise specified.

Zero output (absolute and gauge) 0.42 0.50 0.58 V 3

Zero output (differential) 2.42 2.50 2.58 V 3

Output Span 3.92 4.00 4.08 1.96 2.00 2.04 V FS 3, 4

0.15 PSI 3.80 4.00 4.20 1.90 2.00 2.10 V FS 3, 4

Linearity -0.5 +0.5 -0.5 +0.5 %FS 5

0.15 PSI -2.5 +2.5 -2.5 +2.5 %FS 5

Pressure hysteresis 5812 -0.1 +0.1 -0.1 +0.1 %FS

5852 -0.3 +0.3 -0.3 +0.3 %FS

Temperature coefficient - Zero -1.0 +1.0 -1.0 +1.0 %FS

0.15 PSI -2.5 +2.5 -2.5 +2.5 %FS

Temperature coefficient – Span -1.0 +1.0 -1.0 +1.0 %FS

0.15 PSI -2.0 +2.0 -2.0 +2.0 %FS

Thermal hysteresis -0.1 +0.1 -0.1 +0.1 %FS

Response Time 2 2 msec

Supply voltage 4.75 5.00 5.25 4.75 5.00 5.25 V 3, 7

Current consumption 10 10 mA

Overpressure 5812 3X 3X %FS 6

5852 15X 15X %FS 6

Operating temperature range -40 25 +125 -40 25 +125 °C

Compensated temperature range 0 25 +70 0 25 +70 °C

Storage temperature range -55 25 +135 -55 25 +135 °C

Media compatibility 8

Weight 3 3 gram

Notes:

1. Absolute parts are only offered in the SM5812 Series.

2. Single-ended parts (Pressure Type - S) have 2 ports and are for higher gain differential applications where the
differential pressure is always

3. Sensor output is ratiometric to supply.

4. Full-scale (FS) is defined as zero pressure to rated pressure; differential parts can be used ±FS. Absolute and Gauge
zero output is 0.5 V typical and full-scale output is 4.5 V. Span is the difference between Full-scale output and zero
output, (4 V). For Differential parts, the negative full-scale is typically at 0.5 V, zero is typically 2.5 V, and positive full­scale is 4.5 volts to give a span of ±2.0 V.

5. Defined as best fit straight line for positive pressure applied to the part

6. Or 225 PSI, whichever is less. Output amplifier will saturate at about 0.25 V for applied pressure below the rated Zero
and at about 4.75 V for applied pressure above the rated Full-scale.

7. A 100 nF filter capacitor must be placed between Vsupply and Ground.

8. Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, alumina ceramic, epoxy,
RTV, gold, aluminum, and nickel.

Absolute1, Gage & Single2 Differential

MIN TYP MAX MIN TYP MAX UNITS NOTES

positive.

Rev 1.4 6_05

 2005 SMI

Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA

Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ www.si-micro.com

SM5812/SM5852

y

ADDITIONAL INFORMATION

Package Dimensions & Pin-Out

Dual Inline Pin (DIP) Option

Pin Numbers

(for both DIP & Surface Mount)

PIN DESCRIPTION

1 NC

GROUND

2

3 NC

SERIAL DATA (SDA)

4

SERIAL CLOCK (SCL)

5

6 NC

= 5.000 VDC

V

7

exc

ANALOG OUTPUT

8

NOTES:

• Do not connect to NC pins.

• External connections to NC pins will

cause part malfunction.

• All dimensions are shown in inches.

• Tolerance on all dimensions

+0.005” unless otherwise specified.

Surface Mountable Pin Option

Ordering Information

Pin Configuration

3 : DIP pins, opposite directi on of tubes
5 : Surface mountabl e pins,
opposite direction of tubes

Tube Length

L : Long (0.480" ± 0.005")
N : No tube

Pressure Type

A : Absolute (1 port)
D : Different ial (2 ports)
G : Gauge (1 port)
S : Single-ended (2 ports)

Notes

1. Absolute configurat ion only avail able in SM5822.

2. Single-ended confi guration is for higher gai n differenti al applications where differential pressure
is always positive.

3. Other configur ations available on l arge orders. Consult SMI for details.

Model Number

Pin Configuration

SM5852 - 003 - D - 3 - L

Pressure

Pressure

Range

Type

Tube

Length

Full-Scale Pressure Ranges

SM5812 PSI [kPa] SM5852 PSI [kPa]

005 5 [34.5] 001 0.15 [1.0]

015 15 [103.4] 003 0.30 [2.1]

030 30 [206.8] 008 0.80 [5.5]

060 60 [413.7] 015 1.50 [10.3]

100 100 [689.5] 030 3.00 [20.7]

Wiring Diagrams

V

= + 5.000 VDC

exc

100 nF

SM5812/SM5852

GROUND

ANALOG OUTPUT

GROUND

Wiring diagram for analog output

Notice:

Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the
use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement.
While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies.

Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonabl
be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.

V

= + 5.000 VDC

exc

100 nF

GROUND

SM5812/SM5852

Wiring diagram for digital output

Rev 1.4 6_05

 2005 SMI

Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 ♦ USA

Tel: [phone] ♦ Fax: [phone] ♦ [e-mail] ♦ www.si-micro.com

SERIAL CLOCK (SCL)

SERIAL DATA (SDA )

GROUND