Page 1
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX200/D
The MPX200 series device is a silicon piezoresistive pressure sensors provide a very
accurate and linear voltage output — directly proportional to the applied pressure. This
standard, low cost, uncompensated sensor permits manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
Features
• Low Cost
• Patented Silicon Shear Stress Strain Gauge
•±0.25% (Max) Linearity
• Full Scale Span 60 mV (Typ)
• Easy to Use Chip Carrier Package Options
• Ratiometric to Supply Voltage
• Absolute, Differential and Gauge Options
Application Examples
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
Figure 1 illustrates a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
PIN 3
+ V
S
PIN 2
+ V
PIN 4
– V
out
out
X–ducer
0 to 200 kPa (0–29 psi)
60 mV FULL SCALE SPAN
(TYPICAL)
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
NOTE: Pin 1 is the notched pin.
PIN NUMBER
1
Gnd
2
+V
out
3
V
4
–V
S
out
PIN 1
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 7
Motorola, Inc. 1997
1Motorola Sensor Device Data
Page 2
MAXIMUM RATINGS
Rating Symbol Value Unit
Overpressure
Burst Pressure
Storage Temperature T
Operating Temperature T
(8)
(P1 > P2) P
(8)
(P1 > P2) P
max
burst
stg
A
400 kPa
2000 kPa
–40 to +125 °C
–40 to +125 °C
OPERATING CHARACTERISTICS (V
Characteristic
(5)
(1)
(2)
(3)
(5)
(0 to 200 kPa) — — ±0.1 — %V
(5)
(–40°C to +125°C) — — ±0.5 — %V
(5)
(6)
(10% to 90%) t
(9)
Pressure Range
Supply Voltage
Supply Current I
Full Scale Span
(4)
Offset
Sensitivity ∆V/∆P — 0.3 — mV/kPa
Linearity
Pressure Hysteresis
Temperature Hysteresis
Temperature Coefficient of Full Scale Span
Temperature Coefficient of Offset
Temperature Coefficient of Resistance
Input Impedance Z
Output Impedance Z
Response Time
Warm–Up — — 20 — ms
Offset Stability
= 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
S
Symbol Min Typ Max Unit
P
OP
V
S
o
V
FSS
V
off
— –0.25 — 0.25 %V
(5)
(5)
TCV
FSS
TCV
off
TC
R
in
out
R
— — ±0.5 — %V
0 — 200 kPa
— 3.0 6.0 Vdc
— 6.0 — mAdc
45 60 90 mV
0 20 35 mV
–0.22 — –0.16 %V
— ±15 — µV/°C
0.21 — 0.27 %Zin/°C
400 — 550 Ω
750 — 1800 Ω
— 1.0 — ms
MECHANICAL CHARACTERISTICS
Characteristic Symbol Min Typ Max Unit
Weight (Basic Element Case 344–15) — — 2.0 — Grams
Common Mode Line Pressure
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
minimum rated pressure.
4. Offset (V
5. Accuracy (error budget) consists of the following:
• Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
• TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
• TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
• TCR: Zin deviation with minimum rated pressure applied, over the temperature range of –40°C to +125°C,
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
) is defined as the output voltage at the minimum rated pressure.
off
(7)
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
pressure range.
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
minimum or maximum rated pressure, at 25°C.
to 25°C.
relative to 25°C.
— — — 690 kPa
FSS
FSS
FSS
FSS
FSS
/°C
2 Motorola Sensor Device Data
Page 3
LINEARITY
ЙЙЙЙЙЙЙЙЙЙЙ
ЙЙЙЙЙЙЙЙЙЙЙ
ЙЙЙЙЙЙЙЙЙЙЙ
Linearity refers to how well a transducer’s output follows
the equation: V
out
= V
+ sensitivity x P over the operating
off
pressure range (see Figure 2). There are two basic methods
for calculating nonlinearity: (1) end point straight line fit or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worse case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’ s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
TEMPERATURE COMPENSATION
Figure 3 shows the typical output characteristics of the
MPX200 series over temperature. The output is directly proportional to the pressure and is essentially a straight line.
The X–ducer piezoresistive pressure sensor element is a
semiconductor device which gives an electrical output signal
70
ACTUAL
PRESSURE (kPA)
LINEARITY
THEORETICAL
SPAN
(V
)
FSS
OFFSET
(V
)
OFF
P
OP
60
50
40
30
OUTPUT (mVdc)
20
10
0
0 MAX
proportional to the pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is sensitive to stresses produced in a
thin silicon diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components
or by designing your system using the MPX2200 series
sensors.
Several approaches to external temperature compensation over both – 40 to +125°C and 0 to + 80°C ranges are
presented in Motorola Applications Note AN840.
70
VS = 3.0 Vdc
60
50
40
30
OUTPUT (mVdc)
20
10
0
PSI
kPa
P1 > P2
0
4.0 8.0 12 16 20 24 28 30
20 40 60 80 100 120 140 160 180 200
PRESSURE DIFFERENTIAL
–40°C
+25°C
+125
°
C
SPAN
RANGE
(TYP)
OFFSET
(TYP)
Figure 2. Linearity Specification Comparison Figure 3. Output versus Pressure Differential
SILICONE GEL
DIE COAT
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE ELEMENT
Figure 4 illustrates the absolute sensing configuration
(right) and the differential or gauge configuration in the basic
chip carrier (Case 344–15). A silicone gel isolates the die
surface and wire bond from the environment, while allowing
the pressure signal to be transmitted to the silicon diaphragm. The MPX200 series pressure sensor operating
DIFFERENTIAL/GAUGE
DIE
P1
P2
STAINLESS STEEL
Figure 4. Cross–Sectional Diagrams (Not to Scale)
METAL COVER
EPOXY
CASE
DIE
BOND
SILICONE GEL
DIE COAT
WIRE BOND
LEAD FRAME
ABSOLUTE
DIE
P1
ABSOLUTE ELEMENT
P2
STAINLESS STEEL
METAL COVER
EPOXY
CASE
DIE
BOND
characteristics and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media
other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.
3Motorola Sensor Device Data
Page 4
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The differential
tial pressure applied, P1 > P2. The absolute sensor is designed for vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
or gauge sensor is designed to operate with positive differen-
Part Number Case Type Pressure (P1) Side Identifier
MPX200A, MPX200D 344–15C Stainless Steel Cap
MPX200DP 344C–01 Side with Part Marking
MPX200AP, MPX200GP 344B–01 Side with Port Attached
MPX200GVP 344D–01 Stainless Steel Cap
MPX200AS, MPX200GS 344E–01 Side with Port Attached
MPX200GSX 344F–01 Side with Port Attached
MPX200GVSX 344G–01 Stainless Steel Cap
ORDERING INFORMATION
MPX200 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in the
basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
MPX Series
Device Type Options Case Type
Basic Element Absolute, Differential Case 344–15 MPX200A
Ported Elements
Differential Case 344C–01 MPX200DP MPX200DP
Absolute, Gauge Case 344B–01 MPX200AP
Gauge Vacuum Case 344D–01 MPX200GVP MPX200GVP
Absolute, Gauge Stove Pipe Case 344E–01 MPX200AS
Gauge Axial Case 344F–01 MPX200ASX
Gauge Vacuum Axial Case 344G–01 MPX200GVSX MPX200D
Order Number Device Marking
MPX200D
MPX200GP
MPX200GS
MPX200GSX
MPX200A
MPX200D
MPX200AP
MPX200GP
MPX200A
MPX200D
MPX200A
MPX200D
4 Motorola Sensor Device Data
Page 5
P ACKAGE DIMENSIONS
SEATING
PLANE
–T–
J
C
R
POSITIVE
PRESSURE (P1)
M
B
–A–
N
PIN 1
1234
L
–T–
SEATING
J
POSITIVE
PRESSURE
(P1)
PLANE
F
D
4 PL
0.136 (0.005) T
G
M
M
A
NOTES:
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
DIM MIN MAX MIN MAX
A 0.595 0.630 15.11 16.00
B 0.514 0.534 13.06 13.56
C 0.200 0.220 5.08 5.59
D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.40
L 0.695 0.725 17.65 18.42
M 30 NOM 30 NOM
__
N 0.475 0.495 12.07 12.57
R 0.430 0.450 10.92 11.43
STYLE 1:
PIN 1. GROUND
MILLIMETERSINCHES
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
CASE 344–15
ISSUE W
–Q–
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
MILLIMETERSINCHES
DIM MIN MAX MIN MAX
A 1.145 1.175 29.08 29.85
B 0.685 0.715 17.40 18.16
C 0.305 0.325 7.75 8.26
D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
H 0.182 0.194 4.62 4.93
J 0.014 0.016 0.36 0.41
K 0.695 0.725 17.65 18.42
L 0.290 0.300 7.37 7.62
N 0.420 0.440 10.67 11.18
P 0.153 0.159 3.89 4.04
Q 0.153 0.159 3.89 4.04
R 0.230 0.250 5.84 6.35
S
0.220 0.240 5.59 6.10
U 0.910 BSC 23.11 BSC
STYLE 1:
PIN 1. GROUND
–A–
U
R
L
H
N
PORT #1
POSITIVE
PRESSURE
(P1)
B
PIN 1
12 34
K
–P–
0.25 (0.010) T
M
C
S
Q
F
G
D
4 PL
0.13 (0.005) Q
S
M
S
S
T
S
CASE 344B–01
ISSUE B
5Motorola Sensor Device Data
Page 6
P ACKAGE DIMENSIONS — CONTINUED
R
PORT #2
SEATING
PLANE
–T– –T–
V
PORT #1
–A–
U
W
L
H
PORT #2
N
VACUUM
(P2)
PORT #1
POSITIVE PRESSURE
(P1)
–Q–
SEATING
B
PLANE
PIN 1
–P–
M
0.25 (0.010) T
Q
J
C
0.13 (0.005) Q
M
T
12 43
K
S
S
F
G
4 PL
D
S
S
S
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM MIN MAX MIN MAX
A 1.145 1.175 29.08 29.85
B 0.685 0.715 17.40 18.16
C 0.405 0.435 10.29 11.05
D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
H 0.182 0.194 4.62 4.93
J 0.014 0.016 0.36 0.41
K 0.695 0.725 17.65 18.42
L 0.290 0.300 7.37 7.62
N 0.420 0.440 10.67 11.18
P 0.153 0.159 3.89 4.04
Q 0.153 0.159 3.89 4.04
R 0.063 0.083 1.60 2.11
S
0.220 0.240 5.59 6.10
U 0.910 BSC 23.11 BSC
V 0.248 0.278 6.30 7.06
W 0.310 0.330 7.87 8.38
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
MILLIMETERSINCHES
CASE 344C–01
ISSUE B
NOTES:
–A–
SEATING
–T–
PLANE
R
PORT #2
VACUUM
(P2)
N
U
L
H
POSITIVE
PRESSURE
(P1)
–Q–
B
PIN 1
12 34
K
S
C
–P–
J
0.25 (0.010) T
F
M
S
Q
G
D
4 PL
0.13 (0.005) Q
M
T
S
S
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM MIN MAX MIN MAX
A 1.145 1.175 29.08 29.85
B 0.685 0.715 17.40 18.16
C 0.305 0.325 7.75 8.26
D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
H 0.182 0.194 4.62 4.93
J 0.014 0.016 0.36 0.41
K 0.695 0.725 17.65 18.42
L 0.290 0.300 7.37 7.62
N 0.420 0.440 10.67 11.18
P 0.153 0.159 3.89 4.04
Q 0.153 0.158 3.89 4.04
R 0.230 0.250 5.84 6.35
S
0.220 0.240 5.59 6.10
U 0.910 BSC 23.11 BSC
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
S
3. + SUPPLY
4. – OUTPUT
MILLIMETERSINCHES
CASE 344D–01
ISSUE B
6 Motorola Sensor Device Data
Page 7
PORT #1
POSITIVE
PRESSURE
(P1)
–B–
P ACKAGE DIMENSIONS — CONTINUED
NOTES:
C
BACK SIDE
VACUUM
(P2)
V
K
N
SEATING
PLANE
R
–T–
J
F
G
4
A
32
1
S
4 PL
D
0.13 (0.005) T
PIN 1
M
B
M
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM MIN MAX MIN MAX
A 0.690 0.720 17.53 18.28
B 0.245 0.255 6.22 6.48
C 0.780 0.820 19.81 20.82
D 0.016 0.020 0.41 0.51
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.41
K 0.345 0.375 8.76 9.53
N 0.300 0.310 7.62 7.87
R 0.178 0.186 4.52 4.72
S
0.220 0.240 5.59 6.10
V 0.182 0.194 4.62 4.93
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. – OUTPUT
MILLIMETERSINCHES
CASE 344E–01
ISSUE B
V
PORT #1
POSITIVE
PRESSURE
(P1)
C
E
A
U
–Q–
N
R
–T–
–P–
0.25 (0.010) T
M
M
Q
4321
PIN 1
S
K
J
F
4 PL
D
0.13 (0.005) Q
G
M
P
T
S
S
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM MIN MAX MIN MAX
A 1.080 1.120 27.43 28.45
B 0.740 0.760 18.80 19.30
C 0.630 0.650 16.00 16.51
B
D 0.016 0.020 0.41 0.51
E 0.160 0.180 4.06 4.57
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.41
K
0.220 0.240 5.59 6.10
N 0.070 0.080 1.78 2.03
P 0.150 0.160 3.81 4.06
Q 0.150 0.160 3.81 4.06
R 0.440 0.460 11.18 11.68
S 0.695 0.725 17.65 18.42
U 0.840 0.860 21.34 21.84
V 0.182 0.194 4.62 4.92
STYLE 1:
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
4. V (–) OUT
MILLIMETERSINCHES
CASE 344F–01
ISSUE B
7Motorola Sensor Device Data
Page 8
C
E
V
PORT #2
VACUUM
(P2)
–T–
–P–
P ACKAGE DIMENSIONS — CONTINUED
A
U
POSITIVE
PRESSURE
(P1)
PIN 1
0.25 (0.010) T
M
M
Q
1234
K
NOTES:
1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
–Q–
N
R
S
2. CONTROLLING DIMENSION: INCH.
DIM MIN MAX MIN MAX
A 1.080 1.120 27.43 28.45
B 0.740 0.760 18.80 19.30
C 0.630 0.650 16.00 16.51
D 0.016 0.020 0.41 0.51
B
E 0.160 0.180 4.06 4.57
F 0.048 0.064 1.22 1.63
G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.41
K
0.220 0.240 5.59 6.10
N 0.070 0.080 1.78 2.03
P 0.150 0.160 3.81 4.06
Q 0.150 0.160 3.81 4.06
R 0.440 0.460 11.18 11.68
S 0.695 0.725 17.65 18.42
U 0.840 0.860 21.34 21.84
V 0.182 0.194 4.62 4.92
MILLIMETERSINCHES
J
F
D
4 PL
0.13 (0.005) Q
G
M
P
T
STYLE 1:
PIN 1. GROUND
2. V (+) OUT
3. V SUPPLY
S
S
4. V (–) OUT
CASE 344G–01
ISSUE B
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty , representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “T ypical” parameters which may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other
applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
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arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
Mfax is a trademark of Motorola, Inc.
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8 Motorola Sensor Device Data
◊
MPX200/D
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