Page 1
SEMICONDUCTOR TECHNICAL DATA
±40g
The MMAS40G family of silicon capacitive, micro–machined accelerometers
features integral signal amplification, signal conditioning, a 4–pole low–pass
filter and temperature compensation. Zero–G offset, full scale span and filter
roll–off are factory set and require no external passives. A calibrated self–test
feature mechanically displaces the seismic mass with the application of a digital
self–test signal.
The MMAS40G incorporates a single polysilicon seismic mass, suspended
between two fixed polysilicon plates (G–cell). The forces of acceleration move
the seismic mass, thereby resulting in a change in capacitance. The G–cell is
sealed at the wafer level, creating a particle–free environment. The G–cell
features built–in damping and over–range stops to protect it from mechanical
shock.
MMAS40G accelerometers are ideally suited for automotive crash detection
and recording, vibration monitoring, automotive suspension control, appliance
control systems, etc.
Features
• Minimum Full Scale Measurement ±40g
• Calibrated, True Self–Test
• Standard 16–Pin Plastic DIP package
• Senses Perpendicular to the Printed Circuit Board
• Integral Signal Conditioning and 4–Pole Filter
• Linear Output
• Robust, High Shock Survivability
SIMPLIFIED BLOCK DIAGRAM
+
4 SELF–TEST
g
G–CELL
+
8V
+
S
A
Order this document
by MMAS40G10D/D
MICROMACHINED
ACCELEROMETER
±40g
9
10
11
12
13
14
15
16
8
7
6
5
4
3
2
1
DIP PACKAGE
CASE 648C–03
PIN NUMBER (DIP)
1 N/C (1) 9 N/C (1)
2 N/C (1) 10 N/C (1)
3 N/C (1) 11 N/C (1)
4 Self–Test 12 N/C (1)
5 Output 13 N/C (1)
6 Bypass (2) 14 N/C (1)
7 GND 15 N/C (1)
8V
NOTES:
(2) 16 N/C (1)
S
1. Internal connections. All N/C should be
tied to gnd, except pin 11 which must be
tied to pin 8.
2. Bypass to ground with 0.1 µF ceramic
capacitor for specified system performance.
REV 1
Motorola, Inc. 1997
LOW–PASS FILTER
TEMPERATURE
COMPENSATION
7 GND
6 BYPASS
5
OUTPUT
1Motorola Sensor Device Data
Page 2
MMAS40G10D
MAXIMUM RATINGS
Rating Symbol Value Unit
Acceleration (biased each axis) G ±500 g
Acceleration (unbiased each axis) G ±2000 g
Supply Voltage V
Storage Temperature T
Operating Temperature(6) T
Smax
stg
A
–0.3 to +7.0 Vdc
–40 to +105 °C
–40 to +85 °C
OPERATING CHARACTERISTICS (V
Characteristic Symbol Min Typ Max Unit
Acceleration Range G ±40 ±55 — g
Output Drive Capability — –0.2 — 0.2 mA
Supply Voltage V
Supply Current I
Full Scale Output Range V
Sensitivity (over temperature range) (2) (3) ∆V/∆G 36 40 44 mV/g
Zero Acceleration Output (over temperature range) (3) (4) V
Linearity — — 0.5 2.0 %FSO
Transverse Sensitivity — — 1.0 3.0 %FSO
Frequency Bandwidth — 300 400 500 Hz
Noise — — 15 25 mV
Self–Test Output Equivalent (5) G
Self–Test Input Low V
Self–Test Input High V
Self–Test Input Current — 10 70 200 µA
NOTES:
1. The output voltage increases from the Zero Acceleration Output for positive acceleration and decreases for negative acceleration. The
typical sensitivity is 40 mV/g. For example, with VS = 5.0 V , a +20g input will result in a 3.3 V output. (V
input will result in a 1.7 V output.
2. Sensitivity is a ratiometric parameter: ∆V/∆G
3. The compensated temperature operating range is –40 to +85°C.
4. Zero Acceleration Output is a ratiometric parameter: V
5. Equivalent output in response to a Logic Level One on the self–test pin.
6. Additional temperature range available. Consult factory.
= 5.0 Vdc, TA = 25°C unless otherwise noted)
S
S
O
FSO
off
S
STL
STH
(Vs)
= ∆V/∆G
off(Vs)
x (VS/5 V).
(5 V)
= V
off(5 V)
x (VS/5 V).
4.75 5.0 5.25 V
— 5.0 7.0 mA
0.3 — VS – 0.3 V
2.2 2.5 2.8 V
20 25 30 g
— — 1.6 V
3.4 — — V
= 2.5 + 0.040 x 20) and a –20g
output
pk
ORDERING INFORMATION
Device Temperature Range Case No. Package
MMAS40G10D –40 to +85°C Case 648C–03 Plastic DIP
2 Motorola Sensor Device Data
Page 3
POSITIVE ACCELERATION SENSING DIRECTION
16 9
18
*
DIP PACKAGE
MMAS40G10D
* When positioned as shown, gravity will result in a positive 1g output
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty , representation or guarantee regarding
the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and
specifically disclaims any and all liability, including without limitation consequential or incidental damages. “T ypical” parameters which may be provided in Motorola
data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including “Typicals”
must be validated for each customer application by customer’s technical experts. Motorola does not convey any license under its patent rights nor the rights of
others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other
applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury
or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola
and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees
arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that
Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal
Opportunity/Affirmative Action Employer.
3Motorola Sensor Device Data
Page 4
MMAS40G10D
P ACKAGE DIMENSIONS
–T–
SEATING
PLANE
–A–
16 9
–B–
18
NOTE 5
L
C
N
F
D
0.13 (0.005) T
E
G
16 PL
M
S
A
K
J 16 PL
0.13 (0.005) T
CASE 648C–03
ISSUE C
DIP P ACKAGE
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION L TO CENTER OF LEADS WHEN
FORMED PARALLEL.
4. DIMENSION B DOES NOT INCLUDE MOLD FLASH.
5. INTERNAL LEAD CONNECTION BETWEEN 4 AND
5, 12 AND 13.
DIM MIN MAX MIN MAX
A 0.740 0.840 18.80 21.34
B 0.240 0.260 6.10 6.60
C 0.145 0.185 3.69 4.69
D 0.015 0.021 0.38 0.53
M
M
S
B
E 0.050 BSC 1.27 BSC
F 0.040 0.70 1.02 1.78
G 0.100 BSC 2.54 BSC
J 0.008 0.015 0.20 0.38
K 0.115 0.135 2.92 3.43
L 0.300 BSC 7.62 BSC
M 0 10 0 10
N 0.015 0.040 0.39 1.01
MILLIMETERSINCHES
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4 Motorola Sensor Device Data
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MMAS40G10D/D
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