Page 1
AIR-COOLED
NEW
VUV LIGHT SOURCE UNIT L8998
Equipped with vacuum flange (ICF70)
OVER VIEW
Hamamatsu now introduces a vacuum ultraviolet
(VUV) light source that combines a 30 watt head-on
type deuterium lamp with a vacuum flange. Its compact size and air-cooled configuration allow easy
handling and operation. The deuterium lamp uses
an MgF2 (magnesium fluoride) window to efficiently
transmit VUV radiation down to 115 nm.
The vacuum flange (ICF70), assembled as a standard feature, connects easily to most vacuum chambers.
A metal connector on the lamp housing permits
easy connection to a dedicated power supply also
available from Hamamatsu.
Left: Power supply, Right: Light source
FEATURES
●High VUV radiation output intensity
●Air-cooled (no cooling water required)
●Equipped with vacuum flange (ICF70)
APPLICATIONS
●VUV spectrophotometers
●Optical vapor phase growth
●VUV lithography
●Excitation light sources
●Light chemical reaction
●Experiment and study using VUV light
Page 2
SPECIFICATIONS
●GENERAL RATINGS
Parameter
Spectral Distribution
Window Material
Aperture Size
Cooling Method
Operating Temperature Range
Operating Humidity Range *
* Without moisture condensation
●RECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C)
Parameter
Warm-up Time
Discharge Starting Voltage (DC)
Anode Current (DC)
Tube Drop Voltage (DC)
Output Stability
Light Source Estimated Life (at 160 nm)
Input Voltage (AC)
Power Consumption
Drift
Fluctuation (p-p)
●VACUUM FLANGE
Parameter
Flange Standard
Hermetic Seal Method
Sealing Force Retention
Description/Value
115 to 400
2
MgF
1.0
Air-cooled
10 to 35
20 to 85
Description/Value
30
400
300
80
±1.0
0.05
300
90 to 115 / 180 to 250 (Auto)
140
Description
ICF70 (P.C.D. 58.7 mm - 6 holes)
Gasket
-6
5 × 10
Pa•m3•s-1 or less
Unit
nm
—
mm
—
°C
% RH
Unit
s
V Min.
mA
V Typ.
%/h Max.
% Max.
h
V
VA
SPECTRAL DISTRIBUTION
(VUV region; reference data)
TLSOB0079EA
100
80
60
40
RELATIVE OUTPUT
20
0
140120100
WAVELENGTH (nm)
240 400220200180160
Page 3
DIMENSIONAL OUTLINES (Unit: mm)
LIGHT SOURCE (Weight: Approx. 2.7 Kg)
6- 6.7
P.C.D. 58.7
OUTPUT WINDOW 15
VACUUM FLANGE
ICF70
70
BEAM ANGLE
20°
∗ Replace light source L9026 is availabie.
POWER SUPPLY (Weight: Approx. 3 Kg)
LAMP
ARC POINT
204
METAL CONNECTOR
(CONNECTION TO POWER SUPPLY)
80
8071
CABLE LENGTH: 1800±50
∗ Cable is included.
COOLING FAN
TLSOA0060EB
METAL CONNECTOR
(CONNECTION TO LIGHT SOURCE)
FRONT VIEW SIDE VIEW
TOP VIEW
200113
122
REAR VIEW
TLSOA0061EA
Page 4
VUV LIGHT SOURCE
Precautions during use
1. Lamps emit strong UV radiation which is harmful to the eyes and skin. Do not look directly into the lamp or allow UV radiation to directly strike
the skin. Always wear protective goggles or other protective gear when working with an operating lamp.
2. A high voltage is used to operate lamps. Take sufficient caution to prevent electrical shocks.
Warranty period
Hamamatsu lamps come with a warranty valid for one year from the date of delivery. The warranty is limited to replacement of the lamp. The warranty shall not apply, even within this one year period, to cases where the operating time of the lamp exceeded the guaranteed life, or in cases
where trouble or failure occurred as a result of natural calamity, accident, or misuse.
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are
subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2002 Hamamatsu Photonics K.K.
HAMAMATSU PHOTONICS K.K., Electron Tube Center
314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, P. O. Box 6910, Bridgewater. N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected]
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 E-mail: [email protected]
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road Welwyn Garden City Hertfordshire AL7 1BW, United Kingdom, Telephone: 44-(0)1707-294888, Fax: 44(0)1707-325777 E-mail: [email protected]
North Europe: Hamamatsu Photonics Norden AB: Smidesvägen 12, SE-171-41 SOLNA, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01 E-mail: [email protected]
Italy: Hamamatsu Photonics Italia: S.R.L.: Strada della Moia, 1/E, 20020 Arese, (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741 E-mail: [email protected]
HOMEPAGE URL http://www.hamamatsu.com
TLSO1037E03
APR. 2002 IP
Printed in Japan (1000)
Loading...