Datasheet ADXRS610 Datasheet (ANALOG DEVICES)

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±300°/sec Yaw Rate Gyro

FEATURES

Complete rate gyroscope on a single chip
Z-axis (yaw rate) response
High vibration rejection over wide frequency
2000 g pow
Ratiometric to referenced supply
5 V single-supply operation
105°C operation
Self-test on digital command
Ultrasmall and light (< 0.15 cc, < 0.5 gram)
Temperature sensor output
RoHS compliant

APPLICATIONS

Vehicle chassis rollover sensing
Inertial measurement units
Platform stabilization

ered shock survivability

GENERAL DESCRIPTION

The ADXRS610 is a complete angular rate sensor (gyroscope)
that uses the Analog Devices, Inc. surface-micromachining
process to create a functionally complete and low cost angular
rate sensor integrated with all required electronics on one chip.
The manufacturing technique for this device is the same high
volume BiMOS process used for high reliability automotive
airbag accelerometers.

The output signal, RATEOUT (1B, 2A), is a voltage proportional

angular rate about the axis normal to the top surface of the

to
package. The output is ratiometric with respect to a provided
reference supply. A single external resistor can be used to lower
the scale factor. An external capacitor sets the bandwidth. Other
external capacitors are required for operation.

A temperature output is provided for compensation techniques.
T

wo digital self-test inputs electromechanically excite the sensor
to test proper operation of both the sensor and the signal
conditioning circuits. The ADXRS610 is available in a 7 mm ×
7 mm × 3 mm BGA ceramic package.

FUNCTIONAL BLOCK DIAGRAM

+5

(ADC REF)

ADXRS610

100nF

+5V

AV

CC

100nF

AGND

+5V

V

DD

100nF

Rev. 0

Information furnished by Analog Devices is believed to be accurate and reliable. However, no
responsibility is assumed by Anal og Devices for its use, nor for any infringements of patents or ot her
rights of third parties that may result from its use. Specifications subject to change without notice. No
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.
Trademarks and registered trademarks are the property of their respective owners.

PGND

ST2 ST1 TEMP V

SELF-TEST

AMP

22nF

MECHANICAL

SENSOR

CHARGE PUMP
AND VOLTAGE

REGULATOR

22nF

DRIVE

CP1 CP2 CP3 CP4 CP5 SUMJ RATEOUT

RATIO

25kΩ

25kΩ

@ 25°C

AC

AMP

100nF

C

OUT

Figure 1.

One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.
Tel: [phone] www.analog.com
Fax: [phone] ©2007 Analog Devices, Inc. All rights reserved.

VGA

180kΩ ±1%

ADXRS610

DEMOD

06520-001

ADXRS610

www.BDTIC.com/ADI

TABLE OF CONTENTS

Features.............................................................................................. 1

Theory of Operation .........................................................................9

Applications....................................................................................... 1

General Description ......................................................................... 1

Functional Block Diagram .............................................................. 1

Revision History ............................................................................... 2

Specifications..................................................................................... 3

Absolute Maximum Ratings............................................................ 4

Rate Sensitive Axis ....................................................................... 4

ESD Caution.................................................................................. 4

Pin Configuration and Function Descriptions............................. 5

Typical Performance Characteristics ............................................. 6

REVISION HISTORY

4/07—Revision 0: Initial Version

Setting Bandwidth.........................................................................9

Temperature Output and Calibration.........................................9

Calibrated Performance................................................................9

ADXRS610 and Supply Ratiometricity ................................... 10

Null Adjustment ......................................................................... 10

Self-Test Function ...................................................................... 10

Continuous Self-Test.................................................................. 10

Outline Dimensions....................................................................... 11

Ordering Guide .......................................................................... 11

Rev. 0 | Page 2 of 12

ADXRS610

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SPECIFICATIONS

All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed.

T

= −40°C to +105°C, VS = AV

A

= 100 μA, ±1 g, unless otherwise noted.

I

OUT

Table 1.

Parameter Conditions

SENSITIVITY

Measurement Range

1

2

Initial and Over Temperature
Temperature Drift

3

Nonlinearity Best fit straight line 0.1 % of FS

1

NULL

Null −40°C to +105°C 2.2 2.5 2.8 V
Linear Acceleration Effect Any axis 0.1 °/sec/g

NOISE PERFORMANCE

Rate Noise Density

FREQUENCY RESPONSE

Bandwidth

4

Sensor Resonant Frequency 12 14.5 17 kHz

SELF TEST1

ST1 RATEOUT Response
ST2 RATEOUT Response ST2 pin from Logic 0 to Logic 1 250 450 650 mV
ST1 to ST2 Mismatch

5

Logic 1 Input Voltage 3.3 V
Logic 0 Input Voltage 1.7 V
Input Impedance To common 40 50 100 kΩ

TEMPERATURE SENSOR

V

at 25°C Load = 10 MΩ 2.35 2.5 2.65 V

OUT

Scale Factor
Load to V

6

S

1

Load to Common
TURN-ON TIME Power on to ±½ °/sec of final 50 ms
OUTPUT DRIVE CAPABILITY

Current Drive For rated specifications 200 μA

Capacitive Load Drive 1000 pF
POWER SUPPLY

Operating Voltage (VS) 4.75 5.00 5.25 V

Quiescent Supply Current 3.5 4.5 mA
TEMPERATURE RANGE

Specified Performance

1

Parameter is linearly ratiometric with V

2

The maximum range possible, including output swing range, initial offset, sensitivity, offset drift, and sensitivity drift at 5 V supplies.

3

From +25°C to −40°C or +25°C to 105°C.

4

Adjusted by external capacitor, C

5

Self-test mismatch is described as (ST2 + ST1)/((ST2 − ST1)/2).

6

For a change in temperature from 25°C to 26°C. V

= V

CC

= 5 V, V

DD

= AVCC, angular rate = 0°/sec, bandwidth = 80 Hz (C

RATIO

Clockwise rotation is positive output
Full-scale range over specifications range ±300 °/sec

−40°C to +105°C 5.52 6 6.48 mV/°/sec
±2 %

TA ≤ 25°C

0.01 2500 Hz

ST1 pin from Logic 0 to Logic 1 −650 −450 −250 mV

−5

@25°C, V

= 5 V 9

RATIO

−40 +105 °C

.

RATIO

. Reducing bandwidth below 0.01 Hz does not reduce noise further.

OUT

is ratiometric to V

TEMP

. See the Tem section for more details. perature Output and Calibration

RATIO

= 0.01 µF),

OUT

ADXRS610BBGZ

Min Typ Max

0.05

+5

25
25

Unit

°/sec/√Hz

%

mV/°C
kΩ
kΩ

Rev. 0 | Page 3 of 12

ADXRS610

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ABSOLUTE MAXIMUM RATINGS

Table 2.

Parameter Rating

Acceleration (Any Axis, 0.5 ms)

Unpowered 2000 g
Powered 2000 g

V

AV

DD,

CC

V

AVCC

RATIO

−0.3 V to +6.0 V

ST1, ST2 AVCC
Output Short-Circuit Duration

Indefinite

(Any Pin to Common)
Operating Temperature Range −55°C to +125°C
Storage Temperature Range −65°C to +150°C

Stresses above those listed under the Absolute Maximum
Ratings may cause permanent damage to the device. This is a
stress rating only; functional operation of the device at these or
any other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.

RATE SENSITIVE AXIS

The ADXRS610 is a Z-axis rate-sensing device (also called a
yaw rate sensing device). It produces a positive going output
voltage for clockwise rotation about the axis normal to the
package top, that is, clockwise when looking down at the
package lid.

RATE

AXIS

LONGITUDI NAL

AXIS

ABCD G

A1

EF

LATERAL AXIS

Figure 2. RATEOUT Signal Increa

ESD CAUTION

RATE OUT

VCC = 5V

+

7

1

GND

/2

V

RATIO

2

RATIO

ses with Clockwise Rotation

4.75V

4.75

RATE IN

0.25V

06520-002

Drops onto hard surfaces can cause shocks of greater than

g and can exceed the absolute maximum rating of the

2000
device. Exercise care during handling to avoid damage.

Rev. 0 | Page 4 of 12

ADXRS610

A

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PIN CONFIGURATION AND FUNCTION DESCRIPTIONS

PGND

`

ST1

ST2

TEMP

GND

GF E D C BA

DD

V

RATIO

Figure 3. Pin Configuration

Table 4. Pin Function Descriptions

Pin No. Mnemonic Description

6D, 7D CP5 HV Filter Capacitor (0.1 μF).
6A, 7B CP4 Charge Pump Capacitor (22 nF).
6C, 7C CP3 Charge Pump Capacitor (22 nF).
5A, 5B CP1
4A, 4B CP2

Charge Pump Capacitor (22 nF).

Charge Pump Capacitor (22 nF).
3A, 3B AVCC Positive Analog Supply.
1B, 2A RATEOUT Rate Signal Output.
1C, 2C SUMJ Output Amp Summing Junction.
1D, 2D NC No Connect.
1E, 2E V

Reference Supply for Ratiometric Output.

RATIO

1F, 2G AGND Analog Supply Return.
3F, 3G TEMP Temperature Voltage Output.
4F, 4G ST2 Self-Test for Sensor 2.
5F, 5G ST1 Self-Test for Sensor 1.
6G, 7F PGND Charge Pump Supply Return.
6E, 7E VDD Positive Charge Pump Supply.

CP3CP5

NC SUMJ

CP4

CP1

CP2

AV

CC

RATEOUT

7

6

5

4

3

2

1

06520-023

Rev. 0 | Page 5 of 12

ADXRS610

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TYPICAL PERFORMANCE CHARACTERISTICS

N > 1000 for all typical performance plots, unless otherwise noted.

16

14

12

10

8

6

% OF POPULATION

4

2

0

2.26

2.30

2.34

2.38

2.42

2.50

2.46

2.54

VOLTS

Figure 4. Null Output at 25°C (V

25

20

15

10

% OF POPULATION

5

0

–0.30

–0.25

–0.20

–0.15

–0.100–0.05

(°/sec/°C)

Figure 5. Null Drift over Temperature (V

30

25

20

15

10

% OF POPULATION

5

0

5.35.45.55.65.75.85.96.06.16.26.36.46.56.66.7

(mV/°/ sec)

Figure 6. Sensitivity at 25°C (V

2.58

= 5 V)

RATIO

0.05

0.10

RATIO

= 5 V)

RATIO

2.62

0.15

2.66

0.20

= 5 V)

25

20

15

10

% OF POPULATION

5

0

2.70

2.74

6520-003

–7 –5 –4–6 –3 –2 –1 0 1 2 3 4 5 6 7

% DRIFT

06520-006

Figure 7. Sensitivity Drift over Temperature

45

40

35

30

25

20

15

% OF POPULATION

10

5

0

0.25

0.30

06520-004

06520-005

–570 –530 –490 –450 –370–410 –330

(mV)

Figure 8. ST1 Output Change at 25°C (V

45

40

35

30

25

20

15

% OF POPULATION

10

5

0

330 370 390350 410 4 30 450 470 510 530490 550 570

(mV)

Figure 9. ST2 Output Change at 25°C (V

RATIO

RATIO

= 5 V)

= 5 V)

06520-007

06520-008

Rev. 0 | Page 6 of 12

ADXRS610

c

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50

45

40

35

30

25

20

% OF POPULATION

15

10

5

0

–5 –4 –3 –2 –1 1 2 3 4 50

% MISMAT CH

Figure 10. Self-Test Mismatch at 25°C (V

600

400

200

0

(mV)

–200

–400

–600

–40 –20 0 20 40 80 100 12060

ST2

ST1

TEMPERATURE (°C)

Figure 11. Typical Self-Test Change over Temperature

40

35

30

25

RATIO

= 5 V)

06520-009

06520-010

40

35

30

25

20

15

% OF POPULATION

10

5

0

2.40 2.42 2.44 2.46 2.48 2.50 2.54 2.56 2.58 2.602.52

VOLTS

Figure 13. V

3.3

3.1

2.9

2.7

2.5

2.3

VOLTS

2.1

1.9

1.7

1.5
–40 –20 0 20 40 60 100 12080

Figure 14. V

60

50

40

30

Output at 25°C (V

TEMP

TEMPERATURE ( °C)

Output over Temperature (V

TEMP

RATIO

= 5 V)

256 PARTS

RATIO

= 5 V)

REF

Y

X

+45°

–45°

06520-012

06520-013

20

15

% OF POPULATION

10

5

0

3.0 3.1 3.2 3.3 3. 4 3.5 3.7 3.8 3.9 4.0 4. 13.6

(mA)

Figure 12. Current Consumption at 25°C (V

RATIO

= 5 V)

06520-011

Rev. 0 | Page 7 of 12

20

g OR °/se

10

0

–10

–20

750 770 810 830 850790

TIME (ms)

Figure 15. g and g × g Sensitivity for a 50 g, 10

ms Pulse

06520-014

ADXRS610

www.BDTIC.com/ADI

1.6

1.4

0.10

1.2

1.0

0.8

(°/sec)

0.6

0.4

0.2

0

100 10k

Figure 16. Typical Response to 10 g S

1k

(Hz)

inusoidal Vibration

(Sensor Bandwidth = 2 kHz)

400

300

DUT1 OFFSET BY +200°/sec

DUT2 OFFSET BY –200°/sec

(°/sec)

200

100

0

–100

–200

–300

LAT

LONG

RATE

0.05

0

(°/sec)

–0.05

–0.10

0 14012010080604020

06520-015

TIME (Hours)

06520-018

Figure 19. Typical Shift in 90 sec Null Averages Accumulated

ov

er 140 Hours

0.10

0.05

0

(°/sec)

–0.05

–400

02

Figure 17. Typical High g (2500 g) Sho

0 20050

(ms)

ck Response

5015010

06520-016

–0.10

0 360018001200 30002400600

Figure 20. Typical Shift in Short Term Null (Bandwidth = 1 Hz)

(Sensor Bandwidth = 40 Hz)

1

0.1

(°/sec rms)

0.01

0.001

0.01 0.1 100k10k1k100101

AVERAGE TI ME (Secon ds)

Figure 18. Typical Root Allan Deviation at 25°C vs. Averaging Time

06520-017

0.1

0.01

(°/sec/ Hz rms)

0.001

0.0001
10 100k1k100

Figure 21. Typical Noise Spectral Density (Bandwidth = 40 Hz)

TIME (Seconds)

(Hz)

10k

06520-019

06520-020

Rev. 0 | Page 8 of 12

ADXRS610

(

)

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THEORY OF OPERATION

The ADXRS610 operates on the principle of a resonator gyro.
Two polysilicon sensing structures each contain a dither frame
that is electrostatically driven to resonance, producing the
necessary velocity element to produce a Coriolis force during
angular rate. At two of the outer extremes of each frame,
orthogonal to the dither motion, are movable fingers that are
placed between fixed pickoff fingers to form a capacitive pickoff
structure that senses Coriolis motion. The resulting signal is fed
to a series of gain and demodulation stages that produce the
electrical rate signal output. The dual-sensor design rejects
external g-forces and vibration. Fabricating the sensor with the
signal conditioning electronics preserves signal integrity in
noisy environments.

The electrostatic resonator requires 18 V to 20 V for operation.
B

ecause only 5 V are typically available in most applications, a
charge pump is included on-chip. If an external 18 V to 20 V
supply is available, the two capacitors on CP1 through CP4 can
be omitted and this supply can be connected to CP5 (Pin 6D,
Pin 7D). Note that CP5 should not be grounded when power is
applied to the ADXRS610. Although no damage occurs, under
certain conditions the charge pump may fail to start up after the
ground is removed without first removing power from the
ADXRS610.

SETTING BANDWIDTH

External Capacitor C
chip R

resistor to create a low-pass filter to limit the

OUT

bandwidth of the ADXRS610 rate response. The –3 dB
frequency set by R

=

f

O

UT

()

and can be well controlled because R
during manufacturing to be 180 kΩ ±1%. Any external resistor
applied between the RATEOUT pin (1B, 2A) and SUMJ pin
(1C, 2C) results in

R

=

O

UT

()

In general, an additional hardware or software filter is added to

ttenuate high frequency noise arising from demodulation

a
spikes at the gyro’s 14 kHz resonant frequency (the noise spikes
at 14 kHz can be clearly seen in the power spectral density
curve shown in

rner frequency is set to greater than 5× the required

co

Figure 21). Typically, this additional filter’s

bandwidth to preserve good phase response.

is used in combination with the on-

OUT

π2

OUT

k180

k180

and C

1

R

×

+

is

OUT

CR

×××

OUTOUT

has been trimmed

OUT

EXT

R

EXT

0.1

0.01

0.001

0.0001

(°/sec/ Hz rms)

0.00001

0.000001
10 100k1k100

(Hz)

Figure 22. Noise Spectral Density with Additional 250 Hz Filter

10k

6520-021

TEMPERATURE OUTPUT AND CALIBRATION

It is common practice to temperature-calibrate gyros to improve
their overall accuracy. The ADXRS610 has a temperature propor­tional voltage output that provides input to such a calibration
method. The temperature sensor structure is shown in

Figure

23. The temperature output is characteristically nonlinear, and
a

ny load resistance connected to the TEMP output results in
decreasing the TEMP output and temperature coefficient.
Therefore, buffering the output is recommended.

The voltage at the TEMP pin (3F, 3G) is nominally 2.5 V at
25°C, an

d V

= 5 V. The temperature coefficient is ~9 mV/°C

RATIO

at 25°C. Although the TEMP output is highly repeatable, it has
only modest absolute accuracy.

RATIO

R

FIXEDRTEMP

Figure 23. ADXRS610 Temperature Sensor Structure

V

TEMP

6520-022

CALIBRATED PERFORMANCE

Using a 3-point calibration technique, it is possible to calibrate
the null and sensitivity drift of the ADXRS610 to an overall
accuracy of nearly 200°/hour. An overall accuracy of 40°/hour
or better is possible using more points.

Limiting the bandwidth of the device reduces the flat-band
n

oise during the calibration process, improving the

measurement accuracy at each calibration point.

Figure 22 shows the effect of adding a 250 Hz filter to the
o

utput of an ADXRS610 set to 40 Hz bandwidth (as shown in
Figure 21). High frequency demodulation artifacts are
a

ttenuated by approximately 18 dB.

Rev. 0 | Page 9 of 12

ADXRS610

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ADXRS610 AND SUPPLY RATIOMETRICITY

The ADXRS610 RATEOUT and TEMP signals are ratiometric
to the V
temperature outputs are proportional to V
ADXRS610 is most easily used with a supply-ratiometric ADC
that results in self-cancellation of errors due to minor supply
variations. There is some small error due to nonratiometric
behavior. Typical ratiometricity error for null, sensitivity, self­test, and temperature output is outlined in

Note that V

Table 3. Ratiometricity Error for Various Parameters

Parameter VS = V

ST1

Mean −0.4% −0.3%
Sigma 0.6% 0.6%

ST2

Mean −0.4% −0.3%
Sigma 0.6% 0.6%

Null

Mean −0.04% −0.02%
Sigma 0.3% 0.2%

Sensitivity

Mean 0.03% 0.1%
Sigma 0.1% 0.1%

V

TEMP

Mean −0.3% −0.5%
Sigma 0.1% 0.1%

NULL ADJUSTMENT

The nominal 2.5 V null is for a symmetrical swing range at
RATEOUT (1B, 2A). However, a nonsymmetrical output swing

voltage, that is, the null voltage, rate sensitivity, and

RATIO

. Thus, the

RATIO

Tabl e 3.

must never be greater than AV

RATIO

= 4.75 V VS = V

RATIO

CC.

RATIO

= 5.25 V

may be suitable in some applications. Null adjustment is
possible by injecting a suitable current to SUMJ (1C, 2C). Note
that supply disturbances may reflect some null instability.
Digital supply noise should be avoided particularly in this case.

SELF-TEST FUNCTION

The ADXRS610 includes a self-test feature that actuates each of
the sensing structures and associated electronics as if subjected
to angular rate. It is activated by standard logic high levels
applied to Input ST1 (5F, 5G), Input ST2 (4F, 4G), or both. ST1
causes the voltage at RATEOUT to change about –0.5 V, and
ST2 causes an opposite change of +0.5 V. The self-test response
follows the viscosity temperature dependence of the package
atmosphere, approximately 0.25%/°C.

Activating both ST1 and ST2 simultaneously is not damaging.
S

T1 and ST2 are fairly closely matched (±5%), but actuating
both simultaneously may result in a small apparent null bias
shift proportional to the degree of self-test mismatch.

ST1 and ST2 are activated by applying a voltage equal to V

RATIO

to the ST1 and ST2 pins. The voltage applied to ST1 and ST2
must never be greater than AV

.

CC

CONTINUOUS SELF-TEST

The on-chip integration of the ADXRS610 gives it higher reliability
than is obtainable with any other high volume manufacturing
method. In addition, it is manufactured under a mature BiMOS
process with field-proven reliability. As an additional failure
detection measure, a power-on self-test can be performed.
However, some applications may warrant continuous self-test
while sensing rate. Details outlining continuous self-test
techniques are also available in a separate application note.

Rev. 0 | Page 10 of 12

ADXRS610

www.BDTIC.com/ADI

OUTLINE DIMENSIONS

7.05

6.85 SQ

6.70

76543

*

A1 CORNER

INDEX AREA

21

A

B

C

D

E

F

G

3.30 MAX

2.50 MIN

COPLANARIT Y

0.15

060506-A

3.80 MAX

A1 BALL PAD
INDICATOR

4.80

TOP VIEW

DETAIL A

*

BALL A1 IDENTIFIER IS GOLD PLATED AND CONNECTED

TO THE D/A PAD INTERNALL Y VIA HOLE S.

BSC SQ

0.60

0.25

SEATING

PLANE

0.80 BSC

(BALL PITCH)

DETAIL A

0.60

0.55

0.50

BALL DIAMETER

B

T

O

T

M

O
W

V

IE

Figure 24. 32-Lead Ceramic Ball Grid Array [CBGA]

(BG-32-

3)

Dimensions shown in millimeters

ORDERING GUIDE

Model Temperature Range Package Description Package Option

ADXRS610BBGZ1 –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3
ADXRS610BBGZ-RL1 –40°C to +105°C 32-Lead Ceramic Ball Grid Array (CBGA) BG-32-3

1

Z = RoHS Compliant Part.

Rev. 0 | Page 11 of 12

ADXRS610

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NOTES

©2007 Analog Devices, Inc. All rights reserved. Trademarks and
registered trademarks are the property of their respective owners.
D06520-0-4/07(0)

Rev. 0 | Page 12 of 12