4 mm × 4 mm × 1.45 mm LFCSP
Low power: 350 μA typical
Single-supply operation: 1.8 V to 3.6 V
10,000 g shock survival
Excellent temperature stability
Bandwidth adjustment with a single capacitor per axis
RoHS/WEEE lead-free compliant
APPLICATIONS
Cost-sensitive, low power, motion- and tilt-sensing applications
Mobile devices
Gaming systems
Disk drive protection
Image stabilization
Sports and health devices
Accelerometer
ADXL326
GENERAL DESCRIPTION
The ADXL326 is a small, low power, complete 3-axis
accelerometer with signal conditioned voltage outputs. The
product measures acceleration with a minimum full-scale range
of ±16 g. It can measure the static acceleration of gravity in tiltsensing applications, as well as dynamic acceleration, resulting
from motion, shock, or vibration.
The user selects the bandwidth of the accelerometer using
the C
, CY, and CZ capacitors at the X
X
Bandwidths can be selected to suit the application with a
range of 0.5 Hz to 1600 Hz for X and Y axes and a range of
0.5 Hz to 550 Hz for the Z axis.
The ADXL326 is available in a small, low profile, 4 mm ×
4 mm × 1.45 mm, 16-lead, plastic lead frame chip scale package
(LFCSP_LQ).
OUT
, Y
OUT
, and Z
OUT
pins.
FUNCTIONAL BLOCK DIAGRAM
+3
V
S
ADXL326
OUTPUT AMP
3-AXIS
SENSOR
C
DC
COMST
AC AMPDEMOD
Figure 1.
OUTPUT AMP
OUTPUT AMP
~32kΩ
~32kΩ
~32kΩ
X
OUT
C
X
Y
OUT
C
Y
Z
OUT
C
Z
7948-001
Rev. 0
Information furnished by Analog Devices is believed to be accurate and reliable. However, no
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other
rights of third parties that may result from its use. Specifications subject to change without notice. No
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.
Trademarks and registered trademarks are the property of their respective owners.
TA = 25°C, VS = 3 V, CX = CY = CZ = 0.1 µF, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are
guaranteed. Typical specifications are not guaranteed.
Table 1.
Parameter Conditions Min Typ Max Unit
SENSOR INPUT Each axis
Measurement Range ±16 ±19
Nonlinearity Percent of full scale ±0.3 %
Package Alignment Error ±1 Degrees
Interaxis Alignment Error ±0.1 Degrees
Cross Axis Sensitivity1 ±1 %
SENSITIVITY (RATIOMETRIC)2 Each axis
Sensitivity at X
Sensitivity Change Due to Temperature3 V
OUT
, Y
, Z
V
OUT
OUT
= 3 V 51 57 63 mV/g
S
= 3 V ±0.01 %/°C
S
ZERO g BIAS LEVEL (RATIOMETRIC)
0 g Voltage at X
0 g Voltage at Z
, Y
V
OUT
OUT
V
OUT
= 3 V 1.35 1.5 1.65 V
S
= 3 V 1.2 1.5 1.8 V
S
0 g Offset vs. Temperature ±1 mg/°C
NOISE PERFORMANCE
Noise Density X
OUT
, Y
, Z
300 μg/√Hz rms
OUT
OUT
FREQUENCY RESPONSE4
Bandwidth X
Bandwidth Z
R
Tolerance 32 ± 15% kΩ
FILT
5
, Y
OUT
OUT
No external filter 1600 Hz
OUT
5
No external filter 550 Hz
Sensor Resonant Frequency 5.5 kHz
SELF TEST6
Logic Input Low +0.6 V
Logic Input High +2.4 V
ST Actuation Current +60 μA
Output Change at X
Output Change at Y
Output Change at Z
Self test 0 to 1 −29 −62 −114 mV
OUT
Self test 0 to 1 +29 +62 +114 mV
OUT
Self test 0 to 1 +29 +105 +190 mV
OUT
OUTPUT AMPLIFIER
Output Swing Low No load 0.1 V
Output Swing High No load 2.8 V
POWER SUPPLY
Operating Voltage Range 1.8 3.6 V
Supply Current VS = 3 V 350 μA
Turn-On Time7 No external filter 1 ms
TEMPERATURE
Operating Temperature Range −40 +85 °C
1
Defined as coupling between any two axes.
2
Sensitivity is essentially ratiometric to VS.
3
Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature.
4
Actual frequency response controlled by user-supplied external filter capacitors (CX, CY, CZ).
5
Bandwidth with external capacitors = 1/(2 × π × 32 kΩ × C). For CX, CY = 0.003 μF, bandwidth = 1.6 kHz. For CZ = 0.01 μF, bandwidth = 500 Hz. For CX, CY, CZ = 10 μF,
bandwidth = 0.5 Hz.
6
Self test response changes cubically with VS.
7
Turn-on time is dependent on CX, CY, CZ and is approximately 160 × CX or CY or CZ + 1 ms, where CX, CY, CZ are in μF.
g
Rev. 0 | Page 3 of 16
Page 4
ADXL326
ABSOLUTE MAXIMUM RATINGS
Table 2.
Parameter Rating
Acceleration (Any Axis, Unpowered) 10,000 g
Acceleration (Any Axis, Powered) 10,000 g
VS −0.3 V to +3.6 V
All Other Pins (COM − 0.3 V) to (VS + 0.3 V)
Output Short-Circuit Duration
(Any Pin to Common)
Temperature Range (Powered) −55°C to +125°C
Temperature Range (Storage) −65°C to +150°C
Indefinite
Stresses above those listed under Absolute Maximum Ratings
may cause permanent damage to the device. This is a stress
rating only; functional operation of the device at these or any
other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
ESD CAUTION
Rev. 0 | Page 4 of 16
Page 5
ADXL326
PIN CONFIGURATION AND FUNCTION DESCRIPTIONS
S
V
14
ADXL326
TOP VIEW
+Z
+X
S
NC
13
12
X
OUT
11
+Y
NC
10
Y
OUT
9
NC
NC
COM
NC
1
2
ST
3
4
NC15V
16
(Not to Scale)
5678
COM
COM
NC = NO CONNECT
OUT
COM
Z
07948-003
Figure 2. Pin Configuration
Table 3. Pin Function Descriptions
Pin No. Mnemonic Description
1 NC No Connect (or Optionally Ground)
2 ST Self Test
3 COM Common
4 NC No Connect
5 COM Common
6 COM Common
7 COM Common
8 Z
Z Channel Output
OUT
9 NC No Connect (or Optionally Ground)
10 Y
Y Channel Output
OUT
11 NC No Connect
12 X
X Channel Output
OUT
13 NC No Connect
14 V
S
Supply Voltage (1.8 V to 3.6 V)
15 VS Supply Voltage (1.8 V to 3.6 V)
16 NC No Connect
EP Exposed pad Not internally connected. Solder for mechanical integrity.
Rev. 0 | Page 5 of 16
Page 6
ADXL326
A
A
A
A
A
A
TYPICAL PERFORMANCE CHARACTERISTICS
N > 1000 for all typical performance plots, unless otherwise noted.
90
80
70
60
50
TION (%)
40
POPUL
30
20
10
0
1.46 1.47 1.48 1.491.51 1.52 1.531.54
1.50
OUTPUT (V)
Figure 3. X-Axis Zero g Bias at 25°C, VS = 3 V
100
90
80
70
60
TION (%)
50
40
POPUL
30
20
10
0
1.46 1.47 1.48 1.49 1.50 1.51 1.52 1.53 1.54
OUTPUT (V)
Figure 4. Y-Axis Zero g Bias at 25°C, VS = 3 V
80
07948-005
7948-006
40
30
TION (%)
20
POPUL
10
0
–62–60–58–56–54–52–50
VOLTAGE (mV)
Figure 6. X-Axis Self Test Response at 25°C, VS = 3 V
40
30
TION (%)
20
POPUL
10
0
5254565860626466
VOLTAGE (mV)
Figure 7. Y-Axis Self Test Response at 25°C, VS = 3 V
30
07948-008
07948-009
70
60
50
TION (%)
40
30
POPUL
20
10
0
1.46 1.47 1.48 1.49 1.50 1.51 1.52 1.53 1.54
OUTPUT (V)
Figure 5. Z-Axis Zero g Bias at 25°C, VS = 3 V
07948-007
20
TION (%)
POPUL
10
0
9092949698100102104
VOLTAGE (mV)
Figure 8. Z-Axis Self Test Response at 25°C, VS = 3 V
Figure 21. Typical Current Consumption vs. Supply Voltage
CH4: Z
CH3: Y
CH2: X
4
3
2
1
07948-023
OUTPUTS ARE OFFSET
FOR CLARITY
TIME (1ms/DIV)
Figure 22. Typical Turn-On Time, V
= CY = CZ = 0.0047 μF
C
X
, 500mV/DIV
OUT
, 500mV/DI V
OUT
, 500mV/DI V
OUT
CH1: POWER, 2V/DIV
= 3 V,
S
07948-024
Rev. 0 | Page 9 of 16
Page 10
ADXL326
THEORY OF OPERATION
The ADXL326 is a complete 3-axis acceleration measurement
system. The ADXL326 has a measurement range of ±16 g
minimum. It contains a polysilicon surface micromachined
sensor and signal conditioning circuitry to implement an openloop acceleration measurement architecture. The output signals
are analog voltages that are proportional to acceleration. The
accelerometer can measure the static acceleration of gravity in
tilt sensing applications, as well as dynamic acceleration, resulting
from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured
using a differential capacitor that consists of independent fixed
plates and plates attached to the moving mass. The fixed plates
are driven by 180° out-of-phase square waves. Acceleration deflects
the moving mass and unbalances the differential capacitor resulting
in a sensor output whose amplitude is proportional to acceleration.
Phase-sensitive demodulation techniques are then used to
determine the magnitude and direction of the acceleration.
The demodulator output is amplified and brought off-chip through
a 32 kΩ resistor. The user then sets the signal bandwidth of the
device by adding a capacitor. This filtering improves measurement
resolution and helps prevent aliasing.
MECHANICAL SENSOR
The ADXL326 uses a single structure for sensing the X, Y, and Z axes.
As a result, the three axes sense directions are highly orthogonal
with little cross-axis sensitivity. Mechanical misalignment of the
sensor die to the package is the chief source of cross-axis sensitivity.
Mechanical misalignment can, of course, be calibrated out at
the system level.
PERFORMANCE
Rather than using additional temperature compensation circuitry,
innovative design techniques ensure that high performance is builtin to the ADXL326. As a result, there is neither quantization error
nor nonmonotonic behavior, and temperature hysteresis is very
low (typically <3 mg over the −25°C to +70°C temperature range).
Rev. 0 | Page 10 of 16
Page 11
ADXL326
APPLICATIONS INFORMATION
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 µF capacitor, CDC, placed
close to the ADXL326 supply pins adequately decouples the
accelerometer from noise on the power supply. However, in
applications where noise is present at the 50 kHz internal clock
frequency (or any harmonic thereof), additional care in power
supply bypassing is required because this noise can cause errors
in acceleration measurement. If additional decoupling is needed, a
100 Ω (or smaller) resistor or ferrite bead can be inserted in the
supply line. Additionally, a larger bulk bypass capacitor (1 µF or
greater) can be added in parallel to C
. Ensure that the connection
DC
from the ADXL326 ground to the power supply ground is low
impedance because noise transmitted through ground has a
similar effect as noise transmitted through V
.
S
SETTING THE BANDWIDTH USING CX, CY, AND CZ
The ADXL326 has provisions for band limiting the X
pins. Capacitors must be added at these pins to implement
Z
OUT
low-pass filtering for antialiasing and noise reduction. The 3 dB
bandwidth equation is
f
= 1/(2π(32 kΩ) × C
−3 dB
(X, Y, Z)
)
or more simply
f
= 5 F/C
–3 dB
The tolerance of the internal resistor (R
(X, Y, Z)
) typically varies as
FILT
much as ±15% of its nominal value (32 kΩ), and the bandwidth
varies accordingly. A minimum capacitance of 0.0047 µF for C
C
, and CZ is recommended in all cases.
Y
Table 4. Filter Capacitor Selection, C
, CY, and CZ
X
Bandwidth (Hz) Capacitor (μF)
1 4.7
10 0.47
50 0.10
100 0.05
200 0.027
500 0.01
OUT
, Y
OUT
, and
,
X
SELF TEST
The ST pin controls the self test feature. When this pin is set to
, an electrostatic force is exerted on the accelerometer beam.
V
S
The resulting movement of the beam allows the user to test
whether the accelerometer is functional. The typical change in
output is −1.08 g (corresponding to −62 mV) in the X axis, +1.08 g
(+62 mV) on the Y axis, and +1.83 g (+105 mV) on the Z axis.
This ST pin can be left open circuit or connected to common
(COM) in normal use.
Never expose the ST pin to voltages greater than V
this cannot be guaranteed due to the system design (for instance,
there are multiple supply voltages), then a low V
diode between ST and V
is recommended.
S
+ 0.3 V. If
S
clamping
F
Rev. 0 | Page 11 of 16
DESIGN TRADE-OFFS FOR SELECTING FILTER
CHARACTERISTICS: THE NOISE/BW TRADE-OFF
The selected accelerometer bandwidth ultimately determines
the measurement resolution (smallest detectable acceleration).
Filtering can be used to lower the noise floor to improve the
resolution of the accelerometer. Resolution is dependent on the
analog filter bandwidth at X
OUT
, Y
OUT
, and Z
OUT
.
The output of the ADXL326 has a typical bandwidth greater
than 500 Hz. The user must filter the signal at this point to limit
aliasing errors. The analog bandwidth must be no more than half
the analog-to-digital sampling frequency to minimize aliasing.
The analog bandwidth can be further decreased to reduce noise
and improve resolution.
The ADXL326 noise has the characteristics of white Gaussian
noise, which contributes equally at all frequencies and is described
in terms of µg/√Hz (the noise is proportional to the square root
of the accelerometer bandwidth). The user should limit bandwidth
to the lowest frequency needed by the application to maximize
the resolution and dynamic range of the accelerometer.
With the single-pole roll-off characteristic, the typical noise of
the ADXL326 is determined by
rms Noise = Noise Density ×
)1.6(×BW
Often, the peak value of the noise is desired. Peak-to-peak noise
can only be estimated by statistical methods. Tab le 5 is useful for
estimating the probabilities of exceeding various peak values, given
the rms value.
Table 5. Estimation of Peak-to-Peak Noise
% of Time That Noise Exceeds
Peak-to-Peak Value
Nominal Peak-to-Peak Value
2 × rms 32
4 × rms 4.6
6 × rms 0.27
8 × rms 0.006
USE WITH OPERATING VOLTAGES OTHER THAN 3 V
The ADXL326 is tested and specified at VS = 3 V; however, it can be
powered with V
performance parameters change as the supply voltage is varied.
The ADXL326 output is ratiometric; therefore, the output
sensitivity (or scale factor) varies proportionally to the supply
voltage. At V
= 2 V, the output sensitivity is typically 38 mV/g.
At V
S
The zero g bias output is also ratiometric; therefore, the zero g
output is nominally equal to V
The output noise is not ratiometric but is absolute in volts;
therefore, the noise density decreases as the supply voltage
increases. This is because the scale factor (mV/g) increases while
the noise voltage remains constant. At V
axis noise density is typically 120 µg/√Hz, while at V
X- and Y-axis noise density is typically 270 µg/√Hz.
as low as 1.8 V or as high as 3.6 V. Note that some
S
= 3.6 V, the output sensitivity is typically 68 mV/g.
S
/2 at all supply voltages.
S
= 3.6 V, the X- and Y-
S
= 2 V, the
S
Page 12
ADXL326
A
X
Y
Z
Self test response in g is roughly proportional to the square of
the supply voltage. However, when ratiometricity of sensitivity
is factored in with supply voltage, the self test response in volts
is roughly proportional to the cube of the supply voltage.
For example, at V
= 3.6 V, the self test response for the
S
ADXL326 is approximately −107 mV for the X axis, +107 mV
for the Y axis, and +181 mV for the Z axis. At V
= 2 V, the self
S
test response is approximately −18 mV for the X axis, +18 mV
for the Y axis, and −31 mV for the Z axis.
The supply current decreases as the supply voltage decreases.
Typical current consumption at V
typical current consumption at V
= 3.6 V is 375 µA, and
S
= 2 V is 200 µA.
S
X
= –1g
OUT
Y
= 0g
OUT
Z
= 0g
OUT
AXES OF ACCELERATION SENSITIVITY
Z
A
Y
T
O
P
A
X
07948-025
Figure 23. Axes of Acceleration Sensitivity (Corresponding Output Voltage
Increases When Accelerated Along the Sensitive Axis)
TOP
GRAVITY
= 0g
OUT
OUT
OUT
= 0g
= 1g
= 0g
TOP
TOP
TOP
X
= 1g
OUT
Y
= 0g
OUT
Z
= 0g
OUT
X
OUT
Y
= –1g
OUT
Z
= 0g
OUT
T
O
P
= 0g
X
OUT
Y
= 0g
OUT
Z
= 1g
OUT
= 0g
X
OUT
Y
= 0g
OUT
Z
= –1g
OUT
07948-026
Figure 24. Output Response vs. Orientation to Gravity
Rev. 0 | Page 12 of 16
Page 13
ADXL326
C
LAYOUT AND DESIGN RECOMMENDATIONS
The recommended soldering profile is shown in Figure 25, followed by a description of the profile features in Table 6. The recommended
PCB layout or solder land drawing is shown in Figure 26.
CRITICAL ZONE
t
L
T
TO T
L
P
TEMPERATURE
t
T
P
T
L
T
SMAX
T
SMIN
PREHEAT
RAMP-UP
t
S
P
RAMP-DOWN
t25°C TO PE AK
TIME
07948-002
Figure 25. Recommended Soldering Profile
Table 6. Recommended Soldering Profile
Profile Feature Sn63/Pb37 Pb-Free
Average Ramp Rate (TL to TP) 3°C/sec maximum 3°C/sec maximum
Preheat
Minimum Temperature (T
Maximum Temperature (T
Time (T
T
to TL
SMAX
SMIN
to T
), tS 60 sec to 120 sec 60 sec to 180 sec
SMAX
) 100°C 150°C
SMIN
) 150°C 200°C
SMAX
Ramp-Up Rate 3°C/sec maximum 3°C/sec maximum
Time Maintained Above Liquidous (TL)
Liquidous Temperature (TL) 183°C 217°C
Time (tL) 60 sec to 150 sec 60 sec to 150 sec
Peak Temperature ( TP) 240°C + 0°C/−5°C 260°C + 0°C/−5°C
Time Within 5°C of Actual Peak Temperature (tP) 10 sec to 30 sec 20 sec to 40 sec
Ramp-Down Rate 6°C/sec maximum 6°C/sec maximum
Time 25°C to Peak Temperature 6 minutes maximum 8 minutes maximum
0.50
MAX
0.650.325
4
0.35
MAX
1.95
ENTER PAD IS NO T
INTERNALLY CONNECTED
BUT SHOULD BE SOLDERED
FOR MECHANICAL INTEGRIT Y
1.95
DIMENSIONS SHOWN IN MILLIMETERS
0.65
0.325
4
07948-004
Figure 26. Recommended PCB Layout
Rev. 0 | Page 13 of 16
Page 14
ADXL326
OUTLINE DIMENSIONS
0.20 MIN
13
12
EXPOSED
PAD
(BOTTOM VIE W)
9
8
1.95 BSC
FOR PROPER CONNECTION OF
THE EXPOSED PAD, REFER TO
THE PIN CONF IGURATIO N AND
FUNCTION DES CRIPTIONS
SECTION OF THIS DATA SHEET.
PIN 1
INDICATOR
1.50
1.45
1.40
SEATING
PLANE
TOP VIEW
0.20 MIN
4.15
4.00 SQ
3.85
0.65 BSC
0.55
0.50
0.45
0.05 MAX
0.02 NOM
0.35
COPLANARITY
0.30
0.25
*
0.05
STACKED DIE WI TH GLASS SEAL.
Figure 27. 16-Lead Lead Frame Chip Scale Package [LFCSP_LQ]
4 mm × 4 mm Body, 1.45 mm Thick Quad
(CP-16-5a*)
Dimensions shown in millimeters
ORDERING GUIDE
Model Measurement Range Specified Voltage Temperature Range Package Description Package Option
ADXL326BCPZ1 ±16 g 3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a
ADXL326BCPZ–RL1 ±16 g3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a
ADXL326BCPZ–RL71 ±16 g3 V −40°C to +85°C 16-Lead LFCSP_LQ CP-16-5a
EVAL-ADXL326Z1 Evaluation Board
1
Z = RoHS Compliant Part.
PIN 1
INDICATOR
16
1
2.43
1.75 SQ
1.08
4
5
112008-A
Rev. 0 | Page 14 of 16
Page 15
ADXL326
NOTES
Rev. 0 | Page 15 of 16
Page 16
ADXL326
NOTES
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