High performance, single/dual axis accelerometer on a
single IC chip
5 mm × 5 mm × 2 mm LCC package
1 mg resolution at 60 Hz
Low power: 700 µA at V
High zero g bias stability
High sensitivity accuracy
–40°C to +125°C temperature range
X and Y axes aligned to within 0.1° (typical)
BW adjustment with a single capacitor
Single-supply operation
3500 g shock survival
APPLICATIONS
Vehicle Dynamic Control (VDC)/Electronic Stability Program
(ESP) systems
Electronic chassis control
Electronic braking
Platform stabilization/leveling
Navigation
Alarms and motion detectors.
High accuracy, 2-axis tilt sensing
= 5 V (typical)
S
Single/Dual Axis Accelerometer
ADXL103/ADXL203
GENERAL DESCRIPTION
The ADXL103/ADXL203 are high precision, low power,
complete single and dual axis accelerometers with signal
conditioned voltage outputs, all on a single monolithic IC. The
ADXL103/ADXL203 measures acceleration with a full-scale
range of ±1.7 g . The ADXL103/ADXL203 can measure both
dynamic acceleration (e.g., vibration) and static acceleration
(e.g., gravity).
The typical noise floor is 110 μg/√Hz, allowing signals below
1 mg (0.06° of inclination) to be resolved in tilt sensing
applications using narrow bandwidths (<60 Hz).
The user selects the bandwidth of the accelerometer using
capacitors C
and CY at the X
X
0.5 Hz to 2.5 kHz may be selected to suit the application.
The ADXL103 and ADXL203 are available in 5 mm × 5 mm ×
2 mm, 8-pad hermetic LCC packages.
OUT
and Y
pins. Bandwidths of
OUT
FUNCTIONAL BLOCK DIAGRAM
+5V
V
S
ADXL103
C
DC
SENSOR
COMSTX
AC
AMP
DEMOD
Rev. 0
Information furnished by Analog Devices is believed to be accurate and reliable.
However, no responsibility is assumed by Analog Devices for its use, nor for any
infringements of patents or other rights of third parties that may result from its use.
Specifications subject to change without notice. No license is granted by implication
or otherwise under any patent or patent rights of Analog Devices. Trademarks and
registered trademarks are the property of their respective owners.
Table 1. TA = –40°C to +125°C, VS = 5 V, CX = CY = 0.1 μF, Acceleration = 0 g, unless otherwise noted.
Parameter Conditions Min Typ Max Unit
SENSOR INPUT Each Axis
Measurement Range
Nonlinearity % of Full Scale ±0.5 ±2.5 %
Package Alignment Error ±1 Degrees
Alignment Error (ADXL203) X Sensor to Y Sensor ±0.1 Degrees
Cross Axis Sensitivity ±2 ±5 %
SENSITIVITY (Ratiometric)
Sensitivity at X
Sensitivity Change due to Temperature
ZERO g BIAS LEVEL (Ratiometric) Each Axis
0 g Voltage at X
Initial 0 g Output Deviation from Ideal VS = 5 V, 25°C ±25 mg
0 g Offset vs. Temperature ±0.1 mg/°C
NOISE PERFORMANCE
Output Noise < 4 kHz, VS = 5 V, 25°C 1 6 mV rms
Noise Density @25°C 110 µg/√Hz rms
FREQUENCY RESPONSE
CX, CY Range
R
Tolerance 24 32 40 kΩ
FILT
5
Sensor Resonant Frequency 5.5 kHz
SELF TEST
6
Logic Input Low 1 V
Logic Input High 4 V
ST Input Resistance to Ground 30 50 kΩ
Output Change at X
OUTPUT AMPLIFIER
Output Swing Low No Load 0.3 V
Output Swing High No Load 4.5 V
POWER SUPPLY
Operating Voltage Range 3 6 V
Quiescent Supply Current 0.7 1.1 mA
Turn-On Time
OUT
OUT
, Y
, Y
OUT
1
OUT
4
±1.7
2
Each Axis
VS = 5 V 940 1000 1060 mV/g
3
VS = 5 V ±0.3 %
VS = 5 V 2.4 2.5 2.6 V
g
0.002 10 µF
, Y
OUT
OUT
7
Self Test 0 to 1 400 750 1100 mV
20 ms
1
Guaranteed by measurement of initial offset and sensitivity.
2
Sensitivity is essentially ratiometric to VS. For VS = 4.75 V to 5.25 V, sensitivity is 186 mV/V/g to 215 mV/V/g.
3
Defined as the output change from ambient-to-maximum temperature or ambient-to-minimum temperature.
4
Actual frequency response controlled by user-supplied external capacitor (CX, CY).
5
Bandwidth = 1/(2 × π × 32 kΩ × C). For CX, CY = 0.002 µF, Bandwidth = 2500 Hz. For CX, CY = 10 µF, Bandwidth = 0.5 Hz. Minimum/maximum values are not tested.
6
Self-test response changes cubically with VS.
7
Larger values of CX, CY will increase turn-on time. Turn-on time is approximately 160 × CX or CY + 4 ms, where CX, CY are in µF.
All minimum and maximum specifications are guaranteed. Typical specifications are not guaranteed.
Rev. 0 | Page 3 of 12
Page 4
ADXL103/ADXL203
ABSOLUTE MAXIMUM RATINGS
Table 2. ADXL103/ADXL203 Stress Ratings
Parameter Rating
Acceleration (Any Axis, Unpowered) 3,500 g
Acceleration (Any Axis, Powered) 3,500 g
Drop Test (Concrete Surface) 1.2 m
V
S
All Other Pins
–0.3 V to +7.0 V
(COM – 0.3 V) to
+ 0.3 V)
(V
S
Output Short-Circuit Duration
(Any Pin to Common) Indefinite
Operating Temperature Range –55°C to +125°C
Storage Temperature –65°C to +150°C
Stresses above those listed under Absolute Maximum Ratings
may cause permanent damage to the device. This is a stress
rating only; functional operation of the device at these or any
other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
T
P
T
L
T
SMAX
RAMP-UP
Table 3. Package Characteristics
Package Type θ
8-Lead CLCC 120°C/W 20°C/W <1.0 gram
t
P
CRITICAL ZONE
t
L
T
TO T
L
JA
θ
JC
Device Weight
P
T
SMIN
TEMPERATURE
t
S
PREHEAT
t
25°C TO PEAK
TIME
RAMP-DOWN
03757-0-002
Condition
Profile Feature
Sn63/Pb37 Pb Free
Average Ramp Rate (TL to TP) 3°C/second Max
Preheat
• Minimum Temperature (T
• Minimum Temperature (T
• Time (T
T
to T
SMAX
to T
SMAX
) (tS)
SMIN
L
•Ramp-Up Rate
SMIN
SMAX
)
)
100°C 150°C
150°C 200°C
60–120 seconds 60–150 seconds
3°C/second
Time Maintained above Liquidous (TL)
• Liquidous Temperature (T
• Time (t
)
L
)
L
183°C 217°C
60–150 seconds 60–150 seconds
Peak Temperature (TP) 240°C +0°C/–5°C 260°C +0°C/–5°C
Time within 5°C of Actual Peak Temperature (tP) 10–30 seconds 20–40 seconds
Ramp-Down Rate 6°C/second Max
Time 25°C to Peak Temperature 6 minutes Max 8 minutes Max
Figure 2. Recommended Soldering Profile
Rev. 0 | Page 4 of 12
Page 5
ADXL103/ADXL203
TYPICAL PERFORMANCE CHARACTERISTICS
(VS = 5 V for all graphs, unless otherwise noted.)
25
30
20
15
10
5
PERCENT OF POPULATION (%)
0
–0.10
–0.08
–0.06
–0.04
–0.02
VOLTS
0
0.02
0.04
Figure 3. X Axis Zero g Bias Deviation from Ideal at 25°C
30
25
20
15
10
0.06
0.08
0.10
03757-0-010
25
20
15
10
PERCENT OF POPULATION (%)
5
0
–0.10
–0.08
–0.06
–0.04
–0.02
VOLTS
0
0.02
0.04
Figure 6. Y Axis Zero g Bias Deviation from Ideal at 25°C
25
20
15
10
0.06
0.08
03757-0-013
0.10
PERCENT OF POPULATION (%)
5
0.60
0.70
03757-0-011
0.80
0
–0.80
–0.70
–0.60
–0.40
–0.30
–0.50
–0.20
–0.10
mg/°C
0
0.10
0.20
0.30
0.40
0.50
Figure 4. X Axis Zero g Bias Tempco
40
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
1.05
03757-0-012
1.06
0
0.94
0.95
0.96
0.98
0.99
1.00
1.01
1.02
1.03
0.97
VOLTS/
g
1.04
Figure 5. X Axis Sensitivity at 25°C
5
PERCENT OF POPULATION (%)
0.60
0.70
03757-0-014
0.80
0
–0.80
–0.70
–0.60
–0.40
–0.30
–0.50
0
0.20
0.10
0.30
0.40
–0.20
–0.10
mg/°C
0.50
Figure 7. Y Axis Zero g Bias Tempco
40
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
1.05
03757-0-015
1.06
0
0.94
0.95
0.96
0.98
0.99
1.00
1.01
1.02
1.03
0.97
VOLTS/
g
1.04
Figure 8. Y Axis Sensitivity at 25°C
Rev. 0 | Page 5 of 12
Page 6
ADXL103/ADXL203
2.60
2.58
2.56
2.54
2.52
2.50
2.48
VOLTAGE (1V/g)
2.46
2.44
2.42
2.40
–40
–50
Figure 9. Zero g Bias vs. Temperature – Parts Soldered to PCB
50
45
40
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
0
40
0
–30
1020305040
–20
–10
TEMPERATURE (°C)
X AXIS NOISE DENSITY (µg/√Hz)
607080
Figure 10. X Axis Noise Density at 25°C
1.03
1.02
1.01
)
g
1.00
0.99
SENSITIVITY (V/
0.98
110
120
03757-0-004
130
90
100
0.97
–50
–40
–30
–20
–10
0
1020305040
TEMPERATURE (°C)
607080
90
100
110
120
03757-0-016
130
Figure 12. Sensitivity vs. Temperature – Parts Soldered to PCB
50
45
40
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
03757-0-007
15014013012011010090807060
0
X AXIS NOISE DENSITY (µg/√Hz)
03757-0-008
15014013012011010090807060
Figure 13. Y Axis Noise Density at 25°C
40
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
0
–4.0
–5.0
–3.0
–2.0
PERCENT SENSITIVITY (%)
–1.0
0
1.0
2.0
3.0
4.0
03757-0-005
5.0
Figure 11. Z vs. X Cross-Axis Sensitivity
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
0
–4.0
–5.0
–3.0
–2.0
PERCENT SENSITIVITY (%)
–1.0
0
1.0
2.0
3.0
4.0
03757-0-006
5.0
Figure 14. Z vs. Y Cross-Axis Sensitivity
Rev. 0 | Page 6 of 12
Page 7
ADXL103/ADXL203
0.9
0.8
0.7
0.6
CURRENT (mA)
0.5
0.4
0.3
45
40
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
0
0.90
VS = 5V
VS = 3V
TEMPERATURE (°C)
Figure 15. Supply Current vs. Temperature
0.40
0.45
0.50
0.55
0.60
0.65
VOLTS
0.70
0.75
0.80
Figure 16. X Axis Self Test Response at 25°C
0.85
0.90
0.95
150100500–50
1.00
03757-0-020
03757-0-017
100
90
80
300
3V
400
70
60
50
40
30
20
PERCENT OF POPULATION (%)
10
0
200
500
5V
03757-0-018
600
700
800
900
µ
A
1000
Figure 18. Supply Current at 25°C
45
40
35
30
25
20
15
10
PERCENT OF POPULATION (%)
5
0.95
03757-0-019
1.00
0
0.40
0.45
0.50
0.55
0.60
0.65
VOLTS
0.70
0.75
0.80
0.85
0.90
Figure 19. Y Axis Self Test Response at 25°C
VOLTAGE (1V/g)
0.85
0.80
0.75
0.70
0.65
0.60
0.55
0.50
–50
–40
–30
–20
–10
0
1020305040
TEMPERATURE (°C)
Figure 17. Self Test Response vs. Temperature
607080
110
120
03757-0-003
130
Figure 20. Turn-On Time – C
, CY = 0.1 µF, Time Scale = 2 ms/div
X
90
100
03757-0-009
Rev. 0 | Page 7 of 12
Page 8
ADXL103/ADXL203
THEORY OF OPERATION
PIN 8
= 1.5V
X
OUT
Y
= 2.5V
OUT
PIN 8
= 2.5V
X
OUT
Y
= 3.5V
OUT
TOP VIEW
(Not to Scale)
PIN 8
X
OUT
Y
OUT
Figure 21. Output Response vs. Orientation
The ADXL103/ADXL203 are complete acceleration measurement systems on a single monolithic IC. The ADXL103 is a
single axis accelerometer, while the ADXL203 is a dual axis
accelerometer. Both parts contain a polysilicon surfacemicromachined sensor and signal conditioning circuitry to
implement an open-loop acceleration measurement architecture. The output signals are analog voltages proportional to
acceleration. The ADXL103/ADXL203 are capable of measuring
both positive and negative accelerations to at least ±1.7 g. The
accelerometer can measure static acceleration forces such as
gravity, allowing it to be used as a tilt sensor.
The sensor is a surface-micromachined polysilicon structure
built on top of the silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured using a differential capacitor that consists of independent
fixed plates and plates attached to the moving mass. The fixed
plates are driven by 180° out-of-phase square waves. Acceleration will deflect the beam and unbalance the differential
capacitor, resulting in an output square wave whose amplitude
is proportional to acceleration. Phase sensitive demodulation
techniques are then used to rectify the signal and determine the
direction of the acceleration.
= 3.5V
= 2.5V
PIN 8
= 2.5V
X
OUT
Y
= 1.5V
OUT
X
= 2.5V
OUT
Y
= 2.5V
OUT
EARTH'S SURFACE
03757-0-021
The output of the demodulator is amplified and brought offchip through a 32 kΩ resistor. At this point, the user can set the
signal bandwidth of the device by adding a capacitor. This
filtering improves measurement resolution and helps prevent
aliasing.
PERFORMANCE
Rather than using additional temperature compensation
circuitry, innovative design techniques have been used to ensure
high performance is built in. As a result, there is essentially no
quantization error or non-monotonic behavior, and
temperature hysteresis is very low (typically less than 10 mg
over the –40°C to +125°C temperature range).
Figure 9 shows the zero g output performance of eight parts (X
and Y axis) over a –40°C to +125°C temperature range.
Figure 12 demonstrates the typical sensitivity shift over
temperature for V
= 5 V, but is still very good over the specified range; it is
V
S
typically better than ±1% over temperature at V
= 5 V. Sensitivity stability is optimized for
S
= 3 V.
S
Rev. 0 | Page 8 of 12
Page 9
ADXL103/ADXL203
APPLICATIONS
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 µF capacitor, CDC, will
adequately decouple the accelerometer from noise on the power
supply. However in some cases, particularly where noise is present at the 140 kHz internal clock frequency (or any harmonic
thereof), noise on the supply may cause interference on the
ADXL103/ADXL203 output. If additional decoupling is needed,
a 100 Ω (or smaller) resistor or ferrite beads may be inserted in
the supply line of the ADXL103/ADXL203. Additionally, a
larger bulk bypass capacitor (in the 1 µF to 22 µF range) may be
added in parallel to C
SETTING THE BANDWIDTH USING CX AND C
DC
.
Y
The ADXL103/ADXL203 has provisions for bandlimiting the
and Y
X
OUT
pins. Capacitors must be added at these pins to
OUT
implement low-pass filtering for antialiasing and noise
reduction. The equation for the 3 dB bandwidth is
= 1/(2π(32 kΩ) × C
F
–3 dB
(X, Y)
)
or more simply,
= 5 µF/C
F
–3 dB
The tolerance of the internal resistor (R
(X, Y)
) can vary typically as
FILT
much as ±25% of its nominal value (32 kΩ); thus, the bandwidth will vary accordingly. A minimum capacitance of 2000 pF
and CY is required in all cases.
for C
X
Table 4. Filter Capacitor Selection, CX and C
Bandwidth (Hz) Capacitor (µF)
1 4.7
10 0.47
50 0.10
100 0.05
200 0.027
500 0.01
Y
SELF TEST
The ST pin controls the self-test feature. When this pin is set to
V
, an electrostatic force is exerted on the beam of the accelero-
S
meter. The resulting movement of the beam allows the user to
test if the accelerometer is functional. The typical change in
output will be 750 mg (corresponding to 750 mV). This pin may
be left open-circuit or connected to common in normal use.
The ST pin should never be exposed to voltage greater than
+ 0.3 V. If the system design is such that this condition
V
S
cannot be guaranteed (i.e., multiple supply voltages present), a
clamping diode between ST and VS is recommended.
low V
F
DESIGN TRADE-OFFS FOR SELECTING FILTER
CHARACTERISTICS: THE NOISE/BW TRADE-OFF
The accelerometer bandwidth selected will ultimately
determine the measurement resolution (smallest detectable
acceleration). Filtering can be used to lower the noise floor,
which improves the resolution of the accelerometer. Resolution
is dependent on the analog filter bandwidth at X
OUT
and Y
The output of the ADXL103/ADXL203 has a typical bandwidth
of 2.5 kHz. The user must filter the signal at this point to limit
aliasing errors. The analog bandwidth must be no more than
half the A/D sampling frequency to minimize aliasing. The
analog bandwidth may be further decreased to reduce noise and
improve resolution.
The ADXL103/ADXL203 noise has the characteristics of white
Gaussian noise, which contributes equally at all frequencies and
is described in terms of µg/√Hz (i.e., the noise is proportional to
the square root of the accelerometer’s bandwidth). The user
should limit bandwidth to the lowest frequency needed by the
application in order to maximize the resolution and dynamic
range of the accelerometer.
With the single pole roll-off characteristic, the typical noise of
the ADXL103/ADXL203 is determined by
)6.1()/µg110(××=BWHzrmsNoise
At 100 Hz, the noise is
g4.1)6.1100()/µg110(mHzrmsNoise=××=
Often, the peak value of the noise is desired. Peak-to-peak noise
can only be estimated by statistical methods. Table 5 is useful
for estimating the probabilities of exceeding various peak
values, given the rms value.
Table 5. Estimation of Peak-to-Peak Noise
% of Time That Noise Will Exceed
Peak-to-Peak Value
2 × RMS 32
4 × RMS 4.6
6 × RMS 0.27
8 × RMS 0.006
Nominal Peak-to-Peak Value
OUT
.
Rev. 0 | Page 9 of 12
Page 10
ADXL103/ADXL203
Peak-to-peak noise values give the best estimate of the
uncertainty in a single measurement. Table 6 gives the typical
noise output of the ADXL103/ADXL203 for various C
values.
USING THE ADXL103/ADXL203 WITH OPERATING
VOLTAGES OTHER THAN 5 V
The ADXL103/ADXL203 is tested and specified at VS = 5 V;
however, it can be powered with V
6 V. Some performance parameters will change as the supply
voltage is varied.
The ADXL103/ADXL203 output is ratiometric, so the output
sensitivity (or scale factor) will vary proportionally to supply
voltage. At V
= 3 V the output sensitivity is typically 560 mV/g.
S
The zero g bias output is also ratiometric, so the zero g output is
nominally equal to V
/2 at all supply voltages.
S
The output noise is not ratiometric but is absolute in volts;
therefore, the noise density decreases as the supply voltage
increases. This is because the scale factor (mV/g) increases
while the noise voltage remains constant. At V
density is typically 190 µg/√Hz.
as low as 3 V or as high as
S
= 3 V, the noise
S
and CY
X
USING THE ADXL203 AS A DUAL-AXIS TILT
SENSOR
One of the most popular applications of the ADXL203 is tilt
measurement. An accelerometer uses the force of gravity as an
input vector to determine the orientation of an object in space.
An accelerometer is most sensitive to tilt when its sensitive axis
is perpendicular to the force of gravity, i.e., parallel to the earth’s
surface. At this orientation, its sensitivity to changes in tilt is
highest. When the accelerometer is oriented on axis to gravity,
i.e., near its +1 g or –1 g reading, the change in output
acceleration per degree of tilt is negligible. When the
accelerometer is perpendicular to gravity, its output will change
nearly 17.5 mg per degree of tilt. At 45°, its output changes at
only 12.2 mg per degree and resolution declines.
Dual-Axis Tilt Sensor: Converting Acceleration to Tilt
When the accelerometer is oriented so both its X axis and Y axis
are parallel to the earth’s surface, it can be used as a 2-axis tilt
sensor with a roll axis and a pitch axis. Once the output signal
from the accelerometer has been converted to an acceleration
that varies between –1 g and +1 g, the output tilt in degrees is
calculated as follows:
PITCH = ASIN(A
ROLL = ASIN(A
Be sure to account for overranges. It is possible for the
accelerometers to output a signal greater than ±1 g due to
vibration, shock, or other accelerations.
/1 g)
X
/1 g)
Y
Self-test response in g is roughly proportional to the square of
the supply voltage. However, when ratiometricity of sensitivity
is factored in with supply voltage, self-test response in volts is
roughly proportional to the cube of the supply voltage. So at
= 3 V, the self-test response will be approximately equivalent
V
S
to 150 mV, or equivalent to 270 mg (typical).
The supply current decreases as the supply voltage decreases.
Typical current consumption at V
= 3 V is 450 µA.
DD
Rev. 0 | Page 10 of 12
Page 11
ADXL103/ADXL203
PIN CONFIGURATIONS AND FUNCTIONAL DESCRIPTIONS
ADXL103E
TOP VIEW
(Not to Scale)
V
S
ST
DNC
COM
8
1
2
3
DNC
X
7
OUT
DNC
6
5
DNC
4
03757-0-022
Figure 22. ADXL103 8-Lead CLCC
Table 7. ADXL103 8-Lead CLCC Pin Function Descriptions
Pin No. Mnemonic Description
1 ST Self Test
2 DNC Do Not Connect
3 COM Common
4 DNC Do Not Connect
5 DNC Do Not Connect
6 DNC Do Not Connect
7 X
8 V
OUT
S
X Channel Output
3 V to 6 V
Table 8. ADXL203 8-Lead CLCC Pin Function Descriptions
Pin No. Mnemonic Description
1 ST Self Test
2 DNC Do Not Connect
3 COM Common
4 DNC Do Not Connect
5 DNC Do Not Connect
6 Y
7 X
8 V
ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the
human body and test equipment and can discharge without detection. Although this product features
proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy
electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance
degradation or loss of functionality.