FEATURES
Dual Measurement Channels
Precision Four-Quadrant-Per-Pin V/I Source
Programmable Current Force Ranges
ⴞ204.8 A and ⴞ2.048 mA
Five Current Measurement Ranges
204.8 nA to ⴞ2.048 mA
Output Voltage Range: –4 V to +9 V
Power Supplies: +15 V, +5 V, and –10 V
44-Lead Plastic J-Leaded Chip Carrier Package
APPLICATIONS
Can Be Used with the AD53032 DCL to Extend Current
Force Range to 35 mA
GENERAL DESCRIPTION
The AD53508 is a custom dual-channel parametric measurement circuit for use in semiconductor automatic test equipment.
It contains programmable modes to force a pin voltage and
measure its current or to integrate and hold a current value.
Alternatively, a current can be forced and the compliance voltage measured.
FUNCTIONAL BLOCK DIAGRAM
VM
IM
SENSE
VFS4
IF
MAIN
S5
1.25R
DIFF
1.25R
MEAS
DAC1
DAC2
DSR
OUT
+2.5V
S1
CON
S6
S7
ENABLE
OUTPUT
AD53508
S2
S3
The device provides a remote force/sense capability to ensure
accuracy at the tester pin. A guard output is available to drive
the shield of a force/sense pair.
Two input references per channel permit controlled switching to
different voltage or current levels. The forced voltage or current
levels can be switched back to the measurement system to read
back the analog levels for system calibration.
The circuit is powered by +15 V, +5 V and –10 V supplies and
dissipates 230 mW nominally.
Recommended Use of the PPMU with AD53032 DCL
The PPMU can be used with the AD53032 DCL to extend the
Current Force Range beyond 2 mA VCOM can be set to the
maximum spec allowance of 8 V, which would allow the maximum Current Force of IOL of 35 mA. The combination of the
PPMU and the DCL would have a few benefits including:
1. Accurately measuring low currents.
2. Can take parallel measurements by using one PMU per pin.
EXT RC
R
R
40pF
S10
INTEGRATE
1k⍀
2mA
10k⍀
200A
UNITY
S8
S9
C1
INT/IM
S11
R1
R2
S12
S13
S14
S15
S16
GUARD
S18
SENSE
FORCE
S17
GUARD
REV. 0
Information furnished by Analog Devices is believed to be accurate and
reliable. However, no responsibility is assumed by Analog Devices for its
use, nor for any infringements of patents or other rights of third parties
which may result from its use. No license is granted by implication or
otherwise under any patent or patent rights of Analog Devices.
Gain (± 0.1% Tolerance)0.9991.001V/V
Offset Error± 15mV
Gain Nonlinearity (Relative to Endpoints)± 0.02% of Span
Current Measure CMRR (at MEAS_OUT)± 0.31mV/V
DRIFT
Gain Error Temperature Coefficient± 20ppm (PV
Offset Drift± 100µV/°C
CURRENT FORCE/MEASURE MODE RANGES
0 (High)± 2.0mA
1 (Low)± 200µA
ACCURACY—HIGH RANGE
Transconductance (± 3% Tolerance)Force Mode0.7760.80.824mA/V
Transresistance (± 3% Tolerance)Measure Mode1.211.251.29V/mA
Offset Error± 40µA
Gain Nonlinearity (Relative to Endpoints)± 0.05% of Span
Output Compliance Voltage-Induced
Transconductance/ErrorForce Mode–0.2+0.4µA/V
DRIFT—HIGH RANGE
Gain Error Temperature Coefficient+10/–60ppm (PV
Offset Drift± 400nA/°C
ACCURACY—LOW RANGE
Transconductance (± 3% Tolerance)Force Mode77.68082.4µA/V
Transresistance (± 3% Tolerance)Measure Mode12.112.512.9V/mA
Offset Error± 4µA
Gain Nonlinearity (Relative to Endpoints)± 0.05% of Span
Output Compliance Voltage-Induced
Transconductance/ErrorForce Mode–0.02+0.04µA/V
DRIFT—LOW RANGE
Gain Error Temperature Coefficient+10/–60ppm (PV
Offset Drift± 40nA/°C
CURRENT MEASURE INTEGRATE MODE RANGES
High± 20.0µA
Medium± 2.0µA
Low± 200nA
ACCURACY—HIGH RANGE
Transresistance Error (± 3% Tolerance)0.1210.1250.129V/µA
Offset Error± 400nA
Gain Nonlinearity (Relative to Endpoints)± 0.05% of Span
Output Compliance Voltage-Induced Transresistance Error± 2.5nA/V of Output
DRIFT—HIGH RANGE
Gain Error Temperature Coefficient± 20ppm MV/°C
Offset Drift± 2nA/°C
ACCURACY—MEDIUM RANGE
Transresistance Error (± 3% Tolerance)1.211.251.29V/µA
Offset Error± 40nA
Gain Nonlinearity (Relative to Endpoints)± 0.05% of Span
Output Compliance Voltage-Induced Transresistance Error± 0.25nA/V of Output
DRIFT— MEDIUM RANGE
Gain Error Temperature Coefficient± 20ppm MV/°C
Offset Drift± 250pA/°C
(TA = 25ⴗC, rated power supplies unless otherwise noted)
1
or MV)/°C
or MV)/°C
or MV)/°C
–2–
REV. 0
Page 3
AD53508
ParameterConditionMinTypMaxUnit
ACCURACY—LOW RANGE
Transresistance Error (± 3% Tolerance)0.01210.01250.0129V/nA
Offset Error± 4nA
Gain Nonlinearity (Relative to Endpoints)± 0.05% of Span
Output Compliance Voltage-Induced Transresistance Error± 0.025nA/V of Output
DRIFT—LOW RANGE
Gain Error Temperature Coefficient± 20ppm MV/°C
Offset Drift± 70pA/°C
DISABLE MODE
2
Voltage Swing, ± 2 mA Range
± 2 mA Drive–4+9V
± 100 µA Drive–5+12V
ACCURACY
Gain (± 0.1% Tolerance)0.9991.001V/V
Offset Error± 15mV
Gain Nonlinearity (Relative to Endpoints)± 0.02% of Span
Current Measure CMRR (at MEAS_OUT)± 0.31mV/V
DRIFT
Gain Error Temperature Coefficient± 20ppm (PV or
Offset Drift± 100µV/°C
OTHER SPECIFICATIONS
Power Supply Rejection Ratiof < 40 Hz, V
f < 40 Hz, V
f = 40 kHz, V
f = 40 kHz, V
CURRENT MEASURE HOLD MODE LEAKAGET
CROSSTALK
3
= +70°C± 1.2nA
AMB
CC
EE
CC
EE
70dB
60dB
35dB
25dB
± 0.02% of Span
SETTLING TIMES TO 0.01%
Voltage Force and Guard VoltageC
Current Force (200 µA Range)Z
MEAS_OUT PinC
= 100 pF20µs
LOAD
C
= 2000 pF2ms
LOAD
= 100 pF储50 kΩ50µs
LOAD
= 20 pF2µs
LOAD
SHORT CIRCUIT CURRENT LIMIT MAGNITUDEAny Output Except Guards8.520mA
GUARD SCC LIMIT MAGNITUDE2.510mA
GUARD OFFSET (FROM SENSE INPUT PIN)–65–250mV
IB (DAC1, DAC2) CURRENT± 1.0µA
DIGITAL INPUTS
V
IH
V
IL
2.4V
0.8V
IIN (Input leakage current)10µA
POWER SUPPLIES
VCC (Positive Analog Supply Voltage)14.015.015.75V
VEE (Negative Analog Supply Voltage)–10.5–10.0–9.0V
V
(Logic Supply Voltage)4.755.05.25V
DD
ICC (Positive Analog Supply Current)515mA
I
(Negative Analog Supply Current)–15–5mA
EE
IDD (Logic Supply Current Is 0 with Inputs at Rails,
Output connected: DAC2 and 2 mA range selected, unconditionally.
3
f < 40 Hz, both channels in current force mode; other channel output voltage swinging rail to rail.
Specifications subject to change without notice.
1
MV)/°C
–3–REV. 0
Page 4
AD53508
WARNING!
ESD SENSITIVE DEVICE
ABSOLUTE MAXIMUM RATINGS*
(TA = 25°C unless otherwise noted)
MinMaxUnit Condition
VDD to VEE–0.3+26.4V
VCC to VEE–0.3+26.4V
VDD to DGND–0.3+6V
Digital Inputs to DGND –0.3VCC+0.3 V
Power Dissipation700mWT
≤ +75°C
A
Operating Temperature
Range2570°C
Storage Temperature–60+125°C
Lead Temperature+300°CSoldering (10 sec)
Force/Sense OutputsVEE–0.8 VCC+0.8 VOr 75 mA,
Whichever Is Less
*
Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. These are stress ratings only; functional operation of
the device at these or any other conditions above those indicated in the operational
sections of this specification is not implied. Exposure to absolute maximum rating
conditions for extended periods may affect device reliability.
ORDERING GUIDE
TemperaturePackagePackage
ModelRangeDescriptionOption
AD53508JP25°C to 70°CPlastic LeadedP-44A
Chip Carrier
PIN CONFIGURATION
B
2.5
DAC2ADSR
PIN 1
IDENTIFIER
CON A*
VERIFY*
OUTPUT
B
DAC2
DAC1
CON B*
RANGE1 B*IRANGE0 B*
I
OUTPUT
RC B
EXT
C1 B
HOLD B*
B
R1
39
38
37
36
35
34
33
32
31
30
29
B*
INTEG
R2
B
B
SENSE
FORCE
B
GUARD
B
OUT B
MEAS
VDD
CON B*
M
DIGGND
FORCE
I B*
EN B*
FORCE
SEL B*
DAC1
* = ACTIVE LO
GUARD
MEAS
M
FORCE
FORCE
DAC1
R2
SENSE
FORCE
OUT A
CON A*
EN A*
SEL A*
VCC
VEE
I A*
A
A
EXT RC A
C1
R1 A
A*
A*
HOLD
INTEG
DAC1
AD53508
TOP VIEW
(Not to Scale)
RANGE0 A*IRANGE1 A*
I
6 5 4 3 2 1 44 43 42 41 40
7
A
A
8
9
A
10
A
11
12
13
14
15
16
17
18 19 20 21 22 23 24 25 26 27 28
PIN FUNCTION DESCRIPTIONS
Pin NameDescription
1DSR_2.52.5 V Reference Input
2DAC2_AFirst of Two Switchable Inputs
3DAC1_ASecond of Two Switchable Inputs
4EXT_RC_AExternal R
and C Common
S
5C1_AExternal Capacitor
6R1_AExternal Resistor
7R2_AExternal Resistor
8SENSE_ASense Input
9FORCE_AForce Output
10GUARD_AGuard Drive Output
11MEAS_OUT_AMeasurement Output
12VCC+15 V Analog Supply
13M_CON_A*Connect Measure Output to Bus
14VEE–10 V Analog Supply
15FORCE_I_A*Force V (When Hi) or I (When Lo)
16FORCE_EN_A*Control Input
17DAC1_SEL_A*Select DAC1 (When Lo) or DAC2
18INTEG_A*Control Input
19HOLD_A*Control Input
20I_RANGE0_A*Select 2 mA Range (Active Lo)
21I_RANGE1_A*Select 200 µA Range (Active Lo)
22VERIFY*Measure Forced Voltage or Current
23OUTPUT_CON_A*Connect Pin Drive (Active Lo)
24OUTPUT_CON_B*Connect Pin Drive (Active Lo)
25I_RANGE1_B*Select 200 µA Range (Active Lo)
26I_RANGE0_B*Select 2 mA Range (Active Lo)
27HOLD_B*Control Input
28INTEG_B*Control Input
29DAC1_SEL_B*Select DAC1 (When Lo) or DAC2
30FORCE_EN_B*Control Input
31FORCE_I_B*Force V (When Hi) or I (When Lo)
32DIGGNDDigital Ground
33M_CON_B*Connect Measure Output to Bus
34VDD+5 V Digital Supply
35MEAS_OUT_BMeasurement Output
36GUARD_BGuard Drive Output
37FORCE_BForce Output
38SENSE_BSense Input
39R2_BExternal Resistor
40R1_BExternal Resistor
41C1_BExternal Capacitor
42EXT_RC_BExternal R
and C Common
S
43DAC1_BSecond of Two Switchable Inputs
44DAC2_BFirst of Two Switchable Inputs
= Active Lo
*
CAUTION
ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily
accumulate on the human body and test equipment and can discharge without detection.
Although the AD53508 features proprietary ESD protection circuitry, permanent damage may
occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD
precautions are recommended to avoid performance degradation or loss of functionality.
–4–
REV. 0
Page 5
AD53508
Table I. Data Table
Data Latch BitsS13,S15,
S1S2S3S4S5S6S7S9S17S8S10S14S16S11S12S18
The PPMU can be used in two modes: 1. VOLTAGE FORCE
with CURRENT MEASURE or VERIFY CURRENT FORCE;
2. CURRENT FORCE with VOLTAGE MEASURE or
VERIFY VOLTAGE FORCE. In both modes the following
setup is recommended:
1. The value of the external integrate capacitor (EXT_RC to
C1) is 10 nF.
2. MEAS_OUT pin is loaded with 1 MΩ to ground.
3. V
= +15.0 V, VDD = +4.5 V, DIGGND = 0.0 V,
CC
V
= –10 V, DSR = 2.5 V unless otherwise stated.
EE
4. A 10 Ω resistor in series with the FORCE pin.
5. A 1 kΩ resistor in series with the SENSE pin.
IN VOLTAGE FORCE WITH CURRENT MEASURE OR
VERIFY CURRENT FORCE
To measure the leakage in the current measure and hold mode,
the PPMU has to be into the Force Voltage/Measure Current
Integrate mode.
1. The FORCE_A (Force Output) pin has to be programmed
to +9 V.
2. The PPMU has to be programmed to INTEGRATE mode.
3. The PPMU has to be programmed to HOLD mode.
4. Sample MEAS_OUT.
5. Wait 100 ms.
6. Sample MEAS_OUT again.
7. The difference between 2 and 4 must be less than 15 mV.
The linearity tests for forcing voltage are as follows (at the
FORCE pin):
1. The four ranges of CURRENT MEASURE ranges (200 nA,
20 µA, 200 µA, and 2 mA) correspond to F1, F2, F3, and F4.
2. The endpoints of the linearity curve are determined by –full
scale (or LOW), and the +full scale (or HIGH) readings at
the same FORCE pin current.
3. Using these endpoints, gain nonlinearity is computed and
tested at the 1/4 scale, 1/2 scale, and 3/4 scale points.
4. Computations for F1 are:
F1 × 0.25 = LOW + 1 × (HIGH – LOW)/4
F1 × 0.50 = LOW + 2 × (HIGH – LOW)/4
F1 × 0.75 = LOW + 3 × (HIGH – LOW)/4
Where LOW = –Full Scale and HIGH = +Full Scale.
The linearity tests for measuring current are as follows (at the
MEAS_OUT pin):
1. The voltage is constant for these measurements.
2. The four ranges (M1, M2, M3, M4) correspond to
CURRENT MEASURE ranges (200 nA, 20 µA, 200 µA,
and 2 mA respectively).
3. The endpoints of the linearity curve are determined by the
–full scale (or LOW), and the +full scale (or HIGH) readings at the same FORCE pin voltage.
4. Using these endpoints, gain nonlinearity is computed and
tested at the 1/4 scale, 1/2 scale, and 3/4 scale points.
The M_CON pin can be used for disconnecting the MEAS_OUT
pin by:
1. Raising M_CON to 2.4 V.
2. Measuring MEAS_OUT (which is loaded with 100 kΩ).
3. MEAS_OUT should ideally be 0 V.
The OUTPUT_CON pin can be used for disconnecting the
DUT by:
1. Disabling the SENSE pin (OUTPUT_CON = 2.4 V).
2. Loading FORCE_OUT with 2 kΩ to ground.
3. Programming the DAC1 input to +FS (+9 V) and measuring
the FORCE_OUT voltage (FV1).
4. Programming the DAC1 input to –FS (–4 V) and measuring the FORCE_OUT voltage (FV2).
5. FV1–FV2 < 1.3 mV.
6. A change of 1.3 mV implies a switch off-resistance of 20 MΩ.
FORCING
VOLTAGE
DAC2
MEAS
DAC1
DSR
OUT
2.5V
S1
CON
S6
S7
ENABLE
OUTPUT
1k⍀
2mA
S8
S9
C1
R1
R2
UNITY
AD53508
S2
S3
VM
IM
SENSE
VF
IF
EXT RC
MAIN
S4
S5
1.25R
DIFF
1.25R
R
R
40pF
S10
INTEGRATE
10k⍀
200A
Figure 2. Guarded Voltage Force/Current Measure, I
–6–
INT/IM
S11
S12
S13
S14
S15
S16
GUARD
RANGE 1
S17
S18
: I ≤ 2 mA
SENSE
FORCE
GUARD
1k⍀
10⍀
TO DUT
REV. 0
Page 7
AD53508
IN CURRENT FORCE WITH VOLTAGE MEASURE OR
VERIFY CURRENT FORCE
The linearity tests for forcing current at the FORCE pin:
1. The FORCE pin is loaded with a voltage source.
2. The two ranges of CURRENT FORCE ranges (2 mA and
200 µA) correspond to F1 and F2. The endpoints of the
linearity curve are determined by full scale (or LOW), and
the full scale (or HIGH) readings at the same FORCE pin
voltage.
3. Using these endpoints, gain nonlinearity is computed and
tested at the 1/4 scale, 1/2 scale, and 3/4 scale points.
4. Computations for F1 are:
F1 × 0.25 = LOW + 1 × (HIGH – LOW)/4
F1 × 0.50 = LOW + 2 × (HIGH – LOW)/4
F1 × 0.75 = LOW + 3 × (HIGH – LOW)/4
Where LOW = –Full Scale and HIGH = +Full Scale.
The linearity test for measuring voltage is as follows (at the
MEAS_OUT pin):
1. The endpoints of the linearity curve are determined by the
–full scale (or LOW), and the +full scale (or HIGH) readings.
2. Using these endpoints, gain nonlinearity is computed and
tested at the 1/4 scale, 1/2 scale, and 3/4 scale points.