
Service Bulletin-17 | Vacuum Capacitors
Measuring of Self Resonance
Frequency
Comet AG Service Bulletin-17 | Vacuum Capacitors
Herrengasse 10 | CH-3137 Flamatt Measuring of Self Resonance Frequency
T +41 31 744 95 00 | pct@comet.tech Issue Date: 01-JUN-2011
pct.comet.tech Page 1 of 4 Replaces: 07-MAY-2004

1. Introduction
The self-inductance of a vacuum capacitor depends mainly on its design and dimensions. It is extremely small
and constant for fixed capacitors ranging from approximately 2 to 10 nH, depending on the type. Variable capacitors have a larger internal inductance, ranging from approx. 6 to 50 nH. This is due to the extended structure, such as the bellows, which connect the movable electrode to the external mounting flange.
The self-resonance frequency of a vacuum capacitor is determined by its capacitance and self-inductance. Detailed data for most capacitors are given on the second page of the data sheets.
2. Measurement the Self Resonance Frequency
The self-resonance frequency as a function of capacitance can be measured with a grid-dip oscillator (manufacturer for example Radiometer Copenhagen). The variable vacuum capacitor is wrapped with aluminium foil
to create a resonance cavity. The foil is secured to the capacitor metal-ceramic seal area by means of a tight
wire or with a rubber band.
A window is cut in the foil (area of approx. 6 cm
2
) in the upper part of the ceramic cylinder for RF coupling of the
coil of the grid-dip meter.
The capacitor is adjusted to the maximum capacitance value, and the grip dip meter is placed in a stable position near to the window and the frequency adjusted slowly until the meter indicates a dip in the display.
Please note: As the Q-factor is very high the dip will be very narrow and can be seen as a
small peak only!
The measurement should be repeated for several different capacitance values.
Comet AG Service Bulletin-17 | Vacuum Capacitors
Herrengasse 10 | CH-3137 Flamatt Measuring of Self Resonance Frequency
T +41 31 744 95 00 | pct@comet.tech Issue Date: 01-JUN-2011
pct.comet.tech Page 2 of 4 Replaces: 07-MAY-2004

3. Calculation of the Self Inductance
With the following formula the self-inductance of the capacitor can be calculated as follows:
Example:
Capacitance = 655 pF
Self-resonance frequency = 39 MHz
Self-inductance 25,4 nH
.
Comet AG Service Bulletin-17 | Vacuum Capacitors
Herrengasse 10 | CH-3137 Flamatt Measuring of Self Resonance Frequency
T +41 31 744 95 00 | pct@comet.tech Issue Date: 01-JUN-2011
pct.comet.tech Page 3 of 4 Replaces: 07-MAY-2004

Led by experience. Driven by curiosity.
Switzerland (Head Office)
Comet AG
Herrengasse 10
CH-3175 Flamatt
T +41 31 744 95 00
United States
Comet Technologies USA, Inc.
541 E. Trimble Road
San José, CA 95131
T +1 408 325 8770
China
Comet Mechanical Equipment (Shanghai) Co. Ltd.
2777 East Jinxiu Road
Building 36, 8th floor
Pudong, Shanghai 201206
T +86 21 6879 9000
Germany
Comet Yxlon GmbH
Plasma Control Technologies
Kellershaustrasse 22
DE-52078 Aachen
T +49 241 936 87 00
Comet Technologies Korea Co., Ltd.
Suwon Venture Plaza Bldg, Room 402
48, Samsung-ro, 168 beon-gil, Yeongtong-gu
Suwon-si, Gyeonggi-do, ZIP 16676
T +82 (0)70 4337 6480
Malaysia
Comet Technologies Malaysia Sdn Bhd
PMT 761 Persiaran Cassie Selatan 3
Taman Perindustrian Batu Kawan
14110 Bandar Cassia
Penang
T +604 588 6516
Taiwan
Comet Solutions Taiwan Ltd.
1F., No. 120, Guangming Rd.
Qionglin Township
Hsinchu County 307001
T +886 3 592 2398
Comet AG Service Bulletin-17 | Vacuum Capacitors
Herrengasse 10 | CH-3137 Flamatt Measuring of Self Resonance Frequency
T +41 31 744 95 00 | pct@comet.tech Issue Date: 01-JUN-2011
pct.comet.tech Page 4 of 4 Replaces: 07-MAY-2004
pct.comet.tech
E-mail pct@comet.tech