Cast Aluminum Solutions PUR-X 2000 Specifications
PUR - X 2000
Circulation Heater
The CAS PUR-X replaceable tube circulation heater provides contamination-free heating of liquids and gases.
TARGET MARKETS
• Semiconductor solvent heating
• High-purity liquid heating
SPECIFICATIONS
• PUR-X 2000: 5.0kW – 7.9kW, 120V, 200V, 208V,
220V, 230V, 240V, 380V, 400V, 415V, 480V
• Explosion resistant (NEMA 7) electrical enclosure
• Tubing, .375” (3/8”) O.D. x .031” wall, field replaceable
PFA & high purity PFA
• Standard PFA
• High purity PFA, SEMI F57 compliant
• 325” Long (27ft or 8.3m)
• Tube size & length are the same for both standard
APPLICATIONS
• Semiconductor wet process systems
• Wafer cleaning equipment (wet bench systems)
• Heating of photo-resist removal solvents
• DI water heating for wafer rinsing
• Air and Nitrogen heating for wafer drying
• Acid heating
• Body: Aluminum 319, Teflon
• Maximum operating temperature: 200°C (392°F)
• Two sensors, for process control and process
high-limit, choice of J or K type thermocouples
• Third sensor ( J or K type, matching the selected
process sensors) for casting & tube protection. Requires
independent high limit control loop set no higher than
235°C (455°F)
• Optional insulation jacket
• Optional fittings, PFA 3/8” Straight Union,
SEMI F57 compliant
• 70 psi max (480 kPa)
Size and Weight:
• PUR-X 2000: 4.3” O.D. (10.9cm) x 22” (55.9cm) tall,
29 lbs (13.1Kg)
(includes housing)
®
- coated
FEATURES/BENEFITS
• Heating elements cast in aluminum
• Low maintenance
• Teflon
• High purity heating
• Fluid path independent of heater sheath
• Non-welded construction
• Self-draining
• Replaceable tubing
®
- coated for easy cleaning
1310 Kingsland Drive Batavia, Illinois 60510 Phone: 888-367-3992 CAS@CastAluminumSolutions.com www.CastAluminumSolutions.com
PUR - X 2000
TEMPERATURE (Delta-T, ˚F)
FLOW RATE, WATER (gpm and l/min)
TEMPERATURE (Delta-T, ˚C)
0
20
40
60
80
100
120
140
160
180
0
11
22
33
44
55
66
77
88
100
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5
0.8 1.5 2.3 3.0 3.8 4.5 5.3
TEMPERATURE (Delta-T, ˚F)
FLOW RATE, WATER (gpm and l/min)
gpm
TEMPERATURE (Delta-T, ˚C)
l/min
0
2
4
6
8
10
12
14
0
13
27
41
55
69
83
97
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5
0.8 1.5 2.3 3.0 3.8 4.5 5.3
PRESSURE DROP (Delta-P, psi)
PRESSURE DROP (Delta-P, kPa)
FLOW RATE, WATER (gpm and l/min)
gpm
l/min
Circulation Heater
TECHNICAL DRAWING
135
5.3
129
5.1
9.3
135
5.3
5.5
19
32
1.3
9.5
559
341
13.4
33
HEATING PROFILE (water)
180
160
1.3
Inlet water 15°C (59°F) at 200°C (392°F) set point with insulation jacket.
2.5
140
120
100
80
60
40
20
0
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5
0.8 1.5 2.3 3.0 3.8 4.5 5.3
PRESSURE DROP PROFILE (water)
19
4.3
100
88
51
77
66
55
44
33
22
11
0
gpm
l/min
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