PUR - X 1000
Circulation Heater
The CAS PUR-X replaceable tube circulation heater provides contamination-free heating of liquids and gases.
TARGET MARKETS
• Semiconductor solvent heating
• High-purity liquid heating
SPECIFICATIONS
• PUR-X 1000: 1.5kW – 4.5kW, 120V, 200V, 208V,
220V, 230V, 240V, 380V, 400V, 415V
• Explosion resistant (NEMA 7) electrical enclosure
• Tubing, .375” (3/8”) O.D. x .031” wall, field replaceable
PFA & high purity PFA
• Standard PFA
• High purity PFA, SEMI F57 compliant
• 190” Long (15.8ft or 4.8m)
• Tube size & length are the same for both standard
• Body: Aluminum 319, Teflon
• Maximum operating temperature: 200°C (392°F)
• Two sensors, for process control and process
high-limit, choice of J or K type thermocouples
• Third sensor ( J or K type, matching the selected
process sensors) for casting & tube protection. Requires
independent high limit control loop set no higher than
235°C (455°F)
• Optional insulation jacket
• Optional fittings, PFA 3/8” Straight Union,
SEMI F57 compliant
• 70 psi max (480 kPa)
Size and Weight:
• PUR-X 1000: 4.3” O.D. (10.9cm) x 16.5” (41.9cm) tall,
22 lbs (9.9Kg)
(includes housing)
®
- coated
APPLICATIONS
• Semiconductor wet process systems
• Wafer cleaning equipment (wet bench systems)
• Heating of photo-resist removal solvents
• DI water heating for wafer rinsing
• Air and Nitrogen heating for wafer drying
• Acid heating
1310 Kingsland Drive Batavia, Illinois 60510 Phone: 888-367-3992 CAS@CastAluminumSolutions.com www.CastAluminumSolutions.com
FEATURES/BENEFITS
• Heating elements cast in aluminum
• Low maintenance
• Teflon
• High purity heating
• Fluid path independent of heater sheath
• Non-welded construction
• Self-draining
• Replaceable tubing
®
- coated for easy cleaning
PUR - X 1000
TEMPERATURE (Delta-T, ˚F)
TEMPERATURE (Delta-T, ˚C)
0
10
20
30
40
50
60
70
80
90
100
0
5.6
11.2
16.8
22.4
28.0
33.6
39.2
44.8
50.4
55.6
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5
0.8 1.5 2.3 3.0 3.8 4.5 5.3
TEMPERATURE (Delta-T, ˚F)
FLOW RATE, WATER (gpm and l/min)
gpm
TEMPERATURE (Delta-T, ˚C)
l/min
0
2
4
6
8
10
12
14
0
13
27
41
55
69
83
97
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5
0.8 1.5 2.3 3.0 3.8 4.5 5.3
PRESSURE DROP (Delta-P, psi)
PRESSURE DROP (Delta-P, kPa)
FLOW RATE, WATER (gpm and l/min)
gpm
l/min
Circulation Heater
TECHNICAL DRAWING
135
5.3
129
5.1
236
9.3
36
1.4
135
5.3
5.5
16
.6
19
34
1.3
9.5
64
2.5
419
16.5
4.3
9.1
19
51
HEATING PROFILE (water)
Inlet water 15°C (59°F) at 200°C (392°F) set point with insulation jacket.
100
90
80
70
60
50
40
30
20
10
0
0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5
0.8 1.5 2.3 3.0 3.8 4.5 5.3
FLOW RATE, WATER (gpm and l/min)
PRESSURE DROP PROFILE (water)
55.6
50.4
44.8
39.2
33.6
28.0
22.4
16.8
11.2
5.6
0
gpm
l/min
ORDERING INFORMATION
350
TEMPERATURE INCREASE (Delta-T, ˚F)
TEMPERATURE INCREASE (Delta-T, ˚C)
PRESSURE DROP (Delta-P, kPa)
BASE CIRCULATION HEATER
NEMA 7 ENCLOSURE
HEATER WATTAGE
10 = 240V, 3-phase delta circuit 4.2kW 10.1Amps
11 = 208V, 3-phase delta circuit 3.1kW 8.8 Amps
12 = 415V, 3-phase wye circuit 4.1kW 5.8 Amps
13 = 400V, 3-phase wye circuit 3.8kW 5.6 Amps
14 = 380V, 3-phase wye circuit 3.5kW 5.3 Amps
15 = 200V, 1-phase, 2.9kW 14.6 Amps
16 = 208V, 1-phase, 3.1kW 15.2 Amps
17= 220V, 1-phase, 3.5kW 16.0 Amps
18 = 230V, 1-phase, 3.8kW 16.8 Amps
19 = 240V, 1-Phase, 4.2kW 17.5 Amps
20 = 208V, 3-phase wye circuit 4.5kW 12.5 Amps
21 = 120V, 1-phase 1.5kW 12.5 Amps
22 = 120V, 1-phase 3.0kW 25 Amps
TUBE MATERIAL
00 = Standard PFA tubing 3/8" O.D., .031" wall thickness
01 = High Purity PFA tubing 3/8" O.D., .031" wall (SEMI F57 compliant)
SENSOR
JJ = J type thermocouples
KK = K type thermocouples
ACCESSORIES (ordered separately, loose packed)
274-131-1-3 (PFA fitting 3/8" Straight Union, SEMI F57 compliant) 2 pieces
307-0-18-1 (Insulation Jacket) 1/2" fiberglass insulation, Teflon
outer cover (rated to 550°F/288°C), Red silicone impregnated
fiberglass inner liner, velcro flap fastening, H.T. construction.
515-68-1-5 replacement PFA tube
515-68-1-7 replacement HP PFA tube
Choose
One
®
- coated fiberglass
WIRING DIAGRAMS
3-PHASE DELTA CIRCUIT
PX10-
PUR-X 1000
with insulation
jacket
3-PHASE WYE CIRCUIT
HEATING PROFILE (air) Inlet air at 21°C (70°F) and 70psi; 200°C (392°F) set point with
insulation jacket.
300
250
200
150
100
50
0
5 10 15 20 25 30 scfm
141.5 283.1 424.7 566.3 707.9 849.5 slm
AIR FLOW (scfm/slm)
PRESSURE DROP PROFILE (air)
30
25
20
194.4
166.7
138.9
111.1
83.3
55.6
27.8
0
206
172
137
HEATER
HEATER
4
1-PHASE CIRCUIT
2
3
5
PILOT DUTY ONLY
G
1L2
1L1
1
HEATER
6
1L3
RELAY
15
PRESSURE DROP (psi)
10
5
0
5 10 15 20 25 30 scfm
141.5 283.1 424.7 566.3 707.9 849.5 slm
AIR FLOW (scfm/slm)
103
68
34
0
PUR - X 1000
NORTH AMERICA
Regional Sales Representatives
NORTH AMERICA
Regional Sales Representatives
SAN FRANCISCO
tel: 408-754-3370
LOS ANGELES
tel: 714-935-2999
TEXAS
tel: 972-620-6030
MIDWEST AND
WEST CENTRAL CANADA
tel: 952-892-9222
CHICAGO
tel: 847-458-1500
GREAT LAKES,
EASTERN AND
CENTRAL CANADA
tel: 248-651-0500
NORTHEAST
tel: 215-345-8130
SOUTHEAST
tel: 573-754-4806
OHIOVALLEY
tel: 513-398-5500
INTERNATIONAL
Sales Representatives
Circulation Heater
COMPETITOR COMPARISON
ATTRIBUTE PUR-X COMPETITIVE PRODUCT
Enclosure Explosion resistant (NEMA 7) electrical
enclosure
Max temperature 200°C (392°F) 180°C (356°F)
Heater element/
construction
Tubular heating element, cast into
aluminum 319. No contact with fluid.
Insulation jacket Optional Not available
Fluid path Field-replaceable PFA tubing Not an isolated fluid path - Body and heater element
Requires inert gas purging
PTFE-sheathed element, in contact with fluid.
are in contact with fluid
U.S.A. SALES REPRESENTATIVES INTERNATIONAL SALES REPRESENTATIVES
San Francisco
tel: 408-754-3370
Los Angeles
tel: 714-935-2999
Texas
tel: 972-620-6030
MIDWEST &
WEST CENTRAL CANADA
tel: 952-892-9222
Chicago
tel: 847-458-1500
GREAT LAKES,
EASTERN &
CENTRAL CANADA
tel: 248-651-0500
NORTHEAST
tel: 215-345-8130
SOUTHEAST
tel: 573-754-4806
OHIO VALLEY
tel: 513-398-5500
AMERICAS
Mexico
Central America
South America
tel: +52-442-256-2200
AFRICA
MIDDLE EAST
tel: +20-2-388-9574
AUSTRALIA
tel: +61-3-9335-6449
EUROPE
France
tel: +33 (0) 1-41-32-79-70
Germany
tel: +49-7253-9400-0
Italy
tel: +39-02-458-8841
Spain
tel: +34-91-675-1292
United Kingdom
tel: +44-115-964-0777
SOUTHEAST ASIA
China
tel: +86-21-3532-8532
Japan
tel: +81-3-3518-6630
Korea
tel: +82-2-2169-2600
Singapore
tel: +65-6773-9488
Taiwan
tel: +866-7-288-5168
India
tel: +91-40-234-12216
1310 Kingsland Drive Batavia, Illinois 60510 Phone: 888-367-3992 CAS@CastAluminumSolutions.com www.CastAluminumSolutions.com
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