Cascade Microtech EPS200RF User Manual

EPS200RF

A complete 200 mm manual
probing solution for RF
applications up to 67 GHz

BENEFITS

Make everyone an RF expert

Best-known methods for highest
measurement accuracy

Ensure calibration accuracy

WinCal XE – the only RF on-wafer calibration
software

Enable testing of cutting-edge technologies

Ability to probe smallest RF pads and lowest
pitches

Protec t your inve stm ent for the futur e

Re-configure and upgrade as requirements
grow

Minimize training efforts

Designed for convenience and ease of use

The EPS200RF is a dedicated advanced probing solution that comes
with everything you need to achieve accurate measurement results in
the shortest time, with maximum confidence. The system incorporates
best-known methods for RF probing up to 67 GHz, with the ability to
probe pads as small as 25 μm x 35 μm and beyond.

A very rigid and stable system design of the EPS200RF, with cast frame
and single platen with four-point support, allows you to achieve high
accuracy. An integrated vibration-isolation solution protects contact
quality over measurement time. Optimized optics, backlash-free
X-Y-Z movement of RF positioners, and a contact separation drive with
outstanding 1 μm repeatability, enable precise probe placement and
contact repeatability comparable to semi-automated systems. Industry­benchmark cables support the highest magnitude and phase stability of
measurements. Choose a pair of 40, 50, or 67 GHz RF probes from our
Infinity Probe®, |Z| Probe®, ACP and FPC probe families for the best
contact performance. With WinCal XE™ software, you receive patented
LRRM and LRM+ methods for the best calibration accuracy. Verified
standards and optimized calibration boundary conditions allow you to
achieve a repeatable metrological level of calibration and confidence in
your measurement results.

An intuitive operation workflow with the innovative fine-glide chuck
stage which offers both wide-range coarse movement and µm-level
fine movement, contact gauge, integrated auxiliary chuck supported by
WinCal XE wizards and tutorials, ensures ease of operation and short
time to data for both the novice and the expert user.

Designed for upgradability with multiple options, the EPS200RF can be
easily reconfigured to meet your future project requirements.

EPS200RF

0 20 40 60 80

0.00

0.05

0.10

0.15

eLRRM: Sum of Sij Errors

Fr equ enc y, GH z

#1
#2
#2
#4

Contact height gauge

• Precise overtravel adjustment

• Reliable and repeatable
contact quality

Unique chuck stage

• Quick coarse Y/X movement and
sub-micron positioning

• X/Y stepping with independent
axes lock

Tailored RF platen and 40 mm
platen drive

• Precise mount of up to four positioners

• Flexibility for wafer-level and
package test

Unique 400 µm platen contact/
separation drive

• Highest contact accuracy and
consistency over entire wafer

• Convenience and ease of use

Vibration isolation solution

• Stabilizes contact and minimizes
pad damage

High-quality industry
benchmark 67 GHz cables

• Long lifetime and consistent
measurements

Fine Theta adjustment

• Precise probe-to-pad
alignment for small pads

Trinocular 6.7x stereo zoom
scope with 20x eyepiece

• Optimized field of view

• Accurate probe placement on
small pads

• Camera-ready

Dedicated RF chuck

• Consistent measurement boundary
conditions over entire wafer

Unique ceramic AUX site

• Homogeneous and optimized
calibration conditions

Solid and stable positioners

• Accurate probe positioning, consistent
contact force and overtravel

Verified calibration standards

• Accurate calibration, verification and
measurement assurance

ACP Probes, FPC Probes,
Infinity Probes or |Z| Probes

• Your choice of application-optimized
probes for best measurement
accuracy*

Contact/Separation Repeatability Test CPW Mag(|S21|), dB Different Media eLRRM: Sum of S

Consistent contact/separation movement

ORDERING INFORMATION

Part Number Description

EPS200RF 200 mm manual probing solution* for RF applications
EPS200RF-LT 200 mm manual probing solution for RF applications, excluding cables, probes and calibration substrate
EPS-ACC-200RF-4P 4-port option for EPS200RF package containing two RPP305 positioners and two N/S RF arms

* The EPS200RF manual probing solution includes: PM8 probe station with a 200 mm chuck stage, a tailored RFplaten, contact height gauge, cast
microscope bridge with 50 x 50 mm scope movement with tilt, stereo zoom microscope with 150x magnification and LED ring-light (camera-ready
C-mount), vibration-isolation solution, special 200 mm RF chuck with ceramic AUX inlay, fine theta adjustment, two RPP305 bolt-down positioners, full
WinCal XE license, choice of two flexible Gore cables (67 GHz /90 cm, 50 GHz / 120 cm or 40 GHz / 120 cm), two 2.4 (f) - 2.92 (m) adapters, ProbePolish
and contact substrate, probe cleaning brush, choice of two RF single-ended ACP Probes, FPC probes, |Z| probes or Infinity probes at 40, 50 or 67 GHz,
with one matching calibration substrate (ISS or CSR), and tools for operation and facility connection. The FPC probes require two adapters (P/N 104-913).

For more information contact us at 1-800-550-3279 (1-503-601-1000) or email [e-mail]

© Copyright 2014 Cascade Microtech, Inc. All rights reserved. Cascade Microtech,
Infinity Probe, and |Z| Probe are registered trademarks and WinCal XE is a trademark of
Cascade Microtech, Inc. All other trademarks are the property of their respective owners.

Data subject to change without notice.

EPS200RF_FLYER_1114

Optimal boundary conditions due to
integrated ceramic AUX chuck

Errors

ij

Highly repeatable LRRM calibration available
from WinCalXE (included in package)

www.cascademicrotech.com