Brooks 5851EM Series, 5965 Installation And Operation Manual

Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG

September, 2009 Brooks

Brooks® Models 5965, 5851EM

Mass Flow Controllers

®

Models 5965, 5851EM

Model 5965

Mass Flow Controller

with Card Edge

Model 5851EM Downported

Mass Flow Controller

with Card Edge

Model 5851EM

Mass Flow Controller

with D-Connector

Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng

Part Number:541B122AAG

Brooks® Models 5965, 5851EM

September, 2009

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly , exhibit early failure.

Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG

September, 2009 Brooks

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

®

Models 5965, 5851EM

Brooks® Models 5965, 5851EM

Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng

Part Number:541B122AAG

September, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Paragraph Page
Number Number

Section 1 Introduction

1-1 How to Use This Manual ............................................................................................................1-1

1-2 Description .................................................................................................................................1-1

1-3 Specifications .............................................................................................................................1-3

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ............................................................................................... 2-2

2-4 Return Shipment ........................................................................................................................2-2

2-5 Transit Precaution ......................................................................................................................2-3

2-6 Removal from Storage ...............................................................................................................2-3

2-7 Gas Connections........................................................................................................................ 2-3

2-8 In-Line Filter ...............................................................................................................................2-4

2-9 Installation ..................................................................................................................................2-4

2-10 Electrical Interface......................................................................................................................2-6

2-1 1 Configuring the PC Board ................................................................................................... ......2-10

Brooks® Models 5965, 5851EM

Contents

Section 3 Operation

3-1 Theory of Operation ......................................................................................................... ..........3-1

3-2 Operating Procedure..................................................................................................................3-2

3-3 Zero Adjustment.........................................................................................................................3-3

3-4 Calibration Procedure ................................................................................................................3-5

3-5 Response ..................................................................................................................................3-10

Section 4 Maintenance & Troubleshooting

4-1 Overview .................................................................................................................................... 4-1

4-2 Troubleshooting..........................................................................................................................4-2

4-3 Gas Conversion Factors ............................................................................................................4-6

4-4 Orifice Sizing.............................................................................................................................4-10

4-5 Restrictor Sizing........................................................................................................................4-15

Section A CE Certificate

CE Certificate of Mass Flow Equipment ................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

i

Contents

Brooks® Models 5965, 5851EM

Figures

Figure Page
Number Number

1-1 0 to 100% Command Step, Soft Start Enabled ....................................................................... 1-2

1-2 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector orCard

Edge with VCR Fittings ........................................................................................................... 1-6

1-3 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector or

Card EdgeDownported............................................................................................................ 1-7

2-1 Model 5956/5851EM Card Edge Connector Arrangement ...................................................... 2-5

2-2 D-Connector Pin Arrangement (V oltage I/O Version) .............................................................. 2-7

2-3 D-Connector Pin Arrangement (Current I/O V ersion).............................................................. 2-7

2-4 Maximum Allowable Loop Resistance ..................................................................................... 2-7

2-5 Common Electrical Hookups Current I/O version ...................................................................2-9

3-1 Flow Sensor Operational Diagram .......................................................................................... 3-1

3-2 Flow Controller System Block Diagram................................................................................... 3-2

3-3 Card Edge PC Board Jumper Location and Function ............................................................. 3-4

3-4 D-Connector PC Board Jumper Location and Function (Voltage I/O Version) ........................ 3-5

3-5 D-Connector PC Board Jumper Location and Function (Current I/O Version)........................ 3-6

3-6 Model 5965/5851EM Calibration Connections ........................................................................ 3-7

3-7 Fast Response Adjustment ..................................................................................................... 3-8

4-1 Model 5965/5851EM Orifice Sizing Nomograph ................................................................... 4-11

4-2 Example Nomograph ............................................................................................................ 4-14

Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng

Part Number:541B122AAG

September, 2009

Tables

Table Page
Number Number

2-1 Recommended Filter Size..........................................................................................................2-3

4-1 Bench Troubleshooting .............................................................................................................. 4-3

4-2 Sensor Troubleshooting .............................................................................................................4-4

4-3 Conversion Factors (Nitrogen Base)..........................................................................................4-7

4-4 Model 5965/5851EM Orifice Sizing Nomograph ....................................................................... 4-11

4-5 Model 5965/5851EM Standard Restrictors................................................................................4-16

ii

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

1-1 How to Use This Manual

1-2 Description

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5965, 5851EM

This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the
Brooks

This manual is organized into the following sections:

The Brooks Model 5965 and 5851EM Mass Flow Controllers are used in
gas flow handling systems where very low leakage and high performance
are required. Models 5965 and 5851EM incorporate metal seals or welded
joints, insuring leak integrity for high purity and high vacuum applications.
Reducing the amount of internal threads makes the design less prone to
system contamination. The control electronics and flow sensor designs
utilized in the Model 5965 and 5851EM have been well-proven in precision
gas delivery systems. Standard features include:

®

Models 5965 and 5851EM

Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance & T roubleshooting
Section A CE Certifications
Back Cover Warranty, Local Sales/Service Contact Information

• High leak integrity (less than 10

-10

atm-cc/sec He)

• Enhanced process (7 Ra) internal surface finish (standard for 5965)

• Electropolished wetted surfaces (standard for 5965)

• V ented-polished internal threads

• Wide flow range (10 slpm through 100 slpm)

• Insensitive to mounting attitude

• Full penetration welded fittings

• Negligible flow overshoot/undershoot

• Mechanically and electronically compatible with other mass flow
controllers

• Available with all popular process connections

• Current (4-20 mA) input/output (optional)

• Normally open valve (optional)

1-1

Section 1 Introduction

Brooks® Models 5965, 5851EM

• Fast response control permits rapid gas settling times with minimal

• Soft st art provides a flow ramping function which slows down the

• Valve override permits the user to fully open and close the control

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

over/undershoot.

introduction of process gas for those processes which cannot tolerate
rapid flow transition. Refer to section 2-7 and Figure 1-1.

valve independent of the command setting. Refer to Section 2-6.

1-2

Figure 1-1 0 to 100% Command Step, Soft Start Enabled

• Low command flow cutoff (Auto shut-off) prevents the valve from
opening whenever the setpoint is less than 2% of full scale.

• Output limiting prevents possible damage to delicate data aquisition
devices by limiting the output signal of the mass flow controller.

• Valve off (Note 1) is accessed via Terminal J on the card Edge or Pin 4
on the D-Connector version. This feature allows the user to close,
independent of the command signal, the control valve by supplying TTL
level low signal to the proper terminal. This function is useful when
performing repetitive flow operations or as a safety shutdown. Refer to
section 2-6.

• Valve test point/purge (Note 1) is accessed via Terminal D on the
Card Edge or Pin 7 on the D-Connector version. This feature allows the
user to monitor the control valve voltage during operation. Also, ground­ing this terminal causes the control valve to fully open independently of
the command signal. Refer to Section 2-6. Note: Grounding this
terminal with a Model 5965/5851EM supplied with a normally open
valve will cause the valve to fully close.

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

1-3 Specifications

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5965, 5851EM

• Remote transducer input (Note 1) is accessed via terminal 5 on the
Card Edge or Pin 15 on the D-Connector version. This feature allows
the use of the integral control electronics and valve to regulate flow in
response to the signal from an external 0-5 Vdc signal. The mass flow
signal from the Model 5965/5851EM is still available for process
monitoring. This function is enabled at the factory. Refer to section 2-6.

Note 1: Feature not available with 4-20 mA I/O option.

• Fast response control permits rapid gas settling times with minimal
over/undershoot.

PERFORMANCE CHARACTERISTICS:

Flow Ranges*

Any range from 10 - 100 slpm nitrogen equivalent; up to 200 slpm
hydrogen

*Standard: 0°C and 101 kPa (760 Torr). Per SEMI Guideline E12-96.

Accuracy

+1% Full Scale, including linearity , at calibration conditions
68oF + 3oF, 50% + R.H.

Repeatability

0.25% of rate

Settling Time

Less than 3 seconds (6 seconds for 4-20 mA I/O option) to within 2% of
Full Scale of final value for a 0-100% command step.

*Per SEMI Guideline E17-91.
Leak Integrity

Inboard to outboard 1 x 10

-10

atm. cc/sec. Helium max.

Control Range

50 to 1 (with elastomeric valve seat)
33 to 1 (with metal valve seat)

Ambient T emperature Limit s

Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to 212°F (-25°C to 100°C)

T emperature Sensitivity

Zero: Less than +0.075% full scale per degree C.
Sp an: Less than +1.0% of rate shift over 10 - 50oC range.

1-3

Section 1 Introduction

Brooks® Models 5965, 5851EM

PERFORMANCE CHARACTERISTICS (continued):

Pressure Equipment Directive (PED) 97/23/EC

Working Pressure

1000 psi (70 bar) max.

Mounting Sensitivity

+0.5% maximum full scale deviation after re-zeroing.

ELECTRICAL CHARACTERISTICS:

Power Requirements

Volt age Option: + 15 Vdc +5% W atts power consumption
Current Option: +22.5 to +28 Vdc, 370 mA @ +28 Vdc
Class III Equipment: The dc main input shall be supplied from a SELV
(Separate Extra-Low V oltage) source.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

Electrical Connections

Card Edge: 30 micorinch gold over low stress nickel-plated copper
D-Connector: DA-15P

Electrical Pinouts

Card Edge: Compatible with Brooks Model 5965/5851EM as well as most
competitve models
D-Connector: Compatible with Brooks Models 5850C, D and E.

Environmental Conditions

Installation category: "I"
Pollution degree: 2
Humidity: 50 - 80% Relative Humidity
Meter Altitude:2,000 meters (6562 feet)
For Indoor Use ONL Y
Mains supply voltage fluctuations not to exceed +10% of nominal voltage

Command Input

V oltage Option: 0-5 Vdc. Input resist ance 200 k ohm
Current Option: Input Resistance 75 ohm

Output Signal

V oltage I/O Option: 0-5 Vdc into 2,000 ohms or greater. Max. ripple 3 mV.
Current I/O Option: 0-5 Vdc into 2,000 ohms or greater . Maximum ripple 3
mVP-P jumper selectable 4-20 mAdc or 0-20 mAdc. Refer to Fiugre 2-5 for
maximum loop resistance.

1-4

5 V olt Reference Output

5 Volt s, ±0.2 (±0.01 Vdc). Maximum load 1 k ohms.

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5965, 5851EM

ELECTRICAL CHARACTERISTICS (continued):

Differential Pressure

V oltage I/O option
V alve orifice sized for any pressure drop between 5 to 50 p si (Minimum
pressure drop depends on gas and range). Refer to Orifice Sizing, Section
4-5.
Current I/O option
V alve orifice sized for any pressure drop between 5 to 1,500 p si (Maximum
pressure drop depends on orifice size). Refer to Orifice Sizing, Section 4-5.

Power Supply Sensitivity

V oltage I/O Option: ±0.09 full scale of percent power supply volta ge
variation of full scale.
Current I/O Option: negligible effect over +22.5 to +28 Vdc.

PHYSICAL CHARACTERISTICS:

Materials of Construction

316L, 316L VAR (Vacuum Arc Remelt), and high alloy ferritic stainless
steel.

External seals: Nickel.

Internal seals: Nickel.
V alve Seat: 316L, V iton® fluoroelastomers, Buna-N, Kalrez® or Teflon®.
When 316L or Teflon seat is used, maximum inlet pressure is 50 psig and
minimum controllable flow rate is 3% of full scale.

Dimensions

Refer to Figures 1-2 and 1-3

Process Connections

Integrally welded to body - standard:
1/4" male VCR

TM

3/8" male VCR (3/8" or 1/2" tube)
1/2" ACLIT

TM

1/2" ATW tube stub
CS Downport (5965 Series Only)

Surface Finish

5851EM: 32Ra, Passivated,
Electropolished optional
5965: 7Ra, Electropolished

1-5

Section 1 Introduction

Brooks® Models 5965, 5851EM

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

1-6

Figure 1-2 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector or Card Edge with VCR Fittings

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5965, 5851EM

Figure 1-3 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector or Card Edge, Downported

1-7

Section 1 Introduction

Brooks® Models 5965, 5851EM

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

THIS PAGE WAS
INTENTIONALLY

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1-8

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

2-1 General

2-2 Receipt of Equipment

Section 2 InstallationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

This section contains the procedures for the receipt and installation of the
instrument. See Section 1 for dimensional and connection requirements.
Do not attempt to start the system until the instrument has been
permanently installed. It is important that the start-up procedures be
followed in the exact sequence presented.

When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to your nearest Product Service Department.

Remove the envelope containing the packing list. Out side of your clean
area, carefully remove the equipment from the packing case. Make sure
spare parts are not discarded with the p acking material. lnspect for
damaged or missing parts.

This device may have been assembled, calibrated and double-vacuum
bagged in a Class 100 clean room. ln your semi-clean area, remove the
outer bag only . Pass your Model 5965/5851EM into your clean area. Note:
Remove the second clean room compatible bag only when the equipment
is ready to be tested and/or installed in your clean system.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

2-1

Section 2 Installation

Brooks® Models 5965, 5851EM

2-3 Recommended Storage Practice

If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following conditions:

a. Within the original shipping container .

b. S tored in a sheltered area, preferably a warm, dry, heated warehouse.

c. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 Return Shipment

Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

45°F (7°C) minimum.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Instrument must have been purged in accordance with the following:

2-2

All flow instruments returned to Brooks requires completion of Form
RPR003-1, Brooks Instrument Decontamination S tatement, along with a
Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks
personnel. Copies of these forms can be downloaded from the Brooks
website www .BrooksInstrument.com or are available from any Brooks
Instrument location listed above.

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

2-5 Transit Precautions

2-6 Removal from Storage

2-7 Gas Connections

Section 2 InstallationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

To safeguard the instrument against transportation damage, it is
recommended to keep the instrument in its factory container until ready for
installation.

Upon removal from storage, a visual inspection should be conducted to
verify the condition of the equipment is “as received”. lf the equipment has
been in storage in conditions in excess of those recommended, the device
should be subjected to a pneumatic pressure test in accordance with
applicable vessel codes. Note: lf the cleanliness of this device is critical,
service should be performed by the factory or one of the authorized
service centers.

Prior to installation, make certain all piping is clean and free of
obstructions. lnstall the piping in such a manner that permits easy access
to the instrument if it needs to be removed for cleaning or test bench
troubleshooting.

2-3

Section 2 Installation

Brooks® Models 5965, 5851EM

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the
flow sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

2-9 Installation

Prior to installation, make certain all piping is clean and free of
obstructions, for tubing installations. Install the piping in such a manner
that permits easy access to the instrument if it needs to be removed for
cleaning or test bench troubleshooting. For surface mount (downported)
devices verify that the seal cavities are clean and free of lateral
scratches.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

Maximum Flow Rate Recommended Filter

10 to 30 slpm 15 micron

Above 30 slpm 30 micron

CAUTION

When installing the controller, care should be taken that no
foreign materials enter the inlet or outlet of the instrument. Do not
remove the protective end caps until time of installation.

Recommended installation procedures:

a. The Models 5965 and 5851EM should be located in a clean, dry

atmosphere relatively free from shock and vibration.

b. Leave sufficient room for access to the electrical components, span

and zero potentiometers.

c. Install in such a manner that permits easy removal if the instrument

requires servicing.

CAUTION

When used with a reactive (sometimes toxic gas) contamination
or corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
instrument purged with clean, dry N

before use.

2

2-4

d. The Models 5965 and 5851EM Mass Flow Controller can be

installed in any position. However , mounting in orient ations other
than the original factory calibration (see calibration data sheet) can
result in a 0.5% maximum full scale shift after re-zeroing.

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 2 InstallationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

CAUTION

Use caution when installing surface mount (downported)
controllers. Most metal seals can not be reused after
compression. Follow the seal manufacturers’ recommendations
for installation. Tighten the mounting screws in 10 in-lb.
increments such that the seal undergoes uniform compression.
Final torque values depend on the screw and hardware material
and lubrication.

e. When installing controllers be aware that sharp, abrupt angles in the

system piping directly upstream of the controller may cause a small
shift in accuracy. lf possible, have at least ten pipe diameters of
straight tubing upstream of the Model 5965/5851EM Mass Flow
Controller .

1. CHASSIS GROUND

2. O-5 VOLT SIGNAL COMMON

3. O-5 VOLT SIGNAL OUTPUT

4. +15 Vdc SUPPLY

5. REMOTE TRANSDUCER INPUT***

6. NOT USED

7. SLOT

8. NOT USED

9. VALVE OVERRIDE

10. +5V REF.** OR VALVE RETURN OR NOT USED

CIRCUIT
SIDE OF

PC BOARD

A. COMMAND INPUT
B. COMMANDCOMMON
C. SUPPLYVOLTAGECOMMON
D. VALVETESTPOINT/PURGE
E. NOT USED
F. -I5VdcSUPPLY
H. *SLOT
J. *NOT USED
K. *NOTUSED
L. *VALVE OFF

* Unit designates Pins H, J, K, & L as G, H, I & J
** Jumper Selectable
*** Factory Activated Option

Figure 2-1 Model 5965/5851EM Card Edge Connector Arrangement

2-5

Section 2 Installation

Brooks® Models 5965, 5851EM

Note:The control valve in the Models 5965 and 5851EM provides precision
control and is not designed for positive shut-off. lf positive shut-off is
required, it is recommended that a separate shut-off valve be installed in­line. Controllers with 316L or Teflon valve seats may not shut off flow below
3% of full scale.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

2-10 Electrical Interface

To insure proper operation, the Model 5965/5851EM must be connected

per Figures 2-1 through 2-6 depending upon the type of printed circuit

board and connector. As a minimum, the following connections must be

made:

Voltage I/O Version Current I/O V ersion

• Chassis Ground • Chassis Ground

• Signal Common • Signal Output Return

• Signal Output • Voltage or Current

• +15 Vdc Supply Signal Output

• -15 Vdc Supply • 15-28 Vdc Supply

• Command Input • Supply Common

• Command Common • Voltage or Current

• Supply Common • Volt age or Current

• V alve Return (Refer to • Command Return
Section 3-4 jumper configuration)

2-6

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 2 InstallationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

Pin No. Function Color Code

1 Command Common (Command Pot "CCW") Black
2 0-5 Volt Signal Output White
3 External Valve Return (See Note 3)** Red
4 Valve Off Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point/Purge Wht/Blk
8 Cmd. Input or Cmd. Pot "S" Red/Blk

9 Supply Voltage Common Grn/Blk
10 0-5 Signal Common Org/Blk
11 +5 Volt Reference Output (Cmd. Pot "CW") Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Remote Transducer Input*** Blu/Wht

** Jumper Selectable
*** Factory Activated Option

Figure 2-2 D-Connector Pin Arrangement (Voltage I/O Version)

1

9

8

15

Note:

1. Cable shield tied to chassis ground in
meter connector. Make no connection
on customer end.

2. All power leads must be connected to
power supply.

3. To use Pin 3 for external valve return,
Jumper J1 must be moved to the B-D
position and Pin 3 must be grounded
at the customer’s system.

4. Pin 9 is normally used for external
valve return and can be used for
cables up to 10 feet in length.

1

8

9

1. SETPOINT RETURN

2. VOLTAGE SIGNAL OUTPUT

3. NOT USED

4. CURRENT SIGNAL OUTPUT

5. +15 TO +28 Vdc SUPPLY

6. NOT USED

7. CURRENT SETPOINT INPUT

9. SUPPL Y COMMON

10. SIGNAL OUTPUT RETURN

11. 5V REFERENCE OUTPUT

12. VALVE OVERRIDE INPUT

13. NOT USED

14. CHASSIS GROUND

15. NOT USED

15

8. VOLTAGE SETPOINT INPUT

Figure 2-3 D-Connector Pin Arrangement (Current I/O Version)

1000

900

ALLOWABLE OPERATING RANGE

800

700

600

500

400

300

200

100

TOTAL LOOP RESISTANCE (OHMS)

0

14 27262221 2825

POWER SUPPLY VOLTAGE (VOLTS)

2423201918171615

Figure 2-4 Maximum Allowable Loop Resistance

2-7

Section 2 Installation

Brooks® Models 5965, 5851EM

Electrical Hookup (V oltage l/O Version)

For installations which replace Unit lnstrument’s UFC-1000’s, (Card Edge
version) Pin 10 is f requently grounded. ln these situations the 5 Volt
reference output must be disabled. Refer to Section 2-7.

For installations which will be connected to Brooks secondary electronics,
the Card Edge version must have the 5 V olt reference enabled on pin 10.
Refer to section 2-7. lt lhe Model 5965/5851EM was shipped as a system
with Brooks secondary electronics then the electronics will already be
configured properly .

Remote Set-Point (Command) Input

lf the mass flow controller is to be commanded by an external 0-5 Vdc
signal, the command potentiometer is not used.

The command input hookup is as follows:

A. Card Edge Connector

Connect the external command voltage toTerminal A, and external
command return to Terminal B. Refer to Figures 2-1 and 3-3..

B. D-Connector

Connect the external command voltage to Terminal 9 and external
command return to Terminal 1. Refer to Figures 2-2 and 3-4.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

V alve Override

The valve override function allows full opening and closing of the valve
independent of the command setting. The unique command reset feature
prevents flow overshoot when the controller goes from valve override
closed to normal control. The valve override for the mass flow controller is
as follows:

a. To open the valve, apply +15 Vdc to the valve override terminal.
b. To close the valve, apply -15 Vdc to the valve override terminal.
c. lsolating the valve override terminal returns the controller to normal
operation.

A. Card Edge

The valve override function can be accessed from Terminal 9. Refer to
Figure 2-1. Note: For normal operation Terminal 9 must be left open
(floating).

B. D-Connector

The valve override function is accessed from Terminal 12. Refer to Figures
2-2 and 2-3.

ValveTest PoinVPurge

Refer to Figures 2-1, 2-2, and 2-3. The valve voltage can be monitored on
Pin D of the card Edge version and Pin 7 of the D-connector version. This
voltage relative to circuit common is proportional to the valve voltage per
the following equation:

2-8

V alve Voltage = 14.2 Volt age at the valve volt age test point (TP3)

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 2 InstallationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

Grounding the valve test point pin willcause the valve to open fully
regardless of command input voltage. Note: For normally open valves
grounding this pin will cause the valve to fully close.

Valve Off

Refer to Figures 2-1, 2-2 and 2-3.The control valve can be forced closed
regardless of command input signal by applying a TTL level low (<0.4 Vdc)
to Terminal L of the Card Edge version or Pin 4 of the D-Connector
version. A TTL level high or floating at this pin has no effect.

Figure 2-5 Common Electrical Hookups Current I/O Version

2-9

Section 2 Installation

Brooks® Models 5965, 5851EM

Electrical Hookup (Current I/O Option)

Setpoint (Command) lnput
The Model 5965/5851EM Mass Flow Controller can be used with a current
(4-20 mAdc) or voltage (0-5 Vdc) setpoint. To use the current setpoint,
connect the setpoint (+) signalto Pin 7 and the setpoint return (-) signal to
Pin 1 of the D-Connector and configure the PC board per Section 2-10.T o
use the voltage setpoint, connect the voltage signal to Pin 9 and the
voltage setpoint return to Pin 1 of the D-Connector and configure the PC
board per Section 2-10.

SignalOutput

The flow signal output can be measured as a voltage and a current
simultaneously on two different pins of the D-Connector. Pin 2 indicates
the flowrate with a 0-5 Vdc signal proportional to the mass flow rate. Pin 4
indicates the flowrate with either a 0-20 mAdc or 4-20 mAdc current signal
as determined by jumpers on the PC board (refer to Section 2-T for jumper
positions). Both the current and voltage signals are returned on Pin 10 of
the D-Connector .

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

2-11 Configuring the PC Board

Supply

The power for the mass flow controller is connected to Pin 5 (+22.5 to +28
Vdc) and Pin 9 (supply common) of the D-Connector . Refer to Section 1-3
for the power requirements.

Chassis Ground

Connect earth ground to pin 14 of the D-Connector.
V alve Override (connection optional)

The valve override function allows full opening and closing of the valve
independent of the setpoint:

• To open the valve, apply +22.5 to +2g Vdc to. pin 12

• To close the valve, connect pin 12 to ground

• lsolating Pin 12 (no connection) returns the controller to normal

operation.

Note: For normal operation, pin 12 must be left open (floating).

Note:To obtain access to the jumpers, the electronics cover can must be
removed. Disconnect the power to the mass flow controller and cables to
the D-Connector and the valve coil connector. Remove the three screws at
the base of the can and remove the top jack post of the D-connector.
Remove the can. The can must be replaced before returning the unit to
service. Refer to Section 2-6 for the proper electrical hookup. Refer to
Figure 3-3 through 3-5 for PC board jumper locations and functions.

2-10

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 2 InstallationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

Configuring PC Board (Vottage I/O Option)
5 V olt Reference OutpuWalve Drive Gonfiguration

A. Card Edge

Refer to Figures 2-1 and 3-3.Terminal 10 can be jumper selected as 5 Volt
reference output, external valve return or “not used”. The 5 Volt reference
output is required by Brooks secondary electronics, or if a potentiometer is
to be used to generate the command signal.To enable the 5 Volt reference
output on Terminal 10 place the yellow jumper at J1 in the D-E position. To
disable the 5 V olt reference output place the yellow jumper at J1 in the E-F
position.

To minimize the effect of resistance in the connection wiring, a separate
“externalvalve return” can be accessed on pin 10.To enable this feature,
place the black jumper at J1 in the B-D position and connect Terminal 10 to
power supply common. lf the “external valve return” is not enabled, place
the black jumper at J1 in the B-C position.

Note: lf the “external valve return” feature is not enabled, the valve voltage
is returned internally on the printed circuit board and the connection wiring
resistance must be less than 0.2 ohms.

B. D-Connector

Refer to Figures 2-2 and 3-4 for D-Connector (Volt age l/O Version) or
Figures 2-3 and 3-5 for D-Connector (Current l/O V ersion). The 5 Volt
reference is always available on Pin 11.

To minimize the effect of resistance in the connection wiring, a separate
“external valve return” can be accessed on pin 3.To enable this feature
place the black jumper at J1 in the B-D position and connect pin 3 to
power supply common. lf the “external valve return” is not enabled, place
the black jumper at J1 in the B-C position.

Note: lf the “external valve return” feature is not enabled, the valve voltage
is returned internally on the printed circuit board and the connection wiring
resistance must be less than 0.2 ohms.

Soft Start

Refer to Figures 3-3, 3-4 and 3-5. To enable soft start, place the red
jumper on the controller printed circuit board at J2 in the right hand (SS)
position.

To disable soft start, place the red jumper on the controller printed circuit
board at J2 in the left hand (N) position.

2-11

Section 2 Installation

Brooks® Models 5965, 5851EM

RemoteTransducer lnput (Factory lnst alled Option)
Refer to Figures 3-3, 3-4 and 3-5. To allow the Model 5965/5851EM control
circuitry and valve to be used with an 0-5 Vdc external transducer signal, a
green jumper is moved to the lower two pins at J7. With this feature
enabled a 0-5 Vdc signal may be applied to the external transducer input
terminal. The Model 5965/5851EM controller circuitry will modulate the
valve position to increase or decrease the flow rate to maintain the
transducer output at the desired set point. The control circuitry is reverse
acting, e.g., for an increase in transducer output the flow will
correspondingly be decreased.

Configuring PC Board (Current l/O Option)
Setpoint (Command) lnput

The mass flow controller can be configured for voltage or current setpoint
(command) input. Jumper J7 (green) must be in the right-hand position for
0-5 Vdc setpoint and in the left-hand position for a 4-20 mAdc setpoint
input.

SignalOutput

A 0-5 vdc flow signal output is always avaílable. The current signal output
is jumper selectable for either 0-20 mAdc or 4-20 mAdc. Jumpers JB and
J4 (blue) must be in the upper position for 0-20 mAdc output and in the
lower position for 4,20 mAdc output.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

Note: Both J3 and J4 must be in the same position. Jumpers J3 and J4 do
not affect the voltage output.

Soft Start

To enable soft start, place Jumper J2 (red) in the right-hand position (ss).
To disable soft start, place Jumper J2 in the left-hand position (N).

2-12

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

3-1 Theory of Operation

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

The thermal mass flow sensing technique used in the Model 5851EM
works as follows:

Constant power (p) is provided to the heater winding which is located at
the midpoint of the sensor tube. Refer to Figure 3-1. During no flow
conditions, the heat reaching each temperature sensor is equal.Therefore
the temperatures T1 and T2, are equal. When gas flows through the tube,
the upstream sensor is cooled and the downstream sensor is heated
producing a temperature difference. The temperature difference T2-T1 is
directly proportional to the gas mass flow. The equation is:

ΔT = A * P * Cp * m

Where:
ΔT = T emperature difference T2 - T1 (K)
Cp = Specific heat of the gas at constant pressure (kJ/kg-K)
P = Heater power (kJ/s)
m = Mass flow (kg/s)
A = Constant of proportionality (s2-K2/kJ2)

A bridge circuit interprets the temperature dif ference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate.

Figure 3-1 Flow Sensor Operational Diagram

3-1

Section 3 Operation

Brooks® Models 5965, 5851EM

The flow restrictor shown in Figure 3-1 peforms a ranging function similar
to a shunt resistor in an electrical ammeter. The restrictor provides a
pressure drop that is linear with flow rate. The sensor tube has the same
linear pressure drop/flow relationship. The ratio of the restrictor flow to the
sensor tube flow remains constant over the range of the meter. Different
restrictors have different pressure drops and produce controllers with
different full scale flow rates. The span adjustment, in the electronics,
affects the fine adjustment of the controller’s full scale flow
ln addition to the mass flow sensor, the Model 5965/5851EMEM mass flow
controller has an integral control valve and control circuit as shown in
Figure 3-2.The control circuit senses any difference between the flow
sensor signal and adjusts the current in the modulating solenoid valve to
increase or decrease the flow .

3-2 Operating Procedure

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

a. Apply power to the controller and allow approximately 45 minutes for

the instrument to warm up and stabilize its temperature.
b. Turn on the gas supply.
c. Command zero percent (0%) flow and observe the controller’s output

signal. lf the output is not zero mVdc (+10 mVdc), check for leaks and,
if none are found, refer to the re-zeroing procedure in Section 3-3.

Figure 3-2 Flow Control System Block Diagram

3-2

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

3-3 Zero Adjustment

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

d. Set the command for the desired flow rate to assume normal operation.

Note: lf a separate positive shut-off solenoid valve is not installed, a
flow signal may result from leak-through. Leak-through is more
significant with stainless steel and Teflon valve seats.

Each Model 5965/5851EM is factory adjusted to provide azero +10 mVdc
signal (or a 4 mAdc +.05 mAdc signal, Current l/O Version) at zero flow .
After initial installation and warm-up in the gas system, the zero flow
indication may be other than the factory setting. This is primarily caused by
changes in temperature between our calibration laboratory and the final
installation. The zero flow reading can also be affected, to a small degree,
by changes in line pressure and mounting attitude.
To check zero in an unpressurized line, always mount the controller in its
final configuration and allow a minimum of twenty minutes for the
temperature of the controller and its environment to stabilize. using a
suitable voltmeter , check the controller output signal. lf it dif fers from the
factory setting, adjust it by removing the lower pot hole plug which is
located closest to the controller body . Adjust the zero potentiometer (refer
to Figure 3-6) until the desired output signal is obtained.

3-4 Calibration Procedure

Note 1: lf the valve has been disassembled and any of the following parts
have been replaced, the device must be returned to Brooks Instrument for
control valve adjustment before the Model 5965/5851EM may be
calibrated.

•orifice • lower guide spring

•valve stem • valve seat

•plunger • gland nut

•plunger extension

Note 2: calibration of the Model 5965/5851EM mass flow controller
requires the use of a DigitalV oltmeter (DVM) and a precision flow standard
calibrator such as the Brooks lnstrument’s V ol-U-Meter®. lt is
recommended that the calibration be performed only by trained and
qualified service personnel.

Note 3: lf the mass flow controller is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor (refer to
section 4-4). size the orifice for actual operating conditions (refer to
Section 4-5).

3-3

Section 3 Operation

Brooks® Models 5965, 5851EM

Note 4: lf Brooks secondary electronics are being used as a power supply
during the calibration, the 5 volt reference must be enabled on the card
Edge version for proper operation (see Section 2-7). Remember to
deactivate the 5 Volt reference before inst alling the calibrated mass flow
controller in the system where Terminal 10 is grounded.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

Figure 3-3 Card Edge PC Board Jumper Location and Function

3-4

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

Figure 3-4 D-Connector PC Board Jumper Location and Function (Voltage I/O Version)

3-5

Section 3 Operation

Brooks® Models 5965, 5851EM

TEST POINTS:

CIRCUIT COMMON TP4

VALVE VOLTAGE TP3

LINEARITY VOLTAGE TP2

SENSOR VOLTAGE TP1

(Multiplied by +100)

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

J7 - GREEN
SETPOINT INPUT SIGNAL TYPE
(Mass Flow Controller only)

A

NOTE:

The 5V Reference is always enabled

and is available on Pin 11.

A

0 - 5 VOLTS4 - 20 mA

Part Number: 541B122AAG

September, 2009

ADJUSTMENT POTENTIOMETERS:

SPAN

LINEARITY

ANTICIPATE

ZERO

J2 - RED
SOFT START

NSS

Enabled

NSS

Disabled

(Standard)

J7

A

R1

R2

R3

R4

J2

NSS

CS REV H AND HIGHER.

COMPONENT SIDE SHOWN.

SENSOR

CONNECTOR

VALV E
CONNECTOR

J4

B

A

B

A

J3

J3 & J4 - BLUE
CURRENT OUTPUT RANGE

J4

B

A

B

A

J3

4 - 20 mA

Output

Note: Does not affect voltage output.

0 - 20 mA

J4

J3

Output

B

A

B

A

Figure 3-5 D-Connector PC Board Jumper Location and Function (Current I/O Version)

3-6

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

Figure 3-6 Model 5851EM Calibration Connections

Note 5: when calibrating the current l/o Version, it is easiest to calibrate
using 0-5 vdc command and flow signals. Refer to section 2, Figures 2-4,
2-6 and 3-5 for proper hookups. After calibration, the Model 5965/5851EM
may be reconfigured for Current l/O operation with negligible change in
calibration.

a. with the controller installed in an unpressurized gas line, apply power

and allow approximately 45 minutes for warm-up. During the warm-up,
adjustment and calibration check procedures do not allow the control
valve to open when gas flow is not present. This situation is not a
normal operating mode and will cause abnormal heat-up of the control
valve. with this abnormally warm valve, the meter will be difficult to
calibrate. This situation can be prevented by switching the valve
override "closed" when there is no gas flow or by setting the command
to less than one percent (1%). Also, avoid unnecessary periods with the
valve override "open".

Note: For Model 5965/5851EMs with normally open valves this condi­tion can be prevented by switching the valve override "open" or by
setting the command to 100% when there is no gas flow. Also, avoid
unnecessary periods with valve override "closed".

3-7

Section 3 Operation

Brooks® Models 5965, 5851EM

b. Adjust the anticipate potentiometer with 20 clockwise full turns. Next,

c. Connect the DVM positive lead to the 0-5 Volt signal output (Terminal 3

d. Apply pressure to the system and insure that the zero signal repeats

e. Set the command potentiometer (connected to Terminals A, B and 10 of

f. Connect the DVM positive lead to TP1 (-100x sensor voltage) and the

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

adjust the anticipate potentiometer with 10 counterclockwise turns to

center the potentiometer. This will provide a rough adjustment of this

circuit and make the flow more stable for calibration.

Card Edge, Pin 2 D-Connector) and the negative lead to signal

common (TP4). Adjust the zero potentiometer for an output of zero mv

+2 mV .

within 2 mV of the voltage set in step c above. lf the zero does not

repeat, check for leakage. Note: controllers supplied with all met al or

Teflon valve seats do not provide tight shut-oft. A 0-3% leak-through is

typical. For metal orTeflon seat controllers, close a downstream

shut-off valve and observe the zero signal.

the Card Edge connector and T erminals 1, 9 and 11 of the

D-Connector) for 100% of flow (5.000 V). Connect the DVM positive

lead to TP2 (linearity voltage) and the negative lead to TP4 (circuit

common). Adjust the linearity potentiometer for an output of 0.0 V

(zero Volts).

negative lead toTP4 (circuit common).The command potentiometer

should still be set at 100% flow (5.000 V). Measure the flow rate using

suitable volumetric calibration equipment. To adjust the controller to the

proper full scale flow , calculate a new TP1 volt age using the following

equation:

Figure 3-7 Fast Response Adjustment

3-8

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

Note: The voltage at TP1 is -100 times the output voltage (+100 times
for Current l/O Version) of the sensor. This voltage can range from -1.2
to -12 Volts (+1.2 to 12 Volts for the Current l/O Version), however, it is
recommended that this voltage stay between -2.0 and -9.0 (+2 and +9
for Current l/O Version) Volts for proper operation. lf the recommended
voltage range exceeds the desired range, accuracy and/or signal
stability may not be achieved. lf one of the limits is reached, check the
restrictor and orifice sizing procedures. Refer to Sections 4-5 and 4-6
respectively.

g. Set the command potentiometer for zero percent of flow. Connect the

DVM positive lead to flow signaloutput (T erminal 3 Card Edge,
Pin 2 D-Connector) and the negative lead to TP4. Readjust the zero
potentiometer for an output of zero mV +2 mV as necessary.

h. Set the command potentiometer for 50% of flow (2.500 V) and measure

the flow rate. Calculate the error as a percentage of full scale.

Example:

What is the percent of full scale error when full scale flow rate is equal
to 100 slpm?
Measured flow rate = 48.5 slpm
Desired flow rate = 50.0 slpm

i. Calculate theTP2 correction voltage:

(error recorded in Step h) x 0.450 Volts
Example:

Error = -1.5%
TP2 correction voltage = -1.5 x 0.450 = -0.675 Volts
NewTP2 voltage = zero volts + (-0.675) = -0.675 V olt s

j. Set the command potentiometer for 100% flow (5.000 V). Connect the

DVM positive lead to TP2 and the negative lead to TP4.

k. Adjust the linearity potentiometer for an output equal to the new

calculated TP2 voltage.

l. Repeat Steps f, g and h.

1. lf the error recorded in step h is less than 0.5%, then the calibration
procedure is complete.

2. lf the error is greater than 0.5%, set the command potentiometer for
100% (5.000 V). Connect the DVM positive lead to TP2 (linearity
voltage) and the negative lead to TP4 (circuit common). Calculate a
newTP2 voltage as follows:

3-9

Section 3 Operation

Brooks® Models 5965, 5851EM

Example:

Controller error = 0.7%
Measured TP2 voltage = -0.567 V olts
TP2 correction = 0.7 x 0.450 = 0.315 Volts
New TP2 correction = 0.315 + (-0.567) = -0.252 Volts
Adjust the linearity potentiometer for an output equal to the new TP2
voltage and then repeat Step s f, g and h.

Note:The voltage at TP2 can range from -10 to +3. It is recommended
however, that this voltage st ay between -2.5 and +2.5 V olt s for proper
operation. lf the recommended voltage range is exceeded, the desired
accuracy and/or signal stability may not be achieved. lf one of the limits is
reached, check the restrictor sizing (refer to Section 4-6).

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

3-5 Response

Two methods of adjusting the step response of the Model 5965/5851EM
mass flow controllers can be used.

Adjustment #1 describes a method that will get the step response close to
optimum quickly and without any flow measuring equipment. This method
should be used when the response time of the flow controller is not critical
to overall system performance.

Adjustment #2 describes a method that will allow adjustment of your Model
5965/5851EM mass flow controller to optimum step response
performance. This method is the preferred way to adjust the step
response. Adjustment of the fast response circuit will not af fect the
accuracy of the flow controller as adjusted in Section 3-4.

Response Adjustment #1 (Specification not Guaranteed)
Note:This procedure requires an oscilloscope, chart recorder or a DVM
with a sample speed of three samples, or greater, per second to monitor
the rate of change of the output signal.

a. Set the command potentiometer for 100% of flow (5.000 V). and wait

about 45 seconds for the flow output signal to stabilize.

b. S tep the command signal to zero percent or activate valve override

closed to stop the flow. Observe the flow signal output as it decays.

3-10

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5965, 5851EM

c. The behavior of the flow signal during this transition between 100% and

zero percent flow indicates the adjustment required of the anticipate
potentiometer (refer to Figure 3-7).
1 . lf the flow signal decays to -.05 to -.5 Volt, then rises to zero Volts,

the anticipate potent¡ometer is properly adjusted.

2. lf the flow signal decays rapidly and goes below -.5 V olt before rising
to zero Volt, the anticipate potentiometer must be adjusted clockwise
and S teps a and b repeated.

3. lf the flow signal decays slowly and does not go below -.5 Volt, the
anticipate potentiometer must be adjusted counterclockwise and
S teps a and b repeated.

Response Adjustment #2 (Specification Guaranteed)
Adjustment of the anticipate potentiometer to obtain a flow rate
pedormance to be within 2% of flow rate commanded in less than three
seconds (six seconds for Current l/O Version) after command change
requires the use of a fast response flowmeter (500 millisecond response to
be within 0.2% of final value or better) in series with the Model 5965/
5851EM and a storage oscilloscope or recorder.

a. Make a step change in command to the controller from zero to 100% of

full scale flow and record the output signal of the fast response
flowmeter which is in series with the Model 5965/5851EM.

b. lf this signal shows more than 4% overshoot, adjust the anticipate

potentiometer one-half to one turn counterclockwise. lf the signal does
not show overshoot, but is not within 2% full scale of final value after
three seconds (six seconds for Current l/O Version), adjust the
anticipate potentiometer one-half to one turn clockwise. Set the
command potentiometer for zero percent of f low .

c. Repeat Steps a and b until the fast response flowmeter output signal

meets the specified response requirements. Note: With the above
equipment, the anticipate potentiometer can be adjusted to give
optimum response characteristics for any process.

3-11

Section 3 Operation

Brooks® Models 5965, 5851EM

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

3-12

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

4-1 Overview

Section 4 Maintenance

& T roubleshooting

Brooks® Models 5965, 5851EM

4-1

Section 4 Maintenance
& T roubleshooting

Brooks® Models 5965, 5851EM

No routine maintenance is required on the Models 5965 and 5851EM. If an
in-line filter is used, the filtering element should periodically be replaced.

4-2 Troubleshooting

It is important that this controller only be serviced by properly
trained and qualified personnel.

A. System Checks

The Models 5965 and 5851EM are generally used as a component in gas
handling systems which can be quite complex. This can make the task of
isolating a malfunction in the system a difficult one. An incorrectly
diagnosed malfunction can cause many hours of unnecessary downtime. If
possible, make the following system checks before removing a suspected
defective mass flow controller for bench troubleshooting or return,
especially if the system is new.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

CAUTION

1. V erify a low resist ance common connection, correct power supply
voltage and that signals are reaching and leaving the controller . The
breakout board, P/N S273Z649AAA Card Edge version or
P/N S273Z668AAA D-Connector version listed in Section 5, will make
this job much easier .

2. V erify that the process gas connections have been correctly terminated
and leak-checked.

3. If the mass flow controller appears to be functioning but cannot achieve
set-point, verify that sufficient inlet pressure and pressure drop are
available at the controller to provide the required flow .

4. V erify that all user selectable jumpers are in their desired positions
Refer to Figures 3-5 through 3-9.

WARNING

If it becomes necessary to remove the controller from the system
after exposure to toxic, pyrophoric, flammable or corrosive gas,
purge the controller thoroughly with a dry inert gas such as
Nitrogen before disconnecting the gas connections. Failure to
correctly purge the controller could result in fire, explosion or
death. Corrosion or contamination of the mass flow controller,
upon exposure to air, may also occur.

4-2

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Section 4 Maintenance

& T roubleshooting

Part Number: 541B122AAG
September, 2009

Brooks® Models 5965, 5851EM

B. Bench Troubleshooting

1. Properly connect the mass flow controller to a

+ 15 Vdc power supply
command voltage source (+27.5 +28 Vdc for Current l/O version) and
connect an output signal readout device (4-1 12 Digit V oltmeter
recommended) to Terminals 2 and 3 or D-Connector pins 2 and 10
(refer to Figs.2-2,2-3 and 2-9. Apply power , set the command voltage
to zero and allow the controller to warm-up for 45 minutes. Do not
connect to a gas source at this time.

Observe the output signal and, if necessary, perform the zero
adjustment procedure (Section 3-3). lf the output signal will not zero
properly, refer to the sensor troubleshooting section and check the
sensor. lf the sensor is electrically functional, the printed circuit board is
defective and will require replacement.

Table 4-1 Bench Troubleshooting

Trouble Possible Cause Check/Corrective Action

Actual flow overshoots setpoint by Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 4 .
more than 5% full scale.

Output stays at zero level regardless Clogged Sensor tube and restrictor and/or a Clean sensor. Refer to cleaning procedure, Section 4.
of command and there is no flow clogged orifice.
through the controller.

Output signal stays at +6.8 Volts Valve stuck open or leaky. Clean and/or adjust control valve. Refer to cleaning procedure and/or Section 4-2D.
(26 mA for Current I/O Vers.) regard­less of command and there is flow +15 Volts applied to the valve override input. Check the valve override terminal. Refer to Section 2-6 for terminal assignments.

Output signal follows set-point at Leaky control valve Disassemble and repair valve. Refer to Section 4-3.
higher commands but will not go to
zero. Excessive resistance in valve voltage return line. Reduce wiring resistance or reconfigure controller for "External Valve Return." Refer

Output signal follows set-point at Insufficient inlet pressure or pressure drop. Adjust pressures, inspect in-line filters and clear/replace as necessary.
lower commands but does not reach
full scale. Partially clogged sensor Check calibration. Refer to Section 3-7.

Controller grossly out of calibration. Partially clogged sensor. Clean sensor. Refer to the cleaning procedure, Section 4-2D.
Flow is higher than desired.

Controller grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-3.
Flow is lower than desired.

Controller oscillates. Pressure drop or inlet pressure excessive. Adjust pressures.

Closed or clogged flow path up- or downstream or Open valve(s). Clean filter(s). Remove any foreign material from gas delivery system.
the controller.

Clogged Control Valve. Check TP3 with the command at 100%. If the voltage is more negative than -11V,

Internal reference being used as the command Refer to Section 3-4, Figure 3-3.
source and the yellow jumper is in the wrong
position.

-15 volts applied to the valve override input Check valve override input. Refer to Section 2-6 for terminal assignments.

Defective printed circuit board. Replace printed circuit board. Refer to Section 4-3.

Valve voltage not returned, Pin L at common. Check jumper for external valve return. Refer to Section 3-4.

"Valve-off" pin grounded. Check "Valve-Off" input. Refer to Section 2-6 for terminal assignments.

Defective printed circuit board. Replace printed circuit board. Refer to Section 4-3.

Command input floating. Connect command signal. Refer to Section 2-6 for terminal assignments.

Pin D connected to common. Remove Pin D from common.

Partially clogged valve. Disassemble and repair control valve. Refer to Section 4-3.

Valve out of adjustment. Adjust valve. Refer to Section 4-4.

Valve guide spring failure. Check valve spring.

Oversized orifice. Check orifice size. Refer to Section 4-6.

Valve out of adjustment. Adjust valve. Refer to Section 4-4.

Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-8.

Faulty pressure regulator. Check regulator output.

Defective printed circuit board. Replace printed circuit board. Refer to Section 4-3.

disassemble and repair the control valve. Refer to Sections 4-3 and 4-4.

through the controller.

to Section 3-4.

4-3

Section 4 Maintenance
& T roubleshooting

Brooks® Models 5965, 5851EM

2. Connect the controller to a source of the gas on which it was originally

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

calibrated. Command 100% flow and adjust the inlet and outlet
pressures to the calibration conditions. V erify that the output signal
reaches and stabilizes at 5.000 V olts. Vary the command voltage over
the 2-to-100% range and verify that the output signal follows the
setpoint.

Apply +15 V olt s to the valve override input (refer to Figs. 2-2, 2-3
and 2-4 for terminal assignments) and verify that the output exceeds

5.000V olts.
Apply -15 Volt s to the valve override terminal (connect valve override

pin +0 ground for current l/O versions) and verify that the output signal
falls below 0.100 V olt s. lf possible, connect a flow measurement device
in series with the mass flow controller to observe the actual flow
behavior and verify the accuracy of the mass flow controller. lf the mass
flow controller functions as described above, it is functioning properly
and the problem is most likely elsewhere. Table 4-1 lists possible
malfunctions which may be encountered during bench troubleshooting.

Table 4-2 Sensor Troubleshooting

SENSOR

SCHEMATIC

Remove the sensor connector from the PC Board for this procedure.

OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL

Pin 1 or 4 to meter body sensor common (4) are shorted, an ohmmeter

PIN
NO. FUNCTION

1 Heater

Upstream

2 Temperature

Sensor (Su)

Downstream

3 Temperature

Sensor (Sd)

4 Sensor Common
5 Heater Common

Open circuit on ohmmeter. If either heater (1) or

reading will be obtained.

4-4

Pin 4 to Pin 2 Nominal 1100 ohms reading, depending on

temperature and ohmmeter current.

Pin 4 to Pin 3

Pin 5 to Pin 1 Nominal 1200 ohm reading.

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

C. Sensor Troubleshooting

Note:Do not attempt to disassemble the sensor.

D. Cleaning Procedures

Section 4 Maintenance

& T roubleshooting

Brooks® Models 5965, 5851EM

lf it is believed the sensor coils are either open or shorted, troubleshoot
using Table 4-2. If any of the steps do not produce expected results, the
sensor assembly is defective. Return to Brooks lnstrument for sensor
replacement.

No routine external cleaning is required for Brooks thermal mass flow
controller. Should the Models 5965 or 585lEM Mass Flow Controller
require cleaning due to deposition, return the device to
Brooks Instrument for servicing by trained technicians.

4-5

Section 4 Maintenance
& T roubleshooting

Brooks® Models 5965, 5851EM

4-3 Gas Conversion Factors

If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor . A list of sensor conversion factors is given in Table 4-5.
To change to a new gas, multiply the output reading by the ratio of the gas
factor for the desired gas by the gas factor for the calibration gas used.

Example:

The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide
The output reading is 75 sccm when Carbon Dioxide is flowing
Then 75 x 0.773 = 57.98 sccm

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

Where,
P1 = percentage (%) of gas 1 (by volume)

P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)

4-6

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Section 4 Maintenance

& T roubleshooting

Part Number: 541B122AAG
September, 2009

Table 4-3 Conversion Factors (Nitrogen Base)

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH

Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C2BrF
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C4H
Butane C4H
1-Butene C4H
CIS-2-Butene C4H
Trans-2-Butene C4H

Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H

Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2:CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013

2

3H4

3

3

3

3

5

3

3

3

6

10

8

8

8

2

2

4

4

2

2

2

3

2

3

5

3

3

2

8

6

2

6

2

4

2

2

2

4

3

2

2

2

2

Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H

Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879

4

6

6

6

FACTOR FACTOR (kg/m

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.773 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

Brooks® Models 5965, 5851EM

Ref. No. J-836D508 Gasdata.doc Vsn. 8.6

3

)

4-7

Section 4 Maintenance
& T roubleshooting

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

Brooks® Models 5965, 5851EM

Table 4-3 Conversion Factors (Nitrogen Base) Continued

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Ethylene C2H
Ethylene Oxide C

Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl

Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C
Hexafuoropropylene (HFP) C
Hexamethyldisilane (HMDS) (CH
Hexane C
Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645

4

O 0.589 1.254 1.965

2H4

2

3

4

4

3

3

6

2F6

3F6

2)6Si2

6H14

2

Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H2Se 0.837 1.695 3.613
Hydrogen Sulfide H2S 0.850 1.108 1.539

Iodine Pentafluoride IF
Isobutane C4H
Isobutene C4H
Isopentane C5H

5

10

8

12

Krypton Kr 1.382 1.729 3.708
Methane CH

Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C5H
Methyl Chloride CH3CL 0.687 1.347 2.308

4

4

10

Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH

2

2

Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913

4

2

2

3

3

Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F

Oxygen O
Oxygen Difluoride OF
Ozone O

Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C3F

8

2

2

3

5

12

10

8

8

FACTOR FACTOR (kg/m

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

0.179 2.591 8.396

Ref. No. J-836D508 Gasdata.doc Vsn. 8.6

September, 2009

3

)

4-8

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Section 4 Maintenance

& T roubleshooting

Part Number: 541B122AAG
September, 2009

Table 4-3 Conversion Factors (Nitrogen Base) Continued

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Pentane (n-Pentane) C
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH
Propylene (Propene) C

3CH2CH3

)C

Rhenium Hexafluoride ReF
Silane SiH

Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F

Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF

Uranimum Hexafluoride UF

5H12

2

3

5

3

3H8

3H6

6

4

4

4

2

6

4

3

2

4

4

4

3

3

3

6

6

Vinyl Bromide C2H3Br 0.524 1.985 4.772
Vinyl Chloride C2H3CL 0.542 1.492 2.788
Vinyl Fluoride C2H3F 0.576 1.281 2.046

Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

FACTOR FACTOR (kg/m3)

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

Brooks® Models 5965, 5851EM

Ref. No. J-836D508 Gasdata.doc Vsn. 8.6

Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by
volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation

is only accurate to ±5%. The sensor conversion factors given in Table 4-5
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However, gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.

4-9

Section 4 Maintenance
& T roubleshooting

Brooks® Models 5965, 5851EM

4-4 Orifice Sizing

The Orifice Sizing Nomograph, Figure 4-4, is used to calculate the control
valve's orifice size when changing any or all of the following factors from
the original factory calibration:

The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the aforementioned factors,
calculate the new orifice size by following the procedure and example
outlined in the following paragraphs.

Example: Determine the orifice size for the following conditions:

Gas: Hydrogen
Flow Rate: 2,000 sccm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

gas
operating pressure (inlet and outlet)
flow range

1. Determine Nitrogen equivalent flow rate (refer to Table 4-5).

OR

Where:
Q

NITROGEN

Q

GAS

ρρ

ρ

ρρ

NITROGEN

ρρ

ρ

ρρ

GAS

SG

GAS

= Nitrogen equivalent flow rate (sccm)
= Desired flow rate of the gas (sccm)
= Density of Nitrogen at 70°F
= Density of the gas (taken at customer temperature)
= Specific gravity of the gas (taken at customer

temperature)

Refer to Table 4-5 for densities.

4-10

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Section 4 Maintenance

& T roubleshooting

Brooks® Models 5965, 5851EM

Figure 4-1 Model 5965/5851EM Orifice Sizing Nomograph

4-11

Section 4 Maintenance
& T roubleshooting

Brooks® Models 5965, 5851EM

Example:

In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:

= 2,000 sccm

Q

gas

= 2,000 x .269
= 538 sccm Nitrogen

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

Where P

P
P

= percentage by volume of gas 1

1

= percentage by volume of gas 2

2

= percentage by volume of gas n

n

Example: Find the Nitrogen equivalent for 20 slpm of a 20% Helium and
80% Chlorine gas mixture.

Q

Nitrogen

=Q

(orifice conversion factor)

gas

= 20 x 1.439
= 28.78 slpm Nitrogen

2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7
to convert to absolute pressure (psia).

Outlet Pressure — 30 psig + 14.7 = 44.7 psia
Inlet Pressure — 50 psig + 14.7 = 64.7 psia

4-12

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

3. Determine Critical Pressure Drop

Section 4 Maintenance

& T roubleshooting

Brooks® Models 5965, 5851EM

Critical pressure drop occurs when the outlet pressure (psia) is less
than half the inlet pressure (psia) or

If these conditions exist, the pressure drop (Dp) should be calculated
as follows:

Dp = Pressure drop (psi)
Pin= Inlet pressure (psia)

If these conditions do not exist, pressure drop equals the inlet pressure
minus the outlet pressure.

Then Dp = 64.7 - 44.7 = 20 psi

4. Using the nomograph, locate the pressure drop (psi) on the vertical line
marked "Dp" (Point A).

5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical
line marked "Q

6. Draw a line connecting Dp and Q

Nitrogen

" (Point B).

and extend it to the baseline.

Nitrogen

Mark this point (Point C).

7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D).

8. Draw a line connecting P

(Point D) and baseline (Point C) and then

in

extend this line to the vertical line marked Do (orifice diameter, inches)
(Point E).

9. This point on the line is the minimum orifice size for the given
conditions. If this point is between two orifice sizes, select the next
largest size orifice to ensure adequate flow . If the orifice selected falls
below .0013, choose .0013 size orifice.

For the example in Figure 4-5, the .007 size orifice would be selected.

4-13

Section 4 Maintenance
& T roubleshooting

Brooks® Models 5965, 5851EM

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

4-14

Figure 4-2 Example Nomograph

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

4-5 Restrictor Sizing

The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains the ratio of sensor flow to restrictor flow, however, the
total flow through each restrictor is different. Different restrictors (active
area) have different pressure drops and produce controllers with different
full scale flow rates. For a discussion of the interaction of the various parts
of the controller, you are urged to review Section 3-3, Theory of Operation.
If the restrictor assembly has been contaminated with foreign matter, the
pressure drop versus flow characteristics will be altered and it must be
cleaned or replaced. It may also be necessary to replace the restrictor
assembly when the mass flow controller is to be calibrated to a new flow
rate.
Restrictor assembly replacement should be performed only by trained
personnel. See Section 4-3, Disassembly and Assembly, for restrictor
removal and installation.

Restrictors

The Model 5965/5851EM mass flow controller/device uses one type of
restrictor assembly depending on full scale flowrate and expected service
conditions.

Section 4 Maintenance

& T roubleshooting

Brooks® Models 5965, 5851EM

1. Sintered element for nitrogen equivalent flow rates from 10 to 100

slpm

Sizing

All Model 5965/5851EM Series Restrictor Assemblies are factory adjusted
to provide a specific pressure drop for each flow rate. This corresponds to
the desired full scale flow rate. A list of restrictor assemblies used in the
Model 5965/5851EM mass flow controller/device is shown in Table 4-6.

Example:
The desired gas is Cyanogen (C
The desired full scale flow rate is 30 slpm.
Sensor conversion factor is 0.499 from Table 4-5.
Nitrogen equivalent flow = 30/0.499 = 60.1 slpm Nitrogen

2N2

).

4-15

Section 4 Maintenance
& T roubleshooting

Brooks® Models 5965, 5851EM

In the example, the restrictor should be sized for a 60.1 slpm flow rate.

Note: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.

If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.

Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

September, 2009

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.

Table 4-4 Model 5965/5851EM Standard Restrictors

Range Restrictor

slpm Nitrogen Element

Equivalent Flow* Combination Part Number

4.6 to 15 1-40 micron (1 inch) S613E666BMG
15 to 26 1-40 micron S613E657BMG
26 to 42 2-40 micron S613E658BMG
42 to 60 3-40 micron S613E659BMG
60 to 79 2-40 micron/1-60 micron S613E661BMG
79 to 93 1-40 micron/2-60 micron S613E663BMG

93 to 130 3-60 micron S613E655BMG
130 to 400 3-60 micron S613E662BMG
400 to 600 3-100 micron S613E656BMG

* Based on 0°C Standard Reference Temperature

NOTE: If the nitrogen equivalent flow is between two sizes, select the
larger size.

4-16

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B122AAG
September, 2009

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).

Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten

være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%

dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Brooks® Models 5965, 5851EM

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.

Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.

Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von

360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-

Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-1

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

Brooks® Models 5965, 5851EM

English

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used

providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE

certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

September , 2009

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).

Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un

apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,

se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente

en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un

apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.

A-2

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B122AAG
September, 2009

Français

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la

Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal

d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à

chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à

la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Brooks® Models 5965, 5851EM

Greek

A-3

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

Brooks® Models 5965, 5851EM

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).

E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a
marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende
usare propri cavi, questi devono possedere una schermatura del 100%.

I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere
metallico e fornito di fissaggio per lo schermo del cavo.

Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.

Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%

per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.

September , 2009

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie: CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan

de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is

afgeschermd met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen

Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.

Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,

A-4

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B122AAG
September, 2009

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.

For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet
innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet
elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming

som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen

Brooks® Models 5965, 5851EM

Português

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).

Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-

se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a

100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

A-5

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

Brooks® Models 5965, 5851EM

Suomi

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse,
olisi hankittava 100%:sti suojattu kaapeli.

“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia
kaapeliliittimiä kiinnitettäessä suojaa.

Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne

olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

September , 2009

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).

Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.

“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.

Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders
skärmning.

Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med

CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-6

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Brooks® Models 5965, 5851EM

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INTENTIONALLY

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Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng

Part Number: 541B122AAG

Brooks® Models 5965, 5851EM

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

September , 2009

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe [phone]
Asia [phone]

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks ................................................................. Brooks Instrument, LLC

Freon ........................................................ E.I. DuPont de Nemours & Co.

Kalrez.................................................................. DuPont Dow Elastomers

Teflon........................................................ E.I. DuPont de Nemours & Co.

VCO ............................................................................................ Cajon Co.

VCR ............................................................................................ Cajon Co.

Viton...................................................... DuPont Performance Elastomers

Vol-U-Meter ......................................................... Brooks Instrument, LLC

1 888 554 FLOW