BOC Edwards iL70, iL600 Instruction Manual

A533-71-880

Issue A

Manor Royal, Crawley, West Sussex, RH10 2LW, UK Telephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453 http://www.bocedwards.com

iL Dry Pumping Systems

Instruction Manual

Declaration of Conformity

We, BOC Edwards,

Manor Royal, Crawley, West Sussex RH10 2LW, UK

declare under our sole responsibility that the product(s)

iL Dry Pumping Systems: iL70 iL600 iL70

✝

iL600

✝

460 V, 60 Hz, 3-phase A533-71-908 A533-72-908 A533-74-908 A533-75-908 200/208 V, 50/60 Hz, 3-phase A533-71-945 A533-72-945 A533-74-945 A533-75-945 380/415 V, 50 Hz, 3-phase A533-71-946 A533-72-946 A533-74-946 A533-75-946 230 V, 60 Hz, 3-phase A533-71-957 A533-72-957 A533-74-957 A533-75-957

✝ Sensor Configured Systems

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN50081-2 Electromagnetic Compatibility, General Emission Standard.

Generic Standard Class: Industrial Environment.

EN50082-2 Electromagnetic Compatibility, General Immunity Standard.

Generic Standard Class: Industrial Environment. EN 60204-1 Electrical Safety; Machines. EN 1012-2 Compressors and Vacuum Pumps - Safety Requirements;

Part 2 - Vacuum Pumps.

following the provisions of

73/023/EEC Low Votage Directive. 89/336/EEC Electromagnetic Compatibility Directive 98/37/EC Machinery Safety Directive.

Dr. S. Ormrod, Technical Director Date and Place

This product has been manufactured under a quality system registered to ISO9001

P900-75-000 Issue F 2B01-010

A533-71-880

Setup Password

iL Dry Pumping Systems - Setup Password

The setup password for this equipment is preset as follows:

SETUP PASSWORD: 202

You can remove this sheet from the instruction manual and retain it in a safe place to prevent unauthorised access to the setup menus in the iL system.

CONTENTS

Section Title Page

1 INTRODUCTION 1-1

1.1 Scope and definitions 1-1

1.2 Overview 1-2

1.2.1 The iL system 1-2

1.2.2 Applications 1-2

1.3 The LCDP dry pump 1-4

1.4 The LCDP gas system (sensor-configured iL systems only) 1-4

1.5 The LCMB mechanical booster pump (iL600 only) 1-5

1.6 Temperature control system 1-5

1.6.1 LCDP pump temperature control system 1-5

1.6.2 LCMB pump temperature control system (iL600 only) 1-6

1.7 Exhaust system 1-7

1.8 Electrical system 1-7

1.8.1 Introduction 1-7

1.8.2 Electrics and Pump Control Module 1-7

1.8.3 Sensor Monitoring Module (sensor-configured iL systems only) 1-15

1.8.4 Gas Module (sensor-configured iL systems only) 1-15

1.9 Controls and indicators 1-15

1.10 Control functions 1-16

1.10.1 Priority of control 1-16

1.10.2 Setpoints, warning and alarm conditions 1-17

1.10.3 Safety sensors 1-17

1.11 Pump Display Module (optional accessory) 1-18

1.12 Accessories 1-20

2 TECHNICAL DATA 2-1

2.1 General 2-1

2.2 Performance 2-1

2.3 Temperature control system 2-9

2.4 Cooling-water supply 2-9

2.5 Lubrication 2-10

2.5.1 LCDP pump 2-10

2.5.2 LCMB pump (iL600 only) 2-10

2.6 Electrical data 2-10

2.7 Gas system (sensor-configured iL systems only) 2-11

2.8 Construction materials 2-11

2.9 Default setpoints 2-12

2.10 Connections 2-12

2.11 Item Numbers 2-14

2.11.1 Standard iL systems 2-14

2.11.2 Sensor-configured iL systems 2-14

3 INSTALLATION 3-1

3.1 Safety 3-1

iL Dry Pumping Systems i

dcs/0017/0399

Section Title Page

3.2 Installation checklist 3-1

3.3 Unpack and inspect 3-3

3.4 Remove the enclosure panels 3-6

3.5 Reconfigure the nitrogen and cooling-water connections (if required) 3-6

3.6 Locate the iL system 3-10

3.7 Check the pump oil-levels 3-11

3.7.1 iL70 systems 3-11

3.7.2 iL600 systems 3-11

3.8 Install or replace the Pump Display Module and other optional accessories (if necessary) 3-11

3.8.1 Install the Pump Display Module (optional) 3-11

3.8.2 Install other optional accessories 3-12

3.9 Connect the iL inlet to your vacuum system 3-12

3.10 Connect the iL exhaust outlet to your exhaust-extraction system 3-14

3.11 Connect to your factory extraction system (optional) 3-14

3.12 Connect the nitrogen supply (sensor-configured iL systems only) 3-15

3.13 Leak test the system 3-15

3.14 Install additional safety equipment (optional) 3-16

3.15 Connect to your emergency stop circuit (optional) 3-16

3.16 Electrical supply and RF earth (ground) connections 3-18

3.16.1 Reconfigure the iL system for your electrical supply (if necessary) 3-18

3.16.2 Reconfigure the pump(s) for your electrical supply (if necessary) 3-18

3.16.3 Connect the electrical supply to the iL system 3-20

3.16.4 Connect an additional RF earth (optional) 3-22

3.17 Refit the enclosure panels 3-22

3.18 Connect the cooling-water pipelines 3-24

3.19 Commission the iL system 3-25

3.19.1 Switch on an iL70 system 3-25

3.19.2 Configure and switch on an iL600 system 3-26

4 PUMP DISPLAY MODULE MENUS AND DISPLAY FORMATS 4-1

4.1 Introduction 4-1

4.2 General operation 4-2

4.3 The CANCEL button 4-3

4.4 Display text and variable text 4-3

4.5 Wrap-around 4-4

4.6 Timeout 4-4

4.7 Menu structure 4-4

4.8 Example 4-4

5 OPERATION 5-1

5.1 Introduction 5-1

5.2 Change the display format 5-1

5.2.1 Change the normal display 5-1

5.2.2 Change the display units 5-2

5.3 Take and release control 5-2

ii iL Dry Pumping Systems

Section Title Page

5.4 Start-up 5-3

5.5 Check the nitrogen pressure and adjust if necessary (sensor-configured iL systems only) 5-4

5.6 Monitor the status of the iL system 5-4

5.7 Warning and alarm indications 5-6

5.8 Manual shut-down 5-6

5.8.1 Normal manual shut-down 5-6

5.8.2 Fast manual shut-down 5-7

5.9 Automatic shut-down 5-7

5.10 Emergency stop 5-8

5.11 Restart the LCMB pump after automatic pump shut-down (iL600 only) 5-8

5.12 Restart the iL system after emergency stop or automatic shut-down 5-9

5.13 Operation of iL system components 5-9

5.14 Operation of the load-lock pump 5-10

6 MAINTENANCE 6-1

6.1 Safety 6-1

6.1.1 General requirements 6-1

6.1.2 Recommended purge method 6-2

6.2 Correct use of Swagelok connectors 6-2

6.2.1 Fit a Swaelok connector 6-2

6.2.2 Reconnect Swagelok connector 6-4

6.3 Maintenance frequency 6-4

6.4 Inspect the connections, pipelines, cables and fittings 6-4

6.5 Inspect and clean the exhaust-pipe and check-valve 6-5

6.5.1 Dismantle, clean and refit the exhaust-pipe 6-5

6.5.2 Clean and refit the check-valve (if fitted) 6-6

6.6 Check the LCMB pump oil-level (iL600 only) 6-8

6.7 Check the LCDP pump oil-level 6-9

6.8 Change the LCDP pump oil 6-10

6.9 Change the LCMB pump oil (iL600 only) 6-11

6.10 Adjust the Pump Display Module display viewing angle (if fitted) 6-11

6.11 Replace a fuse 6-12

6.12 Replace the Pump Display Module 6-12

6.13 Relocate the iL system for maintenance 6-13

6.14 Fault finding 6-14

6.14.1 Warning and alarm message fault finding 6-14

6.14.2 Other fault finding 6-14

6.15 Check for free rotation of the LCDP pump 6-25

7 STORAGE, DISPOSAL AND TRANSPORTATION 7-1

7.1 Storage 7-1

7.2 Disposal 7-1

7.3 Transportation 7-2

iL Dry Pumping Systems iii

Section Title Page

8 SERVICE, SPARES AND ACCESSORIES 8-1

8.1 Introduction 8-1

8.2 Service 8-1

8.3 Spares 8-2

8.4 Ordering Accessories 8-2

8.4.1 iL Enclosure Extraction Fan Kit 8-2

8.4.2 Pump Display Module 8-2

8.4.3 iL Pump Display Module extension cables 8-2

8.4.4 Active Gauge Connection Kit (sensor-configured iL systems only) 8-3

8.4.5 iL Interface Modules 8-3

8.4.6 iL PC Interface Kits 8-3

8.4.7 iL Central Monitoring System 8-4

8.4.8 iL600 Pressure Control Kit (sensor-configured iL systems only) 8-4

8.4.9 iL Communications Module 8-4

8.4.10 iL Alternative Nitrogen Connection Kit 8-4

RETURN OF BOC EDWARDS EQUIPMENT

Tables

Table Title Page

1-1 Safety sensors 1-18 2-1 Technical data 2-2 2-2 Full load current ratings 2-11 2-4 Sensor Monitoring Module default setpoints (sensor-configured iL systems only) 2-13 2-5 Gas Module default setpoints (sensor-configured iL systems only) 2-13 3-1 Installation checklist 3-2 3-2 Checklist of components 3-4 3-3 Pins in the iL Tool Interface Module plug 3-16 3-4 Pins in the electrical supply connector 3-22 4-1 Menu structure 4-5 5-1 Status menu display options 5-5 6-1 Warning messages 6-15 6-2 Alarm messages 6-20 6-3 Fault messages 6-22 6-4 Fault parameters 6-23 6-5 Fault types 6-26

Illustrations

Figure Title Page

1-1 The iL system (iL600 shown, with side panels removed) 1-3

iv iL Dry Pumping Systems

Illustrations (continued)

Figure Title Page

1-2 Schematic diagram of the LCDP pump gas system

(sensor-configured iL systems only) 1-5 1-3 Schematic diagram of the electrical system 1-9 1-4 Services and electrical connections on the rear of the iL system 1-12 1-5 Electrical components (shown without enclosure for clarity) 1-14 1-6 Controls and indicators on the front panel 1-16 1-7 Front panel of the Pump Display Module (optional accessory) 1-20 2-1 iL70 dimensions (mm) 2-3 2-2 iL600 dimensions (mm) 2-4 2-3 Services connections dimensions (mm) 2-5 2-4 Centre of mass dimensions (mm) and mass distribution 2-6 2-5 Typical pumping speeds for iL70: pumping speed against pressure 2-7 2-6 Typical pumping speeds for iL600: pumping speed against pressure 2-7 2-7 iL70 power curves: electrical power input against inlet pressure 2-8 2-8 iL600 power curves: electrical power input against inlet pressure 2-8 3-1 Remove the iL system from the pallet 3-4 3-2 Lifting-bolt positions 3-5 3-3 Remove/refit the enclosure panels 3-7 3-4 Reconfigure the cooling-water connections (if required) 3-9 3-5 Remove the vibration isolator transit brackets 3-10 3-6 Fit the Pump Display Module (optional accessory) 3-13 3-7 Leak-test port position 3-17 3-8 Reconfigure the iL system for your electrical supply (if necessary) 3-19 3-9 Reconfigure the pump-motor terminal-box (if necessary) 3-21 3-10 Connect the electrical supply cable to the connector mating-half 3-23 4-1 Front panel of the Pump Display Module (optional accessory) 4-2 4-2 Menu logic 4-6 4-3 Switch on menu 4-7 4-4 Switch off menu 4-8 4-5 Normal menu 4-9 4-6 Status menu: sheet 1 of 2 4-10 4-7 Control menu 4-12 4-8 Setup menu: sheet 1 of 3 4-13 4-9 Run til crash menu 4-16 4-10 Units menu 4-17 4-11 Normal display menu 4-18 4-12 Service menu: sheet 1 of 2 4-19 4-13 Serial menu 4-21 4-14 Zero sensors menu 4-22 4-15 Gas valve control menu 4-23 4-16 Manual menu: sheet 1 of 3 4-24 4-17 View Status menu: sheet 1 of 2 4-27 4-18 Messages menu 4-29 4-19 Warning and alarm messages menu 4-30

iL Dry Pumping Systems v

Illustrations (continued)

Figure Title Page

6-2 Retighten a Swagelok fitting 6-3 6-1 Fit a Swagelok fitting 6-3 6-3 Clean the exhaust check-valve 6-7 6-4 Try to turn the LCDP pump 6-24

vi iL Dry Pumping Systems

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the BOC EdwardsiL70andiL600DryPumping Systems (abbreviatedtoiL system intheremainder of this manual). You must use the iL systems as specified in this manual.

Read this manual before you install and operate the iL system. Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

WARNING

Warnings are given where failure to observe the instruction could result in injury

or death to people.

CAUTION

Cautions are given where failure to observe the instruction could result in damage

to the equipment, associated equipment or process.

Throughout this manual, page,figure and title numbersare in the form'S-N', where 'S' specifies the section and 'N' specifies the number of the page, figure or table in the section.

The units used throughout this manual conform to the SI international system of units of measurements. Also, throughout this manual, wherever nitrogen flow rates are specified, the abbreviation 'slm' is used to mean 'standard l.min

-1

': this is a flow of 1 l.min-1at an ambient

temperature of 0oC and a pressure of 1013 mbar (1.013 x 105Pa).

The following symbols may appear on the iL system:

iL Dry Pumping Systems 1-1

Caution - refer to accompanying documentation.

Caution - risk of electric shock.

Caution - hot surfaces.

Caution - static sensitive devices.

Protective earth (ground)

RF earth (ground)

1.2 Overview

1.2.1 The iL system

The iL system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber(s). This ensures a clean pumping system without back-migration of oil into the system being evacuated.

The iL70 system has anLCDP70 dry pump; theiL600 system has an LCDP70dry pump, with an LCMB600 mechanical booster pump fitted to the inlet of the LCDP pump. Throughout the remainderofthismanual,theLCDP70pumpisreferredtoastheLCDPpumpand the LCMB600 pump is referred to as the LCMB pump.

Both the LCDP and LCMB pumps have enclosed, water-cooled motors. The iL system is therefore suitable for applications in clean environments where fan cooling is unacceptable.

Twoversions of iLsystemare available, sensor-configurediLsystems andstandardiLsystems:

• Sensor-configured iL systems have: a gas system whichintroduces purgegas intothe LCDP

shaft-seals; temperature sensors; other accessories (as described in the remainder of this manual). Sensor-configured iL systems are suitable for use on light duty processes.

• StandardiL systems have nogassystem,temperature sensors orotheraccessories. Standard

iL systems are suitable for use on clean duty processes.

TheiLsystem is designed to operate as a sealed unit, chemicals passing through the pumpbeing contained within the internal volume and separated from the external environment by a mechanical barrier. This barrier is made up of a number of components of different materials, (seeSection 2.8), chosentobe resistant toattackby chemicalsusuallyfoundin cleanapplications.

Pumping a chemical that will aggressively attack any of these barrier materials may, over time, result in the internal contents of the pump becoming exposed to the external environment , which may constitute a safety hazard. If in doubt contact BOCEdwards who will advise you as to the suitability of this pump for any particular application.

Itisalso a feature of this pump design that the process gases are contained within the gearbox. If hazardous materials are being pumped special precautions must therefore be taken before the gearboxvolumeis accessed, details of this aregiveninSection 6. Forthis reason it is importantto refer to this section before adding oil or opening the gearbox to atmosphere.

On sensor configured iL systems the purge gas acts as a barrier to protect the gearbox from process gas contamination. However, high pressure in exhaust pipe, exceeding that stated in section 2, could lead to gearbox contamination which will reduce the service life of product.

You can manually control the iL system through a Pump Display Module accessory: see Section 1.11. Alternatively, you can use your process tool or other control equipment to control the operation of the iL system through an Interface Module accessory (refer to Section 8.4.5), or throughaniLCommunications Module accessory (see Section 8.4.9), or you can usetheiLSingle Pumpset Monitor accessory tocontrol the operation of theiL system (refer toSection 8.4.6). The remainder of this manual describes the use of the Pump Display Module to operate the iL

1-2 iL Dry Pumping Systems

(Continued on page 1-4)

iL Dry Pumping Systems 1-3

Figure 1-1 - The iL system (iL600 shown, with side panels removed)

1. Inlet

2. LCMB oil filler-plug *

3. LCMB pump-motor/gearbox *

4. LCMB oil-level sight-glass *

5. Gas Module

✝

6. LCDP pump-motor/gearbox

7. LCDP oil filler-plug

8. Levelling-foot

9. Castor

10. LCDP oil-level sight-glass

11. LCDP pump

12. Nitrogen pressure regulator

✝

13. Pump Display Module

14. Emergency stop switch

15. LCMB pump *

16. Outlet

17. Check-valve

18. Exhaust-pipe

* iL600 only ✝ Sensor-configured iL systems only # Optional accessory

system: for use of another accessory to operate the iL system, refer to the instruction manual supplied with the accessory.

All of the components of the iLsystem arefittedinside an enclosure. Panels of the enclosure can be removed for access to the pump(s) during maintenance.

The components of the iL system are described in Sections 1.3 onwards.

1.2.2 Applications

The iL system is suitable for use on clean and light duty applications, as described in Section 1.2.1. If you use the iL system to pump gases that will aggressively attack any of the internal components of thepump(s), this may eventually damagethe pump(s), and resultin the leakage of gases from the iL system, or the leakage of air into the iL system; such leaks may constituteasafetyhazard. TheiLsystemhas no purge facility in the swept volume, therefore the iL system must not be used to pump any gases that require dilution to ensure their safety.

Pumped process gases will be contained within the pump gearbox(es). Normal purge procedures will purge the swept volume(s) of the pump(s), but will not purge the gearbox(es); each gearbox is effectively a trapped volume.

For this reason:

• If you use the iL system topumpdangerous gases, you must take specialprecautions before

you remove the oil filler-plugs: refer to Section 6.1.2.

• Youmust not usetheiL system inanapplicationwhere incompatible gasesarepumped, one

after the other. If you do, the gases will mix in the gearbox(es).

If you use the iL system on an application for which it is not suitable, you may invalidate your warranties. If in doubt, contact BOC Edwards who will advise you as to the suitability ofthe iL system for any particular application.

1.3 The LCDP dry pump

The LCDP pump is a five-stage, positive displacement rotary pump in which pairs of intermeshing rotors (of different profiles mounted on common shafts) are held in correct phase relation by a pairof timing-gears. The timing-gears and the adjacent deep-groove ball-bearings, are oil lubricated.

1.4 The LCDP gas system (sensor-configured iL systems only)

The LCDP pump in a sensor-configured iL system has a gas system which makes the iL system suitable for use in light duty processes.

The gas system has supply pipelines and components (such as valves), a Gas Module with a pressure transducer, a solenoid-valve, and a pipeline which delivers purge nitrogen to the shaft-sealsin the LCDPpump. Theshaft-sealspurge flow isonwhenever theLCDPpumpis on.

Refer to Figure 1-2 which shows a schematic diagram of the iL gas system.

1-4 iL Dry Pumping Systems

The purge flow pressure is controlled by the pressure regulator (7), and the purge flow to the shaft-seals (2) is switched on and off by the solenoid-valve (5).

The pressure transducer (6) monitors the pressure of the shaft-seals purge flow. The output of the pressure transducer is used to display the shaft-seals purge pressure on the Pump Display Module (if fitted).

The front panel has two pressure status LEDs (Figure 1-6, items 4 and 5). These LEDs show whether the nitrogen supply pressure is too high, too low or is in the acceptable range: refer to Section 5.5.

1.5 The LCMB mechanical booster pump (iL600 only)

The LCMB pump is a positive displacement Roots vacuum pump. The pump mechanism is driven directly by a three-phase electric motor. The LCMB operates at inlet pressures of 5 mbar (5x10

Pa)andbelow, and is backed by theLCDPpump. When you starttheLCDPpump,the iL system delays the start of the LCMB pump for a preset time, to allow the LCDP pump to reduce the pressure in the process system to below the maximum inlet pressure for the LCMB pump.

1.6 Temperature control system

1.6.1 LCDP pump temperature control system

Theheadplate and the pump-motor/gearbox of the LCDP pump have a directcooling system in which water flows around these parts of the pump. All other stages of the pump are air-cooled by natural convection and radiation.

(Continued on page 1-6)

iL Dry Pumping Systems 1-5

Figure 1-2 - Schematic diagram of the LCDP pump gas system

(sensor-configured iL systems only)

1. LCDP pump

2. Shaft-seals

3. Shaft-seals purge pipeline

4. Restrictor

5. Solenoid-valve

6. Pressure transducer

7. Pressure regulator

8. Check-valve

9. Nitrogen supply inlet

The pump-motor is cooled by water which flows through a cooling jacket which surrounds the motor. The cooling-water supply and return pipelines are connected to the iL system by connectors on the end of the iL system (see Figure 1-4).

The cooling-water manifolds on the pump distribute the cooling-water to the pump cooling circuit and to the pump-motorcooling circuit (and tothe LCMB pump-motor cooling circuit,on an iL600 system).

On sensor-configured iL systems only:

• A thermocouple is fitted to the pump-body to measure the temperature of the pump-body.

The output of the thermocouple is monitored by the iL system: see Section 1.8.3.

• A surface temperature sensor (Figure 1-5, item 7) is fitted to the pump-motor water

manifold. The output of the sensor is monitored by the iL system and is used to provide a warning of cooling system failure.

• A water flow-switch is fitted in the pump-motor water manifold. The output of the

flow-switch is monitored by the iL system and provides an indication of low water flow through the pump.

Forsafetyreasons,athermalsnap-switchisfittedtothepump-motor water manifold block. The snap-switchopens at 60

C. Thesnap-switch output is connected tothe internal emergency stop

circuit (see Section 1.10.3) and will shut down the iL system if the snap-switch has operated.

A motor-protection thermistor is fitted to the pump-motor. This thermistor is a solid-state device which has an electrical resistance of less than 750 Ω at normal pump-motor operational temperature. When the pump-motor is too hot, the electrical resistance rises quickly to >2000 Ω. The thermistor is connected to the emergency stop circuit to shut down the iL system if the pump-motor is too hot.

1.6.2 LCMB pump temperature control system (iL600 only)

The LCMB pump is cooled by ambient air. The pump-motor is cooled by water which flows through a cooling jacket which surrounds the pump-motor. The pump-motor cooling-water supply and return pipelines are connected to the cooling-water manifold on the LCDP pump.

On standard iL systems only, for safety reasons, a thermal snap-switch is fitted to the pumpstator. The snap-switch opens at 120

C. The output of the snap-switch is connected to the internal control system and will temporarily switch off the LCMB pump and allow it to cool down if the snap-switch has operated.

On sensor-configured iLsystems only, atemperature sensor probe (Figure 1-5, item 16) is fitted in the stator of the pump. The output of the sensor is monitored by the iL system and is used to provide a warning that thepumphas been operating at maximuminlet pressure for longer than the specified time (see Table 2-1) and is overheating. If the temperature continues to rise, the internal control system will temporarily switch off the LCMB pump and allow it to cool.

1-6 iL Dry Pumping Systems

A motor-protection thermistor is fitted to the pump-motor. This thermistor is identical to that fitted to the LCDP pump (see Section 1.6.1). The thermistor is connected to the internal control system and will temporarily switch off the LCMB pump and allow it to cool down if the pump-motor is too hot.

1.7 Exhaust system

The final stage of the LCDP pump is a positive displacement Roots stage, which attenuates the gas pressure pulses from the claw stages in the pump. This pump configuration reduces pump-induced resonance in your exhaust-extraction system and removes the need for an exhaust silencer.

The outlet of the LCDP pump is connected to an exhaust-pipe, which is below the pump. The outlet of the exhaust pipe has a check-valve which prevents the suck-back of exhaust vapours after the iL system is shut down. The check-valve also provides additional attenuation of the pulses in the exhaust pressure.

1.8 Electrical system

Refer to Figure 1-3 which shows a schematic diagram of the electrical and control system.

1.8.1 Introduction

The sensor-configured iL system has an Electrics and Pump Control Module (1), a Sensor Monitoring Module (3), a Gas Module (2), an optional Pump Display Module (4), sensors and accessories (see previous sections).

The standard iL system has an Electrics and Pump Control Module (1) and an optional Pump Display Module (4).

Optionally, the iL system may have an LCMB pump, an iL Interface Module, an iL Communications Module, and other accessories.

Allof the Modules intheiLsystem communicate throughaserialdata network. EachModule on the network has a microprocessor, which controls the network communications and also contains the default setpoints for the sensors in or connected to the Modules (see Section 2).

1.8.2 Electrics and Pump Control Module

Note: The operation of a safety sensor will have the same effect as the operation of the emergency stop

switch: see Section 1.10.3.

Refer to Figure 1-3. The external electrical supply (5) is connected to the electrical supply connector (6) on the Electrics and Pump Control Module (1). The Electrics and Pump Control Module switches the electrical suppliesto the LCDP pumpand to the LCMB pump(on an iL600 system) and monitors the operation of the pump(s). The Module also provides the electrical supplies to the other Modules in the iL system.

(Continued on page 1-10)

iL Dry Pumping Systems 1-7

1-8 iL Dry Pumping Systems

Figure 1-3 - Schematic diagram of the electrical system: key

1. Electrics and Pump Control Module

2. Gas Module *

3. Sensor Monitoring Module *

4. Pump Display Module

▲

5. External electrical supply

6. Electrical supply connector

7. Protective earth (ground) stud

8. GRC relay connector

9. Tool Interface Module connector

10. Control PCA

11. iL Tool Interface Module fuse holder

12. Emergency stop fuse holder

13. LCDP electrical supply

14. LCDP motor terminal-box

15. LCDP motor thermistor cable

16. LCMB electrical supply

✝

17. LCMB motor terminal-box

✝

18. LCMB motor thermistor cable

✝

19. RF earth (ground) stud

20. Cooling-fan connector

21. Internal emergency stop loop

22. LCMB shut-down thermal snap-switch

▼

23. LCDP shut-down thermal snap-switch

24. Not used

25. Emergency stop switch

26. Not used

27. Gas Module and Sensor Monitoring Module electrical supply *

28. LCMB temperature sensor

#✝

29. LCDP motor water manifold surface temperature sensor

30. Shaft-seal pressure transducer *

31. LCDP body thermocouple *

32. Not used

33. Not used

34. Water flow-switch *

35. LON connector

36. Not used

37. Not used

38. 25-way 'D' type connector

39. Solenoid-valve *

40. Pressure transducers *

41. Active gauge cable connector

42. Front panel LEDs

43. Front panel 10-way connector

44. 4-way XLR connector

45. Active Gauge connector *

46. Rear panel

47. d.c. electrical supply fuse holder

* Sensor-configured iL systems only.

✝ iL600 only. ▲ Optional accessory. ▼ Standard iL600 systems only.

# Not used on iL systems.

iL Dry Pumping Systems 1-9

Figure 1-3 - Schematic diagram of the electrical system

The Module has contactors for the LCDP pump and the LCMB pump (on an iL600 system), pumppower and currentconsumptionsensors and short-circuitprotection. Internalclocksand

counters in the Module measure the operating time of the iL system and keep count of the number of iL system switch-on/switch-off and process cycles. The Module also has a transformer and fuses for the 24 V control circuits and fuses for the following supplies: iL Interface Module (11), emergency stop circuit (12) and d.c. electrical supply (47). Three thermal-type, self-resetting fuses in the Electrics and Pump Control Module protect the d.c. electrical supplies to the network.

Refer to Figure 1-4 detail D. The rear panel of the Electrics and Pump Control Module has the following lamp and connections:

Power on lamp (7) This lamp is on when the electrical supply to the

Electrics and Pump Control Module is on.

Tool Interface Module connector (8)

Use this to connectan iL Tool InterfaceModule to the iL system.

LON Interface Connector (9) Use this to connect the iL system to a network.

Electrical supply connector (10) Use this to connect yourexternal electrical supply to the

iL system: refer to Section 3.16.3.

Protective earth (ground) stud (11) If required, use this to make additional protective earth

(ground) connections: refer to Section 3.16.3.

GRC relay connector (12) Not used on iL systems.

Fuse holder F7 (13) This holds the fuse which protects the d.c. electrical

supply.

Fuse holder F9 (14) This holds the fuse which protects the emergency stop

circuit.

Fuse holder F8 (15) This holds the fuse which protects the iL Interface

Module (if fitted).

Refer to detail E. Fuses inside the Module (16 to 21) protect the internal circuits of the Module. You cannot change these fuses; a BOC Edwards service engineer must change these fuses.

1-10 iL Dry Pumping Systems

iL Dry Pumping Systems 1-11

Figure 1-4 - Services and electrical connections on the rear of the iL system: key

1. Blanking panel

2. Cooling-water outlet

3. Cooling-water inlet

4. Nitrogen inlet *

5. Position of Active Gauge connector *

6. RF earth (ground) stud

7. Power on lamp

8. Tool Interface Module connector

9. LON interface connector

10. Electrical supply connector

* Sensor-configured iL systems only

iL600 only

11. Protective earth (ground) stud

12. GRC relay connector #

13. d.c. electrical supply fuse holder (F7)

14. Emergency stop fuse holder (F9)

15. Tool Interface Module fuse holder (F8)

16. Fuse F6

17. Fuse F5

18. Fuse F4

19. Fuse F1

20. Fuse F2

21. Fuse F3

Not used on iL systems

A iL70 B iL600 C Rear panel D, E Detail of Electrics and Pump Control Module

1-12 iL Dry Pumping Systems

Figure 1-4 - Services and electrical connections on the rear of the iL system

Refer to detail C. The rear panel of the iL system has the following connections:

Active gauge connector (5) * This connector is only available if you have fitted an

Active Gauge Connection Kit (see Section 8.4.4). Use this to connect the active gauge to the iL system.

RF earth (ground) stud (6) If required, use this to make additional RF earth

(ground) connections: refer to Section 3.16.4.

Refer to Figure 1-5, detail A or B. The bottom panel of the Electrics and Pump Control Module has the following cables and connectors:

Internal EMS/Gas Module electrical supply cable (15)

This is used to connect the Module to the iL internal emergency stop circuit, and to provide the electrical supply to the Gas Module.

LCDP electrical supply cable (16)

This is used to connect the electrical supply from the Electricsand Pump ControlModuleto the LCDPpump.

LCDP thermistor cable (17) Thisisused to connecttheoutput of thethermistorinthe

LCDPpump to theElectricsand Pump ControlModule.

Control Module cable (18) This is used to connect the Electrics and Pump Control

Module to the Sensor Monitoring Module.

LCMB thermistor cable (19) On an iL600 system, thisisused to connect the output of

the thermistor in the LCMB pump to the Electrics and Pump Control Module.

LCMB electrical supply cable (20) On an iL600system, this is usedto connect the electrical

supply from the Electrics and Pump Control Module to the LCMB pump.

iL Dry Pumping Systems 1-13

Figure 1-5 - Electrical components (shown without enclosure for clarity): key

1. LCMB pump

✝

2. LCMB pump-motor

✝

3. LCMB pump-motor terminal-box

✝

4. iL600 Electrics Module

✝

5. LCDP pump-motor terminal-box

6. LCDP pump-motor water manifold temperature sensor *

7. LCDP pump thermal snap-switch

8. LCDP pump water flow-switch *

9. Gas Module *

10. iL70 Electrics Module

11. LCDP pump-body temperature sensor *

12. LCDP pump

13. Sensor Monitoring Module

14. LCMB pump temperature sensor * or temperature snap-switch

✝

15. Internal EMS/Gas Module electrical supply cable

16. LCDP pump electrical supply cable

17. LCDP pump-motor thermistor cable

18. LON network cable

19. LCMB pump-motor thermistor cable

✝

20. LCMB pump electrical supply cable

✝

A iL70 Electrics Module detail B iL600 Electrics Module detail

* Sensor-configured iL systems only ✝ iL600 only

1-14 iL Dry Pumping Systems

Figure 1-5 - Electrical components (shown without enclosure for clarity)

1.8.3 Sensor Monitoring Module (sensor-configured iL systems only)

This Module communicates with the Gas Module, the Pump Display Module (if fitted) and the optional Interface Module accessories. The following sensors are connected to the Sensor Monitoring Module:

• LCDP pump-body and pump-motor water manifold temperature sensors (if fitted)

• LCMB pump temperature sensor (iL600 systems only)

• Water flow-switch.

The Module has a microprocessor which:

• Monitors the status of the system.

• Sendswarningandalarm messages (see Section 1.10.2) to other Modules connected to the iL

system.

• Shuts down the iL system if a sensor reading is outside the specified alarm range: see

Section 1.10.2. (Note thatthe safety sensorscan also shut down the iL system; these sensors are not connected to the microprocessor: see Section 1.10.3.)

1.8.4 Gas Module (sensor-configured iL systems only)

The Gas Module communicates with the Sensor Monitoring Module.

1.9 Controls and indicators

Referto Figure 1-6. The controlsandindicators on thefrontpanel oftheiLsystem areasfollows:

Emergency stop switch (1) Press this to immediatelyshut down the iL system in an

emergency: refer to Section 5.10.

Pump Display Module (2) If fitted, use this optional accessory to control the iL

system: refer to Section 1.11.

Nitrogen supply pressure regulator (3) *

Use this to adjust the nitrogen supply pressure.

Shaft-seal purge pressure high and low LEDs (4, 5) *

These green LEDs are both on when the shaft-seals purge nitrogen pressure is acceptable. The appropriate LED is off when the pressure is too high or too low.

Power OK LED (6) This green LED is on when the internal 24 V electrical

supply is on.

Running LED (7) This green LEDison whentheiLpumps areoperating.

iL Dry Pumping Systems 1-15

* Sensor-configured iL systems only.

1.10 Control functions

1.10.1 Priority of control

The iL system can be controlled by a number of modules: the Pump Display Module (see Section 1.11); an iL Interface Module (see Section 8.4.5); or the iL Single Pumpset Monitor (see Section8.4.7). Onlyone module can have control of the iL system at any one time. That is, once a module has control of the iL system, control requests from another Module are denied.

To allow another Module to control the iL system:

• The Module which currently has control must 'release' control (that is, you must send the

appropriate message on the network or press the appropriate button to release control).

• Any Module which requires control must then 'take' control (that is, you must send the

appropriate message to the iL system or press the appropriate button to take control).

Note that when you first switch-on theelectricalsupply, no Module will initially havecontrol of the iL system. The Module which you want to control the iL system must take control as described above.

1-16 iL Dry Pumping Systems

Figure 1-6 - Controls and indicators on the front panel

1. Emergency stop switch

2. Pump Display Module (optional accessory)

3. Nitrogen pressure regulator *

4. Shaft-seals purge pressure high LED (green) *

5. Shaft-seals purge pressure low LED (green) *

6. Power OK LED (green)

7. Running LED (green)

* Sensor-configured iL systems only

1.10.2 Setpoints, warning and alarm conditions

Note: Sensors which generatealarmand warning messagesarenot safety sensors:seeSection 1.10.3.

Each Module which monitors sensors has a microprocessor. Each monitored sensor has four associatedsetpoints. Thesetpoints are: the low warningsetpoint, the high warning setpoint,the lowalarmsetpoint and the high alarm setpoint. The microprocessor compares the sensor data to the setpoints to determine if an alarm or warning condition exists:

• If the sensor data is below the low warning setpoint or above the high warning setpoint, a

warning condition exists. A warning condition means that some aspect of the operation of the iL system is abnormal. The iL system will continue to operate.

• If the sensor data isbelowthe low alarm setpoint orabove the high alarm setpoint,an alarm

condition exists. An alarm condition means there is a serious fault which results in the shut-downof the iL systemtopreventdamage to theiLsystem. However,notethatfor some of the alarm conditions, you may be able to continue to operate the iL system if you have configured the iL system to 'run til crash': see Section 5.9.

If an alarm or warning condition exists, an appropriate alarm or warning message is displayed on the Pump Display Module and an appropriate alarm or warning indication is sent to other Modules on the network. Refer to Section 6 for a full list of the Pump Display Module warning and alarm messages.

Youcan use thedefaultsetpointsor you canusea Single PumpsetMonitor to adjustthesetpoints to suit your application. Refer to Section 2 for the default setpoints.

1.10.3 Safety sensors

The LCDP pump has two safety sensors which are connected to the internal emergency stop circuitin the Electrics and Pump Control Module. If either of these safetysensors operate,it will havethesame effect as the operation of the emergency stop switch described in Section 5.10, and the iL system is immediately shut down.

On iL600 systems, the LCMB pump has two safety sensors which are connected to the internal controlsystem. Ifeither ofthesesafety sensors operate,theLCMBpump is temporarilyswitched off, to allow it to cool down.

Table 1-1 shows the safety sensors and the shutdown switch off conditions.

iL Dry Pumping Systems 1-17

Safety sensor Shut-down/switch off condition

LCDP pump-motor thermistor When the thermistor in the LCDP pump-

motor indicates that the temperature of the pump-motor is nominally 150

LCDP pump shut-down thermal snap-switch

When the thermal snap-switch operates to indicate that the temperature of the LCDP pump-motor manifold is 60

C or higher.

LCMB pump-motor thermistor * When the thermistor in the LCMB pump-

motor indicates that the temperature of the pump-motor is nominally 150

LCMB pump shut-down thermal snap-switch *

✝

When the thermal snap-switch operates to indicate that the temperature of the LCMB pump-stator is 120

C or higher.

* iL600 only. ✝ On sensor configured iL600 systems, a temperature sensor is fitted instead of this snap-switch; the

temperature sensor is monitored by the Sensor Monitoring Module.

Table 1-1 - Safety sensors

1.11 Pump Display Module (optional accessory)

The Pump Display Module accessory allows you to manually control the iL system and to display the status ofthe iL system. Refer to Figure 1-7 whichshows the front panelof the Pump Display Module.

Use the On button (1) toswitch ontheiL system (refer to Section 5.4). TheOn button hasagreen LED which is on when the iL system is on. Use the Off button (10) to switch off the iL system (refer to Section 5.8).

The display (2) shows two lines of text; each line is 16 characters long. In normal operation, the Normal display is shown; theNormal display has two pages,andeach page has two lines. Each pageofthe Normal display shows the current status of one or more iL system sensorsor internal clocks and counters. As supplied:

• The first page ofNormal display shows LCDP pump power consumptionand LCDP pump

body temperature sensor

values.

• The second page shows LCMB pump power consumption and (on the iL600 only) LCMB

pump-body temperature sensor

values.

You can change the information shown on the Normal display: refer to Section 5.2.

At any time,you can pressone of thefour menu buttons(7) to selecta new menu. You can then use the up (5), down (3), ENTER (6) and CANCEL (4) buttons to move through the menu. The appropriate menu selected LED (8) is on when the corresponding menu is in use.

(Continued on page 1-18)

Sensor configured iL systems only.

1-18 iL Dry Pumping Systems

Use the menu (7), up (5), down (3), CANCEL (4) and ENTER (6) buttons as described below. Refer to Section 4 for a full definition of the menu structures and the display formats.

Button LED colour Button use

Normal Green Press this button to select the Normal display (see above).

Control Green Press this button to select the Control menu. You can then take

control or release control of the iL system (see Section 5.3).

Status Green Press this button to select the Status menu. In this menu, you can

display the current values of all iL system sensors.

Setup Green Press this button to select the Setup menu. In this menu you can:

manuallycontroltheoperationofiLgaspurgesandgatevalvesfitted tothe vacuum system (andconnectedto the iLthroughaniL Interface Module with an Auxiliary Interface Card); select 'Run til Crash'; change other display parameters (such as the pressure units used when pressures are displayed and the timeout time). The Setup menu also allows you to select the Service menu; in this menu, you can zero the Gas Module flow transducer and manually operate the components of the iL system.

ENTER - Use this buttontoselecta currently displayed menu optionortoenter

a currently displayed parameter.

CANCEL - Use this button tocancel the currently displayedmenu or option and

return to the previous menu or option.

Up/down - Usethese buttonsto move upor down menuoptions or toincrease or

decrease a displayed parameter.

The status LEDs (9) show the current status of the iL system and the Pump Display Module:

LED LED colour Meaning

ALARM Red This LED shows when an alarm condition exists.

WARNING Amber This LED shows when a warning condition exists.

LOCAL CONTROL

Green This LED is on when the Pump Display Module has control of the iL

system.

iL Dry Pumping Systems 1-19

1.12 Accessories

A number of accessories are available to configure the iL system for your specific application. Refer to Section 8.4 for descriptions of these accessories.

1-20 iL Dry Pumping Systems

Figure 1-7 - Front panel of the Pump Display Module (optional accessory)

1. On button

2. Display

3. Down button

4. CANCEL button

5. Up button

6. ENTER button

7. Menu buttons

8. Menu selected LEDs

9. Status LEDs

10. Off button

2 TECHNICAL DATA

Notes: Unless otherwise specified, data in the following sections applies to all models of iL system.

2.1 General

Dimensions See Figures 2-1 to 2-3 Inlet and outlet See Table 2-1 Warm-up time to nominal pumping performance 15 min Minimum warm-up time to process gas pumping 3 hours Vacuum system maximum leak-rate 1 x 10-5mbar.ls-1(1x10-3Pa.ls-1) Exhaust system maximum leak-rate 1 x 10

-5

mbar.ls-1(1x10-3Pa.ls-1) Ambient operating temperature range 5 to 40oC Maximum ambient operating humidity 90% RH Maximum exhaust back pressure 3 p.s.i. (0.207 bar, 2.07 x 104Pa) Noise level measured at 1 m from the pump (with enclosure panels fitted)

iL70 < 62 dB(A) iL600 < 62 dB(A)

Mass

iL70 230 kg

iL600 395 kg Centre of mass See Figure 2-4 Mass distribution See Figure 2-4

2.2 Performance

Pumping speed range See Figures 2-5 and 2-6 Power curves See Figures 2-7 and 2-8 Peak pumping speed (nominal) See Table 2-1 Ultimate vacuum See Table 2-1 Maximum pressure differential between LCMB inlet and outlet * See Table 2-1 Maximum inlet pressure * See Table 2-1 Maximum operating time at maximum inlet pressure * See Table 2-1

* iL600 only

iL Dry Pumping Systems 2-1

Parameter Units iL70 iL600

Typical peak pumping speed

50 Hz m

3h-1

70 518

60 Hz m3h

-1

84 600

Utimate vacuum

50 Hz

mbar <5x10

-2

<3x10

-3

Pa <5 <3x10

-1

60 Hz

mbar <3x10

-2

<2x10

-3

Pa <3 <2x10

-1

Maximum pressure differential across LCMB pump *

50 Hz

mbar - 70

Pa - 7x10

60 Hz

mbar - 70

Pa - 7x10

Maximum inlet pressure

50 Hz

mbar - See figure 2-6

Pa - See figure 2-6

60 Hz

mbar - See figure 2-6

Pa - See figure 2-6

Maximum operating time at maximum inlet pressure *

50 Hz hour - 1

60 Hz hour - 1

Inlet connection - ISO63 bolted ISO100 bolted

Outlet connection - NW40 NW40

* iL600 only

Table 2-1 - Technical data

2-2 iL Dry Pumping Systems

iL Dry Pumping Systems 2-3

Figure 2-1 - iL70 dimensions (mm)

A Side view B Plan view

1. Inlet

2. Outlet (as supplied)

3. Air-extraction port

2-4 iL Dry Pumping Systems

Figure 2-2 - iL600 dimensions (mm)

A Side view B Plan view

1. Inlet

2. Outlet (as supplied)

3. Air-extraction port

iL Dry Pumping Systems 2-5

Figure 2-3 - Services connections dimensions (mm)

1. Cooling-water outlet (as supplied)

2. Cooling-water inlet (as supplied)

3. Nitrogen inlet: sensor-configured iL systems only (as supplied)

4. Cooling-water outlet (alternative position)

5. Cooling-water inlet (alternative position)

6. Nitrogen inlet: sensor-configured iL systems only (alternative position)

A As supplied B Alternative positions

2-6 iL Dry Pumping Systems

Figure 2-4 - Centre of mass dimensions (mm) and mass distribution

Mass distribution on levelling-feet (kg)

1234

iL70 69 54.2 51.7 55.3

iL600 122.2 87.9 95.2 88

A iL70 B iL600

1. Levelling-foot

2. Levelling-foot

3. Levelling-foot

4. Levelling-foot

5. Centre of mass

iL Dry Pumping Systems 2-7

Figure 2-5 - Typical pumping speeds for iL70: pumping speed against pressure

Figure 2-6 - Typical pumping speeds for iL600: pumping speed against pressure

1. 60 Hz

2. 50 Hz

Note: The discontinuity at inlet pressure of 20 mbar

(2x10

Pa) indicates where the LCMB pump is

automatically switched off: refer to Section 5.9.

2-8 iL Dry Pumping Systems

Figure 2-7 - iL70 power curves: electrical power input against inlet pressure

Figure 2-8 - iL600 power curves: electrical power input against inlet pressure

1. 60 Hz

2. 50 Hz

1. 60 Hz

2. 50 Hz

Note: The discontinuity at inlet pressure of 20 mbar

(2x10

Pa) indicates where the LCMB pump is

automatically switched off: refer to Section 5.9.

2.3 Temperature control system

LCDP shut-down thermal snap-switch

Opening temperature 60 ± 3oC

Closing temperature 50 ± 4oC Thermocouples K type class 1 LCMB shut-down thermal snap-switch

Opening temperature 120 ± 3

Closing temperature 110 ± 4oC LCDP and LCMB motor-protection thermistors

Type Positive temperature coefficient

Reference temperature 150

Compliant with IEC 34-11 (BS4999 part III) Water flow-switch Closed when flow ≥ 1.5 l.min

-1

2.4 Cooling-water supply

Note: Use treated water or non-corrosive industrial water to cool the iL system.

Maximum supply pressure 100 psig (6.9 bar, 6.9 x 10

Pa) Water supply temperature 10 to 30°C Typical pressure differential across supply and return *

iL70 15 psi (1.03 bar, 1.03 x 10

Pa)

iL600 15 psi (1.03 bar, 1.03 x 105Pa) Minimum required flow rate for reliable system operation

iL70 1.5 l.min

-1

iL600 2.5 l.min

-1

Typical heat removed from iL system

iL70 1.2 kW

iL600 1.8 kW Maximum particle size in supply 0.03 mm

Water supply quality

Acidity pH 6.5 to 8.0

Hardness < 100 p.p.m

Resistivity > 1 kΩ.cm

-1

Solids (turbidity) < 100 p.p.m

* With cooling-water supply temperature of 20oC and flow rate of 3 l.min-1.

iL Dry Pumping Systems 2-9

2.5 Lubrication

Note: A BOC Edwards Material Safety Data Sheet for the oil referenced in the following sections is

available on request.

2.5.1 LCDP pump

Gearbox

Oil charge 0.75 litres (typical) Grade of oil SAE 40 ISO viscosity grade 150 Recommended perfluoropolyether oils Fomblin 25/6, Krytox 1525, Drynert 25/6

2.5.2 LCMB pump (iL600 only)

Gearbox

Oil charge 0.75 litres (typical) Grade of oil SAE 40 ISO viscosity grade 150 Recommended perfluoropolyether oils Fomblin 25/6, Krytox 1525, Drynert 25/6

2.6 Electrical data

Electrical supply

Supply voltage 200-208/380-415 V at 50 Hz, 3-phase

200-230/460 V at 60 Hz, 3-phase

Voltage tolerance ±10% (except for 208 V and 415 V at

50 Hz, which are +6% and -10%) Full load current ratings See Table 2-2 Fuse types and ratings

F1 * 30 A, 600 V, Class J F2 * 30 A, 600 V, Class J F3 * 30 A, 600 V, Class J F4 *

✝

20 A, 600 V, Class J

F5 *

✝

20 A, 600 V, Class J

F6 *

✝

20 A, 600 V, Class J

F7 1.6 A, 250 V F8 1.6 A, 250 V

F9 3.15 A, 250 V Emergency stop switch rating 24 V a.c./d.c.,5Amax External emergency stop switch

Rating 24 V a.c., 5 A

Load 700 mA (inductive) ✝ iL 600 only

2-10 iL Dry Pumping Systems

* These fuse ratings are included for information only. You cannot change these fuses;

a BOC Edwards service engineer must change these fuses.

Supply voltage and frequency →

200-208 V

50 Hz

200-208 V

60 Hz

230 V 60 Hz

380-415 V

50 Hz

460 V 60 Hz

iL70

Full load (A) 9 9.6 9.0 4.5 4.5

LCDP motor rating (kW) 1.85 2.2 2.2 1.85 2.2

Maximum power input

to pump motor (kW)

2.5 3.0 3.0 2.5 3.0

iL600

Full load both pump

motors(A)

14.2 15.3 14.4 7.1 7.2

LCMB motor rating (kW) 1.1 1.3 1.3 1.1 1.3

Maximum power input to

both pump motors (kW)

7.09 8.29 8.29 7.09 8.29

Table 2-2 - Full load current ratings

2.7 Gas system (sensor-configured iL systems only)

Note: Once you have connected your nitrogen supply and adjusted the nitrogen supply pressure, for

optimumperformanceof the pressure regulator,werecommendthat the stability of yournitrogen supply is such that the supply pressure remains within ± 20 psi of the adjusted pressure.

Nitrogen supply pressure range 20 to 100 psig (2.4 to 7.9 bar absolute,

2.4x10

to 7.9 x 105Pa)

Typical flow rate 4 slm (6.76 x 10

Pa.ls-1)

Pressure transducer accuracy ± 0.6 psi (± 4.1x10-2bar, ± 4.1x103Pa)

at 6 psig (1.4 bar absolute, 1.4 x 105Pa)

2.8 Construction materials

Materials in contact with process gases

Gearbox and headplate

• Aluminium • Carbon steels EN8DM, EN19T

• Grade 250 cast iron • Stainless steels 304, 316 and 316L

• LCP (liquid crystal polymer),

30% glass filled

• PPS (Polyphenyline sulphide),

40% glass filled

• PFPE oil • PTFE (polytetrafluoroethylene)

• PBT (polybutylene terephthalate) • PP (polypropylene)

• PU (polyurethane) • Viton

• Glass • Loctite 648 thread sealant

(Continued on page 2-12)

iL Dry Pumping Systems 2-11

Materials in the swept volume

• SG iron - 420/12 • Grade 250 cast iron

• Viton • PFA (perfluoroalkoxy)

• Loctite 577 thread sealant

Sealing materials

• Grade 250 cast iron • Stainless steel 304

• Viton • Glass

• Silver • Stainless steel 316L

• Loctite 577 thread sealant

Other materials of construction

• Brass water connectors • EN16MT

• Copper • Paint

2.9 Default setpoints

The default setpoints are shown in Tables 2-3 to 2-5 (see page 2-13). Where there is an 'ADJ' (adjust)entry in these tables, this specifies that thesetpoints areusually notused andthe default setpoint is preset so that no warning or alarm condition could result from sensor readings. If required you can adjust these 'ADJ' setpointsfor yourapplication,so that suitable warnings and alarms can be generated.

2.10 Connections

Inlet and outlet See Table 2-1 Electrical supply connector

Type Harting HAN-K-4/2

Cable outside diameter range 18 to 27 mm

Maximum conductor cross-sectional area 16 mm

Pump Display Module connector XLR type 4-way Network communications connector XLR type 4-way GRC relay connector

6-pin DIN iL Tool Interface Module connector XLR type 6-way Water inlet connector

✝ 3

/8inch BSP male quick-disconnect

Water outlet connector

/8inch BSP female quick-disconnect

Nitrogen supply connector *

/4inch Swagelok compression fitting

Active gauge connector SCC68 socket

* Sensor configured systems only. # Not used on the iL system. ✝ Connector mating-halves to connect your cooling-water supply and return pipes are supplied with the iL system: refer to Section 3.18.

2-12 iL Dry Pumping Systems

Parameter Unit

Default setpoint values

Low alarm

Low

warning

High

warning

High alarm

LCDP power consumption kW ADJ 0.0 3.4 3.8 LCMB power consumption * kW - # - # - # - #

* Il600 only. # LCMB power threshold is 7.3 kW; maximum time in overload is 15 seconds.

Table 2-3 - Electrics and Pump Control Module default setpoints

Parameter

Unit

Default setpoint values

Low alarm

Low

warning

High

warning

High alarm

LCDP pump temperature

C ADJ ADJ 129 159

LCDP motor cooling-water return temperature

ADJ ADJ 44 ADJ

LCMB pump temperature

C ADJ ADJ 99 119

* iL600 only.

Table 2-4 - Sensor Monitoring Module default setpoints

(sensor-configured iL systems only)

Parameter

Unit

Default setpoint values

Low alarm

Low

warning

High

warning

High alarm

Shaft-seals purge pressure psig 2.7 3.0 5.0 6.5

Table 2-5 - Gas Module default setpoints

(sensor-configured iL systems only)

iL Dry Pumping Systems 2-13

2.11 Item Numbers

2.11.1 Standard iL systems

Electrical supply iL70 iL600

460 V, 60 Hz, 3-phase A533-71-908 A533-72-908 200/208 V, 50/60 Hz, 3-phase A533-71-945 A533-72-945 380/415 V, 50 Hz, 3-phase A533-71-946 A533-72-946 230 V, 60 Hz, 3-phase A533-71-957 A533-72-957

2.11.2 Sensor-configured iL systems

Electrical supply iL70 iL600

460 V, 60 Hz, 3-phase A533-74-908 A533-75-908 200/208 V, 50/60 Hz, 3-phase A533-74-945 A533-75-945 380/415 V, 50 Hz, 3-phase A533-74-946 A533-75-946 230 V, 60 Hz, 3-phase A533-74-957 A533-75-957

2-14 iL Dry Pumping Systems

3 INSTALLATION

3.1 Safety

WARNING

Obey the safety instructions given below and take note of appropriate precautions.

If you do not, you can cause injury to people and damage to equipment

• Ensure that the iL system is suitable for your application: refer to Section 1.2.2.

• Youmust not use theiLsystem in anapplicationwhereincompatible gases arepumped,one

after the other. If you do, the gases will mix in the gearbox(es).

• A suitably trained and supervised technician must install the iL system.

• Ensure that the installation technician is familiar withthe safety procedures which relate to

the products pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components. Dismantle and clean contaminated componentsand drain oil inside a fume-cupboard.

• IftheiL system is to replace an existing pumping system, vent and purge the processsystem

with nitrogen for 15 minutes before you start installation work; if the existing pumping system is an iL system, use the procedure in Section 6.1.2.

• Disconnect the other components in the process system from the electrical supply so that

they cannot be operated accidentally.

• Donot reuse 'O'ringsand do notallowdebris togetintothe iLsystemduring installation.

• Consult BOC Edwards publication P300-20-000 (Vacuum Pump and Vacuum System

Safety) before you pump hazardous materials. This publication is available on request: contact your supplier or BOC Edwards.

3.2 Installation checklist

Theoperationsrequired to install the iLsystemandthe sections of this instruction manualwhich describe those operations are shown in Table 3-1.

iL Dry Pumping Systems 3-1

Installation operation Section

Unpack and inspect 3.3 Remove the enclosure panels 3.4 Reconfigure the nitrogen and cooling-water connections (if required) 3.5 Locate the iL system 3.6 Check the pump oil-level(s) 3.7

iL70 systems 3.7.1 iL600 systems 3.7.2

Install or replace the Pump Display Module and optional accessories (if necessary) 3.8

Install the Pump Display Module (optional) 3.8.1

Install other optional accessories 3.8.2 Connect the iL inlet to your vacuum system 3.9 Connect the iL exhaust outlet to your exhaust extraction system 3.10 Connect to your factory extraction system (optional) 3.11 Connect the nitrogen supply (sensor-configured iL systems only) 3.12 Leak test the system 3.13 Install additional safety equipment (optional) 3.14 Connect to your emergency stop circuit (optional) 3.15 Electrical supply and RF earth (ground) connections 3.16

Reconfigure the iL system for your electrical supply (if necessary) 3.16.1

Reconfigure the pump(s) for your electrical supply (if necessary) 3.16.2

Connect the electrical supply 3.16.3

Connect an additional RF earth (optional) 3.16.4 Refit the enclosure panels 3.17 Connect the cooling-water pipelines 3.18 Commission the iL system 3.19

Switch on an iL70 system 3.19.1

Configure and switch on an iL600 system 3.19.2

Table 3-1 - Installation checklist

3-2 iL Dry Pumping Systems

3.3 Unpack and inspect

WARNING

You must use suitable lifting equipment to move the iL system. It is too heavy to lift by

hand.

WARNING

Ensure that the maximum angle between paired slings used to lift the iL system is 60o.

The iL system is suppliedsealed in a foilbag. Toprevent contamination of theiL system, before you unpack and inspect the iL system we recommend that you move the pallet as close as possible to the clean area in whichyou willinstallthe system. Removethe foil bag carefully; use the bag as a dust cover while you wheel the iL system to its final operating position.

Use the following procedure to unpack and inspect the iL system.

1. Place the pallet in a convenient position with a fork-lift truck or a pallet truck.

2. Remove the staples which secure the cardboardboxtothepallet,then remove the cardboard box. Open the top of the foil bag which encloses the iL system.

3. If you have an iL600 system, remove the four screws which secure the wooden stabiliser to the LCMB pump-inlet, remove the stabiliser, then refit the four screws to the LCMB pump-inlet blanking plate. Retain the stabiliser for future use.

4. Refer to Figure 3-1. Remove the nut and washer (2) which secures each of the four brackets (5) to the blocks (4) on the pallet. Retain the nuts and washers for future use.

5. Refer toFigure3-3. Useaflat-bladed screwdriver toundothe two quarter-turncatches(2) on the end of the top cover (1), pull the cover back (towards the outlet), then remove the top cover from the iL system.

6. Refer to Figure 3-2. If you have an iL600 system, remove the three lifting-bolts from the lifting-bolt holder (2), then fit the lifting-bolts (1) to the top of the LCMB pump in the positions shown in detail B.

7. Refer to Figure 3-2detail A or B. Use suitable lifting-equipment attached to the lifting bolts (1)to remove theiLsystem from itspallet. Do nottryto lift theiLsystem by hand(seeSection 2 for the mass of the iL system).

8. Inspect the iLsystem. IftheiL system or anyotheritem is damaged,notifyyour supplier and thecarrierin writing within three days; state theItemNumberof the iL system together with your order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the iL system if it is damaged.

9. Check that the pallet contains the items listed in Table 3-2. If any of these items is missing, notify your supplier in writing within three days.

(Continued on page 3-4)

iL Dry Pumping Systems 3-3

10. If the iL system is not to be used immediately, replace the packing materials. Store the iL system in suitable conditions as described in Section 7. If you will use the iL system immediately, continue at Step 11.

11. Refer to Figure 3-1. If you do not want to fit restraints to prevent inadvertent movement of the iL system (seeSection 3.6), undo and remove the two nuts andwashers (6) which secure eachof the fourbrackets(5) to thesidesofthe iL system,thenremove the brackets. Retain the brackets, nuts and washers for future use.

Qty Description Check (✓)

1 iL dry pumping system ❏

Fitting-kit which contains the following:

1 Inlet 'O' ring ✝❏ 1 Cooling-water quick-release connectors (pair) ❏ 1 NW40 trapped 'O' ring ❏ 1 NW40 clamp ❏ 1 Module connector terminator plug ❏ 1 Emergency stop switch guard * ❏ 1 Electrical supply connector ❏

* Ifrequired, fitthis overthe emergencystop switch toprevent inadvertentoperation ofthe switch. ✝ iL70 only.

Table 3-2 - Checklist of components

3-4 iL Dry Pumping Systems

Figure 3-1 - Remove the iL system from the pallet

1. iL system

2. Nut and washer

3. Stud

4. Block

5. Bracket

6. Nut and washer 7 Levelling foot

8. Pallet

iL Dry Pumping Systems 3-5

Figure 3-2 - Lifting-bolt positions

A iL70 B iL600

1. Lifting-bolts

2. Lifting-bolt holder

3.4 Remove the enclosure panels

1. Refer to Figure 3-3. If you have an iL 600 system, continue at Step 2, otherwise continue at Step 4.

2. Refer to detail A. Remove the LCMB right-hand side panel from the iL system:

• Place your hand against the top of the right-hand side panel (4) to support it and use a

flat-head screwdriver to release the two quarter-turn catches (3).

• Swingthe top of thepaneloutslightly and lift outthepanelso that the slotsinthe bottom

of the panel disengage from the locating plates on the frame (5).

• Fully remove the panel and place it in a safe location.

3. Remove the LCMB left-hand side panel: use the method in Step 2 above.

4. Refer to detail B. Remove the LCDP right-hand and left-hand side panels: usethe method in Step 2 above.

3.5 Reconfigure the nitrogen and cooling-water connections (if required)

Refer to Figure 2-3, detail A. As supplied, the cooling-water connections (1, 2) and (on sensor-configurediLsystems only) the nitrogen inlet (3)areatthe rear of the iL system,asshown in detail A. If required, you can reconfigurethe iL system so that the cooling-waterconnections (4, 5) and/or the nitrogen inlet (6) are at the front of the iL system, as shown in detail B.

You will need an Alternative Nitrogen Connection Kit (see Section 8.4.10) if you want to reconfigure the nitrogen connection. Reconfigure the nitrogen connection as described in the instruction manual supplied with the kit.

If required, use the following procedure to reconfigure the cooling-water connections:

1. Refer to Figure 3-3, detail A. Undo and remove the two screws (6) and remove the lower cover (7).

2. Refer to Figure3-4. Disconnectthefemale connector on the endofthe water supply hose (3) from the cooling-water inlet (5).

3. Disconnect the female connector on the end of the water return hose (2) from the cooling-water outlet (6).

4. Undo and removethelocknutswhich secure the cooling-waterinletand outlet quick-release connectors (5, 6) to the rear bulkhead (4) and remove the connectors.

5. Refer to detail B. Fitthecooling-water inlet and outlet quick-release connectors (5, 6) to their alternative positions on the front bulkhead (7), then fit the locknuts (removed in Step 4) to secure the connectors in place.

6. Apply a suitable thread sealant (such as Loctite 577) to the threads of the male connector on the rear of the cooling-water inlet quick-release connector (5), then fit the female connector on the end of the water supply hose (3) to the connector.

(Continued on page 3-8)

3-6 iL Dry Pumping Systems

iL Dry Pumping Systems 3-7

Figure 3-3 - Remove/refit the enclosure panels

1. Top panel

2. Catches (on rear of item 1)

3. Catches

4. Right-hand side panel

5. Locating plates

6. Screws (2 off)

7. Lower cover

A iL600 B iL70

7. Apply a suitable thread sealant (such as Loctite 577) to the threads of the male connector on the rear of the cooling-water outlet quick-releaseconnector(6), then fit the female connector on the end of the water return hose (2) to the connector.

8. Connect a suitable blanked pipe with a pressure gauge to the cooling-water outlet connector (6), and connect a pressurised water supply to the cooling-water inlet connector (5).

9. Pressurise the cooling-water system to a pressure of 7 bar (7 x 10

Pa), then check for water

leaks:

• If there are water leaks, drain the water, seal any leaks found, then repeat this step

(Step 9) again.

• If there are no water leaks, continue at Step 10.

10. Leave the system pressurised for approximately five minutes, then check the pressure shown on the pressure gauge:

• If the pressure has fallen by less than 0.1 bar (1 x 10

Pa), continue at Step 11.

• If the pressure hasfallen by more than0.1 bar (1 x10

Pa), contact your supplieror BOC

Edwards for advice.

11. Reduce the pressure in the cooling-water systemto 4.5 ± 0.5 bar (4.5 x 10

±5x104Pa), then

check for water leaks:

• Iftherearewater leaks, drain the water, seal any leaks found, then repeat this procedure

from Step 9 again.

• If there are no water leaks, continue at Step 12.

12. Leave the system pressurised for two minutes, then check the pressure shown on the pressure gauge:

• If the pressure has fallen by less than 0.1 bar (1 x 10

Pa), continue at Step 13.

• If the pressure has fallen by more than 0.1 bar (1 x 10

Pa), contact your supplier or

Edwards for advice.

13. Drain the water from the iL system anddisconnecttheblankedpipeandpressure gauge and the pressurised water supply from the cooling-water inlet and outlet connectors (5, 6).

3-8 iL Dry Pumping Systems

iL Dry Pumping Systems 3-9

Figure 3-4 - Reconfigure the cooling-water connections (if required)

1. Water manifold

2. Water return hose

3. Water supply hose

4. Rear bulkhead

5. Cooling-water inlet (quick-release connector)

6. Cooling-water outlet (quick-release connector)

7. Front bulkhead

A As supplied B Alternative configuration

3.6 Locate the iL system

WARNING

You must use suitable lifting equipment to move the iL system. It is too heavy to lift by

hand.

WARNING

Ensure that the maximum angle between paired slings used to lift the iL system is 60o.

Usethefollowingprocedureto locate the iL system in its operating position. TheiL system must be located on a firm, level surface.

1. Use suitable lifting equipment attachedtotheliftingbolts (Figure 3-2, items 1) to move theiL system close to its final operating position.

2. Refer toFigure 3-5. Remove the nuts and washers(4) which securethe four transit brackets (2) to the vibration isolators (3), then remove the transit brackets.

3. Wheel the iL system on its castors to move it into its operating position.

4. Adjust the levelling feetto make sure that the iL system is level and is not supported by the castors.

5. If required, fit restraints to prevent inadvertent movement of the iL system; you can attach these restraints to the brackets fitted to the sides of the iL system.

3-10 iL Dry Pumping Systems

Figure 3-5 - Remove the vibration isolator transit brackets

1. iL system

2. Transit bracket

3. Vibration isolator

4. Nut and washer

3.7 Check the pump oil-levels

CAUTION

Ensure that the oil-levels in the LCDP pump and the LCMB pump (in an iL600 system) are correct. If a pump oil-level is incorrect, pump performance may be affected and the

pump may be damaged.

3.7.1 iL70 systems

The iL70 system is supplied withthe LCDP pump filled with oil. However,we recommendthat you check the oil-level before you operate the iL system; use the method described below.

Refer to Figure 1-1. Check the oil-level against the MAX mark (see detail B) on the bezel of the LCDP oil-level sight-glass (10):

• If the oil-level is above the MAX mark, drain excess oil from the pump as described in

Section 6.8 until the oil-level is correct.

• If the oil-level is below the MAX mark, fill the pump with oil until the oil-level is correct, as

described in Section 6.8.

3.7.2 iL600 systems

The iL600 system is supplied with both the LCDP and LCMB pumps filled with oil. We recommend that you check the LCDP and LCMB oil-levels as described below.

1. Check the LCDP pump oil-level: refer to Section 3.7.1.

2. Refer to Figure 1-1. Check the oil-level against the MAX mark (see detail B) on the bezel of

the LCMB oil-level sight-glass (4):

• If the oil-level is above the MAX mark, drain excess oil from the pump as described in

Section 6.9 until the oil-level is correct.

• Ifthe oil-level is below the MAX mark, fill thepump with oiluntil the oil-levelis correct,

as described in Section 6.9.

3.8 Install or replace the Pump Display Module and other optional accessories (if necessary)

3.8.1 Install the Pump Display Module (optional)

1. Unpack and inspect the Pump Display Module.

2. Refer to Figure 3-6. Remove the blanking panel (1) from the front panel (2).

3. Fit the connector(4) onthe endof thecable (6)to themodule connector(3) inthe recess(5) in

the front panel.

(Contined on Page 3-12)

iL Dry Pumping Systems 3-11

4. Place the coiled cable (6) in therecess, then place the PumpDisplay Module (7) in position in the recess (5).

3.8.2 Install other optional accessories

Note: Some accessoriescan only be factoryfitted (see section 8): you will have ordered theseaccessories

when you ordered your iL system, and the accessories will be supplied fitted to your iL system.

Install optional accessories (listed in Section 8.4) as described in the instructions supplied with the accessory.

3.9 Connect the iL inlet to your vacuum system

Note: If required (that is, if you want to use theiLsysteminanarea subject to high RF (radio frequency)

emissions),connect the end oftheiL earth (ground) cabletoone of the boltsthatyou use to connect theinlet-flange of theiLsystem to yourprocesssystem. SeeSection3.16.4for more information.

When you connect your iL system to your vacuum system, take note of the following:

• To get the bestpumping speed, ensure that the pipeline which connects thevacuum system to the iL system is the minimum length possible and has an internal diameter not less than the iL system inlet-port.

• Ensure that all componentsin the vacuum pipelinehave a maximum pressurerating which is greater than the highest pressure that can be generated in your system.

• Incorporateflexiblepipelines in the vacuum pipeline to reduce the transmissionofvibration and to prevent loading of coupling-joints. We recommend that you use BOC Edwards flexible pipelines.

• Adequately support vacuum pipelines to prevent the transmission of stress to pipeline coupling-joints.

• Incorporate a pressure gauge in the inlet pipeline, so that you can determine that the iL system operates correctly and (on iL600 systems) so that you can determine the correct booster start delay (see Section 3.19.2). On sensor-configured iL systems, you can fit an Active Gauge Connection Kit accessory (see Section 8.4.4) or an iL600 Pressure Control Kit accessory (see Section 8.4.8) for this purpose.

• You must be able to isolate the iL system inlet from the atmosphere and from your vacuum system if you have pumped or produced hazardous, corrosive or toxic chemicals.

Usethe following proceduretoconnect the inletofthe iLsystemtoyour vacuuminletpipeline:

1. If fitted, removethe blankingplatefrom the inlet of the iLsystem. Retain the nuts, boltsand washers which secured the blanking plate for future use.

2. Use the 'O' ring supplied (iL70 systems only) and the nuts, bolts and washers (removed in Step 1) to connect the inlet-flange of the iL system to your vacuum system.

3-12 iL Dry Pumping Systems

iL Dry Pumping Systems 3-13

Figure 3-6 - Fit the Pump Display Module (optional accessory)

5. Recess

6. Cable

7. Pump Display Module

8. Viewing angle adjuster

1. Blanking panel

2. Front panel

3. Connector

4. Connector

A Remove the blanking panel B Fit the Pump Display Module

3.10 Connect the iL exhaust outlet to your exhaust-extraction system

WARNING

Pipe the exhaust to a suitable treatment plant to prevent the discharge of dangerous gases

or vapours to the surrounding atmosphere.

WARNING

Do not operate the iL system with the exhaust pipeline blocked. If the exhaust pipeline is

blocked, the iL system can generate exhaust pipeline pressures up to 4 bar (4 x 105Pa).

CAUTION

Use a catchpot to prevent the drainage of condensate back into the iL system.

Condensate which drains back into the iL system could damage the LCDP pump.

When you connect to your exhaust-extraction system, take note of the following:

• Ensure that all components in the exhaust pipeline have a maximumpressure rating which is greater than the highest pressure that can be generated in your system.

• Incorporateflexible pipelines in the exhaust pipeline to reduce the transmission ofvibration and to prevent loading of coupling-joints. We recommend that you use BOC Edwards braided flexible pipelines.

• You must be able to isolate the exhaust-outlet from the atmosphere if you have pumped or produced hazardous, corrosive or toxic chemicals.

• Adequately support exhaust pipelines to prevent the transmission of stress to pipeline coupling-joints.

Usethe following proceduretoconnect the iLexhaustoutlet toyourexhaust-extractionsystem:

Refer to Figure 1-1. Use the NW40 trapped 'O' ring and clamp supplied to connect the outlet of the check-valve (17) or theflange on the endof the exhaust-pipe (18)to your exhaust-extraction system.

3.11 Connect to your factory extraction system (optional)

As supplied, the temperature control system fitted is sufficient to maintain the iL system at the correct operating temperature; you do not need to connect an air-extraction system to the iL system. However, if required you can connect your factory extraction system to the air-extractionporton the top of the iL system (see Figures 2-1 and 2-2). Note that the iL system is supplied with a finger guard fitted over this port.

3-14 iL Dry Pumping Systems

3.12 Connect the nitrogen supply (sensor-configured iL systems only)

CAUTION

Ensure that your nitrogen supply conforms to the requirements given in Section 2.

If it does not, the flow sensors may not operate correctly, the gas pipeline may

become blocked or the iL system may be damaged.

Connect your nitrogen supply to the iL system through the nitrogen inlet on the rear of the iL system (Figure 1-4, item 4).

Use rigid metal supply pipelines (such as stainless steel). We recommend that the nitrogen supply pipeline to the iL system has an outside diameter of

/4inch, and that the pipeline is designed and constructed so that large pressure drops are not introduced into the nitrogen supply.

Connect your nitrogen supply pipeline to theSwagelok connectoronthe nitrogen inlet on the iL system: use the Swagelok connector as described in Section 6.2.

3.13 Leak test the system

WARNING

Leak-test the system after installation and seal any leaks found to prevent leakage of

dangerous substances out of the system and leakage of air into the system.

Note: If you needfurtherinformation on leaktesting,contact your supplierorBOC Edwards foradvice.

Leak-test the system after installation and seal any leaks found. Dangerous substances which leak from the system will be dangerous to people and there may be a danger of explosion if air leaks into the system.

The pump gearbox(es) are not isolated from the swept volume; you must therefore ensure that the oil filler-plugs are fitted when you leak test the system, to ensure the leak-tightness of the plugs.

Use a pump down test with helium to leak test the system. We recommend that the leak rate is 1x10

-5

mbar.ls-1(1x10-3Pa.ls-1) or less for the complete system, or1x10-6mbar.ls

-1

(1x10-4Pa.ls-1) or less for any individual leak.

TheiLsystem is supplied with ablankedleak-testport, as shown in Figure3-7. To connect tothis port:

1. Refer to Figure 3-7. Remove the

/8inch BSP blanking plug from the port (2 or 5).

2. Fit a suitable NW25 Klein adaptor and 'O' ring and (if required) an elbow to the port, then

connect your leak test equipment to the adaptor or elbow.

iL Dry Pumping Systems 3-15

3.14 Install additional safety equipment (optional)

WARNING

If your Process Tool/control system needs to know the total flow rate of nitrogen to

the iL system for safety reasons, install suitable measurement equipment in

the nitrogen supply pipeline.

Onasensor-configured iL system, ifyouneedto know the total flowrateof nitrogen to the LCDP pumpforsafetyreasons,youshouldfitsuitablemeasurementequipmentin the nitrogen supply pipeline. If you fit a rotameter, ensure that it is suitable for use with nitrogen and that it is correctly calibrated.

If the nitrogen supply to the iL system fails, a warning message will be shown on the Pump Display Module (if fitted) andwill besent to the Interface Module(s) connectedto the iL system. Ensure that your installation is configured so that it remains safe if there is a failure of the nitrogen supply to the iL system.

If an alarm condition is detected (and the iL system is not configured to 'run til crash': see Section 5.9) the iL system will shut down automatically. You must ensure that yourinstallation remains safe if the iL system shuts down automatically.

3.15 Connect to your emergency stop circuit (optional)

Note: If you do not connect to your own control equipment, you must fit the iL Tool Interface Module

plug supplied to the iL Tool Interface Module connector on therear of the iL system (Figure 1-4, item 8). If you do not, you will not be able to operate the iL system.

If required, you can connect your own control equipment to the iL system to shut down the iL system in an emergency. Use the following procedure

1. Remove the link between pins 1 and 2 of the iL Tool Interface Module plug supplied.

2. Connect a suitable cable to the plug; Table 3-3 shows the use of the pins in the plug.

3. Refer to Figure 1-4. Fit the plug to the iL Tool Interface Module connector (8) on the rear of the iL system.

Pin(s

)

Use

1 and 2 Linked as supplied. Remove the link and connect these pins to your

normally-closed, isolated external emergency stop circuit.

3 and 4 Isolated auxiliary contacts of the emergency stop switch on the Electrics

and Pump Control Module. 5 24 V a.c. continuous output; maximum current 625 mA 6 0 V return

Table 3-3 - Pins in the iL Tool Interface Module plug

3-16 iL Dry Pumping Systems

iL Dry Pumping Systems 3-17

Figure 3-7 - Leak-test port position

1. Inlet spool piece

2. Leak-test port (blanked)

3. LCDP pump

4. LCMB pump

5. Leak-test port (blanked)

6. Support manifold

A iL70 B iL600

3.16 Electrical supply and RF earth (ground) connections

3.16.1 Reconfigure the iL system for your electrical supply (if necessary)

YouriL system will besuppliedcorrectlyconfigured for yourelectricalsupply;the Item Number of the iL system (shown on the rating plate: Figure 3-9, item 1) specifies how the system is configured: refer to Section 2.11.

If you want to use the iL system with a different electrical supply, ensure that the correct transformerprimary tapping is selectedbeforeyou connect theelectricalsupplyto the iLsystem: refer to Figure 3-8 and use the following procedure:.

1. Undo the screws (5) which secure the cover (4) to the Electrics Module (2) and remove the cover.

2. Ensure that the common cable (6) is correctly connected to the common terminal on the terminal-block (8).

3. Ensure that the voltage select cable (7) is connected to the correct voltage terminal of the terminal-block (8) for your electrical supply.

4. Refit the cover (4) and secure with the two screws (5).

3.16.2 Reconfigure the pump(s) for your electrical supply (if necessary)

Ifyouwanttousethe iL system with a different electrical supply, use the following procedure to check and reconfigure the pump(s):

1. Refer to Figure3-9 detail A. Undo andremove the six screws(5) which secure theblanking plate (4) over the LCDP pump-motor, and remove the blanking plate.

2. Undo and remove the four screws (3) which secure the cover (2) to the LCDP pump-motor terminal-box.

3. Look at the links in the terminal-box (8):

• Forhighvoltage operation (380-415 V at50Hzor 460 V at 60 Hz),ensurethatthe links (9)

are in the positions shown in detail C.

• Forlow voltage operation(200-208V at 50Hzor200-230 V at60Hz), ensure thatthelinks

(9) are in the positions shown in detail D.

4. Refer to detailA. Refitthe cover(2)to the LCDP pump-motor terminal-box andsecurewith the four screws (3).

5. Refit the blanking plate (4) and secure with the six screws (5).

6. Remove the rating label (1) from the Electrics Module. (This label now shows the incorrect electrical supply information for the reconfigured pump.)

3-18 iL Dry Pumping Systems

(Continued on page 3-20)

iL Dry Pumping Systems 3-19

Figure 3-8 - Reconfigure the iL system for your electrical supply (if necessary)

1. iL70 system

2. Electrics and Pump Control Module

3. iL600 system

4. Cover

5. Screw

6. Common cable

7. Voltage select cable

8. Terminal-block

7. If you have an iL600, continue at Step 8, otherwise continue at Section 3.16.3.

8. Refer to detailB. Undo and remove thefour screws(7)which secure the Electrics and Pump ControlModule (6) to therearof the iLsystem,thencarefully lower andsupportthe Module. Ensure that you do not disconnect, break or damage any of the cables connected to the Module.

9. Undo and remove the four screws (3) which secure the cover (2) to the LCMB pump-motor terminal-box, then remove the cover (through the access hole in the rear cover-plate).

10. Look at the links in the terminal-box (8):

• Forhighvoltage operation (380-415 V at50Hzor 460 V at 60 Hz),ensurethatthe links (9)

are in the positions shown in detail C.

• Forlow voltage operation(200-208V at 50Hzor200-230 V at60Hz), ensure thatthelinks

(9) are in the positions shown in detail D.

Ifyou reconfigure the links,ensurethat wires fitted todifferentterminals in the terminal-box do not touch each other.

11. Refit the cover (2) to the pump-motor terminal-box and secure with the four screws (3).

12. Refit theElectricsand Pump Control Module(6) to the rear ofthe iL system and securewith thefour screws (7):ensurethat you donottrap anyofthecables connectedtothe Module.

3.16.3 Connect the electrical supply to the iL system

WARNING

Connect the iL system to the electrical supply through a suitably rated isolator for your iL

system (refer to Section 2.6).

WARNING

Ensure that your electrical supply cable is suitably protected against earth (ground) faults and that the earth (ground) conductor of the cable is longer than the phase conductors in

the connector. You may want to fit a second protective earth (ground) conductor to the

protective earth (ground) stud on the Electrics and Pump Control Module.

Note: If youdo notfit asecond protectiveearth (ground)conductor, youmust regularlycheck theearth

(ground) continuity of the installation.

Use the following procedure to connect the electrical supply to the iL system. When you make your electrical supply cable, ensure that the earth (ground) conductor is longer than the phase conductors. This will ensure that if the cable is accidentally dragged and the strain relief bush on the electrical supply connector mating-half fails, the earth (ground) conductor will be the last conductor to be pulled from the connector.

(Continued on page 3-22)

3-20 iL Dry Pumping Systems

iL Dry Pumping Systems 3-21

Figure 3-9 - Reconfigure the pump-motor terminal-box (if necessary)

A iL70 system B iL600 system C High voltage configuration D Low voltage configuration

1. Rating plate (on Electrics and Pump Control Module)

2. Pump-motor terminal-box cover

3. Screws (4 off)

4. Blanking plate

5. Screws (6 off)

6. Electrics and Pump Control Module

7. Screws (4 off)

8. Pump-motor terminal-box

9. Links

1. Refer to Figure 3-10. Remove the connector block (8) from the cover (7) of the mating-half supplied for the electricalsupply connector, then passa suitable four-core cable(6) through the strain relief bush (5) on the cover. Refer to Section 2 for suitable cable sizes.

2. Connect the cable phase wires to the pins in the connector block (8) as shown in Table 3-4.

3. Connect the earth (ground) wire of the cable to one of the two earth (ground) screws (4) on the side of the connector block (8).

4. Refit the cover (7) to the connector block (8) and tighten the strain relief bush (5).

5. Fit the mating-half to the electrical supply connector (9) on the Electrics and Pump Control Module.

6. Connect the other end of the electrical supply cable (6) to your electrical supply through a suitable isolator.

7. We recommend that you fit a second protective earth (ground) conductor to the protective earth (ground) stud on the Electrics and Pump Control Module (Figure 1-4, item 11) and connect the other end of this conductor to your factory earth (ground).

Wire Pin number (Figure 3-10 key)

Phase 1 (R) Phase 2 (S) Phase 3 (T

)

1 2 3

Table 3-4 - Pins in the electrical supply connector

3.16.4 Connect an additional RF earth (optional)

An earth (ground) cable is connected to the rear of the M6 RF earth (ground) stud on the rear panel of the iL system (Figure 1-4 item 6). If you will operate the iL system in an area subject to high RF (radio frequency) emissions, in accordance with good RF installation practise, we recommend that you:

• Use a star washer to connect the end of the earth (ground) cable connected to the iL inlet to one of the bolts that you use to secure the inlet-flange (see Section 3.9).

• Connect an additional earth (ground) cableto theM6RF earth (ground) stud. You must use a suitable low-impedance cable (for example, use braided cable).

3.17 Refit the enclosure panels

1. Refer to Figure 3-3, detail A (iL600) or detail B (iL70). Refit the top panel:

• Place the front of the top panel (1) on the top of the iL system.

• Lower the rear of the panel so that it is horizontal, then slide it forward (towards the iL

inlet) until it is fully in place.

• Useaflat-bladedscrewdriverto secure the two quarter-turn catches (2) on the end of the

top cover.

(Continued on page 3-24)

3-22 iL Dry Pumping Systems

iL Dry Pumping Systems 3-23

Figure 3-10 - Connect the electrical supply cable to the connector mating-half

A iL70 B iL600

1. Pin 1 (phase 1)

2. Pin 2 (phase 2)

3. Pin 3 (phase 3)

4. Earth (ground) screw

5. Strain relief bush

6. Electrical supply cable

7. Cover

8. Connector block

9. Electrical supply connector

10. Electrics and Pump Control Module

2. Refer to detail B. Refit the LCDP right-hand side panel:

• Hold the panel (4) and fit itto the side of the iL system,so that thelocating plates on the

frame (5) engage in the slots in the bottom of the panel (4).

• Lowerthe panel fullydown,then swing thetopof thepanelintoplace againsttheframe.

• Use a flat-bladed screwdriver to secure the two quarter-swing catches (3).

3. Refit the LCDP left-hand side panel: use the method in Step 2.

4. If you have an iL600 system, continue at Step 5, otherwise continue at Section 3.18.

5. Refer to detail A. Refit the LCMB right-hand side panel: use the method in Step 2.

6. Refit the LCMB left-hand side panel: use the method in Step 2.

3.18 Connect the cooling-water pipelines

WARNING

Do not turn on the cooling-water supply until after you complete the electrical

installation of the pump. If you do, condensation may form inside the motor

terminal-box and there may be a risk of electric shock.

CAUTION

Drain the cooling-water from the iL system, if you want to transport or store it

in conditions where the cooling-water could freeze. If you do not, cooling-water

may freeze in the iL system and damage the pump(s) and/or the cooling-water pipelines.

Notes: For optimum water-cooling, ensure that your cooling-water supply and return pipelines are free

of restrictions which wouldreduce the cooling-water flow rate. If you needto connect more than one iL system to the water supply, you must connect them in parallel and not in series.

Connect the cooling-water supply as described below:

1. Use

/8inch BSP male pipe fittings (which you must supply) to fit the female quick-release connector to your cooling-watersupply pipeline and tofit the male quick-releaseconnector to your cooling-water return pipeline.

2. Refer to Figure 1-4. Remove the dust-caps from the cooling-water outlet (2) and inlet (3).

3. Connect your cooling-water returnpipeline to the cooling-wateroutlet (2) andconnect your cooling-water supply pipeline to the cooling-water inlet (3).

4. Turn on the cooling-water supply.

5. Inspect your cooling-water pipelines,the cooling-water hoseson the iLsystem andall of the cooling-water connections and check that there are no leaks. Seal any leaks found.

6. Turn off the cooling-water supply while you complete the installation procedures.

3-24 iL Dry Pumping Systems

3.19 Commission the iL system

WARNING

Do not operate the iL system with the exhaust pipeline blocked. If the exhaust pipeline is

blocked, the iL system can generate exhaust pipeline pressures up to 4 bar (4 x 105Pa)

WARNING

Do not operate the iL system with any enclosure panels removed and do not touch

any parts of the pump(s) when the iL system is on. Surfaces of the pump(s)

are very hot and can cause injury to people.

3.19.1 Switch on an iL70 system

1. Switch on theexternalelectrical supply andcheckthat the poweronlamp(Figure 1-4, item7)

goes on. If the lamp does not go on, refer to Section 6 to determine the cause of the fault.

2. Switch on the cooling-water supply and nitrogen supply on sensor configured systems.

3. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the

exhaust-extraction system are open).

4. Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed,

then switch on the iL system.

5. If the iL system starts and continues to operate, continue at Step 6. If a warning or alarm

condition is indicated (for example, a warning or alarm message is shown on the Pump Display Module):

• Shut down the iL system: refer to Section 5.8.

• Refer to Section 6 to determine the cause of the fault and to rectify the fault.

6. Look at the pressure gauge in your inlet pipeline:

• If the pressure is increasing, the LCDP pump-motor terminal-box is incorrectly wired:

immediately shut down the iL system, correct the electrical wiring (refer to Section 3.16.2), then repeat this procedure from Step 3 again.

• If the pressure is decreasing, continue at Step 7.

7. After you have commissioned the iL system:

• If you want to continue to operate the iL system, refer to Section 5.

• Otherwise, shut down the system: refer to Section 5.8.

iL Dry Pumping Systems 3-25

3.19.2 Configure and switch on an iL600 system

CAUTION

Ensure that the booster start delay is correctly adjusted for your installation.

If it is not, you may damage the iL system when you start it up.

CAUTION

You can only use the following procedure to configure an iL600 system if you have a

Single Pumpset Monitor (SPM) connected to the iL system. If you do not have SPM, you

cannot use the following procedure: contact your supplier or BOC Edwards for advice.

CAUTION

Do not operate an iL600 system with the maximum inlet pressure for longer than the

maximum time specified in Table 2-1. If you do, the LCMB pump may overheat.

Note: You will need a stop-watch to do the following procedure, which assumes that you are familiar

withtheoperation of the SPM; where necessary, refer totheinstructionmanualsupplied with the SPM.

You can adjust the iL booster start delay up to a maximum of 65535 seconds.

When you switch on an iL600 system, the LCDP pump starts immediately, but there is a delay before the LCMB pump is started. This is to ensure that the vacuum system and vacuum inlet pipelinesarepartially evacuated by the LCDP pump, so that the maximum inlet pressure for the LCMB pump is not exceeded (see Section 2). As supplied, this delay (the booster start delay) between LCDP pump switch-on and LCMB pump switch-on is preset to 30 seconds.

You must use the following procedure to determine whether the booster start delay is suitable for your installation.

1. Switch on theexternalelectrical supply andcheckthat the poweronlamp(Figure 1-4, item7) goes on. If the lamp does not go on, refer to Section 6 to determine the cause of the fault.

2. Logon to the SPM.

3. Use the SPM to:

• Upload the configuration set from the iL system, and store it with a suitable file name

(for example, "iL600").

• Edit the configuration to identify that an LCMB pump is not fitted, and save the new

edited configuration set with a suitable new file name (for example, "iL70/600").

• Download the edited configuration set to the iL system.

4. Switch on the cooling-water supply and nitogen supply on sensor configured systems.

3-26 iL Dry Pumping Systems

5. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the

exhaust-extraction system are open).

6. Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed,

then switch on the iL system and simultaneously start the stop-watch.

7. If the iL system starts and continues to operate, continue at Step 8. If a warning or alarm

condition is indicated (forexample, a warning oralarm message is displayedon the SPM or shown on the Pump Display Module):

• Shut down the iL system: refer to Section 5.8.

• Refer to Section 6 to determine the cause of the fault and to rectify the fault, then repeat

this procedure from Step 5.

8. Look at the pressure gauge in your inlet pipeline:

• If the pressure is increasing, the LCDP pump-motor terminal-box is incorrectly wired:

immediately shut down the iL system, correct the electrical wiring (refer to Section 3.16.2), then repeat this procedure from Step 5 again.

• If the pressure is decreasing, leave the iL system to operate and take note of the time

taken to pump down to 5 mbar (5 x 10

Pa), then continue at Step 9.

9. Stop the iL system and isolate it from the electrical supply.

10. Add 10% to the time noted in Step 8, to give the required booster start delay for your

installation.

11. If the required booster start delay is less than or equal to 30 seconds, continue at Step 13.

12. If the required booster start delay is greaterthan30seconds,usetheSPM to edit and save the

original configuration set uploaded from the iL (the set saved as, for example, "iL600"): set the BOOSTER START DELAYof BOOSTER PUMP CONTROLto the required boosterstart delay time.

13. Use the SPM to download the original configuration set (with file name, for example, of

"iL600") to the iL system.

14. Start up the iL system again and at the same time start the stop-watch. Watch the pressure

gaugeinyour inlet pipeline. TheLCDP pump will start and the pressure will starttoreduce. After the booster start delay time, the LCMB pump will start (at an inlet pressure of approximately 5 mbar,5x10

Pa):

• If the pressure increases or does not decrease any further when the LCMB pump starts,

the LCMB pump-motor terminal-box is incorrectly wired: immediately shut down the iL system, correct the electrical wiring (refer to Section 3.16.2), then repeat this procedure from this step (Step 14) again.

• If the pressure continues to decrease after the LCMB pump starts, continue at Step 15.

15. After you have commissioned the iL system:

• If you want to continue to operate the iL system, refer to Section 5.

• Otherwise, shut down the system: refer to Section 5.8.

iL Dry Pumping Systems 3-27

3-28 iL Dry Pumping Systems

4 PUMP DISPLAY MODULE MENUS AND DISPLAY FORMATS

4.1 Introduction

Themenusused and the display messages shown on the Pump Display Module are described in themenu diagrams inFigures4-2 to 4-19. The followingsymbolsand conventionsareusedin the menu diagrams:

These are flow lines. Arrows on the lines show the direction of flow through a menu.

This symbol is used to connect different menus and shows the starting point (or continuation point) of a menu. The symbol is shown with the menu name and, where applicable, a reference of the form [4-x/y]. This reference specifies that the menucontinues on (or is continued from) a menu shown on sheet y of Figure 4-x. The sheet reference (/y) is omitted where it is not necessary.

This symbol is used forthe ENTER and CANCELbuttons and the four menu buttons: Normal, Status, Control and Setup.

This symbol is used for the up (▲) and down (▼) buttons and for the on ( ) and off ( ) buttons.

This symbol is used for the two-line display on the Pump Display Module. With the exception of variable text (see Section 4.4), the text shown in the symbol is the text that will be shown on the display.

This symbol is a subroutine box and is used to represent a 'subroutine call'; a subroutine is a series of menu steps which are used in a number of different menus or used in different parts of onemenu. The[4-x/y] reference (used as described above) shows where the subroutine is expanded.

Ina menu which 'calls'asubroutine, where amenuflowline meets the left hand side of a subroutine box, this means that flow continues at the start connector (identified by <name>) of the subroutine. At the 'exit' connector of the subroutine, flow continues in the (calling) menu along the flow line to the right of the subroutine box.

This symbol shows additional text which is not part of the menu, but which further describes the operation of the menu.

iL Dry Pumping Systems 4-1

☞

[4-x/y]

<Name>

∆

4.2 General operation

When you first switch on the iL system, the normal display is shown: see Figure 4-5. Refer to Figure4-1. Youcan then presstheOnor Off button(1or10) or any ofthefour menu buttons (7)to enter the corresponding menu. Then, regardless of the current menu and display status, when you press any of these buttons, you exit the current menu and enter the corresponding new menu. Figure 4-2 shows this menu control logic.

4-2 iL Dry Pumping Systems

Figure 4-1 - Front panel of the Pump Display Module (optional accessory)

1. On button

2. Display

3. Down button

4. CANCEL button

5. Up button

6. ENTER button

7. Menu buttons

8. Menu selected LEDs

9. Status LEDs

10. Off button

4.3 The CANCEL button

Youcan press the CANCEL button at any time during menu operation. For this reason, we have not shown the use of the CANCEL button on all of the menu diagrams, but we have shown specificuses where there isnootherobvious way to cancelthecurrentmenu option and enterthe previous menu option. In general, when you press the CANCEL button, the current menu option is cancelled and the previous menu option is displayed. Other specific uses of the CANCEL button are as follows:

• In the Switch On and Switch Offmenus(Figures 4-3 and 4-4), when youpress CANCEL,the

menu is exited and the normal display is shown.

• In the Status menu (Figure 4-6), when you press CANCEL the display shows the first two

status parameters (the defaults are LCDP current consumption and power consumption).

• When you change passwords in the Setup and Service menus (Figures 4-8 and 4-12) and

beforeyou press the ENTER button, if you pressCANCEL, the menumoves backto entry of the first digit of the password or serial number.

4.4 Display text and variable text

InthemenudiagramsinFigures4-2to4-19,textshownwithoutchevronbracketsin the two-line display symbol is the actual text that will be shown on the display. In this text, the '∆' symbol is used to show where a digit will be shown; the value of the digit depends on the sensor data or information you enter into the Pump Display Module.

Textenclosed in chevronbrackets(for example, <status>)definesvariabletext; what isshownon thedisplaydepends on the menu or the status of the iL system and data enteredby the user. The following variable text markers are used on the menu diagrams:

<status> This specifies the status of a sensor in the iL. <status> can be any of the

following:

• OK indicates that the status is acceptable.

• CHECK or LOW indicates that the reading from the sensor is low.

• NP (not present) indicates that the sensor is not fitted.

• NR (not reading) indicates that the sensor is disconnected, faulty or not

switched on.

<serial no./tag> This specifiesaserialnumber or theusertag. Theuser tagisa number which

you can use to identify the iL system in the installation.

<parameter> This is a previously selected parameter or menu option.

<message> This specifies a warning, alarm or advisory message.

<e.no> This specifies an error number: refer to Section 6.

<units> This specifies setpoint units, for example kW or slm.

iL Dry Pumping Systems 4-3

4.5 Wrap-around

Whenyouusetheupanddownbuttonstochangeadigitorcharacteronthedisplay,the digit or character will 'wrap-around' between its minimum and maximum values. For example, when you enter a password digit, if thedigit is'0'and you press the down button, thedigitwill change to '9'; if the digit is '9' and you press the up button, the digit will change to '0'.

4.6 Timeout

As supplied, after youhave entered a menu (other than the Normal menu),if you do notpress a button for five minutes, the Pump DisplayModulewill automatically exit the current menuand enterthe Normal menu. This facility(knownas timeout) isavailableso that ifthesetup or service menu is entered and then the iL system is accidentally left unattended for a specified time, the menu is exited to prevent unauthorised use of the menu options.

4.7 Menu structure

The menu structure is shown in Table 4-1. Note that if a particular system component or accessory is not fitted, thecorresponding menu option or parameteris not shown or isshown as 'NP'(notpresent). Forexample, in the Status menu (Figure 4-6), if a componentis not fitted, 'NP' (not present) is shown inthe corresponding display line; so,if the iL systemdoes not have an oil monitorfittedtothe LCDP pump, where Figure 4-6 shows the 'DP OIL'status display, the actual display line will be 'DP OIL NP'.

Note also that there are menus which, though programmed into the software in the iL system, have no effect on iL operation.

4.8 Example

Here is an example of how to interpret the menu diagrams. The following procedure describes how to change the units displayed for pressures (you can select kPa or psi).

1. Press the Setup button to enter the Setup menu (Figure 4-8).

2. Use the up and down buttons to change the first digit of the setup password to the correct value, then press the ENTER button.

3. Use the up and down buttons to change the second digit ofthe setup password to the correct value, then press the ENTER button.

4. Use the up and down buttons to change the third digit of the setup password to the correct value, then press the ENTER button.

5. If youhave entered the correct password,the display will thenshow 'SETUP MENU' on the top line and 'Inlet Purge' on the bottom line.

6. Press the down buttonsix times orpress the upbutton fivetimes; the displaywill then show 'SETUP MENU' on the top line and 'Units' on the bottom line.

7. Press the ENTER button; the display will then show 'Units Select' on the top line and 'Pressure' on the bottom line (see Figure 4-10).

4-4 iL Dry Pumping Systems

8. Press the ENTER button; the display will then show 'Pressure' on the top line and the

currently selected pressure units on the bottom line.

9. Press theup or down buttons tochange the units displayed tothe required units, thenpress

the ENTER button. Pressures will now be displayed in the units you selected.

Menu Figure

Switch on 4-3 Switch off 4-4 Normal 4-5 Status 4-6 Control 4-7 Setup 4-8

Inlet purge 4-8 Gas Ballast 4-8 Gate Valve 1 4-8 Gate Valve 2 4-8 Run Til Crash 4-9 Units 4-10 Normal display 4-11 Service 4-12

Serial Numbers 4-13 Zero sensors * 4-14 Gas Valve Contrl * 4-15 Manual 4-16 View Status 4-17

Messages 4-18

Warning and alarm messages 4-19

* These menus are not used in the iL system.

Table 4-1 - Menu structure

iL Dry Pumping Systems 4-5

4-6 iL Dry Pumping Systems

Normal [4-5]

Normal

Status

Control

Setup

Status [4-6]

Control [4-7]

Setup [4-8]

Switch on [4-3]

Switch off [4-4]

From any menu

∆

Figure 4-2 - Menu logic

☞

If the Pump Display Module does not have control when you try to switch on or switch off the pumping system, an error message will be displayed: refer to Table 6-3.

iL Dry Pumping Systems 4-7

SELECT PUMP Process pump

SELECT PUMP Load lock pump

SELECT PUMP L/Lock + Process

ENTER

Normal [4-5]

Switch on

▼▲

▼

Figure 4-3 - Switch on menu

EDWARDS iL DISPLAY MODULE

▲

☞

Only available if you have an iL Interface Module fitted with an Auxiliary Interface Card connected to the iL system.

☞

Only available if you have an iL Interface Module fitted with an Auxiliary Interface Card connected to the iL system.

▲

SELECT PUMP Booster pump

▼

ENTER

☞

Only available when the LCMB pump has been automatically shut down: see Section 5.11.

ENTER Pump off CANCEL Clears

ENTER

☞

Single pump menu (that is, no load-lock pump is connected).

4-8 iL Dry Pumping Systems

Figure 4-4 - Switch off menu

SELECT PUMP Process pump

SELECT PUMP Load lock pump

SELECT PUMP L/Lock + Process

ENTER

Normal [4-5]

Switch off

▼

▲

▼

▲

▼

☞

Single pump menu (that is, no load-lock pump is connected).

☞

Multi pump menu (that is, a load-lock pump is connected).

AUTO SHUTDOWN < FAST SHUTDOWN

▲

AUTO SHUTDOWN FAST SHUTDOWN <

ENTER

▼

▲

▼

▲

ENTER Pump off CANCEL Clears

ENTER

☞

Only available if you have an iL Interface Module fitted with an Auxiliary Interface Card connected to the iL system.

☞ Only available if you have

an iL Interface Module fitted with an Auxiliary Interface Card connected to the iL system.

iL Dry Pumping Systems 4-9

Normal

DP POWER ∆∆.∆ kW DP BODY ∆∆.∆ C

▲

▼

MB POWER ∆∆.∆ kW MB TEMP ∆∆.∆ C

☞

First page of the normal display

☞

Second page of the normal display.

☞

To change the information shown on the two pages, refer to Section 5.

▼

▲

Figure 4-5 - Normal menu

☞

On a standard iL system, <NP> will be shown instead of a temperature value.

☞

On a standard iL system, <NP> will be shown instead of a temperature value.

4-10 iL Dry Pumping Systems

Status

DP ∆∆.∆ A DP POWER ∆∆.∆ kW

MB ∆∆.∆ A MB POWER ∆∆.∆ kW

RUN HOURS ∆∆∆ H PROCESS ∆∆∆H

PROCESS ∆∆∆ CYCLES ∆∆∆

MB TEMP ∆∆∆.∆ C DP MOTOR ∆∆∆.∆ C

EXHAUST <NP> DP BODY ∆∆∆.∆ C

Next parameter

[4-6/2]

Prev parameter

[4-6/2]

▲

▼

▲

▼

▲

▼

Figure 4-6 - Status menu: sheet 1 of 2

▼

Last parameter

[4-6/2]

☞

On a standard iL system, <NP> will be shown instead of a temperature value.

☞

On a standard iL system, <NP> will be shown instead of a temperature value.

iL Dry Pumping Systems 4-11

DP OIL <NP> MB OIL <NP>

H2O FLOW <status> TOTAL N2 <NP>

FINAL <NP> AUX <NP>

▼

Figure 4-6 - Status menu: sheet 2 of 2

☞

If there are warnings or alarms present, the warnings or alarms will be displayed.

☞

If there are no warnings or alarms present, the display will show the DP pump current and power again.

Last parameter

[4-6/1]

Wng & Alarm

messages [4-19]

Status [4-6/1]

▲

▼

AG <NP> GAS TYPE iL

☞

If there are warnings or alarms present, the warnings or alarms will be displayed. If there are no warnings or alarms present, the display will show the AG option.

☞

If you have fitted an active gauge accessory, a pressure will be displayed instead of <NP>

Next parameter

[4-6/1]

Prev parameter

[4-6/1]

▲

▼

▲

▼

EXHAUST <NP> SS PURGE ∆∆.∆ PSI

▼

▲

PUMP STOP ∆∆∆s ZERO TIME ∆∆∆s

▼

4-12 iL Dry Pumping Systems

Control

Release control < Take control

ENTER

Release control Take control <

ENTER

Normal [4-5]

▼

▲

▼

Figure 4-7 - Control menu

iL Dry Pumping Systems 4-13

Setup

SETUP PASSWORD Password ∆∆∆

ENTER

SETUP PASSWORD Password ∆∆∆

ENTER

SETUP PASSWORD Password ∆∆∆

ENTER

Select option

[4-8/2]

Normal [4-5]

☞

Use the up and down buttons to increase or decrease the second digit of the password.

Press ENTER when the digit is set correctly.

☞

Use the up and down buttons to increase or decrease the first digit of the password.

Press ENTER when the digit is set correctly.

☞

Use the up and down buttons to increase or decrease the third digit of the password.

Press ENTER when the digit is set correctly.

☞

If the password was incorrect, revert to normal display

☞

If the setup password was entered, continue to select the setup menu option.

▼

▲

▼

▲

Figure 4-8 - Setup menu: sheet 1 of 3

Select option

[4-8/2]

☞

If the service password was entered, access to the service menu becomes available: the service password is only available to BOC Edwards service engineers.

4-14 iL Dry Pumping Systems

Select option

SETUP MENU Inlet purge

▲

▼

SETUP MENU Gas Ballast

▼

▲

SETUP MENU Valve 1

▼

▲

SETUP MENU Valve 2

▼

▲

SETUP MENU Run til crash

▼

Next option

[4-8/3]

Prev option

[4-8/3]

Figure 4-8 - Setup menu: sheet 2 of 3

Turn on/off

[4-16/3]

Turn on/off

[4-16/3]

Open/close

[4-16/2]

Open/close

[4-16/2]

Run til crash

[4-9]

▲

Last option

[4-8/3]

ENTER

iL Dry Pumping Systems 4-15

SETUP MENU Units

▲

▼

SETUP MENU Normal Display

▲

▼

SETUP MENU Service

▲

▼

SETUP MENU Messages

ENTER

▼

Service [4-12/1]

Figure 4-8 - Setup menu: sheet 3 of 3

Units

[4-10]

Normal Display

[4-11]

Messages

[4-18]

▲

Prev option

[4-8/2]

Next option

Select option

[4-8/2]

Last option

[4-8/2]

4-16 iL Dry Pumping Systems

Figure 4-9 - Run til crash menu

Run til crash

RUN TIL CRASH On

▲

▼

RUN TIL CRASH Off

▼

▲

ENTER

Exit

☞

Return to [4-8/2]

ENTER

iL Dry Pumping Systems 4-17

Units

UNITS SELECT Pressure

▲

▼

UNITS SELECT Temperature

▼

ENTER

Figure 4-10 - Units menu

▲

▼

☞

Use the up and down buttons to select the new units:PSI or kPa

Temperature Unit <units>

Pressure Units <units>

▲

▼

☞ Use the up and down

buttons to select the new units:Fahrenheit or Centigrade

Active Gauge <units>

▲

▼

☞

Use the up and down buttons to select the new units: mBar, kPa or Torr

ENTER

UNITS SELECT AG Unit

▼

ENTER

☞

Press the CANCEL button at any time to exit this menu and return to [4-8/3].

ENTER

▲

4-18 iL Dry Pumping Systems

Normal Display

SELECT LINE Top page 1

SELECT LINE Bottom page 1

ENTER

SELECT LINE Top page 2

SELECT LINE Bottom page 2

ENTER

☞

Change the first line of page 1 of the Normal Display

☞

Change the second line of page 1 of the Normal Display

☞ Change the first line of

page 2 of the Normal Display

☞

Change the second line of page 2 of the Normal Display

☞

Use the up and down buttons to select the parameter to be shown on the selected line. The parameters which can be displayed are shown in Table 5-1.

☞

Press CANCEL to exit the menu and return to [4-8/3].

▼

▲

▼

▲

▼▲

▼

▼▲

Figure 4-11 - Normal display menu

CANCEL

Exit

SELECT PARAMETER <parameter>

▲

iL Dry Pumping Systems 4-19

Figure 4-12 - Service menu: sheet 1 of 2

Service

SERVICE PASSWORD Password ∆∆∆

ENTER

SERVICE PASSWORD Password ∆∆∆

ENTER

SERVICE PASSWORD Password ∆∆∆

ENTER

Select option

[4-12/2]

Normal [4-5]

☞

Use the up and down buttons to increase or decrease the second digit of the password.

Press ENTER when the digit is set correctly.

☞

Use the up and down buttons to increase or decrease the first digit of the password.

Press ENTER when the digit is set correctly.

☞

Use the up and down buttons to increase or decrease the third digit of the password.

Press ENTER when the digit is set correctly.

☞

If the password is incorrect, revert to normal display.

☞

If the service password has been entered, continue to select the service menu option.

▼

▲

▼

▲

Select option

[4-12/2]

☞

If you entered the service password when prompted for the setup password in the Setup menu, you can directly access the select option menu.

4-20 iL Dry Pumping Systems

Figure 4-12 - Service menu: sheet 2 of 2

SERVICE MENU Serial Numbers

SERVICE MENU Zero Sensors

SERVICE MENU Manual

SERVICE MENU View status

SERVICE MENU Gas Valve Contrl

▼

▲

▼

▲

▼

ENTER

▲

Serial Menu

[4-13]

Zero sensors

[4-14]

Manual

[4-16/1]

Gas Valve Control

[4-15]

Select option

View Status

[4-17]

iL Dry Pumping Systems 4-21

Figure 4-13 - Serial menu

Serial Menu

SERIAL MENU DP System S/N

▲

▼

▲

SERIAL MENU DP S/N

▼

▲

SERIAL MENU MB S/N

▼

▲

SERIAL MENU Gas Module S/N

▼

▲

Serial Menu

ENTER

SERIAL MENU User Tag

▼

DP SYSTEM S/N <serial no./tag>

DP S/N <serial no./tag>

MB S/N <serial no./tag>

GAS MODULE S/N <serial no./tag>

ENTER

USER TAG <serial no./tag>

☞

Press the CANCEL button at any time to exit the menu and return to [4-12/2]

☞

Use this menu to display serial numbers or the user tag. Note that you cannot change these items.

4-22 iL Dry Pumping Systems

Figure 4-14 - Zero sensors menu

Zero sensors

ZERO SENSORS NO

Exit

▲

▼

ZERO SENSORS YES

▲

▼

ENTER

☞

Press ENTER (or CANCEL) to exit menu and return to [4-12/2].

Normal [4-5]

Note: This menu is not used in the iL system: you can select the menu and press

buttons as shown below, but menu actions will have no effect on iL system operation.

iL Dry Pumping Systems 4-23

Calibrating

Shaft Seals N2 Flow ∆∆∆ SLM

3/4 i/stage N2 Flow ∆∆∆ SLM

Gas Valve

Control

▲

▼

Figure 4-15 - Gas valve control menu

Exit

2/3 Interstage N2 Flow ∆∆∆ SLM

▲

Inlet Purge N2 Flow ∆∆∆ SLM

▲

▼

Exhaust Purge N2 Flow ∆∆∆ SLM

▲

ENTER

☞

Return to [4-12/2].

▼

Note: This menu is not used in the iL system: you can select the menu and press

buttons as shown below, but menu actions will have no effect on iL system operation.

4-24 iL Dry Pumping Systems

Manual

MANUAL MENU DP Only

▲

▼

ENTER

Turn on/off

[4-16/3]

MANUAL MENU MB

▼

▲

MANUAL MENU Load lock pump

▼

▲

MANUAL MENU Nitrogen Supply

▼

▲

MANUAL MENU Gas Ballast

▼

▲

MANUAL MENU Inlet Purge

ENTER

Turn on/off

[4-16/3]

ENTER

Turn on/off

[4-16/3]

ENTER

Turn on/off

[4-16/3]

ENTER

Turn on/off

[4-16/3]

ENTER

Turn on/off

[4-16/3]

▼

Figure 4-16 - Manual menu: sheet 1 of 3

Prev option

[4-16/2]

Last option

[4-16/2]

Next option

[4-16/2]

☞

See notes in Section 5.13

☞

See notes in Section 5.13

iL Dry Pumping Systems 4-25

Next option

▲

Prev option

[4-16/1]

MANUAL MENU Valve 1

▲

▼

MANUAL MENU Valve 2

▼

ENTER

Open/close

[4-16/2]

ENTER

Open/close

[4-16/2]

Manual [4-16/1]

Open/close

VALVE ∆ Open

▲

▼

VALVE ∆ Close

▼

ENTER

Exit

▲

☞

Return to above or to [4-8/1]

Figure 4-16 - Manual menu: sheet 2 of 3

Last option

[4-16/1]

4-26 iL Dry Pumping Systems

Figure 4-16 - Manual menu: sheet 3 of 3

Turn on/off

<parameter> On

<parameter> Off

ENTER

▼

▲

▼

▲

Exit

☞

<parameter> is the previously selected device: DP, MB, Load Lock Pump, Nitrogen supply, Gas Ballast or Inlet Purge.

☞

Return to [4-8/2] or [4-16/1]

iL Dry Pumping Systems 4-27

Figure 4-17 - View Status menu: sheet 1 of 2

View Status

DP ∆∆.∆ A DP POWER ∆∆.∆ kW

MB ∆∆.∆ A MB POWER ∆∆.∆ kW

RUN HOURS ∆∆∆ H PROCESS ∆∆∆H

PROCESS ∆∆∆ CYCLES ∆∆∆

MB TEMP ∆∆∆.∆ C DP MOTOR ∆∆∆.∆ C

EXHAUST <NP> DP BODY ∆∆∆.∆ C

Next parameter

[4-17/2]

Prev parameter

[4-17/2]

▲

▼

▲

▼

▲

▼

Last parameter

[4-17/2]

☞

On a standard iL system, <NP> will be shown instead of temperature values.

☞

On a standard iL system, <NP> will be shown instead of a temperature value.

4-28 iL Dry Pumping Systems

Figure 4-17 - View Status menu: sheet 2 of 2

DP OIL <NP> MB OIL <NP>

H2O FLOW <status> TOTAL N2 <NP>

EXHAUST <NP> SS PURGE ∆∆.∆ PSI

Next parameter

[4-17/1]

Prev parameter

[4-17/1]

▲

▼

▲

▼

☞

If there are warnings or alarms present, the warnings or alarms will be displayed.

☞

If there are no warnings or alarms present, the display will show the DP pump current and power again.

Last parameter

[4-17/1]

FINAL <NP> AUX <NP>

▲

▼

▲

▼

View Status

[4-17/1]

Wng & Alarm

Messages [4-19]

PUMP STOP ∆∆∆s ZERO TIME ∆∆∆s

▲

▼

AG <NP> GAS TYPE iL

☞

If there are warnings or alarms present, the warnings or alarms will be displayed. If there are no warnings or alarms present, the display will show the AG option.

☞

If you have fitted an active gauge accessory, a pressure will be displayed instead of <NP>.

iL Dry Pumping Systems 4-29

Figure 4-18 - Messages menu

Messages

MESSAGES English

▲

▼

MESSAGES Downloaded

▼

▲

ENTER

Exit

☞

Return to [4-8/3]

ENTER

BOC Edwards iL70, iL600 Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual