BOC Edwards EXT555H Instruction Manual

NRA-266-880 Issue A Original

98/37/EC
89/336/EEC
73/023/EEC

Instruction Manual

EXT555H

Jun 01 Issue A

EXT555H

PAGE

i

i

1 INTRODUCTION 1

1.1 Scope and definitions 1

2TECHNICAL DATA 3

2.1 General 3

2.2 Pumping media 3

2.2.1 Pumps without gas purge 4

2.2.2 Pumps with gas purge 4

2.3 Vent gas specification and vent control data 4

2.4 Purge gas specification 5

2.5 Water cooling 5

2.6 Materials exposed to gases pumped 6

3 INSTALLATION 9

3.1 Unpack and inspect 9

3.2 Typical installation 9

3.3 Connection to the vacuum system 9

3.3.1 Inlet screens (supplied fitted) 9

3.3.2 Inlet connection 11

3.3.3 Backing connection 11

3.3.4 Interstage connection (Hi pump variants only) 13

3.4 Vent options, vent valve connection and control 13

3.5 Purge gas connection 15

3.5.1 Connect the purge gas 15

3.5.2 Recommended purge gas flow 15

3.6 Electrical installation 15

3.7 Cooling 15

3.7.1 Introduction 15

3.7.2 Forced air cooling 17

3.7.3 Water cooling 17

4 OPERATION 19

4.1 Start up 19

4.2 Stand-by 19

4.3 Shut-down 19

4.4 Safety interlocks and control system 19

4.5 Bakeout (conflat only) 20

5MAINTENANCE 21

5.1 Introduction 21

5.2 Bearing maintenance 21

5.3 Clean the pump 21

5.4 Fault finding 21

6 STORAGE AND DISPOSAL 25

CONTENTS

Section Title Page

dcs/0112

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6.1 Storage 25

6.2 Disposal 25

7 SERVICE, SPARES AND ACCESSORIES 27

7.1 Introduction 27

7.2 Service 27

7.3 Spares 27

7.3.1 ISX inlet-screen 27

7.3.2 Inlet-strainer (EXT555Hi pump only) 28

7.3.3 Inlet-flange seals 28

7.4 Accessories 28

7.4.1 Installation 28

7.4.2 EXC controller 28

7.4.3 Pump-to-controller cable 30

7.4.4 EXDC drive modules 30

7.4.5 BX bakeout band (conflat only) 30

7.4.6 FL20K foreline trap 31

7.4.7 TAV vent-valve and vent-port adaptor 31

7.4.8 ACX air-cooler 31

7.4.9 WCX water-cooler 32

7.4.10 Vibration isolators 32

7.4.11 PRX purge-restrictor 32

7.4.12 VRX vent-restrictor 33

ILLUSTRATIONS

Figure Title Page

1 Typical pumping system 10
2 Diagram of inlet screen - remove screws 'A' in order

to remove the inlet screen. Do not remove screws 'B' 12
3 Maximum rate of pressure rise when venting 14
4 Dimensions and features of EXT555H pumps 16
5 Installation of EXT555H optional accessories and spares 29

CONTENTS (continued)

Section Title Page

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iii

1 General information 3
2 Vent gas and vent control data 4
3 Purge gas specification 5
4 Cooling water specification 5
5Technical data 6
6 List of items supplied 9
7 Vent restrictor orifice diameter (with atmospheric

pressure at the inlet) 13
8 Fault finding 22
9ISX inlet-screen 27
10 Inlet-strainer (EXT555Hi pump only) 28
11 Inlet-flange seals 28
12 EXC controller 28
13 Pump-to-controller cable 30
14 EXDC drive modules 30
15 BX bakeout band 30
16 FL20K foreline trap 31
17 TAV vent-valve and vent-port adaptor 31
18 ACX air-cooler 31
19 WCX water-cooler 32
20 Vibration isolators 32
21 PRX purge-restrictor 32
22 VRX vent-restrictor 33

ASSOCIATED PUBLICATIONS

Publication Title Publication Number

EXC120/120E/300/300M Turbomolecular Pump Controllers D396-14-880G
EXC250E/250L Turbomolecular Pump Controllers D396-36-880A
EXDC Turbomolecular Pump Drive Modules D396-40-880E

TABLES

Table Title Page

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INTRODUCTION

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1INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation,
maintenance and storage instructions for the BOC
Edwards EXT555H compound turbo-molecular
pumps. Please read and follow all the instructions in
this manual.

The EXT555H pump is designed for use with a BOC
Edwards EXC or EXDC controller. Read this
manual and the instruction manual supplied with
your controller before you attempt to install or
operate the equipment. The controller manual
contains details of electrical installation.

Important safety information in this manual is
highlighted as WARNING and CAUTION
instructions. Please obey these instructions. The use
of warnings and cautions is defined below.

In accordance with the recommendations of
EN61010, the following warning symbols may
appear on the pump or its accessories:

Warning - refer to accompanying
documentation.

Warning - risk of electric shock.

WARNING

Warnings are given where failure to
observe the instruction could result

in injury or death to people.

CAUTION

Cautions are given where failure to observe the

instruction could result in damage to the

equipment, associated equipment or process.

Warning - hot surfaces.

The units used throughout this manual conform to
the SI system of units of measurement. Also,
throughout this manual, wherever flow rates are
specified, the abbreviation 'sccm' is used to mean
standard cm

3

min-1: this is a flow of 1cm3 min-1 at an
ambient temperature of 0 °C and a pressure of
1013 mbar (1.013 x 10

5

Pa).

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2TECHNICAL DATA

2.1 General

General items Reference data

Performance See Table 5

Dimensions and features See Figure 4

Maximum inlet flange temperature 80 °C

Maximum magnetic field

EXT555H DN160CF 3 mT horizontal, 5 mT vertical

EXT555H ISO160 2.5 mT horizontal, 5 mT vertical

Installation category EN61010 part 1, category 1

Pollution degree EN61010 part 1, category 2

Equipment type Fixed equipment, for indoor use only

Operating altitude up to 3000 m

Ambient temperature 5 °C - 35 °C (air cooled)

5 °C - 40 °C (water cooled)

Relative humidity 10 - 95% non condensing

Table 1 - General information

2.2 Pumping media

WARNING

Vent dangerous gases and gas

mixtures safely. Do not expose

people to these gases.

WARNING

Do not use EXT555H pumps to

pump explosive gas mixtures as the

pumps are not suitable for this

purpose.

WARNING

On an Hi variant, gas pumped

through the interstage port will mix

with gas pumped through the pump

inlet. Ensure that the gases will not

react or combine to form dangerous

gases and substances.

Note: Concentrations of gases may be modified by

the compression of the pump.

CAUTION

Do not use an EXT555H pump to pump gases
containing more than 20% oxygen unless a bearing
purge is applied as stated in Section 2. If you do the

lubricant will be damaged and the pump will fail

prematurely.

CAUTION

Do not use the EXT555H pump to pump mercury

vapour, and do not allow mercury to come into
contact with the pump. If you do, the rotor may

corrode and fail.

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TECHNICAL DATA

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2.2.1 Pumps without gas purge

The pumps are designed to pump the following
residual gases normally used in high vacuum systems:

• air

• nitrogen

• carbon dioxide

• carbon monoxide

• krypton

• helium

• neon

• argon

• hydrogen

• ethane

• propane

• butane

• methane

You can use the pumps to pump oxygen and water
vapour subject to the following conditions:

• Oxygen

The oxygen concentration must be less than
20% by volume unless a bearing purge is
applied as detailed in Section 2.2.2.

• Water vapour

You must ensure that vapour does not
condense inside the pump - refer to
Section 3.7.3.

If you wish to pump a gas not previously listed,
contact your supplier for advice. If you do not
contact your supplier you may invalidate the
warranty on the pump.

The pumps are not suitable for pumping aggressive
or corrosive gases.

2.2.2 Pumps with gas purge

When purged with an inert gas the pumps can be
used to pump oxygen in concentrations above 20%
by volume.

2.3 Vent gas specification and vent

control data

Although the pump may be vented to atmosphere,
relatively high air humidity may greatly increase the
subsequent pump-down time. To reduce pump­down times you should vent the pump with dry,
clean gases.

Vent gas system items Reference data

Vent gas Dry air, nitrogen, argon or other inert gases

Maximum dew point at atmospheric pressure -22 °C

Maximum size of particulate 1 micron

Maximum concentration of oil 0.1 parts per million

Time for rotational speed to reach 50% >15 seconds

Maximum allowed rate of pressure rise see Figure 3

Table 2 - Vent gas and vent control data

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5

2.4 Purge gas specification

Purge gas system items Reference data

Purge gas Dry nitrogen, argon or other inert gases

Maximum dew point at atmospheric pressure -22 °C

Maximum size of particulates 1 micron

Maximum concentration of oil 0.1 parts per million

Allowable purge gas flow (when required) 20 to 150 sccm (0.33 to 2.48 mbar l s-1, 33 to 248

Pa l s-1)

Recommended purge gas flow 25 sccm (0.42 mbar l s-1, 42 Pa l s-1)

Maximum allowable purge gas supply pressure 2 bar gauge (29 psig, 3 x 10

5

Pa)

Table 3 - Purge gas specification

2.5 Water cooling

The following water cooling specification
corresponds to a typical high quality drinking water
specification. Check with your water supply
authority if you are in doubt about the quality of
your supply.

Cooling water system items Reference data

Quality Mechanically clean and optically with no deposits

or turbidity

pH value 6.0 to 8.0

Maximum calcium carbonate concentration 75 parts per million

Maximum chloride concentration 100 parts per million

Minimum oxygen concentration 4 parts per million

Recommended water cooling flow rate (at 15 °C) 15 l hr

-1

Water temperature See Table 5

Maximum water pressure 5 bar (gauge), 73.5 psig, 6 x 10

5

Pa

Materials exposed to cooling water Copper, brass, braise

Table 4 - Cooling water specification

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2.6 Materials exposed to gases pumped

The following materials and component types are
exposed to the gases pumped: aluminium alloys,
stainless steels, fluoroelastomer and nitrile 'O' rings,
hydrocarbon lubricant, rare earth magnets, silicon
nitride, phenolic resin and carbon fibre epoxy resin.

Parameter EXT555H Notes

Mass EXT555H ISO160 13.4 kg

Mass EXT555H DN160CF 21.2 kg

Main inlet flange DN160ISO-K/DN160CF

Outlet flange DN25NW

Interstage port (Hi variants) DN25NW

Vent port 1/8 inch BSP

Purge port 1/8 inch BSP

Inlet pumping speed *

N2 540 l s

-1

He 580 l s

-1

H2 500 l s

-1

Ar 510 l s

-1

Interstage pumping speed *

N2 8 l s

-1

He 6 l s

-1

H2 8 l s

-1

Ar 10 l s

-1

Inlet compression ratio **

N2 >10

10

Pb < 20 mbar

He 10

8

Pb < 12 mbar

H2 10

6

Pb < 7 mbar

Ar >10

10

Pb < 20 mbar

Critical backing pressure

†

N2 > 20 mbar

H2 9 mbar

He 20 mbar

Ar > 20 mbar

Table 5 - Technical data

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Ultimate pressure
CF
ISO

<10

-10

mbar

<2 x 10

-9

mbar

Minimum backing pump
displacement

12 m

3 h-1

Recommended backing pump RV12

Maximum continuous inlet
pressure (light gas pumping)

††

Forced air cooled, 30 °C ambient 1 x 10-3 mbar

Forced air cooled, 35 °C ambient 5 x 10

-4

mbar

Water cooling at 15 °C2 x 10

-3

mbar

Maximum continuous inlet
pressure (argon pumping)

††

Forced air cooled, 30 °C ambient 2 x 10-4 mbar

Forced air cooled, 35 °C ambient 2 x 10

-4

mbar

Water cooling at 15 °C3 x 10

-4

mbar Water cooling while pumping high

concentrations of argon is not
recommended

Maximum continuous backing
pressure (light gas pumping)

††

Forced air cooled, 30 °C ambient 12 mbar

Forced air cooled, 35 °C ambient 7.5 mbar

Water cooling at 15 °C15 mbar

Maximum continuous backing
pressure (argon)

††

Forced air cooled, 30 °C ambient 5 mbar

Forced air cooled, 35 °C ambient 3.5 mbar

Water cooling at 15 °C 8 mbar Water cooling while pumping high

concentrations of argon is not
recommended

Operating attitude Any

Nominal rotational speed 50000 rpm

Start time to 90% speed:

EXC250 < 8 minutes

EXC300 < 8 minutes

EXDC160 < 8 minutes

Parameter EXT555H Notes

Table 5 - Technical data (continued)

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Cooling method forced air / water

Ambient air temperature for
forced air cooling

0 °C - 35 °C

Minimum cooling water flow rate
(water at 15 °C)

15 l h

-1

Water temperature 10 °C - 20 °C

Noise level at 1 metre <60 dBA

Recommended controllers EXC250, EXC300, EXDC160

Quiescent power consumption 35 W

* Pumping speeds are without inlet screen or inlet strainer (EXT555Hi)

Inlet screens and inlet strainers reduce pumping speed by about 20%

** Pb = backing pressure

†

Pumping speed has dropped by 10%

††

Above this pressure the rotational speed of the pump drops below nominal

Parameter EXT555H Notes

Table 5 - Technical data (continued)

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3 INSTALLATION

3.1 Unpack and inspect

Take care when you unpack the pump to avoid
excessive shocks which could damage the bearings
and reduce the life of the pump. The pump is
supplied with the inlet and the outlet sealed to
prevent entry of dust and vapour. Do not remove
these seals until you are ready to install the pump on
your vacuum system.

Remove all the outer cardboard packaging and
check the pump. If the pump is damaged, notify your
supplier and carrier in writing within three days;
state the item number of the pump together with
your order number and your supplier's invoice
number. Retain all the packing materials for
inspection. Do not use the pump if it is damaged.

Check that your package contains the items listed in
Table 6. If any of these items is missing, notify your
supplier in writing within three days.

If the pump is not to be used immediately, store the
pump in suitable conditions as described in
Section 6.1.

It is advised that you retain all packing materials for
use should you return the pump for service.

WARNING

The EXT555H DN160CF pump

variant weighs 21 kg. Take care when

handling the pump and ensure that
you grip it firmly by the inlet flange

when manoeuvring it.

3.2 Typical installation

A typical pump system with an EXT555H pump is
shown in Figure 1.

The accessories available for the EXT555H pump
are detailed in Section 7.4. The accessories are
shown in Figure 5.

3.3 Connection to the vacuum system

Carefully remove the pump from packaging media
and connect to the vacuum system

.

3.3.1 Inlet screens (supplied fitted)

WARNING

Install the pump on the vacuum
system before you connect the

controller to the power supply. This

will ensure that the pump cannot

operate and injure people during

installation.

WARNING

Removal of inlet screens will expose

people to the risk of injury from

sharp edges.

CAUTION

Removal of inlet screens could allow debris to fall
into the pump, which could cause serious damage

to the pump.

Qty Description

1 EXT555H turbomolecular pump

1 Inlet screen (fitted)

1 Inlet seal (trapped 'O' ring, co-seal or copper compression gasket)

1 Inlet strainer (EXT555Hi only, fitted in the interstage port)

Table 6 - List of items supplied

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Figure 1 - Typical pumping system

1. Alternative position for
vent-valve

2. Vacuum system

3. High-vacuum gauge

4. Inlet-screen

5. EXT pump

6. Backing valve

7. Vacuum gauge

8. Flexible bellows

9. Foreline trap

10. Rotary backing pump

11. Mist filter

12. Cooling water connectors

13. EXC controller

14. Air cooler

15. PRX10 purge restrictor

16. Regulated purge gas supply

17. Vent-valve

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Do not remove inlet screens unless you can be sure
that there is no danger that debris can fall into the
pump. If the inlet screens are removed, the pumping
speed through the inlet will increase by
approximately 20%.

To remove the inlet screen, undo the three screws
('A') which hold it down (Figure 2). If you need to
replace the inlet screen, do so by undoing these
screws, changing the inlet screen, and replacing the
screws. Ensure that screws are firmly tightened.

3.3.2 Inlet connection

Ensure that the EXT555H pump is securely fixed to
the vacuum system following the instructions below.

Make sure that the pump inlet and all components
fitted to the pump inlet are clean and dust free. If the
pump inlet is not kept clean the pump down time
may be increased.

Use the vacuum seal provided with the pump.

If you are using an EXT555H ISO160 pump, connect
it to the vacuum system using an ISO160 rotatable
flange with a full complement of bolts. Alternatively
use at least 8 claw clamps.

If you are using an EXT555H DN160CF, use a full
complement of 20 M8 bolts to attach the pump to
your vacuum system.

CAUTION

Do not remove the three screws which retain the
locking plate ('B' in Figure 3). If you do so the pump

settings may change and the pump may cease to

operate or have a shortened life.

WARNING

Ensure that the EXT555H pump is

securely fixed to the vacuum system

following the instructions below. If
you do not, and the pump seizes, the
stored energy of the rotor can cause

rapid movement of the pump, which

may cause injury to people and

further damage to equipment.

If the inlet flange of the EXT555H is not connected
to a rigid, firmly fixed vacuum system, ensure that
the base of the pump is fixed to a firm support.
Remove the four feet and secure the pump using
eight M8 screws through the tapped fixing holes in
the base of the pump. If you are using a WCX555
water cooling accessory, mount through the cooling
plate into the tapped holes on the base of the pump.

If the pump inlet is connected to the vacuum system
using a vibration isolator, use the tapped fixing holes
in the base of the pump to secure the pump to a firm
support as described above. Alternatively, fit
suitable restraints to prevent movement of the
pump and fracture of the vibration isolator in the
unlikely event of a seizure of the pump rotor.

The pump can be mounted in any orientation. If it is
mounted off-vertical, ensure that the backing port
points downwards to reduce the risk of
contamination from backing pump oil.

3.3.3 Backing connection

Use suitable vacuum tubing and connectors to
connect the NW flange of the backing port to your
backing pump. If necessary use flexible pipe or
bellows to reduce the transmission of vibration
from the backing pump to the EXT555H pump.

We recommend that you use a BOC Edwards RV
backing pump. The minimum size of the backing
pump required is given in Table 5. You may have to
use a larger backing pump if you run the pump at a
high inlet pressure or high throughput, or if you
purge the pump.

CAUTION

If you back the EXT555H pump with the interstage

of another turbomolecular pump, make sure that
the backing pressure does not fall below 5 x 10

-4

mbar (5 x 10

-2

Pa). Lower backing pressures will

increase the evaporation rate of the lubricant and

so will reduce the life of the bearings.

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Figure 2 - Diagram of inlet screen - remove screws 'A' in order to remove the inlet screen. Do not remove

screws 'B'

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13

3.3.4 Interstage connection (Hi pump

variants only)

Use suitable vacuum tube and connectors to
connect the interstage port to your vacuum system
or to the outlet flange of another turbomolecular
pump. Leave the inlet strainer in the interstage port
unless you are sure that debris cannot be drawn into
the interstage port.

3.4 Vent options, vent valve connection

and control

To maintain the cleanliness of your vacuum system
we recommend that, whenever you switch the
pump off, you vent the pump or the vacuum system
when the speed of the EXT555H pump is between
full rotational speed and 50% of full rotational speed.
At and above 50% of full rotational speed the rotor
spins fast enough to suppress any hydrocarbon oil
from your backing pump. Venting may be
accomplished by one of the following methods:

• Use a TAV5 or TAV6 solenoid vent valve
accessory (see Section 7) in place of the
manual vent valve.

• Use a TAV5 or TAV6 solenoid vent valve
connected to a convenient flange on your
vacuum system.

• Use an alternative valve connected to your
vacuum system.

The maximum rate of pressure rise is given in
Figure 3.

When using the manual vent valve supplied you must
only open the vent valve when the rotational speed
of the EXT555H pump has fallen to 50% of full
rotational speed.

If you use a TAV vent valve or other solenoid vent
valve, you should only use the vent valve to vent the
pump from full speed if the vacuum system has a
volume of 20 litres or more. If the system has a
volume of less than 20 litres you should incorporate
a suitable restrictor (see below and Table 7).
Alternatively, if you are using an EXC controller to
operate the vent valve, you can configure the valve
so that it opens once the pump has reached 50% of
full rotational speed.

Do not vent from the backing line as this may lead
to contamination. If you vent into your vacuum
system, select a point upstream of the pump to
prevent oil backstreaming from the backing line.

CAUTION

You must ensure that your vacuum system cannot
suddenly be vented to atmosphere when the pump
is running a t full r otational s p e e d - if it does so t hen

the EXT555H pump may suffer a catastrophic

failure. As the inlet screen is not designed to

contain pump components in the event of a

catastrophic failure, subsequent damage may result

to the connected vacuum system.

CAUTION

If you vent the pump when it is at full rotational

speed and the rate of pressure rise is too high the

pump bearing life may be reduced.

Vacuum system volume (litres) Orifice diameter (mm)

< 20 < 1.0

< 10 < 0.7

< 5 < 0.5

< 2 < 0.35

Table 7 - Vent restrictor orifice diameter (with atmospheric pressure at the inlet)

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Figure 3 - Maximum rate of pressure rise when venting

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15

If you use the TAV5 or TAV6 vent valve you can
control it using an EXC controller or by other
methods. Table 7 gives an indication of the
appropriate size of orifice to be fitted to the vent
valve for given vacuum system volumes in order that
the vent rate is kept within the limits given in
Figure 3.

Refer to Section 2 for information on vent gas
specification.

3.5 Purge gas connection

3.5.1 Connect the purge gas

If you want to supply a purge gas to the pump, fit a
vent port adapter (see Section 7) in place of the
blank plug (item 6, Figure 4). Connect your gas
supply to the purge port. Your purge gas must
comply with the specification given in Section 2.

You must limit the purge gas flow rate to the
allowed range, also specified in Section 2. To limit
the flow rate use a flow controller or a pressure
regulator and calibrated flow restrictor. The PRX10
purge restrictor accessory (see Section 7) is suitable
for this purpose. Adjust the PRX10 as described in
the instruction manual supplied with the accessory.

3.5.2 Recommended purge gas flow

The recommended purge gas flow for typical
applications is 25 sccm (0.42 mbar l s

-1

, 42 Pa l s-1).
This flow will protect the pump when you pump
oxygen in concentrations above 20% by volume.

3.6 Electrical installation

Note: You must electrically bond the EXT555H

pump to earth (ground) using the earth

(ground) screw provided on the pump (item 5,

Figure4) to ensure that the pump complies

with EN61010.

Always make the electrical connections to the pump
after the pump has been installed on the vacuum
system.

The EXC controller provides the electrical supply to
the EXT555H pump through the pump-to­controller cable. Connect and lock the bayonet
connectors at the ends of the cable to the mating
connectors on the pump and the EXC controller (if
applicable). If the cable is disconnected at either end
while the pump is operating, the EXC controller
output is switched off, which makes the cable safe.

The EXC controller is designed to allow a pumping
system to be configured in a variety of ways, from a
basic manually operated system to a fully automatic
system with remote control. Refer to the
instruction manual supplied with the controller to
complete the electrical installation.

3.7 Cooling

3.7.1 Introduction

You must use water cooling in any of the following
operating conditions:

• When backing pressure is high (see Table 5).

• When you bake the EXT pump or the vacuum

system close to the pump.

• When the ambient temperature is above
35 °C.

• When there is high continuous gas
throughput (see Table 5).

In all other operating conditions, you can use forced
air cooling. If you use forced air cooling you must
ensure that there is an adequate supply of cooling air
to the pump.

CAUTION

You must cool the pump by forced-air or water

cooling to prevent damage to the bearing.

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Figure 4 - Dimensions and features of EXT555H pumps

1. Backing port (NW25)

2. Interstage port - Hi variants (NW25)

3. Electrical supply connector

4. Vent valve

5. Earth bond point

6. Purge plug

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17

3.7.2 Forced air cooling

An air cooler accessory is available for the
EXT555H pump (see Section 7). Fit the air cooler as
described in the instructions supplied with it. If you
wish to use alternative air cooling, ensure that the
flow rate is above 280 m

3 h-1

(80 l s -1, 160 cfm).

3.7.3 Water cooling

A water cooling accessory is available for the
EXT555H pump (see Section 7). Fit the water
cooler as described in the instructions supplied with
it. It is not necessary to use thermal contact grease
with this water cooling accessory.

The cooling water must comply with the
specification given in Section 2.5. Pipes in the water
cooling circuit may become blocked if the cooling
water contains too much calcium carbonate or if it
contains particulates which are too large. Corrosion
of the water cooling circuit may occur if there is too
little calcium carbonate or oxygen in the water.
Good quality drinking water is usually suitable for
water cooling. If in doubt you must check the quality
of your cooling water supply and, if necessary,
provide treatment and filtration.

CAUTION

To prevent excessive thermal gradients from

developing across the bearing, do not use thermal

transfer paste between the water-cooling

accessory and the turbo-pump body.

CAUTION

Where possible, if you need to pump argon you

should avoid water cooling the pump, in order to

avoid excessive thermal gradients from developing

across the bearing.

If you must water cool while pumping argon (for

example if you are required to bake the pump)

then you must ensure that you limit the inlet

pressure and backing pressure according to the

values given in Table 5.

Connect the cooling water supply to the water
cooler as described below. Either of the riffled
connectors can be used for the water supply or
return connections.

1. Push reinforced hose (approximately 6 mm
internal diameter) over the ends of the riffled
hose connectors on the water cooler.

2. Attach the hose with strong hose clips and
make sure that they are tightened securely.

3. If the pump is mounted off the vertical, ensure
that the water cooling plate connectors are
positioned below the electrical connector so
that any leaking water does not drip onto it.

You must turn off the cooling water supply when
you switch off the pump to prevent condensation of
vapours inside the pump. EXC controllers can
operate a solenoid valve for this purpose. Refer to
the controller manual for details.

If you want to remove the pump for maintenance
but do not want to break the cooling water circuit,
unscrew the fixing screws and remove the water
cooler from the pump.

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OPERATION

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19

4OPERATION

4.1 Start up

Use the following procedure to start up a basic
manually controlled pumping system with a manual
vent valve and an EXC250 or EXC300 controller.
Refer to the controller instruction manual.

1. Turn the manual vent valve clockwise to close
it.

2. Turn on the cooling water supply (if cooling
water is used) or switch on the power supply to
the air cooler.

3. Start the backing pump.

4. When the vacuum system pressure is 10 mbar
or less, use the controller start/stop button or
the appropriate signal command to the
controller to start the pump.

5. The pump will accelerate to full operating
speed. When this has been reached the 'normal'
indicator LED on the controller will light up.

4.2 Stand-by

The EXC250 controller has a 95% speed standby
option - this can be used to stop 'beating' between
two EXT555H pumps on a system. Refer to the
controller manual for details.

WARNING

Do not operate the EXT555H pump
unless it is connected to your vacuum
system. If you do the pump rotor can
cause injury. The pump rotor rotates

at very high speeds and the rotating

blades might not be visible.

The EXC300 also has a standby option, operated
using the standby button on the front of the
controller. This runs the pump at 70% rotational
speed. This can be used to allow system pressure to
increase where this suits a particular process.
However, you should not run the pump in this mode
for long periods of time, as the pump is not designed
to be run at this speed for its lifetime.

4.3 Shut-down

Use the procedure below to shut down a basic,
manually controlled pumping system with a manual
vent valve and an EXC controller. Refer to the EXC
controller instruction manual if the backing pump
and accessories are controlled by the EXC
controller.

1. Close the valve in the backing line connecting
the EXT555H pump to the backing pump.

2. Press the start/stop button on the EXC
controller to switch off the EXT555H.

3. When the EXT555H speed has fallen to 50% of
full rotational speed, turn the manual vent valve
anticlockwise to open it. Ensure that the rate of
pressure rise does not exceed the allowed rate
of pressure rise otherwise you can damage the
pump - refer to Sections 3.4 and 2.3.

4. If water cooling is in use, turn off the cooling
water supply.

4.4 Safety interlocks and control system

The pump protection and safety interlock features
are listed below. Refer to the EXC controller
instruction manual for a full description of these
features.

• The EXC controller monitors the

temperature of the EXC pump and the
electrical power consumption of the pump. If
the EXC controller detects excessive power
consumption or temperature, the rotational
speed of the pump rotor is reduced until the
power and temperature return to normal.

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20

• If the rotational speed is reduced to 50% of
nominal speed, then the pump is stopped
immediately (or after a user defined time
delay) and the Fail LED on the EXC controller
lights.

• If pump rotational overspeed is detected by
the EXC Controller, the pump is stopped
immediately and the FAIL LED on the EXC
Controller lights.

If the Fail LED lights, switch off the backing-pump
immediately and vent the EXT pump. Once the EXT
pump has stopped, rectify the cause of the failure
(refer to Section 5.4), press the EXC Controller
Start/Stop button to reset the Fail condition, and
restart the EXT pump. If the pump is hot, allow
sufficient time for it to cool before you restart it.

4.5 Bakeout (conflat only)

If you heat your EXT555H pump (and your vacuum
system), you will speed up the degassing process so
that the pump will reach ultimate vacuum in the
shortest possible time. If you heat the pump, this will
also prevent condensation of vapours inside the
pump.

You can use the Edwards BX bakeout band to heat
the pump (refer to Section 7). Fit the band around
the pump, just below the inlet-flange. When you
bake the pump or the system, make sure that the
temperature of the inlet-flange does not exceed
100 °C.

If you bake your vacuum system and the
temperature of the system exceeds 110 °C, you
must put a radiation shield between the system and
the EXT555H pump. This radiation shield will
reduce the heat radiated onto the pump rotor.

CAUTION

When you bake the EXT555H pump to above

70 °C at the inlet-flange, you must cool the pump

by water-cooling, to prevent damage to the

bearing lubricant.

Typically, a bakeout of four hours is long enough to
remove water condensation from the pump.
However, the bakeout time will depend on the
amount of condensation in the pump and the
vacuum system, and the ultimate pressure you want
to achieve.

Jun 01 Issue A

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MAINTENANCE

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21

5 MAINTENANCE

5.1 Introduction

The maintenance operations for the EXT555H
Turbomolecular pumps are described in the
following sections. The inlet-screen, the WCX
water-cooler accessory, the inlet-strainer and inlet­flange seals are available as spares (refer to
Section 7). Fit the ISX inlet-screen as described in
Section 3.3.1. Fit the WCX water-cooler as
described in Section 3.7.3.

5.2 Bearing maintenance

When supplied, the pump contains sufficient
lubricant to supply the bearings for life. No routine
maintenance is therefore required between bearing
replacements. The bearings are not user­serviceable. The bearings will need to be replaced
when they reach the end of their service life. This is
typically more than 20,000 hours, but may be less;
this depends on the type of pumping duty on which
the pump is used.

When the bearings need replacement, we
recommend that you exchange your pump for a
factory reconditioned replacement. Alternatively,
you can send your pump to an Edwards Service
Centre to have the bearings replaced.

When you return EXT555H pumps to Edwards
Service Centres please use the procedure included
at the end of this manual.

WARNING

Allow the pump-rotor to stop, then

disconnect the EXC Controller

before you remove the pump from

your vacuum system for maintenance

or fault-finding procedures.

5.3 Clean the pump

If the EXT555H pump is contaminated inside, it may
not be possible to achieve the specified ultimate
vacuum, or pump-down time may increase. The
pump should be returned to a BOC Edwards Service
Centre where the pump will be dismantled and
cleaned. Use the procedure included at the end of
this manual.

You can use any organic solvent to clean the
external surfaces of your pump. We recommend
that you use non-CFC solvents, such as isopropanol
or ethanol. Use a cleaning solution which is suitable
for the contaminants on the pump surfaces.

For environmental reasons, keep wastage of
cleaning solutions and solvents to a minimum.

5.4 Fault finding

Refer to Table 8 for the possible causes of faults and
for the recommended actions to rectify faults.
Table 8 is applicable to a basic, manually controlled
pumping system with an EXC Controller configured
for local (manual) operation.

Note that if you use an EXC Controller configured
for remote operation to control the EXT555H
pump, or if you use an EXDC Pump Drive Module
to control the EXT555H pump, some of the checks
and actions in Table 8 may not apply to your system.

CAUTION

Do not attempt to clean any parts of the pump

other than external surfaces. Use of solvents may

damage internal pump components.

WARNING

Clean the external surfaces of the

pump in a well-ventilated location.

When you use cleaning solutions and

solvents to clean the pump, observe

all precautions specified by the

manufacturer. Avoid inhalation of any

particulates which may be present in

the pump.

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22

Refer to the fault finding section of the instruction
manual supplied with your EXC Controller or
EXDC Pump Drive Module for further fault finding
information.

Symptom Check Action

The pump does not rotate. After
pressing start - Fail LED not lit.

Is the EXC Controller power LED
lit?

If not, check that the electrical
supply is on, check that the switch
at the rear of the EXC Controller
is on, check the fuse in the rear of
the EXC Controller.

If all of the above are OK then the
EXC Controller is faulty. Consult
Edwards or your supplier.

Is the EXC Controller Start/Stop
LED flashing?

If so, check that the correct links
are made on the EXC Controller
logic interface (refer to the
instruction manual supplied with
the EXC Controller).

Check that any system interlocks
are correctly made (refer to the
instruction manual supplied with
the EXC Controller).

Check that the pump-to-controller
lead is connected.

If all the above checks are OK then
consult BOC Edwards or your
supplier.

Is the EXC Controller first speed
indication LED lit?

If not, the EXC Controller is
faulty. If lit, then the EXT pump is
faulty. Consult BOC Edwards or
your supplier.

The EXC Controller trips into Fail

- at any speed.

Are the system interlocks
correctly connected?

Ensure that the system interlocks
do not open after the EXT pump
has started.

The EXC Controller trips into Fail
during the ramp-up and before
50% speed is reached.

Is the inlet pressure too high? Is
the backing pressure too high?

If so, reduce the pumping load, or
check for a gross leak into the
system.

Is the EXT pump running too hot? Increase the cooling or decrease

the gas load. (Refer to Section 2
for maximum inlet pressure and
cooling requirements). Check that
external heat sources (such as
system bakeout heaters) are not
excessive.

Table 8 - Fault finding

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MAINTENANCE

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23

Does the rotor rotate freely? If not, the EXT pump-bearings are

damaged. Consult Edwards or
your supplier.

Is the timer set incorrectly? Increase the timer setting (refer to

the instruction manual supplied
with the EXC Controller). If the
EXC Controller still trips into Fail
consult Edwards or your supplier.

The EXC Controller trips into Fail
after 50% speed has been reached

- the first two speed LEDs are lit.

Is the pressure too high? If so, reduce the pumping load or

check for a gross leak into the
system.

If the high gas load is temporary,
configure the EXC Controller to
delay the Fail trip on 50% speed
and set an appropriate delay time
(refer to the instruction manual
supplied with the EXC
Controller).

Is the EXT pump running too hot? Increase the cooling to the pump

or decrease the gas load.

Does the rotor rotate freely? If not, the EXT pump-bearings are

damaged. Consult Edwards or
your supplier.

The EXC Controller trips into Fail

- all the speed LEDs are lit

- Consult BOC Edwards or your
supplier.

Ultimate pressure cannot be
reached.

Is the pressure limited by water
vapour?

Bake the system and pump.

Are any of the vacuum gauges
contaminated?

If so, clean or replace them.

Is the pumping speed insufficient
(due to poor conductance
between the pump and the gauge
or too large a chamber)?

Increase the conductance or
reduce the volume.

Is the backing pressure > values
given in Table 7?

Check for backing line leaks. If the
backing pressure is too high, you
may need a larger backing-pump.

Is the high-vacuum area of the
system contaminated?

If so, clean the high-vacuum
system.

Check the rest of your system for
leaks and contamination.

If found, clean the contaminated
areas and repair the leaks.

Symptom Check Action

Table 8 - Fault finding (continued)

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Remove the pump from the
system and test the ultimate
pressure of the pump alone (see
Section 3 for specification).

If poor, check the pump for
contamination and if necessary
clean as described in Section 5.3.
Leak-check the pump. If the leak
rate > 10

-7

mbar l s

-1

(10-5 Pa l s-1) consult BOC
Edwards or your supplier.

The EXT is very noisy or there is
excessive vibration or both.

Is the pump rotational speed the
same as the resonant frequency of
the attached system?

If so, change the natural frequency
of your system or isolate the pump
using flexible bellows.

Is the vibration being transmitted
from the rotary pump?

If so, fit flexible bellows or a
vibration isolator in the backing
line.

Is the noise irregular and getting
progressively worse?

If so, a bearing is defective. Switch
off the pump and consult Edwards
or your supplier.

Is the EXT making a constant high­pitched noise?

If so, the rotor might be out of
balance. Consult Edwards or your
supplier.

None of the above. - Consult Edwards or your supplier.

Symptom Check Action

Table 8 - Fault finding (continued)

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STORAGE AND DISPOSAL

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25

6STORAGE AND

DISPOSAL

6.1 Storage

Use the following procedure to store the pump.

1. Place protective covers over the inlet, outlet,
interstage (EXT555Hi only), purge and vent
ports.

2. Place the pump in its packing materials. For
fastest pump-down when the pump is put back
into service, seal the pump inside a plastic bag
together with a suitable desiccant.

3. Store the pump in cool, dry conditions until
required for use. When required, prepare and
install the pump as described in Section 3.

4. Avoid long-term storage if possible. When long­term storage is necessary, the pump should be
set up and run for at least eight hours every six
months.

6.2 Disposal

Dispose of the EXT555H Turbomolecular Pump and
any components and accessories safely in
accordance with all local and national safety and
environmental requirements.

Particular care must be taken with any components
which have been contaminated with dangerous
process substances.

Take appropriate action to avoid inhalation of any
particulates which may be present in the pump.

Do not incinerate the pump. The pump contains
phenolic and fluorosilicone materials which can
decompose to very dangerous substances when
heated to high temperatures.

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SERVICE, SPARES AND ACCESSORIES

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27

7SERVICE, SPARES

AND ACCESSORIES

7.1 Introduction

BOC Edwards products, spares and accessories are
available from BOC Edwards companies in Belgium,
Brazil, Canada, France, Germany, Hong Kong, Italy,
Japan, Korea, Switzerland, United Kingdom, USA
and a worldwide network of distributors. The
majority of these employ service engineers who
have undergone comprehensive BOC Edwards
training courses.

Order spare parts and accessories from your
nearest BOC Edwards company or distributor.
When you order, please state for each part
required:

• Model and Item Number of your equipment

• Serial number (if any)

• Item Number and description of the part

7.2 Service

BOC Edwards products are supported by a
worldwide network of BOC Edwards Service
Centres. Each Service Centre offers a wide range of
options including: equipment decontamination;
service exchange; repair; rebuild and testing to
factory specifications. Equipment which has been
serviced, repaired or rebuilt is returned with a full
warranty.

Your local Service Centre can also provide BOC
Edwards engineers to support on-site maintenance,
service or repair of your equipment.

For more information about service options,
contact your nearest Service Centre or other BOC
Edwards company.

7.3 Spares

7.3.1 ISX inlet-screen

An inlet-screen is fitted to your pump as supplied to
prevent damage from the entry of debris into the
pump. The Item Numbers of replacement inlet­screens are given below. There are two mesh sizes
available - fine and coarse. Select the mesh size
appropriate to your requirements. The fine mesh
(1 mm hole size) provides better protection against
falling objects e.g. fine pieces of filament, small grub
screws. The coarse mesh (2 mm hole size) gives
better pumping performance. The coarse inlet
screen is provided as standard.

Flange size Inlet-screen Item Number

DN160ISO-K/DN160CF Inlet screen (coarse) B580-51-007

Inlet screen (fine) B580-51-008

Table 9 - ISX inlet-screen

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7.3.2 Inlet-strainer (EXT555Hi pump only)

The EXT555Hi pump is supplied with an inlet­strainer for the interstage-port. The Item Number
of a replacement inlet-strainer is given below.

Flange size Item Number

NW25ISO-K A223-05-067

Table 10 - Inlet-strainer (EXT555Hi pump only)

Inlet-flange Inlet seal Item Number

DN160ISO-K ISO100 trapped 'O' ring, fluoroelastomer B271-58-172

DN160CF Copper compression gasket (pack of 5) C083-00-003

Table 11 - Inlet-flange seals

7.3.3 Inlet-flange seals

EXT pumps are supplied with an inlet seal. The Item
Numbers of replacement seals are given below.

7.4 Accessories

7.4.1 Installation

The accessories available for use with the EXT555H
turbomolecular pumps are described in the
following Sections. Figure 5 shows how the
accessories are fitted to an EXT pump.

7.4.2 EXC controller

The Edwards EXC Controllers provide the facilities
necessary for operating a pumping system based on
an EXT255H or EXT255Hi pump. The Item
Numbers of the EXC Controllers are given below.

Controller Voltage Item Number

EXC250E 90 - 264 V ac D396-36-000

EXC250L 90 - 264 V ac D396-35-000

EXC300 90 - 132/180 - 264 V ac D396-14-000

Table 12 - EXC controller

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29

Figure 5 - Installation of EXT555H optional accessories and spares

1. Vibration isolator

2. Bakeout band

3. Inlet flange seal (supplied)

4. Inlet screen (fitted)

5. EXT555H pump

6. TAV solenoid vent valve

7. DN10NW adaptor

8. Manual vent valve (fitted)

9. VRX vent restrictor

10. Vent port (supplied with
manual vent valve fitted)

11. WCX water cooling
accessory

12. Purge port

13. Purge plug (fitted)

14. DN10NW adaptor

15. PRX purge restrictor

16. Bakeout band position

17. ACX air cooler assembly

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7.4.3 Pump-to-controller cable

You must fit a pump-to-controller cable between an
EXC Controller and the EXT pump. A cable is not
supplied with the EXT Pump or the EXC Controller
(except EXC250L). The following cables are
available:

Cable Length Item Number

Pump-to-controller 1 m D396-18-010

Pump-to-controller 3 m D396-18-030

Pump-to-controller 5 m D396-18-050

Table 13 - Pump-to-controller cable

7.4.4 EXDC drive modules

Fit an EXDC Drive Module as an alternative to an
EXC Controller and pump-to-controller cable.

Drive module Item Number

EXDC160 D396-41-000

Table 14 - EXDC drive modules

7.4.5 BX bakeout band (conflat only)

A BX bakeout band accelerates the degassing of the
pump to enable it to achieve lower pressures. It may
also be used to protect the pump from
condensation of contaminants. The bakeout bands
are available in 110-120 V or 220-240 V versions and
may be powered from a rear panel socket on the
EXC Controller.

Pump Bakeout band Item Number

EXT555H/Hi DN160CF BX501 (110 V) B580-52-044

BX501 (240 V) B580-52-064

Table 15 - BX bakeout band

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SERVICE, SPARES AND ACCESSORIES

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31

7.4.6 FL20K foreline trap

The foreline trap minimises oil vapour
backstreaming from the backing pump and is
recommended where the highest system cleanliness
is required.

Foreline trap Item Number

FL20K A133-05-000

Table 16 - FL20K foreline trap

7.4.7 TAV vent-valve and vent-port

adaptor

Two solenoid-operated vent-valves are available for
system venting. The valves are 24 V dc, normally­open, and can be driven automatically from the EXC
Controller. The solenoid-valve is fitted in place of
the manual-valve, or alternatively can be fitted with
an adaptor (supplied with the valve) and be used
with any suitable NW10 flanged port on your
vacuum system.

The vent-port adaptor allows the vent-port or the
purge-port to be used with any suitable NW10
fitting: refer to Figure 5.

Product Item Number

TAV5 vent-valve B580-66-010

TAV6 vent-valve B580-66-020

NW10-1/8 inch BSP
male adaptor

B580-66-011

Table 17 - TAV vent-valve and vent-port adaptor

7.4.8 ACX air-cooler

An ACX air-cooler can be fitted to the EXT pump.
However, please refer to Section 3.7 and to Table 5
to check the suitability of air-cooling in a particular
application.

Pump Air-cooler Item Number

EXT555H/Hi ACX555 B580-53-561

Table 18 - ACX air-cooler

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SERVICE, SPARES AND ACCESSORIES

32

7.4.10 Vibration isolators

In applications where the small amount of vibration
generated by the turbomolecular pump is a
problem, a vibration isolator can be fitted. The
isolator consists of two special flanges separated by
a flexible bellows and a rubber, anti-vibration, outer
collar. The isolator required depends on the pump
inlet-flange size.

Inlet-flange size Item Number

DN160ISO-K B581-25-000

DN160CF-K B581-10-000

Table 20 - Vibration isolators

7.4.11 PRX purge-restrictor

A modified DN10NW centring-ring is available to
filter the purge gas and restrict its flow rate to the
recommended flow of 25 sccm. The restrictor is
suitable for all EXT pumps fitted with a purge-port.

Purge-restrictor Flange size Item Number

PRX10 NW10 B580-65-001

Table 21 - PRX purge-restrictor

7.4.9 WCX water-cooler

If you wish to water cool your pump, you must
order the water cooling plate:

Water cooler Item Number

WCX555 B580-67-003

Table 19 - WCX water-cooler

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33

7.4.12 VRX vent-restrictor

Use a VRX fixed orifice vent-restrictor to restrict
the flow of vent gas into the EXT pump. Refer to
Section 3.4 for information on the selection of the
correct VRX vent-restrictor.

Vent-restrictor Orifice diameter (mm) Item Number

VRX10 0.1 B580-66-021

VRX20 0.2 B580-66-022

VRX30 0.3 B580-66-023

VRX50 0.5 B580-66-024

VRX70 0.7 B580-66-025

Table 22 - VRX vent-restrictor

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Return of Edwards Equipment - Procedure

(Form HS1)

Introduction

Before you return your equipment you must warn your supplier if the substances you used (and produced) in
the equipment can be dangerous. You must do this to comply with health and safety at work laws.

You must complete the Declaration (HS2) on the next page and send it to your supplier before
you dispatch the equipment. If you do not, your supplier will assume that the equipment is dangerous and

he will refuse to accept it. If the Declaration is not completed correctly, there may be a delay in processing
your equipment.

Guidelines

Take note of the following guidelines:

•

Your equipment is 'uncontaminated' if it has not been used or if it has only been used with substances
that are not dangerous. Your equipment is 'contaminated' if it has been used with any dangerous
substances.

•

If your equipment has been used with radioactive substances, you must decontaminate it before you return
it to your supplier. You must send independent proof of decontamination (for example a certificate of
analysis) to your supplier with the Declaration (HS2). Phone your supplier for advice.

•

We recommend that contaminated equipment is transported in vehicles where the driver does not share
the same air space as the equipment.

PROCEDURE

Use the following procedure:

1. Contact your supplier and obtain a Return Authorisation Number for your equipment.

2. Turn to the next page(s), photocopy and then complete the Declaration (HS2).

3. Remove all traces of dangerous gases: pass an inert gas through the equipment and any accessories which
will be returned to your supplier. Drain all fluids and lubricants from the equipment and its accessories.

4. Disconnect all accessories from the equipment. Safely dispose of the filter elements from any oil mist filters.

5. Seal up all of the equipment's inlets and outlets (including those where accessories were attached). You
may seal the inlets and outlets with blanking flanges or heavy gauge PVC tape.

6. Seal contaminated equipment in a thick polythene bag. If you do not have a polythene bag large enough to
contain the equipment, you can use a thick polythene sheet.

7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. Preferably, the pallet
should be no larger than 510mm x 915mm (20" x 35"); contact your supplier if you cannot meet this
requirement.

8. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.

9. If the equipment is contaminated, label the pallet (or box) in accordance with laws covering the transport
of dangerous substances.

10. Fax or post a copy of the Declaration (HS2) to your supplier. The Declaration must arrive before the
equipment.

11. Give a copy of the Declaration to the carrier. You must tell the carrier if the equipment is contaminated.

12. Seal the original Declaration in a suitable envelope; attach the envelope securely to the outside of the
equipment package. WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON

THE OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT
PACKAGE.

Return of Edwards Equipment - Declaration

(Form HS2)

You must:
Know about all of the substances which have been used and produced in the equipment before you complete this Declaration

• Read the Procedure (HS1) on the previous page before you attempt to complete this Declaration

• Contact your supplier to obtain a Return Authorisatio n N um b e r and to obtain advice if you have any quest ions

• Send this form to your supplier before you return your equipment

Equipment model ___________________________________________

Serial Number _____________________________________________

Has the equipment been used, tested or operated?

yes

❏

Go to Section 2 no ❏ Go to Section 4

Return Authorisation Number:

FOR SEMICONDUCTOR APPLICATIONS ONLY :

Tool Reference Number ____________________________________

Process __________________________________________________

Failure Date ______________________________________________

Serial Number of
Replacement Equipment_____________________________________

SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT

Are any of the substances used or produced in the equipment

• Radioactive yes

❏

no

❏

• Biologically active yes ❏ no

❏

• Dangerous to human health and safety? yes ❏ no

❏

If you have answered 'no' to all of these questions, go to Section 4.

SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT

Substance name Chemical

symbol

Precautions required (for example, use protective

gloves, etc.)

Action required after spillage or

human contact

1

2

3

4

5

6

Your supplier will not accept delivery of any equipment
that is contaminated with radioactive substances, unless
you:

• Decontaminate the equipment

• Provide proof of decontamination

YOU MUST CONTACT YOUR SUPPLIER FOR ADVICE

BEFORE YOU RETURN SUCH EQUIPMENT

Reason for return and symptoms of malfunction: _____________________________________________________________________________

_____________________________________________________________________________________________________________________

If you have a warranty claim:

• who did you buy the equipment from ? __________________________________________________________________________________

• give the supplier's invoice number _____________________________________________________________________________________

SECTION 5: DECLARATION

Print your name: __________________________________Print your job title: ______________________________________________

Print your organisation: ________________________________________________________________________________________________

Print your address: ________________________________________________________________________________________________

________________________________________________________________________________________________

Telephone number: _________________________________ Date of equipment delivery: ________________________________________

I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any information.
I have followed the Return of BOC Edwards Equipment Procedure (HS1) on the previous page.

Signed: _____________________________________________________ Date ____________________________________________________

SECTION 1: EQUIPMENT

SECTION 4: RETURN INFORMATION

Corporate Headquarters

BOC Edwards

Manor Royal
Crawley
West Sussex, RH10 2LW
UNITED KINGDOM

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+(44) 1293 528844 Fax: +(44) 1293 533453

Asia Headquarters

BOC Edwards (Asia)

2605 Shun Tak Centre, West Wing
200 Connaught Road Central
Hong Kong S.A.R

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+(852) 2796 9111 Fax: +(852) 2796 9095

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CHINA Shanghai +(86) 21 5899 0272

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CHINA Tianjin +(86) 22 2834 1981

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TAIWAN, R.O.C. Toufen +(886) (0)37 611422

Fax: +(886) (0)37 611401

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SOUTH EAST ASIA Singapore +(65) 546 8408

Fax: +(65) 546 8407

Europe Headquarters

BOC Edwards

Manor Royal
Crawley
West Sussex, RH10 2LW
UNITED KINGDOM

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+(44) 1293 528844 Fax: +(44) 1293 533453

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UK Guildford+(44) 1483 579857

Fax: +(44) 1483 505211

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UK Cumbernauld +(44) 1236 730575

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BELGIUM Brussels +(32) 2 363 00 30

Fax: +(32) 2 363 00 64

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FRANCE Paris +(33) 1 47 98 24 01

Fax: +(33) 1 47 98 44 54

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GERMANY Munich +(49) 89 99 19 18 0

Fax: +(49) 89 99 19 18 99

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ITALY Milan +(39) 2 48 4471

Fax: +(39) 2 48 401638

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ISRAEL Qiryat Gat +(972) 7 681 0633

Japan Headquarters

BOC Edwards

Shuwa Shiba Park Building A-3F
2-4-1 Shibakoen, Minato-ku
Tokyo, 105-0011
JAPAN

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Tel: +(81) (0) 3 5470 6530 Fax: +(81) (0) 3 5470
6521

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OSAKA +(81) (0) 6 6384 7052

Fax: +(81) (0) 6 6384 7504

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KYUSHU +(81) (0) 96 326 7300

Fax: +(81) (0) 96 326 7302

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SENDAI +(81) (0) 22 373 8525

Fax: +(81) (0) 22 373 9636

Electronic Gases

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OSAKA +(81) 3 3434 6789

Fax: +(81) 3 5472 8728

Korea Headquarters

Songwon Edwards Ltd

625-7 Upsong-dong
Chunan City
Chungchong Nam-do
KOREA

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+(82) 417 554 7070 Fax: +(82) 417 554 7300

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SEOUL +(82) 2 501 7070

Americas
USA Headquarters

BOC Edwards

One Edwards Park
301 Ballardvale Street
Wilmington, MA 01887
USA

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+(1) 978 658 5410 Fax: +(1) 978 658 7969

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TOLL FREE (USA only): 800 848 9800

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ARIZONA Tempe +(1) 602 777 7007

Fax: +(1) 602 777 2202

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ARIZONA Phoenix +(1) 602 777 7007

Fax: +(1) 602 777 2244

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CALIFORNIA Santa Clara +(1) 408 496 1177

Fax: +(1) 408 496 1188

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TEXAS Austin +(1) 512 491 6622

Fax: +(1) 512 389 3890

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TEXAS Richardson +(1) 972 669 9386

Fax: +(1) 972 669 8054

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BRAZIL Sao Paulo +(55) 11 8580377

Fax: +(55) 11 2652766

http://www.bocedwards.com

BOC Edwards is a trading name used by affiliate
companies of the BOC Group plc. The stripe
symbol is a trademark of the BOC Group plc.