Bird Technologies VIP System User Manual

The Bird VIP System is a tool for measuring voltage, current and the phase angle between these parameters
in complex applications. The VIP System is Bird Technologies’ solution to the semiconductor market to provide
more information than traditional VI probe instruments . Each calibrated system is comprised of a sensor
that attaches in-situ in the RF feed line, a receiver that performs the data conversion and communicates to
your workstation, and a data cable that connects the sensor to the receiver.

Using a streamlined architecture, the VIP System is able to measure and report voltage, current, and phase
angle at multiple fundamental, harmonic and intermodulation frequencies. With this data, power and
impedance are calculated at each frequency, giving users the ability to identify small discrepancies that
may make the difference between a successful and a failed process. This makes the VIP System an incredible
tool for repeating high precision processes.

System

PROBLEMS } SOLUTIONS

Simultaneous Measurements of Multiple RF Generators

} Up to 3 fundamental frequencies can be measured

simultaneously with a single VIP system. This feature aids
in developing repeatable processes, troubleshooting

components and identifying process drifts.

Complex Waveform Plot

} Proprietary architecture maintains correct phase angle

information between the fundamental and harmonics.
This feature helps to ensure that a repeatable and identical
RF spectrum is delivered to the wafer.

APPLICATIONS

Chamber to Chamber Matching.

Waveform Reconstruction enables chamber comparisons to
identify large and small changes.

Impedance Matching can reveal problems such as poor RF
connections, worn electrodes and changes in the process gas
mixture.

Harmonic Levels up to 150 MHz are available for analysis.

V, I, Phase and Delivered Power Comparison.

VIP System

PARAMETER SPECIFICATIONS

Frequency Range 307 kHz - 150 MHz (Sensor Dependent)

Frequency Resolution 100 Hz

Frequency Accuracy ± 1 kHz

Harmonics 10 maximum, up to 150 MHz (Sensor Dependent)

Number of fundamentals (F0) Maximum of 3 simultaneously

Digital > Voltage, current, phase, frequency, impedance, power at frequencies selected by user

Analog 5 Outputs, 0-10Vdc, 1000Ω-source

Update Rates 60 Hz typical for 1 fundamental (Note 1)

Network Protocol DeviceNet, Ethernet

RF Power, Max 10 kW or maximum power limit of RF connector

RF Connector Custom or QC

Receiver Operating +20 to +40 °C (68 to 104 °F)

Receiver Storage -20 to +80 °C (-4 to +176 °F)

Cable Operating 0 to +100 °C (32 to 212 °F)

Cable Storage -20 to +100 °C (-4 to 212 °F)

Sensor Operating/Storage Refer to Sensor Specication

Humidity, Max 85% Non-condensing

Air Pressure, min 745 mbar (equivalent to 2,500 m / 8,200 ft. max altitude)

Operating Power 11-24 Vdc, 1.4-3A input to receiver

PARAMETER VOLTAGE CURRENT PHASE ANGLE

Measurement RF: 1 to 3000V

rms

(Note 2) 0.1 to 100 A

rms

(Note 2) -180° to + 180°

Resolution IEEE 754 Single Precision Floating Point

Uncertainty 307 kHz-1 MHz
(Note 3)

for F°, ± 0.5 V or 1% of reading
whichever is greater for F

n

, ± 0.1 V or
2% of reading, whichever is greater
(95% condence intreval)

for F°, ± 0.05 A or 1% of reading
whichever is greater for F

n

, ± 0.10 A

or 2% of reading, whichever is greater

(95% condence intreval)

Absolute Angle:
for F°, ≥ 10 V, 1A:, ±1°
for F°, < 10 V, 1A:, ±4°
for F

n

, ≥ 10 V, 1A:, ±2°

for F

n

, < 10 V, 1A:, ±6°

(95% condence intreval)

Uncertainty 1-100 MHz (Note 3) for F°, ± 0.1 V or 1% of reading

whichever is greater for Fn, ± 0.2 V or
2% of reading, whichever is greater
(95% condence intreval)

for F°, ± 0.01A or 1% of reading
whichever is greater for Fn, ± 0.02 A

or 2% of reading, whichever is greater

(95% condence intreval)

Absolute Angle:
for F°, ≥ 10 V, 1A:, ±1°
for F°, < 10 V, 1A:, ±4°
for F

n

, ≥ 10 V, 1A:, ±2°

for F

n

, < 10 V, 1A:, ±6°

(95% condence intreval)

Uncertainty 100-150 MHz
(Note 3)

for F°, ± 0.2 V or 2% of reading
whichever is greater for Fn, ± 0.4 V or
4% of reading, whichever is greater
(95% condence intreval)

for F°, ± 0.02 A or 2% of reading
whichever is greater for Fn, ± 0.04 A
or 4% of reading, whichever is greater
(95% condence intreval)

Absolute Angle:
for F°, ≥ 10 V, 1A:, ±2°
for F°, < 10 V, 1A:, ±8°
for F

n

, ≥ 10 V, 1A:, ±4°

for F

n

, < 10 V, 1A:, ±12°

(95% condence intreval)

Receiver Temperature
Derating - From 25 °C

± 0.05% / °C ± 0.05% / °C ± 0.1% / °C

30303 Aurora Rd. Solon, OH 44139 866.695.4569 www.bird-technologies.com

Note 1: Typical data rate for 1 fundamental, 10 harmonics, auto-ADC mode, and no averaging is 60 Hz. Data rate can vary significantly depending

on conguration, network trac, and host performance.

Note 2: Maximum power is limited by the size of the sensor line section and connectors. See sensor specication document.
Note 3: At customer specied frequencies.