Bird Technologies BDS Datasheet

System

The Bird Diagnostic System (BDS) is a revolutionary tool for measuring voltage and current in complex
applications. Where repeatability of sensitive RF measurements is important, such as during the processing
of silicon wafers, the BDS provides never-before seen data. Each system is comprised of a sensor that
attaches in-situ in the RF feed line, a receiver that performs the data conversion and communicates to your
workstation, and a calibrated data cable that connects the sensor and receiver.

Using a streamlined architecture, the BDS is able to measure and report voltage, current, and phase angle
at multiple fundamental, harmonic and intermodulation frequencies. With this data, power and impedance
are calculated at each frequency, giving users the ability to identify small discrepancies that may make the
difference between a successful and a failed process. This makes the BDS an incredible tool for researching
new RF technologies and repeating high precision processes.

PROBLEMS } SOLUTIONS

Simultaneous Measurements of Multiple RF Generators

} Up to 5 fundamental frequencies can be measured

simultaneously with a single BDS system. This feature aids in
developing repeatable processes, troubleshooting

components and identifying process drifts.

Complex Waveform Plot

} Up to 5 fundamental frequencies can be measured

simultaneously with a single BDS system. This feature aids in
developing repeatable processes, troubleshooting

components and identifying process drifts.

APPLICATIONS

Chamber to Chamber Matching.

Waveform Reconstruction enables chamber comparisons to
identify large and small changes.

Impedance Matching can reveal problems such as poor RF
connections, worn electrodes and changes in the process gas
mixture.

Harmonic Levels up to 150 MHz are available for analysis.

V, I, Phase and Delivered Power Comparison.

BDSTMSystem

PARAMETER SPECIFICATIONS

Frequency Range 1 MHz - 500 MHz (Sensor Dependent)

Frequency Resolution 100 Hz

Frequency Accuracy ± 1 kHz

Harmonics 15 maximum, up to 500 MHz (Sensor Dependent)

Number of fundamentals (F0) Maximum of 5 simultaneously

Digital > Voltage, current, phase, frequency,

impedance, power at frequencies selected
by user

Analog 5 Outputs, 0-10Vdc, 1000Ω-source

Update Rates 60 Hz typical for 1 fundamental (Note 1)

Network Protocol DeviceNet, Ethernet

RF Power, Max 10 kW or maximum power limit of RF connector

RF Connector Custom or QC

Receiver Operating +20 to +40 °C (68 to 104 °F)

Receiver Storage -20 to +80 °C (-4 to +176 °F)

Cable Operating 0 to +100 °C (32 to 212 °F)

Cable Storage -20 to +100 °C (-4 to 212 °F)

Sensor Operating/Storage Refer to Sensor Specication

Humidity, Max 85% Non-condensing

Air Pressure, min 745 mbar (equivalent to 2,500 m / 8,200 ft.

max altitude)

Operating Power 11-24 Vdc, 1.4-3A input to receiver

SYSTEM COMPONENTS

Receiver

7001B200-1 BDS Single Ch. Receiver w/DeviceNet

Calibrated Data Cable Options

7001A040-SS-2M BDS RF/Data Cable Set 2M straight

7001A040-SS-5M BDS RF/Data Cable Set 5M straight

Sensor Options*

7001A050-1 Sensor, QC Interface (Specify Connectors)

7001A050-1-DF-DM Sensor, BDS, DIN(f) Input, DIN(m) Output

7001A050-1-NF-NF Sensor, BDS, N(f)-N(f)

7001A050-1-NM-NF Sensor, BDS, N(m)-N(f)

*Contact factory for a custom designed sensor.

PARAMETER VOLTAGE CURRENT PHASE ANGLE

Measurement RF: 1 to 3000V

Resolution IEEE 754 Single Precision Floating Point

Uncertainty 1-100 MHz (Note 3) for F°, ± 0.2 V or 2% of reading

whichever is greater for Fn, ± 0.4 V or
4% of reading, whichever is greater
(95% condence intreval)

Uncertainty 1-500 MHz (Note 3) for F°, ± 0.3 V or 3% of reading

whichever is greater for Fn, ± 0.6 V or
6% of reading, whichever is greater
(95% condence intreval)

Receiver Temperature
Derating - From 25 °C

Note 1: Typical data rate for 1 fundamental, 15 harmonics, auto-ADC mode, and no averaging is 60 Hz. Typical data rate for 3 fundamentals, 45 harmonics,

auto-ADC mode, and no averaging is 24 Hz. Data rate can vary signicantly depending on conguration, network trac, and host performance.

Note 2: Maximum power is limited by the size of the sensor line section and connectors. See sensor specication document.
Note 3: At customer specied frequencies.

30303 Aurora Rd. Solon, OH 44139 866.695.4569 www.bird-technologies.com

± 0.05% / °C ± 0.05% / °C ± 0.1% / °C

(Note 2) 0.1 to 100 A

rms

for F°, ± 0.02 A or 2% of reading
whichever is greater for Fn, ± 0.04 A

or 4% of reading, whichever is greater

(95% condence intreval)

for F°, ± 0.03 A or 3% of reading
whichever is greater for Fn, ± 0.06 A

or 6% of reading, whichever is greater

(95% condence intreval)

(Note 2) -180° to + 180°

rms

Absolute Angle:
for F°, ≥ 10 V, 1A:, ±1°
for F°, < 10 V, 1A:, ±4°
for F
for F
(95% condence intreval)

Absolute Angle:
for F°, ≥ 10 V, 1A:, ±2°
for F°, < 10 V, 1A:, ±8°
for F
for F
(95% condence intreval)

, ≥ 10 V, 1A:, ±2°

n

, < 10 V, 1A:, ±6°

n

, ≥ 10 V, 1A:, ±4°

n

, < 10 V, 1A:, ±12°

n