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Oil Dielectic
SC13 Series
Ultra-Stable, Oil-Dielectric RF Termination Loads
For maximum process repeatability and consistency, modern plasma applications require precise RF
power regulation and control. A key component in ensuring accurate & repeatable RF power delivery
to the chamber is calibration, regulation & monitoring of the RF generator. Bird now oers ultra-stable, low
VSWR loads for quick and precise measurement of generator power output when used with precision
power sensors such as the Bird 4020 series. Bird® models 8865SC13, 8890-300SC13, 8921SC13 and
8931 SC models not only provide low VSWR but also less than 0.1 dB total change in VSWR at processcritical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for
different lengths of time. This can minimize the errors associated with this calibration and control
one of the more critical process variables.
0.2
0.15
0.1
0.05
Absolute VSWR Change (dB)
0
0 250 500 750
Input Power (W)
RF Broadcast Load
SC Series
RF Generator
Typical RF generator calibration set-up with precision power sen
Load.
4027A10M
Sensor
SC Precision
Load
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Oil Dielectric
SC13 Series
Ultra Stable, Oil Dielectric RF Termination Loads
ULTRASTABLE SC13 LOADS
Model Frequency Range & VSWR Power Rating Dimensions Weight
8865SC13 DC to 28 MHz at 1.1 max.
VSWR less than 1.05:1
8890-300SC13 DC to 28 MHz at 1.1 max.
VSWR less than 1.05:1
8921SC13 DC to 28 MHz at 1.1 max.
VSWR less than 1.05:1
8931-115SC13 DC to 28 MHz at 1.1 max.
VSWR less than 1.05:1
8931-230SC13 DC to 28 MHz at 1.1 max.
VSWR less than 1.05:1
1 kW 19.5" x 7.5" x 13.2"
496mm x 184mm x 334mm
2.5 kW 25.2" x 7" x 17.2"
638mm x 178mm x 437mm
5 kW 32.8" x 9.5" x 26.9"
832mm x 241mm x 681mm
10 kW 115 Volt 32.8" x 9.5" x 33.4"
832mm x 241mm x 847mm
10 kW 230 Volt 32.8" x 9.5" x 33.4"
832mm x 241mm x 847mm
32 lbs.
14.5 kg
59 lbs.
27 kg
126 lbs.
57 kg
142 lbs.
65 kg
142 lbs.
65 kg
SPECIFICATIONS
Frequency Range dc – 28 MHz
Impedance 50 ohms
VSWR 1.1 max.
VSWR Stability < 0.1 dB, from 0 to 100% rated power
at stability frequency
Stability Frequency 13.56 MHz ± 10 kHz
Connector “QC” Type, Female LC normally supplied
Interlock Thermoswitch (Optional) Normally closed. Opens at 236 °C (457 °F)
Thermoswitch Rating 115 Vac
230 Vac
Temperature, Operating +5 to +40 °C (+41 to +104 °F)
Temperature, Storage – 40 to +45 °C (– 40 to +113 °F)
Altitude* 1520 m (5000 ft.)
Humidity 95% noncondensing max
Cooling method Oil dielectric and convection currents
Finish Black Epoxy Resin
10A
5A
Load_Oil_SC13Seires-06072013
30303 Aurora Rd. Solon, OH 44139 866.695.4569 www.bird-technologies.com
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