Azbil MQV9020, MQV0050, MQV9050, MQV9500, MQV0200 User Manual

...

Digital Mass Flow Controller

for Hydrogen and Helium Gases

Model MQV9020/9050/9500/0005/

0010/0050/0200

User’s Manual

No. CP-SP-1205E

Thank you for purchasing an Azbil Corporation product.

This manual contains information for ensuring the correct use of this product. It also provides necessary information for installation, maintenance, and troubleshooting.

This manual should be read by those who design and maintain equipment that uses this product. Be sure to keep this manual nearby for handy reference.

Please read “Terms and Conditions” from the following URL before ordering and use.

https://www.azbil.com/products/factory/order.html

NOTICE

Be sure that the user receives this manual before the product is used.

Copying or duplicating this user’s manual in part or in whole is forbidden. The information and specifications in this manual are subject to change without notice.

Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions. If you should find an error or omission, please contact the azbil Group.

In no event is Azbil Corporation liable to anyone for any indirect, special or consequential damages as a result of using this product.

Micro Flow Japan.

TM,

μF

and μF sensorTM are trademarks of Azbil Corporation in

Conventions Used in This Manual

 The safety precautions explained in the following section aim to prevent injury to the operator

and others, and to prevent property damage.

WARNING

CAUTION

 In describing the product, this manual uses the icons and conventions listed below.

Use caution when handling the product.

The indicated action is prohibited.

Be sure to follow the indicated instructions.

Handling Precautions

Handling Precautions indicate items that the user should pay attention to when handling this device.

Note

(1), (2), (3): Numbers within parentheses indicate steps in a sequence or parts of an

OFF

Notes indicate information that might benefit the user.

This indicates the item or page that the user is requested to refer to.

explanation.

This font indicates what is shown on the 7-segment display.

Warnings are indicated when mishandling this product might result in death or serious injury.

Cautions are indicated when mishandling this product might result in minor injury to the user, or only physical damage to the product.

[OK] indicator This is an LED indicator on the display.

[RUN] key This is an operation key.

>>: Indicates the result of an operation or the status after the operation.

Safety Precautions

WARNING

Never allow gases that are within explosion limits (in particular, mixed gases within explosion limits that contain hydrogen) to pass through this device. Doing so might result in an explosion accidents.

When using this device for gases that contain hydrogen, be sure to purge the device with an inert gas (such as nitrogen or argon) before use. Use without purging may cause an explosion.

CAUTION

Check the product connections and pipe connections for leakage before use. Also, check the connections for leakage regularly after the start of use. It is the user’s responsibility to ensure that gas leaks can be reliably detected. This is especially important if a dangerous gas is used.

If the device is used for burner air-fuel ratio control, take the necessary countermeasures with the equipment to prevent the occurrence of backfire and to avoid any influence to the device even if backfire occurs. Pressure increase or fire in the pipes caused by the backfire of the burner could damage the controller.

This device is exclusively for hydrogen and helium gases. It cannot be used for control or measurement of gases other than hydrogen, helium, and hydrogenhelium mixtures (excluding mixed gases within explosion limits). Oxygen cannot be measured even if gas-contacting sections of this device are oil-inhibited.

To use any gas that includes hydrogen, before use be sure to fill the flow path completely with the actual gas and check that the zero point is correct when the actual flow rate is stable at zero. If the zero point is not correct, execute flow rate zero calibration.

This device is set initially for hydrogen gas use at the factory. To use it for helium gas or mixed gases, change the gas type setting. The use of this device for helium or mixed gases without changing the gas type setting will result in a measurement error.

Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur. If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist trap capable of eliminating foreign matter 0.1 μm or greater in diameter at the upstream. Be sure to inspect and replace the filter at regular intervals.

CAUTION

Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it.

Do not subject this device to pressure above its pressure resistance. Doing so might damage it.

The valve on this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately. When the external valve is closed, it is necessary also to fully close the valve of the device using either of the following methods:

• Set the flow rate setpoint to zero.

• Make the valve operation mode to fully closed. If this valve remains in normal control status when the external shutoff valve is closed (zero flow rate), there will be an excessively large flow as soon as the external shutoff valve is opened. This excessive flow rate could activate the AL83 alarm (operated by the sensor safety circuit). If the sensor safety circuit is activated, flow rate measurement and flow control are not possible until the power is turned off and back on again.

If damage could result from the abnormal functioning of this device, include appropriate redundancy in the system design.

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When separately purchasing a connecting joint, use the following made by Swagelok Co., Ltd:

1/4” Swagelok: SS-400-1-6STSC11 1/4” VCR: SS-4-VCR-1-00032SC11

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

When installing joints (UNF connections), secure the lower part of the main unit in a vise or the like gripped between rags to protect the finished surfaces, and turn the joint to tighten. The device may be damaged if the lower main unit is not secured.

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

iii

CAUTION

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure.

When using a relay for external contact input and/or external 3-way switching input, always use a relay designed for micro-current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

If there is a risk of a power surge caused by lightning, use Azbil Corporation’s SurgeNon to prevent possible fire or equipment failure.

Gas type switching by external contact input, flow rate switching, and analog input/output voltage range switching by external 3-way input switching should be done only after setting the operation mode to fully closed. Switching while controlling could cause large fluctuations.

Be sure to check that the wiring is correct before turning the power on. Incorrect wiring could cause damage or malfunction.

Do not apply excessive force to cables or connectors when connector cables or the AC adapter is attached. Excessive force may damage the connectors or circuit board.

Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver. Doing so might damage the console.

When discarding the device, dispose of it as industrial waste, following local regulations.

The Role of This Manual

A total of 2 different manuals are available for the MQV. Read them as necessary for your specific requirements. If a manual you require is not available, contact the azbil Group or its dealer.

Digital Mass Flow Controller for Hydrogen and Helium Gases Model MQV9020/9050/9500/0005/0010/0050/0200 User’s Manual Manual No. CP-SP-1205E

This manual. Personnel who are using the MQV digital mass flow controller (for hydrogen and helium gases) for the first time or who are in charge of hardware design and/or maintenance of equipment containing the MQV should read this manual thoroughly. This manual gives an overview of the product, describes installation, wiring, operation, maintenance, and troubleshooting, and gives hardware specifications.

Digital Mass Flow Controller MQV9005/9020/9050/9200/ 9500/0002/0005/0010/0020/0050/0100/0200/0500 User’s Manual for Communication Functions Manual No. CP-SP-1197E

Personnel who use this device’s communications functions should read this manual. The manual gives an overview of communications, describes wiring, transmission protocols, communications data, and troubleshooting, and gives communications specifications.

Organization of the Manual

This manual is organized as follows.

Chapter 1. INTRODUCTION

This chapter briefly describes this device and its features, and gives a model selection guide.

Chapter 2. NAMES AND FUNCTIONS OF PARTS

This chapter describes the names and functions of this device’s parts.

Chapter 3. MOUNTING AND WIRING

This chapter describes installation, mounting, wiring and initial settings of this device.

Chapter 4. BASIC OPERATION

This chapter gives the basis of how to operate this device.

Chapter 5. ADVANCED OPERATION

This chapter describes how to set functions, parameters, device information display, and flow rate range.

Chapter 6. TROUBLESHOOTING

This chapter describes how to investigate and remedy trouble that may occur during operation of this device.

Chapter 7. SPECIFICATIONS

This chapter describes the device’s specifications and external dimensions.

Conventions Used in This Manual Safety Precautions The Role of This Manual Organization of the Manual Contents

Chapter 1. INTRODUCTION

 Introduction  Features 1-1  Functions 1-2  Model selection guide 1-7  Basic operation and advanced operation 1-8

1-1

Chapter 2. NAMES AND FUNCTIONS OF PARTS 2-1

 Display

2-1

Chapter 3. MOUNTING AND WIRING 3-1

 Mounting  Piping 3-7  Wiring 3-8

3-2

Chapter 4. BASIC OPERATION 4-1

4-1 Switching Displays

 Basic operation 4-1

4-2 Setting the Flow Rate 4-4

 Digital flow rate setup 4-5  Flow rate setup by external contact input (Advanced use) 4-7  Flow rate setup by external 3-way switching input (Advanced use) 4-8  Analog flow rate setup 4-9

4-3 Selecting the Operating Mode 4-10

 Operating mode selection 4-10  Operating mode display 4-10

4-1

Chapter 5. ADVANCED OPERATION 5-1

 Setup mode transition operation

5-1 Functions 5-2

 Setup method 5-2  Function setup items 5-3

5-1

vii

5-2 Parameters 5-12

 Parameter setup item list 5-13

5-3 Device Information Display 5-16

 Setup method 5-16  Device information display item 5-17

5-4 Flow Rate Range 5-18

 Setup resolution in the analog setup 5-19

Chapter 6. TROUBLESHOOTING 6-1

 Alarm code display  Troubleshooting guide 6-3

6-1

Chapter 7. SPECIFICATIONS 7-1

 Individual specifications  Korea Certification Mark 7-8  Gas type and control range 7-9  China RoHS 7-9  Relationship between differential pressure and flow rate (For

Hydrogen) 7-10

 Relationship between differential pressure and flow rate (For Helium) 7-11  Optional parts (sold separately) 7-12  External dimensions 7-13

7-1

viii

Chapter 1. INTRODUCTION

function)

 Introduction

MQV high performance, digital mass flow controllers with advanced functions have been developed for the general industrial application. They feature flow rate control with high speed and wide range ability. MQV controllers integrate three component technologies: the ultra quick response μF (Micro Flow) thermal flow sensor, made with proprietary Azbil Corporation technology, a proportional solenoid valve, and advanced actuator control technology. Integrating these technologies has achieved a high-speed control with low differential pressure.

Front cover for separate display (sold separately)

Separate display unit

MQV

Cable with dedicated connector (sold separately)

AC adapter (sold separately)

Potentiometer (sold separately) for setting ow rate For details see page 7-17.

Controller (e.g. SDC25/26)

24 V DC power supply (e.g. WN790A)

RS-485 device for models supporting optional RS-485 communications

 Features

Device Configuration

• High-speed controllability

Fast response of 300 ms or less* (500ms for the MQV9020/9050.) * Response time is the time required for the controlled flow rate to

reach ±2 % of the set value, starting from the fully closed state or from when the set value is changed during control.

• Low differential pressure operation MQV controllers can operate at a low differential pressure of 50kPa or less.

• Wide control range Wide control range of 1 to 100 % FS

• Wide product line-up There are two types of models, those with integrated display and those with separate display. On models with separate display, the

display unit can be detached to allow remote operation via the dedicated 2 m cable.

1-1

Chapter 1. INTRODUCTION

 Functions

• User-friendly Runs on a general-purpose 24 V DC power supply, and the MQV's internal power circuit and input/output circuits are isolated. When multiple MQV are driven through the analog inputs and outputs, as with a PLC, they can all use a common power supply even if the PLC's analog modules are not isolated by channel. Therefore, even without individual power supplies for each device, problems with one circuit do not affect adjacent ones. Also provided is a handy AC adapter (sold separately) for easy use in the laboratory.

• Display direction can be changed (models with integrated display only) The direction of the display can be rotated 180° to match the direction of the gas flow, in case it was mounted the other way.

• Improved design (models with separate display only) A front cover (sold separately) hides the mounting screws of the separate display on the panel surface and improves the appearance.

• Various additional functions The functions listed below are all standard.

All MQV models have the functions described below. For function setup,

•

Chapter 5. ADVANCED OPERATION

Multi-setup (function setup

C-04

)

Quickly switch to one of eight preset flow set value by key operation or external input. If “Switching of SP No.” is set to external 3-way switching input, up to three set values can be switched.

•

Gas type switching (function setup

C-18, C-26

)

The gas type to be used can be selected from the standard compatible gases by key operation. Additionally, two kinds of gas type settings can be changed by external contact input.

•

Gas type setup (function setup

C-18

)

The user can set gas type conversion factors for gases other than the standard compatible gases, and for mixed gases.

•

Control flow rate range setting (function setup

C-24, C-25

)

The control flow range can be changed to the desired range (10 to 100 % of the flow range at factory setting) in units of 1 % FS. The setup and display resolution levels can be improved by reducing the control flow range. Additionally, two kinds of control flow ranges can be switched through external contact input.

1-2

Chapter 1. INTRODUCTION

•

Direct setup (function setup

C-2 1

)

When changing the flow set value by key input, the controlled flow rate can follow the set value while changes are being made (the flow set value can be changed quickly). This function is useful when the user frequently changes set value, for example when adjusting the flow set value during a trial run.

•

SP ramp control (function setup

C-27

)

This function is used to set the set value change ramp amount (the rate of change per second) to a constant value for the start of control and for set value changes. With this function, the set value change ramp amount can be set more precisely than with the slow start function. Two different types of ramps can be set, and there are the following 2 control modes:

• SP ramp control 1

In SP ramp-up: Ramp 1 In SP ramp-down: Ramp 2

• SP ramp control 2

In external contact OFF: Ramp 1 In external contact ON: Ramp 2

•

SP limit (function setup

C-35

)

The lower and upper limits of the set value range can be set to desired levels. (This prevents mistaken high/low settings.)

•

Slow start (function setup

C-1 7

)

Sudden changes in the controlled flow rate, when control is started or when the set value is changed, can be suppressed. The control speed can be changed in eight stages within a range of about 1 to 6 seconds.

•

Flow rate totalization (function setup

C-09

C-12

) MQV9020/9050: in 1 mL units MQV9500: in 0.01 L units MQV0005: in 0.1 L units MQV0010/0050: in 1 L units MQV0200: in 0.01 m

units Integrated flow count can be up to eight digits long (to 99,999,999) for each unit. (Display alternates between first and last 4 digits.) The count can be reset by key operation or external contact input. Use of external contact input makes it possible to remotely operate the start, temporary stop, and reset of totalization. When resetting the integrated count by key operation, the count restarts automatically after it has been reset. On the other hand, when resetting with the external contact input (by contact ON), the count restarts when the contact is turned OFF.

1-3

Chapter 1. INTRODUCTION

•

Event lamp lighting/output (function setup

C-07, C-08

)

Two of the event types listed below can be selected. Output ON delay time can also be set (but delay cannot be set for totalizer pulse output).

•

Integrated flow event output (when the integrated flow event setting is exceeded.)

•

Totalized pulse output (pulse can be output for each totalizing flow display unit.)

•

OK output (the control flow rate is within the set value ± allowable range.)

•

Flow rate upper or lower limit output (output in comparison with optional upper or lower limit flow rate set value )

•

Output mode (The four modes — control / fully open / control or fully open / fully closed — can be identified and output.)

•

OK lamp ON/output (function setup

C-07, C-08

)

The OK lamp can be set to light when the control flow rate is within the set value ± allowable range. This function is very handy for verifying at a glance whether or not there is a proper response to a new set value after its value is changed. OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and including it in a sequence program.

•

PV filter (function setup

C-23

)

This function is used to average the detected instantaneous flow rates (control flow rates). It can also reduce the effect of slight pressure fluctuations.

•

Control dead band setup (prevention of valve operation) (function setup

)

C-22

This function is used to stop the valve from driving as long as the control flow rate is within the OK range. Additionally, the OK range (width of dead band) can be set to the desired level.

•

Valve amperage display (function setup

C-20

)

The electric current supplied to the valve can be displayed in units of 0.0 to 100.0 %. Additionally, use of the valve amperage alarm detection function makes it possible to detect an inlet pressure change or clogging of the piping at the outlet.

•

Gas type external switching (function setup C- 10 to C- 12, C-

18, C-26

)

Two preset types of gases (including one with a user-determined gas type conversion factor) can be switched by external contact input.

•

Control flow rate range external switching (function setup to C- 12,

C-24, C-25

)

C-10

Two preset control flow ranges can be switched by external contact input.

1-4

Chapter 1. INTRODUCTION

•

PV forced zero (function setup

C-29

)

This function forcibly sets the detected instantaneous flow rate to 0 (zero) after the delay time elapses when the flow rate setpoint has been set to 0 (zero) or the valve mode has been changed to fully closed. This function makes it possible to ignore the deviation of the instantaneous flow rate zero point caused by inclination of the piping or the like.

•

Flow rate display unit change (function setup

C-37

)

This function is used to change the flow rate display unit to L/ min or mL/min of the MQV9500/0005. When multiple devices are used side-by-side, this function can make the flow rate display units uniform.

•

PV display decimal point change (function setup

C-38

)

This function is used to shift the decimal point position of the instantaneous flow rate display one digit left or right. When multiple devices are used sideby- side, the number of digits after the decimal point of the flow rate display can be made uniform.

•

Valve forcibly open or close (function setup

C-02, C-09

to C- 12) This function is used to forcibly open or close the valve fully by key operation, external contact input, or external 3-way switching input.

•

Automatic shut-off (function setup C- 13, C- 16)

The valve can be shut off automatically under the following conditions: (1) When the totalized flow count reaches the preset value.

(2) When one of the alarms, including flow rate alarms, is triggered.

•

ALM (alarm) lamp ON/output/valve shut-off (function setup

C- 16, C-20

)

C-15

The alarm output can be set for high and low deviations in the flow set value and instantaneous flow rate. Additionally, an alarm judgment delay time can also be set. If a flow rate alarm occurs or if an alarm occurs during self diagnosis of this controller, the valve can be forced fully closed or opened.

Handling Precautions

•

The valve on this device cannot completely shut off.

•

If complete shut off is required, provide a shutoff valve separately.

•

Automatic reset of totalized flow at start of control function (function setup C- 14)

Start of control and reset of totalized flow count can be done simultaneously by a single action (by key or external switching input). Combining this function with the automatic shut-off function described above is handy for shutting the valve off in cases where a fixed totalized flow amount is counted repeatedly.

1-5

Chapter 1. INTRODUCTION

•

Analog scaling (function setup

C-28

)

This function is used to optionally change the flow rate (between 10% FS and 100 % FS) corresponding to 100 % FS analog input/ output (5 V or 20 mA).

•

Analog input (flow set value) range selection (function setup

C-05, C-09

)

In analog setup, the desired input range can be selected from those shown below either by key operation or by external 3-way switching input. When doing so, the voltage input and current input are selected automatically, as they are linked with the settings of function setup when the voltage output (0 to 5 V or 1 to 5 V) is selected in

(analog output type selection). For example,

C-06

the voltage input is selected automatically. Likewise, when the current output (0 to 20 mA or 4 to 20 mA output) is selected, the current input is selected automatically.

(1) Internal reference 0 to 5 V input*/External reference 0 to 20mA input (2) External reference 0 to 5 V input/External reference 0 to 20mA input (3) External reference 1 to 5 V input/External reference 4 to 20mA input

* 0–5 V internal-reference is used when the 5 V output termi-

nal (pin No. 20) of this controller is used as the reference.

•

Analog output type/range selection (function setup

C-06, C-09

Output can be set either to instantaneous flow rate (PV) or flow set value (SP). Furthermore, a voltage/current output range can be selected from (1) to (4) shown below by key operation. Additionally, (1)/(2) or (3)/(4) can be changed through the external 3-way switching input. (Combinations are switched because of linkage with the analog input range selection.)

Instantaneous flow rate (PV) output Flow set value (SP) output

(1) 0 to 5 V output (1) 0 to 5 V output (2) 1 to 5 V output (2) 1 to 5 V output (3) 0 to 20 mA output (3) 0 to 20 mA output (4) 4 to 20 mA output (4) 4 to 20 mA output

)

1-6

Chapter 1. INTRODUCTION

 Model selection guide

z MQV9020/9050

Basic

model

Nos.

Standard con-

trol flowrate

ange

Display

Material of

gas-contact-

ing parts

Connection

method

MQV Digital mass flow controller

9020 0.2–20.0 mL/min (standard) 9050 0.4–50.0 mL/min (standard)

B C

S SUS316

S 1/4" Swagelok

V 1/4" VCR

z MQV9500/0005/0010/0050/0200

Basic

Standard con-

model

trol flowrate

Nos.

ange

MQV Digital mass-flow controller

9500 0.004–0.500 L/min (standard) 0005 0.04–5.00 L/min (standard) 0010 0.10–10.00 L/min (standard) 0050 0.4–50.0 L/min (standard) 0200 2–200 L/min (standard)

Notes: *1. The unit L/min (standard) indicates the volumetric flow rate per minute converted to 20 °C, 101.325 kPa (one

*2. This device is set initially for hydrogen gas use at the factory. It can be used for helium gas by changing the gas

atmosphere). The reference temperature can also be changed to 0 °C, 25 °C and 35 °C.

type setting.

Display

B C

Material of

gas-contact-

ing parts

Connection

method

S SUS316

R Rc 1/4"

S 1/4" Swagelok V 1/4" VCR U 9/16-18UNF

Gas

type

Optional

functions

1 2 3 4 5

Appended

No.

Description

Integrated display (body length: 90 mm) Seprate display (body length: 90 mm)

H Hydrogen

0 Without optional functions

0 Without optional functions 1

Model with RS-485 communications (CPL)

0 Without optional functions

1 Gas-contacting parts treated

to be oil free

0 Without optional functions D With inspection certificate Y With traceability certificate

0 Product version

Optional

Gas

type

functions

1 2 3 4 5

Appended

No.

Description

Integrated display (body length 90 mm) Separate display (body length 90 mm)

H Hydrogen

0 Without optional functions

0 Without optional functions 1

Model with RS-485 communications (CPL)

0 Without optional functions

1 Gas- contacting parts treated

to be oil free

0 Without optional functions D With inspection certificate Y With traceability certificate

0 Product version

1-7

Chapter 1. INTRODUCTION

 Basic operation and advanced operation

This device provides two kinds of operations, basic operation and advanced operation. Basic operation is the state of the device during normal use. In basic operation, the contents of the 7-segment display can be changed to show instantaneous flow rate, flow set value, totalized flow value, or amperage to the valve in normal operation mode. Also, how to set the flow set value is described in the basic operation part.

Advanced operation is for selecting various functions or setting parameters of the device. When the device is used with the factory settings, no setup operation is needed. However, to change the gas type, set a range, set an external contact input, set upper and lower alarm limits, or set communication conditions (for models with communication functions), it is necessary to configure various settings using advanced operation. The diagram below gives an outline of operation flow. Basic and advanced operation are described in Chapters 4 and 5, respectively.

Basic operation Advanced operation

Power ON

DISP key

Instantaneous ow rate display

Flow set value display

Totalized ow display

Valve amperage display

key + ENT key

(3 s or more)

key (3 s or more)

Function setup mode

Parameter setup mode

Device information display mode

1-8

Chapter 2.

NAMES AND FUNCTIONS OF PARTS

 Display

OK lamp:

Lit when the deviation between the ow set value and instantaneous ow rate is in the allowable range. Set the allowable range in the parameter setup. (For details on how to set parameters, see .)

ALM lamp:

7-segment display:

Displays the instantaneous ow rate, ow set value, totalized ow, amperage to the valve and the operating mode. It also displays parameter setup values, function setup values and details of alarms.

SP lamp:

Lit when the ow rate setpoint is displayed.

PV lamp:

Lit when the instantaneous ow rate is displayed.

OK ALM EV1 EV2

RUN ENT DISP

*1 This lamp is used for mL or m3 instead of L on some models.

*2 This lamp is used for mL/min instead of L/min on some models.

Lit when an alarm occurs.

EV1 lamp:

Lit when event 1 output is ON.

EV2 lamp:

Lit when event 2 output is ON.

Digital Mass Flow Controller

L/min

[DISP] key:

Use this key to switch the details displayed on the 7-segment display.

[ENT] key:

Use this key to x and store the set value to memory. Also use it to reset the cumulative ow and to reset alarm and move to the function setup mode.

[ ]

key:

[ ]

key:

[ ]

[RUN] key:

Use this key to change the operating mode.

page 5-12

L lamp *1:

Lit when the totalized ow is displayed. Blinks when the cumulative ow event occurs.

L/min lamp*2:

Lit when the instantaneous ow rate or ow set value is displayed.

Use this key to increment the setting value. Additionally, this key is used to change to the device information display mode.

Use this key to decrement the setting value. Also use it to move to the function setup mode.

key:

Use this key to move to a desired digit when changing setting value. Also use it to move to the parameter setup mode.

Note

•

Technical terms used in this manual are defined as follows:

•

SP (setpoint): The flow set value (or flow rate set point)

•

PV (process variable): Instantaneous flow rate (or controlled flow rate)

•

Operating mode: One of 3 modes (valve fully closed/valve

control/

2-1

Chapter 2. NAMES AND FUNCTIONS OF PARTS

z Main unit (MQV9020/9050/9500/0005/0010/0050/0200)

Connector port: This is used for I/O signals. Use cable with dedicated connector.

Jack for AC adapter: Connect dedicated adapter here. Model No.: 81446957-001 (24 V DC, 750 mA)

Pipe connection port (inlet): This is the port through which gas enters.

Handling Precautions

•

Pipe connection port (outlet): This is the port from which gas is discharged.

Jack for PC loader connection

The former AC adapter (model No. 81446682-001, 15 V DC/350mA) can not be used with MQV.

2-2

Chapter 3. MOUNTING AND WIRING

WARNING

When using this device for gases that contain hydrogen, be sure to purge the device with an inert gas (such as nitrogen or argon) before use. Use without purging may cause an explosion.

CAUTION

This device is exclusively for hydrogen and helium gases. It cannot be used for control or measurement of gases other than hydrogen, helium, and hydrogen-helium mixtures (excluding mixed gases within explosion limits). Oxygen cannot be measured even if gascontacting sections of this device are oil-inhibited.

Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it.

• Set the flow rate setpoint to zero.

• Make the valve operation mode to fully closed. If this valve remains in normal control status when the external shutoff valve is closed (zero flow rate), there will be an excessively large flow as soon as the external shutoff valve is opened. This excessive flow rate could activate the erated by the sensor safety circuit). If the sensor safety circuit is activated, flow rate measurement and flow control are not possible until the power is turned off and back on again.

AL83

alarm (op-

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Chapter 3. MOUNTING AND WIRING

CAUTION

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When purchasing a connecting joint, use the following made by Swagelok Co., Ltd:

1/4" Swagelok: SS-400-1-6STSC11 1/4" VCR: SS-4-VCR-1-00032SC11

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

 Mounting

z Installation locations

Avoid mounting the device in the following locations:

• Locations subject to high and low temperature and humidity

• Locations whose atmospheres contain large amounts of dirt and dust, salt, conductive substances such as iron powder, water droplet, oil mist or organic solvents

• Locations subject to direct sunlight and rain

• Locations directly subject to mechanical vibration or shock

• Locations close to sources of electrical noise

• Locations where strong magnetic or electrical fields are generated

Handling Precautions

•

The valve of this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately.

z Changing the display direction (models with integrated display only)

The display can be turned 180°, in case the controller has been mounted with the display upside-down.

• Procedure

(1) Turn the power OFF.

(2) Remove the four screws holding the display.

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Chapter 3. MOUNTING AND WIRING

(3)

Lift up the display from the main unit, and turn it 180° counterclockwise.

(4) Put the display back on the main unit, and fasten with the four

screws taken off in step (2).

(5) To return the display to its original position on the main unit,

turn it 180° clockwise.

Handling Precautions

•

Before changing the display direction, be sure to turn the power OFF

•

Prevent foreign objects from falling inside the main unit when the display is taken off. Failure to do so might cause trouble or malfunction.

•

Do not remove the connectors used inside the main unit.

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Chapter 3. MOUNTING AND WIRING

z Installing joints (UNF connections)

CAUTION

Connector latches

main unit

Rag

3-4

Handling Precautions

•

Do not hold the top part of the main unit with your hand. Doing so might deform the case.

Incorrect

•

Take special care not to damage the connector latches.

Chapter 3. MOUNTING AND WIRING

z Installation procedure

CAUTION

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

 MQV9020/9050/9500/0005/0010/0050/0200

Install the device with two M4 screws using the mounting holes on the base of the device.

z Installing the separate display unit

For models with a separate display

(1) Make mounting holes in the panel according to the panel cutout

dimensions.

Panel cutout dimensions

Unit: mm

4.5

100±0.2

50±0.2

Unit: mm

17.5±0.2

35±0.2

45±0.2

90±0.2

M4 (2)

(2) Mount the display and secure it by tightening the screws.

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Chapter 3. MOUNTING AND WIRING

z Installing the front cover for the separate display unit

For models with a separate display, a front cover (decorative frame) can be mounted. Use of this cover makes it possible to hide the mounting screws, improving the appearance.

Items needed for installation

• Front cover (81446858-001), 1 set

• Phillips screwdriver

Separate display unit

Plate

Mask

Panel

3-6

Mounting screws (cross recessed head machine screws)

Note

•

The front cover set includes one mask, one plate, and two mounting screws.

Procedure (1) As shown in the figure, put the plate over the display panel, and

then secure it to the display by tightening the screws.

(2) Fit the mask onto the display to mount it.

Chapter 3. MOUNTING AND WIRING

 Piping

CAUTION

Mount the device horizontally. However, do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Handling Precautions

•

Make sure that the gas flows into the device in the direction indicated by the FLOW arrow on the main unit. Otherwise, the flow rate cannot be controlled correctly.

FLOW

GasGas

•

Do not touch the pipe sections of a controller treated to be oilfree with your bare hands. Doing so will degrade the oil-free treatment.

•

Do not hold the top part of the main unit with your hand when connecting piping. Doing so might deform the case.

z Coating sealant (Rc connection)

Handling Precautions

•

Coat with an appropriate amount of sealant. Do not coat the top two threads. Remove any dirt or burrs from inside the pipes.

Correct

Incorrect

Sealant

3-7

+ 63 hidden pages

Azbil MQV9020, MQV0050, MQV9050, MQV9500, MQV0200 User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Safety Precautions

Contents

Chapter 1. INTRODUCTION

Chapter 3. MOUNTING AND WIRING