Azbil MQV9020, MQV9200, MQV0005, MQV0020, MQV9500 User Manual

...

™

Digital Mass Flow Controller

Standard Gas Model

MQV9005/9020/9200/9500

0002/0005/0020/0050/0200/0500

User’s Manual

No. CP-SP-1204E

Thank you for purchasing an Azbil Corporation product.

This manual contains information for ensuring the correct use of this product. It also provides necessary information for installation, maintenance, and troubleshooting.

This manual should be read by those who design and maintain equipment that uses this product. Be sure to keep this manual nearby for handy reference.

IMPORTANT

“Natural gas” in this document refers to city gas in Japan.

NOTICE

Be sure that the user receives this manual before the product is used.

Copying or duplicating this user’s manual in part or in whole is forbidden. The information and specifications in this manual are subject to change without notice.

Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions. If you should find an error or omission, please contact the azbil Group.

In no event is Azbil Corporation liable to anyone for any indirect, special or consequential damages as a result of using this product.

Micro Flow™, µF™ are trademarks of Azbil Corporation in Japan.

Conventions Used in This Manual

 The safety precautions explained in the following section aim to prevent injury to the operator and others, and to

prevent property damage.

Warnings are indicated when mishandling this product

WARNING

CAUTION

 In describing the product, this manual uses the icons and conventions listed below.

Use caution when handling the product.

The indicated action is prohibited.

Always follow the indicated instructions.

might result in death or serious injury.

Cautions are indicated when mishandling this product might result in minor injury to the user, or physical damage to the product.

Handling Precautions:

Handling Precautions indicate items that the user should pay attention to when handling the product.

Note:

(1)(2)(3): Numbers within parentheses indicate steps in a sequence or parts of an explanation.

0FF

>>: Indicates the result of an operation, details displayed on the personal computer or other

Notes indicate information that might benefit the user.

This indicates the item or page that the user is requested to refer to.

Indicates a selectable button on a personal computer screen.

devices, or the state of the device after operation.

Safety Precautions

Never allow gases that are within explosive limits to pass through this device. Doing so might result in an explosion.

If the MQV is to be used for oxygen, make sure that it is a model designed for oxygen use. Even if a device is designed for oxygen gas, do NOT use it for oxygen gas if it has been used for some other gas even once. Oil contained in another gas may be deposited on the gascontacting parts and ignite upon reacting with oxygen.

If the device is used for burner air-fuel ratio control, take the necessary countermeasures with the equipment to prevent the occurrence of backfire and to avoid any influence to the device even if backfire occurs. Pressure increase or fire in the pipes caused by the backfire of the burner could damage the controller.

This device cannot be used for measurement or control of hydrogen or helium gas. Use a model specially designed for hydrogen and helium gases. For information on whether this device can be used for gases other than the standard compatible gases, be sure to contact the azbil Group in advance.

Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur. If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist trap capable of eliminating foreign matter 0.1 µm or greater in diameter at the upstream. Be sure to inspect and replace the filter at regular intervals.

Use this device within the operating differential pressure range. Not doing so may cause hunting. Continuous hunting could damage the valve.

WARNING

CAUTION

Do not subject this device to pressure above its pressure resistance. Doing so might damage it.

Be sure to use within the flow-rate range stipulated in the product specifications. To prevent excessive flow, use a suitable means to control the supply pressure or use a throttle valve or the like to control the flow rate. If the flow rate exceeds the upper limit, both the flow rate display and the output voltage/ current may indicate considerably lower values than the actual flow rate.

If damage could result from the abnormal functioning of this device, include appropriate redundancy in the system design.

iiii

CAUTION

The valve on this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately. When the external valve is closed, it is necessary also to fully close the valve of the device using either of the following methods:

•

Set the flow rate setpoint to zero.

•

Make the valve operation mode to fully closed.

If this valve remains in normal control status when the external shutoff valve is closed (zero flow rate), there will be an excessively large flow as soon as the external shutoff valve is opened. For the MQV0050(J, K), MQV0200(J, K), and MQV0500(J, K), if the external shutoff valve is closed continuously for 5 minutes or more in control mode or with the valve forced fully open, the valve overheating limit (AL71) will be activated and the current to the valve will be forcibly limited.

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When separately purchasing a connecting joint, use the following made by Swagelok Co., Ltd: 1/4” Swagelok: SS-400-1-6ST (standard)

SS-400-1-6STSC11 (oil-inhibited)

1/2” Swagelok: SS-810-1-8ST (standard)

SS-810-1-8STSC11 (oil-inhibited)

1/4” VCR: SS-4-VCR-1-00032SC11

1/2” VCR: SS-8-VCR-1-8STSC11 or equivalent

Observe the following when using the device (oil-free model) for oxygen gas:

•

Piping should be carried out by a specialist skilled in handling oxygen gas.

•

Use oil-free pipes and parts.

•

Be sure to remove foreign matter, burrs, etc. from the pipes before connecting the device.

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

When installing joints (UNF connections), secure the lower part of the main unit in a vise or the like gripped between rags to protect the finished surfaces, and turn the joint to tighten.

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

For the MQV0050(J, K)/0200(J, K)/0500(J, K). use the largest pipe possible in order to reduce pressure loss in the pipes, and do not install any equipment near the MQV that can cause a large pressure loss. If there is a large pressure loss in the pipes or equipment, the pressure of the gas supply to this device (operation differential pressure) will be affected and will fluctuate greatly with the flow rate. This could result in unstable control.

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

iiiiii

CAUTION

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure.

When using a relay for external contact input and/or external 3-way switching input, always use a relay designed for micro-current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

If there is a risk of a power surge caused by lightning, use a surge protector to prevent fire or equipment failure.

Gas type switching by external contact input, flow rate switching, and analog input/output voltage range switching by external 3-way input switching should be done only after setting the operation mode to fully closed. Switching while controlling could cause large fluctuations.

Be sure to check that the wiring is correct before turning the power on. Incorrect wiring could cause damage or malfunction.

Do not apply excessive force to the cables or connector while the connector cable or the AC adapter is connected. Doing so may damage the connector or the circuit board.

Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver. Doing so might damage the console.

When discarding the device, dispose of it as industrial waste, following local regulations.

iviv

The Role of This Manual

A total of 2 different manuals are available for the MQV. Read them as necessary for your specific requirements. If a manual you require is not available, contact the azbil Group or its dealer.

Digital Mass Flow Controller Standard Gas Model MQV9005/9020/9200/9500/0002/0005/0020/0050/0200/0500 Manual No. CP-SP-1204E

This manual. First-time users of the MQV, and those in charge of maintenance or hardware design for incorporating a MQV controller in instrumentation should read this manual. This manual outlines the product, tells how to install, wire, and incorporate the product into instrumentation, and describes its operation, inspection and maintenance, troubleshooting, and hardware specifications.

MQV9005/9020/9050/9200/9500/0002/0005/0010/0020/0050/0100/0200/0500 Digital Mass Flow Controller User’s Manual for Communication Functions Manual No. CP-SP-1197E

Personnel who use this device’s communications functions should read this manual. The manual gives an overview of communications, describes wiring, transmission protocols, communications data, and troubleshooting, and gives communications specifications.

Organization of This User’s Manual

This manual is organized as follows.

Chapter 1. INTRODUCTION

This chapter briefly describes this device and its features, and gives a model selection guide.

Chapter 2. NAMES AND FUNCTIONS OF PARTS

This chapter describes the names and functions of this device’s parts.

Chapter 3. MOUNTING AND WIRING

This chapter describes installation, mounting, wiring and initial settings of this device.

Chapter 4. BASIC OPERATION

This chapter gives the basis of how to operate this device.

Chapter 5. ADVANCED OPERATION

This chapter describes how to set functions, parameters, controller information display, and flow rate range.

Chapter 6. MAINTENANCE AND TROUBLESHOOTING

This chapter describes how to investigate and remedy trouble that may occur during operation of this device.

Chapter 7. SPECIFICATIONS

This chapter describes the device’s specifications and external dimensions.

vivi

Conventions Used in This Manual Safety Precautions The Role of This Manual Organization of This User’s Manual

Chapter 1. INTRODUCTION

 Introduction ...................................................................................................................................................... 1-1

 Features ............................................................................................................................................................... 1-1

 Functions ............................................................................................................................................................ 1-2

 Model selection guide .................................................................................................................................. 1-7

 Basic operation and advanced operation .........................................................................................1-10

Chapter 2. NAMES AND FUNCTIONS OF PARTS

 Display ................................................................................................................................................................. 2-1

 Main unit (MQV9005/9020/9200/9500/0002/0005/0020/0050) ............................................. 2-2

 Main unit (MQV0050(J, K) /0200/0500) ................................................................................................ 2-2

Chapter 3. MOUNTING AND WIRING

 Mounting ............................................................................................................................................................ 3-2

 Piping.................................................................................................................................................................... 3-6

 Wiring ................................................................................................................................................................... 3-7

Chapter 4. BASIC OPERATION

4 - 1 Switching Displays .............................................................................................................................................. 4-1

 Basic operation ................................................................................................................................................ 4-1

4 - 2 Setting the Flow Rate ......................................................................................................................................... 4-4

 Digital flow rate setup .................................................................................................................................. 4-5

 Flow rate setup by external contact input (Advanced use) ........................................................ 4-7

 Flow rate setup by external 3-way switching input (Advanced use) .....................................4-8

 Analog flow rate setup ................................................................................................................................. 4-9

4 - 3 Selecting the Operating Mode ....................................................................................................................4-10

 Operating mode selection ........................................................................................................................4-10

 Operating mode display ............................................................................................................................4-10

Chapter 5. ADVANCED OPERATION

 Setup mode transition operation ........................................................................................................... 5-1

5 - 1 Functions ................................................................................................................................................................. 5-2

 Setup method ................................................................................................................................................... 5-2

 Function setup items.....................................................................................................................................5-3

5 - 2 Parameters ............................................................................................................................................................5-11

 Setup method .................................................................................................................................................5-11

 Parameter setup item list ..........................................................................................................................5-12

viivii

5 - 3 Device Information Display ......................................................................................................................... 5-15

 Setup method ................................................................................................................................................ 5-15

 Device information display item .......................................................................................................... 5-16

5 - 4 Flow Rate Range Change Function and Settings and Display Resolutions After

Change of Range ............................................................................................................................................... 5-17

 Setup resolution in the analog setup................................................................................................. 5-18

Chapter 6. MAINTENANCE AND TROUBLESHOOTING

 Alarm code display ......................................................................................................................................... 6-1

 Troubleshooting guide ................................................................................................................................6-2

Chapter 7. SPECIFICATIONS

 Specifications ...................................................................................................................................................7-1

 Gas type and control range ..................................................................................................................... 7-11

 Relationship between differential pressure and flow rate ..................................................... 7-12

 Optional parts (sold separately) ........................................................................................................... 7-14

 External dimensions ................................................................................................................................... 7-15

viii

Chapter 1. INTRODUCTION

function)

Potentiometer (sold separately)

Separate display unit

Front cover for

Introduction



MQV high performance, digital mass flow controllers with advanced functions have been developed for the general industrial application. They feature flow rate control with high speed and wide rangeability. MQV controllers integrate three component technologies: the ultra quick response µF (Micro Flow) thermal flow sensor, made with proprietary Azbil Corporation technology, a proportional solenoid valve, and advanced actuator control technology. Integrating these technologies has achieved a high-speed control with low differential pressure.

separate display (sold separately)

MQV

Features



Cable with dedicated connector (sold separately)

AC adapter (sold separately)

for setting ow rate

P.7-14

Controller (e.g. SDC25/26)

24 V DC power supply (e.g. WN790A)

RS-485 device (for models supporting optional RS-485 communications

Device Configuration

• High-speed controllability

Fast response of 300 ms or less* (500 ms for the MQV9005/9020, 700 ms for the MQV0050(J, K), MQV0200, and

MQV0500.)

* Response time is the time required for the controlled flow rate to reach ±2 % of the

set value, starting from the fully closed state or from when the set value is changed during control.

• Low differential pressure operation

MQV controllers can operate at a low differential pressure of 50 kPa or less.

• Wide control range

Wide control range of 1 to 100 % FS (2 to 100 % FS for the MQV9005)

• Wide product line-up

There are two types of models, those with integrated display and those with separate display. On models with separate display, the display unit can be

detached to allow remote operation via the dedicated 2 m cable.

1-1

Chapter 1. INTRODUCTION

• User-friendly

Runs on a general-purpose 24 V DC power supply, and the MQV's internal power circuit and input/output circuits are isolated. When multiple MQV are driven through the analog inputs and outputs, as with a PLC, they can all use a common power supply even if the PLC's analog modules are not isolated by channel. Therefore, even without individual power supplies for each device, problems with one circuit do not affect adjacent ones. Also provided is a handy AC adapter (sold separately) for easy use in the laboratory.

• Display direction can be changed (models with integrated display only)

The direction of the display can be rotated 180˚ to match the direction of the gas flow, in case it was mounted the other way.

• Improved design (separate display model)

A front cover (sold separately) hides the mounting screws of the separate display on the panel surface and improves the appearance.

Functions



• Various additional functions

The functions listed below are all standard.

All MQV models have the functions described below. For function setup, Chapter 5. ADVANCED OPERATION.

• Multi-setup (function setup C-04)

Quickly switch to one of eight preset flow set value by key operation or external input. If “Switching of SP No.” is set to external 3-way switching input, up to three set values can be switched.

• Gas type switching (function setup C-18, C-26)

The gas type to be used can be selected from the standard compatible gases by key operation. Additionally, two kinds of gas type settings can be changed by external contact input.

• Gas type setup (function setup C-18)

The user can set gas type conversion factors for gases other than the standard compatible gases, and for mixed gases. For information on gas type conversion factors for various gases, contact the azbil Group.

1-2

• Control flow range setting (function setup C-24, C-25)

The control flow range can be changed to the desired range (10 to 100 % of the flow range at factory setting) in units of 1 % FS. The setup and display resolution levels can be improved by reducing the control flow range. Additionally, two kinds of control flow ranges can be switched through external contact input.

• Direct setup (function setup C-2 1)

When changing the flow set value by key input, the controlled flow rate can follow the set value while changes are being made (the flow set value can be changed quickly). This function is useful when the user frequently changes set value, for example when adjusting the flow set value during a trial run.

Chapter 1. INTRODUCTION

• SP ramp control (function setup C-27)

This function is used to set the set value change ramp amount (the rate of change per second) to a constant value for the start of control and for set value changes. With this function, the set value change ramp amount can be set more precisely than with the slow start function. Two different types of ramps can be set, and there are the following 2 control modes:

•

SP ramp control 1 In SP ramp-up: Ramp 1 In SP ramp-down: Ramp 2

•

SP ramp control 2 In external contact OFF: Ramp 1 In external contact ON: Ramp 2

• SP limit (function setup C-35)

The lower and upper limits of the set value range can be set to desired levels. (This prevents mistaken high/low settings.)

• Slow start (function setup C-1 7)

Sudden changes in the controlled flow rate, when control is started or when the set value is changed, can be suppressed. The control speed can be changed in eight stages within a range of about 1 to 6 seconds.

• Flow rate totalization (function setup C-09 to C-12)

MQV9005: in 0.1 mL units MQV9020: in 1 mL units MQV9200/9500: in 0.01 L units MQV0002/0005: in 0.1 L units MQV0020/0050: in 1 L units MQV0050(J, K): in 0.001 m MQV0200/0500: in 0.01 m3 units

Integrated flow count can be up to eight digits long (to 99,999,999) for each unit. (Display alternates between first and last 4 digits.) The count can be reset by key operation or external contact input. Use of external contact input makes it possible to remotely operate the start, temporary stop, and reset of totalization. When resetting the integrated count by key operation, the count restarts automatically after it has been reset. On the other hand, when resetting with the external contact input (by contact ON), the count restarts when the contact is turned OFF.

units

• Event lamp lighting/output (function setup C-07, C-08)

Two of the event types listed below can be selected. Output ON delay time can also be set (but delay cannot be set for totalizer pulse output).

•

Integrated flow event output (when the integrated flow event setting is exceeded.)

•

Totalized pulse output (pulse can be output for each totalizing flow display unit.)

•

OK output (the control flow rate is within the set value ± allowable range.)

1-3

Chapter 1. INTRODUCTION

•

Flow rate upper or lower limit output (output in comparison with optional upper or lower limit flow rate set value )

•

Output mode (The four modes — control / fully open / control or fully open / fully closed — can be identified and output.)

• OK lamp ON/output (function setup C-07, C-08)

The OK lamp can be set to light when the control flow rate is within the set value ± allowable range. This function is very handy for verifying at a glance whether or not there is a proper response to a new set value after its value is changed. OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and including it in a sequence program.

• PV filter (function setup C-23)

This function is used to average the instantaneous flow rate (control flow rate) detected value. Use of this function makes it possible to suppress effects of slight pressure fluctuations.

• Control dead band setup (prevention of valve operation) (function setup

C-22)

This function is used to stop the valve from driving as long as the control flow rate is within the OK range. Additionally, the OK range (width of dead band) can be set to the desired level.

• Valve amperage display (function setup C-20)

The electric current supplied to the valve can be displayed in units of 0.0 to

100.0 %. Additionally, use of the valve amperage alarm detection function makes it possible to detect an inlet pressure change or clogging of the piping at the outlet.

• Gas type external switching (function setup C-10 to C-12, C-18, C-26)

Two preset types of gases (including one with a user-determined gas type conversion factor) can be switched by external contact input.

• Control flow rate range external switching (function setup C-10 to C-12,

C-24, C-25)

Two preset control flow ranges can be switched by external contact input.

• PV forced zero (function setup C-29)

This function forcibly sets the detected instantaneous flow rate to 0 (zero) after the delay time elapses when the flow rate setpoint has been set to 0 (zero) or the valve mode has been changed to fully closed. This function makes it possible to ignore the deviation of the instantaneous flow rate zero point caused by inclination of the piping or the like.

1-4

• Flow rate display unit change (function setup C-37)

This function is used to change the flow rate display unit to L/min or mL/min of the MQV9200/9500/0002/0005. When multiple devices are used side-by-side, this function can make the flow rate display units uniform.

Chapter 1. INTRODUCTION

• PV display decimal point change (function setup C-38)

This function is used to shift the decimal point position of the instantaneous flow rate display one digit left or right. When multiple devices are used side-byside, the number of digits after the decimal point of the flow rate display can be made uniform.

• Valve forcibly open or close (function setup C-02, C-09 to C-12)

This function is used to forcibly open or close the valve fully by key operation, external contact input, or external 3-way switching input.

• Automatic shut-off (function setup C-13, C-16)

The valve can be shut off automatically under the following conditions:

•

When the totalized flow count reaches the preset value.

•

When one of the alarms, including flow rate alarms, is triggered.

• ALM (alarm) lamp ON/output/valve shut-off (function setup C-15, C-16 C-20)

The alarm output can be set for high and low deviations in the flow set value and instantaneous flow rate. Additionally, an alarm judgment delay time can also be set. If a flow rate alarm occurs or if an alarm occurs during self-diagnosis of this controller, the valve can be forced fully closed or opened.

Handling Precautions

•

The valve on this device cannot completely shut off.

•

If complete shutoff is required, provide a shutoff valve separately.

• Automatic reset of cumulative count at start of control function (function

setup C-14)

Start of control and reset of totalized flow count can be done simultaneously by a single action (by key or external switching input). Combining this function with the automatic shut-off function described above is handy for shutting the valve off in cases where a fixed totalized flow amount is counted repeatedly.

• Analog scaling (function setup C-28)

This function is used to optionally change the flow rate (between 10 % FS and 100 % FS) corresponding to 100 % FS analog input/output (5 V or 20 mA).

• Analog input (flow set value) range selection (function setup C-05, C-09)

In analog setup, the desired input range can be selected from those shown below either by key operation or by external 3-way switching input. When doing so, the voltage input and current input are selected automatically, as they are linked with the settings of function setup C-06 (analog output type selection). For example, when the voltage output (0 to 5 V or 1 to 5 V) is selected in C-06, the voltage input is selected automatically. Likewise, when the current output (0 to 20 mA or 4 to 20 mA output) is selected, the current input is selected automatically.

1-5

Chapter 1. INTRODUCTION

•

Internal reference 0 to 5 V input*/External reference 0 to 20 mA input

•

External reference 0 to 5 V input/External reference 0 to 20 mA input

•

External reference 1 to 5 V input/External reference 4 to 20 mA input

* The internal reference 0 to 5 V is used when the 5 V output terminal voltage

(pin No. 20) of this controller is used as the reference.

• Analog output type/range selection (function setup C-06, C-09)

Output can be set either to instantaneous flow rate (PV) or flow set value (SP). Furthermore, a voltage/current output range can be selected from (1) to (4) shown below by key operation. Additionally, (1)/(2) or (3)/(4) can be changed through the external 3-way switching input. (Combinations are switched because of linkage with the analog input range selection.)

Instantaneous flow rate (PV) output Flow set value (SP) output

(1) 0 to 5 V output

(2) 1 to 5 V output

(3) 0 to 20 mA output

(4) 4 to 20 mA output

(2) 1 to 5 V output

(3) 0 to 20 mA output

(4) 4 to 20 mA output

1-6

Model selection guide



MQV9005/9020

z

Chapter 1. INTRODUCTION

Standard

Basic

model

control

flowrate

No.

range

MQV Digital mass flow controller, MQV

9005 0.10 to 5.00 mL/min (standard)

9020 0.2 to 20.0 mL/min (standard)

Display

Material of

gascontacting

parts

B Integrated display (body length 90 mm)

C Separate display (body length 90 mm)

S SUS316

Connection

method

Gas

type

S 1/4" Swagelok

V 1/4" VCR

N Air, nitrogen

S Oxygen

Optional

functions

1 2 3 4 5

0 Without optional functions

1 Model with RS-485 communications

0 Without optional functions

Appended

No.

(CPL) function

0 Without optional functions

1 Gas-contacting parts treated to be oil

0 Without optional functions

D With inspection certificate

Y With traceability certificate

0 Product version

free

Description

*2, *4

*3, *4

*1, *4

*1. mL/min (standard) indicates the volumetric flow rate per minute (mL/min) converted to conditions of 20 ˚C and

101.325 kPa (1 atm). The reference temperature can be changed to 0, 25, or 35 ˚C.

*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon.

*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon. However, once

this device has been used for gas other than oxygen, never reuse it for oxygen.

*4. The flow rate ranges in the table are for use of this device with air. The controllable flow range may vary depending

on the type of gas.

 Gas type and control range (P.7-11).

*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected

for Optional function 4.

1-7

Chapter 1. INTRODUCTION

MQV9200/9500/0002/0005/0020/0050

z

Basic

model

No.

Standard

control

flowrate

range

Display

Material of

gascontacting

parts

Connection

method

Gas

type

Optional

functions

1 2 3 4 5

Appended

No.

Description

MQV Digital mass flow controller, MQV

9200 2 to 200 mL/min (standard)

*1, *4

9500 0.004 to 0.500 L/min (standard)

0002 0.02 to 2.00 L/min (standard)

0005 0.04 to 5.00 L/min (standard)

0020 0.2 to 20.0 L/min (standard)

0050 0.4 to 50.0 L/min (standard)

*1, *4

B Integrated display (body length 90 mm)

C Separate display (body length 90 mm)

S SUS316

R Rc 1/4"

S 1/4" Swagelok

V 1/4" VCR

U 9/16-18UNF

N Air, nitrogen

S Oxygen

*2, *4

*3, *4

0 Without optional functions

1 Model with RS-485 communications

(CPL) function

0 Without optional functions

1 Gas-contacting parts treated to be oil

free

0 Without optional functions

D With inspection certificate

Y With traceability certificate

0 Product version

*1, *4

*1. L/min (standard) and mL/min (standard) indicate the volumetric flow rate per minute (L/min and mL/min) converted

to conditions of 20 ˚C and 101.325 kPa (1 atm). The reference temperature can be changed to 0, 25, or 35 ˚C.

*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon, carbon dioxide (CO

city gas 13A (LNG: 46 MJ/m

), city gas 13A (LNG: 45 MJ/m3), propane 100 %, methane 100 %, or butane 100 %. Additionally, semi-standard gas models that can be used for ammonia or acetylene (seal material: EPDM) can also be manufactured.

*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon, carbon dioxide

(CO

), city gas 13A, propane 100 %, methane 100 %, or butane 100 %. However, once this device has been used for

gas other than oxygen, never reuse it for oxygen.

*4. The flow rate ranges in the table are for use of this device with air. The controllable flow range may vary depending

on the type of gas.

 Gas type and control range (P.7-11).

*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected

for Optional function 4.

1-8

MQV0050(J, K)/0200/0500

z

Chapter 1. INTRODUCTION

Standard

Basic

model

control

flowrate

No.

range

MQV Digital mass flow controller, MQV

0050 0.4 to 50.0 L/min (standard)

0200 2 to 200 L/min (standard)

0500 4 to 500 L/min (standard)

Display

Material of

gascontacting

parts

J Integrated display (body length 150 mm)

K Separate display (body length 150 mm)

S SUS316

Connection

method

Gas

type

R Rc 1/2"

S 1/2" Swagelok

V 1/2" VCR

U 3/4-16UNF

N Air, nitrogen

S Oxygen

Optional

functions

1 2 3 4 5

0 Without optional functions

1 Model with RS-485 communications

0 Without optional functions

Appended

No.

(CPL) function

0 Without optional functions

1 Gas-contacting parts treated to be oil

0 Without optional functions

D With inspection certificate

Y With traceability certificate

0 Product version

free

Description

*1, *4

*2, *4

*3, *4

*1, *4, *6

*1. The notations mL/min (standard) and L/min (standard) indicate the volume flow rate per minute converted to 20 ˚C,

one atmosphere (101.3 kPa (abs)). The reference temperature can also be changed to 0 ˚C, 25 ˚C or 35 ˚C.

*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon, carbon dioxide (CO

city gas 13A (LNG: 46 MJ/m

), city gas 13A (LNG: 45 MJ/m3), propane 100 %, methane 100 %, or butane 100 %.

Additionally, semi-standard gas models that can be used for ammonia or acetylene (seal material: EPDM) can also be manufactured. (MQV0200/0500 only)

*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon, carbon dioxide

(CO

), city gas 13A (LNG: 45 MJ/m3), propane 100 %, methane 100 %, or butane 100 %. However, once this device has

been used for a gas other than oxygen, never reuse it for oxygen.

*4. The flow rate ranges in the above table are for use of this device for air. The controllable flow range may vary

depending on the type of gas.

 Gas type and control range (P.7-11).

*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected

for Optional function 4.

*6. The MQV0050(J, K) is for low differential pressure and is controllable to a high flow rate range with lower differential

pressure than the MQV0050(B, C).

1-9

Chapter 1. INTRODUCTION

Basic operation Advanced operation

DISP key

Basic operation and advanced operation



This device provides two kinds of operations, basic operation and advanced operation. Basic operation is the state of the device during normal use. In basic operation, the contents of the 7-segment display can be changed to show instantaneous flow rate, flow set value, totalized flow value, or amperage to the valve in normal operation mode. Also, how to set the flow set value is described in the basic operation part.

Advanced operation is for selecting various functions or setting parameters of the device. When the device is used with the factory settings, no setup operation is needed. However, to change the gas type, set a range, set an external contact input, set upper and lower alarm limits, or set communication conditions (for models with communication functions), it is necessary to configure various settings using advanced operation. The diagram below gives an outline of operation flow. Basic and advanced operation are described in Chapters 4 and 5, respectively.

Power ON

Instantaneous ow rate display

DISP key

Flow set value display

DISP key

Totalized ow display

DISP key

Valve amperage display

DISP key

key+ENT key

(3 s or more)

key (3 s or more)

Function setup mode

Parameter setup mode

Controller information display mode

1-10

Chapter 2. NAMES AND FUNCTIONS OF PARTS

PV lamp:

OK lamp:

Use this key to change the operating mode.

reset alarm and move to the function setup mode.

Display



Lit when the deviation between the ow set value and instantaneous ow rate is in the allowable range. Set the allowable range in the parameter setup.

7-segment display:

Displays the instantaneous ow rate, ow set value, totalized ow, amperage to the valve and the operating mode. It also displays parameter setup values, function setup values and details of alarms.

SP lamp:

Lit when the ow rate setpoint is displayed.

Lit when the instantaneous ow rate is displayed.

ALM lamp: Lit when an alarm occurs.

EV1 lamp

Lit when event 1 output is ON.

EV2 lamp: Lit when event 2 output is ON.

OK ALM EV1 EV2

RUN ENT DISP

(For details on how to set parameters, )

L/min

Digital Mass Flow Controller

DISP key:

Use this key to switch the details displayed on the 7-segment display.

ENT key:

Use this key to x and store the set value to memory. Also use it to reset the cumulative ow and to

L lamp

*1:

Lit when the totalized ow is displayed. Blinks when the cumulative ow event occurs.

L/min lamp

Lit when the instantaneous ow rate or ow set value is displayed.

P.5-11

*2:

Note

key:

Use this key to increment the setting value. Additionally, this key is used to change to the device information display mode.

key:

Use this key to decrement the setting value. Also use it to move to the function setup mode.

key:

Use this key to move to a desired digit when changing setting value. Also use it to move to the parameter setup mode.

RUN key:

*1. This lamp is used for mL or m3 instead of L on some models.

*2. This lamp is used for mL/min instead of L/min on some models.

•

Technical terms used in this manual are defined as follows:

•

SP (setpoint): The flow set value (or flow rate setpoint)

•

PV (process variable): Instantaneous flow rate (or controlled flow rate)

•

Operating mode: 3 modes (valve fully closed/valve control/ valve fully

open)

2-1

Chapter 2. NAMES AND FUNCTIONS OF PARTS

gas enters.

Jack for PC loader connection

Connector port: This is used for I/O signals. Use cable with dedicated connector.

Jack for AC adapter: Connect dedicated adapter here. Model No.: 81446957-001 (24 V DC, 750 mA)

Pipe connection port (inlet): This is the port through which gas enters.

Pipe connection port (outlet):

Connector port: This is used for I/O signals. Use cable with dedicated connector.

Connector for separate display: This is used for connecting the separate display unit.

Main unit (MQV9005/9020/9200/9500/0002/0005/0020/0050)



Jack for AC adapter: Connect dedicated adapter here. Model No.: 81446957-001 (24 V DC, 750 mA)

Pipe connection port (inlet): This is the port through which

Main unit (MQV0050(J, K) /0200/0500)



Pipe connection port (outlet): This is the port from which gas is discharged.

2-2

Handling Precautions

This is the port from which gas is discharged.

Jack for PC loader connection

•

The former AC adapter (model No. 81446682-001, 15 V DC/350 mA) can not be used with MQV.

Chapter 3. MOUNTING AND WIRING

Never allow gases that are within explosive limits to pass through this device. Doing so might result in an explosion.

If the MQV is to be used for oxygen, make sure that it is a model designed for oxygen use. Even if a device is designed for oxygen gas, do NOT use it for oxygen gas if it has been used for some other gas even once. Oil contained in another gas may be deposited on the gas-contacting parts and ignite upon reacting with oxygen.

Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur.

If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist trap capable of eliminating foreign matter 0.1 µm or greater in diameter at the upstream. Be sure to inspect and replace the filter at regular intervals.

Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it.

Do not subject this device to pressure above its pressure resistance. Doing so might damage it.

If damage could result from the abnormal functioning of this device, include appropriate redundancy in the system design.

WARNING

CAUTION

•

Set the flow rate setpoint to zero.

•

Make the valve operation mode to fully closed.

3-1

Chapter 3. MOUNTING AND WIRING

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When purchasing a connecting joint, use the following made by Swagelok Co., Ltd: 1/4" Swagelok: SS-400-1-6ST (standard)

1/2" Swagelok: SS-810-1-8ST (standard)

1/4" VCR: SS-4-VCR-1-00032SC11

1/2" VCR: SS-8-VCR-1-8STSC 11 or equivalent

When controlling oxygen flow, use an oxygen model and observe the following:

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

SS-400-1-6STSC11 (oil-inhibited)

SS-810-1-8STSC11 (oil-inhibited)

•

Piping should be carried out by a specialist skilled in handling oxygen gas.

•

Use oil-free pipes and parts.

•

Be sure to remove foreign matter, burrs, etc. from the pipes before connecting the device.

CAUTION

Mounting



Installation locations

z

Avoid mounting the device in the following locations:

•

Locations subject to high and low temperature and humidity

•

Locations whose atmospheres contain large amounts of dirt and dust, salt, conductive substances such as iron powder, water droplet, oil mist or organic solvents

•

Locations subject to direct sunlight and rain

•

Locations directly subject to mechanical vibration or shock

•

Locations close to sources of electrical noise

•

Locations where strong magnetic or electrical fields are generated

Handling Precautions

•

The valve of this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately.

Changing the display direction (models with integrated display only)

z

The display can be turned 180˚, in case the controller has been mounted with the display upside-down.

3-2

Chapter 3. MOUNTING AND WIRING

When installing joints (UNF connections), secure the lower part of the main unit in a vise or the like gripped between rags to protect the finished surfaces, and turn the joint to tighten. The device may be damaged if the lower main unit is not secured.

Connector latches

Main unit

•

Procedure

(1) Turn the power OFF.

(2) Remove the four screws holding the display.

(3) Lift up the display from the main unit, and turn it 180˚ counterclockwise.

(4) Put the display back on the main unit, and fasten with the four screws

(5) To return the display to its original position on the body, turn it 180˚

Handling Precautions

•

Before changing the display direction, be sure to turn the power OFF.

•

Prevent foreign objects from falling inside the main unit when the display is taken off. Failure to do so might cause trouble or malfunction.

•

Do not remove the connectors used inside the main unit.

Installing joints (UNF) connections

z

taken off in step (2).

clockwise.

CAUTION

Rag

3-3

Chapter 3. MOUNTING AND WIRING

Incorrect

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

4.5

4.5 ø

Installation procedure

z

Handling Precautions

•

Do not hold the top part of the main unit with your hand. Doing so might deform the case.

•

Take special care not to damage the connector latches.

CAUTION

z MQV9200/9500/0002/0005/0020/0050

Install the device with two M4 screws using the mounting holes on the base of the device.

z MQV0050(J, K)/0200/0500

Install the device with four M4 screws using the mounting holes on the base of the device.

unit: mm

110

3-4

Installing the separate display unit

35 ±0.2

Panel cutout dimensions

(cross recessed head machine screws)

Panel

z

For models with a separate display

(1) Make mounting holes in the panel according to the panel cutout dimensions.

17.5 ±0.2

Chapter 3. MOUNTING AND WIRING

unit: mm

100 ±0.2

50 ±0.2

M4 (2)

45 ±0.2

(2) Mount the display and secure it by tightening the screws.

Installing the front cover for the separate display unit

z

For models with a separate display, a front cover (decorative frame) can be mounted. Use of this cover makes it possible to hide the mounting screws, improving the appearance.

Items needed for installation

• Front cover (81446858-001), 1 set

• Phillips screwdriver

Plate

Mask

90 ±0.2

Separate display unit

Procedure (1) As shown in the figure, put the plate over the display panel, and then secure it

(2) Fit the mask onto the display to mount it.

Mounting screws

Note

•

The front cover set includes one mask, one plate, and two mounting screws.

to the display by tightening the screws.

3-5

Chapter 3. MOUNTING AND WIRING

Mount this device horizontally. However, do not mount with the display facing down. Doing so might cause measurement error or device failure.

For the MQV0050(J, K)/0200(J, K)/0500(J, K), use the largest pipe possible in order to reduce pressure loss in the pipes, and do not install any equipment near the device that can cause a large pressure loss. If there is a large pressure loss in the pipes or equipment, the pressure of the gas supply to this device (operation differential pressure) will be affected and will fluctuate greatly with the flow rate. This could result in unstable control.

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Correct

Incorrect

Sealant

Piping



CAUTION

Handling Precautions

•

Make sure that the gas flows into the device in the direction indicated by the FLOW arrow on the main unit. Otherwise, the flow rate cannot be controlled correctly.

•

Do not touch the pipe sections of a controller treated to be oil-free with your bare hands. Doing so will degrade the oil-free treatment.

•

Do not hold the top part of the main unit with your hand when connecting piping. Doing so might deform the case.

Fasten and connect pipes to the body using a wrench (spanner) or similar tool on the hexagonal sections of the joints.

Coating sealant (Rc connection)

z

Handling Precautions

•

FLOW

GasGas

Coat with an appropriate amount of sealant. Do not coat the top two threads. Remove any dirt or burrs from inside the pipes.

3-6

Sealant

Wiring

Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure.

If there is a risk of a power surge caused by lightning, use a surge protector to prevent fire or equipment failure.

Be sure to check that the wiring is correct before turning the power on. Incorrect wiring could cause damage or malfunction.

View from connector insertion side



Chapter 3. MOUNTING AND WIRING

CAUTION

Connector pin layout

z

Connector model No. (device side): HIF3BA-20PA-2.54DS

20 19

Table of compatible connectors (all made by HIROSE ELECTRIC CO., LTD.)

z

Manufacturer: HIROSE ELECTRIC CO., LTD.

Connector type

Contact crimp type HIF3BA-20D-2.54C HIF3-2226SCC AWG#22 to #26

Cable clamp type HIF3BA-20D-2.54R Not required AWG#28 (flat cable only)

Compatible connector

model No.

Compatible contact

model No.

Compatible wire

(single wire allowed)

3-7

+ 65 hidden pages

Azbil MQV9020, MQV9200, MQV0005, MQV0020, MQV9500 User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Safety Precautions

Contents

Chapter 1. INTRODUCTION

Chapter 2. NAMES AND FUNCTIONS OF PARTS

Chapter 3. MOUNTING AND WIRING