Azbil MQV9020, MQV9200, MQV0005, MQV0020, MQV9500 User Manual

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Digital Mass Flow Controller

Standard Gas Model

MQV9005/9020/9200/9500

0002/0005/0020/0050/0200/0500

User’s Manual

No. CP-SP-1204E

Thank you for purchasing an Azbil Corporation product.

This manual contains information for ensuring the correct use of this product. It also provides necessary information for installation, maintenance, and troubleshooting.

This manual should be read by those who design and maintain equipment that uses this product. Be sure to keep this manual nearby for handy reference.

IMPORTANT

“Natural gas” in this document refers to city gas in Japan.

NOTICE

Be sure that the user receives this manual before the product is used.

Copying or duplicating this user’s manual in part or in whole is forbidden. The information and specifications in this manual are subject to change without notice.

Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions. If you should find an error or omission, please contact the azbil Group.

In no event is Azbil Corporation liable to anyone for any indirect, special or consequential damages as a result of using this product.

Micro Flow™, µF™ are trademarks of Azbil Corporation in Japan.

Conventions Used in This Manual

 The safety precautions explained in the following section aim to prevent injury to the operator and others, and to

prevent property damage.

Warnings are indicated when mishandling this product

WARNING

CAUTION

 In describing the product, this manual uses the icons and conventions listed below.

Use caution when handling the product.

The indicated action is prohibited.

Always follow the indicated instructions.

might result in death or serious injury.

Cautions are indicated when mishandling this product might result in minor injury to the user, or physical damage to the product.

Handling Precautions:

Handling Precautions indicate items that the user should pay attention to when handling the product.

Note:

(1)(2)(3): Numbers within parentheses indicate steps in a sequence or parts of an explanation.

0FF

>>: Indicates the result of an operation, details displayed on the personal computer or other

Notes indicate information that might benefit the user.

This indicates the item or page that the user is requested to refer to.

Indicates a selectable button on a personal computer screen.

devices, or the state of the device after operation.

Safety Precautions

Never allow gases that are within explosive limits to pass through this device. Doing so might result in an explosion.

If the MQV is to be used for oxygen, make sure that it is a model designed for oxygen use. Even if a device is designed for oxygen gas, do NOT use it for oxygen gas if it has been used for some other gas even once. Oil contained in another gas may be deposited on the gascontacting parts and ignite upon reacting with oxygen.

If the device is used for burner air-fuel ratio control, take the necessary countermeasures with the equipment to prevent the occurrence of backfire and to avoid any influence to the device even if backfire occurs. Pressure increase or fire in the pipes caused by the backfire of the burner could damage the controller.

This device cannot be used for measurement or control of hydrogen or helium gas. Use a model specially designed for hydrogen and helium gases. For information on whether this device can be used for gases other than the standard compatible gases, be sure to contact the azbil Group in advance.

Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur. If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist trap capable of eliminating foreign matter 0.1 µm or greater in diameter at the upstream. Be sure to inspect and replace the filter at regular intervals.

Use this device within the operating differential pressure range. Not doing so may cause hunting. Continuous hunting could damage the valve.

WARNING

CAUTION

Do not subject this device to pressure above its pressure resistance. Doing so might damage it.

Be sure to use within the flow-rate range stipulated in the product specifications. To prevent excessive flow, use a suitable means to control the supply pressure or use a throttle valve or the like to control the flow rate. If the flow rate exceeds the upper limit, both the flow rate display and the output voltage/ current may indicate considerably lower values than the actual flow rate.

If damage could result from the abnormal functioning of this device, include appropriate redundancy in the system design.

iiii

CAUTION

The valve on this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately. When the external valve is closed, it is necessary also to fully close the valve of the device using either of the following methods:

•

Set the flow rate setpoint to zero.

•

Make the valve operation mode to fully closed.

If this valve remains in normal control status when the external shutoff valve is closed (zero flow rate), there will be an excessively large flow as soon as the external shutoff valve is opened. For the MQV0050(J, K), MQV0200(J, K), and MQV0500(J, K), if the external shutoff valve is closed continuously for 5 minutes or more in control mode or with the valve forced fully open, the valve overheating limit (AL71) will be activated and the current to the valve will be forcibly limited.

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When separately purchasing a connecting joint, use the following made by Swagelok Co., Ltd: 1/4” Swagelok: SS-400-1-6ST (standard)

SS-400-1-6STSC11 (oil-inhibited)

1/2” Swagelok: SS-810-1-8ST (standard)

SS-810-1-8STSC11 (oil-inhibited)

1/4” VCR: SS-4-VCR-1-00032SC11

1/2” VCR: SS-8-VCR-1-8STSC11 or equivalent

Observe the following when using the device (oil-free model) for oxygen gas:

•

Piping should be carried out by a specialist skilled in handling oxygen gas.

•

Use oil-free pipes and parts.

•

Be sure to remove foreign matter, burrs, etc. from the pipes before connecting the device.

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

When installing joints (UNF connections), secure the lower part of the main unit in a vise or the like gripped between rags to protect the finished surfaces, and turn the joint to tighten.

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

For the MQV0050(J, K)/0200(J, K)/0500(J, K). use the largest pipe possible in order to reduce pressure loss in the pipes, and do not install any equipment near the MQV that can cause a large pressure loss. If there is a large pressure loss in the pipes or equipment, the pressure of the gas supply to this device (operation differential pressure) will be affected and will fluctuate greatly with the flow rate. This could result in unstable control.

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

iiiiii

CAUTION

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure.

When using a relay for external contact input and/or external 3-way switching input, always use a relay designed for micro-current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

If there is a risk of a power surge caused by lightning, use a surge protector to prevent fire or equipment failure.

Gas type switching by external contact input, flow rate switching, and analog input/output voltage range switching by external 3-way input switching should be done only after setting the operation mode to fully closed. Switching while controlling could cause large fluctuations.

Be sure to check that the wiring is correct before turning the power on. Incorrect wiring could cause damage or malfunction.

Do not apply excessive force to the cables or connector while the connector cable or the AC adapter is connected. Doing so may damage the connector or the circuit board.

Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver. Doing so might damage the console.

When discarding the device, dispose of it as industrial waste, following local regulations.

iviv

The Role of This Manual

A total of 2 different manuals are available for the MQV. Read them as necessary for your specific requirements. If a manual you require is not available, contact the azbil Group or its dealer.

Digital Mass Flow Controller Standard Gas Model MQV9005/9020/9200/9500/0002/0005/0020/0050/0200/0500 Manual No. CP-SP-1204E

This manual. First-time users of the MQV, and those in charge of maintenance or hardware design for incorporating a MQV controller in instrumentation should read this manual. This manual outlines the product, tells how to install, wire, and incorporate the product into instrumentation, and describes its operation, inspection and maintenance, troubleshooting, and hardware specifications.

MQV9005/9020/9050/9200/9500/0002/0005/0010/0020/0050/0100/0200/0500 Digital Mass Flow Controller User’s Manual for Communication Functions Manual No. CP-SP-1197E

Personnel who use this device’s communications functions should read this manual. The manual gives an overview of communications, describes wiring, transmission protocols, communications data, and troubleshooting, and gives communications specifications.

Organization of This User’s Manual

This manual is organized as follows.

Chapter 1. INTRODUCTION

This chapter briefly describes this device and its features, and gives a model selection guide.

Chapter 2. NAMES AND FUNCTIONS OF PARTS

This chapter describes the names and functions of this device’s parts.

Chapter 3. MOUNTING AND WIRING

This chapter describes installation, mounting, wiring and initial settings of this device.

Chapter 4. BASIC OPERATION

This chapter gives the basis of how to operate this device.

Chapter 5. ADVANCED OPERATION

This chapter describes how to set functions, parameters, controller information display, and flow rate range.

Chapter 6. MAINTENANCE AND TROUBLESHOOTING

This chapter describes how to investigate and remedy trouble that may occur during operation of this device.

Chapter 7. SPECIFICATIONS

This chapter describes the device’s specifications and external dimensions.

vivi

Conventions Used in This Manual Safety Precautions The Role of This Manual Organization of This User’s Manual

Chapter 1. INTRODUCTION

 Introduction ...................................................................................................................................................... 1-1

 Features ............................................................................................................................................................... 1-1

 Functions ............................................................................................................................................................ 1-2

 Model selection guide .................................................................................................................................. 1-7

 Basic operation and advanced operation .........................................................................................1-10

Chapter 2. NAMES AND FUNCTIONS OF PARTS

 Display ................................................................................................................................................................. 2-1

 Main unit (MQV9005/9020/9200/9500/0002/0005/0020/0050) ............................................. 2-2

 Main unit (MQV0050(J, K) /0200/0500) ................................................................................................ 2-2

Chapter 3. MOUNTING AND WIRING

 Mounting ............................................................................................................................................................ 3-2

 Piping.................................................................................................................................................................... 3-6

 Wiring ................................................................................................................................................................... 3-7

Chapter 4. BASIC OPERATION

4 - 1 Switching Displays .............................................................................................................................................. 4-1

 Basic operation ................................................................................................................................................ 4-1

4 - 2 Setting the Flow Rate ......................................................................................................................................... 4-4

 Digital flow rate setup .................................................................................................................................. 4-5

 Flow rate setup by external contact input (Advanced use) ........................................................ 4-7

 Flow rate setup by external 3-way switching input (Advanced use) .....................................4-8

 Analog flow rate setup ................................................................................................................................. 4-9

4 - 3 Selecting the Operating Mode ....................................................................................................................4-10

 Operating mode selection ........................................................................................................................4-10

 Operating mode display ............................................................................................................................4-10

Chapter 5. ADVANCED OPERATION

 Setup mode transition operation ........................................................................................................... 5-1

5 - 1 Functions ................................................................................................................................................................. 5-2

 Setup method ................................................................................................................................................... 5-2

 Function setup items.....................................................................................................................................5-3

5 - 2 Parameters ............................................................................................................................................................5-11

 Setup method .................................................................................................................................................5-11

 Parameter setup item list ..........................................................................................................................5-12

viivii

5 - 3 Device Information Display ......................................................................................................................... 5-15

 Setup method ................................................................................................................................................ 5-15

 Device information display item .......................................................................................................... 5-16

5 - 4 Flow Rate Range Change Function and Settings and Display Resolutions After

Change of Range ............................................................................................................................................... 5-17

 Setup resolution in the analog setup................................................................................................. 5-18

Chapter 6. MAINTENANCE AND TROUBLESHOOTING

 Alarm code display ......................................................................................................................................... 6-1

 Troubleshooting guide ................................................................................................................................6-2

Chapter 7. SPECIFICATIONS

 Specifications ...................................................................................................................................................7-1

 Gas type and control range ..................................................................................................................... 7-11

 Relationship between differential pressure and flow rate ..................................................... 7-12

 Optional parts (sold separately) ........................................................................................................... 7-14

 External dimensions ................................................................................................................................... 7-15

viii

Chapter 1. INTRODUCTION

function)

Potentiometer (sold separately)

Separate display unit

Front cover for

Introduction



MQV high performance, digital mass flow controllers with advanced functions have been developed for the general industrial application. They feature flow rate control with high speed and wide rangeability. MQV controllers integrate three component technologies: the ultra quick response µF (Micro Flow) thermal flow sensor, made with proprietary Azbil Corporation technology, a proportional solenoid valve, and advanced actuator control technology. Integrating these technologies has achieved a high-speed control with low differential pressure.

separate display (sold separately)

MQV

Features



Cable with dedicated connector (sold separately)

AC adapter (sold separately)

for setting ow rate

P.7-14

Controller (e.g. SDC25/26)

24 V DC power supply (e.g. WN790A)

RS-485 device (for models supporting optional RS-485 communications

Device Configuration

• High-speed controllability

Fast response of 300 ms or less* (500 ms for the MQV9005/9020, 700 ms for the MQV0050(J, K), MQV0200, and

MQV0500.)

* Response time is the time required for the controlled flow rate to reach ±2 % of the

set value, starting from the fully closed state or from when the set value is changed during control.

• Low differential pressure operation

MQV controllers can operate at a low differential pressure of 50 kPa or less.

• Wide control range

Wide control range of 1 to 100 % FS (2 to 100 % FS for the MQV9005)

• Wide product line-up

There are two types of models, those with integrated display and those with separate display. On models with separate display, the display unit can be

detached to allow remote operation via the dedicated 2 m cable.

1-1

Chapter 1. INTRODUCTION

• User-friendly

Runs on a general-purpose 24 V DC power supply, and the MQV's internal power circuit and input/output circuits are isolated. When multiple MQV are driven through the analog inputs and outputs, as with a PLC, they can all use a common power supply even if the PLC's analog modules are not isolated by channel. Therefore, even without individual power supplies for each device, problems with one circuit do not affect adjacent ones. Also provided is a handy AC adapter (sold separately) for easy use in the laboratory.

• Display direction can be changed (models with integrated display only)

The direction of the display can be rotated 180˚ to match the direction of the gas flow, in case it was mounted the other way.

• Improved design (separate display model)

A front cover (sold separately) hides the mounting screws of the separate display on the panel surface and improves the appearance.

Functions



• Various additional functions

The functions listed below are all standard.

All MQV models have the functions described below. For function setup, Chapter 5. ADVANCED OPERATION.

• Multi-setup (function setup C-04)

Quickly switch to one of eight preset flow set value by key operation or external input. If “Switching of SP No.” is set to external 3-way switching input, up to three set values can be switched.

• Gas type switching (function setup C-18, C-26)

The gas type to be used can be selected from the standard compatible gases by key operation. Additionally, two kinds of gas type settings can be changed by external contact input.

• Gas type setup (function setup C-18)

The user can set gas type conversion factors for gases other than the standard compatible gases, and for mixed gases. For information on gas type conversion factors for various gases, contact the azbil Group.

1-2

• Control flow range setting (function setup C-24, C-25)

The control flow range can be changed to the desired range (10 to 100 % of the flow range at factory setting) in units of 1 % FS. The setup and display resolution levels can be improved by reducing the control flow range. Additionally, two kinds of control flow ranges can be switched through external contact input.

• Direct setup (function setup C-2 1)

When changing the flow set value by key input, the controlled flow rate can follow the set value while changes are being made (the flow set value can be changed quickly). This function is useful when the user frequently changes set value, for example when adjusting the flow set value during a trial run.

Chapter 1. INTRODUCTION

• SP ramp control (function setup C-27)

This function is used to set the set value change ramp amount (the rate of change per second) to a constant value for the start of control and for set value changes. With this function, the set value change ramp amount can be set more precisely than with the slow start function. Two different types of ramps can be set, and there are the following 2 control modes:

•

SP ramp control 1 In SP ramp-up: Ramp 1 In SP ramp-down: Ramp 2

•

SP ramp control 2 In external contact OFF: Ramp 1 In external contact ON: Ramp 2

• SP limit (function setup C-35)

The lower and upper limits of the set value range can be set to desired levels. (This prevents mistaken high/low settings.)

• Slow start (function setup C-1 7)

Sudden changes in the controlled flow rate, when control is started or when the set value is changed, can be suppressed. The control speed can be changed in eight stages within a range of about 1 to 6 seconds.

• Flow rate totalization (function setup C-09 to C-12)

MQV9005: in 0.1 mL units MQV9020: in 1 mL units MQV9200/9500: in 0.01 L units MQV0002/0005: in 0.1 L units MQV0020/0050: in 1 L units MQV0050(J, K): in 0.001 m MQV0200/0500: in 0.01 m3 units

Integrated flow count can be up to eight digits long (to 99,999,999) for each unit. (Display alternates between first and last 4 digits.) The count can be reset by key operation or external contact input. Use of external contact input makes it possible to remotely operate the start, temporary stop, and reset of totalization. When resetting the integrated count by key operation, the count restarts automatically after it has been reset. On the other hand, when resetting with the external contact input (by contact ON), the count restarts when the contact is turned OFF.

units

• Event lamp lighting/output (function setup C-07, C-08)

Two of the event types listed below can be selected. Output ON delay time can also be set (but delay cannot be set for totalizer pulse output).

•

Integrated flow event output (when the integrated flow event setting is exceeded.)

•

Totalized pulse output (pulse can be output for each totalizing flow display unit.)

•

OK output (the control flow rate is within the set value ± allowable range.)

1-3

Chapter 1. INTRODUCTION

•

Flow rate upper or lower limit output (output in comparison with optional upper or lower limit flow rate set value )

•

Output mode (The four modes — control / fully open / control or fully open / fully closed — can be identified and output.)

• OK lamp ON/output (function setup C-07, C-08)

The OK lamp can be set to light when the control flow rate is within the set value ± allowable range. This function is very handy for verifying at a glance whether or not there is a proper response to a new set value after its value is changed. OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and including it in a sequence program.

• PV filter (function setup C-23)

This function is used to average the instantaneous flow rate (control flow rate) detected value. Use of this function makes it possible to suppress effects of slight pressure fluctuations.

• Control dead band setup (prevention of valve operation) (function setup

C-22)

This function is used to stop the valve from driving as long as the control flow rate is within the OK range. Additionally, the OK range (width of dead band) can be set to the desired level.

• Valve amperage display (function setup C-20)

The electric current supplied to the valve can be displayed in units of 0.0 to

100.0 %. Additionally, use of the valve amperage alarm detection function makes it possible to detect an inlet pressure change or clogging of the piping at the outlet.

• Gas type external switching (function setup C-10 to C-12, C-18, C-26)

Two preset types of gases (including one with a user-determined gas type conversion factor) can be switched by external contact input.

• Control flow rate range external switching (function setup C-10 to C-12,

C-24, C-25)

Two preset control flow ranges can be switched by external contact input.

• PV forced zero (function setup C-29)

This function forcibly sets the detected instantaneous flow rate to 0 (zero) after the delay time elapses when the flow rate setpoint has been set to 0 (zero) or the valve mode has been changed to fully closed. This function makes it possible to ignore the deviation of the instantaneous flow rate zero point caused by inclination of the piping or the like.

1-4

• Flow rate display unit change (function setup C-37)

This function is used to change the flow rate display unit to L/min or mL/min of the MQV9200/9500/0002/0005. When multiple devices are used side-by-side, this function can make the flow rate display units uniform.

Chapter 1. INTRODUCTION

• PV display decimal point change (function setup C-38)

This function is used to shift the decimal point position of the instantaneous flow rate display one digit left or right. When multiple devices are used side-byside, the number of digits after the decimal point of the flow rate display can be made uniform.

• Valve forcibly open or close (function setup C-02, C-09 to C-12)

This function is used to forcibly open or close the valve fully by key operation, external contact input, or external 3-way switching input.

• Automatic shut-off (function setup C-13, C-16)

The valve can be shut off automatically under the following conditions:

•

When the totalized flow count reaches the preset value.

•

When one of the alarms, including flow rate alarms, is triggered.

• ALM (alarm) lamp ON/output/valve shut-off (function setup C-15, C-16 C-20)

The alarm output can be set for high and low deviations in the flow set value and instantaneous flow rate. Additionally, an alarm judgment delay time can also be set. If a flow rate alarm occurs or if an alarm occurs during self-diagnosis of this controller, the valve can be forced fully closed or opened.

Handling Precautions

•

The valve on this device cannot completely shut off.

•

If complete shutoff is required, provide a shutoff valve separately.

• Automatic reset of cumulative count at start of control function (function

setup C-14)

Start of control and reset of totalized flow count can be done simultaneously by a single action (by key or external switching input). Combining this function with the automatic shut-off function described above is handy for shutting the valve off in cases where a fixed totalized flow amount is counted repeatedly.

• Analog scaling (function setup C-28)

This function is used to optionally change the flow rate (between 10 % FS and 100 % FS) corresponding to 100 % FS analog input/output (5 V or 20 mA).

• Analog input (flow set value) range selection (function setup C-05, C-09)

In analog setup, the desired input range can be selected from those shown below either by key operation or by external 3-way switching input. When doing so, the voltage input and current input are selected automatically, as they are linked with the settings of function setup C-06 (analog output type selection). For example, when the voltage output (0 to 5 V or 1 to 5 V) is selected in C-06, the voltage input is selected automatically. Likewise, when the current output (0 to 20 mA or 4 to 20 mA output) is selected, the current input is selected automatically.

1-5

Chapter 1. INTRODUCTION

•

Internal reference 0 to 5 V input*/External reference 0 to 20 mA input

•

External reference 0 to 5 V input/External reference 0 to 20 mA input

•

External reference 1 to 5 V input/External reference 4 to 20 mA input

* The internal reference 0 to 5 V is used when the 5 V output terminal voltage

(pin No. 20) of this controller is used as the reference.

• Analog output type/range selection (function setup C-06, C-09)

Output can be set either to instantaneous flow rate (PV) or flow set value (SP). Furthermore, a voltage/current output range can be selected from (1) to (4) shown below by key operation. Additionally, (1)/(2) or (3)/(4) can be changed through the external 3-way switching input. (Combinations are switched because of linkage with the analog input range selection.)

Instantaneous flow rate (PV) output Flow set value (SP) output

(1) 0 to 5 V output

(2) 1 to 5 V output

(3) 0 to 20 mA output

(4) 4 to 20 mA output

(2) 1 to 5 V output

(3) 0 to 20 mA output

(4) 4 to 20 mA output

1-6

Model selection guide



MQV9005/9020

z

Chapter 1. INTRODUCTION

Standard

Basic

model

control

flowrate

No.

range

MQV Digital mass flow controller, MQV

9005 0.10 to 5.00 mL/min (standard)

9020 0.2 to 20.0 mL/min (standard)

Display

Material of

gascontacting

parts

B Integrated display (body length 90 mm)

C Separate display (body length 90 mm)

S SUS316

Connection

method

Gas

type

S 1/4" Swagelok

V 1/4" VCR

N Air, nitrogen

S Oxygen

Optional

functions

1 2 3 4 5

0 Without optional functions

1 Model with RS-485 communications

0 Without optional functions

Appended

No.

(CPL) function

0 Without optional functions

1 Gas-contacting parts treated to be oil

0 Without optional functions

D With inspection certificate

Y With traceability certificate

0 Product version

free

Description

*2, *4

*3, *4

*1, *4

*1. mL/min (standard) indicates the volumetric flow rate per minute (mL/min) converted to conditions of 20 ˚C and

101.325 kPa (1 atm). The reference temperature can be changed to 0, 25, or 35 ˚C.

*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon.

*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon. However, once

this device has been used for gas other than oxygen, never reuse it for oxygen.

*4. The flow rate ranges in the table are for use of this device with air. The controllable flow range may vary depending

on the type of gas.

 Gas type and control range (P.7-11).

*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected

for Optional function 4.

1-7

Chapter 1. INTRODUCTION

MQV9200/9500/0002/0005/0020/0050

z

Basic

model

No.

Standard

control

flowrate

range

Display

Material of

gascontacting

parts

Connection

method

Gas

type

Optional

functions

1 2 3 4 5

Appended

No.

Description

MQV Digital mass flow controller, MQV

9200 2 to 200 mL/min (standard)

*1, *4

9500 0.004 to 0.500 L/min (standard)

0002 0.02 to 2.00 L/min (standard)

0005 0.04 to 5.00 L/min (standard)

0020 0.2 to 20.0 L/min (standard)

0050 0.4 to 50.0 L/min (standard)

*1, *4

B Integrated display (body length 90 mm)

C Separate display (body length 90 mm)

S SUS316

R Rc 1/4"

S 1/4" Swagelok

V 1/4" VCR

U 9/16-18UNF

N Air, nitrogen

S Oxygen

*2, *4

*3, *4

0 Without optional functions

1 Model with RS-485 communications

(CPL) function

0 Without optional functions

1 Gas-contacting parts treated to be oil

free

0 Without optional functions

D With inspection certificate

Y With traceability certificate

0 Product version

*1, *4

*1. L/min (standard) and mL/min (standard) indicate the volumetric flow rate per minute (L/min and mL/min) converted

to conditions of 20 ˚C and 101.325 kPa (1 atm). The reference temperature can be changed to 0, 25, or 35 ˚C.

*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon, carbon dioxide (CO

city gas 13A (LNG: 46 MJ/m

), city gas 13A (LNG: 45 MJ/m3), propane 100 %, methane 100 %, or butane 100 %. Additionally, semi-standard gas models that can be used for ammonia or acetylene (seal material: EPDM) can also be manufactured.

*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon, carbon dioxide

(CO

), city gas 13A, propane 100 %, methane 100 %, or butane 100 %. However, once this device has been used for

gas other than oxygen, never reuse it for oxygen.

*4. The flow rate ranges in the table are for use of this device with air. The controllable flow range may vary depending

on the type of gas.

 Gas type and control range (P.7-11).

*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected

for Optional function 4.

1-8

MQV0050(J, K)/0200/0500

z

Chapter 1. INTRODUCTION

Standard

Basic

model

control

flowrate

No.

range

MQV Digital mass flow controller, MQV

0050 0.4 to 50.0 L/min (standard)

0200 2 to 200 L/min (standard)

0500 4 to 500 L/min (standard)

Display

Material of

gascontacting

parts

J Integrated display (body length 150 mm)

K Separate display (body length 150 mm)

S SUS316

Connection

method

Gas

type

R Rc 1/2"

S 1/2" Swagelok

V 1/2" VCR

U 3/4-16UNF

N Air, nitrogen

S Oxygen

Optional

functions

1 2 3 4 5

0 Without optional functions

1 Model with RS-485 communications

0 Without optional functions

Appended

No.

(CPL) function

0 Without optional functions

1 Gas-contacting parts treated to be oil

0 Without optional functions

D With inspection certificate

Y With traceability certificate

0 Product version

free

Description

*1, *4

*2, *4

*3, *4

*1, *4, *6

*1. The notations mL/min (standard) and L/min (standard) indicate the volume flow rate per minute converted to 20 ˚C,

one atmosphere (101.3 kPa (abs)). The reference temperature can also be changed to 0 ˚C, 25 ˚C or 35 ˚C.

*2. Air/nitrogen is the factory setting. By changing the setting, this model can be used for argon, carbon dioxide (CO

city gas 13A (LNG: 46 MJ/m

), city gas 13A (LNG: 45 MJ/m3), propane 100 %, methane 100 %, or butane 100 %.

Additionally, semi-standard gas models that can be used for ammonia or acetylene (seal material: EPDM) can also be manufactured. (MQV0200/0500 only)

*3. Oxygen is the factory setting. By changing the setting, this model can be used for air/nitrogen, argon, carbon dioxide

(CO

), city gas 13A (LNG: 45 MJ/m3), propane 100 %, methane 100 %, or butane 100 %. However, once this device has

been used for a gas other than oxygen, never reuse it for oxygen.

*4. The flow rate ranges in the above table are for use of this device for air. The controllable flow range may vary

depending on the type of gas.

 Gas type and control range (P.7-11).

*5. When oxygen is selected as the gas type, selection “1,” “gas-contacting parts treated to be oil free,” must be selected

for Optional function 4.

*6. The MQV0050(J, K) is for low differential pressure and is controllable to a high flow rate range with lower differential

pressure than the MQV0050(B, C).

1-9

Chapter 1. INTRODUCTION

Basic operation Advanced operation

DISP key

Basic operation and advanced operation



This device provides two kinds of operations, basic operation and advanced operation. Basic operation is the state of the device during normal use. In basic operation, the contents of the 7-segment display can be changed to show instantaneous flow rate, flow set value, totalized flow value, or amperage to the valve in normal operation mode. Also, how to set the flow set value is described in the basic operation part.

Advanced operation is for selecting various functions or setting parameters of the device. When the device is used with the factory settings, no setup operation is needed. However, to change the gas type, set a range, set an external contact input, set upper and lower alarm limits, or set communication conditions (for models with communication functions), it is necessary to configure various settings using advanced operation. The diagram below gives an outline of operation flow. Basic and advanced operation are described in Chapters 4 and 5, respectively.

Power ON

Instantaneous ow rate display

DISP key

Flow set value display

DISP key

Totalized ow display

DISP key

Valve amperage display

DISP key

key+ENT key

(3 s or more)

key (3 s or more)

Function setup mode

Parameter setup mode

Controller information display mode

1-10

Chapter 2. NAMES AND FUNCTIONS OF PARTS

PV lamp:

OK lamp:

Use this key to change the operating mode.

reset alarm and move to the function setup mode.

Display



Lit when the deviation between the ow set value and instantaneous ow rate is in the allowable range. Set the allowable range in the parameter setup.

7-segment display:

Displays the instantaneous ow rate, ow set value, totalized ow, amperage to the valve and the operating mode. It also displays parameter setup values, function setup values and details of alarms.

SP lamp:

Lit when the ow rate setpoint is displayed.

Lit when the instantaneous ow rate is displayed.

ALM lamp: Lit when an alarm occurs.

EV1 lamp

Lit when event 1 output is ON.

EV2 lamp: Lit when event 2 output is ON.

OK ALM EV1 EV2

RUN ENT DISP

(For details on how to set parameters, )

L/min

Digital Mass Flow Controller

DISP key:

Use this key to switch the details displayed on the 7-segment display.

ENT key:

Use this key to x and store the set value to memory. Also use it to reset the cumulative ow and to

L lamp

*1:

Lit when the totalized ow is displayed. Blinks when the cumulative ow event occurs.

L/min lamp

Lit when the instantaneous ow rate or ow set value is displayed.

P.5-11

*2:

Note

key:

Use this key to increment the setting value. Additionally, this key is used to change to the device information display mode.

key:

Use this key to decrement the setting value. Also use it to move to the function setup mode.

key:

Use this key to move to a desired digit when changing setting value. Also use it to move to the parameter setup mode.

RUN key:

*1. This lamp is used for mL or m3 instead of L on some models.

*2. This lamp is used for mL/min instead of L/min on some models.

•

Technical terms used in this manual are defined as follows:

•

SP (setpoint): The flow set value (or flow rate setpoint)

•

PV (process variable): Instantaneous flow rate (or controlled flow rate)

•

Operating mode: 3 modes (valve fully closed/valve control/ valve fully

open)

2-1

Chapter 2. NAMES AND FUNCTIONS OF PARTS

gas enters.

Jack for PC loader connection

Connector port: This is used for I/O signals. Use cable with dedicated connector.

Jack for AC adapter: Connect dedicated adapter here. Model No.: 81446957-001 (24 V DC, 750 mA)

Pipe connection port (inlet): This is the port through which gas enters.

Pipe connection port (outlet):

Connector port: This is used for I/O signals. Use cable with dedicated connector.

Connector for separate display: This is used for connecting the separate display unit.

Main unit (MQV9005/9020/9200/9500/0002/0005/0020/0050)



Jack for AC adapter: Connect dedicated adapter here. Model No.: 81446957-001 (24 V DC, 750 mA)

Pipe connection port (inlet): This is the port through which

Main unit (MQV0050(J, K) /0200/0500)



Pipe connection port (outlet): This is the port from which gas is discharged.

2-2

Handling Precautions

This is the port from which gas is discharged.

Jack for PC loader connection

•

The former AC adapter (model No. 81446682-001, 15 V DC/350 mA) can not be used with MQV.

Chapter 3. MOUNTING AND WIRING

Never allow gases that are within explosive limits to pass through this device. Doing so might result in an explosion.

If the MQV is to be used for oxygen, make sure that it is a model designed for oxygen use. Even if a device is designed for oxygen gas, do NOT use it for oxygen gas if it has been used for some other gas even once. Oil contained in another gas may be deposited on the gas-contacting parts and ignite upon reacting with oxygen.

Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur.

If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist trap capable of eliminating foreign matter 0.1 µm or greater in diameter at the upstream. Be sure to inspect and replace the filter at regular intervals.

Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it.

Do not subject this device to pressure above its pressure resistance. Doing so might damage it.

If damage could result from the abnormal functioning of this device, include appropriate redundancy in the system design.

WARNING

CAUTION

•

Set the flow rate setpoint to zero.

•

Make the valve operation mode to fully closed.

3-1

Chapter 3. MOUNTING AND WIRING

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When purchasing a connecting joint, use the following made by Swagelok Co., Ltd: 1/4" Swagelok: SS-400-1-6ST (standard)

1/2" Swagelok: SS-810-1-8ST (standard)

1/4" VCR: SS-4-VCR-1-00032SC11

1/2" VCR: SS-8-VCR-1-8STSC 11 or equivalent

When controlling oxygen flow, use an oxygen model and observe the following:

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

SS-400-1-6STSC11 (oil-inhibited)

SS-810-1-8STSC11 (oil-inhibited)

•

Piping should be carried out by a specialist skilled in handling oxygen gas.

•

Use oil-free pipes and parts.

•

Be sure to remove foreign matter, burrs, etc. from the pipes before connecting the device.

CAUTION

Mounting



Installation locations

z

Avoid mounting the device in the following locations:

•

Locations subject to high and low temperature and humidity

•

Locations whose atmospheres contain large amounts of dirt and dust, salt, conductive substances such as iron powder, water droplet, oil mist or organic solvents

•

Locations subject to direct sunlight and rain

•

Locations directly subject to mechanical vibration or shock

•

Locations close to sources of electrical noise

•

Locations where strong magnetic or electrical fields are generated

Handling Precautions

•

The valve of this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately.

Changing the display direction (models with integrated display only)

z

The display can be turned 180˚, in case the controller has been mounted with the display upside-down.

3-2

Chapter 3. MOUNTING AND WIRING

When installing joints (UNF connections), secure the lower part of the main unit in a vise or the like gripped between rags to protect the finished surfaces, and turn the joint to tighten. The device may be damaged if the lower main unit is not secured.

Connector latches

Main unit

•

Procedure

(1) Turn the power OFF.

(2) Remove the four screws holding the display.

(3) Lift up the display from the main unit, and turn it 180˚ counterclockwise.

(4) Put the display back on the main unit, and fasten with the four screws

(5) To return the display to its original position on the body, turn it 180˚

Handling Precautions

•

Before changing the display direction, be sure to turn the power OFF.

•

Prevent foreign objects from falling inside the main unit when the display is taken off. Failure to do so might cause trouble or malfunction.

•

Do not remove the connectors used inside the main unit.

Installing joints (UNF) connections

z

taken off in step (2).

clockwise.

CAUTION

Rag

3-3

Chapter 3. MOUNTING AND WIRING

Incorrect

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

4.5

4.5 ø

Installation procedure

z

Handling Precautions

•

Do not hold the top part of the main unit with your hand. Doing so might deform the case.

•

Take special care not to damage the connector latches.

CAUTION

z MQV9200/9500/0002/0005/0020/0050

Install the device with two M4 screws using the mounting holes on the base of the device.

z MQV0050(J, K)/0200/0500

Install the device with four M4 screws using the mounting holes on the base of the device.

unit: mm

110

3-4

Installing the separate display unit

35 ±0.2

Panel cutout dimensions

(cross recessed head machine screws)

Panel

z

For models with a separate display

(1) Make mounting holes in the panel according to the panel cutout dimensions.

17.5 ±0.2

Chapter 3. MOUNTING AND WIRING

unit: mm

100 ±0.2

50 ±0.2

M4 (2)

45 ±0.2

(2) Mount the display and secure it by tightening the screws.

Installing the front cover for the separate display unit

z

For models with a separate display, a front cover (decorative frame) can be mounted. Use of this cover makes it possible to hide the mounting screws, improving the appearance.

Items needed for installation

• Front cover (81446858-001), 1 set

• Phillips screwdriver

Plate

Mask

90 ±0.2

Separate display unit

Procedure (1) As shown in the figure, put the plate over the display panel, and then secure it

(2) Fit the mask onto the display to mount it.

Mounting screws

Note

•

The front cover set includes one mask, one plate, and two mounting screws.

to the display by tightening the screws.

3-5

Chapter 3. MOUNTING AND WIRING

Mount this device horizontally. However, do not mount with the display facing down. Doing so might cause measurement error or device failure.

For the MQV0050(J, K)/0200(J, K)/0500(J, K), use the largest pipe possible in order to reduce pressure loss in the pipes, and do not install any equipment near the device that can cause a large pressure loss. If there is a large pressure loss in the pipes or equipment, the pressure of the gas supply to this device (operation differential pressure) will be affected and will fluctuate greatly with the flow rate. This could result in unstable control.

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Correct

Incorrect

Sealant

Piping



CAUTION

Handling Precautions

•

Make sure that the gas flows into the device in the direction indicated by the FLOW arrow on the main unit. Otherwise, the flow rate cannot be controlled correctly.

•

Do not touch the pipe sections of a controller treated to be oil-free with your bare hands. Doing so will degrade the oil-free treatment.

•

Do not hold the top part of the main unit with your hand when connecting piping. Doing so might deform the case.

Fasten and connect pipes to the body using a wrench (spanner) or similar tool on the hexagonal sections of the joints.

Coating sealant (Rc connection)

z

Handling Precautions

•

FLOW

GasGas

Coat with an appropriate amount of sealant. Do not coat the top two threads. Remove any dirt or burrs from inside the pipes.

3-6

Sealant

Wiring

Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure.

If there is a risk of a power surge caused by lightning, use a surge protector to prevent fire or equipment failure.

Be sure to check that the wiring is correct before turning the power on. Incorrect wiring could cause damage or malfunction.

View from connector insertion side



Chapter 3. MOUNTING AND WIRING

CAUTION

Connector pin layout

z

Connector model No. (device side): HIF3BA-20PA-2.54DS

20 19

Table of compatible connectors (all made by HIROSE ELECTRIC CO., LTD.)

z

Manufacturer: HIROSE ELECTRIC CO., LTD.

Connector type

Contact crimp type HIF3BA-20D-2.54C HIF3-2226SCC AWG#22 to #26

Cable clamp type HIF3BA-20D-2.54R Not required AWG#28 (flat cable only)

Compatible connector

model No.

Compatible contact

model No.

Compatible wire

(single wire allowed)

3-7

Chapter 3. MOUNTING AND WIRING

24 V DC

POWER GND

POWER (24 V)

or 9 D.GND

Connector signal names

z

Pin number Signal name Description Remarks

20 +5 V (5 mA max.) 5 V DC reference voltage outputa 5 mA max.

19 FLOW OUT Instantaneous flow rate (PV) or

18 A.GND Analog ground Analog signal common

17 FLOW SP INPUT Setpoint flow rate (SP) voltage

16 MODE INPUT External 3-way switching input 3-stage switching input

15 DI3 External contact input 3 2-stage switching input

14 DI2 External contact input 2

13 DI1 External contact input 1

12 EV2 OUT Event output 2 Open collector non-insulated output

11 EV1 OUT Event output 1

10 ALM OUT Alarm output

9 D.GND Digital ground Digital signal common

8 DB RS-485 communications DB Do not connect on models without the

7 DA RS-485 communications DA

6 D.GND Digital ground Digital signal common

5 TEST For test Do not use.

4 POWER GND Power supply ground Connect two wires each in parallel to the

3 POWER GND Power supply ground

2 POWER (24 V) Power supply + (24 V DC)

1 POWER (24 V) Power supply + (24 V DC)

flow rate setpoint (SP) output

input

0 to 5 V/1 to 5 V/0 to 20 mA/ 4 to 20 mA output

0 to 5 V/1 to 5 V/0 to 20 mA/ 4 to 20 mA input

(OPEN/GND/5 V)

(OPEN/GND)

communications function.

power supply to reduce voltage drop caused by wiring resistance.

Wiring

z

• Power supply

POWER GND

• RS-485 communications (for models with optional RS-485 only)

Note

•

For details on wiring for RS-485 communication, Digital Mass Flow Controller User's Manual: Communications, CP-SP-1197E.

3-8

• Alarm output/event output

Load

EV2 OUT

or 6 D.GND

DI3

or 6 D.GND

0 to 5 V/1 to 5 V 0 to 20 mA/4 to 20 mA

FLOW OUT

FLOW SP INPUT

+5 V

FLOW SP INPUT

Chapter 3. MOUNTING AND WIRING

Load

+ -

EV1 OUT

ALM OUT

Handling Precautions

•

Take special care that the event and alarm outputs do not exceed the output rating of the device. Additionally, when driving a relay, use an appropriate coil surge absorption diode built-in relay. Failure to do so might cause the device to malfunction.

• External contact input

DI2

DI1

Handling Precautions

•

When switching by relay contact, use an appropriate relay intended for micro-current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

• Analog I/O

Output

—

Input

—

• When using potentiometer (0 to 5 V)

A.GND (0 V)

A.GND

3-9

Chapter 3. MOUNTING AND WIRING

OPEN

+5 V

MODE INPUT

• External 3-way switching input

0 V

Operation of external 3-way switching input

5 V

A.GND (0 V)

Handling Precautions

•

When switching by relay, use an appropriate relay intended for microcurrent use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

Input state of pin No.16

Assigned function

Switching of operating mode 1 Control Fully closed Fully open

Switching of operating mode 2 Fully closed Control Fully open

Switching of SP No. SP-0 SP-1 SP-2

Switching of totalizing operation Continue

Switching of analog I/O voltage range

* "Internal reference" refers to the use of the 5 V DC reference voltage pin (No. 20) on

this device, and is used when the setting value is set by an externally connected potentiometer.

Input Internal

Output

OPEN GND 5V

Reset Stop counting

counting

External reference 0 to 5 V or

0 to 20 mA

0 to 5 V/0 to

20 mA

reference 0 to 5 V or

external

reference

0 to 20 mA

0 to 5 V/0 to

20 mA

External

reference

1 to 5 V or

4 to 20 mA

1 to 5 V/4 to

20 mA

Note

•

For details on how to assign external 3-way switching input functions,

Chapter 5, ADVANCED OPERATION  Function setup items

C-09

(P.5-4).

3-10

Example of wiring

Input/output circuit

Instantaneous owrate output

z

Chapter 3. MOUNTING AND WIRING

Potentiometer

(5 kΩ)

Event output 2

Event output 1

Alarm output

(Output common)

0 V

OPEN

+5 V

+5 V (5 mA max.)

FLOW OUT

A.GND

FLOW SP INPUT

MODE INPUT

DI3

DI2

DI1

EV2 OUT

OUT

EV1

ALM OUT

D.GND

D. GND

TEST

Internal circuit

Handling Precautions

•

Do not input any signal to pin No. 5.

•

The power circuit is isolated from the input/output circuit inside this device.

•

Even though the analog GND and digital GND are connected internally, always carry out the grounding wiring individually.

•

When the AC adapter plug is inserted into the AC adapter power supply terminal, the power supply changes from the DC power supply to the AC adapter.

•

The former AC adapter 81446682-001 (15 V DC, 350 mA) cannot be used with this device.

Power supply

(24 V DC)

POWER GND

POWER (24 V)

AC adapter input

Power circuit

3-11

Chapter 3. MOUNTING AND WIRING

Connector terminal block

z

Sometimes two or more connections must be made to the same pin during wiring. In this case, use a connector terminal block. If you need a 20-core cable for the connectors on the device and connector terminal block, contact the azbil Group or your dealer.

Note

•

Recommended connector terminal block Manufacturer: Toyo Giken Model: PCN-1H-20

M ounting connector

HIROSE ELECTRIC CO., LTD., HIF3BA-20PA-2.54DSA

Compatible connector (other side)

HIROSE ELECTRIC CO., LTD., HIF3BA-20D-2.54R

This terminal block can be mounted directly on a DIN rail.

The following table shows the correspondence between connector pin Nos. and terminal block Nos:

Handling Precautions

•

For details regarding the cable with connector on both ends, contact the azbil Group. (The optional dedicated connector, 81446681-001 or 81446951-001, cannot be used to connect to the connector terminal block.)

•

The specifications of the recommended connector terminal block are subject to change. Contact the manufacturer beforehand for details.

Pin No. Terminal block No.

20 B-10

19 A-10

18 B-9

17 A-9

16 B-8

15 A-8

14 B-7

13 A-7

12 B-6

11 A-6

10 B-5

9 A-5

8 B-4

7 A-4

6 B-3

5 A-3

4 B-2

3 A-2

2 B-1

1 A-1

Cable with connector on both ends

Connector terminal block

MQV

3-12

Chapter 4. BASIC OPERATION

Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver. Doing so might damage the console.

Power ON

go out)

4 - 1 Switching Displays

CAUTION

Basic operation



Basic operation is used to change the display to instantaneous flow rate (PV), flow set value (SP), totalized flow value, or valve amperage.

Normally, when the power is turned ON, the instantaneous flow rate is displayed in basic operation mode. When this is the case, operating the DISP key changes the contents of the 7-segment display as described below.

Instantaneous ow rate display (PV and L/min lamps lit)

DISP key

Flow set value display (SP and L/min lamps lit)

DISP key

Totalized ow display (L lamp lit)

DISP key

Valve amperage display (SP, PV, L, and L/min lamps

DISP key

Handling Precautions

•

If there is no operator input for approximately 10 seconds while the flow set value is being displayed, the display automatically reverts to the instantaneous flow rate display.

•

On the MQV9005/9020/9200, the mL/min lamp replaces the L/min lamp. On the MQV9005/9020, the mL lamp replaces the L lamp, and on the MQV0050(J, K)/0200/0500, the m3 lamp replaces the L lamp.

Indicating instantaneous flow rate (PV display)

z

When the power is turned ON, the PV and L/min lamps light, and the instantaneous flow rate is indicated on the display.

Handling Precautions

•

When the operating mode is set to fully closed, and the flow rate is zero, and when the operating mode is switched to the control mode or fully open mode, the operating mode ( one second.

•

When an alarm occurs, the alarm code and the PV are displayed alternately.

OFF/ON/FULL

) is displayed for about

4-1

Chapter 4. BASIC OPERATION

Indicating the flow set value (SP display)

z

If DISP key is pressed while the instantaneous flow rate is displayed, the PV lamp goes out, the SP lamp lights and the flow set value (SP) is indicated on the display.

Handling Precautions

•

If the SP value is not changed for about 10 seconds while the flow set value is displayed, the instantaneous flow rate is redisplayed automatically. For details on how to change the flow rate, 4 - 2 S etting the Flow Rate (P.4-4).

•

When multiple setpoints (2 to 8 SPs) have been selected in function setup, when switching by external input, the flow set value (SP value) is displayed for about one second, and then the display switches to the SP No.

c-04

in the

Indicating the totalized flow

z

When the DISP key is pressed while the flow set value (SP) is displayed, the SP and L/min lamps go out, the L lamp lights up, and the totalized flow value is indicated

on the display.

When the totalized flow value is 10,000 or higher, the number is displayed in two parts, the last four digits, followed by the first four digits. When the value is the last four digits, the decimal point on the display is lit up.

For example, when the totalized flow value is "123,456L", "3 4 5 6." is displayed. Press the DISP key to display " 1 2". To alternately display the first and last four digits, press the

Handling Precautions

•

When an alarm occurs, the alarm code and the totalized flow value are displayed alternately.

Resetting the totalized flow count

z

The totalized flow value is reset to zero by holding down the ENT key for two seconds or more while the totalized flow value is displayed.

Note (Advanced operation)

•

Totalized flow event output function When "1: Totalized flow rate count up ON" is selected as the event output type for function setup totalized flow value reaches the totalized flow event setting. This threshold value for the totalized flow event is set in the parameter setup mode.

key.

C-07

, the event output turns ON when the

C-08

4-2

•

Totalized flow event automatic valve shut-off function When "1: Function enabled" is set for the automatic valve shut-off function in function setup C-13, the valve will be automatically closed fully if the totalized flow value reaches the preset value. The threshold value for the totalized flow event is set in the parameter setup mode. For details on function setup and parameter setup, Chapter 5.

ADVANCED OPERATION.

Valve amperage display

z

Chapter 4. BASIC OPERATION

If DISP key is pressed while the totalized flow is displayed, the PV, SP, L and L/ min lamps go out, and the electrical current to the valve (

indicated on the 7-segment display.

Note (Advanced operation)

•

When "1: Only upper limit alarm used," "2: Only lower limit alarm used," or "3: Upper and lower limit alarm used" is selected for valve amperage alarm type ( activated if the valve current exceeds the upper limit set value or goes below the lower limit value. The valve amperage upper and lower limits are set in the parameter setup mode. For details on function setup and parameter setup, Chapter 5. ADVANCED OPERATION.

in the function setup), the valve amperage alarm will be

C-20

0.0

to 1

00.0

[ %]) is

Handling Precautions

•

The valve amperage can vary greatly according to the differential pressure even at the same flow rate. The valve amperage alarm function cannot be used unless the differential pressure is stable.

•

Even under stable differential pressure conditions, the relationship between the valve amperage and flow rate has hysteresis characteristics (amperage may vary even at the same flow rate). When using the valve amperage alarm, be sure to test sufficiently under operating conditions. That way, an appropriate alarm current setting can be determined.

4-3

Chapter 4. BASIC OPERATION

Factory setting

4 - 2 Setting the Flow Rate

Set the ow rate as shown below.

Digital setup

Flow set value Selection from function setup C-03

Analog setup

Selection from function setup C-04

Multi-setup

Voltage setup

Selection from function setup C-05 and C-06

Current setup

Two kinds of setup methods, that is, digital and analog setup, are provided to set the flow rate. Additionally, the digital setup further provides two kinds of setup methods, single setup and multi-setup.

In single setup, the flow rate is set through key input or communications. In multisetup, the flow rate is set through the key input, communications, external contact input, or external 3-way switching input. One flow set value can be set in the single setup while up to eight flow set values can be set in the multi-setup.

Key input or communicationsSingle setup

Key input or communications

External contact inputs External 3-way switching input

Internal reference 0 to 5 V input External reference 0 to 5 V/1 to 5 V input

External reference 0 to 20 mA/4 to 20 mA input

In the analog setup, the flow rate is set through the external voltage/current input.

The factory setting is digital setup.

Either digital setup or analog setup is selected as the flow rate setup method ( in the function setup).

0: Digital setup (flow rate is set through the key input or communication.)

1: Analog setup (flow rate is set through the external analog voltage/current.)

For further detailed setup, make selections in For details on function setup,

Handling Precautions

•

Setup by communications is available only for models with RS-485 communications.

C-04

in the function setup.

C-06

Chapter 5. ADVANCED OPERATION.

C-03

4-4

Digital flow rate setup



Chapter 4. BASIC OPERATION

Up to eight SP values can be set on this device. The operating procedure may vary depending on the number of SP values to be set.

Single setup (number of SPs in function setup

z

Follow the procedure below to change the SP value:

(1) Press the DISP key.

>> The SP (flow rate setpoint) is shown on the 7-segment display

(2) Change the SP value by pressing the

be changed by pressing the key.

>> The digit currently being changed starts blinking.

(3) When you have reached the target value, press the ENT key.

>> The SP value is set, and saved.

Note (Advanced use, direct setup function)

•

Control can be executed using an SP value currently being changed (indicated by blinking display) when the direct setup function is enabled for the instantaneous flow rate direct setup function ON/OFF ( function setup). In this case, the ENT key need not be pressed to enter the SP value.

Handling Precautions

•

When switching the display by pressing the DISP key, first press the ENT key to enter the SP value, and switch the display. For details on how to set up functions, Chapter 5. ADVANCED OPERATION.

C-04

is 1)

or keys. You can move to the digit to

in the

C-2 1

Multi-setup (number of SPs in function setup

z

In multi-setup, up to eight SP values can be switched by key operation and by external contact input.

Follow the procedure below to change the SP No. and SP value:

(1) Press the DISP key.

>> The display switches to SP No.

(2) Press the

>> The SP No. is entered.

(3) Change the SP value by pressing the

be changed by pressing the key.

>> The digit currently being changed blinks while the SP value is being changed.

(4) When you have reached the target value, press the ENT key to enter the new SP

value.

>> The SP value and SP No. are updated, and the SP value of the selected SP No. is

new the active SP.

or keys to change the SP No. and press the ENT key.

C-04

is 2 to 8)

SP-0

after about one second.

SP-7

or keys. You can move to the digit to

4-5

Chapter 4. BASIC OPERATION

Note (Advanced use, direct setup function)

•

Control can be executed using an SP No. or SP value currently being changed (indicated by blinking display) when the direct setup function is enabled for the instantaneous flow rate direct setup function ON/OFF (

in the function setup). In this case, the ENT key need not be pressed

C-21

to enter the SP value.

Handling Precautions

•

When switching the display by pressing the DISP key, first press the ENT key to enter the SP value. For details on how to set up functions, Chapter 5. ADVANCED OPERATION.

Handling Precautions (Common to single setup and multi-setup)

•

When "1: Analog setup" is selected as the flow rate setup method ( in the function setup) and the SP value is controlled by external voltage input, the SP value and SP No. cannot be changed with the or key.

C-03

•

If no operation is made for approximately 10 s after the operation stated in (1) has been performed, the display automatically returns to the instantaneous flow rate display.

•

If the DISP key is pressed during the operations in steps (2) and (3) (setting is blinking), the SP No. and SP value return to their previous values without saving of new values.

•

When the SP value is updated in step (3) for single setup or in step (4) for multi-setup, the display automatically returns to the instantaneous flow rate display after approximately 2 s have elapsed.

4-6

Flow rate setup by external contact input (Advanced use)



When assigning "3: Switching of SP No." at external contact input function assignment C- 1 0 to C- 1 2 in the function setup, up to eight SP values can be changed by means of external contact ON and OFF combinations.

Chapter 4. BASIC OPERATION

(1) When the number of preset SP values is set to 5 to 8 in function setup

Assign "3: Switching of SP No." to all of C- 10 to C- 12 in the function setup.

Input 3 (DI3) Input 2(DI2) Input 1(DI1) Selected SP

External contact input state

(2) When the number of SP values is set to 3 or 4 in function setup

OFF OFF OFF SP-0

OFF OFF ON SP-1

OFF ON OFF SP-2

OFF ON ON SP-3

ON OFF OFF SP-4

ON OFF ON SP-5

ON ON OFF SP-6

ON ON ON SP-7

C-04

Assign "3: Switching of SP No." to two of C- 10 to C- 12 in the function setup.

External contact input pair

External contact input state

Input 2 (DI2) Input 1 (DI1)

Input 3 (DI3) Input 1 (DI1)

Input 3 (DI3) Input 2 (DI2)

OFF OFF SP-0

OFF ON SP-1

ON OFF SP-2

ON ON SP-3

Selected SP

C-04

(3) When the number of SP values is set to 2 in function setup

External contact input state

Handling Precautions

•

When changing the SP number by external contact input, the and keys cannot be used (but the SP value can be changed).

C-04

Assign "3: Switching of SP No." to one of C- 10 to C- 12 in the function setup.

Input 1 to 3 (DI1 to DI3) Selected SP

OFF SP-0

ON SP-1

4-7

Chapter 4. BASIC OPERATION

Flow rate setup by external 3-way switching input (Advanced use)



When "2: Switching of SP No." is assigned at external 3-way switching function

in the function setup, three SP values (

C-09

the external 3-way switching input as described in the table below.

External 3-way switching input state Selected SP

OPEN SP-0

0 V SP-1

5 V SP-2

SP-0

Handling Precautions

•

When the SP No. is switched by the external 3-way switching input, you cannot switch the SP No. using or keys, though you can switch the SP value.

) can be changed with

SP-2

4-8

Analog flow rate setup



Chapter 4. BASIC OPERATION

The SP value (flow set value) can be changed by analog voltage by selecting analog setting as the flow rate setting method in function setup

. For details on how

C-03

to set up the function, Chapter 5. ADVANCED OPERATION.

The setup voltage/current range can be selected in the input range selection for analog setup (

in the function setup).

C-05

The selection of voltage input/current input is linked automatically with the settings for analog output type and range selection (

in the function setup). For

C-06

example, when current output is selected as analog output type and range selection in

, the input type becomes current input type. Then, analog setup voltage/

C-06

current for SP value can be calculated by the equations below.

Function setup

C-05

0 Internal reference 0 to 5 V

1 External reference 0 to 5 V/

2 External reference 1 to 5 V/

* Internal reference 0 to 5 V input means that the 5 V-reference voltage input of connector pin No. 20 of this controller

is used and a voltage is input with the optional potentiometer (variable resistor with dial). In this case, no external power supply for setup is needed. The reference voltage (5 V) is not accurate, so to actually measure and calculate the reference voltage output from this controller, use a voltage tester for the setup voltage calculation.

Input voltage/current range Setup voltage/current equation

Setup voltage [V] = Setting flow rate ÷ Full-scale flow rate x

External reference 0 to 20 mA

External reference 4 to 20 mA

Reference output voltage

Setup current [mA] = Setting flow rate ÷ Full-scale flow rate x 20

Setup voltage [V] = Setting flow rate ÷ Full-scale flow rate x 5

Setup current [mA] = Setting flow rate ÷ Full-scale flow rate x 20

Setup voltage [V] = Setting flow rate ÷ Full-scale flow rate x 4 + 1

Setup current [mA] = Setting flow rate ÷ Full-scale flow rate x 16 + 4

Note (Advanced use)

•

When "1: Function enabled" is selected for analog optional scaling function

in the function setup, the full scale flow rate can be changed to a

C-28

desired level during analog setup. In this case, the full-scale flow rate of the analog flow rate output voltage/current (PV output voltage/current) is also changed as it is linked with the above flow rate. The scaling flow rate is set in the parameter setup mode. For details on how to set up functions, Chapter 5. ADVANCED

OPERATION.

4-9

Chapter 4. BASIC OPERATION

(2 s or more)

(less than 2 s)

4 - 3 Selecting the Operating Mode

Operating mode selection



Three kinds of valve operating modes are provided, "control mode," "fully closed mode," and "fully open mode."

The factory setting is the control mode. The operating mode can be forcibly changed to "fully closed mode" (valve is fully closed) or "fully open mode" (valve is fully open).

As shown in the diagram below, the mode is changed alternately between the control mode and fully closed mode every time the RUN key is pressed.

Additionally, to change the mode from the control mode to the fully open mode, keep the RUN key pressed for 2 seconds or longer.

Control mode

Operating mode display



Operation mode 7-segment display OK lamp Remarks

Fully closed mode

Control mode

Fully open mode

RUN key

Fully closed mode

RUN key

Fully open mode

RUN key (less than 2 s)

RUN key

RUN key (2 s or more)

The operating mode is shown on the 7-segment display during instantaneous flow rate display. Additionally, the OK lamp blinks in the fully open mode.

Out

Out or lit

Full

Note (Advanced use, Selecting the operating mode through external input)

•

When "operating mode change (5, 6, or 8)" is selected for external contact

Blinking

is always displayed after checking that the flow

OFF

rate is zero (0).

is displayed for approximately 1 second when

the mode changes to the control mode.

is displayed for approximately 1 second when

Full

the mode transits to the fully open mode.

input function assignment C- 10 to C- 12 in the function setup, the operating mode can be changed through external contact input.

4-10

•

When "operating mode change (1, or 5)" is selected for external 3-way switching input function assignment

in the function setup, the

C-09

operating mode can be changed through the external 3-way switching input. For details on how to set up functions, Chapter 5. ADVANCED

OPERATION.

Handling Precautions

•

When "0: RUN key disabled" is selected for " operating mode selection when power turned ON" in the function setup, the operating mode is not changed even though the RUN key is pressed.

•

When "operating mode change (5, 6, or 8)" is selected for external contact input function assignment C- 10 to C- 12 in the function setup, changes by external contact take precedence over RUN key operation. In the same manner, when "operating mode change (1 or 5)" is selected for external 3-way switching function input takes precedence over the RUN key operation.

•

The fully open mode cannot directly be changed to the control mode. To make the change, press the RUN key to change the fully open mode to the fully closed mode. After that, press the RUN key again to change the fully closed mode to the control mode.

Chapter 4. BASIC OPERATION

: RUN key operation and

C-02

in the function setup, the external 3-way switching

C-09

4-11

Valve amperage display

Basic operation Advanced operation

DISP key

Chapter 5. ADVANCED OPERATION

The advanced operation provides three kinds of modes, "Function setup mode," "Parameter setup mode," and "Controller information display mode."

Setup mode transition operation



Normally, when the power is turned ON, the instantaneous flow rate is displayed in the basic operation mode.

When keys are operated as described in the diagram below during instantaneous flow rate display, the operation changes to the specified mode.

When the operating mode changes to "Function setup mode" or "Parameter setup mode," the specified setup can be changed.

In the "Device information display mode," you can check the statuses of major setup items (gas type, full scale flow rate, reference temperature, and communications address).

Power ON

DISP key

Instantaneous ow rate display

DISP key

Flow set value display

DISP key

Totalized ow display

DISP key

key + ENT key (3 s or more)

key (3 s or more)

Function setup mode

Parameter setup mode

Device information display mode

5-1

Chapter 5. ADVANCED OPERATION

Valve amperage display

Basic operation Advanced operation

DISP key

5 - 1 Functions

This section describes how to set up functions.

Instantaneous ow rate display

DISP key

Flow set value display

DISP key

Totalized ow display

DISP key

Setup method



Follow the procedure below to set functions such as event output type and external contact input assignments:

Power ON

DISP key

key + ENT key (3 s or more)

key (3 s or more)

Function setup mode

Parameter setup mode

Device information display mode

(1) Press the DISP key several times to display the instantaneous flow rate.

>> The PV and L/min lamps light (mL/min in MQV9005/9020/9200).

(2) Hold down the

and the ENT keys for three seconds or more.

>> Item C-0 1 is displayed on the 7-segment display and mode changes to the

function setup mode.

(3) Press the

or key to select the desired setup item number, and then press the

ENT key.

>> The current setting value blinks on the 7-segment display.

(4) Press the

or  key to select the desired setting.

(5) When you have selected the desired setting, press the ENT key to enter the

setting.

>> The setting value is updated. (At this point, the setting value is saved.)

(6) If you want to set up other items, return to step (3) and repeat the procedure.

Otherwise, proceed to step (7).

(7) Press the DISP key.

>> The function setup mode changes to the instantaneous flow rate display.

Handling Precautions

•

If you do not press any keys for one minute after entering the function setup mode, the display automatically returns to the instantaneous flow rate display.

•

If you press the DISP key without pressing the ENT key after carrying out the

5-2

operation in step (4), the setting remains at the previous value without being updated.

Function setup items



Chapter 5. ADVANCED OPERATION

The following table shows the function setup items:

Display Item Item Description Setup Item and Description

C-01

C-02

C-03

C-04

C-05

Key lock 0: Key lock disabled

1: Settings other than flow rate

setting (SP) are key-locked

2: All settings are key-locked

RUN key operation and operation mode selection when power turned ON

Flow rate setup method

(SP setup method selection)

Number of flow set value (number of SPs selection)

Input range selection of

*2, *3

analog setup (analog SP input range selection)

0: RUN key disabled (Operation

starts in the control mode when the power is turned ON)

1: RUN key enabled (1)

(Operation is started up in the operating mode used before power shutdown when the power is turned ON)

2: RUN key enabled (2)

(Operation is started up in the fully closed mode when the power is turned ON)

0: Digital setup (set

by key operation or communications)

1: Analog setup (set by external

analog input voltage)

0: Number of SPs = 1

(SP-0 only)

1: Number of SPs = 2

(SP-0, SP-1)

2: Number of SPs = 3

(SP-0 to SP-2)

3: Number of SPs = 4

(SP-0 to SP-3)

4: Number of SPs = 5

(SP-0 to SP-4)

5: Number of SPs = 6

(SP-0 to SP-5)

6: Number of SPs = 7

(SP-0 to SP-6)

7: Number of SPs = 8

(SP-0 to SP-7)

(1) Analog output selection is

set at voltage output (C-06 = 0, 1, 4, or 5).

0: 0 to 5 V internal reference

input

1: 0 to 5 V external reference

input

2: 1 to 5 V external reference

input

(2) Analog output selection is

set at current output (C-06 = 2, 3, 6, or 7)

0: 0 to 20 mA external reference

input

1: 0 to 20 mA external reference

input

2: 4 to 20 mA external reference

input

Factory Setting

0 The key lock can be cancelled even

while it is enabled. When an attempt is made to change a key-locked setting, LOc. is indicated on the display.

1 Determines whether or not the

operating mode is changed (fully closed/control/fully open) by the RUN key. Additionally, the operating mode at power ON can be selected. For how to select the operating mode:

4 - 3 Selecting the Operating

Mode (P.4-10).

0 How to switch the SP number using

external contact input and external 3-way switching input:

Multi-setup (P.4-5).

1 Internal reference 0 to 5 V input is

the setting to use the 5 V-reference voltage from this device when inputting a voltage with the optional potentiometer (variable change resistor with dial). Using this method, no external power supply for setup is needed. The voltage input/current input is automatically selected as it is linked with the set value of C-06:

Table in Note *2 (P.5-9).

Remarks

5-3

Chapter 5. ADVANCED OPERATION

Display Item Item Description Setup Item and Description

C-06

Analog output type and range

*2, *3

selection

0: 0 to 5 V instantaneous flow

rate output

1: 1 to 5 V instantaneous flow

rate output

2: 0 to 20 mA instantaneous

flow rate output

3: 4 to 20 mA instantaneous

flow rate output

4: 0 to 5 V setting flow rate

output

5: 1 to 5 V setting flow rate

output

6: 0 to 20 mA setting flow rate

output

7: 4 to 20 mA setting flow rate

output

C-07

C-08

Event output 1 type assignment

Event output 2 type assignment

0: Not used (OFF at all times)

1: ON when the totalized flow

event occurs

2: Totalized pulse output

3: ON when the flow rate is OK

4: ON in control mode

5: ON in fully open mode

6: ON in control or fully open

mode

7: ON in fully closed mode

8: PV upper limit event

9: PV lower limit event 1

10: PV lower limit event 2

-1 to -10: Inverse output of above 1 to 10 (Normal operation: ON, Event occurrence: OFF)

C-09

External 3-way switching function

0: Not used

1: Switching of operating mode 1

2: Switching of SP No.

3: Switching of totalizing

operation

4: Switching of analog I/O

voltage range (simultaneous external switching of C-05 and C-06)

5: Switching of operating mode 2

Factory

Setting

Remarks

0 The scale can also be changed to the

desired flow rate range.

For details,

C-28 (Optional

analog scaling function)(P.5-8).

0 The event output delay time is set

in the parameter setup mode ( P.5-11).

Note, however, that delay cannot be set for totalizer pulse output.

9: Events are output even in fully

closed operation mode.

10: Events are not output in fully

closed operation mode.

-1 to -10: OFF at all times during power shutoff

0 External inputs OPEN/GND/5V are

switched as shown below.

1: Control/fully closed/fully open

2: SP-0/SP-1/SP-2

3: Continue count/reset count/stop

count

4: See the table in note

(page 5-10).

0 to 5 V/0 to 5 V/1 to 5 V

5: Fully closed/control/fully open

5-4

Chapter 5. ADVANCED OPERATION

Display Item Item Description Setup Item and Description

C-10

C-11

C-12

C-13

C-14

C-15

External contact 1 input function assignment (2-way switching)

External contact 2 input function assignment (2-way switching)

External contact 3 input function assignment (2-way switching)

Automatic valve shut-off when the totalized flow event occurs

On/off of totalized flow reset function at start of control

Flow rate alarm setup type

0: Not used

1: Reset totalized flow count

2: Stop totalizing flow count

3: Switching of SP No.

4: Switching of instantaneous

flow rate setup method

5: Valve forced fully closed

6: Valve forced fully open

7: Switching of slow start

operation or switching of instantaneous SP ramp control operation

8: Switching of operating mode

(control by contact ON, forced fully closed by contact OFF)

9: Flow rate zero adjustment

10: Switching of gas type setup

11: Switching of flow rate range

12: Switching of SP ramp

13: Alarm reset

0: Function disabled

1: Function enabled

0: Function disabled

1: Function enabled

0: Function disabled

1: Only upper limit alarm used

2: Only lower limit alarm used

3: Upper / lower limit alarm

used

Factory Setting

0 3: For details on how to switch three

or more SP Nos., setup (number of SPs in function setup C-04 is 2 to 8) (P.4-5).

4: The C-03 (analog/digital) setting is

shown when the contact is ON.

7: “Slow start ON” must be selected in

0 When the totalized flow count

0 When control is resumed from the

3 Set the alarm flow rate in the

C-1 7 (Slow start when the contact is ON). Similarly, in case of SP ramp control, "SP ramp control 1 or 2" must be selected in C-27. (Ramp control when the contact is ON.)

5, 6, 8: If the forced fully closed and

fully open are input from two sources at the same time, both inputs become invalid.

9: Set the operation mode to full close

or set the flow rate to zero and perform the contact ON operation for a minimum of 10 seconds.

(P.6-3).

10: C-18 becomes active by contact

OFF and C-26 becomes active by contact ON.

11: C-24 becomes active by contact

OFF and C-25 becomes active by contact ON.

12: Parameter setup ramp 1 is

selected when the contact is OFF. Ramp 2 is selected when the contact is ON.

13: All alarm detections are cancelled

while the contact ON is being continued.

reaches the totalized flow event setting, the valve is closed fully.

This totalized flow event preset value can be set in the parameter setup mode.

5 - 2 Parameters (P.5-11).

fully closed operating mode, the totalized flow count is automatically reset.

parameter setup mode.

5 - 2 Parameters (P.5-11).

Remarks

z Multi-

z Flow rate zero adjustment

5-5

Chapter 5. ADVANCED OPERATION

Display Item Item Description Setup Item and Description

C-16

Operation selection at alarm occurrence

0: Control continued and alarm

output OFF anytime (alarm ignored)

1: Control continued and alarm

output ON

2: Forced fully closed and alarm

output ON

3: Forced fully open and alarm

output ON

-1: Control continued and alarm output ON

-2: Forced fully closed and alarm output ON

-3: Forced fully open and alarm output ON

C-1 7

Slow start setup

0: Slow start disabled

1 to 8: Slow start enabled

(equivalent to approx. 1 to 6 seconds settling time)

C-18

Gas type selection 10: Conversion factor for each gas

type set by the user 1: Air, nitrogen. 2: Oxygen 3: Argon 4: Carbon dioxide (CO

)

5: Natural gas 13A (LNG)(1)

(Heating value: 46 MJ/m

6: 100 % propane 7: 100 % methane 8: 100 % butane 11: Natural gas 13A (LNG)(2)

(Heating value: 45 MJ/m

C-19

Temperature at reference conditions

0: 20 ˚C, 1 atmosphere 1: 0 ˚C, 1 atmosphere 2: 25 ˚C, 1 atmosphere 3: 35 ˚C, 1 atmosphere

C-20

Valve amperage alarm setup

0: Valve amperage alarm

disabled

1: Only upper limit alarm

enabled

2: Only lower limit alarm

enabled

3: Upper / lower limit alarm

enabled

C-21

Direct setup function

0: Function disabled

1: Function enabled

Factory

Setting

Remarks

1 Alarm code displays even if “0” is

selected.

-1 to -3: Output logic 1 to 3 is inverted (ON at all times). (However, they are turned OFF at all times during power shutoff.)

0 Slow start is used when the external

contact input turns ON when slow start operation switching is selected at C-10 to C-12.

(See

Remarks)

An initial gas type is set at the factory.

If the flow rate range changes due to a change in the gas type, the flow rate OK range and flow rate alarm range in the parameter setup must be changed.

)

When “0” is selected, set the conversion factor (CF) in the parameter setup mode.

5 - 2 Parameters (P.5-11).

)

If “10” is selected for any of C-10 to C-12 (external contact input function assignment) and only when an objective contact is turned ON, the gas type is the one selected by C- 26 (gas type selection 2).

2: Selectable only on the oxygen

model

0 Set up the alarm current value in the

parameter setup.

5 - 2 Parameters (P.5-11).

0 SP value being changed (flashing) is

used for control.

5-6

Chapter 5. ADVANCED OPERATION

Display Item Item Description Setup Item and Description

C-22

C-23

Control dead zone setting

PV filter (process for filtering of instantaneous flowrate)

0: Function disabled 1: Function enabled

0: Without filter

1: Two samplings moving

average

2: Four samplings moving

average

3: Eight samplings moving

average

C-24

C-25

Flow rate range setup 1

Flow rate range setup 2

0: Standard range

10 to 99: 10 % to 99 % of

standard range. (When calculating the range reduction, the value is cut off at the least significant digit.)

-10 to -99: 10 % to 99 % of standard range. (When calculating the range reduction, the value is not cut off at the least significant digit.)

C-26

Gas type selection 20: Conversion factor for each gas

type set by the user

1: Air, nitrogen

2: Oxygen

3: Argon

4: Carbon dioxide (CO

)

5: Natural gas 13A (LNG) (1)

(Heating value: 46 MJ/m

6: 100 % propane

7: 100 % methane

8: 100 % butane

11: Natural gas 13A (LNG) (2)

(Heating value: 45 MJ/m

Factory Setting

Remarks

0 Valve operation stops while the

control flow rate is within the OK judgment range.

The OK judgment range can be set in the parameter setup mode.

5 - 2 Parameters (P.5-11).

0 If the PV filter is used at a "2" or "3"

setting, the operational differential pressure must be lower than the standard differential pressure.

Do not change the setting while control is in progress.

0 The setup and display resolution

levels can be improved by reducing the flow rate range.

5 - 4 Flow Rate Range Change Function and Settings and Display Resolutions After Change of Range (P.5-17) for details. If a value of 10 to 99 is set, the value is cut off at the least significant digit when calculating the range reduction. Example: Standard range = 30.0 L/min. and range setup = 67 Calculation formula:

30.0 x 0.67 = 20.1 → Since the value is cut off at the least significant digit, the flow rate range becomes 20.0 L/min.

The range selected by C-25 becomes active if "11" is selected for assignments C-10 to C-12 (external contact input function assignment) and only when the objective contact is turned ON. However, the range selected by C-24 becomes active otherwise.

(See

Remarks)

The gas type of the model number is factory set.

This setting is valid only when "10: Switching of gas type setup" is selected at external contact input function assignment, for any of C-10 to C-12.

the Remarks column for C-10 to

)

C-12 and C-18 for details. (P.5-5, P.5-6)

)

5-7

Chapter 5. ADVANCED OPERATION

Display Item Item Description Setup Item and Description

C-27

SP ramp control function

0: Function disabled

1: SP ramp control 1.

(In SP ramp-up: ramp 1, in SP ramp-down: ramp 2)

2: SP ramp control 2.

(In external contact OFF: ramp 1, in external contact ON: ramp

C-28

C-29

Optional analog scaling function

Forced PV (instantaneous flow rate) zero

0: Function disabled

1: Function enabled

0: Function disabled

1: Function enabled

function

C-30

Communications address setting

0: Communications function

disabled

1 to 127: Communications

address

C-31

Transfer speed selection

0: 38400 bps

1: 19200 bps

2: 9600 bps

3: 4800 bps

4: 2400 bps

C-32

Data format selection

0: 8 data bits, even parity, 1 stop

bit

1: 8 data bits, no parity, 2 stop

bits

C-35

SP limit function 0: SP limit function disabled

1: Only upper limit enabled

2: Only lower limit enabled

3: Upper and lower limits

enabled

Factory

Setting

Remarks

0 The SP change ramp level (the rate of

change per second) can be set to a constant value for control startup and setting flow rate changed.

Setting of ramps 1 and 2 is done in parameter setup mode.

5 - 2 Parameters (P.5-11)

for details.

In case of SP ramp control 2, the operation is performed by ramp 2 when “12” is selected in either one of C-10 to C-12 (external contact input function assignment) and also when the target contact is ON, but otherwise operation is performed by ramp 1. If "7" is selected anywhere in C-10 to C-12, SP ramp control is performed only when the target contact is ON.

0 The flow rate at analog input / output

100 % (5 V) can be optionally set. The flow rate is set in parameter setup mode.

5 - 2 Parameters (P.5-11).

0 Instantaneous flow rate is made zero

forcibly after the flow rate is set to zero or the mode is changed to valve forced fully closed mode and delay time has elapsed. Instantaneous flow rate variation in zero position caused by the inclination of pipe is neglected. Delay time is set in parameter setup mode.

5 - 2 Parameters (P.5-11).

0 The upper and lower limit values of

the flow rate setup range can be set to desired levels.

Upper and lower limits are set in parameter setup mode.

5 - 2 Parameters (P.5-11).

5-8

Chapter 5. ADVANCED OPERATION

Display Item Item Description Setup Item and Description

C-36

Operational differential

pressure setting (control optimization)

0: Low differential pressure

(50 ± 50 kPa)

1: Standard differential pressure

(200 ± 100 kPa)

2: High differential pressure

(300+0, -100 kPa)

C-37

Flow rate display unit change

function

0: Flow rate is displayed in the

standard flow rate unit.

1: Flow rate is displayed in

[L/min] at all times.

-1: Flow rate is displayed in [mL/min] at all times.

C-38

PV (instantaneous flow rate) display decimal point position change function

0: Decimal point position is not

changed

1: Decimal point position is

shifted one digit left

-1: Decimal point position is shifted one digit right

Factory Setting

Remarks

1 When the setting corresponds to the

actual operating differential pressure, control can be optimized. (When "0" is set, the control response speed becomes fast. When "2" is set, the control response speed becomes slow.)

0 0: When the flow rate range or

gas type is changed, the unit is automatically changed to the display unit so that the range after change becomes the maximum resolution.

1: A value less than 0.001[L/min] is

not displayed

0 The decimal point position of the SP

display is not changed. 1: When the standard decimal point

position is the 4th digit (0.xxx), the function is invalid even though this setting is selected. If the flow rate exceeds the display range, a dash is displayed for all digits (----).

-1: When the standard flow rate display does not have a decimal point, it is invalid even though this function is selected.

*1. When "4: flow rate setting method switching" is selected in the external contact inputs c-10 to c-12 in the function

setup, switching according to external input takes precedence.

*2. According to the settings in c-05 and c-06, the analog input and output ranges are changed as shown in the table

below.

Settings in C-06

0 1 2

0 to 5 V internal reference input/ 0 to 5

V instantaneous flow rate output

0 to 5 V internal reference input/ 1 to 5

V instantaneous flow rate output

0 to 20 mA external reference input/ 0 to 20

mA instantaneous flow rate

output

0 to 20 mA external reference input/ 4 to 20

mA instantaneous flow rate

output

0 to 5 V internal reference input/ 0 to 5

V setting flow rate output

0 to 5 V internal reference input/ 1 to 5

V setting flow rate output

0 to 20 mA external reference input/ 0 to 20

mA setting flow rate output

0 to 20 mA external reference input/ 4 to 20 mA setting flow rate output

Settings in function setup C-05

0 to 5 V external reference input/ 0 to 5 V instantaneous flow rate output

0 to 5 V external reference input/ 1 to 5 V instantaneous flow rate output

0 to 20 mA external reference input/ 0 to 20 mA instantaneous flow rate output

0 to 20 mA external reference input/ 4 to 20 mA instantaneous flow rate output

0 to 5 V external reference input/ 0 to 5 V setting flow rate output

0 to 5 V external reference input/ 1 to 5 V setting flow rate output

0 to 20 mA external reference input/ 0 to 20 mA setting flow rate output

0 to 20 mA external reference input/ 4 to 20 mA setting flow rate output

1 to 5 V external reference input/ 0 to 5 V instantaneous flow rate output

1 to 5 V external reference input/ 1 to 5 V instantaneous flow rate output

4 to 20 mA external reference input/ 0 to 20 mA instantaneous flow rate output

4 to 20 mA external reference input/ 4 to 20 mA instantaneous flow rate output

1 to 5 V external reference input/ 0 to 5 V setting flow rate output

1 to 5 V external reference input/ 1 to 5 V setting flow rate output

4 to 20 mA external reference input/ 0 to 20 mA setting flow rate output

4 to 20 mA external reference input/ 4 to 20 mA setting flow rate output

5-9

Chapter 5. ADVANCED OPERATION

*3. When "4: Switching of analog I/O voltage range" is selected for external 3-way switching function assignment c-09 in

the function setup, external 3-way switching input takes precedence over others. Additionally, the analog input and output ranges change as shown in the table below according to the input status and the setting status of c-06.

Settings

in C-06

0 0 to 5 V internal reference input/

0 to 5 V instantaneous flow rate

output

2 0 to 20 mA external reference

input/

0 to 20 mA instantaneous flow rate output

4 0 to 5 V internal reference input/

0 to 5 V setting flow rate output

6 0 to 20 mA external reference

input/

0 to 20 mA setting flow rate output

*4. This setting can be made only for models with RS-485 communications.

*5. This setting cannot be made for the MQV0050 (J, K).

*6. This setting can be made only for the MQV9200/9500/0002/0005.

*7. The SP display on the main unit shows the final SP that was reached. This setting is also valid if C-03, “Flow rate setup

method selection” is set to “1: Analog setup (by external analog input voltage).”

OPEN 0 V 5 V

External 3-way switching input state