Azbil MQV9020, MQV0050, MQV9050, MQV9500, MQV0200 User Manual

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Digital Mass Flow Controller

for Hydrogen and Helium Gases

Model MQV9020/9050/9500/0005/

0010/0050/0200

User’s Manual

No. CP-SP-1205E

Thank you for purchasing an Azbil Corporation product.

This manual contains information for ensuring the correct use of this product. It also provides necessary information for installation, maintenance, and troubleshooting.

This manual should be read by those who design and maintain equipment that uses this product. Be sure to keep this manual nearby for handy reference.

Please read “Terms and Conditions” from the following URL before ordering and use.

https://www.azbil.com/products/factory/order.html

NOTICE

Be sure that the user receives this manual before the product is used.

Copying or duplicating this user’s manual in part or in whole is forbidden. The information and specifications in this manual are subject to change without notice.

Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions. If you should find an error or omission, please contact the azbil Group.

In no event is Azbil Corporation liable to anyone for any indirect, special or consequential damages as a result of using this product.

Micro Flow Japan.

TM,

μF

and μF sensorTM are trademarks of Azbil Corporation in

Conventions Used in This Manual

 The safety precautions explained in the following section aim to prevent injury to the operator

and others, and to prevent property damage.

WARNING

CAUTION

 In describing the product, this manual uses the icons and conventions listed below.

Use caution when handling the product.

The indicated action is prohibited.

Be sure to follow the indicated instructions.

Handling Precautions

Handling Precautions indicate items that the user should pay attention to when handling this device.

Note

(1), (2), (3): Numbers within parentheses indicate steps in a sequence or parts of an

OFF

Notes indicate information that might benefit the user.

This indicates the item or page that the user is requested to refer to.

explanation.

This font indicates what is shown on the 7-segment display.

Warnings are indicated when mishandling this product might result in death or serious injury.

Cautions are indicated when mishandling this product might result in minor injury to the user, or only physical damage to the product.

[OK] indicator This is an LED indicator on the display.

[RUN] key This is an operation key.

>>: Indicates the result of an operation or the status after the operation.

Safety Precautions

WARNING

Never allow gases that are within explosion limits (in particular, mixed gases within explosion limits that contain hydrogen) to pass through this device. Doing so might result in an explosion accidents.

When using this device for gases that contain hydrogen, be sure to purge the device with an inert gas (such as nitrogen or argon) before use. Use without purging may cause an explosion.

CAUTION

Check the product connections and pipe connections for leakage before use. Also, check the connections for leakage regularly after the start of use. It is the user’s responsibility to ensure that gas leaks can be reliably detected. This is especially important if a dangerous gas is used.

If the device is used for burner air-fuel ratio control, take the necessary countermeasures with the equipment to prevent the occurrence of backfire and to avoid any influence to the device even if backfire occurs. Pressure increase or fire in the pipes caused by the backfire of the burner could damage the controller.

This device is exclusively for hydrogen and helium gases. It cannot be used for control or measurement of gases other than hydrogen, helium, and hydrogenhelium mixtures (excluding mixed gases within explosion limits). Oxygen cannot be measured even if gas-contacting sections of this device are oil-inhibited.

To use any gas that includes hydrogen, before use be sure to fill the flow path completely with the actual gas and check that the zero point is correct when the actual flow rate is stable at zero. If the zero point is not correct, execute flow rate zero calibration.

This device is set initially for hydrogen gas use at the factory. To use it for helium gas or mixed gases, change the gas type setting. The use of this device for helium or mixed gases without changing the gas type setting will result in a measurement error.

Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur. If there is a possibility of foreign matter entering the device, provide a filter, strainer or mist trap capable of eliminating foreign matter 0.1 μm or greater in diameter at the upstream. Be sure to inspect and replace the filter at regular intervals.

CAUTION

Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it.

Do not subject this device to pressure above its pressure resistance. Doing so might damage it.

The valve on this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately. When the external valve is closed, it is necessary also to fully close the valve of the device using either of the following methods:

• Set the flow rate setpoint to zero.

• Make the valve operation mode to fully closed. If this valve remains in normal control status when the external shutoff valve is closed (zero flow rate), there will be an excessively large flow as soon as the external shutoff valve is opened. This excessive flow rate could activate the AL83 alarm (operated by the sensor safety circuit). If the sensor safety circuit is activated, flow rate measurement and flow control are not possible until the power is turned off and back on again.

If damage could result from the abnormal functioning of this device, include appropriate redundancy in the system design.

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When separately purchasing a connecting joint, use the following made by Swagelok Co., Ltd:

1/4” Swagelok: SS-400-1-6STSC11 1/4” VCR: SS-4-VCR-1-00032SC11

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

When installing joints (UNF connections), secure the lower part of the main unit in a vise or the like gripped between rags to protect the finished surfaces, and turn the joint to tighten. The device may be damaged if the lower main unit is not secured.

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

iii

CAUTION

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure.

When using a relay for external contact input and/or external 3-way switching input, always use a relay designed for micro-current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

If there is a risk of a power surge caused by lightning, use Azbil Corporation’s SurgeNon to prevent possible fire or equipment failure.

Gas type switching by external contact input, flow rate switching, and analog input/output voltage range switching by external 3-way input switching should be done only after setting the operation mode to fully closed. Switching while controlling could cause large fluctuations.

Be sure to check that the wiring is correct before turning the power on. Incorrect wiring could cause damage or malfunction.

Do not apply excessive force to cables or connectors when connector cables or the AC adapter is attached. Excessive force may damage the connectors or circuit board.

Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver. Doing so might damage the console.

When discarding the device, dispose of it as industrial waste, following local regulations.

The Role of This Manual

A total of 2 different manuals are available for the MQV. Read them as necessary for your specific requirements. If a manual you require is not available, contact the azbil Group or its dealer.

Digital Mass Flow Controller for Hydrogen and Helium Gases Model MQV9020/9050/9500/0005/0010/0050/0200 User’s Manual Manual No. CP-SP-1205E

This manual. Personnel who are using the MQV digital mass flow controller (for hydrogen and helium gases) for the first time or who are in charge of hardware design and/or maintenance of equipment containing the MQV should read this manual thoroughly. This manual gives an overview of the product, describes installation, wiring, operation, maintenance, and troubleshooting, and gives hardware specifications.

Digital Mass Flow Controller MQV9005/9020/9050/9200/ 9500/0002/0005/0010/0020/0050/0100/0200/0500 User’s Manual for Communication Functions Manual No. CP-SP-1197E

Personnel who use this device’s communications functions should read this manual. The manual gives an overview of communications, describes wiring, transmission protocols, communications data, and troubleshooting, and gives communications specifications.

Organization of the Manual

This manual is organized as follows.

Chapter 1. INTRODUCTION

This chapter briefly describes this device and its features, and gives a model selection guide.

Chapter 2. NAMES AND FUNCTIONS OF PARTS

This chapter describes the names and functions of this device’s parts.

Chapter 3. MOUNTING AND WIRING

This chapter describes installation, mounting, wiring and initial settings of this device.

Chapter 4. BASIC OPERATION

This chapter gives the basis of how to operate this device.

Chapter 5. ADVANCED OPERATION

This chapter describes how to set functions, parameters, device information display, and flow rate range.

Chapter 6. TROUBLESHOOTING

This chapter describes how to investigate and remedy trouble that may occur during operation of this device.

Chapter 7. SPECIFICATIONS

This chapter describes the device’s specifications and external dimensions.

Conventions Used in This Manual Safety Precautions The Role of This Manual Organization of the Manual Contents

Chapter 1. INTRODUCTION

 Introduction  Features 1-1  Functions 1-2  Model selection guide 1-7  Basic operation and advanced operation 1-8

1-1

Chapter 2. NAMES AND FUNCTIONS OF PARTS 2-1

 Display

2-1

Chapter 3. MOUNTING AND WIRING 3-1

 Mounting  Piping 3-7  Wiring 3-8

3-2

Chapter 4. BASIC OPERATION 4-1

4-1 Switching Displays

 Basic operation 4-1

4-2 Setting the Flow Rate 4-4

 Digital flow rate setup 4-5  Flow rate setup by external contact input (Advanced use) 4-7  Flow rate setup by external 3-way switching input (Advanced use) 4-8  Analog flow rate setup 4-9

4-3 Selecting the Operating Mode 4-10

 Operating mode selection 4-10  Operating mode display 4-10

4-1

Chapter 5. ADVANCED OPERATION 5-1

 Setup mode transition operation

5-1 Functions 5-2

 Setup method 5-2  Function setup items 5-3

5-1

vii

5-2 Parameters 5-12

 Parameter setup item list 5-13

5-3 Device Information Display 5-16

 Setup method 5-16  Device information display item 5-17

5-4 Flow Rate Range 5-18

 Setup resolution in the analog setup 5-19

Chapter 6. TROUBLESHOOTING 6-1

 Alarm code display  Troubleshooting guide 6-3

6-1

Chapter 7. SPECIFICATIONS 7-1

 Individual specifications  Korea Certification Mark 7-8  Gas type and control range 7-9  China RoHS 7-9  Relationship between differential pressure and flow rate (For

Hydrogen) 7-10

 Relationship between differential pressure and flow rate (For Helium) 7-11  Optional parts (sold separately) 7-12  External dimensions 7-13

7-1

viii

Chapter 1. INTRODUCTION

function)

 Introduction

MQV high performance, digital mass flow controllers with advanced functions have been developed for the general industrial application. They feature flow rate control with high speed and wide range ability. MQV controllers integrate three component technologies: the ultra quick response μF (Micro Flow) thermal flow sensor, made with proprietary Azbil Corporation technology, a proportional solenoid valve, and advanced actuator control technology. Integrating these technologies has achieved a high-speed control with low differential pressure.

Front cover for separate display (sold separately)

Separate display unit

MQV

Cable with dedicated connector (sold separately)

AC adapter (sold separately)

Potentiometer (sold separately) for setting ow rate For details see page 7-17.

Controller (e.g. SDC25/26)

24 V DC power supply (e.g. WN790A)

RS-485 device for models supporting optional RS-485 communications

 Features

Device Configuration

• High-speed controllability

Fast response of 300 ms or less* (500ms for the MQV9020/9050.) * Response time is the time required for the controlled flow rate to

reach ±2 % of the set value, starting from the fully closed state or from when the set value is changed during control.

• Low differential pressure operation MQV controllers can operate at a low differential pressure of 50kPa or less.

• Wide control range Wide control range of 1 to 100 % FS

• Wide product line-up There are two types of models, those with integrated display and those with separate display. On models with separate display, the

display unit can be detached to allow remote operation via the dedicated 2 m cable.

1-1

Chapter 1. INTRODUCTION

 Functions

• User-friendly Runs on a general-purpose 24 V DC power supply, and the MQV's internal power circuit and input/output circuits are isolated. When multiple MQV are driven through the analog inputs and outputs, as with a PLC, they can all use a common power supply even if the PLC's analog modules are not isolated by channel. Therefore, even without individual power supplies for each device, problems with one circuit do not affect adjacent ones. Also provided is a handy AC adapter (sold separately) for easy use in the laboratory.

• Display direction can be changed (models with integrated display only) The direction of the display can be rotated 180° to match the direction of the gas flow, in case it was mounted the other way.

• Improved design (models with separate display only) A front cover (sold separately) hides the mounting screws of the separate display on the panel surface and improves the appearance.

• Various additional functions The functions listed below are all standard.

All MQV models have the functions described below. For function setup,

•

Chapter 5. ADVANCED OPERATION

Multi-setup (function setup

C-04

)

Quickly switch to one of eight preset flow set value by key operation or external input. If “Switching of SP No.” is set to external 3-way switching input, up to three set values can be switched.

•

Gas type switching (function setup

C-18, C-26

)

The gas type to be used can be selected from the standard compatible gases by key operation. Additionally, two kinds of gas type settings can be changed by external contact input.

•

Gas type setup (function setup

C-18

)

The user can set gas type conversion factors for gases other than the standard compatible gases, and for mixed gases.

•

Control flow rate range setting (function setup

C-24, C-25

)

The control flow range can be changed to the desired range (10 to 100 % of the flow range at factory setting) in units of 1 % FS. The setup and display resolution levels can be improved by reducing the control flow range. Additionally, two kinds of control flow ranges can be switched through external contact input.

1-2

Chapter 1. INTRODUCTION

•

Direct setup (function setup

C-2 1

)

When changing the flow set value by key input, the controlled flow rate can follow the set value while changes are being made (the flow set value can be changed quickly). This function is useful when the user frequently changes set value, for example when adjusting the flow set value during a trial run.

•

SP ramp control (function setup

C-27

)

This function is used to set the set value change ramp amount (the rate of change per second) to a constant value for the start of control and for set value changes. With this function, the set value change ramp amount can be set more precisely than with the slow start function. Two different types of ramps can be set, and there are the following 2 control modes:

• SP ramp control 1

In SP ramp-up: Ramp 1 In SP ramp-down: Ramp 2

• SP ramp control 2

In external contact OFF: Ramp 1 In external contact ON: Ramp 2

•

SP limit (function setup

C-35

)

The lower and upper limits of the set value range can be set to desired levels. (This prevents mistaken high/low settings.)

•

Slow start (function setup

C-1 7

)

Sudden changes in the controlled flow rate, when control is started or when the set value is changed, can be suppressed. The control speed can be changed in eight stages within a range of about 1 to 6 seconds.

•

Flow rate totalization (function setup

C-09

C-12

) MQV9020/9050: in 1 mL units MQV9500: in 0.01 L units MQV0005: in 0.1 L units MQV0010/0050: in 1 L units MQV0200: in 0.01 m

units Integrated flow count can be up to eight digits long (to 99,999,999) for each unit. (Display alternates between first and last 4 digits.) The count can be reset by key operation or external contact input. Use of external contact input makes it possible to remotely operate the start, temporary stop, and reset of totalization. When resetting the integrated count by key operation, the count restarts automatically after it has been reset. On the other hand, when resetting with the external contact input (by contact ON), the count restarts when the contact is turned OFF.

1-3

Chapter 1. INTRODUCTION

•

Event lamp lighting/output (function setup

C-07, C-08

)

Two of the event types listed below can be selected. Output ON delay time can also be set (but delay cannot be set for totalizer pulse output).

•

Integrated flow event output (when the integrated flow event setting is exceeded.)

•

Totalized pulse output (pulse can be output for each totalizing flow display unit.)

•

OK output (the control flow rate is within the set value ± allowable range.)

•

Flow rate upper or lower limit output (output in comparison with optional upper or lower limit flow rate set value )

•

Output mode (The four modes — control / fully open / control or fully open / fully closed — can be identified and output.)

•

OK lamp ON/output (function setup

C-07, C-08

)

The OK lamp can be set to light when the control flow rate is within the set value ± allowable range. This function is very handy for verifying at a glance whether or not there is a proper response to a new set value after its value is changed. OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and including it in a sequence program.

•

PV filter (function setup

C-23

)

This function is used to average the detected instantaneous flow rates (control flow rates). It can also reduce the effect of slight pressure fluctuations.

•

Control dead band setup (prevention of valve operation) (function setup

)

C-22

This function is used to stop the valve from driving as long as the control flow rate is within the OK range. Additionally, the OK range (width of dead band) can be set to the desired level.

•

Valve amperage display (function setup

C-20

)

The electric current supplied to the valve can be displayed in units of 0.0 to 100.0 %. Additionally, use of the valve amperage alarm detection function makes it possible to detect an inlet pressure change or clogging of the piping at the outlet.

•

Gas type external switching (function setup C- 10 to C- 12, C-

18, C-26

)

Two preset types of gases (including one with a user-determined gas type conversion factor) can be switched by external contact input.

•

Control flow rate range external switching (function setup to C- 12,

C-24, C-25

)

C-10

Two preset control flow ranges can be switched by external contact input.

1-4

Chapter 1. INTRODUCTION

•

PV forced zero (function setup

C-29

)

This function forcibly sets the detected instantaneous flow rate to 0 (zero) after the delay time elapses when the flow rate setpoint has been set to 0 (zero) or the valve mode has been changed to fully closed. This function makes it possible to ignore the deviation of the instantaneous flow rate zero point caused by inclination of the piping or the like.

•

Flow rate display unit change (function setup

C-37

)

This function is used to change the flow rate display unit to L/ min or mL/min of the MQV9500/0005. When multiple devices are used side-by-side, this function can make the flow rate display units uniform.

•

PV display decimal point change (function setup

C-38

)

This function is used to shift the decimal point position of the instantaneous flow rate display one digit left or right. When multiple devices are used sideby- side, the number of digits after the decimal point of the flow rate display can be made uniform.

•

Valve forcibly open or close (function setup

C-02, C-09

to C- 12) This function is used to forcibly open or close the valve fully by key operation, external contact input, or external 3-way switching input.

•

Automatic shut-off (function setup C- 13, C- 16)

The valve can be shut off automatically under the following conditions: (1) When the totalized flow count reaches the preset value.

(2) When one of the alarms, including flow rate alarms, is triggered.

•

ALM (alarm) lamp ON/output/valve shut-off (function setup

C- 16, C-20

)

C-15

The alarm output can be set for high and low deviations in the flow set value and instantaneous flow rate. Additionally, an alarm judgment delay time can also be set. If a flow rate alarm occurs or if an alarm occurs during self diagnosis of this controller, the valve can be forced fully closed or opened.

Handling Precautions

•

The valve on this device cannot completely shut off.

•

If complete shut off is required, provide a shutoff valve separately.

•

Automatic reset of totalized flow at start of control function (function setup C- 14)

Start of control and reset of totalized flow count can be done simultaneously by a single action (by key or external switching input). Combining this function with the automatic shut-off function described above is handy for shutting the valve off in cases where a fixed totalized flow amount is counted repeatedly.

1-5

Chapter 1. INTRODUCTION

•

Analog scaling (function setup

C-28

)

This function is used to optionally change the flow rate (between 10% FS and 100 % FS) corresponding to 100 % FS analog input/ output (5 V or 20 mA).

•

Analog input (flow set value) range selection (function setup

C-05, C-09

)

In analog setup, the desired input range can be selected from those shown below either by key operation or by external 3-way switching input. When doing so, the voltage input and current input are selected automatically, as they are linked with the settings of function setup when the voltage output (0 to 5 V or 1 to 5 V) is selected in

(analog output type selection). For example,

C-06

the voltage input is selected automatically. Likewise, when the current output (0 to 20 mA or 4 to 20 mA output) is selected, the current input is selected automatically.

(1) Internal reference 0 to 5 V input*/External reference 0 to 20mA input (2) External reference 0 to 5 V input/External reference 0 to 20mA input (3) External reference 1 to 5 V input/External reference 4 to 20mA input

* 0–5 V internal-reference is used when the 5 V output termi-

nal (pin No. 20) of this controller is used as the reference.

•

Analog output type/range selection (function setup

C-06, C-09

Output can be set either to instantaneous flow rate (PV) or flow set value (SP). Furthermore, a voltage/current output range can be selected from (1) to (4) shown below by key operation. Additionally, (1)/(2) or (3)/(4) can be changed through the external 3-way switching input. (Combinations are switched because of linkage with the analog input range selection.)

Instantaneous flow rate (PV) output Flow set value (SP) output

(1) 0 to 5 V output (1) 0 to 5 V output (2) 1 to 5 V output (2) 1 to 5 V output (3) 0 to 20 mA output (3) 0 to 20 mA output (4) 4 to 20 mA output (4) 4 to 20 mA output

)

1-6

Chapter 1. INTRODUCTION

 Model selection guide

z MQV9020/9050

Basic

model

Nos.

Standard con-

trol flowrate

ange

Display

Material of

gas-contact-

ing parts

Connection

method

MQV Digital mass flow controller

9020 0.2–20.0 mL/min (standard) 9050 0.4–50.0 mL/min (standard)

B C

S SUS316

S 1/4" Swagelok

V 1/4" VCR

z MQV9500/0005/0010/0050/0200

Basic

Standard con-

model

trol flowrate

Nos.

ange

MQV Digital mass-flow controller

9500 0.004–0.500 L/min (standard) 0005 0.04–5.00 L/min (standard) 0010 0.10–10.00 L/min (standard) 0050 0.4–50.0 L/min (standard) 0200 2–200 L/min (standard)

Notes: *1. The unit L/min (standard) indicates the volumetric flow rate per minute converted to 20 °C, 101.325 kPa (one

*2. This device is set initially for hydrogen gas use at the factory. It can be used for helium gas by changing the gas

atmosphere). The reference temperature can also be changed to 0 °C, 25 °C and 35 °C.

type setting.

Display

B C

Material of

gas-contact-

ing parts

Connection

method

S SUS316

R Rc 1/4"

S 1/4" Swagelok V 1/4" VCR U 9/16-18UNF

Gas

type

Optional

functions

1 2 3 4 5

Appended

No.

Description

Integrated display (body length: 90 mm) Seprate display (body length: 90 mm)

H Hydrogen

0 Without optional functions

0 Without optional functions 1

Model with RS-485 communications (CPL)

0 Without optional functions

1 Gas-contacting parts treated

to be oil free

0 Without optional functions D With inspection certificate Y With traceability certificate

0 Product version

Optional

Gas

type

functions

1 2 3 4 5

Appended

No.

Description

Integrated display (body length 90 mm) Separate display (body length 90 mm)

H Hydrogen

0 Without optional functions

0 Without optional functions 1

Model with RS-485 communications (CPL)

0 Without optional functions

1 Gas- contacting parts treated

to be oil free

0 Without optional functions D With inspection certificate Y With traceability certificate

0 Product version

1-7

Chapter 1. INTRODUCTION

 Basic operation and advanced operation

This device provides two kinds of operations, basic operation and advanced operation. Basic operation is the state of the device during normal use. In basic operation, the contents of the 7-segment display can be changed to show instantaneous flow rate, flow set value, totalized flow value, or amperage to the valve in normal operation mode. Also, how to set the flow set value is described in the basic operation part.

Advanced operation is for selecting various functions or setting parameters of the device. When the device is used with the factory settings, no setup operation is needed. However, to change the gas type, set a range, set an external contact input, set upper and lower alarm limits, or set communication conditions (for models with communication functions), it is necessary to configure various settings using advanced operation. The diagram below gives an outline of operation flow. Basic and advanced operation are described in Chapters 4 and 5, respectively.

Basic operation Advanced operation

Power ON

DISP key

Instantaneous ow rate display

Flow set value display

Totalized ow display

Valve amperage display

key + ENT key

(3 s or more)

key (3 s or more)

Function setup mode

Parameter setup mode

Device information display mode

1-8

Chapter 2.

NAMES AND FUNCTIONS OF PARTS

 Display

OK lamp:

Lit when the deviation between the ow set value and instantaneous ow rate is in the allowable range. Set the allowable range in the parameter setup. (For details on how to set parameters, see .)

ALM lamp:

7-segment display:

Displays the instantaneous ow rate, ow set value, totalized ow, amperage to the valve and the operating mode. It also displays parameter setup values, function setup values and details of alarms.

SP lamp:

Lit when the ow rate setpoint is displayed.

PV lamp:

Lit when the instantaneous ow rate is displayed.

OK ALM EV1 EV2

RUN ENT DISP

*1 This lamp is used for mL or m3 instead of L on some models.

*2 This lamp is used for mL/min instead of L/min on some models.

Lit when an alarm occurs.

EV1 lamp:

Lit when event 1 output is ON.

EV2 lamp:

Lit when event 2 output is ON.

Digital Mass Flow Controller

L/min

[DISP] key:

Use this key to switch the details displayed on the 7-segment display.

[ENT] key:

Use this key to x and store the set value to memory. Also use it to reset the cumulative ow and to reset alarm and move to the function setup mode.

[ ]

key:

[ ]

key:

[ ]

[RUN] key:

Use this key to change the operating mode.

page 5-12

L lamp *1:

Lit when the totalized ow is displayed. Blinks when the cumulative ow event occurs.

L/min lamp*2:

Lit when the instantaneous ow rate or ow set value is displayed.

Use this key to increment the setting value. Additionally, this key is used to change to the device information display mode.

Use this key to decrement the setting value. Also use it to move to the function setup mode.

key:

Use this key to move to a desired digit when changing setting value. Also use it to move to the parameter setup mode.

Note

•

Technical terms used in this manual are defined as follows:

•

SP (setpoint): The flow set value (or flow rate set point)

•

PV (process variable): Instantaneous flow rate (or controlled flow rate)

•

Operating mode: One of 3 modes (valve fully closed/valve

control/

2-1

Chapter 2. NAMES AND FUNCTIONS OF PARTS

z Main unit (MQV9020/9050/9500/0005/0010/0050/0200)

Connector port: This is used for I/O signals. Use cable with dedicated connector.

Jack for AC adapter: Connect dedicated adapter here. Model No.: 81446957-001 (24 V DC, 750 mA)

Pipe connection port (inlet): This is the port through which gas enters.

Handling Precautions

•

Pipe connection port (outlet): This is the port from which gas is discharged.

Jack for PC loader connection

The former AC adapter (model No. 81446682-001, 15 V DC/350mA) can not be used with MQV.

2-2

Chapter 3. MOUNTING AND WIRING

WARNING

When using this device for gases that contain hydrogen, be sure to purge the device with an inert gas (such as nitrogen or argon) before use. Use without purging may cause an explosion.

CAUTION

This device is exclusively for hydrogen and helium gases. It cannot be used for control or measurement of gases other than hydrogen, helium, and hydrogen-helium mixtures (excluding mixed gases within explosion limits). Oxygen cannot be measured even if gascontacting sections of this device are oil-inhibited.

Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it.

• Set the flow rate setpoint to zero.

• Make the valve operation mode to fully closed. If this valve remains in normal control status when the external shutoff valve is closed (zero flow rate), there will be an excessively large flow as soon as the external shutoff valve is opened. This excessive flow rate could activate the erated by the sensor safety circuit). If the sensor safety circuit is activated, flow rate measurement and flow control are not possible until the power is turned off and back on again.

AL83

alarm (op-

3-1

Chapter 3. MOUNTING AND WIRING

CAUTION

Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When purchasing a connecting joint, use the following made by Swagelok Co., Ltd:

1/4" Swagelok: SS-400-1-6STSC11 1/4" VCR: SS-4-VCR-1-00032SC11

The device is a precision instrument. Do not drop it or subject it to impact, or it might be damaged.

 Mounting

z Installation locations

Avoid mounting the device in the following locations:

• Locations subject to high and low temperature and humidity

• Locations whose atmospheres contain large amounts of dirt and dust, salt, conductive substances such as iron powder, water droplet, oil mist or organic solvents

• Locations subject to direct sunlight and rain

• Locations directly subject to mechanical vibration or shock

• Locations close to sources of electrical noise

• Locations where strong magnetic or electrical fields are generated

Handling Precautions

•

The valve of this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately.

z Changing the display direction (models with integrated display only)

The display can be turned 180°, in case the controller has been mounted with the display upside-down.

• Procedure

(1) Turn the power OFF.

(2) Remove the four screws holding the display.

3-2

Chapter 3. MOUNTING AND WIRING

(3)

Lift up the display from the main unit, and turn it 180° counterclockwise.

(4) Put the display back on the main unit, and fasten with the four

screws taken off in step (2).

(5) To return the display to its original position on the main unit,

turn it 180° clockwise.

Handling Precautions

•

Before changing the display direction, be sure to turn the power OFF

•

Prevent foreign objects from falling inside the main unit when the display is taken off. Failure to do so might cause trouble or malfunction.

•

Do not remove the connectors used inside the main unit.

3-3

Chapter 3. MOUNTING AND WIRING

z Installing joints (UNF connections)

CAUTION

Connector latches

main unit

Rag

3-4

Handling Precautions

•

Do not hold the top part of the main unit with your hand. Doing so might deform the case.

Incorrect

•

Take special care not to damage the connector latches.

Chapter 3. MOUNTING AND WIRING

z Installation procedure

CAUTION

Mount securely in order to prevent vibration. Otherwise, equipment failure could result.

Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

 MQV9020/9050/9500/0005/0010/0050/0200

Install the device with two M4 screws using the mounting holes on the base of the device.

z Installing the separate display unit

For models with a separate display

(1) Make mounting holes in the panel according to the panel cutout

dimensions.

Panel cutout dimensions

Unit: mm

4.5

100±0.2

50±0.2

Unit: mm

17.5±0.2

35±0.2

45±0.2

90±0.2

M4 (2)

(2) Mount the display and secure it by tightening the screws.

3-5

Chapter 3. MOUNTING AND WIRING

z Installing the front cover for the separate display unit

For models with a separate display, a front cover (decorative frame) can be mounted. Use of this cover makes it possible to hide the mounting screws, improving the appearance.

Items needed for installation

• Front cover (81446858-001), 1 set

• Phillips screwdriver

Separate display unit

Plate

Mask

Panel

3-6

Mounting screws (cross recessed head machine screws)

Note

•

The front cover set includes one mask, one plate, and two mounting screws.

Procedure (1) As shown in the figure, put the plate over the display panel, and

then secure it to the display by tightening the screws.

(2) Fit the mask onto the display to mount it.

Chapter 3. MOUNTING AND WIRING

 Piping

CAUTION

Mount the device horizontally. However, do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.

When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten. After connecting, check that there are no gas leaks.

If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors.

Handling Precautions

•

Make sure that the gas flows into the device in the direction indicated by the FLOW arrow on the main unit. Otherwise, the flow rate cannot be controlled correctly.

FLOW

GasGas

•

Do not touch the pipe sections of a controller treated to be oilfree with your bare hands. Doing so will degrade the oil-free treatment.

•

Do not hold the top part of the main unit with your hand when connecting piping. Doing so might deform the case.

z Coating sealant (Rc connection)

Handling Precautions

•

Coat with an appropriate amount of sealant. Do not coat the top two threads. Remove any dirt or burrs from inside the pipes.

Correct

Incorrect

Sealant

3-7

Chapter 3. MOUNTING AND WIRING

 Wiring

CAUTION

Do not apply a negative voltage or a voltage exceeding 5V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure.

If there is a risk of a power surge caused by lightning, use Azbil Corporation's SurgeNon to prevent possible fire or equipment failure.

Be sure to check that the wiring is correct before turning the power on. Incorrect wiring could cause damage or malfunction.

Do not apply excessive force to cables or connectors when connector cables or the AC adapter is attached. Excessive force may damage the connectors or circuit board.

z Connector pin layout

20 19

Connector model No. (device side): HIF3BA-20PA-2.54DS

Manufacturer: HIROSE ELECTRIC CO., LTD.

View from connector insertion side

z Table of compatible connectors (all made by HIROSE ELECTRIC CO., LTD.)

Connector type

Contact crimp type HIF3BA-20D-2.54C HIF3-2226SCC AWG#22 to #26

Cable clamp type HIF3BA-20D-2.54R Not required AWG#28 (flat cable only)

Compatible connec-

tor model No.

Compatible contact

model No.

Compatible wire

(single wire allowed)

3-8

Chapter 3. MOUNTING AND WIRING

z Connector signal names

Pin No. Signal name Description Notes

20 +5 V (5 mA max.) 5 V DC reference voltage output 5 mA max. 19 FLOW OUT Instantaneous flow rate (PV) or

flow rate setpoint (SP) output

18 A.GND Analog ground Analog signal common 17 FLOW SP INPUT Setpoint flow rate (SP) voltage

input

16 MODE INPUT External 3-way switching input 3-way switching input

15 DI3 External contact input 3 2-way switching input 14 DI2 External contact input 2 13 DI1 External contact input 1 12 EV2 OUT Event output 2 Open collector non-insulated 11 EV1 OUT Event output 1 10 ALM OUT Alarm output

9 D.GND Digital ground Digital signal common 8 DB RS-485 communications DB Do not connect on models 7 DA RS-485 communications DA

6 D.GND Digital ground Digital signal common 5 TEST For test Do not use. 4 POWER GND Power supply ground Connect two wires each in 3 POWER GND Power supply ground 2 POWER (24 V) Power supply + (24 V DC) 1 POWER (24 V) Power supply + (24 V DC)

0 to 5 V/1 to 5 V/0 to 20 mA/ 4 to 20 mA output

0 to 5 V/1 to 5 V/0 to 20 mA/ 4 to 20 mA input

(OPEN/GND/5 V)

(OPEN/GND)

output

without the communications function.

parallel to the power supply to reduce voltage drop caused by wiring resistance.

z Wiring

Note

• Power supply

POWER GND

24 V DC

POWER (24 V)

• RS-485 communications (for models with optional RS-485 only)

•

For details on the connection method of RS-485 communication,

or 9 D.GND

please refer to Digital Mass Flow Controller Model MQV9005/9020/9 050/9200/9500/0002/0010/0020/0050/0100/0200/0500 User's Manual for Communication Functions (CP- SP-1197E).

3-9

Chapter 3. MOUNTING AND WIRING

• Alarm output/event output

Handling Precautions

•

Take special care that the event and alarm outputs do not exceed the output rating of the device. Additionally, when driving a relay, use an appropriate coil surge absorption diode built-in relay. Failure to do so might cause the device to malfunction.

• External contact input

Handling Precautions

•

When switching by relay contact, use an appropriate relay intended for micro-current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

Load

+ -

EV2 OUT

EV1 OUT

ALM OUT

or 6 D.GND

DI3

DI2

DI1

or 6 D.GND

3-10

• Analog I/O

0 to 5 V/1 to 5 V 0 to 20 mA/4 to 20 mA

Output

—

0 to 5 V/1 to 5 V 0 to 20 mA/4 to 20 mA

Input

—

• When using potentiometer (0 to 5 V)

+5 V

A.GND (0 V)

FLOW SP INPUT

FLOW OUT

A.GND

FLOW SP INPUT

• External 3-way switching input

5 V

0 V

OPEN

Handling Precautions

•

When switching by relay, use an appropriate relay intended for microcurrent use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.

Operation of external 3-way switching input

+5 V

A.GND (0 V)

MODE INPUT

Chapter 3. MOUNTING AND WIRING

Input state of pin No.16

OPEN 0 V 5 V

Assigned function

Switching of operating mode 1 Control Fully closed Fully open

Switching of operating mode 2 Fully closed Control Fully open

Switching of SP No.

Switching of totalizing

SP-0 SP-1 SP-2

Continue counting Reset Stop counting

operation

Switching of analog I/O voltage range

Input Internal

reference* 0 to 5 V or

external

External

reference

0 to 5 V or

0 to 20 mA

External

reference

1 to 5 V or

4 to 20 mA

reference

0 to 20 mA

Output 0 to 5 V/0 to 20 mA 0 to 5 V/0 to 20 mA 1 to 5 V/4 to 20 mA

* "Internal reference" refers to the use of the 5 V DC reference voltage pin (No. 20) on this device,

and is used when the setting value is set by an externally connected potentiometer.

Note

•

For details on how to assign external 3-way switching input functions,

Chapter 5. ADVANCED OPERATION

3-11

Chapter 3. MOUNTING AND WIRING

z Example of wiring

Instantaneous owrate output

Potentiometer

(5 kΩ)

0 V

Event output 2

Event output 1

Alarm output

(Output common)

Power supply

(24 V DC)

+5 V

OPEN

+5 V (5 mA max.)

FLOW OUT

A.GND

FLOW SP INPUT

MODE INPUT

DI3

DI2

DI1

EV2

EV1

ALM OUT

D.GND

D. GND

TEST

POWER GND

POWER (24 V)

Internal circuit

Input/output circuit

Power circuit

Handling Precautions

3-12

AC adapter input

•

Do not input any signal to pin No. 5.

•

The power circuit is isolated from the input/output circuit inside

this device.

•

Even though the analog GND and digital GND are connected internally, always carry out the grounding wiring individually.

•

When the AC adapter plug is inserted into the AC adapter power supply terminal, the power supply changes from the DC power supply to the AC adapter.

•

The former AC adapter 81446682-001 (15 V DC, 350 mA) cannot be used with this MQV.

z Connector terminal block

Sometimes two or more connections must be made to the same pin during wiring. In this case, use a connector terminal block. If you need a 20-core cable for the connectors on the device and connector terminal block, contact the azbil Group or your dealer.

Note

•

Recommended connector terminal block Manufacturer: Toyo Giken Model: PCN-1H-20

This terminal block can be mounted directly on a DIN rail. The following table shows the correspondence between connector pin Nos. and terminal block Nos:

Handling Precautions

•

For details regarding the cable with connector on both ends, contact the azbil Group.(The optional 81446681-001 and 81446951-001 connectors cannot be used to connect to the connector terminal block.)

•

The specifications of the recommended connector terminal block are subject to change. Contact the manufacturer beforehand for details.

Pin No. Terminal block No.

20 B-10 19 A-10 18 B-9 17 A-9 16 B-8 15 A-8 14 B-7 13 A-7 12 B-6 11 A-6 10 B-5

9 A-5 8 B-4 7 A-4 6 B-3 5 A-3 4 B-2 3 A-2 2 B-1 1 A-1

Chapter 3. MOUNTING AND WIRING

Mounting connector

HIROSE ELECTRIC CO., LTD., HIF3BA-20PA-2.54DSA

Compatible connector (other side)

HIROSE ELECTRIC CO., LTD., HIF3BA-20D-2.54R

MQV

Cable with connector on both ends

Connector terminal block

3-13

Chapter 4. BASIC OPERATION

4-1 Switching Displays

CAUTION

Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver. Doing so might damage the console.

 Basic operation

Basic operation is used to change the display to instantaneous flow rate (PV), flow set value (SP), totalized flow value, or valve amperage.

Normally, when the power is turned ON, the instantaneous flow rate is displayed in basic operation mode. When this is the case, operating the [DISP] key changes the contents of the 7-segment display as described below.

Power ON

Instantaneous ow rate display (PV and L/min lamps lit)

DISP key

Flow set value display (SP and L/min lamps lit)

DISP key

Totalized ow display (L lamp lit)

DISP key

Valve amperage display (SP, PV, L, and L/min lamps go out)

DISP key

Handling Precautions

•

If there is no operator input for approximately 10 seconds while the flow set value is being displayed, the display automatically reverts to the instantaneous flow rate display.

•

The "L" lamp is labeled "mL" on the MQV9020/9050 or "m3" on the MQV0200. The "L/min" lamp is labeled "mL/min" on the MQV9020/9050.

z Indicating instantaneous flow rate (PV display)

When the power is turned ON, the PV and L/min lamps light, and the instantaneous flow rate is indicated on the display.

Handling Precautions

•

When the operating mode is set to fully closed, and the flow rate is zero, and when the operating mode is switched to the control mode or fully open mode, the operating mode (

ON/FULL

•

When an alarm occurs, the alarm code and the PV are dis-

) is displayed for about one second.

played alternately.

OFF

4-1

Chapter 4. BASIC OPERATION

z Indicating the flow set value (SP display)

If [DISP] key is pressed while the instantaneous flow rate is displayed, the PV lamp goes out, the SP lamp lights and the flow set value (SP) is indicated on the display.

Handling Precautions

•

If the SP value is not changed for about 10 seconds while the flow set value is displayed, the instantaneous flow rate is redisplayed automatically. For details on how to change the flow rate, see section 4-2 Setting the Flow Rate (P.4-4).

•

When multiple setpoints (2 to 8 SPs) have been selected in

in the function setup, when switching by external input,

c-04

the flow set value SP value) is displayed for about one second, and then the display switches to the SP No.

z Indicating the totalized flow

When the [DISP] key is pressed while the flow set value (SP) is displayed, the SP and L/min lamps go out, the L lamp lights up, and the totalized flow value is indicated on the display. When the totalized flow value is 10,000 or higher, the number is displayed in two parts, the last four digits, followed by the first four digits. When the value is the last four digits, the decimal point on the display is lit up. For example, when the totalized flow value is "123,456L", " displayed. Press the [DISP] key to display " 1 2". To alternately display the first and last four digits, press the [

Handling Precautions

•

When an alarm occurs, the alarm code and the totalized flow value are displayed alternately.

z Resetting the totalized flow count

The totalized flow value is reset to zero by holding down the [ENT] key for two seconds or more while the totalized flow value is displayed.

] ke y.

3456

." is

4-2

Note (Advanced operation)

•

Totalized flow event output function When "1: Totalized flow rate count up ON" is selected as the event output type for function setup

C-07

, the event output

C-08

turns ON when the totalized flow value reaches the totalized flow event setting. This threshold value for the totalized flow event is set in the parameter setup mode.

•

Totalized flow event automatic valve shut-off function When "1: Function enabled" is set for the automatic valve shut-off function in function setup C- 13, the valve will be automatically closed fully if the totalized flow value reaches the preset value. The threshold value for the totalized flow event is set in the parameter setup mode. For details on function setup and parameter setup,

z Valve amperage display

If [DISP] key is pressed while the totalized flow is displayed, the PV, SP, L and L/min lamps go out, and the electrical current to the valve

(

0.0

Handling Precautions

•

Chapter 4. BASIC OPERATION

Chapter 5. ADVANCED OPERATION

[%]) is indicated on the 7-segment display.

100.0

The valve amperage can vary greatly according to the differential pressure even at the same flow rate. The valve amperage alarm function cannot be used unless the differential pressure is stable.

Even under stable differential pressure conditions, the relationship between the valve amperage and flow rate has hysteresis characteristics (amperage may vary even at the same flow rate). When using the valve amperage alarm, be sure to test sufficiently under operating conditions. That way, an appropriate alarm current setting can be determined.

Note (Advanced operation)

•

When "1: Only upper limit alarm used," "2: Only lower limit alarm used," or "3: Upper and lower limit alarm used" is selected for valve amperage alarm type (

in the function setup),

C-20

the valve amperage alarm will be activated if the valve current exceeds the upper limit set value or goes below the lower limit value. The valve amperage upper and lower limits are set in the parameter setup mode. For details on function setup and parameter setup,

Chapter

5. ADVANCED OPERATION

4-3

Chapter 4. BASIC OPERATION

4-2 Setting the Flow Rate

Set the flow rate as shown below.

Key input or communicationsSingle setup

Selection from function setup C-04

Multi-setup

Voltage setup

Selection from function setup C-05 and C-06

Current setup

Factory setting

Digital setup

Flow rate setup Selection from function setup C-03

Analog setup

Two kinds of setup methods, that is, digital and analog setup, are provided to set the flow rate. Additionally, the digital setup further provides two kinds of setup methods, single setup and multi-setup. In single setup, the flow rate is set through key input or communications. In multi-setup, the flow rate is set through the key input, communications, external contact input, or external 3-way switching input. One flow set value can be set in the single setup while up to eight flow set values can be set in the multi-setup. In the analog setup, the flow rate is set through the external voltage/ current input. The factory setting is digital setup. Either digital setup or analog setup is selected as the flow rate setup method (C- 03 in the function setup). 0: Digital setup (flow rate is set through the key input or

communication.)

1: Analog setup (flow rate is set through the external analog voltage/

current.) For further detailed setup, make selections in the function setup. For details on function setup,

ADVANCED OPERATION

Handling Precautions

•

Setup by communications is available only for models with RS485 communications.

Key input or communications

External contact inputs

External 3-way switching input

Internal reference 0 to 5 V input

External reference 0 to 5 V/1 to 5 V input

External reference

0 to 20 mA/4 to 20 mA input

C-04

C-06

Chapter 5.

4-4

 Digital flow rate setup

Up to eight SP values can be set on this device. The operating procedure may vary depending on the number of SP values to be set.

z Single setup (number of SPs in function setup

Follow the procedure below to change the SP value: (1) Press the [DISP] key. >> The SP (flow rate setpoint) is shown on the 7-segment display (2) Change the SP value by pressing the [

can move to the digit to be changed by pressing the [

>> The digit currently being changed starts blinking. (3) When you have reached the target value, press the [ENT] key. >> The SP value is set, and saved.

Note (Advanced use, direct setup function)

•

Control can be executed using an SP value currently being changed (indicated by blinking display) when the direct setup function is enabled for the instantaneous flow rate direct setup function ON/OFF ( [ENT] key need not be pressed to enter the SP value.

Handling Precautions

•

When switching the display by pressing the [DISP] key, first press the [ENT] key to enter the SP value, and switch the display. For details on how to set up functions, ADVANCED OPERATION.

z Multi-setup (number of SPs in function setup

In multi-setup, up to eight SP values can be switched by key operation and by external contact input. Follow the procedure below to change the SP No. and SP value: (1) Press the [DISP] key. >> The display switches to SP No.

second.

(2)

Press the [▲] or [▼] keys to change the SP No. and press the [ENT]

ke y. >> The SP No. is entered. (3) Change the SP value by pressing

move to the digit to be changed by pressing the [ >> The digit currently being changed blinks while the SP value is

being changed. (4) When you have reached the target value, press the [ENT] key to

enter the new SP value. >> The SP value and SP No. are updated, and the SP value of the

selected SP No. is new the active SP.

C-2 1

Chapter 4. BASIC OPERATION

is 1)

C-04

▲] key or [▼] keys. You

] ke y.

in the function setup). In this case, the

Chapter 5.

is 2 to 8)

C-04

SP-0

the [▲] or [▼] keys.

after about one

SP-7

You can

] ke y.

4-5

Chapter 4. BASIC OPERATION

Note (Advanced use, direct setup function)

•

Control can be executed using an SP No. or SP value currently being changed (indicated by blinking display) when the direct setup function is enabled for the instantaneous flow rate direct setup function ON/OFF (

in the function setup). In this

C-2 1

case, the [ENT] key need not be pressed to enter the SP value.

Handling Precautions

•

When switching the display by pressing the [DISP] key, first press the [ENT] key to enter the SP value. For details on how to set up functions,

Handling Precautions (Common to single setup and multi-setup)

•

When "1: Analog setup" is selected as the flow rate setup

Chapter 5. ADVANCED OPERATION.

method (C- 03 in the function setup) and the SP value is controlled by external voltage input, the SP value and SP No. cannot be changed with the [

•

If no operation is made for approximately 10 s after the opera-

▲ ]or [▼] key.

tion stated in (1) has been performed, the display automatically returns to the instantaneous flow rate display.

•

If the [DISP] key is pressed during the operations in steps (2) and (3) (setting is blinking), the SP No. and SP value return to their previous values without saving of new values.

•

When the SP value is updated in step (3) for single setup or in step (4) for multi-setup, the display automatically returns to the instantaneous flow rate display after approximately 2 s have elapsed.

4-6

Chapter 4. BASIC OPERATION

 Flow rate setup by external contact input (Advanced use)

When assigning "3: Switching of SP No." at external contact input function assignment C- 10 to C- 12 in the function setup, up to eight SP values can be changed by means of external contact ON and OFF combinations.

Handling Precautions

•

When changing the SP number by external contact input, the [▲] and [

▼] keys cannot be used (but the SP value can be changed).

(1) When the number of preset SP values is set to 5 to 8 in function

setup

Assign "3: Switching of SP No." to all of C- 10 to C- 12 in the

function setup.

C-04

External contact input state

Input 3 (DI3) Input 2(DI2) Input 1(DI1)

OFF OFF OFF SP-0 OFF OFF ON SP-1 OFF ON OFF SP-2 OFF ON ON SP-3

ON OFF OFF SP-4 ON OFF ON SP-5 ON ON OFF SP-6 ON ON ON SP-7

Selected SP

(2) When the number of SP values is set to 3 or 4 in function setup

C-04

Assign "3: Switching of SP No." to two of C- 10 to C- 12 in the

function setup.

External contact input pair Input 2 (DI2) Input 1 (DI1) Input 3 (DI3) Input 1 (DI1)

External contact input state

Input 3 (DI3) Input 2 (DI2)

OFF OFF SP-0 OFF ON SP-1

ON OFF SP-2 ON ON SP-3

(3) When the number of SP values is set to 2 in function setup

Selected SP

C-04

Assign "3: Switching of SP No." to one of C- 10 to C- 12 in the function setup.

External contact input state

Input 1 to 3 (DI1 to DI3)

OFF SP-0

ON SP-1

Selected SP

4-7

Chapter 4. BASIC OPERATION

 Flow rate setup by external 3-way switching input (Advanced use)

When "2: Switching of SP No." is assigned at external 3-way switching function can be changed with the external 3-way switching input as described in the table below.

Handling Precautions

•

When the SP No. is switched by the external 3-way switching input, you cannot switch the SP No. using [ you can switch the SP value.

External 3-way switching input state Selected SP

in the function setup, three SP values (

C-09

OPEN SP-0

0 V SP-1

5 V SP-2

SP-0

▲] or [▼] keys, though

SP-2

)

4-8

 Analog flow rate setup

The SP value (flow set value) can be changed by analog voltage by selecting analog setting as the flow rate setting method in function setup

ADVANCED OPERATION.

The setup voltage/current range can be selected in the input range selection for analog setup (

The selection of voltage input/current input is linked automatically with the settings for analog output type and range selection ( in the function setup). For example, when current output is selected as analog output type and range selection in becomes current input type. Then, analog setup voltage/current for SP value can be calculated by the equations below.

Function

setup

C-05

Input voltage/current range Setup voltage/current calculation

0 Internal reference 0 to 5 V*/

External reference 0 to 20 mA

1 External reference 0 to 5 V/

External reference 0 to 20 mA

2 External reference 1 to 5 V/

External reference 4 to 20 mA

. For details on how to set up the function,

C-03

in the function setup).

C-05

Setup voltage [V] = Setting flow rate ÷ Full-scale flow rate x Reference output voltage Setup current [mA] = Setting flow rate ÷ Full-scale flow rate x 20

Setup voltage [V] = Setting flow rate ÷ Full-scale flow rate x 5 Setup current [mA] = Setting flow rate ÷ Full-scale flow rate x 20

Setup voltage [V] = Setting flow rate ÷ Full-scale flow rate x 4 + 1 Setup current [mA] = Setting flow rate ÷ Full-scale flow rate x 16 + 4

Chapter 4. BASIC OPERATION

Chapter 5.

C-06

, the input type

C-06

* Internal reference 0 to 5 V input means that the 5 V-reference voltage input of connector pin No.

20 of this controller is used and a voltage is input with the optional potentiometer (variable resistor with dial). In this case, no external power supply for setup is needed. The reference voltage (5 V) is not accurate, so to actually measure and calculate the reference voltage output from this controller, use a voltage tester for the setup voltage calculation.

Note (Advanced use)

•

When "1: Function enabled" is selected for analog scaling function

in the function setup, the full scale flow rate can be

C-28

changed to a desired level during analog setup. In this case, the full-scale flow rate of the analog flow rate output voltage/current (PV output voltage/current) is also changed as it is linked with the above flow rate. The scaling flow rate is set in the parameter setup mode. For details on how to set up functions,

Chapter

5. ADVANCED OPERATION.

4-9

Chapter 4. BASIC OPERATION

4-3 Selecting the Operating Mode

 Operating mode selection

Three kinds of valve operating modes are provided, "control mode," "fully closed mode," and "fully open mode." The factory setting is the control mode. The operating mode can be forcibly changed to "fully closed mode" (valve is fully closed) or "fully open mode" (valve is fully open). As shown in the diagram below, the mode is changed alternately between the control mode and fully closed mode every time the [RUN] key is pressed. Additionally, to change the mode from the control mode to the fully open mode, keep the [RUN] key pressed for 2 seconds or more.

Control mode

[RUN] key (less than 2 s)

Fully closed mode

[RUN] key (less than 2 s)

Fully open mode

 Operating mode display

The operating mode is shown on the 7-segment display during instantaneous flow rate display. Additionally, the OK lamp blinks in the fully open mode.

Operation mode 7-segment display OK lamp Remarks

Fully closed mode

Control mode

Fully open mode

0FF

FULL

Out or lit

Blinking

[RUN] key (less than 2 s)

[RUN] key (2 s or more)

Out

[RUN] key (2 s or more)

0FF is always displayed after checking that the flow rate is zero (0).

is displayed for approximately 1

second when the mode changes to the control mode.

FULL is displayed for approximately 1 second when the mode transits to the fully open mode.

4-10

Note(Advanced use, Selecting the operating mode through external input)

•

When "operating mode change (5, 6, or 8)" is selected for external contact input function assignment C- 10 to C- 12 in the function setup, the operating mode can be changed through external contact input.

•

If “1” or “5” (operation mode switching) is selected for external 3-way switching input function

in the function setup, the op-

C-09

eration mode can be switched by external 3-way switching input. For details on how to set up functions,

Chapter 5.

ADVANCED OPERATION.

Handling Precautions

Chapter 4. BASIC OPERATION

•

When "0: RUN key disabled" is selected for "

C-02

: RUN key operation and operating mode selection when power turned ON" in the function setup, the operating mode is not changed even though the RUN key is pressed.

•

If “5,” “6,” or “8” (operation mode switching) is selected for one of the external contact input function assignments (C- 10 to C- 12) in the function setup and if the valve is set to fully closed or fully open mode by external contacts, the operation mode cannot be switched using the [RUN] key. If the valve is set to control mode by external contacts, the operation mode can be switched using the [RUN] key. In the same manner, if “1” or “5” (operation mode switching) is selected for external 3-way switching input function

C-09

and if the valve is set to fully closed or fully open mode by external 3-way switching input, the operation mode cannot be switched using the [RUN] key. If the valve is set to control mode by external 3-way switching input, the operation mode can be switched using the [RUN] key.

•

The fully open mode cannot directly be changed to the control mode. To make the change, press the RUN key to change the fully open mode to the fully closed mode. After that, press the RUN key again to change the fully closed mode to the control mode.

4-11

Chapter 5. ADVANCED OPERATION

Valve amperage display

The advanced operation provides three kinds of modes, "Function setup mode," "Parameter setup mode," and "Controller information display mode."

 Setup mode transition operation

Normally, when the power is turned ON, the instantaneous flow rate is displayed in the basic operation mode.

When keys are operated as described in the diagram below during instantaneous flow rate display, the operation changes to the specified mode.

When the operating mode changes to "Function setup mode" or "Parameter setup mode," the specified setup can be changed.

In the "Device information display mode," you can check the statuses of major setup items (gas type, full scale flow rate, reference temperature, and communications address).

Basic operation Advanced operation

[DISP] key

Power ON

Instantaneous ow rate display

[DISP] key

Flow set value display

[DISP] key

Totalized ow display

[DISP] key

key + [ENT] key

[ ]

(3 s or more)

[ ]

key (3 s or more)

[ ]

Function setup mode

Parameter setup mode

Device information display mode

page 5-2

page 5-12

page 5-16

5-1

Chapter 5. ADVANCED OPERATION

5-1 Functions

This section describes how to set up functions.

Basic operation Advanced operation

[DISP] key

 Setup method

Handling Precautions

5-2

Power-ON

IInstantaneous ow rate display

[DISP] key

Flow set value display

[DISP] key

Totalized ow display

[DISP] key

Valve amperage display

Follow the procedure below to set functions such as event output type and external contact input assignments:

(1) Press the [DISP] key several times to display the instantaneous

>> The PV and L/min ("mL/min" on the MQV9020/9050) lamps

(2) Hold down the and the [ENT] keys for three seconds or more.

>> Item

(3) Press the [

>> The current setting value blinks on the 7-segment display.

(4) Press the [

(5) When you have selected the desired setting, press the [ENT] key

>> The setting value is updated. (At this point, the setting value is

(6) If you want to set up other items, return to step (3) and repeat

(7) Press the [DISP] key.

>> The function setup mode changes to the instantaneous flow rate

[DISP] key

flow rate.

light.

is displayed on the 7-segment display and mode

C-0 1

changes to the function setup mode.

▲] or [▼] key to select the desired setup item number,

and then press the [ENT] key.

▲] or [▼] key to select the desired setting.

to enter the setting.

saved.)

the procedure. Otherwise, proceed to step (7).

di splay.

•

If you do not press any keys for one minute after entering the function setup mode, the display automatically returns to the instantaneous flow rate display.

•

If you press the [DISP] key without pressing the [ENT] key after carrying out the operation in step (4), the setting remains at the previous value without being updated.

[ ]

key + [ENT] key (3 s or more)

[ ]

key (3 s or more)

[ ]

Function setup mode

Parameter setup mode

Device information display mode

 Function setup items

Display

C-0 1

C-02

C-03

C-04

Item Description

item

Key lock 0: Key lock disabled

[RUN] key operation and operation mode selection when power turned ON

Flow rate setup

method (SP setup method selection)

Number of flow set value (number of SPs selection)

Chapter 5. ADVANCED OPERATION

The following table shows the function setup items:

Setup Item and

Description

1: Settings other than flow rate

setting (SP) are key-locked

2: All settings are key-locked

0: [RUN] key disabled

(Operation starts in the control mode when the power is turned ON)

1: [RUN] key enabled (1)

(Operation is started up in the operating mode used before power shut- down when the power is turned ON)

2: [RUN] key enabled (2)

(Operation is started up in the fully closed mode when the power is turned ON)

0: Digital setup (set by key op-

eration or communications)

1: Analog setup (set by external

analog input voltage)

0: Number of SPs = 1

(

only)

SP-0

1: Number of SPs = 2

(

SP-0, SP- 1

2: Number of SPs = 3

(

SP-0

3: Number of SPs = 4

(

SP-0

4: Number of SPs = 5

(

SP-0

5: Number of SPs = 6

(

SP-0

6: Number of SPs = 7

(

SP-0

7: Number of SPs = 8

(

SP-0

SP-2

SP-3

SP-4

SP-5

SP-6

SP-7

)

Factory Setting

0 The key lock can be cancelled even

while it is enabled. When an attempt is made to change a key-locked setting, cated on the display.

1 Determines whether or not the oper-

ating mode is changed (fully closed/ control/fully open) by the [RUN] key. Additionally, the operating mode at power ON can be selected. For how to select the operating mode:

4-3 Selecting the Operating

Mode (P.4-10).

0 If it is necessary to change the

method of setting the flow rate (C-3) by external contact input, set “4” (flow rate setting method switching) for C-10, C-11, or C-12 (the setting is switched over when the contacts turn on).

0 How to switch the SP number using

external contact input and external 3-way switching input:

Multi-setup (number of SPs in function setup C-04 is 1 to 7) (P.4-5).

Remarks

LOc

. is indi-

5-3

Chapter 5. ADVANCED OPERATION

Display

item

C-05

2 *3

C-0 6

2 *3

C-0 7

C-0 8

Item Description

Input range selection of analog setup (analog SP input range selection)

Analog output type and range selection

Event output 1 type assignment Event output 2 type assignment

Setup Item and

Description

(1) Analog output selection is set

at voltage output (

= 0, 1, 4, or 5).

C-06

0: 0 to 5V internal reference

input

1: 0 to 5 V external reference

input

2: 1 to 5 V external reference

input

(2)Analog output selection is set

at current output (

= 2, 3, 6, or 7)

C-06

0: 0 to 20 mA external reference

input

1: 0 to 20 mA external reference

input

2: 4 to 20 mA external reference

input

0: 0 to 5 V instantaneous flow

rate output

1: 1 to 5 V instantaneous flow

rate output

2: 0 to 20 mA instantaneous

flow rate output

3: 4 to 20 mA instantaneous

flow rate output

4: 0 to 5 V setting flow rate

output

5: 1 to 5 V setting flow rate

output

6: 0 to 20 mA setting flow rate

output

7: 4 to 20 mA setting flow rate

output 0: Not used (OFF at all times) 1: ON when the totalized flow

event occurs 2: Totalized pulse output 3: ON when the flow rate is OK 4: ON in control mode 5: ON in fully open mode 6: ON in control or fully open

mode 7: ON in fully closed mode 8: PV upper limit event 9: PV lower limit event 1 10: PV lower limit event 2

-1 to-10: Inverse output of above 1 to 10

(Normal operation: ON,

Event occurrence: OFF)

Factory Setting

Remarks

1 Internal reference 0 to 5 V input is

the setting to use the 5 V-reference voltage from this device when inputting a voltage with the optional potentiometer (variable change resistor with dial). Using this method, no external power supply for setup is needed. The voltage input/current input is automatically selected as it is linked with the set value of

Table in Note *2 (P.5-9).

C-06

0 The scale can also be changed to the

desired flow rate range. For details, see log scaling function).

(Optional ana-

C-28

0 The event output delay time is set

in the parameter setup mode (see page 5-12).

Note, however, that delay cannot be set for totalizer pulse output. 9: Events are output even in fully

closed operation mode.

10: Events are not output in fully

closed operation mode.

-1 to -10: OFF at all times during power shutoff

5-4

Chapter 5. ADVANCED OPERATION

Display

item

C-0 9

C- 10

C- 1 1

C- 12

Item Description

External 3-way switching function

External contact 1 input function assignment (2-way switching) External contact 2 input function assignment (2-way switching) External contact 3 input function assignment (2-way switching)

Setup Item and

Description

0: Not used 1: Switching of operating

mode 1 2: Switching of SP No. 3: Switching of totalizing

operation 4: Switching of analog I/O volt-

age range

(simultaneous external

switching of 5: Switching of operating

C-05

and

C-06

mode 2

0: Not used 1: Reset totalized flow count 2: Stop totalizing flow count 3: Switching of SP No. 4: Switching of instantaneous

flow rate setup method 5: Valve forced fully closed 6: Valve forced fully open 7: Switching of slow start

operation or switching of in-

stantaneous SP ramp control

operation 8: Switching of operating

mode

(control by contact ON,

forced fully closed by con-

tact OFF) 9: Flow rate zero adjustment 10: Switching of gas type setup 11: Switching of flow rate range 12: Switching of SP ramp 13: Alarm reset

Factory Setting

Remarks

0 External inputs OPEN/GND/5 V are

switched as shown below. For details on wiring, see page 3-10. 1: Control/fully closed/fully open

Table in note 7 on P. 5-9 (for

details on operation) 2: SP-0/SP-1/SP-2 3: Continue count/reset count/ stop

count

)

4: See the table in note *

0 to 5 V/0 to 5 V/1 to 5 V 5: Fully closed/control/fully open

Table in note 7 on P. 5-9 (for

details on operation)

0 3: For details on how to switch

three or more SP Nos., see the description of the multi-setup (page 4-5).

4: The

(analog/digital) setting

C-03

is is switched over when the contacts turn on.

7: “Slow start ON” must be selected

in C- 1 7 (Slow start when the

contact is ON). Similarly, in case of SP ramp control, "SP ramp control 1 or 2" must be selected in C- 27. (Ramp control when the contact is ON.)

5, 6, 8: If the forced fully closed and

fully open are input from two sources at the same time, both inputs become invalid.

P. 5-11

9: Set the operation mode to full

close or set the flow rate to zero and perform the contact ON operation for a minimum of 10 seconds. See page 6-2 for the details.

10: C- 18 becomes active by contact

OFF and C- 26 becomes active by contact ON.

11: C- 24 becomes active by contact

OFF and C- 25 becomes active by contact ON.

12: Parameter setup ramp 1 is se-

lected when the contact is OFF. Ramp 2 is selected when the contact is ON.

13: All alarm detections are cancelled

while the contact ON is being continued.

5-5

Chapter 5. ADVANCED OPERATION

Display

item

C- 13

Item Description

Automatic valve shut-off when the

Setup Item and

0: Function disabled

1: Function enabled totalized flow event occurs

C- 14

On/off of totalized flow reset function

0: Function disabled

1: Function enabled at start of control

C- 15

Flow rate alarm setup type

0: Function disabled

1: Only upper limit alarm used

2: Only lower limit alarm used

3: Upper / lower limit alarm used

C- 16

Operation selection at alarm occurrence

0: Control continued and alarm

output OFF any- time (alarm ignored)

1: Control continued and alarm

output ON

2: Forced fully closed and alarm

output ON

3: Forced fully open and alarm

output ON

-1: Control continued and alarm output ON

-2: Forced fully closed and alarm output ON

-3: Forced fully open and alarm output ON

C- 17

Slow start setup

0: Slow start disabled 1 to 8:

Slow start enabled (equivalent to approx. 1 to 6 seconds settling time)

Gas type selection 1 0: Conversion factor for each

C-18

gas type set by user 9: Hydrogen 10: Helium

C- 19

Temperature at reference conditions

0: 20 °C, 101.325 kPa (1 atm) 1: 0 °C, 101.325 kPa (1 atm) 2: 25 °C, 101.325 kPa (1 atm) 3: 35 °C, 101.325 kPa (1 atm)

Description

Factory

Setting

Remarks

0 When the totalized flow count

reaches the totalized flow event setting, the valve is closed fully. This totalized flow event preset value can be set in the parameter setup mode.

5-2 Parameters (P.5-12).

0 When control is resumed from the

fully closed operating mode, the totalized flow count is automatically reset.

3 Set the alarm flow rate in the param-

eter setup mode.

5-2 Parameters (P.5-12).

1 Alarm code displays even if “0” is

selected.

-1 to -3: Output logic 1 to 3 is inverted (ON at all times). (However, they are turned OFF at all times during power shutoff.)

0 Slow start is used when the external

contact input turns ON when slow start operation switching is selected at C- 10 to C- 12.

9 If "0" is selected, a conversion factor

(C.F.) must be entered in parameter setup mode. (P.5-12).

5-2 Parameters

If "10: gas type changeover" is selected for the external contact input function assignment (C- 10 C- 1 1 , or C- 12) and if the relevant contact is ON, the gas type is determined by the setting in C- 26 (gas type selection 2).

5-6

Chapter 5. ADVANCED OPERATION

Display

C-20

C- 2 1

C-22

C-23

C-24

C-25

C-26

Item Description

item

Valve amperage alarm setup

Direct setup function ON/OFF Control dead band setup

PV filter (process for filtering of instantaneous flowrate)

Flow rate range setup 1 Flow rate range setup 2

Gas type selection 2 0: Conversion factor for each

Setup Item and

0: Valve amperage alarm

disabled

1: Only upper limit alarm

enabled

2: Only lower limit alarm

enabled

3: Upper / lower limit alarm

enabled 0: Function disabled 1: Function enabled 0: Function disabled

1: Function enabled

0: Without filter 1: Two samplings moving

average

2: Four samplings moving

average 3: Eight samplings moving

average 0: Standard range 10 to 99: 10% to 99% of stan-

-10 to -99: 10 % to 99 % of stan-

gas type set by user 9: Hydrogen 10: Helium

Description

dard range. (When calculating the range reduction, the value is cut off at the least significant digit.)

dard range. (When calculating the range reduction, the value is not cut off at the least significant digit.)

Factory Setting

0 Set up the alarm current value in the

parameter setup.

5-2 Parameters (P.5-12).

0 SP value being changed (flashing)

is used for control.

0 Valve operation stops while the

control flow rate is within the OK judgment range. The OK judgment range can be set in the parameter setup mode.

5-2 Parameters (P.5-12).

0 If the PV filter is used at a "2" or "3"

setting, the operational differential pressure must be lower than the standard differential pressure. Do not change the setting while control is in progress.

0 The setup and display resolution lev-

els can be improved by reducing the flow rate range.

5-4 Flow Rate Range (P.5-18). If a value of 10 to 99 is set, the value is cut off at the least significant digit when calculating the range reduction. Example: Standard range = 30.0 L/min. and range setup = 67 Calculation formula:

The range selected by C- 25 becomes active if "11" is selected for assignments contact input function assignment) and only when the objective contact is turned ON. However, the range selected by C-

becomes active otherwise.

9 This setting determines the gas type

when "10: gas type changeover" is selected for the external contact input function assignment (C- 10,

C- 1 1

evant contact is ON. For details, see the remarks for C- 10, C- 1 1, C- 12 and C- 18.

Remarks

30.0 x 0.67 = 20.1 →Since the value is cut off at the least significant digit, the flow rate range becomes 20.0L/ min.

C-1 2

(external

C-1 0

, or C- 12) and when the rel-

5-7

Chapter 5. ADVANCED OPERATION

Display

C-27

item

Item Description

SP ramp control function

0: Function disabled 1: SP ramp control 1.

(In SP ramp-up: ramp 1, in SP ramp-down: ramp 2)

2: SP ramp control 2.

(In external contact OFF: ramp 1, in external contact ON: ramp 2)

C-28

C-29

Analog scaling function

Forced PV (instantaneous flow

0: Function disabled 1: Function enabled

rate) zero function

C-30

Communications address setting

0: Communications function

disabled

1 to 127: Communications

C-3 1

Transfer speed

selection

0: 38400 bps 1: 19200 bps 2: 9600 bps 3: 4800 bps

C-32

Data format

selection

4: 2400 bps 0: 8 data bits, even parity, 1

stop bit

1: 8 data bits, no parity, 2 stop

bits

SP limit function 0: SP limit function disabled

C-35

1: Only upper limit enabled 2: Only lower limit enabled 3: Upper and lower limits

enabled

Setup Item and

Description

address

Factory Setting

Remarks

0 The SP change ramp level (the rate

of change per second) can be set to a constant value for control startup and setting flow rate changed. Setting of ramps 1 and 2 is done in parameter setup mode.

5-2 Parameters (P.5-12). In case of SP ramp control 2, the operation is performed by ramp 2 when “12” is selected in either one of

C-1 0

input function assignment) and also

(external contact

C-1 2

when the target contact is ON, but otherwise operation is performed by ramp 1. If "7" is selected anywhere in

C-1 0

is performed only when the target

, SP ramp control

C-1 2

contact is ON.

0 The flow rate at analog input / out-

put 100% (5 V) can be optionally set. The flow rate is set in parameter setup mode.

5-2 Parameters (P.5-12).

0 Instantaneous flow rate is made zero

forcibly after the flow rate is set to zero or the mode is changed to valve forced fully closed mode and delay time has elapsed. Instantaneous flow rate variation in zero position caused by the inclination of pipe is neglected. Delay time is set in parameter setup mode.

5-2 Parameters (P.5-12).

0 The upper and lower limit values of

the flow rate setup range can be set to desired levels. Upper and lower limits are set in parameter setup mode.

5-2 Parameters (P.5-12).

5-8

Chapter 5. ADVANCED OPERATION

Display

item

C-36

C-37

Item Description

Operating differential pressure setting for control optimization

Flow rate display unit selection

Setup Item and

Description

0: Low differential pressure

(50 ± 50 kPa)

1: Standard differential pressure

(200 ± 100 kPa)

2: High differential pressure

(300+0, -100 kPa)

0: Flow rate is displayed in the

standard flow rate unit.

1: Flow rate is displayed in [L/

min] at all times.

-1: Flow rate is displayed in [mL/ min] at all times.

Factory Setting

When the setting corresponds to the

actual operating differential pressure,

Remarks

control can be optimized. (When "0" is set, the control response speed becomes fast. When "2" is set, the control response speed becomes slow.)

0 0: When the flow rate range or gas

type is changed, the unit is automatically changed to the display unit so that the range after change becomes the maximum resolution.

1: A value less than 0.001[L/min] is

not displayed

C-38

PV (instantaneous flow rate) display decimal point change function

0: Decimal point position is not

changed

1: Decimal point position is

shifted one digit left

-1: Decimal point position is shifted one digit right

0 The decimal point position of the SP

display is not changed. 1: When the standard decimal point

position is the 4th digit (0.xxx), the function is invalid even though this setting is selected. If the flow rate exceeds the display range, a dash is displayed for all digits (----).

-1: When the standard flow rate display does not have a decimal point, it is invalid even though this function is selected.

*1. If “4” (flow rate setting method switching) is selected for one of the external contact input func-

tion assignments (C-10 to C-12), switching by external contacts has priority.

*2. According to the settings in

c-05

and

, the analog input and output ranges are changed

c-06

as shown in the table below.

Setting in

C-06

0 to 5 V internal reference input/

0 to 5 V instantaneous flow rate output

0 to 5 V internal reference input/ 1 to 5 V instantaneous flow rate output

0 to 20 mA external reference input/ 0 to 20 mA instantaneous flow rate output

0 to 20 mA external reference input/ 4 to 20 mA instantaneous flow rate output

4 0 to 5 V internal reference input/

0 to 5 V setting flow rate output

5 0 to 5 V internal reference input/

1 to 5 V setting flow rate output 0 to 20 mA external reference input/

0 to 20 mA setting flow rate output

0 to 20 mA external reference input/ 4 to 20 mA setting flow rate output

0 1 2

Settings in function setup

0 to 5 V external reference input/ 0 to 5 V instantaneous flow rate output 0 to 5 V external reference input/ 1 to 5 V instantaneous flow rate output 0 to 20 mA external reference input/ 0 to 20 mA instantaneous flow rate output 0 to 20 mA external reference input/ 4 to 20 mA instantaneous flow rate output 0 to 5 V external reference input/ 0 to 5 V setting flow rate output 0 to 5 V external reference input/ 1 to 5 V setting flow rate output 0 to 20 mA external reference input/ 0 to 20 mA setting flow rate output 0 to 20 mA external reference input/ 4 to 20 mA setting flow rate output

C-05

1 to 5 V external reference input/ 0 to 5 V instantaneous flow rate output 1 to 5 V external reference input/ 1 to 5 V instantaneous flow rate output 4 to 20 mA external reference input/ 0 to 20 mA instantaneous flow rate output 4 to 20 mA external reference input/ 4 to 20 mA instantaneous flow rate outpu 1 to 5 V external reference input/ 1 to 5 V setting flow rate output 1 to 5 V external reference input/ 1 to 5 V setting flow rate output 4 to 20 mA external reference input/ 0 to 20 mA setting flow rate output 4 to 20 mA external reference input/ 4 to 20 mA setting flow rate output

5-9

Chapter 5. ADVANCED OPERATION

*3. When "4: Switching of analog I/O voltage range" is selected for external 3-way switching func-

tion assignment

in the function setup, external 3-way switching input has priority .

c-09

Additionally, the analog input and output ranges change as shown in the table below according to the input status and the setting status of

Setting in

C-06

0 to 5 V internal reference input/

0 1

0 to 5 V instantaneous flow rate output 0 to 20 mA external reference input/

2 3

0 to 20 mA instantaneous flow rate output 0 to 5 V internal reference input/

4 5

0 to 5 V setting flow rate output 0 to 20 mA external reference input/

6 7

0 to 20 mA setting flow rate output

OPEN 0 V 5 V

Status of external 3-way switching input

0 to 5 V external reference input/ 0 to 5 V instantaneous flow rate output 0 to 20 mA external reference input/ 0 to 20 mA instantaneous flow rate output 0 to 5 V external reference input/ 0 to 5 V setting flow rate output 0 to 20 mA external reference input/ 0 to 20 mA setting flow rate output

c-06

1 to 5 V internal reference input/ 1 to 5 V instantaneous flow rate output 4 to 20 mA external reference input/ 4 to 20 mA instantaneous flow rate output 1 to 5 V internal reference input/

1 to 5 V setting flow rate output 4 to 20 mA external reference input/

4 to 20 mA setting flow rate output

*4. This setting can be made only for models with RS-485 communications.

*5. This function can be set only on the MQV9500 and MQV0005.

*6. The SP display on the main unit shows the final SP that was reached. This setting is also valid if

, “Flow rate setup method selection” is set to “1: Analog setup (by external analog input

C-03

voltage).”

If “1” or “5” (operation mode switching) is selected for external 3-way switching input function

*7.

and if the valve is set to fully closed or fully open mode by external 3-way switching

C-09

input, the operation mode cannot be switched using the [RUN] key. If the valve is set to control mode by external 3-way switching input, the operation mode can be switched using the [RUN] key. Based on the setting for

, the operation mode changes in accordance with the input sta-

C-09

tus as shown in the table below.

C-09

setting

1 Control mode

Operation mode can be switched between control / fully closed / fully open using the [RUN] key.

5 Fully closed mode Control mode

OPEN 0 V 5 V

Status of external 3-way switching input

Fully closed mode Fully open mode

Fully open mode Operation mode can be switched between control / fully closed / fully open using the [RUN] key.

5-10

Chapter 5. ADVANCED OPERATION

*8 If “5,” “6,” or “8” (operation mode switching) is selected for one of the external contact input func-

tion assignments (C- 10 to C- 12) and if the valve is set to fully closed or fully open mode by external contacts, the operation mode cannot be switched using the [RUN] key. If the valve is set to control mode by external contacts, the operation mode can be switched using the [RUN] key. Based on the settings for C- 10 to C- 12, the operation mode changes in accordance with the input status as shown in the table below.

to C- 12 settings

C- 10

5 Fully closed mode Control mode

6 Fully open mode Control mode

8 Control mode

Operation mode can be switched be-

tween control / fully closed / fully open

using the [RUN] key.

ON OFF

Status of external contact input

Handling Precautions

•

When the operational differential pressure setting ( to "0: Low differential pressure (50 ± 50 kPa)," always use the device with an operational differential pressure less than 100 kPa. Failure to do so may cause overshoot or hunting of the flow rate.

Operation mode can be switched between control

/ fully closed / fully open using the [RUN] key.

Operation mode can be switched between control

/ fully closed / fully open using the [RUN] key.

Fully open mode

) is changed

C-36

5-11

Chapter 5. ADVANCED OPERATION

5-2 Parameters

This section describes parameter setup.

[DISP] key

z Setup method

Follow the procedure below to set constants such as flow rate deviation alarm upper and lower limit setting values and event output delay times : (1) Press the [DISP] key several times to display the instantaneous

flow rate.

>> The PV and L/min lamps light. (2) Hold down the [ >> Item No.

mode changes to the parameter setup mode.

(3) Press the [

bers, and press the [ENT] key.

>> The current setting blinks on the 7-segment display. (4) Press the [

You can move to the digit to be changed by pressing the [

(5)

When you have finished changing the setting, press the [ENT] key

to enter the setting. >> At this point, the setting is updated. (6) If you want to set up other items, return to step (3) and repeat

the procedure.

Otherwise, proceed to step (7). (7) Press the [DISP] key. >> The mode return to the instantaneous flow rate mode from the

parameter setup mode.

Handling Precautions

•

If you do not press any keys for one minute after entering the parameter setup mode, the display automatically returns to the regular (instantaneous flow rate) display.

•

If you press the [DISP] key without pressing the [ENT] key after carrying out step (4), the setting remains at the previous value without being updated.

Basic operation Advanced operation

Power ON

Instantaneous ow rate display

[DISP] key

Flow set value display

[DISP] key

Totalized ow display

[DISP] key

Valve amperage display

[DISP] key

[ ]

key + [ENT ] key (3 s or more)

[ ]

key (3 s or more)

[ ]

key (3 s or more)

Function setup mode

Parameter setup mode

Device information display mode

] key for three seconds or more.

is displayed on the 7-segment display and the

0.rnG

▲] or [▼] key to select the desired setup item num-

▲] or [▼] key to change the setting to the desired setting.

] key.

5-12

 Parameter setup item list

No. Display Description Factory Setting Setting Range

0.R

0.HY5

a. HI

a.H.HY

a. lO

a.L.HY

a.DLY

E.1.dL

E.2.dL

C.F.

a.1.HI

a.1.lO

E.1.5P

E.2.5P

raP.1

raP.2

a.5cl

E.a.lO

Flow rate OK

judgment range

Flow rate OK

judgment hysteresis

Flow rate deviation

2, *3

upper limit alarm

Flow rate deviation

2, *3

upper limit alarm

hysteresis Flow rate deviation

2, *3

lower limit alarm

Flow rate deviation

2, *3

lower limit alarm

hysteresis Flow rate deviation

alarm/valve amper-

age alarm judgment

2 % FS

(0.02) *

1 % FS

(0.01) *14

10 % FS

(0.10) *14

2 % FS

(0.02) *14

10 % FS

(0.10) *14

2 % FS

(0.02) *14

10.0 s 0.5 to 999.9 s

delay time Event output 1 delay 0.0 s 0.0 to 999.9 s

Event output 2 delay 0.0 s 0.0 to 999.9 s

User set gas type

conversion factor

Valve amperage

upper limit alarm

Valve amperage

lower limit alarm

Event output 1

upper/ lower limit

flow rate setup Event output 2

upper/ lower limit

flow rate setup SP ramp control

slope 1

SP ramp control

slope 2

1.000 0.100 to 9.999

100.0 % 0.1 to 100.0 %

0.0 % 0.0 to 99.9 %

0% FS

(0.0) *

0% FS

(0.0) *

MQV9020/9050:

0.00 MQV9500:

0.0 MQV0005:

0.000 MQV0010/0050:

0.00 MQV0200:

0.0

Analog scaling 100 % FS

Totalized flow event

setting (last 4 digits)

(1.00) *

0 0 to 9999

0.5 to 100% FS

(0.005 to 1.00)*

0.5 to 100% FS

(0.005 to 1.00)*

0.5 to 100% FS

(0.005 to 1.00)*

0.5 to 100% FS

(0.005 to 1.00)*

0.5 to 100% FS

(0.005 to 1.00)*

0.5 to 100% FS

(0.005 to 1.00)*

C- 16 C-20

C-08

C-26

C-20

0 to 100 % FS

(0.0 to 1.00) *

0 to 100 % FS

(0.0 to 1.00) *

MQV9020/9050:

0.00 to 99.99 MQV9500 :

0.0 to 999.9 MQV0005 :

0.000 to 9.999 MQV0010/0050 :

0.00 to 99.99 MQV0200:

0.0 to 999.9

10 to 100% FS

(0.10 to 1.00) *

Chapter 5. ADVANCED OPERATION

Function

Remarks

Setup

Unit: L/min (standard)

C-07

C-08

C-22

C-15

C-16

C-15 C-16 C-20

Delay does not apply to

C-07

totalizer pulse output.

C-08

C-18 C-26

At the factory setting,

C-16

alarms are not detected.

C-20

Handling Precautions

(P.5-15). Unit: L/min (standard)

C-07

C-08

Sets the flow rate change per

C-27

second.

Flow rate unit: L/min (standard) (mL/min (standard) for the

MQV9020/9050/9500) Ramp control does not func tion if the value stays at the

tory setting (slope zero).

fac (The SP takes effect immediately after a change.)

sponding to 100 % of ana-

Sets the flow rate corre-

C-28

log input / output (5 V). Unit: L/min(standard) The unit (decimal point

C-07

position) may vary de-

C-08

pending on the model.

C- 13

5-13

Chapter 5. ADVANCED OPERATION

No. Display Description Factory Setting Setting Range

E.a.HI

P.0.Dl

SP.l.H

SP.l.L

Totalized flow event

setting (first 4 digits)

PV forced zero func-

tion delay

SP upper limit flow rate

SP lower limit flow rate

0 0 to 9999

3.0 s 0.0 to 999.9 s

100 % FS (1.00) *

0 % FS

(0.0) *

0 to 100 % FS

(0.0 to 1.00) *

0 to 100 % FS

(0.0 to 1.00) *

Function

Setup

Remarks

Flow rate totalization

(P.1-3).

C-29

Unit: L/min (standard)

C-35

*1. Operation during judgment of flow rate OK.

0.r G

0.hy50.hy5

ON (OK)

OFF

0.r G

*2. Operation during judgment of flow rate deviation upper and lower limit alarms

Be sure to set so that

a.lO≥ a.L.hy

ON (ALM)

OFF

a.hi

≥

a.h.hy.

a.h.hya. L.hy

a. hia. lO

*3. Only items corresponding to the alarm type selected in flow rate alarm setup (c- 15 in the func-

tion setup) can be set.

*4. These alarms can be set when (1 to 3) is set for flow rate alarm setup type (c- 15) and valve am-

perage alarm setup type (c- 20) in the function setup.

*5. T his cannot be set when "0: Not used (OFF all times)" has been selected for c- 07 and c- 08

event output type assignment in the function setup.

*6. This can be set only when "0: Conversion factor for each gas type set by the user" has been se-

lected for the c- 18 or c- 26 gas type selection 1 or 2 in the function setup.

*7. This can be set only if a suitable alarm type is selected in the c- 20 valve amperage alarm setup

(in the function setup).

*8. This can be set only when "8 to 10: PV upper / lower limit event 1, 2" has been selected for the

and c- 08 event output type assignment in the function setup.

c- 07

*9. This can be set only when "1 and 2: SP ramp control" has been selected for the c- 27 SP ramp

control function in the function setup.

*10. This can be set only when "1: Function enabled" has been selected for the c- 28 analog op-

tional scaling function in the function setup.

5-14

Chapter 5. ADVANCED OPERATION

*11. This can be set only when "11: Cumulative flow event" has been selected as event output type

in c- 07 or c- 08 in the function setup or when "1: Function enabled" has been selected for the automatic valve shut-off function upon occurrence of the cumulative flow event (c- 13).

*12. This can be set only when "1: Function enabled" has been selected for the c- 29 forced PV

zero function in the function setup.

*13. This can be set only if suitable limit type is selected for the c- 35 SP limit function in the func-

tion setup.

*14. The initial value and setting range are the full scale value multiplied by the ratio in parenthe-

ses. (The setting range differs according to model number and gas type.)

Handling Precautions

•

The valve amperage changes greatly according to the differential pressure even if the flow rate is the same. For this reason, the valve amperage alarm function cannot be used under unstable differential pressure conditions.

•

Even under stable differential pressure conditions, hysteresis characteristics (electric current to the valve differs even if the flow rate is the same) are applied to the relationship between the valve amperage and the flow rate. So, to use the valve amperage alarm function, first sufficiently test under operating conditions to check the valve amperage range, and then determine the alarm amperage setting.

5-15

Chapter 5. ADVANCED OPERATION

5-3 Device Information Display

This section describes device information display.

[DISP] key

 Setup method

Basic operation

Power-ON

Instantaneous ow rate display

[DISP] key

Flow set value display

[DISP] key

Totalized ow display

[DISP] key

Valve amperage display

[DISP] key

[ ]

Four items of those set on the device, that is, gas type, full-scale flow rate, reference temperature, and communications address* are displayed sequentially.

(1) Press the [DISP] key several times to display the instantaneous

flow rate.

>> The instantaneous flow rate is displayed and the PV and L/min

("mL/min" on the MQV9020/9050) lamps light.

(2) Hold down the [

>> The

is displayed on the 7-segment display and the mode

GA5

changes to the device information display mode.

(3) Release the [

(4) Press the [

▲] key once.

▲] or [▼] key to select the desired setting.

>> When releasing the key, the display item and currently set value

are alternately displayed automatically.

(5) If you want to set up other items, return to step (3) and repeat

the procedure. Otherwise, proceed to step (6).

(6) Press the [DISP] key.

>> The mode returns to the instantaneous flow rate display mode.

* The communications address is displayed only on models with the RS-

485 communications option.

Advanced operation

[ ]

key + [ENT] key (3 s or more)

key (3 s or more)

▲] key for three seconds or more.

Function setup mode

Parameter setup mode

Device information display mode

Handling Precautions

5-16

•

If you do not press any keys for one minute after entering the device information display mode, the display automatically returns to the instantaneous flow rate display.

 Device information display item

Chapter 5. ADVANCED OPERATION

No.

Display

Item

Ga5

f.5Cl

5.deG

c.ad5

Description

Gas type 0 : Conversion factor for

Full-scale flow rate

Reference temperature

Communications address

Setting Range and

Description

each gas type set by the

user 9 : Hydrogen 10 : Helium (10 to 100 % of standard range)

0 to 35

0 to 127

* Only for models with RS-485 communications.

Function Setup

C- 18, C-26

C- 18, C-24 C-25, C-26

C- 19

C-30

Remarks

Unit: L/min(standard) ("mL/ min(standard)" on the MQV9020/9050) Unit: °C

"0" means communications function disabled.

5-17

Chapter 5. ADVANCED OPERATION

5-4 Flow Rate Range

The flow rate range can be reduced to a level of 99% down to 10% of the standard range using the flow rate range setup ( as for the standard range. As the range is reduced, the setup and display resolution levels are improved as described in the table below.

Setup and display resolution levels after changing of range

MQV9020 MQV9050 MQV9500 MQV0005 MQV0010

Full scale

flow rate

[mL/min]

20.0–12.1 0.1 30.0–12.1 0.1 0.300–0.121 0.001 3.00–1.21 0.01 − −

12.00–6.05 0.05 12.00–6.05 0.05 (120.0–

6.00–3.02 0.02 6.00–3.02 0.02 (60.0–30.2) (0.2) 0.600–0.302 0.002 6.00–3.02 0.02

3.00–1.00 0.01 3.00–1.00 0.01 (30.0–10.0) (0.1) 0.300–0.100 0.001 3.00–1.00 0.01

Full scale flow rate

[L/min]

50.0–30.2 0.2 − −

30.0–12.1 0.1 200–121 1

12.0–6.05 0.05 120.0–60.5 0.5

6.00–3.02 0.02 60.0–30.2 0.2

3.00–1.00 0.01 30.0–10.0 0.1

Resolution

[mL/min]

− − 50.0–30.2 0.2 0.500–0.302 0.002 5.00–3.02 0.02 − −

MQV0050 MQV0200

Resolution

[L/min]

Full scale flow rate [mL/min]

Full scale flow rate

[L/min]

C-24

C-25

Resolution

[mL/min]

Resolution

[L/min]

). However, the minimum control flow rate is the same

Full scale flow rate

[L/min]

60.5)

Resolution

Full scale

[L/min]

flow rate

(0.5) 1.200–0.605 0.005 10.00–6.05 0.05

[L/min]

Resolution

[L/min]

Full scale flow rate

[L/min]

Resolution

[L/min]

Note: The display unit of the flow rate shown in ( ) for the MQV9500 is mL/min.

Handling Precautions

•

Even after flow rate range is changed, the accuracy specifications are the same as for the standard range. (The full scale designated

by % FS shows the numeric value of the standard range.)

•

Even though the flow rate range is changed, the minimum control flow rate is the same as for the standard range.

•

Analog input/output scaling is changed automatically so that the flow rate range after the change is shown as full scale (FS).

5-18

 Setup resolution in the analog setup

When "1: Analog setup" is selected in setup is done using an external analog voltage or analog current, a higher resolution can be set than in the digital setup.

Analog setup signal Flow rate setup resolution

0 to 5 V or 0 to 20 mA About 1/3700 of the full scale flow rate

1 to 5 V or 4 to 20 mA About 1/3000 of the full scale flow rate

Example: Setting MQV0050 (50 L/min range) with an analog current

of 4 to 20 mA Setup resolution ≠ 50 L/min ÷ 3000 ≠ 0.017 L/min (standard)

Chapter 5. ADVANCED OPERATION

(flow rate setup) and

C-03

5-19

Chapter 6. TROUBLESHOOTING

 Alarm code display

When a flow rate deviation alarm occurs or when an alarm occurs during selfdiagnostics, the device forcibly switches to the operating mode currently selected for “Operation selection at alarm occurrence” (c- 16 in the function setup).

Additionally, the alarm code and normal display are alternately shown at the upper 4- digit portion of the 7-segment display.

Alarm

code

al0 1

al02

al 1 1

al 12

al8 1

al82

al83

al9 1

al92

al93

Problem Causes Remedy

Flow rate deviation lower limit alarm

Flow rate deviation upper limit alarm Valve amperage lower limit alarm

Valve amperage upper limit alarm

Sensor error 1 (Heater voltage error)

Sensor error 2 (Measured flow rate signal error) Sensor error 3 (Sensor safety circuit activated) Calibration data error Data corrupted due to electrical

Sensor calibration data error User setting data error Power shut-off during user setup

Insufficient alarm judgment delay/ power voltage/inlet pressure, excessive inlet pressure/operating temperature, etc. Insufficient alarm judgment delay, valve trouble, sensor trouble, etc. Insufficient alarm judgment delay, alarm setting current value too high, excessive inlet pressure, etc. Insufficient alarm judgment delay, alarm setting current value too low, insufficient power voltage, insufficient inlet pressure, etc. Sensor trouble, foreign object on sensor, condensation on sensor, influx of hydrogen or helium gas, etc. Sensor trouble, foreign object on sensor, back current, etc.

Sensor failure, excessive flow rate, excessive operating temperature (etc.)

noise. Data corrupted due to electrical noise.

data writing.

If items under causes do not help, ask for repair.

Ask for repair if the delay is not a problem. Set parameter setup again.

Set parameter setup again.

Remove the probable causes. If the device does not return to normal operation even after the power has been shutdown for a while, ask for repair.

Ask for repair

Set data again.

Handling Precautions

•

The alarm code is displayed only when the instantaneous flow rate or totalized flow is displayed.

•

If a sensor error ( ment value will become indefinite. Therefore, the control flow rate becomes indefinite even if "0, 1, -1: Control continued" was selected for c- 16 in the function setup.

•

When "2, -2: Forced fully closed" or "3, -3: Forced fully open" is selected for c- 16 in the function setup, the alarm display and operating mode at alarm occurrence are retained. To reset the alarm, perform the alarm reset operation.

AL8 1

) occurs, the flow rate measure-

AL83

6-1

Chapter 6. TROUBLESHOOTING

z Alarm reset operation

When the [ENT] key is kept pressed continuously while the instantaneous flow rate is being displayed, the alarm is reset after 3 seconds have elapsed.

6-2

Chapter 6. TROUBLESHOOTING

 Troubleshooting guide

Observation Causes Remedy

Flow rate display does not become zero even with an actual zero flow rate. (Display is not even if the valve is fully closed.)

Flow rate does not stabilize.

Poor accuracy • Temperature reference does not match

Off

• The device is installed on the vertical (orinclined) piping.

• Condensation on sensor

• Zero point of sensor has deviated

• Foreign object on sensor

• Operating differential pressure range is

exceeded.

• Inlet pressure fluctuates greatly.

• Regulator interference

• Large pressure loss in piping (inlet pres-

sure fluctuates greatly according to flow rate.)

• Check valve vibration.

• Operating differential pressure set-

ting (function setup match the actual operating differential pressure.

the reference flow meter.

• Regulator is vibrating slightly.

• Foreign object stuck on sensor

C-36

) does not

• Install in horizontal piping or use the forced PV zero function (function setup

C-29

• Insert a mist trap upstream.

• Adjust the flow rate zero

• Ask for repair.

• Lower the primary pressure.

• Insert a regulator upstream.

• Change the regulator’s pressure setting or increase the capacity of the pipe between this device and the regulator.

• Apply the instantaneous PV filter (function setup

• Use larger diameter pipe.

• Change the check valve to one having a low cracking pressure.

• Adjust the operating differential pressure setting to the actual operating differential pressure or set "2" for the operating differential pressure setup.

• Match the temperature reference.

(Change in C- 19 in the function setup.)

• Change the regulator pressure setting.

• Ask for repair.

C-23

z Flow rate zero adjustment

If a cause of the flow rate does not becoming zero in spite of an actual zero flow rate is that the sensor's zero point has deviated, adjust the flow rate zero point as follows:

(1) Press the [DISP] key to display the instantaneous PV display.

(The PV and ("mL/min" on the MQV9020/9050) L/min lamps light.)

(2) Set the operating mode to the fully closed mode, or set the set-

ting flow rate to zero, and fully close the valve.

(3) Continue pressing the [ENT] key in this state.

(4) After about 10 seconds, 0.

about one second, release the [ENT] ke y.

(5) The display changes to

completed.)

is indicated on the display. After

cal

. (Flow rate zero adjustment is

0ff

6-3

Chapter 6. TROUBLESHOOTING

Handling Precautions

•

Perform flow rate zero adjustment with the actual flow rate stabilized to zero after completely replacing the inside of the flow path with the gas to be controlled.

Note

•

Flow rate zero adjustment can be performed by external contact input by selecting “flow rate zero adjustment” for C- 10 to C- 12 in the function setup. For details on how to set up functions,

Chapter 5. ADVANCED OPERATION.

6-4

Chapter 7. SPECIFICATIONS

 Individual specifications

Please go to the next page.

7-1

Chapter 7. SPECIFICATIONS

z MQV9020/9050

Item

Model No.

Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate * Gas types Hydrogen (H

20.0 mL/min (standard) 50.0 mL/min (standard)

Gas must be dry and not contain corrosive components (chlorine, sulfur, acid). The gas must also be clean, not containing dust or oil mist.

Control Range 1 to 100 % FS (see “Gas type and control range” table (page 7-9))

Valve output update cycle Response

(at standard differential

5 ms Within 0.5 s at setting ±2% FS (typ.)

(Control starts from the fully closed status or the setting is changed during control.)

pressure) Accuracy

(at standard temperature and differential

(1) ±1 % FS (50 % FS < Q ≤ 100 % FS) (2) ±0.5 % FS (0 % FS ≤ Q ≤ 50 % FS)

pressure, Q: flow rate)

Repeatability (Q: flow rate)

Temperature characteristics

(1) ±0.5 % FS (50 % FS < Q ≤ 100 % FS) (2) ±0.25 % FS (0 % FS ≤ Q ≤ 50 % FS)

0.06 % FS max. per 1°C

Pressure characteristics 0.2 % FS max. per 100 kPa

Pressure Standard differential

100 kPa (Inlet pressure: 100 kPa (gauge), outlet pressure: 0 kPa (gauge))

pressure Required differential

pressure * Operating differential

pressure range * Allowable inlet pres-

sure *

Hydrogen: 2.5 kPa

Helium: 5 kPa 300 kPa max.

0.5MPa (gauge)

Pressure resistance 1 MPa (gauge)

Temperature

Standard operating

+23 °C

temperature Allowable operating

–10 to +60 °C

temperature range Allowable storage tem-

–20 to +70 °C

perature range

Humidity Allowable operating

10 to 90 % RH (condensation not allowed)

humidity range

External

Helium leak rate Within 1 x 10

leaks Flow rate

setup

Setup method (1) Key operation (2) External analog input

(3) MLP loader communications* (4) RS-485 communications (3 wire-system)*

Setup resolution

External analog input Input range: 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable)

Input impedance: 1 MΩ ± 10% (for voltage input) 250 Ω ± 10% (for current input)

MQV9020 MQV9050

), Helium (He)

±1 % FS

±0.5 % FS

Hydrogen: 10 kPa Helium: 20 kPa

-6

Pa·m3/s

“Gas type and control range” table (page 7-9).

7-2

Chapter 7. SPECIFICATIONS

Item Flow rate display

Model No.

Display method 7-segment LED, 4 digits Setup resolution See “Gas type and control range” table (page 7-9). Indication accuracy (at standard temperature and differential

(1)

±1 % FS ±1 digit (50 % FS < Q ≤ 100 % FS)

(2)

±0.5 % FS ±1 digit (0 % FS ≤ Q ≤ 50 % FS)

MQV9020 MQV9050

±1 % FS ±1 digit

pressure;

Q: flow rate) Totalizing function

Display range 0.0 to 99,999,999 mL

Display resolution 1 mL

Totalized count backup

timing

(1) Every 200 mL (1) Every 500 mL (2) Every hour from the previous backup

(3) At the time the RUN key is pressed. Analog output

Output type Instantaneous flow rate (PV) output or setting flow rate (SP) output

(switchable)

Output scale 0 to full-scale flow rate (scale can be changed) Output range 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable) Max. output 7 V DC max./28 mA max. (max. output when flow rate exceeds the range) Accuracy Total output accuracy ±0.3% FS Indication accuracy ±0.3 % FS

External resistance Voltage output type: 250 kΩ min. Current output type: 300 Ω max. Alarm/ event output

External switching input

Number of outputs Alarm output: 1, Event output: 2

Output rating 30 V DC, 30 mA max. (open collector non-insulated output)

Totalized pulse output width

Totalized pulse output rate

Input type, number of

inputs

100 ms ±10 % (when pulse output is selected in the function setup) 1 mL /1 pulse External 3-way switching input (OPEN/0 V/5 V): 1

External contact input (2-way switching): 3 Required circuit type Non-voltage contact, or open collector Contact OFF terminal voltage Contact ON terminal

External 3-way switching input: 2.5 ±0.5 V

External contact input: 2.8 ±0.5 V

Approx. 0.5 mA (current flowing to contact) current Allowable ON contact

250 Ω max. resistance Allowable OFF contact

100 kΩ min. resistance Allowable ON residual

1.0 V max. (open collector type) voltage Allowable OFF leakage

50 μA max. (open collector type)

current

Reference voltage output

Communications

Output rating 5.0 V DC ±5 %, 5 mA max. Application Reference voltage of flow rate setting voltage and 5V input of

external 3-way switching input

Mode (1) MLP loader communications *

(2) RS-485 communications (3-wire system) *

Transmission speed 2400, 4800, 9600, 19200, 38400 bps

(only 19200 bps for loader communications )

Power Rating 24 V DC, current consumption: 300 mA max.

Allowable power voltage range

21.6 to 26.4 V (ripple 5 % max.) Isolation The power circuit is isolated from the input/output circuit.

Material of gas-contacting parts SUS316, fluororesin, Fluororubber Connection method 1/4" Swagelok, 1/4" VCR Mounting orientation Horizontal. Be sure that display surface does not face down. Mass Approx. 1.2 kg Applicable standards EN61326-2-3, EN61326-1

(To be used in an industrial electromagnetic environment) During EMC testing, the reading or output may fluctuate by the equivalent of ±10%FS.

7-3

Chapter 7. SPECIFICATIONS

z MQV9500/0005/0010

Item

Model No.

Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate * Gas types Hydrogen (H

Control Range 1 to 100 % FS (see “Gas type and control range” table (page 7-9))

Valve output update cycle Response

(at standard differential pressure)

Accuracy (at standard temperature and differential pressure, Q: flow rate)

Repeatability (Q: flow rate)

Temperature characteristics Pressure characteristics 0.2 % FS max. per 100 kPa

Pressure Standard differential

pressure Required differential

pressure * Operating differential

pressure range * allowable inlet pres-

sure * Pressure resistance 1 MPa (gauge)

Temperature

Standard operating temperature

Allowable operating temperature range

Allowable storage temperature range

Humidity Allowable operating

humidity range

External

Helium leak rate Within 1 x 10

leaks Flow rate

Setup method (1) Key operation (2) External analog input

setup

Setup resolution

External analog input Input range: 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable)

MQV9500 MQV0005 MQV0010

0.500 L/min (standard) 5.00 L/min (standard) 10.00 L/min (standard)

Gas must be dry and not contain corrosive components (chlorine, sulfur, acid).

), Helium (He)

The gas must also be clean, not containing dust or oil mist.

5 ms Within 0.3 s at setting ±2% FS (typ.)

(Control starts from the fully closed status or the setting is changed during control.)

(1) ±2.0 % FS (80 % FS < Q ≤ 100 % FS) (2) ±1.0 % FS (40 % FS < Q ≤ 80 % FS) (3) ±0.5 % FS (0 % FS ≤ Q ≤ 40 % FS)

(1) ±0.5 % FS (40 % FS < Q ≤ 100 % FS) (2) ±0.25 % FS (0 % FS ≤ Q ≤ 40 % FS)

0.06 % FS max. per 1°C

200 kPa (Inlet pressure: 200 kPa (gauge), outlet pressure: 0 kPa (gauge))

Hydrogen: 20 kPa

Helium: 40 kPa 300 kPa max.

0.5 MPa (gauge)

Hydrogen: 80 kPa Helium: 150 kPa

+23 °C

–10 to +60 °C

–20 to +70 °C

10 to 90 % RH (condensation not allowed)

-6

Pa·m3/s

(3) MLP loader communications* (4) RS-485 communications (3 wire-system)*

“Gas type and control range” table (page 7-9).

Input impedance: 1 MΩ ± 10% (for voltage input) 250 Ω ± 10% (for current input)

7-4

Chapter 7. SPECIFICATIONS

Item Flow rate display

Model No.

Display method 7-segment LED, 4 digits Setup resolution

Indication accuracy (at standard temperature and differential pressure;

MQV9500 MQV0005 MQV0010

“Gas type and control range” table (page 7-9). (1) ±2 % FS ±1 digit (80 % FS < Q ≤ 100 % FS) (2) ±1 % FS ±1 digit (40 % FS < Q ≤ 80 % FS) (3) ±0.5 % FS ±1 digit (0 % FS ≤ Q ≤ 40 % FS)

Q: flow rate) Totalizing function

Display range 0.00 to 999,999.99 L 0.0 to 9,999,999.9 L 0.0 to 99,999,999 L

Display resolution 0.01 L 0.1 L 1 L

Totalized count backup

timing

(1) Every 5 L (1) Every 50 L (1) Every 100 L (2) Every hour from the previous backup

(3) At the time the RUN key is pressed. Analog output

Output type Instantaneous flow rate (PV) output or setting flow rate (SP) output

(switchable)

External resistance Voltage output type: 250 kΩ min. Current output type: 300 Ω max. Alarm/ event output

External switching input

Number of outputs Alarm output: 1, Event output: 2

Output rating 30 V DC, 30 mA max. (open collector non-insulated output)

Totalized pulse output width

Totalized pulse output rate

Input type, number of

inputs

100 ms ±10 % (when pulse output is selected in the function setup)

0.01 L /1 pulse 0.1 L /1 pulse 1 L /1 pulse External 3-way switching input (OPEN/0 V/5 V): 1 External contact input (2-way switching): 3

Required circuit type Non-voltage contact, or open collector Contact OFF terminal voltage Contact ON terminal

External 3-way switching input: 2.5 ±0.5 V External contact input: 2.8 ±0.5 V Approx. 0.5 mA (current flowing to contact)

current Allowable ON contact

250 Ω max.

resistance Allowable OFF contact

100 kΩ min.

resistance Allowable ON residual

1.0 V max. (open collector type)

voltage Allowable OFF leakage

50 μA max. (open collector type)

current Reference voltage output

Communications

Output rating 5.0 V DC ±5 %, 5 mA max.

Application Reference voltage of flow rate setting voltage and 5V input of

external 3-way switching input

Mode (1) MLP loader communications *

(2) RS-485 communications (3-wire system) *

Transmission speed 2400, 4800, 9600, 19200, 38400 bps

(only 19200 bps for loader communications )

Power Rating 24 V DC, current consumption: 300 mA max.

Allowable power voltage

21.6 to 26.4 V (ripple 5 % max.) range Isolation The power circuit is isolated from the input/output circuit.

Material of gas-contacting parts SUS316, fluororesin, Fluororubber Connection method 9/16-18UNF, Rc 1/4", 1/4" Swagelok, 1/4" VCR Mounting orientation Horizontal. Be sure that display surface does not face down. Mass Approx. 1.2 kg Applicable standards EN61326-2-3, EN61326-1

(To be used in an industrial electromagnetic environment) During EMC testing, the reading or output may fluctuate by the equivalent of ±10%FS.

7-5

Chapter 7. SPECIFICATIONS

z MQV0050/0200

Item

Model No.

Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate * Gas types Hydrogen (H

50.0 L/min (standard) 200 L/min (standard)

Gas must be dry and not contain corrosive components (chlorine, sulfur, acid). The gas must also be clean, not containing dust or oil mist.

Control Range 1 to 100 % FS (see “Gas type and control range” table (page 7-9))

Valve output update cycle Response

(at standard differential pressure)

Accuracy (at standard temperature and differential

5 ms Within 0.3 s at setting ±2 % FS (typ.)

(Control starts from the fully closed status or the setting is changed during control.)

(1) ±2 % FS (80 % FS < Q ≤ 100 % FS) (2) ±1 % FS (40 % FS < Q ≤ 80 % FS) (3) ±0.5 % FS (0 % FS ≤ Q ≤40 % FS)

pressure, Q: flow rate) Repeatability (Q: flow rate)

(1) ±0.5 % FS (40 % FS < Q ≤ 100 % FS)

(2) ±0.25 % FS (0 % FS ≤ Q ≤40 % FS) Temperature characteristics Pressure characteristics

Pressure Standard differential

0.06 % FS max. per 1°C

0.2 % FS max. per 100 kPa

200 kPa (Inlet pressure: 200 kPa (gauge), outlet pressure: 0 kPa (gauge)) pressure

Required differential pressure *

Operating differential pressure range *

allowable inlet pressure *

Hydrogen: 20 kPa

Helium: 40 kPa

300 kPa max.

0.5 MPa (gauge)

Pressure resistance 1 MPa (gauge)

Temperature

Standard operating

+23 °C temperature

Allowable operating

–10 to +60 °C temperature range

Allowable storage

–20 to +70 °C temperature range

Humidity Allowable operating

10 to 90 % RH (condensation not allowed) humidity range

External

Helium leak rate Within 1 x 10

leaks Flow rate

setup

Setup method (1) Key operation (2) External analog input

(3) MLP loader communications*

(4) RS-485 communications (3 wire-system)* Setup resolution See “Gas type and control range” table (page 7-9). External analog input Input range: 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable)

Input impedance: 1 MΩ ± 10 % (for voltage input)

250 Ω ± 10 % (for current input)

Flow rate display

Display method 7-segment LED 4 digits Setup resolution See “Gas type and control range” table (page 7-9). Indication accuracy (at

standard temperature and differential pres-

(1) ±2 % FS ±1 digit (80 % FS < Q ≤ 100 % FS)

(2) ±1 % FS ±1 digit (40 % FS < Q ≤ 80 % FS)

(3) ±0.5 % FS ± 1digit (0 % FS ≤ Q ≤ 40 % FS) sure; Q: flow rate)

MQV0050 MQV0200

), Helium (He)

Hydrogen: 100 kPa Helium: 180 kPa

-6

Pa·m3/s

7-6

Chapter 7. SPECIFICATIONS

Item

Totalizing function

Model No.

Display range

0 to 99,999,999 L

Display resolution 1 L 0.01m Totalized count backup timing

(1) Every 500 L (1) Every 2 m (2) Every hour from the previous backup

MQV0050 MQV0200

0.01 to 999,999.99 m

(3) At the time the RUN key is pressed. Analog output

Output type

Instantaneous flow rate (PV) output or setting flow rate (SP) output (switchable)

Output scale 0 to full-scale flow rate (scale can be changed.) Output range 0 to 5 V DC/1 to 5 V DC/0 to 20 mA/4 to 20 mA (switchable) Max. output 7 V DC max./28 mA max. (max. output when flow rate exceeds range) Accuracy Total output accuracy ±0.3% FS Indication accuracy ±0.3 % FS External load

Voltage output type: 250 kΩ min. Current output type: 300 Ω max.

resistance Alarm/ event output

External switching input

Number of outputs Alarm output: 1, Event output: 2

Output rating 30 V DC, 30 mA max. (open collector non-insulated output)

Totalized pulse output width

Totalized pulse output rate

Input type, number

of inputs

100 ms ±10 % (when pulse output is selected in the function setup) 1 L /1 pulse 0.01 m3 /1 pulse External 3-way switching input (OPEN/GND/5V): 1

External contact input (2-way switching): 3 Required circuit type Non-voltage contact, or open collector Contact OFF terminal voltage Contact ON terminal

External 3-way switching input: 2.5 ±0.5 V

External contact input: 2.8 ±0.5 V

Approx. 0.5 mA (current flowing to contact) current Allowable ON con-

250 Ω max. tact resistance Allowable OFF con-

100 kΩ min. tact resistance Allowable ON re-

1.0 V max. (open collector type) sidual voltage Allowable OFF leak-

50 μA max. (open collector type)

age current

Reference voltage output

Communications

Output rating 5.0 V DC ±5 %, 5 mA max. Application Reference voltage of flow rate setting voltage and 5 V input of external

3-way switching input

Mode (1) MLP loader communications *

(2) RS-485 communications (3-wire system) *

Transmission speed 2400, 4800, 9600, 19200, 38400 bps

(only 19200 bps for loader communications )

Power Rating 24 V DC, current consumption: 300 mA max.

Allowable power

21.6 to 26.4 V (ripple 5 % max.) voltage range Isolation The power circuit is isolated from the input/output circuit.

Material of gas-contacting parts SUS316, Teflon, Fluororubber Connection method 9/16-18UNF, Rc 1/4", 1/4" Swagelok, 1/4" VCR Mounting orientation Horizontal. Be sure that display surface does not face down. Mass Approx. 1.2 kg Applicable standards EN61326-2-3, EN61326-1

(To be used in an industrial electromagnetic environment) During EMC testing, the reading or output may fluctuate by the equivalent of ±10%FS.

7-7

Chapter 7. SPECIFICATIONS

*1. The notations L/min (standard) refer to volumetric flow rate per minute after conversion to 20°C,

1 atmosphere. The reference temperature can also be changed to 0°C, 25°C or 35°C in the C- 19 flow rate display unit selection. For details about the controllable range for each gas type, see the section on Gas type and control range (P.7-9)

*2. Minimum requisite differential pressure for control of full scale flow rate (condition: outlet pres-

sure = 0 kPa [gauge]).

*3. Operation is possible even below the required differential pressure, but the controllable flow

rate range becomes narrower. Relationship between differential pressure and flow rate (For Hydrogen) (P.7-10)

*4. For the advisability of using an inlet pressure greater than 0.5 MPa (gauge), contact the azbil

Group.

*5. The MLP100A100 loader package (sold separately) is needed.

*6. Only models with RS-485 communications option.

 Korea Certification Mark

7-8

 Gas type and control range

The controllable flow rate range may vary depending on the type of gas. For details, see the tables below.

Chapter 7. SPECIFICATIONS

Model No.

Gas type

Hydrogen 0.2 to 20.0 0.1 0.4 to 50.0 0.2 0.004 to 0.500 0.002 Helium 0.2 to 20.0 0.1 0.4 to 50.0 0.2 0.004 to 0.500 0.002

Model No.

Gas type

Hydrogen 0.04 to 5.00 0.02 0.10 to 10.00 0.05 0.4 to 50.0 0.2 Helium 0.04 to 5.00 0.02 0.10 to 10.00 0.05 0.4 to 50.0 0.2

Model No.

Gas type

Hydrogen 2 to 200 1 Helium 2 to 200 1

MQV9020 MQV9050 MQV9500

Control flow

rate range

mL/min

(standard)

Control flow

rate range

L/min

(standard)

Control flow

rate range

L/min

(standard)

Setup/display

resolution

mL/min

(standard)

MQV0005 MQV0010 MQV0050

Setup/display

resolution

L/min

(standard)

MQV0200

Setup/display

resolution

L/min

(standard)

Control flow

rate range

mL/min

(standard)

Control flow

rate range

L/min

(standard)

Setup/display

resolution

mL/min

(standard)

Setup/display

resolution

L/min

(standard)

Control flow

rate range

L/min

(standard)

Control flow

rate range

L/min

(standard)

Setup/display

resolution

L/min

(standard)

Setup/display

resolution

L/min

(standard)

Note

•

The setup and display resolutions described above can be improved by reducing the flow rate range using flow rate range setup A still higher resolution can be set using the analog setup (

C-24

C-25

C-03

=1). For more information, see section 5-4, "Flow Rate Range Change Function and Settings and Display Resolutions After Change of Range" (page 5-18).

 China RoHS

7-9

Chapter 7. SPECIFICATIONS

-50kPa(gauge)

 Relationship between differential pressure and flow rate (For Hydrogen)

Condition : the valve is fully open in air.

z MQV9020/9050/9500/0005

100

Flow rate [L/min(standard)]

Dierential pressure (kPa)

(1)

6 8 1210

(2)

z MQV0010/0050/0200

(1)

0 20 60 80 100 12040

Dierential pressure (kPa)

MQV0010

(2)

(3)

Flow rate [L/min(standard)]

(3)

(4)

Flow rate [L/min(standard)]

0.6

0.5

0.4

0.3

0.2

Flow rate [L/min(standard)]

0.1

0 5 10 15 20 25 30

MQV9500MQV9020/9050

(1)

0 5 10 15 20 25 30

Dierential pressure (kPa)

(3)

(2)

MQV0050

(1)

Dierential pressure (kPa)

(3)

(2)

(4)

6.0

5.0

4.0

3.0

2.0

Flow rate [L/min(standard)]

1.0

0.0

240

200

160

120

Flow rate [L/min(standard)]

MQV0005

(1)

(2)

(3)

0 5 10 15 20 25 30

Dierential pressure (kPa)

MQV0200

(1)

(2)

0 20 40 60 80 100

Dierential pressure (kPa)

(4)

(3)

(4)

7-10

Outlet pressure condition

150kPa(gauge)

(1) (2)

50kPa(gauge)

(3)

0kPa(gauge)

(4)

Chapter 7. SPECIFICATIONS

0 10 20 30 40 50 60

-50 kPa(gauge)

 Relationship between differential pressure and flow rate (For Helium)

Condition : the valve is fully open in air.

z MQV9020/9050/9500/0005

100

Flow rate [L/min(standard)]

0 12 2016 2484

Dierential pressure (kPa)

(1)

z MQV0010/0050/0200

Flow rate [L/min(standard)]

MQV0010

(2) (3)

(1)

0 40 80 120 160 200

Dierential pressure (kPa)

(2)

(4)

0.6

(3)

0.5

(4)

㈬

0.4

0.3

0.2

Flow rate [L/min(standard)]

0.1

Flow rate [L/min(standard)]

0 10 20 30 40 50 60

MQV9500MQV9020/9050

(1)

(2)

(3)

0 10 20 30 40 50 60

Dierential pressure (kPa)

MQV0050

(1)

Dierential pressure (kPa)

(3)

(2)

(4)

6.0

5.0

4.0

3.0

2.0

Flow rate [L/min(standard)]

1.0

0.0

240

200

160

120

Flow rate [L/min(standard)]

MQV0005

(1)

Dierential pressure (kPa)

(3)

(2)

MQV0200

(2)

(1)

0 40 80 120 160 200

Dierential pressure (kPa)

(3)

(4)

Outlet pressure condition

(1)

150 kPa(gauge)

(2)

50 kPa(gauge)

(3)

0 kPa(gauge)

(4)

7-11

Chapter 7. SPECIFICATIONS

=126 [L/min(standard)]

Handling Precautions

•

If the outlet pressure is different from the values graphed on the previous page, calculate the flow rate using the appropriate equation below.

(1) When P2 / P1 > 0.53, Q=C1 (P1-P2) P2 (2) When P2 / P1 0.53,

Q=C2 • P1

P1: Inlet absolute pressure [kPa (abs)] P2: Outlet absolute pressure [kPa (abs)] (Absolute pressure = gauge pressure + 101.3 kPa) Q: Flow rate [L/min (standard)], ([mL/min] (standard) for MQV9020/9050) C1 and C2: Constant values by model (Hydrogen) MQV9020: C1=2.684, C2=1.340 MQV9050: C1=2.684, C2=1.340 MQV9500: C1= 0.01181, C2=0.00590 MQV0005: C1= 0.1181, C2=0.0590 MQV0010: C1= 0.1181, C2=0.0590 MQV0050: C1= 1.181, C2=0.590 MQV0200: C1= 2.091, C2=1.044 (Helium) MQV9020: C1=1.904, C2=0.950 MQV9050: C1=1.904, C2=0.950 MQV9500: C1= 0.00838, C2=0.00418 MQV0005: C1= 0.0838, C2=0.0418 MQV0010: C1= 0.0838, C2=0.0418 MQV0050: C1= 0.838, C2=0.418 MQV0200: C1= 1.483, C2=0.740

Ex.: For the MQV0200, gas type is hydrogen, inlet pressure is 100kPa (gauge), and outlet pressure is 80 kPa (gauge).

P1=201.3 kPa(abs), P2=181.3 kPa(abs)→P2/P1=0.901 Q= 2.091 X (201.3-181.3) X 181.3

 Optional parts (sold separately)

Item Model No. Remarks

Cable with dedicated connector 81446681-001 20-wire flat cable 2 m (AWG#24)

AC adapter 81446957-001 Input rating: 100 to 240 V AC 50/60 Hz 0.4 A

Potentiometer for flow rate setting 81446683-002 5 kΩ with digital dial, 10 turns Front cover for separate displayunit 81446858-001 Mask: 1 piece

Loader Package MLP100A100 MQV can be configured on a PC.

Rc 1/4" joint 81446834-001 Set of 2 pieces, O-ring attached, oil-inhibited product 1/4" Swagelok 81446833-001 Set of 2 pieces, O-ring attached, oil-inhibited product 1/4" VCR 81446895-001 Set of 2 pieces, O-ring attached, oil-inhibited product

Handling Precautions

7-12

81446951-001 20-wire shielded cable 5 m (7/0.2 mm

Output rating: 24 V DC/750 mA Operating temperature range: 0 to 40 °C

Plate: 1 piece Mounting screws: 2 pieces

In addition, operating status such as flow rate trends can be monitored on the PC screen.

•

The old type AC adapter, 81446682-001, (15 V DC, 350 mA) cannot be used for this device.

)

Chapter 7. SPECIFICATIONS

 External dimensions

z Models with integrated display

MQV9020B/9050B/9500B/0005B/0010B/0050B/0200B (For MQV9020B/9050B, only 1/4" Swagelok and 1/4" VCR connections apply)

Unit: mm

ALM EV1 EV2

SP PV

▲

RUN ENT

▼

▲

Digital Mass Flow

Controller

min

DISP

2281

2-9/16-18UNF

Jack for loader

130

7.3

15.5 1847.8

18.5

102

30 ±0.5 30 ±0.5

M4 screw (2) depth 5 min.

11 ±0.515 ±0.5

9/16-18UNF connection type

HEX21

23.523.5

(137)

Rc 1/4" connection type

(25.7) (25.7)

(141.4)

Rc 1/4" tting (2)

HEX9/16

Fitting made by Swagelok (2)

SS-400-1-6STSC11 Applicable pipe:

outside diameter 1/4", material SUS316

1/4" Swagelok connection type

(23.9) (23.9)

1/4" VCR

(137.8)

connection type

SS-4-VCR-1-00032SC11

7-13

Chapter 7. SPECIFICATIONS

z Model with separate display

MQV9020C/9050C/9500C/0005C/0010C/0050C/0200C (For MQV9020C/9050C, only 1/4" Swagelok and 1/4" VCR connections apply)

Main unit Unit: mm

2281

18.5

2-9/16-18UNF

Jack for loader

130

150 ±2

7.3

47.8 18

15.5

102

30 ±0.5

M4 screw (2) depth 5 min.

30 ±0.5

11 ±0.515 ±0.5

9/16-18UNF connection type

HEX21

23.523.5

(137)

Rc 1/4" tting (2)

Rc 1/4" connection type

HEX9/16

Fitting made by Swagelok (2)

(25.7) (25.7)

(141.4)

1/4" Swagelok connection type

SS-400-1-6STSC11 Applicable pipe:

outside diameter 1/4", material SUS316

7-14

(23.9) (23.9)

1/4" VCR

(137.8)

connection type

SS-4-VCR-1-00032SC11

HIROSE ELECTRIC CO., LTD. HIF3BA-16D-2.54R

Separate display unit

Chapter 7. SPECIFICATIONS

Unit: mm

105

29.3 1.6

45.8

ALM EV1 EV2

▲

RUN ENT

▼

▲

Digital Mass Flow Controller

min

（R）

DISP

4.5

12.5

z Cable for connecting display to main unit

Unit: mm

Mounting panel cutout dimensions (recommended)

100 ±0.2

50 ±0.2

0.2

17.5

35 ±

45 ±0.2

90 ±0.2

Red

2000 min.

Oki Electric Cable Company, Limited FLEX-S16-7/0.127-2651P Color: pin No.1, red; pin Nos. 5, 10 and 15, green; others, gray

M4(2)

7-15

Chapter 7. SPECIFICATIONS

z Front cover for separate display unit 81446858-001 Unit: mm

Mask Material: PC/ABS Color: Dark gray

7.1

468333

Plate Material: SPCC t1 Color: Black

(R)

43.6

33.4

4.5

M4 cross recessed head machine screws for mounting (2), 7.5 mm long

112

109.6 100

83.4

4.5 hole

z Cable with dedicated connector

20-wire flat cable 81446681-001 Unit: mm

Pin arrangement

2 4 6 8 10 12 14 16 18 20

1 3 5 7 9 11 13 15 17 19

Housing HIROSE ELECTRIC CO., LTD. HIF3BA-20D-2.54C

(14.4)

End section

25 min.

2000 min.

Oki Electric Cable Company, Limited FLEX S20-7/0.2 (AWG #24) Color: pin No.1, red; pin Nos. 5, 10 and 15, green; others, gray

End section

20 min.

20-wire shielded cable 81446951-001

Pressure connection type special hood Pressure connection socket contact

Pressure connection female connector

HIF3-20CV

1920

7-16

Contact HIROSE ELECTRIC CO., LTD. HIF3-2226SCC (20 P'ces) compatible lead: AWG#22 to #26

(6)

(7.2) (29.95)

200

Ground wire

Heat-shrinkable tube

19.7

5000

Ground terminal φ3.7

Cable 20-core, conductor structure 7/0.2mm coated wire diameter 1.06

8.9

Pin No.-lead wire color correspondence table

Pin No. Lead wire

1 Black 2 Black/White 3 R ed 4 Red/White 5 Green 6 Green/White 7 Yellow 8 Yellow/White

9 Brown 10 Brown/White 11 Blue 12 Blue/White 13 Grey 14 Grey/White 15 Orange 16 Orange/White 17 Purple 18 Purple/White 19 Bright Green 20 Bright Green/White

Chapter 7. SPECIFICATIONS

z Potentiometer for flow rate setting 81446683-002

Digital dial

Potentiometer

•

Unit: mm

16.5

26±1

32 4

±1

18 max.

LOCK

Mounting screw M3xP0.5

AC adapter 81446957-001 Unit: mm

±1

3.175

+0.05

10.5

15.2

±1

(Shaft hole diameter)

19.05

Mounting hole dimensions

3.3 hole

10.3

21 42

19.05

+0.1

hole

R16 max.

Hexagonal nut, M9

Internally toothed washer

Wiring

CCW CW

1 3

26.5

81446957-001

1800

7-17

Revision History (CP-SP-1205E)

Printed Edn. Revised pages Description

Dec. 2006 1 Apr. 2012 2

Sep. 2017 3

June 2019 4

Company name changed.

Overall revision

Overall revision. 4th ed = 16th Jp ed.



//

 

Specifications are subject to change without notice.

1st edition: Dec. 2006 (U)

4th edition: June 2019 (V)

(10)

Azbil MQV9020, MQV0050, MQV9050, MQV9500, MQV0200 User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Safety Precautions

Contents

Chapter 1. INTRODUCTION

Chapter 3. MOUNTING AND WIRING

Chapter 4. BASIC OPERATION

4-1 Switching Displays

4-2 Setting the Flow Rate

4-3 Selecting the Operating Mode

Chapter 5. ADVANCED OPERATION

5-1 Functions

5-2 Parameters

5-3 Device Information Display

5-4 Flow Rate Range

Chapter 6. TROUBLESHOOTING

Chapter 7. SPECIFICATIONS