Atec VS User Manual

Mass Spectrometer

NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to

www.agilent.com/chem.

VS Series Leak Detector

WIDE RANGE, HIGH PERFORMANCE SYSTEM

VA RIA N, INC.

The Varian Advantage

Global Applications Support

Expertise When & Where You Need It

• Native language specialists available locally worldwide

• Application specific consulting

• More than ten thousand installed systems

delivering application solutions to
customers in a broad range of industries

High Performance Instruments

Maximizing

Productivity

and Uptime

VS Series Leak Detectors

• Easy to Use

• Powerful

• Versatile

• Dependable

• Truly Portable

Industry Leading Service & Support

Get The Most From Your Investment

• Most extensive network of service engineers

available locally to meet your needs

• Exchange inventory for replacement components

• On-site or factory repair

• Full range of standard and customized

support plans

Features and Benefits

Easy-to-Use – Two Button Operation

VS Series Leak Detectors combine the simplicity of two-button operation
with advanced expert system intelligence.

• Fully automated start-up and calibration maximizes productivity

• Intuitive menu structure is easy to navigate

• Programmable test sequences improves testing efficiency

• Color touch screen provides excellent clarity, even at wide angles

Powerful – Broad Range of Test Methods

The state-of-the-art spectrometer and vacuum system design provides powerful capability,
enabling a broad range of test methods for specific applications.

• High test port pressure allows for detection of large leaks

• 12-range MDL (sensitivity) meets the most stringent leak test requirements

• High helium pumping speed ensures fast system response and clean-up times

• New high efficiency ion source and beam optics optimize sensitivity and mass separation

Versatile – Multiple System Configurations

A wide range of options allows for broad configuration flexibility, meeting all application
requirements and test environments.

• Primary pump and system mounting options may be selected to best suit your needs

• Multiple language and units capability permits easy implementation worldwide

• Compact lightweight design enables easy transport from one application to another

Dependable – Robust Design

Robust design innovations allow the VS series to conform to the most rigorous industrial standards
and operate dependably in the most challenging environments.

• Fast clean-up time enhances system up-time

• Robust Faraday cup technology delivers proven reliability with low cost of ownership

• Conforms to CE, UL and CSA standards, assuring global acceptance

Truly Portable – Wireless Remote Control/Display

Hand-held remote performs essential functions up to 100 meters (328 feet) indoors,
facilitating access to all leak sites.

• Eliminates cumbersome cables while extending range

• Allows testing of large systems by a single operator

• Leak detector can be located outside cleanroom to prevent contamination

• Multiple channels for use of one remote with up to ten leak detectors

VS Series Mass Spectrometer Leak Detector

441.0

(17.36)

5

67.0

(

22.32)

396.0

(15.59)

1

,016

(40.0)

6

20.0

(24.4)

OUTLINE DRAWING

UL/CSA, CE Approved

Dimensions: millimeters (inches)

TECHNICAL SPECIFICATIONS

Model Number PR02/PD03 MR15 & MD30

Configuration Options Bench Top Bench Mount or Mobile
Primary Pump Type Rotary vane pump DS-42 2 m3/hr (34 l/m) DS-302 14 m3/hr (232 l/m)

Dry scroll pump Dry pump combo – 2 m3/hr (34 l/m) TS-620 30 m3/hr (500 l/m)

Minimum Detectable Leak at 1000 ppm ambient He 5 x 10

-12

atm cc/sec : 5 x 10

-12

mbar l/s : 5 x 10

-13

Pa m3/sec helium
Maximum Test Port Pressure 13 mbar, 10 Torr, 1330 Pa
Helium Pumping Speed @ Test Port (Fine Test) 1.8 l/s
Calibration Routine Automated or manual (internal or external)
Background Suppression Push button initiated auto zero, and auto zero<zero function
User Interface High clarity, color cisplay, TFT touch screen
Selectable Languages English, French, German, Japanese, Korean, Mandarin, Spanish
Automated Cycling Programmable rough time, test time, reject set points
Response Time < 0.5 seconds
Set Points Standard, 5 set points, N/O or N/C; 3 leak rate, 1 pressure, 1 audio
Communications Interface RS-232 isolated interface @ 9600 baud (DB-9S)
Discrete I/O Optically isolated, 5-24 VDC outputs and inputs (DB-25S)
Wireless Remote Control (optional) 2.4 GHz ISM band, 100m (328 ft) range, 4 AA bateries or 5 VDC supply

ORDERING INFORMATION

Model Number Description 120 Volt 220 Volt Weight

VS PR02 Portable Leak Detector, DS42 Rotary Vane Pump VSPR021 VSPR022 59 kg (130 lbs)
VS PD03 Portable Leak Detector, Dry Pump Combo VSPD031 VSPD032 59 kg (130 lbs)
VS MR15 Mobile Leak Detector, DS302 Rotary Vane Pump VSMR151 VSMR152 81 kg (178 lbs)
VS MD30 Mobile Leak Detector, TS620 Dry Scroll Pump VSMD301 VSMD302 92 kg (202 lbs)
VS BR15 Bench Mount Leak Detector, DS302 Rotary Vane Pump VSBR151 VSBR152 51 kg (112 lbs)
VS BD30 Bench Mount Leak Detector, TS620 Dry Scroll Pump VSBD301 VSBD302 62 kg (137 lbs)

Options/Accessories Factory Installed Field Installed

Oil Mist Eliminator, PR02 VSFACME VSFLDME
Wireless Remote, Base Unit VSFACWB VSFLDWB
Hand-held Remote Control VSLDWRC
Discrete I/O VSFACIO VSFLDIO
Leak Test Data Wizard Software VSLTDW
11⁄8 in. Compression Test Port VSFLDCP
Sniffer, NW25 K9565306

Applications

Industrial Process Tools

VS Series Leak Detectors can help rid your process tool of costly and inefficient leaks. Robust system
features assure reliable operation in the most challenging industrial environments. Superior pumping
characteristics such as high inlet pressure tolerance and split flow capability deliver fast response and
clean-up times. Wireless remote control enables single-person leak testing of even the largest systems.

• Vacuum furnaces • Coating systems • Electronic beam welders

Power Generation

Leaks within power plant condensers can cause a significant loss of efficiency. High inlet pressure tolerance,
auto-zero function, and the mobility of the two-wheel cart option simplify the leak detection process.
Simple, intuitive operation allows intermittent use without excessive training requirements. Wireless remote
control with an operating range of 100 meters (328 feet) provides true hand-held portability, enabling leak
testing by a single operator.

• Condensers • Heat exchangers • Steam circuits • Underground pressured power cables

High Energy Physics

High sensitivity, large roughing capacity and portability are essential for leak testing
accelerators and beam lines. These instruments provide excellent mass separation that
differentiates the smallest helium leaks from residual water vapor and hydrogen, and
are available with large, dry roughing pumps to evacuate large volumes, or smaller
internal pumps when used with turbo pumping systems. Wireless remote control with
an operating range of 100 meters (328 feet) enables a single operator to check
potential leak sites without a cord of any kind.

• Accelerators • Beam lines • Synchrotrons

Semiconductor Production

VS Series Leak Detectors combine high sensitivity and large, dry rough pumping capacity to meet the
testing needs of semiconductor processing equipment and gas handling systems. With the high inlet
pressure tolerance and fast clean up and response times, these units excel at locating leaks in both
evacuated and pressurized systems. A clean room technician can use the hand-held wireless remote
control while the leak detector remains installed in a less critical area.

• Process tools • Gas panels • Gas transfer lines

Small Parts Manufacturing

VS Series Leak Detectors employ high inlet pumping speed and high inlet pressure tolerance to
minimize test cycle time, thereby maximizing production throughput. Programmable test sequences
simplify daily operation, minimize operator error, and maximize your production efficiency.
Optional “Leak Test Data Wizard” software can be used to collect data for quality control purposes and
even automate test cycles.

• Automotive • Electrical • Refrigeration • Hermetic packaging • Medical & Implantable devices

General R&D

Research and university labs often require a portable leak detector with the versatility to cover a wide
range of applications. The ability to be easily moved from lab to lab, in conjunction with high perform­ance specifications in both the evacuation and pressurized mode, make the VS Series an essential tool
for this environment.

• Electron microscopes • Experimental chambers • Surface analytical systems • Space chambers

Mass Spectrometer

VS Series Leak Detector

WIDE R A N GE, HI G H PERF O R M ANCE SY S TEM

Varian, Inc.

WW W.V AR IANIN C.COM

Benelux

Varian Vacuum Technologies
Herculesweg 8, 4338 PL Middelburg
PO Box 8033, 4330 EA Middelburg
The Netherlands
Tel: [phone]
Fax: [phone]

Canada

Central coordination through:
Varian, Inc.
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: [phone]
Fax: [phone]
Toll Free # 1 [phone]

China

Varian Technologies China, Ltd.
Room 1648, Central Tower South Wing
Beijing Junefield Plaza
No. 10 XuanWuMenWai Street
Beijing 100052
P.R. China
Tel: [phone]
Fax: [phone]
Toll Free: 800 820 6556

Varian Technologies China, Ltd.
Unit 1801, Central Plaza
No. 227 North Huanpi Road
Shanghai 200003
P. R. China
Tel.: [phone]
Fax: [phone]
Toll-Free: 800 820 6556

Varian Technologies China, Ltd.
Room 2508-11 West-Tower
YangCheng
Commercial Building TiYuDong Road
Guangzhou, 510620
P. R. China
Tel.: [phone]
Fax: [phone]
Toll-Free: 800 820 8266

France

Varian s.a.
7 avenue des Tropiques
Z.A. de Courtaboeuf - B.P. 12
91941 Les Ulis cedex
France
Tel: [phone]
Fax: [phone]

Germany and Austria

Varian Deutschland GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: [phone]
Fax: [phone]

India

Varian India Pvt. Ltd.
205-A, “A” wing of Galleria,
2nd Floor, Hiranandani Gardens,
Powai, Mumbai-400 076
India
Tel.: [phone]/ 8597
Fax: [phone]

Italy

Varian, Inc.
via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

Japan

Varian Technologies Japan, Ltd.
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura Minato-ku
Tokyo 108
Japan
Tel: [phone]
Fax: [phone]
Toll Free: 0120 655 040

Varian Technologies Japan, Ltd.
Osaka Rep. Office, Shin-Osaka Doi Bldg.
7-5-25 Nishinakayima Yodogawa- ku
532-0011 Osaka
Japan
Tel.: [phone]
Fax: [phone]

Korea

Varian Technologies Korea, Ltd.

nd

Shinsa 2
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: [phone]
Fax: [phone]
Toll Free: 080 222 2452

Mexico

Varian, S. de R.L. de C.V.
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: [phone]
Fax: [phone]

South East Asia

Varian Vacuum Technologies
South East Asia (SEA)
Alex Ho
H/P.: (601) 2213 1253
Fax: [phone]
[e-mail]

Bldg. 2F

Singapore

Varian Vacuum Technologies Singapore
Unit 10-04 Helios
Biopolis @ one-north
11 Biopolis Way
138667 Singapore
H/P.: (65) 92364988
Fax: [phone]

Taiwan

Varian Technologies Asia Ltd.
14F-6, No.77, Hsin Tai Wu Rd., Sec. 1
Hsi chih, Taipei Hsien
Taiwan, R.O.C.
Tel: [phone]
Fax: [phone]
Toll Free: 0800 051342

Varian Technologies Asia, Ltd.
3F-11, No. 26, Tai-Yuan St.
Tai-Yuan Li, Hsinchu Hsien
Taiwan, R.O.C.
Tel.: [phone]
Fax: [phone]

UK and Ireland

Varian Ltd.
6 Mead Road
Oxford Industrial Park
Yarnton
Oxford OX5 1QU
England
Tel: [phone]
Fax: [phone]

United States

Varian, Inc.
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: [phone]
Fax: [phone]

Other Countries

Varian, Inc.
via F.lli Varian 54
10040 Leini, (Torino)
Italy
Tel: [phone]
Fax: [phone]

Toll Free Number for United States
1 [phone]

Toll Free Number for Europe
00 800 234 234 00

3/2009 BR024

Cover photo courtesy of Fermilab, Getty Images, Mill Lane Engineering