Figure 1-1.
Dektak Surface Profile Measuring
Instrument.
SECTION I
GENERAL INFORMATION
DESCRIPTION
The Sloan Dektak Surface Profile Measuring System, consisting of
the
Dektak and associated chart recorder,
is
identified as Sloan
Part Number 900050.
o_`
surface profiles and surface elevation differences, or
heights,
angstrom
to 0.0039 inch.
cation of horizontal dimensions of a profile from
It-is simple to use,
term,
The Dektak
face
The
the
surface of the sample: The sensing head contains a diamond
with a tracking force preset at approximately 50
euzce).
of various applications by a screw adjustment located behind
profiles are reproduced in Figure 1-2.
sample_whose.profile
sensing
from less
units.
dependable operation in an industrial
illustrated.
is
head.
The stylus tracking force can be changed to meet the needs
The instrument is used for the measurement
than
The
In
The stage can be adjusted manually to level the
25 angstrom units to amaxinum
equivalents of these values are 0.1
addition, the instrument provides for magnifi-
2X
to
portable,
i
is-to
and ruggedly constructed for
environment:;
n
Figure 1-1.
be scanned rests on the stage beneaih
Recordings of sample
milligrams
step
of 1,000,0(0
microincr
5,000X.
long-
sur-
stylus
(O.OOii
the-
se_nsing
The sensitivity of the instrument can be selected from seven levels
ranging from
scale;
panel.
1 centimeter per minute
In addition, a manual over-ride
both
sanple positioning.
microscope
sa=le.
head.
1,000 angstrom units to 1,000,000
each level is represented by a selector button on the front
Three profile scanning speeds, regulated at 0.01, 0.1, and
forward
can.also be
and revers.e, to expedite
The sensing head is equipped
with integral illumination for direct observation of the
selected
function provides rapid traverse,
preliminary
angstrom
from the front panel.
scan, rescan, and
with
a 40-power
units full
Figure 1-
2.
Recording of Sample Surface Profiles.
Readout o£
recorder, which is described in detail in Sloan Instruction
M-606
the
accompanying
rear-panel of
the surface
the recorder.
the
profile is provided by the
outlet is provided
as a power source for
Dektak
A
13.5-vac
instrument
associated
cha=t
Manuil
of
th;
chart recorder.
The Sloan Dektak Surface Profile Measuring System is supplies con-
plete
a reasonably level and steady work surface and the availability of
115-vac,
shown in
ple to be used in carrying out the calibration procedures described
in section IV, a gauge for
stylus, and
SPECIFICATIONS
and ready to use, requiring no special facilities other
60-Hz
Figure 1-3.
power.
The dimensions of the Dektak instrument
The
instrument
is-delivered
with a test sari-
measuring the tracking force of the
all necessary cables and connectors.
thin
ar-e
Sensitivity (full scale) . . . . . , . . . . 1,000 angstrom units
5,000 angstrom units
unit s
unit s
unit s
unit
units
units
minute
minute
Minimum
Scan
Speeds
Rapid
detectable step
Traverse
Speed,
forward and
10,000 angstrom
50,000 angstrom
100,000 angstrom
500,000 angstrom
1,000,000 angstrom
.
Less than 25 angstrom
0.01 cm per minute
0.1 cm per
1.0
cm
per
reverse . .0 to 5 cm per minute
Stylus radius
Standard . . . . . . .
Optional . . . . . . .
Stylus tracking
force
(
.
.......
.
adjustable)
.
.
,
...
.
.
,
.
0.0005
.
.
.
.
,
.
. .
0.0001 ins
.
.
.
.
,
50
milligrams(preset,
incz
s
z
Scan limit stops . . . . .
Sample stage
Maximum
sample thickness .
size . . . .
.
. .
.
. .
. . .
.
.
,
. .
. . . .
. , . .
. , . ,
. .
.
, . .
, ,
.
.
.
to 6
0
.
,
.•4x4
(
10.16 x
irche
10.16
1 inch (2.5-'. cm
cn
3
cm
SPECIFICATIONS (cont'd)
Microscope magnification .
Outputs
Vertical . , . . . . .
Horizontal . . . . . .
Power Required . , . . . .
Dimensions . . . , . , . ,
Weight
Magnification Factors:
RANGE
(
A° full scale)
1,000;000
5-00,000
100,ooo
50,000
. .
.
.
. .
. ,
,
. .
.
.
.
. .
. . . .
. . . , . . .
. . . . . , .
._.
. ,
.
. .
1K
,
.... . ,.See drawing, Figure 1-3
VERTICAL
10,000x
20,00OX
0 to -100 millivolls
follower
110/220 vac; 50/64 Hz,
.
MAGNIFICATION
1,000x
2,
OOox
potentiometEr
30
lbs,
.
,
4tjX
1
ampere
(13.6 kg)
10,000
5,000
1"000
HORIZONTAL MAGNIFICATION
Recorder Speed
(cm/min)
1
'
2
10
50
RELATED EQUIPMENT'
The only auxiliary equipment required for operation of
2X
lox
50X
100,000X
200,OOOX
1, 000,
0oox
Scan Speed
(
cm/min)
0.1
20X 200X
100X
500X
1,000x
5,000x
.
0.01
the
Dektak
is a suitable chart recorder.
000133, is
*Values for
normally
10-cm
furni-shed as part of a Dektak Surface Profile
strip c..-art.
The Sloan recorder, Part
Number
1
2.5"
31.8cm
Figure 1-3.
Dektak Dimensions.
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