2657A
High Power System SourceMeter®
SMU Instrument
• Source or sink up to 180W of DC
or pulsed power (±3000V@20mA,
±1500V@120mA)
• 1fA low current resolution
• Dual 22-bit precision ADCs
and dual 18-bit 1µs per point
digitizers for high accuracy and
high speed transient capture
High power SourceMeter SMU instrument
• Fully TSP
easy system integration
with Series 2600B System
SourceMeter models
• Combines a precision power
supply, current source, DMM,
arbitrary waveform generator, V
or I pulse generator, electronic
18-bit load, and trigger controller
– all in one instrument
• Includes TSP
characterization software,
LabVIEW
Test Script Builder software
development environment
TYPICAL APPLICATIONS
®
compliant for
®
Express
®
driver, and Keithley’s
• Power semiconductor device
characterization and testing
• Characterization of GaN, SiC,
and other compound materials
and devices
• Breakdown and leakage
testing to 3kV
• Characterization of
sub-millisecond transients
SMU INSTRUMENTS
The Model 2657A is a high voltage, high power, low current source measure unit (SMU) instrument
that delivers unprecedented power, precision, speed, flexibility, and ease of use to improve productivity in R&D, production test, and reliability environments. The Model 2657A is designed specifically
for characterizing and testing high voltage electronics and power semiconductors, such as diodes,
FETs, and IGBTs, as well as other components and materials in which high voltage, fast response, and
precise measurements of voltage and current are required. The Model 2657A offers the highest power
and best low current performance in the industry. It is supported by the industry’s most powerful
parametric characterization software platforms to grow with you as your applications evolve.
The Model 2657A offers highly flexible, four-quadrant voltage and current source/load coupled with
precision voltage and current meters. It can be used as a:
• Semiconductor characterization instrument
• V or I waveform generator
• V or I pulse generator
• Precision power supply with V and I readback
• Digital multimeter (DCV, DCI, ohms, and
power with 6½-digit resolution)
• Precision electronic load
• True current source
+120 mA
+60 mA
+20 mA
0 mA
–20 mA
–60 mA
–120 mA
–3 kV 0 kV
The Model 2657A can source or sink up to 3000V @ 20mA or 1500V @ 120mA.
–1.5 kV
+1.5 kV
+3 kV
High power SourceMeter SMU instrument
1.888.KEITHLEY
www.keithley.com
(U.S. only)
A Greater Measure of Confidence
g
2657A
High Power System SourceMeter
SMU Instrument
Ordering Information
2657A High Power System
8010 High Power Device
Accessories Supplied
7709-308A Digital I/O and
CA-180-3A TSP-Link/Ethernet Cable
Documentation CD
Software tools and drivers CD
2657A-LIM-3 Low Interconnect Module
2657A-PM-200 200V Protection Module
4299-6 Fixed Rack Mount Kit
SHV-CA-553-x High Voltage Triax to SHV Cable (1, 2, 3m)
HV-CA-554-x High Voltage Triax to Triax Cable (0.5, 1, 2, 3m)
HV-CA-571-3 High Voltage Tria x to Unterminated Cable
HV-CS -1613 High Voltage Triax Feedthrough Connector
ACCESSORIES SUPPLIED WITH THE 8010
High power SourceMeter SMU instrument
CA-558-2 25-pin D -sub Interlock Cable for 26xxA
CA-560-x 4mm Black and Red Banana Cables, 8 in.
CA-562-x 6mm Black and Red Banana Cables, 10 in.
CA-563 BNC to Banana Cable, 9.5 in.
CA-568-120 Safety Earth Ground Cable
8010-DTB Device Test Boa rd with TO-247 Socket
ACCESSORIES AVAILABLE FOR THE 8010
8010-CTB Customizable Test Board
8010-DTB -220 Device Test Board with TO-220 Socket (1.5kV)
The Model 2657A can be combined with
Series 2600B and Model 4200-SCS SMU
instruments to support multi-terminal
test capability. The Models 2657A-PM-200
Protection Module and 2657A-LIM-3 Low
Interconnect Module make it easier to connect multiple instruments to a probe station
safely (not required for connecting to the
Model 8010 High Power Device Test Fixture).
SourceMeter SMU
Instrument
Test Fixture
Interlock Connector
ACCESSORIES AVAILABLE
2657A-PM-200 2657A
26xxB
2657A-LIM-3
Two Measurement Modes: Digitizing or Integrating
Precisely characterize transient and steady-state behavior, including rapidly changing thermal effects,
with the two measurement modes in the Model 2657A. Each mode is defined by its independent
analog-to-digital (A/D) converters.
The digitizing measurement mode provides speeds up to 1µs per sample. The dual 18-bit digitizers
allow you to capture voltage and current transients simultaneously. In the integrating measurement
mode, the dual 22-bit integrating analog to digital converters allow more precise measurement of voltage and current. Two A/D converters are used with each measurement mode, one for current and
the other for voltage, that run simultaneously for accurate source readback that does not sacrifice
test throughput.
0.0010
0.0008
0.0006
0.0004
0.0002
0.0000
–0.0002
Current (A)
–0.0004
–0.0006
–0.0008
–0.0010
–0.0012
0.000 0.005 0.010 0.015 0.020 0.025 0.030
Time (seconds)
The dual high speed A/D converters sample as fast as 1µs per point, enabling full simultaneous
characterization of both voltage and current.
Current
Voltage
700
600
500
400
300
200
100
0
–100
e (V)
Volta
Expansion Capabilities
Through TSP-Link Technology technology, the Model 2657A can be linked with Series 2600B SMU
instruments to form a larger integrated system with up to 32 nodes. Precision timing and tight channel synchronization are guaranteed with built-in 500ns trigger controllers. The fully isolated, independent channels of the SourceMeter SMU instruments make true SMU-per-pin testing possible.
High Power Device Test Fixture
The Model 8010 High Power Device Test Fixture provides safe and easy connections for testing
packaged high power devices at up to 3000V or 100A. The Model 8010 provides connections for a
high voltage SourceMeter SMU instrument (Model 2657A), one or two high current SourceMeter SMU
instruments (Model 2651A), and three low power SourceMeter SMU instruments (Series 2600B or
Model 4200-SCS SMU instruments). This allows devices with two terminals (diodes) or three terminals (transistors) or even four or five terminals to be characterized safely and accurately. The Model
8010 has full interlock capability for up to six SourceMeter SMU instruments. The Model 8010 has
integrated protection circuits that protect the low voltage SourceMeter SMU instruments from high
voltages the Model 2657A can output should a device fault occur. The Model 8010 includes both a
high current (100A) and a high voltage (3000V) test socket. Various replacement test socket modules
are available, including TO-247, TO-220, axial lead, and a blank socket module that allows building
a custom socket. In addition to standard banana jumpers, the Model 8010 has rear-panel scope and
thermal probe ports to simplify system integration.
High power SourceMeter SMU instrument
SMU INSTRUMENTS
1.888.KEITHLEY
www.keithley.com
(U.S. only)
A Greater Measure of Confidence
2657A
High Power System SourceMeter
SMU Instrument
Standard Capabilities of Series
2600B SMU instruments
Each Model 2657A includes all the features
and capabilities provided in Series 2600B
SourceMeter SMU instruments:
• Flexibility for use as either a bench-top
I-V characterization tool or as a building
block component of multiple channel I-V
test systems.
• TSP Express software to perform common I-V
tests quickly and easily without programming
or installing software.
• ACS Basic Edition software for semiconductor
component characterization (optional). ACS
Basic Edition now features a “Trace” mode for
generating a suite of characteristic curves.
• Keithley’s Test Script Processor (TSP)
technology supports creating and running
custom user test scripts for high speed test
automation, as well as creating programming
sequences that allow the instrument to
Model 2657A specifications
operate asynchronously without direct
PC control.
• Parallel test execution and precision timing
when multiple Series 2600B SMU instruments
are connected together in a system.
• LXI Class C compliance.
• 14 digital I/O lines for direct connection to a
probe station, component handler, or other
automation tools.
• USB port for extra data and test program
storage via USB memory device.
Model 2657A Condensed Specifications
–12
–12
–11
+ VoE
+ VoE
+ VoE
1
Display
Resolution
4
Display
Resolution
–15
1 fA 0.1% + 6E
–15
10 fA 0.1% + 5E
–13
100 f A 0.1% + 6E
Integrating ADC
±(% rdg + volts)
Integrating ADC
±(% rdg + amps)
1 µA to 120 mA
Ranges
Accuracy
Accuracy 2
–13
+ VoE
–12
+ VoE
–11
+ VoE
2
–15
–15
–13
igh Speed
H
ADC Accuracy 3
±(% rdg + volts)
igh Speed
H
ADC Accuracy 3
±(% rdg + amps)
–13
0.2% + 6E
0.2% + 5E
0.2% + 6E
–12
–11
+ VoE
+ VoE
+ VoE
VOLTAGE ACCURACY SPECIFICATIONS
SOURCE MEASURE
Range
200 V 5 mV 0.03% + 50 mV 100 µV 0.025% + 50 mV 0.05% + 100 mV
500 V 10 mV 0.03% + 125 mV 100 µV 0.025% + 100 mV 0.05% + 200 mV
1500 V 40 mV 0.03% + 375 mV 1 mV 0.025% + 300 mV 0.05% + 600 mV
3000 V 80 mV 0.03% + 750 mV 1 mV 0.025% + 600 mV 0.05% + 1.2 V
Programming
Resolution
Accuracy
±(% rdg + volts)
CURRENT ACCURACY SPECIFICATIONS
SOURCE MEASURE
Range
1 nA 30 fA 0.1% + 2E
10 nA 300 fA 0.1% + 5E
100 n A 3 pA 0.1% + 6E
1 µA 30 pA 0.03% + 700 pA 1 pA 0.025% + 400 pA 0.08% + 800 nA
10 µA 300 pA 0.03% + 5 nA 10 pA 0.025% + 1.5 nA 0.08% + 3 nA
100 µ A 3 nA 0.03% + 60 nA 100 pA 0.02 % + 25 nA 0.05% + 50 nA
1 mA 30 nA 0.03% + 300 n A 1 nA 0.02 % + 200 nA 0.05% + 400 nA
2 mA 60 nA 0.03% + 1.2 µA 1 nA 0.02 % + 500 nA 0.05% + 1 µA
20 mA 600 nA 0.03% + 12 µA 10 nA 0.02 % + 5 µA 0.05% + 10 µA
120 mA 3 µA 0.03% + 36 µA 100 n A 0.02 % + 24 µA 0.05% + 50 µA
1. For temperatures 0° to 18°C and 28° to 50°C, accuracy i s degraded by ±(0.15 × accurac y specification)/°C.
2. Derate accu racy specification for NPLC setting <1 by increa sing error term. Add appropr iate typical percent of range term for resistive loads using the
table below.
NPLC
Setting
0.1 0.01% 0.01% 0.01% 0.01%
0.01 0.08% 0.07% 0.1 % 0.0 5%
0.001 0.8 % 0.6 % 1 % 0.5 %
3. 18-bit ADC . Average of 1000 samples taken at 1µs inter vals.
4. For temperatures 0° to 18°C and 28° to 50°C, accuracy i s degraded by ±(0.35 × accuracy specification)/°C.
Programming
Resolution
200 V and 500 V
Ranges
Accuracy
±(% rdg + amps)
1500 V and 3000 V
Ranges 100 nA Range
SUPPLEMENTAL CHARACTERISTICS
TyPICAL VOLTAGE SOURCE NOISE: 0.005% of range.
TyPICAL CUR RENT SOURCE NOISE: 0.08% of range.
TyPICAL VOLTAGE SOURCE SETTLING: <1ms to 200V, <7ms to 3000V.
TyPICAL CUR RENT SOURCE SETTLING: <5ms to 120mA, <200ms to 1µA.
–15
–15
–13
Model 2657A specifications
SMU INSTRUMENTS
1.888.KEITHLEY
www.keithley.com
Specifications are subject to change without notice.
Model 2657A rear panelModel 8010 High Power Device Test Fixture
(U.S. only)
A Greater Measure of Confidence
2657A
To Nodes 3–32
To Host Computer
High Power System SourceMeter
SMU Instrument
TRIGGERING AND SYNCHRONIZATION SPECIFICATIONS
TRIGGERING: Trigger In to Trigger Out: 0.5µs, typical.
SyNCHRONIzATION: Single- or multi-node synchronized source change: <0.5µs, typical.
PROGRAMMING
TEST SCRIPT BUILDER: Integrated development environment for building, running, and
managing TSP scripts.
TSP EXPR ESS (Embedded): Tool that allows users to perform common I-V tests quickly and easily
without programming or installing software.
SOFTWARE INTERFACE: TSP Express (Embedded), Direct GPIB/VISA, Read/Write with VB,
VC/C++, VC#, LabVIEW™, TestPoint™, LabWindows™/CVI, etc.
SYSTEM EXPANSION
The TSP-Link expansion interface allows TSP-enabled instruments to trigger and communicate
with each other. See figure below:
Node 1
Model 2657A specifications
Node 2
GENERAL
USB: USB 2.1 Host Controller, supports external data storage.
CONTACT CHECK: ±50W.
PC INT ERFACE: IEEE-488.1 and .2; LX I Ethernet; R S-232.
DIGITAL I/O INTERFACE: Input/Output Pins: 14 open drain I/O bits. 5.25V max.
POWER SUPPLy: 100V to 250VAC, 50Hz–60Hz (auto sensing), 550VA max.
COOLING: Forced air. Side and top intake and rear exhaust.
EMC: Conforms to European Union EMC Directive.
SA FETy: ETL listed ( PENDING). Conforms to European Union Low Voltage Directive.
WARR ANT y: 1 year.
DIMENSIONS: 89mm high × 435mm wide × 549mm deep (3.5 in × 17.1 in × 21.6 in). Bench
Configuration (with handle and feet): 104mm high × 483mm wide × 620mm deep (4.1 in
× 19 in × 24.4 in).
WEIGHT: 9.98kg (22 lbs).
ENVIRONMENT: For indoor use only.
CALIBRATION PERIOD: One ye ar.
Model 2657A specifications
1.888.KEITHLEY
www.keithley.com
SMU INSTRUMENTS
(U.S. only)
A Greater Measure of Confidence
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