Asyst Technologies FALCON User Manual

Download

Asyst Falcon™ 300mm Loadport

Technical Manual

with Installation Instructions

Tool Picture

Rev. Ax9 Date: 9/12/2008 P/N: 2000-6698-05

Disclaimers

This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is subject to change without notice.

If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the manual.

Manual Information

PCN: Unreleased Part Number: 2000-6698-05 Date: 9/12/2008 Release: Ax9

Asyst Technologies, Inc. 46897 Bayside Parkway Fremont, California 94538 Telephone: (510) 661-5000 FAX: (510) 661-5166 Technical Support: 1-800-342-SMIF

Falcon Technical Manual

Disclaimers

Trademarks

Asyst and the Asyst logo(s) are registered trademarks ® of Asyst Technologies, Inc. ADVAN-TAG and Falcon are trademarks

All other product and company names mentioned herein may be trademarks and/or service marks of their respective owners.

Equipment Modification

Any change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended purposes.

Training and Languages

User training for equipment operation and maintenance is conducted in English. Translators are available on an as needed basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.

Warranty

For warranty information, see Asyst’s Standard Terms and Conditions.

of Asyst Technologies, Inc.

Draft Ax9 2000-6698-05 Page iii

Falcon Technical Manual Reader Comments

Reader Comments

We welcome your comments regarding this manual. Your comments and suggestions help us to improve our publications.

Please send comments and suggestions to:

Asyst Technologies, Inc. Technical Publications Manager 46897 Bayside Parkway

Fremont CA 94538 Or fax: Attention—Tech Pubs Manager at 1-510-661-5185 Or email: TechPubs@asyst.com

Include the following:

Name: Company: Contact Phone # (in case we have questions): Email:

Document Information (Name of document, Part Number, Revision):

Location of comment (page number or other reference):

Comments: (The more specific the comments, the more useful they are to us.)

Thank you for helping to improve the manuals and to maintain accuracy.

Page iv 2000-6698-05 Draf t Ax9

Acronym List

AGV Automated Guided Vehicle APHD Active Pod Hold Down ASCII American Standard Coding for Information Interchange CAN Control Area Network DSP Digital Signal Processor EMI Electromagnetic Interference EMO Emergency (Machine) Off ESD Electrostatic Discharge FIMS Front-opening Interface Mechanical Standard FOUP Front Opening Unified Pod K-Plate Kinematic Plate (also referred to as FOUP Advance Plate) MGV Manually Guided Vehicle OEM Original Equipment Manufacturer OHS Overhead Hoist Shuttle OHT Overhead Transport or Overhead Hoist Transport PCB Printed Circuit Board PN or P/N Part Number RFID Radio Frequency IDentification SEMI Semiconductor Equipment and Materials International SMIF Standard Mechanical Interface

Draft Ax9 2000-6698-05 Page v

Falcon Technical Manual Acronym List

Page vi 2000-6698-05 Draft Ax9

Revision History

This section gives an overview of the change history for the document.

Date Author Version Revision Information

11/15/2007 Catherine Day Ax1 Created using 2000-2414-05 Rev. C as a base. 1/10/2008 Catherine Day Ax2WIP WIP - Compiled for Mike F. Reference Only 3/21/2008 Catherine Day Ax2 Compiled for training class. Huge gaps in Installation,

Overview, Interfaces and Comm SW which we will attempt to

fill during training week 3/24-28. 3/28/2008 Catherine Day Ax3WIP WIP - Compiled for Tou Vang. Reference Only 04/08/2008 Catherine Day Ax3 Added redlines from Training class. Updated some images with

Beta images. Added verifications steps after Service procedures.

Added 100-240VAC Option. Added removal of FOUP Advance

under cover to affected Service procedures. Fleshed out

Overview Chapter. 04/18/2008 Catherine Day Ax4 Added redlines and new input from Tou Vang, Mike

Fahkrabadhi, Selby Sondergaard, Chi Yeh, Gary Durham, Grant

Imper, Pranav Desai. Updated more images. 04/24/2008 Catherine Day Ax5 Added redlines and new input from Tou Vang, Mike

Fahkrabadhi, Selby Sondergaard, Matt Hoang. Updated more

images. 5/30/2008 Catherine Day Ax6 Added Content from Tou Vang, Mike Fahkrabadhi and drawings 7/11/2008 Catherine Day Ax7 Expanded Software upgrade procedure and made it part of the

Service Chapter. Added input from John Green and Pranav

Desai. Made changes to all chapters and appendices.

Incorporated Beta 9 Software release notes, in many case

replacing existing content with info from the release notes.

Changed multiple illustrations. Updated all Assembly drawings

and PCB drawings.

Draft Ax9 2000-6698-05 Page vii

Falcon Technical Manual Revision History

Date Author Version Revision Information

9/3/2008 Catherine Day Ax8 Added input from John Greene, Duc Le, Bob Carlson, and

Pranav Desai. Made changes to all chapters and appendices.

Incorporated Beta 10 Software release notes. Updated all

Assembly drawings and PCB drawings. 9/22/2008 Catherine Day Ax9 FINAL DRAFT -Removed information duplicated in the

Software Communications Manual and just reference that

document.

Added Remove and Replace instructions for the E84 and AC

Power Options. Edited all service procedures to show new front

panel removal. Updated all Assembly drawings and PCB

drawings.

Added customer cable routing for the E84 and AC Option to the

Installation Appendix. Added Details about the Vertical Brake.

Added comments/corrections from Chris Lueders, John Greene,

Duc Le, Bob Carlson and Tou Vang. Added Specifications from

Engineering and Matt Hoang.

Page viii 2000-6698-05 Draft Ax9

Falcon Technical Manual

Table of Contents

Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iii

Manual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iii

Trademarks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iii

Equipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iii

Training and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iii

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iii

Reader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iv

Acronym List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v

Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vii

Preface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Chapter 1: Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

Chapter Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

General Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

General Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Electrical Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Safety Tags. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Safety Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

ESD / EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

EMO & Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Lockout/Tagout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Pinch Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

During Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Seismic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Ergonomic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Wafer Mapper Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

100-240VAC Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

E84/PIO/ Interlock Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Draft Ax9 2000-6698-05 Page ix

Falcon Technical Manual

Tilt and Go Wheels Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Agency Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

FCC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

CE Mark. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Safety Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

DC Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

AC Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Pinch Hazard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Port Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

FOUP Advance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Moving and Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Labeling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Chapter 2: Product Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Product Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Major Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Power. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Ball Joint with Clamping for Port Door Alignment. . . . . . . . . . . . . . . . . . . 30

Simplified Twist and Pull Latch Key Drive . . . . . . . . . . . . . . . . . . . . . . . . 30

Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Ground Path to FOUP Door. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Configurable Latch Key Over-Rotation. . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Vertical-Horizontal Door Drive. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Single Motor for Two Axes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Upper Pulley/Brake/Encoder Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 33

Fan Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

FOUP Advance Subassembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

Torque Tube with Cantilevered Supports. . . . . . . . . . . . . . . . . . . . . . . . . 35

Manual Load/Unload Push Button Switch . . . . . . . . . . . . . . . . . . . . . . . . 35

K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Cam Activated Pod Hold Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Page x 2000-6698-05 Draft Ax9

Falcon Technical Manual

Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

BOLTS Frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

Main Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

Light Display Node PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

Excessive Wafer Protrusion Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

Static Entry Node PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

Wafer Mapper Assembly Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

100-240VAC Power Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

E84/PIO/Interlock Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

Tilt & Go Wheels Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

Operation Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

Chapter 3: Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

Chapter Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49

Communication Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50

Status Indicator Lights. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

Command for LED Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

Falcon Application Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

Using the Falcon GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

Accessing the GUI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

Navigating Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55

System Icon Details. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55

Wafer Status Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

Service Mode Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

Motor Control Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60

E84 Status Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

LED Controls Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

System Info Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62

Setup Icon Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62

Host Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63

Users and Passwords . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

Axes Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

E84 Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

Wafer Mapper Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

DSP Firmware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

LED Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

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Falcon Technical Manual

System Log Icon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69

Alarms Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

Diagnostics Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

Chapter 4: Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71

Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71

Safety Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

General Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

Electrical Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72

Mechanical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

ESD Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

Tool and Fixture Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

Remove and Replace Falcon 74

Corrective Service Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81

CSP1: Replace Falcon K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . 82

CSP2: Replace Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89

CSP3: Replace Vertical/Horizontal Drive Motor . . . . . . . . . . . . . . . . . . . . . . 95

CSP4: Replace Pod Hold Down Motor Assembly . . . . . . . . . . . . . . . . . . . 106

CSP5: Replace Wafer Mapper Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 112

CSP6: Replace Display Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117

CSP7: Replace Static Entry Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121

CSP8: Replace Link Manager/CPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127

CSP9: Replace Latch Key Motor Assembly . . . . . . . . . . . . . . . . . . . . . . . . 131

CSP10: Replace V/H Drive Upper Pulley Assembly . . . . . . . . . . . . . . . . . . 137

CSP11: Replace Vertical Drive Belt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147

CSP12: Upgrade Falcon Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155

CSP13: Vertical Drive Belt Tensioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161

CSP14: Remove and Replace E84 Board . . . . . . . . . . . . . . . . . . . . . . . . . 168

CSP15: Replace AC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173

Chapter 5: Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179

Collecting Falcon Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179

Emergency Removal of Pod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182

Application. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182

Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182

Remove Host Tool’s End-Effector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182

Removal Using Falcon Application. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182

Error Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185

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Falcon Alarm Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186

Auto Recovery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188

About Alarm Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189

Recovery Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189

About Alarm 1 “Position following error”. . . . . . . . . . . . . . . . . . . . . . . . . 190

About Alarm 2 “Vertical drive is not home”. . . . . . . . . . . . . . . . . . . . . . . 190

About Alarm 3 “Motion requested while already busy”. . . . . . . . . . . . . . 191

About Alarm 4 & 30 “Pod is missing” . . . . . . . . . . . . . . . . . . . . . . . . . . . 191

About Alarm 5 “Aborted by user” . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192

About alarm 14, 24, 82, 83, 84, 86 & 87. . . . . . . . . . . . . . . . . . . . . . . . . 192

Abort/Failed Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195

Error Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195

Factory Default Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198

Appendix A: Installation Instructions . . . . . . . . . . . . . . . . . . . . . . . . . 199

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199

Installing Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200

Handling Cautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200

Operating Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201

Installation Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201

Verify Asyst Supplied Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201

Verify the OEM Supplied Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202

BOLTS Interface Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202

Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202

Grounding Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203

Requirement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203

Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203

Communications Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203

Prepare for Mounting Falcon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204

Mount Falcon to the Host Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212

Verify Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213

Adjust and Level Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215

Open Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215

Initial Height Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216

Perform Final Adjustments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217

Falcon Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220

Display Light Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220

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Appendix B: Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221

Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221

Compact Flash Contents. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222

Communication with VxWorks Operating System. . . . . . . . . . . . . . . . . . . . . . . 223

Communication with Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225

Ethernet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225

Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225

Serial Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226

Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227

Description of Falcon.ini . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

Communication Protocol Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

Without Wafer Arm Assembled: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

With Wafer Arm Assembled: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

Not Using 5mm Protrusion Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

Use 5mm Protrusion Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229

Set-up Hyperterminal for Ethernet Communication . . . . . . . . . . . . . . . . . . . . . 230

Set-up Hyperterminal for Serial Communication. . . . . . . . . . . . . . . . . . . . . . . . 233

Appendix C: Material Safety Data Sheet Information . . . . . . . . . . . . 237

Appendix D: Wiring Diagrams. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239

3400-6653-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 240

Appendix E: PCB Assemblies. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247

3200-4269-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 248

3200-4270-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 249

3200-4346-03 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 250

3200-4347-03 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 252

3200-4348-03 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254

3200-4349-02 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256

3200-4350-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260

Appendix F: Bills of Material and Assembly Drawings . . . . . . . . . . . 261

Falcon Final Assembly, 9701-3995-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262

BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262

9701-3995-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264

Falcon Sub-Systems Assembly, 9701-4033-01 . . . . . . . . . . . . . . . . . . . . . . . . 268

BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268

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9701-4033-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271

FOUP Advance, 9701-3834-02. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275

BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275

9701-3834-02 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276

FIMS Door, 9701-3909-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278

BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278

9701-3909-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280

2000-6803-01 Falcon Outline Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 284

Index. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 287

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Page xvi 200 0-6698-05 Draft Ax9

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List of Figures

Figure 1 Falcon Ground Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Figure 2 Pinch Hazards During Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Figure 3 Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 10

Figure 4 Areas of Pinch/Crush Hazard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11

Figure 5 Seismic Attachment Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Figure 6 Tool Side Corners. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

Figure 7 Falcon Label Placement (Operator Side). . . . . . . . . . . . . . . . . . . . . . . . 20

Figure 8 Falcon Label Placement (Host Tool Side) . . . . . . . . . . . . . . . . . . . . . . . 21

Figure 9 Falcon with AC Option Only . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Figure 10 Falcon Loadport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Figure 11 Falcon Loadport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Figure 12 Static Entry Node PCB Assembly with Link Manager/CPU . . . . . . . . . . 26

Figure 13 Falcon Basic Outline. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Figure 14 FIMS Door, Front View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Figure 15 FIMS Door, Rear View (without Cover) . . . . . . . . . . . . . . . . . . . . . . . . . 29

Figure 16 Ball Joint Design. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Figure 17 Simplified Twist and Pull Latch Key Drive . . . . . . . . . . . . . . . . . . . . . . . 30

Figure 18 Vertical/Horizontal Door Drive Components. . . . . . . . . . . . . . . . . . . . . . 32

Figure 19 FOUP Advance Plate without Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Figure 20 FOUP Advance Load/ Unload Push Button Switch . . . . . . . . . . . . . . . . 35

Figure 21 Light Display Node PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

Figure 22 Static Entry Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

Figure 23 Wafer Mapper Uninstalled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

Figure 24 Components of the 100-240VAC Option . . . . . . . . . . . . . . . . . . . . . . . . 41

Figure 25 Tool Side View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

Figure 26 Wiring for the AC Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

Figure 27 E84 Board. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

Figure 28 Falcon Tilt & Go Wheels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

Figure 29 Diagram of Falcon Communication Paths . . . . . . . . . . . . . . . . . . . . . . . 50

Figure 30 LED-IDs, Indicator Lights . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

Figure 31 Falcon System Logon Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54

Figure 32 System Overview Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55

Figure 33 Wafer Status Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

Figure 34 Service Mode Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

Figure 35 Motor Drop-Down Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57

Figure 36 Servo Control Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57

Figure 37 Calibration Axes Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57

Figure 38 Wafer Mapper Arm Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . 58

Figure 39 Laser Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

Figure 40 FOUP Advance Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

Figure 41 Vertical Door Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

Figure 42 Latch Keys Drop-Down Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

Figure 43 Miscellaneous Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

Figure 44 Button Report Drop-Down Menu (Not Active) . . . . . . . . . . . . . . . . . . . . 59

Figure 45 Motor Control Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60

Figure 46 E84 Status Page (Currently Inactive) . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

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Falcon Technical Manual List of Figures

Figure 47 LED Controls Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61

Figure 48 System Info Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62

Figure 49 Host Communications Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63

Figure 50 Users and Passwords Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

Figure 51 Axes Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

Figure 52 E84 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

Figure 53 Wafer Mapper Parameters Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

Figure 54 DSP Firmware Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

Figure 55 LED Setup Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

Figure 56 Falcon System Log Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69

Figure 57 Falcon Alarms Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

Figure 58 Falcon Front Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

Figure 59 Power and Communication Connections . . . . . . . . . . . . . . . . . . . . . . . . 75

Figure 60 AC Power Input (on Falcons with AC Option Only) . . . . . . . . . . . . . . . . 75

Figure 61 Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 76

Figure 62 Falcon Tilt and Go Wheels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77

Figure 63 Falcon Mounting - Lower Pivot Mounting. . . . . . . . . . . . . . . . . . . . . . . . 78

Figure 64 Guide Posts for Falcon Front Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . 80

Figure 65 Falcon K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82

Figure 66 FOUP Advance Underside Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83

Figure 67 K-Plate Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84

Figure 68 The Underside of the FOUP Advance . . . . . . . . . . . . . . . . . . . . . . . . . . 85

Figure 69 Screw Securing the K-Plate Node Board . . . . . . . . . . . . . . . . . . . . . . . . 86

Figure 70 Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89

Figure 71 Falcon Door Cover and Cable Grommet . . . . . . . . . . . . . . . . . . . . . . . . 90

Figure 72 Falcon Door Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90

Figure 73 Cable Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91

Figure 74 Attachment Screws - Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . 92

Figure 75 Vertical/Horizontal Drive Motor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95

Figure 76 Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 96

Figure 77 AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97

Figure 78 E84 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97

Figure 79 Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98

Figure 80 Drive Belt Tension Adjust and Drive Motor Axle. . . . . . . . . . . . . . . . . . . 99

Figure 81 Jam Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100

Figure 82 Belt Tension Adjust. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100

Figure 83 Motor Cable Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101

Figure 84 Vertical Drive Motor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102

Figure 85 Drive Belt Teeth Engaged with the Gear Teeth. . . . . . . . . . . . . . . . . . . 103

Figure 86 Active FOUP Hold Down Motor Assembly . . . . . . . . . . . . . . . . . . . . . . 106

Figure 87 APHD Motor - Viewed from Underside of FOUP Advance. . . . . . . . . . 107

Figure 88 Access Holes for Motor Assembly Screws. . . . . . . . . . . . . . . . . . . . . . 108

Figure 89 Locator Guide Pins. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109

Figure 90 Motor Assembly Gear Wheel Engaged with Gear Rack. . . . . . . . . . . . 109

Figure 91 Wafer Mapper Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .112

Figure 92 Wafer Mapper and Screw Location . . . . . . . . . . . . . . . . . . . . . . . . . . . .113

Figure 93 Wafer Mapper Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . .114

Figure 94 Wafer Mapping Assembly Approaching Guide Pins. . . . . . . . . . . . . . . .114

Figure 95 Display Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .117

Figure 96 Bezel Over the Panel Display Board . . . . . . . . . . . . . . . . . . . . . . . . . . .118

Page xviii 2000-6698-05 Draft Ax9

Falcon Technical Manual

List of Figures

Figure 97 Panel Display PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .118

Figure 98 Hardware Stack for Securing Hardware. . . . . . . . . . . . . . . . . . . . . . . . .119

Figure 99 Static Entry Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121

Figure 100Belt Cover/Fan Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122

Figure 101Cable Connections and Link Manager/CPU Screws . . . . . . . . . . . . . . 123

Figure 102Screws and Standoff Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124

Figure 103Connections to Static Entry Node Board . . . . . . . . . . . . . . . . . . . . . . . 125

Figure 104Link Manager/CPU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127

Figure 105Belt Cover/Fan Assembly and Link Manager/CPU Location . . . . . . . . 128

Figure 106Compact Flash Socket on the Link Manager/CPU. . . . . . . . . . . . . . . . 129

Figure 107Latch Key Motor Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131

Figure 108Latch Key Motor and Latch Key Drive Plate Assemblies . . . . . . . . . . . 132

Figure 109Cable Clamp and Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . 133

Figure 110Placement of the Latch Key Motor Assembly. . . . . . . . . . . . . . . . . . . . 134

Figure 111 Motor Encoder Cable Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . 134

Figure 112Engaging the Lead Nut with the Lead Nut Retainer Pins. . . . . . . . . . . 135

Figure 113V/H Drive Upper Pulley/Brake/Encoder Assembly . . . . . . . . . . . . . . . . 137

Figure 114AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139

Figure 115E84 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139

Figure 116Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140

Figure 117Encoder Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141

Figure 118Upper Pulley Cable Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141

Figure 119Encoder Cable Ground Wire on Upper Pulley Assembly . . . . . . . . . . . 142

Figure 120Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142

Figure 121Jam Nut on Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 143

Figure 122Belt Tension Adjust. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143

Figure 123V/H Drive Upper Pulley Assembly Screws. . . . . . . . . . . . . . . . . . . . . . 144

Figure 124Vertical Drive Belt. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147

Figure 125Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149

Figure 126Vertical/Horizontal Drive Upper Pulley Assembly Screws . . . . . . . . . . 150

Figure 127Drive Belt Tension Adjust Bolt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150

Figure 128Jam Nut on Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 151

Figure 129Vertical/Horizontal Drive Motor Axle. . . . . . . . . . . . . . . . . . . . . . . . . . . 151

Figure 130Lock Plate Securing the Drive Belt. . . . . . . . . . . . . . . . . . . . . . . . . . . . 152

Figure 131Copy Zip File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155

Figure 132Paste Zip File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156

Figure 133Extract Zip Contents to Compact Flash . . . . . . . . . . . . . . . . . . . . . . . . 156

Figure 134The Ensurehomesteps Value Below [VerticalDoor_1] . . . . . . . . . . . . . 158

Figure 135Compact Flash on the Link Manager/CPU. . . . . . . . . . . . . . . . . . . . . . 159

Figure 136Belt Tension Meter - Power Button. . . . . . . . . . . . . . . . . . . . . . . . . . . . 162

Figure 137Meter Screen Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162

Figure 138Buttons on Meter Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163

Figure 139Sensor Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164

Figure 140Vertical Drive Upper Pulley/Brake/Encoder Assembly Screws. . . . . . . 165

Figure 141Jam Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166

Figure 142Belt Tension Adjust Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166

Figure 143E84 PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168

Figure 144Belt Cover/Fan Assembly with E84 Board and AC Option. . . . . . . . . . 169

Figure 145Cable Connections and Screws. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 170

Figure 146AC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173

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Falcon Technical Manual List of Figures

Figure 147Cable Wiring Going to the AC Option Power Supply . . . . . . . . . . . . . . 174

Figure 148AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 174

Figure 149Power Supply Mounting Bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175

Figure 150AC Power Supply Mounting Hardware. . . . . . . . . . . . . . . . . . . . . . . . . 175

Figure 151AC Power Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176

Figure 152Run Pop-up Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179

Figure 153Command Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180

Figure 154Logged On to Falcon FTP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180

Figure 155Falcon.ini Opened in a Notepad Window. . . . . . . . . . . . . . . . . . . . . . . 181

Figure 156Factory Default Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198

Figure 157Falcon Handling Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200

Figure 158Falcon Ground Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203

Figure 159Interface Mounting Kit Components. . . . . . . . . . . . . . . . . . . . . . . . . . . 205

Figure 160BOLTS Interface Kit Components Mounted on Host Tool. . . . . . . . . . . 206

Figure 161Alignment Plates. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206

Figure 162FIMS Door Shipping Bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207

Figure 163Foam for Securing Wafer Mapper Arms. . . . . . . . . . . . . . . . . . . . . . . . 208

Figure 164Ground Connection and Cable Pass-Thru. . . . . . . . . . . . . . . . . . . . . . 209

Figure 165Static Entry Node Connector Panel (selected connectors shown). . . . 210

Figure 166AC Power Input (on Falcons with AC Option Only) . . . . . . . . . . . . . . . .211

Figure 167Falcon Mounting - Alignment Ball and Cam Adjustments . . . . . . . . . . 212

Figure 168Hyperterminal with Connection Description . . . . . . . . . . . . . . . . . . . . . 230

Figure 169Hyperterminal with Connect To. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 231

Figure 170ASCII Setup Pop-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232

Figure 171Hyperterminal Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232

Figure 172Hyperterminal with Connection Description . . . . . . . . . . . . . . . . . . . . . 233

Figure 173Connect To Pop-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234

Figure 174Com1 Properties Pop-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234

Figure 175ASCII Setup Pop-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235

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Falcon Technical Manual

List of Tables

Table 1 List of Falcon Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Table 2 Falcon Product Specifications*. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

Table 3 Static Entry Node Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

Table 4 Vertical Door Taught Positions (mm) . . . . . . . . . . . . . . . . . . . . . . . . . . . 65

Table 5 Recommended Velocity and Acceleration Parameters for the Vertical

Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66

Table 6 FOUP Positions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66

Table 7 Latch Key Positions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66

Table 8 Special Tools. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

Table 9 Corrective Service Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81

Table 10 Falcon Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185

Table 11 Alarm Codes with Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186

Table 12 Alarm Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188

Table 13 Abort/Failed Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194

Table 14 General Problem Resolutions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195

Table 15 Wafer Mapping Problem Resolution. . . . . . . . . . . . . . . . . . . . . . . . . . . 196

Table 16 Falcon Wiring Diagrams. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239

Table 17 Falcon PCB Assembly Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247

Table 18 Assembly Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261

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Falcon Technical Manual List of Tables

Page xxii 2000-6698-05 Draft Ax9

About this Manual

The Falcon Technical Manual is organized as follows: Chapter 1, Safety Information, describes safety hazards related to operating and

maintaining Falcon, as well as safety interlocks and. labeling. Chapter 2, Product Overview , describes the major subassemblies and components of the

Falcon, and includes technical data, specifications and typical operation sequence. Chapter 3, Interfaces, includes a description of Falcon’s indicator lights, FOUP Advance

Activator Button, and Falcon Application Software. Chapter 4, Service, provides detailed procedures to perform Preventive Maintenance,

corrective service and software upgrade on the Falcon. Chapter 5, Troubleshooting, pro vides an emergency pod removal procedure, a procedure

for data collection, lists of error and alarm codes and messages as well as error modes and recommended corrective actions. An illustration showing factory default settings is provided for reference.

Preface

Appendix A, Installation Instructions, gives information related to installing Falcon to a Host Tool and initial set-up.

Appendix B, Communications Software, provides detailed information on ASCII communication.

Appendix C, Material Safety Data Sheet Information. Appendix D, Wiring Diagrams. Appendix E, PCB Drawings Appendix F, Assembly Drawings. For Final Assembly and major subassemblies, such as

the FIMS Door Drive and the FOUP Advance (Kinematic) Plate. An Index is also provided in the back of the manual.

Draft Ax9 2000-6698-05 Page 1

Falcon Technical Manual Conventions

Conventions

The following keyboard conventions and terminology are used.

Example Meaning

Bold User action on keyboard keys or other objects are bold. Choose The word choose is used for menu choices. Submenus are separated by a

>. For example: Choose File > Import > File...

Click Refers to mouse actions.

For example: Click the hand icon.

Courier New Font Text displayed on the screen uses Courier New.

DOS and windows path names are displayed in Courier New. For example: Use the C:\Folder\SubFolder\SubFolder2 to access this file. Source code or DOS commands use courier new.

Hexidecimal streams and examples. Double quotes Used when discussing or describing an action, functional word, or definition. Folder Used instead of Directory, unless discussing DOS movement commands. Italic Italics are used to show computer entry from the users keyboard or Teach

Pendant. Press Shows action by a user on a key or physical button.

For example: Press PF1, then type the file name. Select Used if the user is to pick from several choices.

For example: Select the lot number from the list supplies. Type Shows entry.

For example: Type the Product Name and Model Number at the top of the

page. Press Enter.

Page 2 2000-6698-05 Draf t Ax9

Introduction

Before attempting any operation or service on the Falcon, it is essential that the information presented in this chapter be read and thoroughly understood. Important information is provided regarding safety hazards that may be encountered while working with these Loadports.

Chapter Summary

This chapter addresses the following:

“ Safety Tags” on page 6— provides examples, with definitions, of warning labels used in

this manual.

“ Safety Requirements” on page 7— includes ESD/EMI precautions, lockout/tagout

procedure, seismic data, and description of hazards.

“ Options” on page 13 — includes “ Agency Compliance” on page 14 — includes information on FCC and CE Mark

Compliance.

Chapter 1: Safety Information

“ Safety Features” on page 15 — includes information on the Safety Features of the

Falcon Loadport

“ Moving and Handling” on page 16— includes cautions on moving and handling the

Falcon.

“ Labeling” on page 18— description of labels, and their locations on the Falcon.

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Falcon Technical Manual Chapter 1: Safety Information General Requirements

General Requirements

Warnings and cautions are used throughout this manual to identify potential hazards to personnel.

All warnings and cautions immediately precede the step or operation in which the hazardous condition may be encountered. All personnel operating or performing service on Asyst equipment must fully understand warnings, cautions, and all general safety regulations associated with electromechanical equipment.

Personnel should become thoroughly familiar with all aspects of safety for individuals and equipment prior to operating or performing service on this equipment.

General Safety

• Do not allow unauthorized or inexperienced personnel to operate the Falcon.

• Service personnel should follow standard cleanroom protocols.

• Ensure that another person in the area is aware that work is in progress on the tool, and can provide assistance in the event of injury.

• The Host Tool manufacturer’s lockout/tagout procedures must be followed during installation or when service is performed on the Falcon to prevent injury or equipment damage.

• Refer to the appropriate Material Safety Data Sheets; contact information for obtaining MSDSs is located in this manual.

• Remove spilled materials immediately to prevent accidents.

Electrical Safety

• Do not bypass electrical interlocks or safety devices unless specifically required to within a procedure.

• Remove power from Falcon prior to performing any service procedure, unless otherwise specified.

• Remove power from Falcon prior to removing or inserting electrical connectors.

• Remove metal jewelry such as rings, chains, and watches.

• Stand on dry insulating mats when working with energized electrical equipment.

• Ensure that all test equipment and accessory electrical units are grounded to facility ground.

Page 4 2000-6698-05 Draf t Ax9

Responsibility

It is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and laws applicable to the installation and operation of this equipment.

Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations.

For emergencies and for product safety related matters, contact:

Falcon Technical Manual

Chapter 1: Safety Information

Responsibility

Asyst Technologies, Inc.

46897 Bayside Parkway

Fremont, California, 94538

(510) 661-5000

Draft Ax9 2000-6698-05 Page 5

Falcon Technical Manual Chapter 1: Safety Information Safety Tags

Safety Tags

The manual includes the following alert categories. Note that the following are only examples; they do not indicate a specific hazard associated with the Falcon.

EXPLOSION HAZARD

DANGERS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS

SITUATIONS WHICH, IF NOT AVOIDED, WILL RESULT IN SERIOUS INJURY OR DEATH.

MECHANICAL HAZARD

WARNINGS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS

SITUATIONS WHICH, IF NOT AVOIDED, MAY RESULT IN SERIOUS INJURY OR DEATH.

DANGER

WARNING

CAUTION

LIFT HAZARD

STANDARD CAUTIONS—AS OPPOSED TO EQUIPMENT-DAMAGE

CAUTIONS SHOWN BELOW—ALERT PERSONNEL TO POTENTIALLY HAZARDOUS SITUATIONS WHICH, IF NOT AVOIDED, MAY RESULT IN INJURY.

CAUTION

THESE CAUTIONS ALERT PERSONNEL TO SITUATIONS THAT

MAY LEAD TO EQUIPMENT DAMAGE. FAILURE TO FOLLOW DIRECTIONS WILL RESULT IN DAMAGE TO THE EQUIPMENT AND/OR DAMAGE TO RELATED PRODUCTS (E.G., WAFERS) AND VOIDING OF WARRANTY.

Page 6 2000-6698-05 Draf t Ax9

Safety Requirements

ESD / EMI Precautions

The Falcon with its integrated AdvanTag is a certified Radiated EMI Class A product.

CAUTION

GENERAL HAZARD

FOR ESD AND EMI CONSIDERATIONS AND POWER SUPPLY

PROTECTION, THE GROUND CABLE MUST BE PROPERLY INSTALLED.

The following instructions must be followed to provide ESD protection and reduced EMI emissions:

• A braided copper ground wire (minimum 12 gauge) with ring-lug connectors (sized for M5 screw) MUST be connected between the Falcon ground connection and the Host Tool power supply earth ground point.

Falcon Technical Manual

Chapter 1: Safety Information

Safety Requirements

NOTE . . .

CHANGES OR MODIFICATIONS TO THE FALCON, NOT EXPRESSLY APPROVED BY ASYST, COULD VOID THE USER'S WARRANTY.

Ground Point

IGURE 1 Falcon Ground Point

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Falcon Technical Manual Chapter 1: Safety Information Safety Requirements

EMO & Electrical Power

Electrical power for the Falcon is supplied by the Host Tool. The main electronics are enclosed in the main electronic area, located inside the front cover of the Falcon. Power to the Falcon should be connected through the Host Tool EMO circuitry, and in the event of an emergency all power can be removed from the Falcon by depressing the red mushroom shaped EMO switch mounted on the Host Tool.

Lockout/Tagout

As determined by the Host tool owner, Lockout/tagout may be required on the Host tool when service is performed on the Falcon or when the Falcon is removed /replaced to prevent injury or equipment damage.

NOTE . . .

LOCKOUT/TAGOUT OF THE HOST TOOL MUST BE PERFORMED BY THE HOST

OOL OWNER. ASYST SERVICE PERSONNEL ARE NOT PERMITTED TO PERFORM

T LOCKOUT/TAGOUT OF THE HOST TOOL.

Where no company procedures exist, follow the guidelines below: _____1. Notify all affected employees and users that service is to be performed and that

the Host tool needs to be shut down and locked out.

_____2. The circuit that provides power to the Host tool must be switched off. (This may

require the Host Tool to be powered down.) Requirements for circuit breaker provided by the customer: The

overcurrent device and disconnect device provided for the Falcon should be

rated for at least 10,000 RMS symmetrical amperes interrupting capacity. _____3. Lock out the circuit with an assigned lock. _____4. Test to make sure the Host tool cannot be turned on accidentally. _____5. Tag the locked circuit with a statement indicating:

_____• Unauthorized operation of the equipment or removal of tag is prohibited _____• Date of service performed _____• Name(s) and contact information of the person(s) performing the service

Page 8 2000-6698-05 Draf t Ax9

Pinch Hazards

Normal Operation

There are no pinch hazards during Normal Operation of the Falcon.

During Service

WARNING

MECHANICAL HAZARD

MAINTENANCE PERSONNEL MUST KEEP HANDS AND FINGERS

AWAY FROM ALL MOVING PARTS DURING MOTION OF THE

FOUP A

COMPLY MAY RESULT IN INJURY.

A pinch hazard exists during the opening/closing of the Port Door.

DVANCE PLATE OR THE PORT DOOR. FAILURE TO

Pinch Hazard During Door Open/Close

Falcon Technical Manual

Chapter 1: Safety Information

Safety Requirements

IGURE 2 Pinch Hazards During Service

See “ Safety Features” on page 15 for Safety Features designed to prevent Pinch Hazards.

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Falcon Technical Manual Chapter 1: Safety Information Safety Requirements

MECHANICAL HAZARD

FIMS DOOR MUST BE SECURED WITH THE SHIPPING BRACKET

EVERY TIME A COMPONENT OF THE VERTICAL/HORIZONTAL

SERIOUS INJURY.

WARNING

RIVE IS SERVICED. FAILURE TO DO SO MAY RESULT IN

Install shipping bracket (Asyst P/N 4003-0842-01)

to the FIMS Loadport Door and secure

with 8 screws to both the FIMS door and the BOLTS Frame. See Figure 3.

Screws

IGURE 3 Shipping Bracket Securing FIMS Door

Screws

If Vertical Drive Belt is disengaged or broken the Vertical Drive may free fall creating pinch/crush hazards. All service procedures affecting the belt must use the FIMS door shipping bracket (Asyst P/N 4003-0842-01) to assure the Vertical Drive is immobilized. See Figure 4 on page 11 for affected areas.

Page 10 2000-6698-05 Draft Ax9

Falcon Technical Manual

Chapter 1: Safety Information

Safety Requirements

Operator Side

Host Tool Side

FIGURE 4 Areas of Pinch/Crush Hazard

During Installation

During installation, power to the Falcon must be off and the Host Tool in Lockout/Tagout so there are no electrical (current) or mechanical hazards.

Draft Ax9 2000-6698-05 Page 11

Falcon Technical Manual Chapter 1: Safety Information Safety Requirements

Seismic

The position of the center of gravity (CG) will be shown in the forthcoming Outline Drawing. Figure 5 shows seismic attachment points for the Falcon. Follow all installation procedures to ensure compliance with SEMI S2: Safety Guidelines For Semiconductor Manufacturing Equipment, Seismic Requirements.

Seismic Attachment Points (top mount)

M8 Screw

Seismic Attachment Points (regular)

M8 Screw

IGURE 5 Seismic Attachment Points

Ergonomic

A fully loaded FOUP exceeds recommended limits for handling by one operator. To conform with SEMI S8, use of AGV, MGV, or OHS is recommended.

Page 12 2000-6698-05 Draft Ax9

Options

Wafer Mapper Option

See “ Wafer Mapper Assembly Option” on page 40 for details.

100-240VAC Option

See “ 100-240VAC Power Option” on page 41 for details

E84/PIO/ Interlock Option

See “ E84/PIO/Interlock Option” on page 43 for details.

Tilt and Go Wheels Option

See “ Tilt & Go Wheels Option” on page 44 for details.

Falcon Technical Manual

Chapter 1: Safety Information

Options

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Falcon Technical Manual Chapter 1: Safety Information Agency Compliance

Agency Compliance

FCC

Definition

Class A digital device

A digital device that is marketed for use in a commercial, industrial or business environment, exclusive of a device which is marketed for use by the general public or is intended to be used in the home.

Compliance

The Falcon with its integrated AdvanTag has been tested and found to comply with the limits for a Class A digital device, pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with the instruction manual, may cause harmful interference to radio communications. Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his/her own expense.

CAUTION

ANY CHANGES OR MODIFICATIONS TO THE FALCON

INTEGRATED RFID WITHOUT SPECIFIC WRITTEN APPROVAL FROM ASYST TECHNOLOGIES WILL VOID FCC COMPLIANCE.

CE Mark

The Falcon with its integrated AdvanTag complies with the following directives:

• 2006/95/EC Low Voltage Directive

• 2004/108/EC EMC Directive

• 99/5/EC Radio & Telecommunication Terminal Equipment

• 98/37/EC Machinery Directive

Page 14 2000-6698-05 Draft Ax9

Safety Features

DC Voltage

The Falcon operating voltage is +24 VDC. This voltage is considered non-hazardous and requires no mechanical power interlocks.

AC Option

If equipped with the 100-240VAC Option, the front cover has an electrical warning label which alerts the user to an electrical hazard located behind the Front Cover. Shutdown and lockout/tagout must be performed before opening the Front Cover. Also the front cover is secured with a screw.

Pinch Hazard

During normal operation there is no pinch hazard. During Service, a number of design points ensure that Service personnel in manual mode

are not exposed to hazards as described below:

Falcon Technical Manual

Chapter 1: Safety Information

Safety Features

Port Door

• Pinch hazards due to opening and closing of the Port Door. The combination of the FOUP placement detection, and the FOUP-at-Port switch

provide an interlock to prevent a Port Door pinch hazard. The FOUP must be in place on the FOUP advance and then must fully advance to

the port, sealing the port opening, before the Port Door will open during normal operation in Auto Mode.

During Home Calibration, the Port Door , can move without a FOUP, but the motion speed is slow and easily avoidable.

FOUP Advance

• Although there is no pinch hazard due to FOUP Advance motion, the following safety feature is present:

Current Limiting Circuit limits the amount of force that can be exerted by the FOUP Advance motion to a safe level. When FOUP comes in contact with an object the FOUP Advance motion will stop.

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Falcon Technical Manual Chapter 1: Safety Information Moving and Handling

Moving and Handling

WARNING

TIP-OVER HAZARD

MOVING THE FALCON WITH A FOUP MOUNTED MAY CAUSE

THE FALCON TO TIP AND FALL OR OTHERWISE BECOME UNSTABLE. INJURY AND/OR TOOL DAMAGE WILL OCCUR IF

FALCON FALLS.

NEVER move the Falcon with a FOUP mounted. Always remove the FOUP before removing the Falcon from the Host tool, moving or installing the unit.

WARNING

TIP-OVER HAZARD

MOVING THE FALCON ON UNEVEN OR NON-LEVEL SURFACES

MAY CAUSE THE FALCON TO TIP AND FALL OR OTHERWISE BECOME UNSTABLE. INJURY AND/OR TOOL DAMAGE WILL OCCUR IF FALCON FALLS.

The Falcon may have wheels; therefore, once it is removed from the shipping container it should be placed on a level surface. The extended portion of the shipping container base enables the Falcon to be removed from the shipping container in its vertical position.

Store and Move the Falcon only in Vertical Position

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Falcon Technical Manual

Chapter 1: Safety Information

Moving and Handling

CAUTION

HANDLING OR BUMPING CERTAIN AREAS OF THE FALCON MAY

RESULT IN DAMAGE TO THE FOUP ADVANCE, DOOR DRIVE, AND PORT DOOR ASSEMBLIES, AS WELL AS THE FRONT

COVER.

When moving the Falcon D

o NOT place hands on the top section of the FOUP advance

assembly, the door drive assembly, or by the wafer mapper assembly. When moving the Falcon, PUSH from the Tool Side ONLY, placing hands on the corners

on the Tool SIde of the Falcon. See Figure 6.

Corners

IGURE 6 Tool Side Corners

The Falcon is designed to be pushed from the Tool Side only. Do not pull from the Operator Side; do not push from the Operator Side except when mounting.

When moving the Falcon, use both hands to push at all times and push evenly. Keep all four wheels on the ground at ALL times. Do not tilt or rock the Falcon while moving and turning. Doing so may cause the Falcon to tip and fall.

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Falcon Technical Manual Chapter 1: Safety Information Labeling

Labeling

See Table 1 for a description of labels used on the Falcon. See Figure 7 on page 20,

Figure 8 on page 21 and Figure 9 on page 22 for typical label locations.

ABLE 1 List of Falcon Labels

Label Description/Location

Model/Serial Number Label The model and serial number label for the

Falcon provides FCC ID and unit specific information required when contacting Asyst Technologies for any matter concerning the equipment.

Tip Over Hazard The Tip Over Hazard label is an alert to move

the Falcon with caution. It is located above the port door on the Host Tool side.

Mechanical Hazard The Mechanical Hazard label is an alert to

moving parts located behind the Cover with the label. Shutdown and lockout/tagout must be performed before opening the Cover. Both Vertical and Horizontal styles are used.

CE Label This label identifies equipment that conforms

to testing and certification requirements of the European Community.

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Falcon Technical Manual

Chapter 1: Safety Information

TABLE 1 List of Falcon Labels

Label Description/Location

FCC Label The presence of the FCC label indicates

compliance with FCC Rules and Regulations as specified on the Label.

Handle Corners Label This label identifies where to handle

equipment.

Labeling

Electrical Hazard Label The Electrical Hazard label is an alert to

electrical hazard located behind the Front Cover when the Falcon is configured with the AC Power Option. Shutdown and lockout/tagout must be performed before opening the Front Cover.

FOR AC OPTION ONLY

Pinch Hazard Label The Pinch Hazard label is an alert to moving

parts located behind the Cover with the label.Shutdown and lockout/tagout must be performed before opening the Cover.

Ground Point Label The Ground Point Label indicates the Falcon

grounding point use to connect earth ground wires from the Host tool.

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Falcon Technical Manual Chapter 1: Safety Information Labeling

Mechanical

Hazard

Label

Pinch

Hazard

Label

Belt Cover

Ground Label

FIGURE 7 Falcon Label Placement (Operator Side)

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Falcon Technical Manual

Chapter 1: Safety Information

Labeling

Name Plate Label

FCC ID Label

FCC Label

CE Label

Handle Corners Label

Tip Over Hazard Label

Pinch Hazard Label

FIGURE 8 Falcon Label Placement (Host Tool Side)

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Falcon Technical Manual Chapter 1: Safety Information Labeling

Electrical Hazard Label

FIGURE 9 Falcon with AC Option Only

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Chapter 2: Product Overview

This chapter describes the operation of Falcon and the interrelation of all of its mechanical, electromechanical, and electronic subsystems.

The product overview is divided into the following sections:

“ Product Description” on page 24— an overall description of Falcon product. “ Specifications” on page 27— Technical Data for Falcon.

Major Subassemblies with features, Options and Operational Descriptions:

• “ FIMS Door” on page 29

• “ Vertical-Horizontal Door Drive” on page 32

• “ FOUP Advance Subassembly” on page 34

• “ BOLTS Frame” on page 38

• “ Options” on page 40

• “ Operation Sequence”— describes Falcon’s typical operation sequence.

IGURE 10 Falcon Loadport

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Falcon Technical Manual Chapter 2: Product Overview Product Description

Product Description

The Falcon is an all-new loadport design based on Asyst’s many ye ars of experience with loadports, incorporating input from a wide range of fabs & OEMs. This elegantly simple design anticipates the customer demand for synergy between AMHS and EFEM requiring seamless integration, faster hand-offs, more efficient buffering and improved productivity.

Asyst is the only loadport supplier with both EFEM and AMHS capability. Falcon has the Best In Class performance for Speed and Clean liness. Asyst’s pate nted Latch key T wist & Pull Technology to securely hold the FOUP Door during access, means no vacuum is required.

The Falcon design improves reliability and speed of wafer handling, provides more robust alignment stability, and reduces Preventive Maintenance requirements; All reducing the overall cost of ownership. The modular design of the components shortens service times, while eliminating most service alignments.

Falcon is a 300mm Loadport that maintains better than Class 1 environment for loading and unloading (opening and closing) SEMI standard 300mm F OUPs. The Fro nt-Opening Unified Pod (FOUP), designed for 25 wafer capacity, is a sealed carrier pod that provides a sub-class 1 environment. Falcon is compatible with most SEMI standard compliant FOUPs.

The Falcon interface to the Host tool complies with the SEMI 300mm Tool Loadport Specification (E15.1). It is designed to directly mount onto a Host Tool through a SEMI E63 (BOLTS) interface and can be quickly disconnected for ease of servicing.

A system of sensors and use of stepper motors ensure safe operation of Falcon, preventing wafer breakage or errors in mechanical operation. Software provides for integrated self-tests and diagnostics.

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Falcon Technical Manual

Chapter 2: Product Overview

Product Description

Major Components

This section describes the major components of the Falcon loadport, with operational descriptions, subassemblies, and features.

Falcon Indicator Display Lights

FIMS Port Door

FOUP Advance

Vertical/Horizontal Drive

(Under the Cover)

IGURE 11 Falcon Loadport

• “ FIMS Door” on page 29

• “ Vertical-Horizontal Door Drive” on page 32

• “ FOUP Advance Subassembly” on page 34

Static Entry Node

Link Manager /CPU

Vert/Horizontal

Drive Belt Cover with Fan

Falcon BOLTS Interface

Host Tool BOLT Mounting Plate

• “ BOLTS Frame” on page 38

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Falcon Technical Manual Chapter 2: Product Overview Product Description

Features

The following features contribute to Falcon’s easy adoption, ease of use and overall product robustness.

• Protocol converters to emulate previous & competing loadports

• Browser configurable

• SW configurable indicator lights (no lenses)

• No internal alignment once installed

• Tilt-N-Go installation

• Integrated Features:

Manual Load/Unload Push Button Switch AdvanTag RFID

• Integrated Options:

ABCD Mechanical Lockout Pin ABCD Sensor Wafer Mapping

Power

Falcon is powered by +24VDC (+10, -2%). The input power is applied through a CPC4 connector “+24VDC IN” (see Figure 12).

CPC4 Connector

Link

Manager

/CPU

IGURE 12 Static Entry Node PCB Assembly with Link Manager/CPU

Page 26 2000-6698-05 Draft Ax9

Specifications

TABLE 2 Falcon Product Specifications*

Wafer Size: 300mm Height: 1351.1mm (53.19 in.) Width: 470mm (18.5in.) Depth: 485mm (19.1 in.) Note: from BOLTS Plane Weight:

68Kg (150 lbs) with Tilt & Go Wheels installed

Mounting: Falcon is designed to directly mount onto a Host Tool having a SEMI E63

FOUP Load Height: Per SEMI Standards E15.1 and E63 ±10mm Height Adjustability on Host

Falcon Technical Manual

Chapter 2: Product Overview

Specifications

(BOLTS) interface.

tool

Contamination Control Wafer Environment Airborne

Particle Cleanliness Fab Environment Airborne

Particle Cleanliness Defect Density < 0.01 PWP @ 0.15 Particle Size

FOUP Compatibility The Falcon is designed to operate with SEMI E47 compliant wafer carriers. Wafer Mapping Emitter Sensor - ± 1º beam angle Collimated IR LED

Receiver Sensor - Light-to-voltage photodiode with

Door Speed (OPEN/CLOSE)

Power: Requirement from Host tool:

Communications: Serial RS-232C (ASCII or SECS 2), Ethernet (ASCII), Parallel is optional

8 Seconds Open with Wafer Mapping 8 Seconds Close with Wafer Mapping

24 VDC ( peak

100-240VAC Option, the customer provides 100-240VAC, 50/60Hz.,3.5A AC Power module converts the power to the +24VDC (+10, -2%), 7A required for Falcon operation.

+10, -2%) @ 7 amps

Class 1 per ISO 14644-1

Class 5 per ISO 14644-1

Falcon Power Consumption: 2 Amp standby (max) 5 Amp operating (max) 7 Amp peak (max)

Carrier Types 300mm 25-Wafer FOUP (Front Opening Unified Pods) Vacuum None Compressed Air None

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Falcon Technical Manual Chapter 2: Product Overview Specifications

TABLE 2 Falcon Product Specifications*

Noise 70-80dB RMS: Compliant to SEMI S8 Environmental: Operating Temperature 10 to 40° C.

Falcon complies with content of SEMI S2, SEMI S8, and CE Marking. *Specifications subject to change without notice

Operating Humidity 10 to 75% non-condensing Storage Temperature -10 to +55°C. Storage Humidity 5 to 90% non-condensing

1351.1mm

580.1mm

470mm

IGURE 13 Falcon Basic Outline

485.0mm

3.0mm BOLTS Interface Plate

For additional dimensions, interface points and datums see “ 2000-6803-01 Falcon

Outline Drawing” on page 284.

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FIMS Door

The Falcon Front-Opening Interface Mechanical Standard (FIMS) door is used to open a 25-wafer FOUP. Two latch keys located on the FIMS door rotate to horizontal to unlock the FOUP door . Using Asyst’ s patented T wist & Pull techn ology, both latch keys retract at the horizontal (unlocked) position to secure the FOUP door.

Falcon Technical Manual

Chapter 2: Product Overview

FIMS Door

Wafer Map Emitter

Door Node PCB

Registration

Pins

IGURE 14 FIMS Door, Front View

Wafer Map Receiver

Latch Key (2X)

FOUP-at Port Sensors (2X)

Wafer Mapper (option)

Latch Key Home Sensor

Latch Key Motor Assy

IGURE 15 FIMS Door, Rear View (without Cover)

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FOUP Lock/ Unlock Latch Key Mechanism

Falcon Technical Manual Chapter 2: Product Overview FIMS Door

After the port door latch keys secure the FOUP door, it backs away from the FOUP, then lowers until the FOUP opening is cleared. Once the port door is lowered, the wafers are accessible for processing. For details on how the Port Door works in conjunction with the FOUP Advance plate, see “ Operation Sequence” on page 45.

Features

Ball Joint with Clamping for Port Door Alignment

This feature enables roll, pitch and theta alignment of the port door with one fastener for all three adjustments. This permits setup and alignment to be don e with 1 fixtu re and one tool. The reduced part count reduces the potential for error. See Figure 16.

IGURE 16 Ball Joint Design

Simplified Twist and Pull Latch Key Drive

The Falcon design preserves Asyst’s proven and patented twist & pull latch key drive and door retention with no vacuum system needed to secure a FOUP door to a FIMS door. Each latch key provides 3-4 lbs of pulling force. This design uses a one piece cam drive plate, guided by a latch key shaft to move the 2 individual latch key mechanisms. The pull-in FOUP clamping feature is comprised on a spherical bushing and socket detent in the cam drive plate. A compression spring provide the clamping force. The Falcon latchkey are lubricated for the rate life of the unit and requires no preventive maintenance. See Figure 17.

IGURE 17 Simplified Twist and Pull Latch Key Drive

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Falcon Technical Manual

Chapter 2: Product Overview

FIMS Door

Sensors

There are two FOUP-at-Port (F AP) Sensors th at will detect the presence of a FOUP door when up against the FIMS door. Both FAP sensors detect the presence of a FOUP door at the docked position.

Ground Path to FOUP Door

The Falcon provides a path to ground from the FOUP door through the port door latch keys, when the FOUP door is removed from the FOUP.

Configurable Latch Key Over-Rotation

The Falcon rotates the latch key from the locked position at 90 degrees (FOUP Door locked position) to the unlocked position of 0 degrees. Falcon can be configured for over-rotation at the 90 degree position to 1,2, or 3 degrees over-rotate through the GUI Interface. The factory default setting for over-rotate is 2 degrees.

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Falcon Technical Manual Chapter 2: Product Overview Vertical-Horizontal Door Drive

Vertical-Horizontal Door Drive

The vertical and horizontal drive (V/H Drive) has two functions: To open and close the FOUP door. During opening of the FOUP door, the V/H Drive will move backward in horizontal movement to clear to the BOLTS plate and downward to give to host tool access to the wafers. See Figure 18.

Belt Tension Adjust

Door Mount

Bumper

Upper Pulley/ Encoder Brake Assy

Top

During closing, the V/H Drive will move upward and in to close the FOUP. When configured with the optional wafer mapper, mounted on the door module, the V/H

Drive makes 2 stops to allow for wafer mapping during open and/or close cycle. The V/H Drive is designed to be maintenance free. There are no user serviceable

components and no alignments are necessary. Major modules (Motor, Upper Pulley/Brake/Encoder Assembly , Belt) are designed for quick replacement if needed, with no changes to alignment.

Features

Single Motor for Two Axes

Belt

Motor Axle

IGURE 18 Vertical/Horizontal Door Drive Components

Guide Rail

Bottom

The design of the V ertical/Horizont al Drive Assembly incorpo rates a single stepper motor and Belt Drive to perform both Vertical & Horizontal Door Motions. The Motor mounts directly to the BOLTS plate frame so no machined brackets are required. The use of

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Falcon Technical Manual

Chapter 2: Product Overview

Vertical-Horizontal Door Drive

Direct stepper drive eliminates the need for a speed reduction system. The integrated design means that fewer sensors, adjustments, and moving cables are required.

Upper Pulley/Brake/Encoder Assembly

The Upper Pulley/Brake/Encoder Assembly includes a 24V Brake used in the event of power loss to stop Z Movement of the FIMS Door. The fail-safe Brake keeps the vertical drive held in place when inactive or during loss of power.

The Encoder, part of the Upper Pulley Assembly, is used to give position feedback and also to work with wafer mapper to detect wafer presence and slot positions in a FOUP.

There is no hard stop for homing the Vertical/Horizontal Drive, the encoder with home sensor is used to determine home position. Home position of the V e rtical/Horizontal Drive is at the top of the drive.

The Brake, part of the Upper Pulley Assembly, stops all movement of the Vertical-Horizontal Door Drive:

• anytime power is cut

• at the end of motion (excluding Upper and Lower Mapping positions)

• whenever a following error is larger than its limit (Important during upward movement to prevent the door from dropping)

Vertical/Horizont al Drive components (Motor , Upper Pulley/Brake wit h encoder , and home sensors) all connect directly to the static entry node on the BOLTS frame.

Fan Assembly

The Fan Assembly is located on the bottom of the removable belt/drive cover. It provides a continuous air flow for airborne particle control for the vertical/horizontal drive mechanisms. This is done to insure no contamination to the Host Tool mini environment by this mechanism.

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Falcon Technical Manual

Chapter 2: Product Overview FOUP Advance Subassembly

FOUP Advance Subassembly

The FOUP Advance Module is a component of the Falcon loadport which is required to position the FOUP on the loadport for processing by the Host Tool and AMHS system.

Kinematic Pins

Placement Sensors

Hold Down Latch

Presence Sensor Emitter

InfoPads

AdvanTag RFID

IGURE 19 FOUP Advance Plate without Cover

The FOUP Advance Module positions the carrier using kinematic pins in an orientation for AMHS transfers, positions the FOUP in an orientation for opening the FOUP door and positions the kinematic pins in an orientation using for wafer handling by a front end robot.

RFID Antenna

Manual Load/Unload Push Button Switch

FOUP Advanc Node

The FOUP Advance Module also provides a means of latching the carrier to prevent removal of the carrier by operators with adequate holding force to allow door opening, resisting operator applied forces, and a means of reading and/or writing to the carrier RFID tag.

The K-Plate is supported by 2 linear rails that are attached to the FOUP Advance Base. Falcon software uses two sensing systems, FOUP Placement and FOUP Presence, to

ensure that the FOUP advance will not operate unless the FOUP is properly positioned. When the FOUP is placed on the Kinematic Pins of the FOUP Advance, the Presence sensor detects the presence of the FOUP and the Placement sensors detect that the FOUP has been properly placed.

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Falcon Technical Manual

Chapter 2: Product Overview

FOUP Advance Subassembly

The FOUP Advance controls horizontal movement of the FOUP and support plate. After both the FOUP placement and presence sensors are triggered, the Active Pod Hold Down (APHD) latches to hold the FOUP to the Kinematic Pins. This ensures the FOUP can not be removed from the Kinematic Pins. The plate then moves towards the port door to the configured FOUP docked position. The FIMS door moves to meet the FOUP door at the Docked position. F AP sensors are actuated by th e FOUP door, confirming a FOUP Door is present. The latchkeys then unlock the FOUP door and hold the FOUP door in position on the port (FIMS) door.

Features

Torque Tube with Cantilevered Supports

• Provides major improvement in torsional rigidity/stability in the as-installed condition

• Provides stable reference platform for the FOUP advance /K plate assembly

• Enables one time factory setup/alignment for critical K plate dimensions. No field adjustment required.

Manual Load/Unload Push Button Switch

The FOUP Advance Plate features one push button switch that is end-user configured. It is a Programmable Function Manual Push button with Indicator LEDs. See Figure 20.

IGURE 20 FOUP Advance Load/ Unload Push Button Switch

NOTE . . .

THE BUTTON MUST BE PROGRAMMED BY THE USER BEFORE SUBSEQUENT

ACTION IS PERFORMED BY THE FALCON AS A RESULT OF THE BUTTON EVENTS.

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Falcon Technical Manual Chapter 2: Product Overview FOUP Advance Subassembly

K-Plate Node PCB

The K-Plate Node PCB, located on the top of K-Plate, has two controllers, both which communicate via CAN to the System Link Manager/CPU module.

Ti-DSP:

• Controls FOUP advance function using close loop Step motor and encoder.

• Controls FOUP Hold Down function using an open loop DC motor, and position sensor.

• Provides approximately 30 general purposes I/Os.

• Monitor FOUP status through 7 on board sensors

• Communicates with system CPU via CAN

PIC-Controller:

• Controls RFID communication and RF power; and communicate with System CPU via CAN.

Integrated AdvanTag Circuitry. The main component of the integrated AdvanTag circuitry is a transmitter that generates radio waves through an antenna. This TIRIS compatible low-frequency (134.2kHz), low-power RF energy is used to read from or write to a transporter near the antenna. The 134.2kHz carrier from the RFID-ASIC is amplified to the proper levels to drive the dual MOSFET power amplifier. This provides a 12Vp-p low impedance drive to the antenna circuit. The antenna is a series resonant LC circuit resonated at 134.2kHz to achieve maximum voltage on the antenna.

Cam Activated Pod Hold Down

The FOUP is held down and cannot be manually removed from the Falcon unless the APHD is released.

– Very fast acting (0.40 seconds) – No adjustments necessary

Sensors

FOUP Presence Sensors. One Emitter/Receiver pair located in the S tatus Display board

(emitter) and FOUP Advance Plate (receiver) to detect whether a FOUP is present on th e Advance plate (the load/unload area).

FOUP Placement Sensors. There are 3 FOUP placement sensors, incorporated into the FOUP Advance Plate; each sensor is located near a kinematic pin. The placement sensors work in parallel to provide accurate detection of a FOUP that is correctly placed on the FOUP Advance Plate/kinematic pins.

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Falcon Technical Manual

Chapter 2: Product Overview

FOUP Advance Subassembly

InfoPad Sensors. The Falcon provides for InfoPad sensors and/or a mechanical interlock pin to be installed at four location on the FOUP Advance Plate. InfoPads Sensors are used to distinguish between FOUP identities based on info plugs installed on the underside of a FOUP. A mechanical lockout pin can be placed in any InfoPad position. If the pin is placed in the "A" location, then a FOUP with the "A" location blocked cannot be placed properly onto the loadport. This is to prevent wafers in certain FOUPs from entering a process tool.

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Falcon Technical Manual Chapter 2: Product Overview BOLTS Frame

BOLTS Frame

The BOLTS frame is the structure to which main subassemblies are mounted. It also provides the interface/mounting point for the Host Tool. In addition, the frame includes several key electronic circuits as well as the status indicators.

Main Components

Light Display Node PCB

The Light Display Node PCB controls the indicator lights at the top of the Frame. The Display PCB can only be accessed from the Operator side of Falcon. Figure 21 shows the PCB (with the indicator light panel removed from the top of the Frame).

FOUP Presence Sensor

IGURE 21 Light Display Node PCB

The emitter of the FOUP Presence Sensor is located on the Display Node PCB. It works in conjuction with the receiver located on the FOUP Advance assembly to detect whether there is a FOUP on the FOUP Advance plate.

NOTE . . .

THE FOUP PRESENCE SWITCH DOES NOT INDICATE WHETHER THE FOUP IS

PLACED CORRECTLY ON THE PLATE, ONLY THAT THERE IS A OBJECT PRESENT ON THE PLATE.

Excessive Wafer Protrusion Sensor

The Excessive Wafer Protrusion Sensor is located on the BOLTS frame assembly, this interlock sensor detects whether a wafer is positioned too far out of the FOUP. If sensed, all movement is halted to prevent damage to wafers and allow manual re-seating into the FOUP.

The Excessive Wafer Protrusion sensor used on the Falcon is break-the-beam type optical sensor It provides an off/on signal via the digital I/O and an interrupt to the processor when actuated, V/H Door motion is stopped and a fatal error message is sent to the Host (Tool).

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Falcon Technical Manual

Chapter 2: Product Overview

BOLTS Frame

Static Entry Node PCB

Located on the Operator side of the BOLTS Frame Assembly, the Static Entry Node controls movement of the Horizontal/ Vertical Drive and FOUP Advance assemblies, and is able to communicate via CAN to the Link Manager/CPU, the Door Node, and the FOUP Advance Node.

The Static Entry Node contains circuitry that monitors voltage and current. If the applied voltage becomes too low or too high the electronics will be shutdown until the correct voltage level is restored. Over current (over load) protection device rating is 9 amp. To recover the operation, power will have to be cycled off and then on again.

CPC4 Power Connector

Link Manager /CPU

IGURE 22 Static Entry Node PCB

ABLE 3 Static Entry Node Connections

SEN Connector Goes To

J1 V/H Motor Encoder J1 Ethernet J3 V/H Drive Brake Comm1 RS232 Serial J9 RJ45 cable goes to -------> J10 DB9 J22 Main Power In

Link Manager/CPU

J23 V/H Motor J25 Fan J27 V/H Home Sensor J36 Excessive Protrusion Sensor

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Falcon Technical Manual Chapter 2: Product Overview Options

Options

Current options available for the Falcon are the Wafer Mapper, the 100-240VAC Power Option, the E84/PIO/Interlock Option and the Tilt & Go Wheel option.

Wafer Mapper Assembly Option

An optional wafer map system can be attached to the FIMS door, that consists of two arms, with sensors, operating during the vertical movement of the port door to determine the position of wafers and detect cross-slotting or double-slotting of wafers within a FOUP. See Figure 23.

IGURE 23 Wafer Mapper Uninstalled

The wafer mapper assembly with protrusion module is comprised of a light source and a receiver. The light source/receiver pair is for detecting wafer presence, empty slots, cross-slotted and double-slotted wafers within the FOUP. This wafer map data is transmitted to the host tool. Two stepper motors are used to deploy and retract the arms.

The Falcon wafer mapper is designed to be maintenance free. There are no user serviceable components and no alignments are necessary.

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Chapter 2: Product Overview

100-240VAC Power Option

Typically th e Falcon is powered by +24VDC ( +10, -2%) provided by the Customer, via the Host Tool. Falcon loadports configured with the 100-240VAC 50/60 Hz, 3.5A Option, permit the customer to provide AC power to an AC Power Supply, within the Falcon, that converts the power to the +24VDC (+10, -2%), 7A required for Falcon operation. See

Figure 24 for main view of components, see Figure 25 for tool side view and see Figure 26 on page 42 for wiring diagram.

Options

Belt Cover/Fan Assembly

100-240VAC Power Supply

IGURE 24 Components of the 100-240VAC Option

Static Entry Node

24VDC Power Input

Link Manager

/CPU

100-240VAC Power Input

IGURE 25 Tool Side View

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Falcon Technical Manual Chapter 2: Product Overview Options

Load

Neutral

Ground

Pin 4

Pin 1

FIGURE 26 Wiring for the AC Option

Ground

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Chapter 2: Product Overview

E84/PIO/Interlock Option

The E84/PIO/Interlock Option provides communications interface with a variety of FOUP delivery systems including AGV, AMHS, or process tools.

The E84/PIO/Interlock Option provides several functions for the Falcon loadport:

• Provides E84 interface for communication with AMHS/AGV systems for FOUP delivery.

• Provides PIO interface for communication with process tools for door close/open operation.

• Provides an interlock to disable loadport operation.

Components

The E84/PIO/Interlock Option consist of the E84 Node PCB and connecting cables.

Options

J12 RJ45

J6 Receptacle D-Sub 25 Pin

J10 Receptacle D-Sub 25 Pin

J15 Plug D-Sub 15 Pin

J13 RJ45 J14

J16

IGURE 27 E84 Board

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Falcon Technical Manual Chapter 2: Product Overview Options

Tilt & Go Wheels Option

The Tilt & Go wheels option allows a single operator to assemble and align the Falcon to the Host tool, as well as remove the Falcon from the Host tool. Also, one operator can move the Falcon to various parts of a fab (e.g., from tool to tool, to a repair area). See

Figure 28 on page 44.

GENERAL HAZARD

FOR ONE PERSON REMOVAL FALCON MUST HAVE A BASE

WHEEL ASSEMBLY ATTACHED BEFORE REMOVING THE

ALCON FROM THE HOST TOOL. THE WHEEL ASSEMBLY MAY

HAVE BEEN REMOVED AFTER INSTALLATION.

CAUTION

IGURE 28 Falcon Tilt & Go Wheels

NOTE . . .

WITHOUT THE TILT AND GO WHEEL OPTION THE FALCON MUST BE MOVED

USING A TWO PERSON LIFT, TAKING CARE TO OBSERVE THE MOVING AND HANDLING REQUIREMENTS SPELLED OUT IN THIS CHAPTER. SEE “ Moving and

Handling” on page 16.

Page 44 2000-6698-05 Draft Ax9

Operation Sequence

Step 1 Undocked (Home) Position

The operating sequence for Falcon always begins from the undocked (Home) position:

• Vertical Drive is at Home position; Door is at Closed position

• FOUP Advance Drive is at Undocked position

• Latch Keys are in Vertical position

• Wafer Map Arms are retracted

• Active Pod Hold Down is in Open position

Step 2 Place FOUP on FOUP Advance Plate

1. FOUP is properly placed onto the kinematic pins located on the FOUP advance plate. FOUP Presence sensors and FOUP Placement sensors are activated.

Falcon Technical Manual

Chapter 2: Product Overview

Operation Sequence

2. Falcon reports to Host that the FOUP has arrived.

Step 3 Advance FOUP to Port Door

1. Host sends an Open command to open the FOUP.

2. The FOUP Advance Module latches the carrier to prevent removal of the carrier while the door is open.

3. Integrated AdvanTag reads and/or writes to the carrier RFID tag as initiated by the Host.

4. The FOUP Advance moves the FOUP towards the FIMS door to the configured FOUP docked position.

5. The FIMS door moves to meet the FOUP door at the Docked position.

6. FAP sensors are actuated by the FOUP door confirming a FOUP Door is present.

Step 4 Open and Lower the Port and FOUP Doors

1. Latch Keys unlock the FOUP door and hold the FOUP door in position on the port (FIMS) door.

2. FIMS door with FOUP door are moved horizontally and vertically away from the port to clear the opening.

3. With Wafer Map Option present, vertical drive moves to Mapper Upper position.

4. With Wafer Map Option present, Wafer Map Light Source (IR LED) activates.

5. With Wafer Map Option present, Wafer Mapper arms extend, and the Wafer Map system activates.

Draft Ax9 2000-6698-05 Page 45

Asyst Technologies FALCON User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual