Asyst Technologies ATR9100 Users Manual

AdvanTag Gateway
Technical Manual
Rev. A Date: 06/05/2003 Printed on Standard Paper P/N: 2000-3160-02
Copyright Asyst Technologies, Incorporated All rights reserved.
©2003
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Disclaimers

This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is subject to change without notice.
If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the manual.

Manual Information

PCN: E12464 Part Number: 2000-3160-02 Date: 06/05/2003 Release: x Printing Description: Printed on Standard Paper.
Asyst Technologies, Inc. 48761 Kato Road Fremont, California 94538 Telephone: (510) 661-5000 FAX: (510) 661-5166 Technical Support: 1-800-342-SMIF
AdvanTag 9100/Gateway Technical Manual
Disclaimers

Trademarks

Asyst, the Asyst logo(s), FLOUROTRAC, KPOD, ADU and MANUAFACTURING CONNECTIVITY are registered trademarks ® of Asyst Technologies, Inc.
VERSAPORT, PLUS, INX, ADVAN-TAG, LINK MANAGER, SMART-TAG, SMART-STATION, SMART-STORAGE,
SMART-TRAVELER, SMART-COMM, AXYS, FASTRACK, FASTMOVE, FASTLOAD, FASTORE are trademarks Asyst Technologies, Inc.
All other product and company names mentioned herein may be trademarks and/or service marks of their respective owners.

Equipment Modification

Any change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended purposes.

Training and Languages

User training for equipment operation and maintenance is conducted in English. Translators are available on an as needed basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.

Warranty

For warranty information, see Asyst’s Standard Terms and Conditions.
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AdvanTag 9100/Gateway Technical Manual Reader Comments

Reader Comments

We welcome your comments regarding this manual. Your comments and suggestions help us to improve our publications.
Please send comments and suggestions to:
Asyst Technologies, Inc. Technical Publications Manager 48761 Kato Rd. Fremont CA 94538
Or fax: Attention—Tech Pubs Manager at 1-510-661-5185
Or email: TechPubs@asyst.com
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Include the following:
Name:
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Comments: (The more specific the comments, the more useful they are to us.)
Thank you for helping to improve the manuals and to maintain accuracy.
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Acronym List

AMHS Automated Material Handling System
ASCII American Standard Coding for Information Interchange
ATR AdvanTag Reader
CAN Control Area Network
CIM Computer-Integrated Manufacturing
EMF Electromagnetic Field
EMI Electromagnetic Interference
EMO Emergency (Machine) Off
ESD Electrostatic Discharge
MID Material IDentification
OEM Original Equipment Manufacturer
PN or P/N Part Number
RFID Radio Frequency IDentification
SECS Semiconductor Equipment Communication Standard
SEMI Semiconductor Equipment and Materials International
SMIF Standard Mechanical Interface
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Revision History

Date Author Version Revision Information
06/05/2003 Royden Tonomura A Original version - release ECN E12464
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AdvanTag 9100/Gateway Technical Manual
Table of Contents
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Table of Contents
Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Manual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Equipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Training and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i
Reader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii
Acronym List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Purpose and Audience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Safety Tags. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Chapter 1: General Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Technical Data (Specifications and Outline Drawing) . . . . . . . . . . . . . . . . . . . . . . 5
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
General Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Servicing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
ESD / EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Electrical Power/Input Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Environmental . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Warranty and Liability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
FCC Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Antenna Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Labeling Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Location of Labels used on the AdvanTag . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Chapter 2: Theory of Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
AdvanTag Reader. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
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AdvanTag Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Multiplexing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Protocols and Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Message Format and Translation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Messages Supported. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
LEDs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Baud rates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Integration of Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Data Storage—AdvanTag Reader . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
MicroTags . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
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AdvanTag Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Commands Supported by the Gateway . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Commands Routed to Heads (ATR 9100s connected on CAN bus):. . . . 24
Code Upgrade Functionality in ATR Gateway . . . . . . . . . . . . . . . . . . . . . 25
Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Power Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Host Comm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Read/Write (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Antenna . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
External Presence (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Ethernet (in development) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Buttons/Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Code Upgrade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Long Range (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Node Address (9100 Reader only). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
To Host. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Read Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
SECS/ASCII . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
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Serial Communications Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
CAN Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Ethernet Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Antenna Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Read/Write Performance Factors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
RF Field Diagrams (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Stick Antennas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Chapter 3: Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Troubleshooting Chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
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Figure 1 Outline Drawing, AdvanTag 9100 Reader . . . . . . . . . . . . . . . . . . . . . . . 6
Figure 2 Label Locations, AdvanTag 9100 Reader . . . . . . . . . . . . . . . . . . . . . . 10
Figure 3 Label Locations, AdvanTag . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Figure 4 AdvanTag Top View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
Figure 5 AdvanTag 9100 Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Figure 6 ATR Gateway Connectivity with Host and Slave ATRs . . . . . . . . . . . . 13
Figure 7 AdvanTag 9100 Reader LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Figure 8 Long Range Switch, AdvanTag 9100 Reader, Side View . . . . . . . . . . 29
Figure 9 Node Address Switches (9100 Reader only) . . . . . . . . . . . . . . . . . . . . 30
Figure 10 Stick Antenna 9700-9097-01 (Standard Range only). . . . . . . . . . . . . . 33
AdvanTag 9100/Gateway Technical Manual
List of Figures
List of Figures
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Table 1 AdvanTag 9100 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Table 2 Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Table 3 Attribute Values (ECID and SVID) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Table 4 Power Cable Pin Outs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Table 5 Serial Port Pin Usage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Table 6 ATR Errors and Solutions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
AdvanTag 9100/Gateway Technical Manual
List of Tables
List of Tables
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Purpose and Audience

This manual describes the Asyst AdvanTag 9100 Reader, also referred to as the ATR 9100, which is part of Asyst’s radio-frequency auto ID system, AdvanTag. The AdvanTag Reader is an Asyst OEM, SEMI-standard device that reads and writes to tags embedded in wafer cassettes, pods, FOUPs, reticle boxes, and so on.
This document is intended for user of the AdvanTag system and the ATR 9100. Service is not applicable to the ATR 9100; see “Servicing” on page 7.

About this Manual

The AdvanTag Reader Manual is organized as follows:

Preface

Chapter 1, General Information, provides specifications and describes safety considerations and labeling for the AdvanTag 9100 Reader and the AdvanTag Gateway.
Chapter 2, Theory of Operation, provides an operational overview of the AdvanTag 9100 Reader and the AdvanTag Gateway.
Chapter 3 provides troubleshooting.
An Index is also provided in the back of the manual.

References

This manual uses information from several sources, including application notes and other internal documentation.

Conventions

The following keyboard conventions and terminology are used.
Example Meaning
Bold User action on keyboard keys or other objects are bold.
Choose The word choose is used for menu choices. Submenus are separated by a >.
For example: Choose File > Import > File...
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