Asyst Technologies Advantag 9100 Technical Manual

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AdvanTag Gateway

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Technical Manual

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Rev. AX5 Date: 03/31/2003
Printed on Standard Paper
P/N: 2000-3160-02

Copyright
Asyst Technologies, Incorporated
All rights reserved.

©2003

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Disclaimers

This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission
from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is
subject to change without notice.

If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the
manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the
manual.

Manual Information

PCN: Un-released Version
Part Number: 2000-3160-02
Date: 03/31/2003
Release: x
Printing Description: Printed on Standard Paper.

Asyst Technologies, Inc.
48761 Kato Road
Fremont, California 94538
Telephone: [phone]
FAX: [phone]
Technical Support: 1-800-342-SMIF

AdvanTag 9100 Technical Manual

Disclaimers

Trademarks

Asyst, the Asyst logo(s), FLOUROTRAC, KPOD, ADU and MANUAFACTURING CONNECTIVITY are registered
trademarks ® of Asyst Technologies, Inc.

VERSAPORT, PLUS, INX, ADVAN-TAG, LINK MANAGER, SMART-TAG, SMART-STATION, SMART-STORAGE,

SMART-TRAVELER, SMART-COMM, AXYS, FASTRACK, FASTMOVE, FASTLOAD, FASTORE are trademarks
Asyst Technologies, Inc.

All other product and company names mentioned herein may be trademarks and/or service marks of their respective
owners.

Equipment Modification

Any change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its
intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended
purposes.

Training and Languages

User training for equipment operation and maintenance is conducted in English. Translators are available on an as needed
basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please
contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.

Warranty

For warranty information, see Asyst’s Standard Terms and Conditions.

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Rev. AX5 Draft Page i

AdvanTag 9100 Technical Manual
Reader Comments

Reader Comments

We welcome your comments regarding this manual. Your comments and suggestions
help us to improve our publications.

Please send comments and suggestions to:

Asyst Technologies, Inc.
Technical Publications Manager
48761 Kato Rd.
Fremont CA 94538

Or fax: Attention—Tech Pubs Manager at 1-510-661-5185

Or email: [e-mail]

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Include the following:

Name:

Company:

Contact Phone # (in case we have questions):

Email:

Document Information (Name of document, Part Number, Revision):

Location of comment (page number or other reference):

Comments: (The more specific the comments, the more useful they are to us.)

Thank you for helping to improve the manuals and to maintain accuracy.

Page ii Draft Rev. AX5

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Acronym List

AMHS Automated Material Handling System

ASCII American Standard Coding for Information Interchange

ATR AdvanTag Reader

CAN Control Area Network

CIM Computer-Integrated Manufacturing

EMF Electromagnetic Field

EMI Electromagnetic Interference

EMO Emergency (Machine) Off

ESD Electrostatic Discharge

MID Material IDentification

OEM Original Equipment Manufacturer

PN or P/N Part Number

RFID Radio Frequency IDentification

SECS Semiconductor Equipment Communication Standard

SEMI Semiconductor Equipment and Materials International

SMIF Standard Mechanical Interface

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AdvanTag 9100 Technical Manual

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Revision History

Date Author Version Revision Information

02/11/2003 Royden Tonomura AX1 Original version

02/27/2003 AX2 Added ECID table

Deleted mounting photos
Added tables for CAN and Ethernet ports

02/28/2003 AX3 Added Gateway information

Updated antenna graphs for tubular antennas

03/07/2003 AX4 Updated power information

Revised Gateway photo

03/31/2003 AX5 Added disclaimers on Node Address panel and antenna

installation

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AdvanTag 9100 Technical Manual

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AdvanTag 9100 Technical Manual

Table of Contents

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Table of Contents

Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i

Manual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i

Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i

Equipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i

Training and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i

Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .i

Reader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii

Acronym List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii

Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v

Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Purpose and Audience . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Safety Tags. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

Chapter 1: General Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Technical Data (Specifications and Outline Drawing) . . . . . . . . . . . . . . . . . . . . . . 5

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

General Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Servicing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

ESD / EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Electrical Power/Input Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Environmental . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Warranty and Liability . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Location of Labels used on the AdvanTag . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Chapter 2: Theory of Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

AdvanTag Reader. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

AdvanTag Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Multiplexing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Protocols and Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Message Format and Translation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

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AdvanTag 9100 Technical Manual
Table of Contents

Messages Supported. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

LEDs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Baud rates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Integration of Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

Data Storage—AdvanTag Reader . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

MicroTags . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

AdvanTag Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Commands Supported by the Gateway . . . . . . . . . . . . . . . . . . . . . . . . . . 22

Commands Routed to the Heads (ATR 9100s connected on the CAN bus):

22

Code Upgrade Functionality in ATR Gateway . . . . . . . . . . . . . . . . . . . . . 23

Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

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LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Power Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Host Comm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Read/Write (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Antenna . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

External Presence (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Ethernet (in development) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Buttons/Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Code Upgrade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Long Range (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

Node Address (9100 Reader only). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

To Host. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Read Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

SECS/ASCII . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Serial Communications Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

CAN Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Ethernet Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

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AdvanTag 9100 Technical Manual

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Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Antenna Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Read/Write Performance Factors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

RF Field Diagrams (9100 Reader only) . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Stick Antennas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Chapter 3: Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

Troubleshooting Chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

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Figure 1 Outline Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Figure 2 AdvanTag Top View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Figure 3 AdvanTag 9100 Gateway. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Figure 4 ATR Gateway Connectivity with Host and Slave ATRs . . . . . . . . . . . . .11

Figure 5 AdvanTag 9100 Reader LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Figure 6 Long Range Switch, AdvanTag 9100 Reader, Side View . . . . . . . . . . 27

Figure 7 Node Address Switches (9100 Reader only) . . . . . . . . . . . . . . . . . . . . 28

Figure 8 Stick Antenna 9700-9097-01 (Standard Range only). . . . . . . . . . . . . . 31

AdvanTag 9100 Technical Manual

List of Figures

List of Figures

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List of Figures

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Table 1 AdvanTag Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Table 2 Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Table 3 Attribute Values (ECID and SVID) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

Table 4 Power Cable Pin Outs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

Table 5 Serial Port Pin Usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Table 6 ATR Errors and Solutions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

AdvanTag 9100 Technical Manual

List of Tables

List of Tables

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List of Tables

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Purpose and Audience

This manual describes the Asyst AdvanTag 9100 Reader, also referred to as the ATR
9100, which is part of Asyst’s radio-frequency auto ID system, AdvanTag. The AdvanTag
Reader is an Asyst OEM, SEMI-standard device that reads and writes to tags embedded
in wafer cassettes, pods, FOUPs, reticle boxes, and so on.

This document is intended for user of the AdvanTag system and the ATR 9100. Service is
not applicable to the ATR 9100; see “Servicing” on page 7.

About this Manual

The AdvanTag Reader Manual is organized as follows:

Preface

Chapter 1, General Information, provides specifications and describes safety
considerations and labeling for the AdvanTag.

Chapter 2, Theory of Operation, provides an operational overview of the AdvanTag
Reader ATR 9100.

Chapter 3 provides troubleshooting.

An Index is also provided in the back of the manual.

References

This manual uses information from several sources, including application notes and other
internal documentation.

Rev. AX5 Draft Page 1