APTech AP3708 User Manual

687 Technology Way Napa, CA 94558 Phone: (707) 259-0102 FAX: (707) 259-0117 www.aptech-online.com
Operation Manual
Pneumatic Diaphragm Valves (normally open)

A. General information

AP Tech normally open (NO) pneumatic diaphragm valves are used in gas delivery systems to control gas flow. Many different models are available with different pressure ratings, flow capacities, and porting configurations.
Refer to the appropriate catalog data sheet for specific product information.

B. Installation

1. Prior to installation, verify that the operating characteristics of the valve as described
below are appropriate for the system in which it will be installed.
a. Verify the materials of construction are compatible with the intended process gas. b. Verify the pressure and temperature ratings are acceptable for the intended application. c. Verify the actuation pressure supply is appropriate. d. Verify that the flow capacity (C
) of the valve is appropriate for the application.
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2. Inspect the valve to determine the flow path through the valve and how the valve will be
installed in the system.
a. An inlet (upstream) port is defined as a port connected to the region below the valve seat and
may be labeled with an “IN” marked into the body near the port.
b. An outlet (downstream) port is defined as a port connected to the region above the seat and
below the diaphragm. The outlet port is usually not labeled, but may be marked “OUT”.
c. The traditional flow direction is inlet to outlet, but AP Tech valves may be employed in
either traditional flow direction or the reverse.
d. On Series DV Monoblock valves the port that is common with the block valves is marked
with a “ the monoblock configurations and more detailed information.
C”. No other marking is shown. Refer to Technical Bulletin 205 has schematics of
Manual 15000007 Rev 3 Page 1 of 2
Operation Manual Pneumatic Diaphragm Valves (NO)

3. Install the valve using the appropriate method described below.

a. For tube stub connections, weld connectors or other components to the tube stubs per
standard industry practice (reference SEMI standard F78).
b. For metal face seal connectors, assemble connections per standard practice described by
fitting supplier (typically 1/8 turn past fingertight).
c. For compression-type connectors, insert the tube into the fitting until it stops. Tighten the
fitting by applying 1-1/4 turns of nut rotation.
a) For reinstallation, mark the nut and the valve body before disassembly. This will allow the nut to be returned to the original assembly position. Insert the tube and attached ferrules into the fitting until fully seated. Rotate the nut until it is returned to the original assembly position, and tighten slightly beyond marked position.
d. Most valves can be attached to panels or mounting plates using the 10-32 or M5 female
thread mounting holes located in the bottom of the body (valves with M5 mounting holes will be marked with a “5” on the bottom of the body). Special configurations or multi-valve blocks may not have mounting holes or may have different size holes. Refer to the specific data sheet or Technical Bulletin for detailed mounting information.
4. Connect a nitrogen or clean dry air actuation pressure supply to the valve actuator
connection. The connection may be a 1/8 NPT female thread, 10-32 female thread, or an M5 female thread depending on the valve model.
5. After installation, perform a leak test of all connections and welds per standard industry
practice (reference SEMI standard F1).

C. Operation

1. Perform the following to close the valve.

a. Apply actuation pressure to the valve.

2. Perform the following to open the valve.

a. Vent the valve actuation pressure to atmospheric pressure.

3. When a valve is in the closed position, the inlet ports are isolated from the outlet ports.
When a valve is in the open position, all ports are common.
Please contact the factory or your local representative to answer questions or for further information.
Manual 15000007 Rev 3 Page 2 of 2
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