APTech AP 1400T Data Sheet

A
D NCED
V
A
ESSURE TECHNOLOGY PR
SerieS AP 1400T
TIED DIAPHRAGM REGULATOR
Single stage
Stainless steel 316L
VAR secondary remelt construction
Absolute sub-atmospheric
option, flow rate to 6 slpm
Cylinder or point of use
specialty and bulk gases
Flow rates to 600 slpm
(21 scfm)
Vacuum to 2,300 psig
(159 bar) inlet HR option to 3,000 psig (207 bar)
Designed and
manufactured exclusively for UHP semiconductor applications
Knob LOTO option
(refer to AP KL data sheet)
Installation and operating
instructions available at www.aptech-online.com
Operating Parameters
Source pressure AP 1400T vacuum to 2,300 psig (159 bar) AP 1400TA vacuum to 300 psig (21 bar) AP 1400T HR vacuum to 3,000 psig (207 bar) Delivery pressure AP 1402TA 100 mm Hg absolute to 30 psig (2 bar)
(not available for HR) AP 1402T 1 to 30 psig (0.07 to 2 bar) (not available for HR) AP 1406T 1 to 60 psig (0.07 to 4 bar) (not available for HR) AP 1410T 2 to 100 psig (0.14 to 7 bar) AP 1415T* 5 to 150 psig (.34 to 10 bar) Proof pressure 150% of operating pressures Burst pressure 300% of operating pressures
*AP 1415T will not achieve full outlet pressure rating at all inlet pressures.
Other Parameters
Inlet/outlet connectors 1/4, 3/8 or 1/2 inch face seal or tube weld Bonnet port 1/8 inch NPT Flow coefficient (Cv) 0.45 Internal volume 1.06 in3 (17.4 cm3) Operating temperature -40° to +160°F (-40° to +71°C)** Surface finish 15 µin Ra max / 10 µin. Ra avg.
(0.4/0.25 µm) standard; 10 µin (0.25 µm);
7 µin (0.18 µm); and 5 µin (0.13 µm) Ra max optional
Inboard leakage 2 x 10 Outboard leakage 2 x 10-9 sccs He Leakage across seat 4 x 10-8 sccs He Installation surface or panel (optional) Supply pressure effect 1.6 psig per 100 psig source pressure change
**VS option 14º to 194ºF (-10º to + 90ºC).
-10
sccs
engineering DATA — SerieS AP 1400T TieD DiAPhrAgm regulATor
Materials
Series AP 1400T S Series AP 1400T SH
Type of Service Corrosive Corrosive
Wetted Parts
Wetted Parts
Body SS 316L secondary remelt SS 316L secondary remelt Poppet and diaphragm Ni-Cr-Mo alloy / UNS N06022 Ni-Cr-Mo alloy / UNS N06022 Nozzle SS 316L Ni-Cr-Mo alloy / UNS N06022 Finish electropolished and passivated electropolished and passivated Seat PCTFE (Polyimide optional) PCTFE
All specifications subject to change without notice.
687 Technology Way n napa, ca 94558 • (707) 259-0102 • Fax (707) 259-0117 www.aptech-online.com
u l T r A c l e A n b y D e S i g n
DimenSionAl informATion
Face Seal A B
1/4” Male 2.00” (51 mm) 4.00” ±.02 (102 mm)
1/4” Female 2.00” (51 mm) 3.70” ±.02 (94 mm)
3/8” 2.50” (64 mm) 5.22” ±.03 (133 mm)
1/2” 2.50” (64 mm) 5.22” ±.03 (133 mm)
All dimensions in inches (mm). Metric dimensions are for reference only.
CAUTION: Product selection is the sole responsibility of the user, regardless of any recommendations or suggestions made by the factory.
PorTing configurATionS
The user shall make selections based upon their own analysis and testing with regard to function, material compatibility and product ratings. Proper installation, operation and maintenance are also required to assure safe, trouble free performance.
Sample Order Number AP 1402TSMA 3PW FV4 FV4 V3
AP 1402T | Series
S
|
Material
AP 1402T = 1-30 psig (.07 to 2 bar) AP 1406T = 1-60 psig (.07 to 4 bar) AP 1410T = 2-100 psig (.14 to 7 bar)
S = Stainless steel (SHP)* SH = SS/Ni-Cr-Mo alloy internals
FV4 FV4 | Connections
Inlet / Outlet
FV4 = 1/4 inch face seal female MV4 = 1/4 inch face seal male FV6 = 3/8 inch face seal female MV6 = 3/8 inch face seal male FV8 = 1/2 inch face seal female MV8 = 1/2 inch face seal male
Tube weld stub available
M
A
|
Surface
Finish Options
|
Range
Options
M = 10 µin. Ra max V = 7 µin. Ra max X = 5 µin. Ra max
A = 100 mm Hg absolute to 30 psig (2 bar) (AP 1402T option only)
orDering informATion
3PW | Ports
AP Tech has product options and variations which are not documented in data sheets. If you have a model number that is not defined by the ordering information, please consult the factory or your local representative.
*S equivalent to SHP – stainless steel with Ni-Cr-Mo alloy poppet and diaphragm
2PW = 2 ports butt weld face seal 3PW = 3 ports butt weld face seal 4PW = 4 ports butt weld face seal
V3 | Gauges
Source / Delivery
Standard gauge ports are 1/4 inch face seal male. (1/4 inch face seal female are available).
| Options
On panel mount option, bonnet port is not threaded.Panel hole 1.56” diameter
*SC option not available with 1402TA option. KL should be ordered with
SC option.
0 = No gauge V3 = 30-0-30 psig/bar L = 30-0-60 psig/bar 1 = 30-0-100 psig/bar 2 = 0-200 psig/bar 4 = 0-400 psig/bar 10 = 0-1000 psig/bar 40 = 0-4000 psig/bar
P = Panel installation ring VS = Polyimide seat HR = High inlet pressure SC = Short bonnet* KL = Knob LOTO*
HMI17371/October2017
Loading...