Read this entire manual and all other publications pertaining to the work to be
performed before you install, operate, or maintain this equipment. Practice all
plant and product safety instructions and precautions. Failure to follow
instructions can cause personal injury and/or property damage. All personnel
who work with or who are exposed to this equipment must take precautions to
protect themselves against serious or possibly fatal bodily injury.
Advanced Energy Industries, Inc., (AE) provides information on its products and
associated hazards, but it assumes no responsibility for the after-sale operation
of the equipment or the safety practices of the owner or user. This equipment
produces or uses potentially lethal high-voltage, high-current, radio frequency
(RF) energy. NEVER DEFEAT INTERLOCKS OR GROUNDS.
All information herein is subject to periodic updates. Inquiries concerning this manual
should be directed to AE. Information provided by AE is believed to be correct and
reliable. However, no responsibility is assumed by AE unless otherwise expressly
taken.
®
Trademarks
Advanced Energy is a registered trademark of Advanced Energy Industries, Inc.
AE is a registered trademark of Advanced Energy Industries, Inc.
Apex is a trademark of Advanced Energy Industries, Inc.
DeviceNet
The Smith
Copyright by Advanced Energy Industries Inc. All rights reserved. Without
written permission, no part of this manual covered by copyright herein may be
reproduced or copied in any form or by any means: graphic, electronic, or mechanical,
including photocopying, recording, taping, or information and retrieval systems.
Written permission must be granted by:
is a registered trademark of Advanced Energy Industries, Inc.
™
is a trademark of Open Vendor Association, Inc., Boca Raton, Fl.
®
chart shown is produced under a copyright license from Analog
Instruments Company, New Providence, New Jersey 07974
™
is a trademark of Tru-Connector Corporation, Peabody, MA
This chapter contains several kinds of introductory information.
•“Using this Manual to Find Information for Your Generator” on page 1-1
provides important instructions on locating the information in this manual that is
applicable to your Apex unit.
•“Interpreting the Manual and Unit Labels” on page 1-9 provides information on
interpreting the type conventions, safety warnings, and labels found in this manual
and on the Apex unit.
•“Safety” on page 1-12, “Product Safety/Compliance” on page 1-12, and
“Installation Requirements” on page 1-15 provide important safety and
compliance information about the Apex generator.
Apex 1 to 5.5 kW Generator
Chapter
Chapter
1
READ THIS SECTION!
To ensure safe operation, you should read and understand this manual before you
attempt to install or operate the Apex unit. At a minimum, read and heed “Safety” on
page 1-13.
USING THIS MANUAL TO FIND INFORMATION FOR
YOUR GENERATOR
The Apex generator can be ordered with many configurable options such as different
output levels, input and output connectors, and so on. This manual covers many of
these options, some of which will apply to your generator and some of which will not.
This section of the manual is designed to help you quickly find the information that
applies to your unit.
Note: This manual does not cover all the Apex generators; some units are covered in
other manuals. To make sure that you will be able to find the correct
information, use the manual that came with that specific unit.
Understanding PIN Numbers and Apex Configuration
The options installed on any Apex generator (that is, the configuration of the
generator) are defined by an PIN number that is located on the serial number tag of the
generator. Figure 1-1 is an example of a serial number tag.
5708009-C1-1
Advanced Energy
Figure 1-1. Serial number identification tag
The PIN is a 17-position alpha-numeric that represents the configuration of your
generator and identifies the options installed on it.
The “A” that precedes the PIN defines the product as an Apex generator, and it is not
counted as one of the PIN positions. The 17 PIN positions that follow the “A” are used
to identify the options installed on the generator.
Using the PIN to Locate Information in the Manual
This manual uses the PIN to help you identify the manual sections that apply to your
unit. To begin using the manual, you will need to first find and record the PIN on your
unit as you may want to refer to it frequently as you work with the manual.
Once you have located the PIN, you are ready to begin using the manual.
The manual provides two basic tools to help you use the PIN in locating correct
information for your unit.
•The next section, “Using the PIN to Identify Apex Options”, provides a complete
list of Apex features and their associated options, which are identified by each
position in the PIN number. When appropriate, it also provides cross-references
to the manual sections containing information for particular options. This table is
the easiest place to find the appropriate section of the manual when you have a
question about your unit.
•Throughout the manual, you will also see Configuration Notes similar to the
following example. These configuration notes are placed at the beginning of many
manual sections that provide option-specific information, and they provide
information about the PIN position and option described in that section. These
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Apex 1 to 5.5 kW Generator
notes are best used to confirm that a particular section of the manual applies to the
option installed on a specific Apex unit. They also refer back to Table 1-1, which
provides complete configuration information
This section of the manual provides information for the:
(When identifying the PIN position, remember that the A at the beginning of
the PIN is not counted as a position. The PIN option is the number or letter
you should look for in the specified position.)
For more information about the PIN and for a complete list of how PIN
positions correspond to Apex product options, see Table 1-1. on page 1-4.
Figure 1-2. Example configuration note
Using the PIN to Identify Apex Options
Table 1-1 shows all the options associated with each PIN position. When appropriate,
it also provides cross references to help you locate the sections of the manual
associated with your unit. For example, to find information about the output connector
on your unit, look through the table to find the PIN position associated with output
connectors, which is 11 (see row 11 of the table). Then find that position in the PIN
for your Apex unit (remember, the A at the beginning of the PIN does not count as a
position) and note the number or letter in that position. Using the right-most cell in the
correct row, identify the option installed in your unit and use the cross-reference to
locate the information on that option.
Note: Not all configurations are currently available and this manual does not cover all
currently available options. (Some options are covered in other manuals).
Therefore, not all of the options listed in the table are covered in this manual. To
make sure that you will be able to find the correct information for your unities
the manual that came with that specific unit. Contact AE for any questions
about availability of specific configurations. (For contact information, see “AE
Customer Support” on page 6-11.)
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®
Table 1-1. Apex PIN Positions and Associated Options
PIN
Apex FeatureOptions, Descriptions, and Cross-References
Position
1Output frequency0—N/A
1—4 MHZ, ±0.005%
2—12.56 MHz, ±0.005%
3—13.56 MHZ, ±0.005%
4—27.12 MHz, ±0.005%
5—40.68 MHz, ±0.005%
For more information on frequency and other specifications,
see “Electrical Specifications” on page 3-5.
2Power outputA—1000 W
B—1500 W
C—2000 W
D—3000 W
E—4000 W
F—5500 W
G—8000 W
H—10000 W
J—5000 W
K—1000 HALO
L—1500 HALO
M—3500 W
N—7000 W
For more information on power output and other
specifications, see “Electrical Specifications” on page 3-5.
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Apex 1 to 5.5 kW Generator
Table 1-1. Apex PIN Positions and Associated Options (Continued)
PIN
Apex FeatureOptions, Descriptions, and Cross-References
Position
3Input voltage0—208 V nominal, 187 to 229 Vac, 3φ, 47 to 63 Hz, with
breaker
1—400 V nominal, 360 to 440 Vac, 3
φ, 47 to 63 Hz, with
breaker
2—reserved
3—208 V nominal, 187 to 229 Vac, 3
φ, 47 to 63 Hz,
without breaker
4—400 V nominal, 360 to 440 Vac, 3
φ, 47 to 63 Hz,
without breaker
5—220,208 to 229 Vac, 1 phase, 47/63 Hz w/o breaker
For more information on input voltage and other
specifications, see “Electrical Specifications” on page 3-5.
4PackagingA—frame mount (
≤ 5500 W)
B—frame mount with rack ears (1/2 rack) (utilities)
C—integrated rack mount
D—1/2 integrated rack mount (left)
E—1/2 integrated rack mount (right)
F—exclusive option #1
G—exclusive option #2
H—exclusive option #3
J—exclusive option #4
K—on board frame mount, opposite end LED’s
L—on board frame mount, opposite end LED’s w/4
handles
M—on board frame mount, opposite end LED’s w/2
handles
N—frame mount w/ rack ears (1/2 rack) (opposite)
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®
Table 1-1. Apex PIN Positions and Associated Options (Continued)
PIN
Apex FeatureOptions, Descriptions, and Cross-References
Position
5Panel0—none (on-board, frame mount)
1—integrated rack mount with blank panel
2—integrated rack mount with passive digital display
(see “Apex Status Indicators (LEDs)” on page 4-79)
3—N/A
4—exclusive option #1
For panel illustrations, see “Apex Panel Illustrations” on
page 4-80.
6Serial I/O 0—default (RS-232 with AE Bus) (see “Host Port—RS-
232 With AE Bus” on page 4-37)
1—Multidrop RS-485 with AE Bus (Currently NOT
available)
2—DeviceNet (see “Host Port—DeviceNet” on page 4-72)
3—Profibus (see “Host Port—Profibus” on page 4-58)
4—exclusive option #1
5—DeviceNet (serial)
6—exclusive option #3
7—exclusive option #2
7Serial Port 20—default (no secondary serial port)
1—RS 232
2—RS 485
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Apex 1 to 5.5 kW Generator
Table 1-1. Apex PIN Positions and Associated Options (Continued)
PIN
Apex FeatureOptions, Descriptions, and Cross-References
Position
8User port optionsA—no User port
B—25-pin APEX standard (see “25-Pin Apex Standard
User Port” on page 4-2)
C—25-pin custom RFG compatible
D—15-pin, exclusive option #2 (see “15-Pin User Port
(Exclusive—Option D)” on page 4-16)
E—15-pin, exclusive option #3 (see “15-Pin User Port
(Exclusive—Option E)” on page 4-26)
F—N/A
G—exclusive option #4
9Output
A—50
impedance
B—exclusive option #1
C—exclusive option #2
D—exclusive option #5
Ω
10On-board RF
output connector
location
E—exclusive option #6
F—exclusive option #3
G—exclusive option #4
H— exclusive option #7
J—exclusive option #8
0—opposite end from water connections
1—utilities end (near water connections)
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Advanced Energy
®
Table 1-1. Apex PIN Positions and Associated Options (Continued)
PIN
Apex FeatureOptions, Descriptions, and Cross-References
Position
11Output connector0—exclusive option #1
1—7/16 connector)
2—SQS
connector
3—LC connector
4—HN
5—N
6—exclusive option #2
For further information see “Connecting Output Power” on
page 5-5.
12RF measurement0—directional coupler
1—V/I sensor
13AC power inputA—ODU connector (see “ODU Connector” on page 5-7)
B—Non-terminated 3 m, 4-conductor, shielded pigtail
(see “NonTerminated, four-Conductor Pigtail” on page 5-8)
C—Non-terminated 12
“NonTerminated, four-Conductor Pigtail” on page 5-8)
D—Harting Type Han-Q (see “Harting Type Han-Q
Connector” on page 5-9)
E—4-terminal, stud mount
F—15´ 4-conductor, with a Hubbell CS8365C plug
G—5´ Harting
H—Term 3m, 4 cond, shielded pigtail Marinco 3015P
J—5’ terminated, 4 conductor, SH with contact LS1
BF.F6 5+PE (30A)
K—ODU connector with 20 degree rotation
L—Harting Type Han-Q (16A) rotated 180 degrees
M—6’,4 conductor with #10 ring lugs on each wire
14Pulsing0—no pulsing
1—pulse (see “Understanding and Setting Up Pulsing
Output” on page 5-13)
′, 4-conductor, pigtail (see
1-85708009-C
Apex 1 to 5.5 kW Generator
Table 1-1. Apex PIN Positions and Associated Options (Continued)
PIN
Position
15CEX0—default (no CEX)
16Water fitting
17Custom
Apex FeatureOptions, Descriptions, and Cross-References
1—CEX add (see “To Use the Common Exciter (CEX)
Feature (optional)” on page 5-12)
2—CEX w/1 Meter Cable (see “To Use the Common
Exciter (CEX) Feature (optional)” on page 5-12)
0—default to 3/8 BSP female (metric threads)
threads
configuration
1—3/8 NPT female
2—3/8 BSP to 1/2" NPT
For information on connecting the water, see “Connecting
Cooling Water” on page 5-4.
A—standard configurations
B—exclusive option #1
C—exclusive option #2
D—exclusive option #3
E—exclusive option #4
INTERPRETING THE MANUAL AND UNIT LABELS
The following sections provide information to help you interpret the use of type in the
manual as well as frequently used graphics in the manual. It also provides a reference
chart to help you understand the labels that may be used on the Apex unit.
Type Conventions
To help you quickly find what is being discussed, the manual presents certain words
and phrases in type that are different from the rest of the text. We use the following
type conventions:
•Pin and signal names appear in capitalized italics (DUTY CYCLE.A).
•Labels that are on the unit (switches, indicators, etc.) generally appear in boldface
capital letters (MODIFY); however they appear as you see them on the unit.
Exceptions are port names, which simply begin with a capital letter (User port).
•Commands (162) and command names (setpoint) appear in boldface lowercase
letters.
•Italic refers to any new or unfamiliar term.
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®
Icons (Symbols)
This symbol represents important notes concerning potential harm to
people, this unit, or associated equipment. It is found whenever
needed in the manual.
We include this symbol in Danger, Warning, and Caution boxes to identify specific
levels of hazard seriousness.
This box identifies hazards that could result in severe personal injury or
death.
This box identifies hazards or unsafe practices that could result in
personal injury.
This box identifies hazards or unsafe practices that could result in
product or property damage.
The following symbols could appear on labels on your unit.
1-105708009-C
Apex 1 to 5.5 kW Generator
Capacitor charge
Hazardous Voltage
Short circuit protected
High voltage
Protective earth ground
Earth ground
CE label
5708009-C1-11
Advanced Energy
Non-ionizing radiation
Hot surface
Warning (refer to manual)
®
NRTL
SAFETY
Do not attempt to install or operate this equipment if you have not first acquired
proper training.
•Ensure that this unit is properly grounded.
•Ensure that all cables are properly connected.
•Verify that input line voltage and current capacity are within specifications before
turning on the power supplies.
•Use proper ESD precautions.
•BE CAREFUL AROUND THIS EQUIPMENT
PRODUCT SAFETY/COMPLIANCE
Certain options of the Apex have been tested for and comply with the following
Directives and Standards.
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Apex 1 to 5.5 kW Generator
Directives and Standards
The following tables list the Electromagnetic Compatibility (EMC) and Safety
directives and standards.
Table 1-2. Electromagnetic Compatibility (EMC)
DirectiveDescription
89/336/EECEC Council directive on the approximation of the laws of the
Member States relating to electromagnetic compatibility (EMC
Directive).
47 CFR Part 18Code of Federal Regulations - Limits and Methods of
Measurement of Radio Interference Characteristics of Industrial,
Scientific, and Medical Equipment.
EN 50082-2Electromagnetic Compatibility (Generic Immunity Standard—
Industrial)
EN 55011Limits and Methods of Measurement of Radio Disturbance
Characteristics of Industrial, Scientific, Medical (ISM) Radio
Frequency Equipment (Class A, Group 2) (CISPR 11).
Table 1-3. Safety
DirectiveDescription
73/23/EECEC Council directive on the harmonization of the laws of the
Member States relating to electrical equipment designed for use
within certain voltage limits (LVD - Low Voltage Directive).
SEMI S2-0200Safety Guidelines for Semiconductor Manufacturing Equipment
UL 1012Power units other than class 2
EN 50178Electronic Equipment For Use In Electrical Power Installations
CSA C22.2
No. 107.1-95
This device must be installed and used only in compliance with the standards listed in
addition to VDE 0113, EN 60204 (IEC 204), and applicable requirements.
General Use Power Supplies—Industrial Products
5708009-C1-13
Advanced Energy
®
Certification
Certain options of this product are certified by:
•Canadian Standards Association (CSA) (NRTL/C)
•CE marking is self addressed by AE Compliance Engineering
•EMC measurements verified by TÜV Product Services
For more information, refer to the letter of conformance (US) or declaration of
conformity (EU) accompanying the product.
1-145708009-C
Apex 1 to 5.5 kW Generator
INSTALLATION REQUIREMENTS
In order for proper installation to be completed on the Apex generator, please take
note of the following warning boxes and the information contained in them. By
meeting all the criteria in these boxes, proper installation of the Apex generator will be
accomplished.
Operating and maintenance personnel must receive proper training
before installing, troubleshooting, or maintaining high-energy electrical
equipment. Potentially lethal voltages could cause death, serious
personal injury, or damage to the equipment. Ensure that all appropriate
safety precautions are taken.
RISK OF DEATH OR BODILY INJURY. Disconnect and LOCK-OUT/TAGOut all sources of input power before working on this unit or anything
connected to it.
5708009-C1-15
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®
Conditions of Use
To be in compliance with the stated directives and standards, you must meet the
following conditions of use.
•This device must be used in an overvoltage category II installation only.
•Before making any other connection, connect the auxiliary Protective Earth
ground conductor on the rear panel.
•Use only a shielded cable on the input power connector.
•Use only a shielded power cable on the output power connector.
•Install and operate this device only in a pollution degree 2 or better environment,
which means an indoor location such as a computer room, office, or factory floor
where only non-conductive pollution occurs during operation. Occasionally, a
temporary conductivity caused by condensation occurs when the device is not
operating.
•Non-standard connectors for input and/or output power must be inaccessible to
the user.
•If your unit does not have a circuit breaker, install and operate it with a circuit
breaker on the ac input to provide over current protection. The circuit breaker
must have a trip value as specified in the line current section of Table 3-2. on
page 3-5.
1-165708009-C
2Theory
GENERAL DESCRIPTION
The Apex™ product line consisting of generators and delivery system products
defined by a matrix of features and capabilities that can be easily custom configured to
specific requirements and applications.
Apex 1 to 5.5 kW Generator
Chapter
Chapter
2
The Apex products can be configured to three basic package styles. The Apex
products may be configured with integrated SwitchMatch
sophisticated VI sensor instrumentation in place of standard power measurement. The
Apex products feature a powerful microprocessor for flexible and accurate operation.
The microprocessor also facilitates the addition of one of several optional serial
communications protocols in addition to the standard AE Bus host port. Several
parallel digital/analog I/O choices are also available. Apex products are designed to be
used in clean room environments and are water cooled.
Other optional features include high repetition rate, variable duty cycle pulsing and
common exciter (CEX) phase lock operation.
FUNCTIONAL DESCRIPTION
In the following section, an overview of the functional description about the Apex
products is discussed. Covered in the section is regulation, cooling, interlock, optional
water solenoid, grounding and protection. These general descriptions are important to
the User since they allow the User to become familiar with the functions of the Apex
generator.
Regulation
™
matching networks and
The Apex generator regulates on forward power, delivered power, or bias voltage
measured at the output of the generator. Mode selection is made through a designated
pin in the interface connector or by receiving a command through a digital interface
option.
Cooling
Apex generators are water-cooled only.
5708009-C2-1
Advanced Energy
®
Interlock
The Apex generator provides a system interlock connection through the User port.
The RF output connector is also interlocked by a series switch that is part of the
system interlock.
Optional Water Solenoid
The Apex generator provides water solenoid control circuitry that can be accessed
through a connector on the rear of the generator. When an optional water control
solenoid is connected to the water solenoid control circuitry, the Apex generator
controls operation of the solenoid and water flow. This feature minimizes
condensation in the generator when the RF output is off and cooling water is still
circulating through the generator.
Grounding
The Apex generator has two holes located on the rear panel to attach the system RF
ground to. One is a tapped M-6 hole, the other is a 5/16
may be used to provide an appropriate ground. Select the appropriate hole depending
on whether you use metric or American fasteners.
Protection
The Apex generator protects itself from damage from the following conditions.
•Any unmatched load condition at the generator output. Output power fold-back
•Any internal over current condition not directly related to the output load
•Excessive internal temperature. (This condition may be caused by lack of proper
•Any combination of input ac line phase drop out.
•Input line brown-out (under voltage) or over voltage.
•Any User/ port pin shorted to chassis or another port pin.
″ x 18 tapped hole. Either hole
(limiting) occurs as required by the generator protection circuits.
condition as protected by current limiting or fuse.
cooling water flow, excessive ambient operating temperature, or other causes.)
THEORY OF OPERATION
In this section a bock diagram is designed to help the User understand the process by
which the Apex generator works. Following the diagram is an explanation of the
diagram in a table to help the User utilize the Apex unit as well. Figure 2-1 and Table
2-1 describe the basic operation of the Apex generator.
2-25708009-C
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