Notice: The manufacturer reserves the right to make any changes and improvements
to the products described in this manual at any time and without notice. This manual
is copyrighted. This document may not, in whole or in part, be copied, reproduced,
translated, or converted to any electronic medium or machine readable form, for
commercial purposes, without prior written consent from the copyright holder.
Note: Although we provide assistance on our products both personally and through
our literature, it is the complete responsibility of the user to determine the suitability
of any product to their application.
The manufacturer does not warrant or assume responsibility for the use of its
products in life support applications or systems.
Wide-Range Laminar Flow Element Patent:
The wide-range laminar ow element and products using the wide-range laminar
ow element are covered by U.S. Patent Number: 5,511,416. Manufacture or use of
the wide-range laminar ow element in products other than products licensed under
said patent will be deemed an infringement.
Warranty
This product is warranted to the original purchaser for a period of one year from the date
of purchase to be free of defects in material or workmanship. Under this warranty the
product will be repaired or replaced at manufacturer’s option, without charge for parts or
labor when the product is carried or shipped prepaid to the factory together with proof of
purchase. This warranty does not apply to cosmetic items, nor to products that are damaged,
defaced or otherwise misused or subjected to abnormal use. See “Application” under the
Installation section. Where consistent with state law, the manufacturer shall not be liable
for consequential economic, property, or personal injury damages. The manufacturer does
not warrant or assume responsibility for the use of its products in life support applications
or systems.
10/24/06 Rev. 0 DOC-APEXMAN16C
Table of ContentsPage
Installation5
Plumbing5
Mounting5
Application5
Power and Signal Connections6
Input Signals7
Analog Input Signal7
RS-232 Input Signal7
Output Signals7
RS-232 Digital Output Signal8
Standard Voltage (0-5 Vdc) Output Signal8
Optional 0-10 Vdc Output Signal8
Optional Current (4-20 mA) Output Signal8
Optional 2nd Analog Output Signal8
MC Series Mass Flow Controller Operation10
Main Mode10
Set Pt.10
Gas Absolute Pressure10
Gas Temperature11
Volumetric Flow Rate11
Mass Flow Rate11
Flashing Error Message11
Select Menu Mode11
Control Setup Mode12
Input12
Loop13
Select13
Gas Select Mode14
Communication Select Mode15
Unit ID15
Baud15
Data Rate15
Manufacturer Data Mode16
VC Series Volumetric Flow Controller Operation17
Main Mode17
Volume17
Set Pt.17
Flashing Error Message17
Select Menu Mode18
Control Setup Mode18
Input18
Select18
Gas Select Mode20
Communication Select Mode20
Table of ContentsPage
Manufacturer Data Mode20
RS-232 Output and Input20
Conguring HyperTerminal®20
Changing from Streaming to Polling Mode 20
Sending a Set-Point via RS-23221
To adjust the P & D terms via RS-23221
Gas Select 23
Collecting Data24
Data Format 24
Sending a Simple Script File to HyperTerminal®25
Operating Principle26
Gas Viscosity26
Other Gases27
Volume Flow vs. Mass Flow27
Volumetric Flow and Mass Flow Conversion28
Compressibility28
Standard Gas Data Tables29
Gas Viscosities and Densities Table30
Volumetric Flow Meters Under Pressure31
Troubleshooting32
Maintenance and Recalibration33
Technical Specications34
Dimensional Drawings38
Figure 1. 8 Pin Mini-DIN Connector 6
Figure 2. Simple method for providing set-point to controllers7
Figure 3. Mini-DIN to DB-9 Connection for RS-232 Signals8
Figure 4. Typical Multiple Device (Addressable) Wiring Conguration 9
Figure 5. Optional Industrial Connector9
Figure 6. Main Mode Display, MC Series Flow Controller10
Figure 7. Select Menu Display11
Figure 8. MC Series Control Setup Display12
Figure 9. Gas Select Display14
Figure 10. Communication Select Display15
Figure 11. Manufacturer Data Displays16
Figure 12. Main Mode Display, VC Series Flow Controller17
Figure 13. VC Series Control Setup Display18
Thank you for purchasing an Apex MC or VC Series Gas Flow Controller. Please take the time to nd
and read the information contained in this manual. This will help to ensure that you get the best possible
service from your instrument. This manual covers the following Apex instruments:
MC Series 16 Bit Mass Gas Flow Controllers
VC Series 16 Bit Volumetric Gas Flow Controllers
Installation
Plumbing
All MC and VC Series Gas Flow Controllers are equipped with female inlet and outlet port connections.
Because the ow meters set up a laminar ow condition within the ow body, no straight runs of pipe
are required upstream or downstream of the controller. The inlet and outlet ports are equal in size and
symmetric (in-line). The port sizes (process connections) and mechanical dimensions for different ow
ranges are shown on pages 34-37.
Controllers with 10-32 ports have o-ring face seals and require no further sealant or tape. On other
controllers, avoid the use of pipe dopes or sealants on the ports as these compounds can cause
permanent damage to the controller should they get into the ow stream. Use of thread sealing Teon
tape is recommended to prevent leakage around the threads. When applying the tape, avoid wrapping
the rst thread or two to minimize the possibility of getting a piece of shredded tape into the ow stream.
When changing ttings, always clean any tape or debris from the port threads.
It is also recommended that a 20 micron lter be installed upstream of controllers with full scale ranges
of 1(S)LPM or less and a 50 micron lter be installed upstream of controllers with full scale ranges
above 1(S)LPM.
Mounting
All MC and VC Series Gas Flow Controllers have mounting holes for convenient mounting to at panels.
The sizes and dimensions for the mounting holes are shown on pages 38-40. Position sensitivity is not
generally an issue with small valve controllers. Large valve controllers are somewhat position sensitive
because of the fairly massive stem assembly. It is generally recommended that they be mounted so
that the valve cylinder is vertical and upright. The primary concern in mounting a large valve controller
in a position other than the recommended position is the increased risk of leakage when the controller
is given a zero set-point and is being held closed by the spring force.
Application
Maximum operating line pressure is 125 PSIG (862 kPa).
Caution: Exceeding the maximum specied line pressure may cause permanent damage to the
solid-state differential pressure transducer.
If the line pressure is higher than 125 PSIG (862 kPa), a pressure regulator should be used upstream
from the ow meter to reduce the pressure to 125 PSIG (862 kPa) or less if possible. Many of our
controllers are built after extensive consultations with the customer regarding the specic application.
The result is that two controllers with the same ow range and part number may look and act quite
differently depending upon the application the controller was built for. Care should be taken in moving a
controller from one application to another to test for suitability in the new application. Note that volumetric
meters and controllers are not recommended for high pressure or high backpressure applications (see
page 31).
5
Power and Signal Connections
78
1
2
345
AC/DC Adapter Jack
6
Power can be supplied to your MC or VC Series controller through either the power jack or the 8 pin
Mini-DIN connector as shown in Figure 1. An AC to DC adapter which converts line AC power to DC
voltage and current as specied below. The power jack accepts 2.1 mm female power plugs with positive
centers. Cables and AC/DC adaptors may purchased from the manufacturer (see Accessories page 43)
and are commonly available at local electronics suppliers. Alternatively, power can be supplied through
the Mini-DIN connector as shown below:
Small Valve: If your controller utilizes a small valve (about the size of your thumb), a 12-18
Vdc (standard 68ohm valve coil) or 19-28 Vdc (optional 136ohm valve coil) power supply with a 2.1
mm female positive center plug capable of supplying 300 mA is recommended. Note: 4-20mA output
requires at least 15 Vdc.
Large Valve: If your controller utilizes a large valve (about the size of your st), a 24-30 Vdc power
supply with a 2.1 mm female positive center plug capable of supplying at least 750mA is required.
7Power In (as described above)Blue
8Ground (common for power, communications and signals)Purple
Note: The above pin-out is applicable to all the ow meters and controllers available with the MiniDIN connector. The availability of different output signals depends on the ow meter options ordered.
UnderlinedItems in the above table are optional congurations that are noted on the unit’s
calibration sheet.
Static 5.12 Vdc or Secondary Analog Output (4-20mA, 5Vdc, 10Vdc) or
Basic Alarm
2
45
7
8
Mini-DIN
cable color
Brown
Figure 1. 8 Pin Mini-DIN Connector
CAUTION: Do not connect power to pins 1 through 6 as permanent damage can occur!
Note: Upon initial review of the pin out diagram in Figure 1, it is common to mistake Pin 2 (labeled
5.12 Vdc Output) as the standard 0-5 Vdc analog output signal! In fact Pin 2 is normally a constant
5.12 Vdc that reects the system bus voltage and can be used as a source for the set-point signal.
6
Input Signals
7
6
5
4
3
2
1
8
5.12 Vdc
50 KOhm
Potentiometer
0-5 Vdc
Analog Input Signal
Apply analog input to Pin 4 as shown in Figure 1.
Standard 0-5 Vdc: Unless ordered otherwise, 0-5 Vdc is the standard analog input signal. Apply the
0-5 Vdc input signal to pin 4, with common ground on pin 8. The 5.12 Vdc output on pin 2 can be wired
through a 50K ohm potentiometer and back to the analog input on pin 4 to create an adjustable 0-5 Vdc
input signal source as shown below.
Figure 2. Simple method for providing set-point to controllers
Optional 0-10 Vdc: If specied at time of order, a 0-10 Vdc input signal can be applied to pin 4, with
common ground on pin 8.
Optional 4-20 mA: If specied at time of order, a 4-20 mA input signal can be applied to pin 4, with
common ground on pin 8. Note: 4-20mA output requires at least 15 Vdc power input.
RS-232 Digital Input Signal
If you will be using the RS-232 input signal, it is necessary to connect the RS-232 Output Signal (Pin
5), the RS-232 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown in Figure
3. Adapter cables are available from the manufacturer or they can be constructed in the eld with parts
from an electronics supply house. In Figure 3, note that the diagrams represent the “port” side of the
connections, i.e. the connector on top of the meter and the physical DB-9 serial port on the back of the
computer. The cable ends will be mirror images of the diagram shown in Figure 3. (See page 20 for
details on accessing RS-232 input.)
Output Signals
Note: Upon initial review of the pin out diagram in Figure 1 (page 6), it is common to mistake Pin 2
(labeled 5.12 Vdc Output) as the standard 0-5 Vdc analog output signal! In fact Pin 2 is normally a
constant 5.12 Vdc that reects the system bus voltage and can be used as a source for the input signal.
This allows the user in the eld to run this output through a 50K ohm potentiometer and back into the
analog set-point pin to create a 0-5 Vdc set-point source.
RS-232 Digital Output Signal
If you will be using the RS-232 output signal, it is necessary to connect the RS-232 Output Signal (Pin
5), the RS-232 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown in Figure
3. Adapter cables are available from the manufacturer or they can be constructed in the eld with parts
from an electronics supply house. In Figure 3, note that the diagrams represent the “port” side of the
7
connections, i.e. the connector on top of the meter and the physical DB-9 serial port on the back of the
computer. The cable ends will be mirror images of the diagram shown in Figure 3. (See page 20 for
details on accessing RS-232 output.)
Standard Voltage (0-5 Vdc) Output Signal
All MC and VC Series ow controllers have a 0-5 Vdc (optional 0-10 Vdc) output signal available on
Pin 6. This is generally available in addition to other optionally ordered outputs. This voltage is usually
in the range of 0.010 Vdc for zero ow and 5.0 Vdc for full-scale ow. The output voltage is linear over
the entire range. Ground for this signal is common on Pin 8.
Optional 0-10 Vdc Output Signal
If your controller was ordered with a 0-10 Vdc output signal, it will be available on Pin 6. (See the
Calibration Data Sheet that shipped with your controller to determine which output signals were
ordered.) This voltage is usually in the range of 0.010 Vdc for zero ow and 10.0 Vdc for full-scale ow.
The output voltage is linear over the entire range. Ground for this signal is common on Pin 8.
Optional Current (4-20 mA) Output Signal
If your controller was ordered with a 4-20 mA current output signal, it will be available on Pin 1. (See
the Calibration Data Sheet that shipped with your controller to determine which output signals were
ordered.) The current signal is 4 mA at 0 ow and 20 mA at the controller’s full scale ow. The output
current is linear over the entire range. Ground for this signal is common on Pin 8. (Current output units
require 15-30Vdc power.)
Note: This is a current sourcing device. Do not attempt to connect it to “loop powered” systems.
Optional 2nd Analog Output Signal
You may specify an optional 2nd analog output on Pin 2 at time of order. (See the Calibration Data
Sheet that shipped with your controller to determine which output signals were ordered.) This output
may be a 0-5 Vdc, 0-10 Vdc, or 4-20 mA analog signal that can represent any measured parameter.
With this optional output, a volumetric ow controller could output the volumetric ow rate with a 0-5
Vdc signal (on pin 6) and a 4-20 mA signal (on pin 2), or a mass ow controller could output the mass
ow rate (0-5 Vdc on pin 6) and the absolute pressure (0-5 Vdc on pin 2).
Note: This is a current sourcing device. Do not attempt to connect it to “loop powered” systems.
2
4
6
7
5
8
Figure 3. Mini-DIN to DB-9 Connection for RS-232 Signals
Note: The above pin-out is applicable to all the ow meters and controllers ordered with the industrial
connector. The availability of different output signals depends on the ow controller options ordered.
9
MC Series Mass Flow Controller Operation
The MC Series Mass Flow Controller provides a multitude of useful ow data in one simple, rugged
device. The MC Series can have several screen “modes” depending on how the device is ordered.
All MC Series controllers have a default Main Mode, Select Menu Mode, Control Set Up Mode, Gas
Select Mode (the Gas Select Mode may not be available on controllers calibrated for a custom gas or
blend), Communication Select Mode and Manufacturer Data Mode. (In addition, your device may have
been ordered with a Totaliizing Mode, page 41.) The device defaults to Main Mode as soon as power
is applied to the controller.
Main Mode
The main mode screen defaults on power up with the mass ow on the primary display. The following
parameters are displayed in the main mode as shown in Figure 6.
PSIA oC Set Pt.
+13.49 +22.73 0.000
SCCM
Air
+0.000 +0.000
Volume Mass Main
MASS
Figure 6. Main Mode Display, MC Series Flow Controller
The “MODE” button in the lower right hand corner toggles the display between modes.
Set Pt. – The set-point is shown in the upper right corner of the display. The set-point cannot be adjusted
from the main mode screen. For information on changing the set-point, see “Set”, page 13.
Gas Absolute Pressure: The MC Series ow controllers utilize an absolute pressure sensor to measure
the line pressure of the gas ow being monitored. This sensor references hard vacuum and accurately
reads line pressure both above and below local atmospheric pressure. This parameter is located in
the upper left corner of the display under the dynamic label “PSIA”. This parameter can be moved to
the primary display by pushing the button just above the dynamic label (top left). The engineering unit
associated with absolute pressure is pounds per square inch absolute (PSIA). This can be converted
to gage pressure (PSIG = the reading obtained by a pressure gauge that reads zero at atmospheric
pressure) by simply subtracting local atmospheric pressure from the absolute pressure reading:
PSIG = PSIA – (Local Atmospheric Pressure)
The ow meters use the absolute pressure of the gas in the calculation of the mass ow rate. For
working in metric units, note that 1 PSI = 6.89 kPa.
10
Gas Temperature: The MC Series ow controllers utilize a temperature sensor to measure the line
temperature of the gas ow being monitored. The temperature is displayed in engineering units of
degrees Celsius (°C). The ow controllers use the temperature of the gas in the calculation of the mass
ow rate. This parameter is located in the upper middle portion of the display under “°C”. This parameter
can be moved to the primary display by pushing the top center button above “°C”.
Volumetric Flow Rate: The volumetric ow rate is determined using the Flow Measurement Operating
Principle described on page 26. This parameter is located in the lower left corner of the display over
“Volume”. This parameter can be moved to the primary display by pushing the “Volume” button (lower
left). In order to get an accurate volumetric ow rate, the gas being measured must be selected (see
Gas Select Mode). This is important because the device calculates the ow rate based on the viscosity
of the gas at the measured temperature. If the gas being measured is not what is selected, an incorrect
value for the viscosity of the gas will be used in the calculation of ow, and the resulting output will be
inaccurate in direct proportion to the ratio between the two gases viscosities.
Mass Flow Rate: The mass ow rate is the volumetric ow rate corrected to a standard temperature
and pressure (typically 14.696 psia and 25°C). This parameter is located in the lower middle portion
of the display over “Mass”. This parameter can be moved to the primary display by pushing the button
located below “Mass” (bottom center). The controllers uses the measured temperature and the measured
absolute pressure to calculate what the ow rate would be if the gas pressure was at 1 atmosphere and
the gas temperature was 25°C. This allows a solid reference point for comparing one ow to another.
Flashing Error Message: Our ow meters and controllers display an error message (MOV = mass
overrange, VOV = volumetric overrange, POV = pressure overrange, TOV = temperature overrange)
when a measured parameter exceeds the range of the sensors in the device. When any item ashes
on the display, neither the ashing parameter nor the mass ow measurement is accurate. Reducing
the value of the ashing parameter to within specied limits will return the unit to normal operation and
accuracy.
Select Menu Mode
Pushing “Mode” once will bring up the “Select Menu” display. Push the button nearest your selection
to go to the corresponding screen. Push “Mode” again to return to the Main Mode display. (Note: If
your controller was ordered with Totalizing Mode option (page 41), pushing the “Mode” button once will
bring up the “Totalizing Mode” display. Pushing “Mode” a second time will bring up the “Select Menu”
display.)
Gas Control
Select
SELECT
MENU
Comm. Mfg.
RS-232 Data Menu
Figure 7. Select Menu Display
11
Control Setup Mode
The Control Setup Mode is accessed by pressing the center button above “Control” on the Select Menu
display (Fig.7) This mode allows the user to set up most parameters commonly associated with PID
control. MC Series ow controllers allow the user to select how the set-point is to be conveyed to the
controller, what that set-point is if control is local, and what the Proportional and Differential terms of the
PID control loop will be. The UP and DOWN buttons for adjusting variables can be held down for higher
speed adjustment or pressed repeatedly for ne adjustment.
Input – MC Series Flow Controllers normally ship defaulted to analog control as indicated in Figure 8.
To change how the set-point will be conveyed to the controller push the button in the upper right hand
corner just above the dynamic label “Input” until the arrow is directly in front of the desired option. The
controller will ignore any set-point except that of the selected input and it will remember which input is
selected even if the power is disconnected.
Analog refers to a remote analog set-point applied to Pin 4 of the Mini-DIN connector as described
in the installation section of this manual. To determine what type of analog set-point your controller
was ordered with, refer to the Calibration Data Sheet that was included with your controller. 0-5 Vdc is
standard unless ordered otherwise. Note that if nothing is connected to Pin 4, and the controller is set
for analog control, the set-point will oat. CAUTION! Neverleavea CoNtrollerwithaNyNoN-zeroset-
Serial refers to a remote digital RS-232 set-point applied via a serial connection to a computer or
PLC as described in the Installation and RS-232 sections of this manual. CAUTION! Neverleavea
Loop—The selection of what variable to close the loop on is a feature unique to these mass ow
controllers. When the mass ow controller is supplied with the control valve upstream of the electronics
portion of the system, the unit can be set to control on outlet pressure (absolute pressures only) or
volumetric ow rate, instead of mass ow rate. Repeatedly pressing the button adjacent to the word
“Loop” on the control setup screen will change what variable is controlled. The change from mass to
volume can usually be accomplished without much, if any, change in the P and D settings. When you
change from controlling ow to controlling pressure, sometimes fairly radical changes must be made
to these variables. Note: Full scale pressure is normally 160PSIA. Consult the factory if you are having
difculties with this procedure.
Select – To avoid accidental changing of the PID loop parameters or the set-point, the Control Setup
mode defaults with the selector on a null position. To change the set-point or the P and D PID loop
parameters, push the button in the upper left corner just above the dynamic label “Select” until the
selection arrow is pointing to the parameter you wish to change. When the parameter you wish to
change is selected, it may be adjusted up or down with the buttons under the display below the dynamic
labels “Up” and “Down”. Press the buttons repeatedly to make slow adjustments or hold them down to
make fast adjustments.
P refers to the Proportional term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.
D refers to the Differential term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.
AUT0on / AUT0off refers to the standard auto-tare or “auto-zero” feature. It is recommended that the
controller be left in the default auto-tare ON mode unless your specic application requires that it be
turned off. The auto-tare feature automatically tares (takes the detected signal as zero) the unit when it
receives a zero set-point for more than two seconds. A zero set-point results in the closing of the valve
and a known “no ow” condition. This feature helps to make the device more accurate by periodically
removing any cumulative errors associated with drift.
Set refers to the Set-Point. This parameter may only be changed if “Local” is selected as the Input. See
above for information on selecting the input. Using the UP and DOWN buttons, the set-point may be
adjusted between zero and the full-scale range of the controller. CAUTION! Neverleavea CoNtroller
withaNyNoN-zeroset-poiNtifNopressureisavailabletomakeflow. theCoNtrollerwillapplyfull
powertothevalveiNaNattempttoreaChtheset-poiNt. wheNthereisNoflow, thisCaNmakethevalve
very hot!
13
Gas Select Mode
The gas select mode is accessed by pressing the button above “Gas Select” on the Select Menu
display. The screen will appear as shown in Figure 9.
PgUP PgDWN Main
H2 Hydrogen
He Helium
>N2 Nitrogen
N2O Nitrous Oxide
Ne Neon
O2 Oxygen
UP DOWN Gas
Figure 9. Gas Select Mode
The selected gas is displayed on the default main mode screen as shown in Figure 6, and is indicated
by the arrow in the Gas Select Mode screen in Figure 9. To change the selected gas, use the buttons
under “UP” and “DOWN” or above “PgUP” and “PgDWN” to position the arrow in front of the desired
gas. When the mode is cycled back to the Main Mode, the selected gas will be displayed on the main
screen. (Note: Gas Select Mode may not be available for units ordered for use with a custom gas or
blend.)
14
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