Apex Precision Gas Flow Controller Operating Manual

16 Series
Mass and Volumetric Flow Controllers
Precision Gas Flow Controller
Operating Manual
Notice: The manufacturer reserves the right to make any changes and improvements to the products described in this manual at any time and without notice. This manual is copyrighted. This document may not, in whole or in part, be copied, reproduced, translated, or converted to any electronic medium or machine readable form, for commercial purposes, without prior written consent from the copyright holder.
Note: Although we provide assistance on our products both personally and through our literature, it is the complete responsibility of the user to determine the suitability of any product to their application.
The manufacturer does not warrant or assume responsibility for the use of its products in life support applications or systems.
Wide-Range Laminar Flow Element Patent:
The wide-range laminar ow element and products using the wide-range laminar ow element are covered by U.S. Patent Number: 5,511,416. Manufacture or use of the wide-range laminar ow element in products other than products licensed under
said patent will be deemed an infringement.
Warranty
This product is warranted to the original purchaser for a period of one year from the date
of purchase to be free of defects in material or workmanship. Under this warranty the
product will be repaired or replaced at manufacturer’s option, without charge for parts or labor when the product is carried or shipped prepaid to the factory together with proof of purchase. This warranty does not apply to cosmetic items, nor to products that are damaged,
defaced or otherwise misused or subjected to abnormal use. See “Application” under the
Installation section. Where consistent with state law, the manufacturer shall not be liable for consequential economic, property, or personal injury damages. The manufacturer does not warrant or assume responsibility for the use of its products in life support applications or systems.
10/24/06 Rev. 0 DOC-APEXMAN16C
Table of Contents Page
Installation 5 Plumbing 5
Mounting 5 Application 5 Power and Signal Connections 6 Input Signals 7 Analog Input Signal 7 RS-232 Input Signal 7 Output Signals 7 RS-232 Digital Output Signal 8 Standard Voltage (0-5 Vdc) Output Signal 8 Optional 0-10 Vdc Output Signal 8 Optional Current (4-20 mA) Output Signal 8 Optional 2nd Analog Output Signal 8 MC Series Mass Flow Controller Operation 10 Main Mode 10 Set Pt. 10
Gas Absolute Pressure 10 Gas Temperature 11
Volumetric Flow Rate 11 Mass Flow Rate 11 Flashing Error Message 11 Select Menu Mode 11 Control Setup Mode 12
Input 12 Loop 13
Select 13 Gas Select Mode 14 Communication Select Mode 15 Unit ID 15 Baud 15 Data Rate 15 Manufacturer Data Mode 16 VC Series Volumetric Flow Controller Operation 17 Main Mode 17 Volume 17 Set Pt. 17 Flashing Error Message 17 Select Menu Mode 18 Control Setup Mode 18 Input 18 Select 18 Gas Select Mode 20 Communication Select Mode 20
Table of Contents Page
Manufacturer Data Mode 20 RS-232 Output and Input 20 Conguring HyperTerminal® 20 Changing from Streaming to Polling Mode 20 Sending a Set-Point via RS-232 21 To adjust the P & D terms via RS-232 21 Gas Select 23 Collecting Data 24 Data Format 24 Sending a Simple Script File to HyperTerminal® 25 Operating Principle 26 Gas Viscosity 26 Other Gases 27 Volume Flow vs. Mass Flow 27 Volumetric Flow and Mass Flow Conversion 28 Compressibility 28 Standard Gas Data Tables 29 Gas Viscosities and Densities Table 30 Volumetric Flow Meters Under Pressure 31 Troubleshooting 32 Maintenance and Recalibration 33 Technical Specications 34 Dimensional Drawings 38
Additional Information
Option: Totalizing Mode 41 Option: Local Set-Point Module 42 Accessories 43 Flow Conversion Table 43 Calibration Certicate Pocket 44
Figure 1. 8 Pin Mini-DIN Connector 6 Figure 2. Simple method for providing set-point to controllers 7 Figure 3. Mini-DIN to DB-9 Connection for RS-232 Signals 8 Figure 4. Typical Multiple Device (Addressable) Wiring Conguration 9 Figure 5. Optional Industrial Connector 9 Figure 6. Main Mode Display, MC Series Flow Controller 10 Figure 7. Select Menu Display 11 Figure 8. MC Series Control Setup Display 12 Figure 9. Gas Select Display 14 Figure 10. Communication Select Display 15 Figure 11. Manufacturer Data Displays 16 Figure 12. Main Mode Display, VC Series Flow Controller 17 Figure 13. VC Series Control Setup Display 18
Thank you for purchasing an Apex MC or VC Series Gas Flow Controller. Please take the time to nd
and read the information contained in this manual. This will help to ensure that you get the best possible service from your instrument. This manual covers the following Apex instruments:
MC Series 16 Bit Mass Gas Flow Controllers VC Series 16 Bit Volumetric Gas Flow Controllers
Installation
Plumbing
All MC and VC Series Gas Flow Controllers are equipped with female inlet and outlet port connections. Because the ow meters set up a laminar ow condition within the ow body, no straight runs of pipe are required upstream or downstream of the controller. The inlet and outlet ports are equal in size and symmetric (in-line). The port sizes (process connections) and mechanical dimensions for different ow ranges are shown on pages 34-37.
Controllers with 10-32 ports have o-ring face seals and require no further sealant or tape. On other
controllers, avoid the use of pipe dopes or sealants on the ports as these compounds can cause
permanent damage to the controller should they get into the ow stream. Use of thread sealing Teon
tape is recommended to prevent leakage around the threads. When applying the tape, avoid wrapping
the rst thread or two to minimize the possibility of getting a piece of shredded tape into the ow stream. When changing ttings, always clean any tape or debris from the port threads.
It is also recommended that a 20 micron lter be installed upstream of controllers with full scale ranges of 1(S)LPM or less and a 50 micron lter be installed upstream of controllers with full scale ranges above 1(S)LPM.
Mounting
All MC and VC Series Gas Flow Controllers have mounting holes for convenient mounting to at panels. The sizes and dimensions for the mounting holes are shown on pages 38-40. Position sensitivity is not
generally an issue with small valve controllers. Large valve controllers are somewhat position sensitive because of the fairly massive stem assembly. It is generally recommended that they be mounted so that the valve cylinder is vertical and upright. The primary concern in mounting a large valve controller in a position other than the recommended position is the increased risk of leakage when the controller
is given a zero set-point and is being held closed by the spring force.
Application
Maximum operating line pressure is 125 PSIG (862 kPa).
Caution: Exceeding the maximum specied line pressure may cause permanent damage to the
solid-state differential pressure transducer.
If the line pressure is higher than 125 PSIG (862 kPa), a pressure regulator should be used upstream from the ow meter to reduce the pressure to 125 PSIG (862 kPa) or less if possible. Many of our controllers are built after extensive consultations with the customer regarding the specic application. The result is that two controllers with the same ow range and part number may look and act quite differently depending upon the application the controller was built for. Care should be taken in moving a
controller from one application to another to test for suitability in the new application. Note that volumetric meters and controllers are not recommended for high pressure or high backpressure applications (see page 31).
5
Power and Signal Connections
7 8
1
2
3 4 5
AC/DC Adapter Jack
6
Power can be supplied to your MC or VC Series controller through either the power jack or the 8 pin Mini-DIN connector as shown in Figure 1. An AC to DC adapter which converts line AC power to DC voltage and current as specied below. The power jack accepts 2.1 mm female power plugs with positive centers. Cables and AC/DC adaptors may purchased from the manufacturer (see Accessories page 43)
and are commonly available at local electronics suppliers. Alternatively, power can be supplied through
the Mini-DIN connector as shown below:
Small Valve: If your controller utilizes a small valve (about the size of your thumb), a 12-18 Vdc (standard 68ohm valve coil) or 19-28 Vdc (optional 136ohm valve coil) power supply with a 2.1 mm female positive center plug capable of supplying 300 mA is recommended. Note: 4-20mA output requires at least 15 Vdc.
Large Valve: If your controller utilizes a large valve (about the size of your st), a 24-30 Vdc power supply with a 2.1 mm female positive center plug capable of supplying at least 750mA is required.
1
3
6
Pin Function
1 Inactive or 4-20mA Primary Output Signal Black
2
3 RS-232 Input Signal Red 4 Analog Input Signal Orange 5 RS-232 Output Signal Yellow 6 0-5 Vdc (or 0-10 Vdc) Output Signal Green
7 Power In (as described above) Blue 8 Ground (common for power, communications and signals) Purple
Note: The above pin-out is applicable to all the ow meters and controllers available with the Mini­DIN connector. The availability of different output signals depends on the ow meter options ordered.
Underlined Items in the above table are optional congurations that are noted on the unit’s calibration sheet.
Static 5.12 Vdc or Secondary Analog Output (4-20mA, 5Vdc, 10Vdc) or Basic Alarm
2
4 5
7
8
Mini-DIN
cable color
Brown
Figure 1. 8 Pin Mini-DIN Connector
CAUTION: Do not connect power to pins 1 through 6 as permanent damage can occur!
Note: Upon initial review of the pin out diagram in Figure 1, it is common to mistake Pin 2 (labeled
5.12 Vdc Output) as the standard 0-5 Vdc analog output signal! In fact Pin 2 is normally a constant
5.12 Vdc that reects the system bus voltage and can be used as a source for the set-point signal.
6
Input Signals
7
6
5
4
3
2
1
8
5.12 Vdc
50 KOhm
Potentiometer
0-5 Vdc
Analog Input Signal
Apply analog input to Pin 4 as shown in Figure 1.
Standard 0-5 Vdc: Unless ordered otherwise, 0-5 Vdc is the standard analog input signal. Apply the 0-5 Vdc input signal to pin 4, with common ground on pin 8. The 5.12 Vdc output on pin 2 can be wired through a 50K ohm potentiometer and back to the analog input on pin 4 to create an adjustable 0-5 Vdc
input signal source as shown below.
Figure 2. Simple method for providing set-point to controllers
Optional 0-10 Vdc: If specied at time of order, a 0-10 Vdc input signal can be applied to pin 4, with
common ground on pin 8.
Optional 4-20 mA: If specied at time of order, a 4-20 mA input signal can be applied to pin 4, with
common ground on pin 8. Note: 4-20mA output requires at least 15 Vdc power input.
RS-232 Digital Input Signal
If you will be using the RS-232 input signal, it is necessary to connect the RS-232 Output Signal (Pin
5), the RS-232 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown in Figure
3. Adapter cables are available from the manufacturer or they can be constructed in the eld with parts from an electronics supply house. In Figure 3, note that the diagrams represent the “port” side of the connections, i.e. the connector on top of the meter and the physical DB-9 serial port on the back of the computer. The cable ends will be mirror images of the diagram shown in Figure 3. (See page 20 for details on accessing RS-232 input.)
Output Signals
Note: Upon initial review of the pin out diagram in Figure 1 (page 6), it is common to mistake Pin 2 (labeled 5.12 Vdc Output) as the standard 0-5 Vdc analog output signal! In fact Pin 2 is normally a
constant 5.12 Vdc that reects the system bus voltage and can be used as a source for the input signal. This allows the user in the eld to run this output through a 50K ohm potentiometer and back into the analog set-point pin to create a 0-5 Vdc set-point source.
RS-232 Digital Output Signal
If you will be using the RS-232 output signal, it is necessary to connect the RS-232 Output Signal (Pin
5), the RS-232 Input Signal (Pin 3), and Ground (Pin 8) to your computer serial port as shown in Figure
3. Adapter cables are available from the manufacturer or they can be constructed in the eld with parts from an electronics supply house. In Figure 3, note that the diagrams represent the “port” side of the
7
connections, i.e. the connector on top of the meter and the physical DB-9 serial port on the back of the
7
4
6
21
DB-9 Serial Port
5
5----------Ground--------------------------------------Ground----------8 3----------Transmit------------------------------------Receive---------3 2----------Receive-------------------------------------Transmit--------5
8 Pin Mini-DIN Port
8
1
2 3 4 5
6
7
8 9
3
computer. The cable ends will be mirror images of the diagram shown in Figure 3. (See page 20 for details on accessing RS-232 output.)
Standard Voltage (0-5 Vdc) Output Signal
All MC and VC Series ow controllers have a 0-5 Vdc (optional 0-10 Vdc) output signal available on Pin 6. This is generally available in addition to other optionally ordered outputs. This voltage is usually in the range of 0.010 Vdc for zero ow and 5.0 Vdc for full-scale ow. The output voltage is linear over
the entire range. Ground for this signal is common on Pin 8.
Optional 0-10 Vdc Output Signal
If your controller was ordered with a 0-10 Vdc output signal, it will be available on Pin 6. (See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered.) This voltage is usually in the range of 0.010 Vdc for zero ow and 10.0 Vdc for full-scale ow.
The output voltage is linear over the entire range. Ground for this signal is common on Pin 8.
Optional Current (4-20 mA) Output Signal
If your controller was ordered with a 4-20 mA current output signal, it will be available on Pin 1. (See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered.) The current signal is 4 mA at 0 ow and 20 mA at the controller’s full scale ow. The output current is linear over the entire range. Ground for this signal is common on Pin 8. (Current output units require 15-30Vdc power.)
Note: This is a current sourcing device. Do not attempt to connect it to “loop powered” systems.
Optional 2nd Analog Output Signal
You may specify an optional 2nd analog output on Pin 2 at time of order. (See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered.) This output may be a 0-5 Vdc, 0-10 Vdc, or 4-20 mA analog signal that can represent any measured parameter. With this optional output, a volumetric ow controller could output the volumetric ow rate with a 0-5 Vdc signal (on pin 6) and a 4-20 mA signal (on pin 2), or a mass ow controller could output the mass ow rate (0-5 Vdc on pin 6) and the absolute pressure (0-5 Vdc on pin 2).
Note: This is a current sourcing device. Do not attempt to connect it to “loop powered” systems.
2
4
6
7
5
8
Figure 3. Mini-DIN to DB-9 Connection for RS-232 Signals
8
Purple (Ground)
Red
Yellow
Unit A
Purple
Red
Yellow
Unit B
Purple
Red
Yellow
Unit C
2
5
3
5
4
3
2
1
9
8
Female Serial Cable Front
Figure 4. Typical Multiple Device (Addressable) Wiring Conguration
An optional industrial connector is also available:
Pin Function Cable Color
1
Power In ( + )
2 RS-232 Output Blue 3 RS-232 Input Signal White 4 Analog Input Signal Green 5 Ground (commom for power,
Black
communications and signals)
6 Signal Out (Voltage or Current as ordered) Brown
Figure 5. Optional Industrial Connector
7
Red
6
6
1
5
2
4
3
Note: The above pin-out is applicable to all the ow meters and controllers ordered with the industrial
connector. The availability of different output signals depends on the ow controller options ordered.
9
MC Series Mass Flow Controller Operation
The MC Series Mass Flow Controller provides a multitude of useful ow data in one simple, rugged device. The MC Series can have several screen “modes” depending on how the device is ordered. All MC Series controllers have a default Main Mode, Select Menu Mode, Control Set Up Mode, Gas Select Mode (the Gas Select Mode may not be available on controllers calibrated for a custom gas or blend), Communication Select Mode and Manufacturer Data Mode. (In addition, your device may have been ordered with a Totaliizing Mode, page 41.) The device defaults to Main Mode as soon as power
is applied to the controller.
Main Mode
The main mode screen defaults on power up with the mass ow on the primary display. The following parameters are displayed in the main mode as shown in Figure 6.
PSIA oC Set Pt.
+13.49 +22.73 0.000
SCCM Air
+0.000 +0.000
Volume Mass Main
MASS
Figure 6. Main Mode Display, MC Series Flow Controller
The “MODE” button in the lower right hand corner toggles the display between modes.
Set Pt. – The set-point is shown in the upper right corner of the display. The set-point cannot be adjusted
from the main mode screen. For information on changing the set-point, see “Set”, page 13.
Gas Absolute Pressure: The MC Series ow controllers utilize an absolute pressure sensor to measure the line pressure of the gas ow being monitored. This sensor references hard vacuum and accurately
reads line pressure both above and below local atmospheric pressure. This parameter is located in
the upper left corner of the display under the dynamic label “PSIA”. This parameter can be moved to the primary display by pushing the button just above the dynamic label (top left). The engineering unit associated with absolute pressure is pounds per square inch absolute (PSIA). This can be converted to gage pressure (PSIG = the reading obtained by a pressure gauge that reads zero at atmospheric pressure) by simply subtracting local atmospheric pressure from the absolute pressure reading:
PSIG = PSIA – (Local Atmospheric Pressure)
The ow meters use the absolute pressure of the gas in the calculation of the mass ow rate. For working in metric units, note that 1 PSI = 6.89 kPa.
10
Gas Temperature: The MC Series ow controllers utilize a temperature sensor to measure the line temperature of the gas ow being monitored. The temperature is displayed in engineering units of degrees Celsius (°C). The ow controllers use the temperature of the gas in the calculation of the mass ow rate. This parameter is located in the upper middle portion of the display under “°C”. This parameter can be moved to the primary display by pushing the top center button above “°C”.
Volumetric Flow Rate: The volumetric ow rate is determined using the Flow Measurement Operating Principle described on page 26. This parameter is located in the lower left corner of the display over “Volume”. This parameter can be moved to the primary display by pushing the “Volume” button (lower left). In order to get an accurate volumetric ow rate, the gas being measured must be selected (see Gas Select Mode). This is important because the device calculates the ow rate based on the viscosity
of the gas at the measured temperature. If the gas being measured is not what is selected, an incorrect
value for the viscosity of the gas will be used in the calculation of ow, and the resulting output will be
inaccurate in direct proportion to the ratio between the two gases viscosities.
Mass Flow Rate: The mass ow rate is the volumetric ow rate corrected to a standard temperature and pressure (typically 14.696 psia and 25°C). This parameter is located in the lower middle portion of the display over “Mass”. This parameter can be moved to the primary display by pushing the button located below “Mass” (bottom center). The controllers uses the measured temperature and the measured absolute pressure to calculate what the ow rate would be if the gas pressure was at 1 atmosphere and the gas temperature was 25°C. This allows a solid reference point for comparing one ow to another.
Flashing Error Message: Our ow meters and controllers display an error message (MOV = mass overrange, VOV = volumetric overrange, POV = pressure overrange, TOV = temperature overrange) when a measured parameter exceeds the range of the sensors in the device. When any item ashes on the display, neither the ashing parameter nor the mass ow measurement is accurate. Reducing the value of the ashing parameter to within specied limits will return the unit to normal operation and
accuracy.
Select Menu Mode
Pushing “Mode” once will bring up the “Select Menu” display. Push the button nearest your selection to go to the corresponding screen. Push “Mode” again to return to the Main Mode display. (Note: If
your controller was ordered with Totalizing Mode option (page 41), pushing the “Mode” button once will bring up the “Totalizing Mode” display. Pushing “Mode” a second time will bring up the “Select Menu” display.)
Gas Control
Select
SELECT
MENU
Comm. Mfg.
RS-232 Data Menu
Figure 7. Select Menu Display
11
Control Setup Mode
The Control Setup Mode is accessed by pressing the center button above “Control” on the Select Menu display (Fig.7) This mode allows the user to set up most parameters commonly associated with PID control. MC Series ow controllers allow the user to select how the set-point is to be conveyed to the controller, what that set-point is if control is local, and what the Proportional and Differential terms of the PID control loop will be. The UP and DOWN buttons for adjusting variables can be held down for higher speed adjustment or pressed repeatedly for ne adjustment.
Input – MC Series Flow Controllers normally ship defaulted to analog control as indicated in Figure 8.
To change how the set-point will be conveyed to the controller push the button in the upper right hand
corner just above the dynamic label “Input” until the arrow is directly in front of the desired option. The
controller will ignore any set-point except that of the selected input and it will remember which input is selected even if the power is disconnected.
Analog refers to a remote analog set-point applied to Pin 4 of the Mini-DIN connector as described
in the installation section of this manual. To determine what type of analog set-point your controller
was ordered with, refer to the Calibration Data Sheet that was included with your controller. 0-5 Vdc is standard unless ordered otherwise. Note that if nothing is connected to Pin 4, and the controller is set for analog control, the set-point will oat. CAUTION! Never leave a CoNtroller with aNy NoN-zero set-
poiNt if No pressure is available to make flow. the CoNtroller will apply full power to the valve iN aN attempt to reaCh the set-poiNt. wheN there is No flow, this CaN make the valve very hot!
Serial refers to a remote digital RS-232 set-point applied via a serial connection to a computer or PLC as described in the Installation and RS-232 sections of this manual. CAUTION! Never leave a
CoNtroller with aNy NoN-zero set-poiNt if No pressure is available to make flow. the CoNtroller will
apply full power to the valve iN aN attempt to reaCh the set-poiNt. wheN there is No flow, this CaN make the valve very hot!
Local refers to a set-point applied directly at the controller. For more information on changing the set-
point locally refer to the heading “Select” below. Local input must be selected prior to attempting to
change the set-point locally. CAUTION! Never leave a CoNtroller with aNy NoN-zero set-poiNt if No
pressure is available to make flow. the CoNtroller will apply full power to the valve iN aN attempt to reaCh the set-poiNt. wheN there is No flow, this CaN make the valve very hot!
Select Loop Input
>P 200 >Mass >Analog D 500 Volume Serial
AUT0on
Set 0.00
Up Down Setup
Press Local
Control
Figure 8. MC Series Control Setup Display
12
Loop—The selection of what variable to close the loop on is a feature unique to these mass ow controllers. When the mass ow controller is supplied with the control valve upstream of the electronics portion of the system, the unit can be set to control on outlet pressure (absolute pressures only) or volumetric ow rate, instead of mass ow rate. Repeatedly pressing the button adjacent to the word “Loop” on the control setup screen will change what variable is controlled. The change from mass to volume can usually be accomplished without much, if any, change in the P and D settings. When you change from controlling ow to controlling pressure, sometimes fairly radical changes must be made
to these variables. Note: Full scale pressure is normally 160PSIA. Consult the factory if you are having difculties with this procedure.
Select – To avoid accidental changing of the PID loop parameters or the set-point, the Control Setup mode defaults with the selector on a null position. To change the set-point or the P and D PID loop parameters, push the button in the upper left corner just above the dynamic label “Select” until the
selection arrow is pointing to the parameter you wish to change. When the parameter you wish to change is selected, it may be adjusted up or down with the buttons under the display below the dynamic
labels “Up” and “Down”. Press the buttons repeatedly to make slow adjustments or hold them down to
make fast adjustments.
P refers to the Proportional term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.
D refers to the Differential term of the PID loop. Before changing this parameter, it is good practice to
write down the initial value so that it can be returned to the factory settings if necessary.
AUT0on / AUT0off refers to the standard auto-tare or “auto-zero” feature. It is recommended that the controller be left in the default auto-tare ON mode unless your specic application requires that it be turned off. The auto-tare feature automatically tares (takes the detected signal as zero) the unit when it receives a zero set-point for more than two seconds. A zero set-point results in the closing of the valve and a known “no ow” condition. This feature helps to make the device more accurate by periodically
removing any cumulative errors associated with drift.
Set refers to the Set-Point. This parameter may only be changed if “Local” is selected as the Input. See above for information on selecting the input. Using the UP and DOWN buttons, the set-point may be adjusted between zero and the full-scale range of the controller. CAUTION! Never leave a CoNtroller
with aNy NoN-zero set-poiNt if No pressure is available to make flow. the CoNtroller will apply full power to the valve iN aN attempt to reaCh the set-poiNt. wheN there is No flow, this CaN make the valve very hot!
13
Gas Select Mode
The gas select mode is accessed by pressing the button above “Gas Select” on the Select Menu display. The screen will appear as shown in Figure 9.
PgUP PgDWN Main
H2 Hydrogen He Helium >N2 Nitrogen N2O Nitrous Oxide Ne Neon O2 Oxygen UP DOWN Gas
Figure 9. Gas Select Mode
The selected gas is displayed on the default main mode screen as shown in Figure 6, and is indicated by the arrow in the Gas Select Mode screen in Figure 9. To change the selected gas, use the buttons under “UP” and “DOWN” or above “PgUP” and “PgDWN” to position the arrow in front of the desired gas. When the mode is cycled back to the Main Mode, the selected gas will be displayed on the main screen. (Note: Gas Select Mode may not be available for units ordered for use with a custom gas or
blend.)
14
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