Analog Devices ADXL05JH, ADXL05AH Datasheet

61 g to 65 g Single Chip Accelerometer
a
FEATURES
g
5 milli­Noise Level 123 Less than the ADXL50 User Selectable Full Scale from 61 g to 65 Output Scale Selectable from 200 mV/g to 1 V/ Complete Acceleration Measurement System on a
Self Test on Digital Command +5 V Single Supply Operation 1000
APPLICATIONS Low Cost Sensor for Vibration Measurement Tilt Sensing with Faster Response than Electrolytic or
More Sensitive Alarms and Motion Detectors Affordable Inertial Sensing of Velocity and Position
GENERAL DESCRIPTION
The ADXL05 is a complete acceleration measurement system on a single monolithic IC. The ADXL05 will measure accelera­tions with full-scale ranges of ±5 g to ±1 g or less. Typical noise
Resolution
Single Chip IC
g
Shock Survival
Mercury Sensors
g
g
with Signal Conditioning
ADXL05*
floor is 500 µg/Hz, (12× less than the ADXL50), allowing sig­nals below 5 milli-g to be resolved. The ADXL05 is a force bal­anced capacitive accelerometer with the capability to measure both ac accelerations (typical of vibration) or dc accelerations (such as inertial force or gravity). Three external capacitors and a +5 volt regulated power supply are all that is required to measure accelerations up to ±5 g. Three resistors are used to configure the output buffer amplifier to set scale factors from 200 mV/g to 1 V/g. External capacitors may be added to the resistor network to provide 1 or 2 poles of filtering. No addi­tional active components are required to interface directly to most analog to digital converters (ADCs).
The device features a TTL compatible self-test function that can electrostatically deflect the sensor beam at any time to verify that the sensor and its electronics are functioning correctly.
The ADXL05 is available in a hermetic 10-pin TO-100 metal can, specified over the 0°C to +70°C commercial, and –40°C to +85°C industrial temperature ranges. Contact factory for avail­ability of automotive grade devices.
OSCILLATOR DECOUPLING
CAPACITOR
C2
SELF-TEST
(ST)
*Patents pending.
4
7
COM
ADXL05
OSCILLATOR
C3
+5V
15
FUNCTIONAL BLOCK DIAGRAM
SENSOR
DEMODULATOR
C1
DEMODULATOR
CAPACITOR
32
C1
PREAMP
V
PR
8
REFERENCE
10
R1
+1.8V
V
IN–
BUFFER
AMP
R3
R2
+3.4V
V
REF
6
OUTPUT
9
V
OUT
REV. B
Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties which may result from its use. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices.
© Analog Devices, Inc., 1996
One Technology Way, P.O. Box 9106, Norwood. MA 02062-9106, U.S.A. Tel: 617/329-4700 Fax: 617/326-8703
ADXL05–SPECIFICA TIONS
(TA = T
MIN
to T
, TA = +258C for J Grade Only, VS = +5 V, @ Acceleration = 0 g,
MAX
unless otherwise noted)
Parameter Conditions Min Typ Max Units
ADXL05J/A
SENSOR INPUT
Measurement Range Guaranteed Full Scale –5 +5 g Nonlinearity Best Fit Straight Line, 5 g FS 0.2 % of FS Alignment Error Transverse Sensitivity
1
2
± 1 Degrees ± 2%
SENSITIVITY
Initial Sensitivity at V Initial Sensitivity at V Temperature Drift
PR OUT
3
ZERO g BIAS LEVEL at V
Initial Offset 1.50 1.80 2.10 V vs. Temperature
3
+25°C 175 200 225 mV/g +25°C, R3/R1 = 5 0.875 1.000 1.125 V/g
± 0.5 % of Reading
PR
± 25/40 mV
vs. Supply VS = 4.75 V to 5.25 V 10 32 mV/V
NOISE PERFORMANCE at V
PR
Voltage Noise Density BW = 4 Hz to 1 kHz 500 1000 µg/Hz Noise in 100 Hz Bandwidth 5mg rms Noise in 10 Hz Bandwidth 1.6 mg rms
FREQUENCY RESPONSE
3 dB Bandwidth 3 dB Bandwidth
4 4
C1 = 0.022 µF (See Figure 9) 1000 1600 Hz C1 = 0.010 µF 4 kHz
Sensor Resonant Frequency 12 kHz
SELF TEST INPUT
Output Change at V
5
PR
ST Pin from Logic “0” to “1” –0.85 –1.00 –1.15 V Logic “1” Voltage 2.0 V Logic “0” Voltage 0.8 V Input Resistance To Common 50 k
+3.4 V REFERENCE
Output Voltage 3.350 3.400 3.450 V Output Temperature Drift
3
±5mV Power Supply Rejection DC, VS = +4.75 V to +5.25 V 1 10 mV/V Output Current Sourcing 500 µA
PREAMPLIFIER OUTPUT
Voltage Swing 0.25 VS – 1.4 V Current Output Source or Sink 30 80 µA Capacitive Load Drive 100 pF
BUFFER AMPLIFIER
Input Offset Voltage
6
Delta from Nominal 1.800 V ±10 ±25 mV Input Bias Current 520nA Open-Loop Gain DC 80 dB Unity Gain Bandwidth 200 kHz Output Voltage Swing I
= ±100 µA 0.25 VS – 0.25 V
OUT
Capacitive Load Drive 1000 pF Power Supply Rejection DC, VS = +4.75 V to +5.25 V 1 10 mV/V
POWER SUPPLY
Operating Voltage Range 4.75 5.25 V Quiescent Supply Current 8.0 10.0 mA
TEMPERATURE RANGE
Operating Range J 0 +70 °C Specified Performance A –40 +85 °C Automotive Grade* –40 +125 °C
NOTES
1
Alignment error is specified as the angle between the true and indicated axis of sensitivity, (see Figure 2).
2
Transverse sensitivity is measured with an applied acceleration that is 90° from the indicated axis of sensitivity. Transverse sensitivity is specified as the percent of
transverse acceleration that appears at the V
3
Specification refers to the maximum change in parameter from its initial at +25°C to its worst case value at T
4
Frequency at which response is 3 dB down from dc response assuming an exact C1 value is used. Maximum recommended BW is 6 kHz using a 0.010 µF capacitor, refer to
Figure 9.
5
Applying logic high to the self-test input has the effect of applying an acceleration of –5 g to the ADXL05.
6
Input offset voltage is defined as the output voltage differential from 1.800 V when the amplifier is connected as a follower. The voltage at this pin has a temperature drift
proportional to that of the 3.4 V reference. *Contact factory for availability of automotive grade devices. All min and max specifications are guaranteed. Typical specifications are not tested or guaranteed.
Specifications subject to change without notice.
output. This is the algebraic sum of the alignment and the inherent sensor sensitivity errors, (see Figure 2).
PR
MIN
to T
MAX
.
–2–
REV. B
System Performance Specifications–ADXL05
0.022µF
0.022µF
COM
C2
4
ADXL05
C1
C1
2
3
5
+3.4V
REF
6
PRE-AMP
8
V
PR
C4
1.8V
10
V
R1
IN–
R2
BUFFER
AMP
R3
1
+5V
C3
0.1µF
9
V
OUT
NOMINAL VALUES: R1 = 49.9k R3 = 249k R2 = 640k
AC COUPLED CONNECTION (61.5 g Full Scale)
(@ V
Terminal (Pin 9), unless otherwise noted. 0 g Bias Level = +2.5 V, C1 = 0.022 mF, R2 = 2.57 R3
OUT
ADXL05J/A
Parameter Conditions Min Typ Max Units
Buffer Gain G = R3/R1* 5 FULL-SCALE RANGE –1.5 +1.5 g SENSITIVITY @
Temperature Drift T
ZERO g BIAS LEVEL @ +25°C 2.5 V
Temperature Drift +25°C to T
FREQUENCY RESPONSE C4 = 3.3 µF, R1 = 49.9 k 1 1000 Hz
*Note: Resistor tolerance will affect system accuracy. Use of ±1% (or better) metal film resistors is recommended.
+25°C 875 1000 1,125 mV/g
MIN
to T
MAX
MIN
or T
MAX
±0.5 % of Reading
2/5 mV
0.022µF
0.022µF
COM
C2
4
ADXL05
C1
C1
2
3
5
+3.4V
REF
6
PRE-AMP
8
V
PR
1.8V
10
V
R1
IN–
R2
BUFFER
AMP
R3
1
+5V
C3
0.1µF
9
V
OUT
NOMINAL VALUES: R1 = 49.9k R3 = 100k (G=2) R2 = 255k (G=2)
DC COUPLED CONNECTION (62 g Full Scale)
(@ V
Terminal (Pin 9), unless otherwise noted. 0 g Bias Level = +2.5 V, C1 = 0.022 mF, R2 = 2.57 R3)
OUT
ADXL05J/A
Parameter Conditions Min Typ Max Units
Buffer Gain G = R3/R1* 2 FULL-SCALE RANGE –2 +2 g SENSITIVITY @
Temperature Drift T
ZERO g BIAS LEVEL @ +25°C 1.75 2.5 3.2 V
Temperature Drift +25°C to T
FREQUENCY RESPONSE dc 1000 Hz
*Note: Resistor tolerance will affect system accuracy. Use of ±1% (or better) metal film resistors is recommended.
+25°C 350 400 450 mV/g
MIN
to T
MAX
MIN
or T
MAX
±0.5 % of Reading
±50/80 mV
REV. B
–3–
ADXL05
WARNING!
ESD SENSITIVE DEVICE
ABSOLUTE MAXIMUM RATINGS*
Acceleration (Any Axis, Unpowered for 0.5 ms) . . . . . . 1000 g
Acceleration (Any Axis, Powered for 0.5 ms) . . . . . . . . . . 500 g
+V
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . –0.3 V to +7.0 V
S
Package Characteristics
Package u
JA
10-Pin TO-100 130°C/W 30°C/W 5 Grams
Output Short Circuit Duration
(V
, V
, V
PR
OUT
Operating Temperature . . . . . . . . . . . . . . . . .–55°C to +125°C
Storage Temperature . . . . . . . . . . . . . . . . . . .–65°C to +150°C
*Stresses above those listed under “Absolute Maximum Ratings” may cause
permanent damage to the device. This is a stress rating only; the functional operation of the device at these or any other conditions above those indicated in the
Terminals to Common) . . . . . . .Indefinite
REF
ORDERING GUIDE
Model Temperature Range
ADXL05JH 0°C to +70°C ADXL05AH –40°C to +85°C
operational sections of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability.
CAUTION
ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the human body and test equipment and can discharge without detection. Although the ADXL05 features proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance degradation or loss of functionality.
Drops onto hard surfaces can cause shocks of greater than 1000 g and exceed the absolute maximum rating of the device. Care should be exercised in handling to avoid damage.
u
JC
Device Weight
PIN DESCRIPTION
+5 V The power supply input pin. C2 Connection for an external bypass capacitor (nominally 0.022 µF)
C1 Connections for the demodulator capacitor, nominally 0.022 µF.
COM The power supply common (or “ground”) connection. V ST The digital self-test input. It is both CMOS and TTL compatible. V
V V
used to prevent oscillator switching noise from interfering with other ADXL05 circuitry. Please see the section on component selection.
See the section on component selection for application information.
Output of the internal 3.4 V voltage reference.
REF
The ADXL05 preamplifier output providing an output voltage of
PR
200 mV per g of acceleration. Output of the buffer amplifier.
OUT
The inverting input of the uncommitted buffer amplifier.
IN–
CONNECTION DIAGRAM
10-Header (TO-100)
TOP VIEW
OUT
COM
6
6
7
7
AXIS OF
AXIS OF
8
8
9
9
5
5
SENSITIVITY
SENSITIVITY
10
10
V
IN–
C2
4
4
C1
3
3
2
2
1
1
+5V
NOTES:
C1
AXIS OF SENSITIVITY IS ALONG A LINE BETWEEN PIN 5 AND THE TAB.
THE CASE OF THE METAL CAN PACKAGE IS CONNECTED TO PIN 5 (COMMON).
ARROW INDICATES DIRECTION OF POSITIVE ACCELERATION ALONG AXIS OF SENSITIVITY.
V
REF
ST
V
PR
V
–4–
REV. B
ADXL05
+1g
INDICATED POLARITY IS THAT OCCURRING AT V
PR
.
TAB
PIN 5
+ –
GLOSSARY OF TERMS
Acceleration: Change in velocity per unit time. Acceleration Vector: Vector describing the net acceleration
acting upon the ADXL05 (A
XYZ
).
g: A unit of acceleration equal to the average force of gravity occurring at the earth’s surface. A g is approximately equal to
32.17 feet/s
2
, or 9.807 meters/s2.
Nonlinearity: The maximum deviation of the ADXL05 output voltage from a best fit straight line fitted to a plot of acceleration vs. output voltage, calculated as a % of the full-scale output voltage (@ 5 g).
Resonant Frequency: The natural frequency of vibration of the ADXL05 sensor’s central plate (or “beam”). At its resonant frequency of 12 kHz, the ADXL05’s moving center plate has a peak in its frequency response with a Q of 3 or 4.
Sensitivity: The output voltage change per g unit of accelera- tion applied, specified at the V
pin in mV/g.
PR
Sensitive Axis (X): The most sensitive axis of the accelerom­eter sensor. Defined by a line drawn between the package tab and Pin 5 in the plane of the pin circle. See Figures 2a and 2b.
Sensor Alignment Error: Misalignment between the ADXL05’s on-chip sensor and the package axis, defined by Pin 5 and the package tab.
Total Alignment Error: Net misalignment of the ADXL05’s on-chip sensor and the measurement axis of the application. This error includes errors due to sensor die alignment to the package, and any misalignment due to installation of the sensor package in a circuit board or module.
Transverse Acceleration: Any acceleration applied 90° to the axis of sensitivity.
Transverse Sensitivity Error: The percent of a transverse ac­celeration that appears at the V
output. For example, if the
PR
transverse sensitivity is 1%, then a +10 g transverse acceleration will cause a 0.1 g signal to appear at V
(1% of 10 g). Trans-
PR
verse sensitivity can result from a sensitivity of the sensor to transverse forces or from misalignment of the internal sensor to its package.
Transverse Y Axis: The axis perpendicular (90°) to the pack- age axis of sensitivity in the plane of the package pin circle. See Figure 2.
Transverse Z Axis: The axis perpendicular (90°) to both the package axis of sensitivity and the plane of the package pin circle. See Figure 2.
Polarity of the Acceleration Output
The polarity of the ADXL05 output is shown in the Figure 1. When oriented to the earth’s gravity (and held in place), the ADXL05 will experience an acceleration of +1 g. This corre­sponds to a change of approximately +200 mV at the V
PR
out­put pin. Note that the polarity will be reversed to a negative going signal at the buffer amplifier output V
, due to its
OUT
inverting configuration.
Figure 1. Output Polarity at V
PR
Acceleration Vectors in Three Dimensions
The ADXL05 is a sensor designed to measure accelerations that result from an applied force. The ADXL05 responds to the component of acceleration on its sensitive X axis. Figures 2a and 2b show the relationship between the sensitive “X” axis and the transverse “Z” and “Y” axes as they relate to the TO-100
Z
SIDE VIEW
X
PIN 5
TRANSVERSE Z AXIS
TAB
Z
X
SENSITIVE (X) AXIS
Figure 2a. Sensitive X and Transverse Z Axis
Y
TOP VIEW
X
PIN 5
TRANSVERSE Y AXIS
SENSITIVE (X) AXIS
TAB
X
REV. B
Y
Figure 2b. Sensitive X and Transverse Y Axis
–5–
ADXL05
10
90
100
0%
0.5ms
package. Figure 2c describes a three dimensional acceleration vector (A component of interest. To determine A of acceleration in the XY plane (A
) which might act on the sensor, where AX is the
XYZ
, first, the component
X
) is found using the cosine
XY
law:
A
= A
XY
A
Therefore: Nominal V
–Z AXIS
Y AXIS
(cosθXY) then
XYZ
= AXY (cosθX)
X
= 200 mV/g (A
PR
θxy
θx
Axy
) (cosθXY) cosθ
XYZ
Axyz
Ax
X
X AXIS
Figure 2c. A Vector Analysis of an Acceleration Acting Upon the ADXL05 in Three Dimensions
Note that an ideal sensor will react to forces along or at angles to its sensitive axis but will reject signals from its various trans­verse axes, i.e., those exactly 90° from the sensitive “X” axis. But even an ideal sensor will produce output signals if the trans­verse signals are not exactly 90° to the sensitive axis. An accel­eration that is acting on the sensor from a direction different from the sensitive axis will show up at the ADXL05 output at a reduced amplitude.
Table I shows the percentage signals resulting from various θ
X
angles. Note that small errors in alignment have a negligible effect on the output signal. A 1° error will only cause a 0.02% error in the signal. Note, however, that a signal coming 1° off of the transverse axis (i.e., 89° off the sensitive axis) will still con­tribute 1.7% of its signal to the output. Thus large transverse signals could cause output signals as large as the signals of interest. Table I may also be used to approximate the effect of the ADXL05’s internal errors due to misalignment of the die to the package. For example: a 1 degree sensor alignment error will allow 1.7% of a transverse signal to appear at the output.
Table I. Ideal Output Signals for Off Axis Applied Accelerations Disregarding Device Alignment and Transverse Sensitivity Errors
% of Signal Appearing Output in gs for a 5 g
θ
X
at Output Applied Acceleration
0 100% 5.000 (On Axis) 1° 99.98% 4.999 2° 99.94% 4.997 3° 99.86% 4.993 5° 99.62% 4.981 10° 98.48% 4.924 30° 86.60% 4.330 45° 70.71% 3.536 60° 50.00% 2.500 80° 17.36% 0.868 85° 8.72% 0.436 87° 5.25% 0.263 88° 3.49% 0.175 89° 1.7% 0.085 90° 0% 0.000 (Transverse Axis)
Mounting Fixture Resonances
A common source of error in acceleration sensing is resonance of the mounting fixture. For example, the circuit board that the ADXL05 mounts to may have resonant frequencies in the same range as the signals of interest. This could cause the signals measured to be larger than they really are. A common solution to this problem is to dampen these resonances by mounting the ADXL05 near a mounting post or by adding extra screws to hold the board more securely in place.
When testing the accelerometer in your end application, it is recommended that you test the application at a variety of fre­quencies in order to ensure that no major resonance problems exist (refer to Analog Devices Application Note AN-379).
Figure 3. 500 g Shock Overload Recovery. Top Trace, PCB Reference Accelerometer Output: 500 g/Vertical Division. Bottom Trace, ADXL05 Output at V
–6–
PR
REV. B
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