Alicat Scientific MS Specifications

Technical Data for Alicat MS Mass Flow Meters

0 – 0.5 sccm Full Scale through 0 – 5000 slpm Full Scale

Alicat MS instruments are built for use with certain aggressive gases.

Standard Specications (Contact Alicat for available options.)

Performance MS Mass Flow Meter

Accuracy at calibration conditions after tare ± (0.8% of Reading + 0.2% of Full Scale)

High Accuracy at calibration conditions after tare

Accuracy for Bidirectional Meters

at calibration conditions after tare

Repeatability ± 0.2% Full Scale

Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm

Operating Range / Turndown Ratio 1% to 100% Full Scale / 100:1 Turndown

Maximum Measurable Flow Rate up to 128% Full Scale (Gas Dependent)

Typical Response Time 10 ms (Adjustable)

Warm-up Time < 1 Second

Operating Conditions MS Mass Flow Meter

Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)

Operating Temperature −10 to +60 ºCelsius

Humidity Range (Non–Condensing) 0 to 100%

Maximum Internal Pressure (Static) 145 psig

Maximum Allowable Instantaneous Di󰀨erential

Pressure Across Device (Inlet to Outlet)

Proof Pressure 175 psig

Mounting Attitude Sensitivity None

Ingress Protection IP40

Wetted Materials

High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.

± (0.8% of reading + 0.2% of total span from positive full scale to negative full scale)

316LSS, FFKM (Kalrez) standard; Viton, EPDM, Buna, Neoprene as needed for some gases.
If your application demands a di󰀨erent material, please contact Alicat.

± (0.4% of Reading + 0.2% of Full Scale)

75 psid

Tel: [phone]

www.alicat.com/ms

Communications / Power MS Mass Flow Meter

Monochrome LCD or Color TFT Display with

Digital Output Signal1 Options

Analog Output Signal2 Options

Optional Secondary Analog Output Signal

Electrical Connection Options 8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking / 8pin M12

1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature

2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow,
Pressure or Temperature

integrated touchpad

2

Supply Voltage 7 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)

Supply Current 0.040 Amp (+ output current on 4-20 mA)

Features MS Mass Flow Meter

Gas Select™ 5.0 provides 130 Preloaded Gas Calibrations: See the following page for a

Gas Select™ 5.0

COMPOSER™

complete list.

If your application calls for a gas not on this list, please let us know. We can also calibrate to a wide
variety of complex gas mixtures involving up to eight gas constituents.

COMPOSER™ is a feature of Gas Select™ 5.0 that allows users to denes up to 20 user gas

compositions with up to 5 constituent gases per mix (www.alicat.com/composer).

Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature

RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet /

Modbus TCP/IP / EtherCAT

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Range Specic Specications

Full Scale Flow Mass Meter

0.5 sccm to 1 sccm 1.0

2 sccm to 50 sccm 1.0

100 sccm to 20 slpm 1.0 4.6”H x 2.4”W x 1.1”D 1/8” NPT Female

50 slpm 2.0

100 slpm 2.5

250 slpm 2.1 5.7”H x 4.0”W x 1.6”D 1/2” NPT Female

500 slpm 4.0

Standard Compatible Gas List for M-Series Meters

1. Lower Pressure Drops Available, please see our WHISPER-Series mass ow controllers at www.alicat.com/whisper.

2. See drawings for metric equivalents.

2. Compatible with Swagelok® tube, Parker®, face seal, push connect and compression adapter ttings. VCR and SAE connections upon request.

1000 slpm 6.0

1500 slpm 9.0

2000 slpm 5.0 6.0”H x 5.2”W x 2.9”D

3000 slpm 7.1 6.0”H x 5.2”W x 2.9”D 1-1/4” NPT Female

5000 slpm 3.4 7.0”H x 5.2”W x 3.9”D 2” NPT Female

Pressure Drop1 at FS Flow (psid)

venting to atmosphere

Mechanical Dimensions

4.4”H x 2.4”W x 1.1”D

5.1”H x 4.0”W x 1.6”D 1/4” NPT Female

5.7”H x 4.0”W x 1.6”D

2

Shipped with 316SS M-5 (10-32) Male Chemraz

O-ring face seal to 1/8” Female NPT ttings.

connection is available for 2000 slpm meters.)

Process Connections

M-5 (10-32) Female Thread

3/4” NPT Female

(A 1-1/4” NPT Female optional process

3

DOC-SPECS-MSMETERS Rev.11 1 December 6, 2017

Alicat Gas Select™ 5.0 Preloaded Gases

PURE NON-CORROSIVE GASES

Gas

Number

14 C2H2 Acetylene

0 Air Air

1 Ar Argon
16 i-C4H10 i-Butane
13 n-C4H10 n-Butane

4 CO2 Carbon Dioxide

3 CO Carbon Monoxide
60 D2 Deuterium

5 C2H6 Ethane
15 C2H4 Ethylene (Ethene)

7 He Helium

6 H2 Hydrogen
17 Kr Krypton

2 CH4 Methane
10 Ne Neon

8 N2 Nitrogen

9 N2O Nitrous Oxide
11 O2 Oxygen
12 C3H8 Propane
19 SF6 Sulfur Hexauoride
18 Xe Xenon

BREATHING GASES

Gas

Number

164 EAN-32 32% O2 / 68% N2
165 EAN 36% O2 / 64% N2
166 EAN-40 40% O2 / 60% N2
167 HeOx-20 20% O2 / 80% He
168 HeOx-21 21% O2 / 79% He
169 HeOx-30 30% O2 / 70% He
170 HeOx-40 40% O2 / 60% He
171 HeOx-50 50% O2 / 50% He
172 HeOx-60 60% O2 / 40% He
173 HeOx-80 80% O2 / 20% He
174 HeOx-99 99% O2 / 1% He
175 EA-40 Enriched Air-40% O2
176 EA-60 Enriched Air-60% O2
177 EA-80 Enriched Air-80% O2

178 Metabol

CHROMATOGRAPHY GASES

Gas

Number

29 P-5 5% CH4 / 95% Ar

206 P-10 10% CH4 90% Ar

WELDING GASES

Gas

Number

23 C-2 2% CO2 / 98% Ar
22 C-8 8% CO2 / 92% Ar
21 C-10 10% CO2 / 90% Ar

140 C-15 15% CO2 / 85% Ar
141 C-20 20% CO2 / 80% Ar

20 C-25 25% CO2 / 75% Ar

142 C-50 50% CO2 / 50% Ar

24 C-75 75% CO2 / 25% Ar
25 He-25 25% He / 75% Ar

143 He-50 50% He / 50% Ar

26 He-75 75% He / 25% Ar

144 He-90 90% He / 10% Ar

27 A1025 90% He / 7.5% Ar / 2.5% CO2
28 Star29

Short
Name

Short

Name

Short

Name

Short

Name

Long Name

Long Name

Metabolic Exhalant (16% O 2/

78.04% N2 / 5% CO2 / 0.96% Ar)

Long Name

Long Name

Stargon CS 90% Ar /

8% CO2 / 2% O2

PURE CORROSIVES*

Gas

Number

*Pure Corrosive gases are only available on
S-Series instruments that are compatible

with these gases.
Gas numbers 33 and 35 are not available on
controllers.

BIOREACTOR GASES

Gas

Number

145 Bio-5M 5% CH4 / 95% CO2
146 Bio-10M 10% CH4 / 90% CO2
147 Bio-15M 15% CH4 / 85% CO2
148 Bio-20M 20% CH4 / 80% CO2
149 Bio-25M 25% CH4 / 75% CO2
150 Bio-30M 30% CH4 / 70% CO2
151 Bio-35M 35% CH4 / 65% CO2
152 Bio-40M 40% CH4 / 60% CO2
153 Bio-45M 45% CH4 / 55% CO2
154 Bio-50M 50% CH4 / 50% CO2
155 Bio-55M 55% CH4 / 45% CO2
156 Bio-60M 60% CH4 /40% CO2
157 Bio-65M 65% CH4 /35% CO2
158 Bio-70M 70% CH4 / 30% CO2
159 Bio-75M 75% CH4 / 25% CO2
160 Bio-80M 80% CH4 / 20% CO2
161 Bio-85M 85% CH4 / 15% CO2
162 Bio-90M 90% CH4 / 10% CO2
163 Bio-95M 95% CH4 / 5% CO2

LASER GASES

Gas

Number

179 LG-4.5 4.5% CO2 / 13.5% N2 / 82% He
180 LG-6 6% CO2 / 14% N2 / 80% He
181 LG-7 7% CO2 / 14% N2 / 79% He
182 LG-9 9% CO2 / 15% N2 / 76% He
183 HeNe-9 9% Ne / 91% He

184 LG-9.4

O2 CONCENTRATOR GASES

Gas

Number

197 OCG-89 89% O2 / 7% N2 / 4% Ar
198 OCG-93 93% O2 / 3% N2 / 4% Ar
199 OCG-95 95% O2 / 1% N2 / 4% Ar

Short

Name
32 NH3 Ammonia
80 1Butene Butylene (1-Butene)

81 cButene
82 iButene Iso-Butene

83 tButene Trans-Butene
84 COS Carbonyl Sulde
33 Cl2 Chlorine
85 CH3OCH3 Dimethylether
34 H2S Hydrogen Sulfide (H2S)

31 NF3
30 NO NO (Nitric Oxide)

36 C3H6 Propylene (Propylene)
86 SiH4 Silane (SiH4)
35 SO2 Sulfur Dioxide

Short

Name

Short
Name

Short
Name

Long Name

Cis-Butene

(cis-2-butene)

NF3 (Nitrogen

Triuoride)

Long Name

Long Name

9.4% CO2 / 19.25% N2 /

71.35% He

Long Name

Tel: [phone]

www.alicat.com/ms

REFRIGERANTS*

Gas

Number

100 R-11 Trichlorouoromethane
101 R-115 Chloropentauoroethane
102 R-116 Hexauoroethane
103 R-124 Chlorotetrauoroethane
104 R-125 Pentauoroethane
105 R-134A Tetrauoroethane
106 R-14 Tetrauoromethane

107 R-142b Chlorodiuoroethane
108 R-143a Triuoroethane

109 R-152a Diuoroethane
110 R-22 Diuoromonochloromethane
111 R-23 Triuoromethane
112 R-32 Diuoromethane
113 RC-318 Octauorocyclobutane

114 R-404A

115 R-407C
116 R-410A 50% R-32 / 50% R-125

117 R-507A 50% R-125 / 50% R-143A

*Refrigerant gases are only available on S-Series
instruments that are compatible with these gases.

FUEL GASES

Gas

Number

185 Syn Gas-1

186 Syn Gas-2

187 Syn Gas-3
188 Syn Gas-4 83% H2 + 14% CO + 3% CH4
189 Nat Gas-1

190 Nat Gas-2

191 Nat Gas-3

192 Coal Gas

193 Endo 75% H2 + 25% N2
194 HHO 66.67% H2 / 33.33% O2

195 HD-5

196 HD-10

STACK GASES

Gas

Number

200 FG-1

201 FG-2

202 FG-3

203 FG-4

204 FG-5

205 FG-6

Short

Name

Short
Name

93% CH4 / 3% C2H6 / 1% C3H8 / 2%

95% CH4 / 3% C2H6 / 1% N2 / 1%

50% H2 / 35% CH4 / 10% CO / 5%

LPG 96.1% C3H8 / 1.5% C2H6 /

LPG 85% C3H8 / 10% C3H6 / 5%

Short
Name

2.5% O2 / 10.8% CO2 / 85.7% N2

2.9% O2 / 14% CO2 / 82.1% N2

3.7% O2 / 15% CO2 / 80.3% N2

7% O2 / 12% CO2 / 80% N2 /

10% O2 / 9.5% CO2 / 79.5% N2

Long Name

44% R-125 / 4% R-134A / 52%

R-143A

23% R-32 / 25% R-125 / 52%

R-134A

Long Name

40% H2 + 29% CO + 20% CO2 +

11% CH4

64% H2 + 28% CO + 1% CO2 +

7% CH4

70% H2 + 4% CO + 25% CO2 +

1% CH4

N2 / 1% CO2

95.2% CH4 / 2.5% C2H6 / 0.2%
C3H8 / 0.1% C4H10 / 1.3% N2 /

0.7% CO2

C2H4

0.4% C3H6 / 1.9% n-C4H10

n-C4H10

Long Name

/ 1% Ar

/ 1% Ar

/ 1% Ar

1% Ar

/ 1% Ar

13% O2 / 7% CO2 / 79% N2 /

1% Ar

CO2

DOC-SPECS-MSMETERS Rev.11 2 December 6, 2017